JP5188222B2 - Laser oscillator and laser processing apparatus - Google Patents

Laser oscillator and laser processing apparatus Download PDF

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JP5188222B2
JP5188222B2 JP2008067824A JP2008067824A JP5188222B2 JP 5188222 B2 JP5188222 B2 JP 5188222B2 JP 2008067824 A JP2008067824 A JP 2008067824A JP 2008067824 A JP2008067824 A JP 2008067824A JP 5188222 B2 JP5188222 B2 JP 5188222B2
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optical axis
housing
axis direction
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duct
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達也 山本
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Mitsubishi Electric Corp
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この発明は、例えば三軸直交型ＣＯ２レーザ発振器等のレーザ発振器、及びそのレーザ発振器を用いたレーザ加工装置に関するものである。 The present invention relates to a laser oscillator such as a three-axis orthogonal CO 2 laser oscillator and a laser processing apparatus using the laser oscillator.

従来のレーザ発振器では、筐体内に２組の発振部が設置されている。これらの発振部は、ガス流方向の温度分布に伴う光軸の曲がりを抑制するため、レーザ媒質ガスの流れが互いに逆向きとなるように配置されている。また、筐体の光軸方向両端部には、複数の全反射鏡及び部分反射鏡が設けられている。発振部で発生された光は、これらの鏡で繰り返し反射され筐体内を往復することによりレーザ発振し、部分反射鏡から出力される。さらに、各鏡の前には、レーザビームの形状を規定するためのアパーチャが設けられたアパーチャ板が配置されている。   In a conventional laser oscillator, two sets of oscillating units are installed in a casing. These oscillating units are arranged so that the flow of the laser medium gas is opposite to each other in order to suppress the bending of the optical axis accompanying the temperature distribution in the gas flow direction. A plurality of total reflection mirrors and partial reflection mirrors are provided at both ends in the optical axis direction of the casing. The light generated by the oscillating unit is repeatedly reflected by these mirrors, reciprocates in the housing, oscillates laser, and is output from the partially reflecting mirror. Further, an aperture plate provided with an aperture for defining the shape of the laser beam is disposed in front of each mirror.

各鏡の角度を調整する際には、部分反射鏡から可視光レーザを入力し、アパーチャに対する可視光レーザの位置を観察する。即ち、可視光レーザの中心がアパーチャの中心と一致するように鏡の角度を調整する。このため、筐体の光軸方向両端部には、可視光レーザを観察するための筐体内確認用窓が設けられている。   When adjusting the angle of each mirror, a visible light laser is input from the partial reflection mirror, and the position of the visible light laser with respect to the aperture is observed. That is, the mirror angle is adjusted so that the center of the visible light laser coincides with the center of the aperture. Therefore, in-housing confirmation windows for observing the visible light laser are provided at both ends in the optical axis direction of the housing.

また、２組の発振部のレーザ媒質ガスの流れが互いに逆向きとなっているレーザ発振器では、レーザ媒質ガスを案内するダクトが、筐体内確認用窓とそれに対向するアパーチャ板との間に位置しているため、ダクトの端面に観察用鏡が設けられており、筐体内確認用窓から観察用鏡を介して、その筐体内確認用窓と同じ側に位置するアパーチャ板を観察するようになっている（例えば、特許文献１参照）。   In a laser oscillator in which the laser medium gas flows in the two sets of oscillation parts are opposite to each other, the duct for guiding the laser medium gas is positioned between the confirmation window in the housing and the aperture plate facing it. Therefore, an observation mirror is provided on the end face of the duct so that the aperture plate located on the same side as the confirmation window in the housing is observed from the confirmation window in the housing through the observation mirror. (For example, refer to Patent Document 1).

特開２００３−３３８６４７号公報JP 2003-338647 A

上記のような従来のレーザ発振器では、筐体内確認用窓から同じ側のアパーチャ板を観察しつつ、その筐体内確認用窓とは反対側に位置する鏡の角度を調整する必要があるため、一人で作業を行う場合、時間がかかる上、誤差が生じ易い。また、２人の作業者で調整を行う場合、人件費がかかる上、鏡を調整する量とそれに伴って可視光レーザが動く量との対応が把握しにくく、この場合も誤差を生じ易い。   In the conventional laser oscillator as described above, it is necessary to adjust the angle of the mirror located on the side opposite to the confirmation window in the casing while observing the aperture plate on the same side from the confirmation window in the casing. When working alone, it takes time and errors are likely to occur. Further, when adjustment is performed by two workers, labor costs are increased, and it is difficult to grasp the correspondence between the amount of adjustment of the mirror and the amount of movement of the visible light laser, and in this case, an error is likely to occur.

この発明は、上記のような課題を解決するためになされたものであり、ガス流方向の温度分布に伴う光軸の曲がりを抑制しつつ、鏡の角度調整を容易に精度良く行うことができるレーザ発振器、及びそのレーザ発振器を用いたレーザ加工装置を得ることを目的とする。   The present invention has been made to solve the above-described problems, and can easily and accurately adjust the angle of the mirror while suppressing the bending of the optical axis accompanying the temperature distribution in the gas flow direction. It is an object to obtain a laser oscillator and a laser processing apparatus using the laser oscillator.

この発明に係るレーザ発振器は、互いに対向する第１及び第２の光軸方向端部を有し、レーザ媒質ガスが封入される筐体、互いに対向する一対の第１の放電電極と、光軸の一側に設けられレーザ媒質ガスの流路を形成する第１のダクトとを有し、筐体内に設けられている第１の発振部、互いに対向する一対の第２の放電電極と、光軸の他側に設けられレーザ媒質ガスの流路を形成する第２のダクトとを有し、第１の発振部に対して光軸方向に並べて筐体内に設けられている第２の発振部、第１及び第２の光軸方向端部の近傍に設けられ、第１及び第２の発振部で発生された光を反射して筐体内で往復させる複数の鏡、及び第１及び第２の光軸方向端部の近傍に設けられ、レーザビームの形状を規定するためのアパーチャがそれぞれ設けられている複数のアパーチャ部材を備え、第１の光軸方向端部には、第１の筐体内確認用窓が設けられており、第２の光軸方向端部には、第２の筐体内確認用窓が設けられており、第１及び第２の筐体内確認用窓とそれらとは光軸方向の反対側に配置されたアパーチャ部材との間に位置する第１及び第２のダクトの光軸方向の端部には、第１及び第２の透明部材が設けられている。   A laser oscillator according to the present invention has first and second optical axis direction ends facing each other, a casing in which a laser medium gas is sealed, a pair of first discharge electrodes facing each other, and an optical axis A first duct that forms a flow path of a laser medium gas provided on one side of the first oscillating unit, a first oscillating unit provided in the housing, a pair of second discharge electrodes facing each other, and light And a second oscillating portion provided in the housing side by side in the optical axis direction with respect to the first oscillating portion. A plurality of mirrors provided in the vicinity of the first and second end portions in the optical axis direction, for reflecting the light generated by the first and second oscillating units and reciprocating in the housing; and the first and second Provided in the vicinity of the end of the optical axis direction, and each has an aperture for defining the shape of the laser beam. The first optical axis direction end portion is provided with a first in-case confirmation window, and the second optical axis direction end portion is provided in the second optical case confirmation portion. The first and second ducts located between the first and second confirmation windows in the housing and the aperture member disposed on the opposite side of the optical axis direction are provided. First and second transparent members are provided at the end in the axial direction.

この発明のレーザ発振器は、第１及び第２の筐体内確認用窓とそれらに対して光軸方向の反対側に配置されたアパーチャ部材との間に位置する第１及び第２のダクトの光軸方向の端部に、第１及び第２の透明部材を設けたので、第１及び第２の発振部におけるレーザ媒質ガスの流れを互いに対向させた方式であっても、筐体内を確認する位置と鏡を調整する位置とを近くすることができ、従って、ガス流方向の温度分布に伴う光軸の曲がりを抑制しつつ、鏡の角度調整を容易に精度良く行うことができる。   In the laser oscillator according to the present invention, the light of the first and second ducts positioned between the first and second confirmation windows in the housing and the aperture member disposed on the opposite side of the optical axis direction with respect to them. Since the first and second transparent members are provided at the end in the axial direction, the inside of the housing is checked even in a system in which the flow of the laser medium gas in the first and second oscillation units is opposed to each other. The position of the mirror and the position of adjusting the mirror can be made close. Therefore, the angle adjustment of the mirror can be easily and accurately performed while suppressing the bending of the optical axis accompanying the temperature distribution in the gas flow direction.

以下、この発明を実施するための最良の形態について、図面を参照して説明する。
実施の形態１．
図１はこの発明の実施の形態１による三軸直交型ＣＯ２レーザ発振器を光軸に対して横から見た構成図、図２は図１のレーザ発振器を光軸に対して上から見た構成図、図３は図１のレーザ発振器を光軸方向から見た構成図である。 The best mode for carrying out the present invention will be described below with reference to the drawings.
Embodiment 1 FIG.
1 is a configuration diagram of a three-axis orthogonal CO 2 laser oscillator according to Embodiment 1 of the present invention viewed from the side with respect to the optical axis, and FIG. 2 is a diagram of the laser oscillator of FIG. 1 viewed from above with respect to the optical axis. FIG. 3 is a configuration diagram of the laser oscillator of FIG. 1 viewed from the optical axis direction.

図において、筐体１内には、レーザ媒質ガスが封入される。また、筐体１は、第１の光軸方向端部１ａと、第１の光軸方向端部１ａに対向する第２の光軸方向端部１ｂと、第１の筐体側面部１ｃと、第１の筐体側面部１ｃに対向する第２の筐体側面部１ｄとを有している。第１及び第２の光軸方向端部１ａ，１ｂには、外部から筐体１内を目視確認するための第１及び第２の筐体内確認用窓２，３が取り付けられている。   In the figure, a laser medium gas is sealed in the housing 1. Further, the housing 1 includes a first optical axis direction end 1a, a second optical axis direction end 1b facing the first optical axis direction end 1a, and a first housing side surface 1c. And a second housing side surface portion 1d facing the first housing side surface portion 1c. First and second in-case confirmation windows 2 and 3 for visually confirming the inside of the case 1 from the outside are attached to the first and second end portions 1a and 1b in the optical axis direction.

筐体１内には、レーザ媒質ガスを励起させて光を発生させる第１及び第２の発振部４，５が収容されている。これら第１及び第２の発振部４，５は、光軸方向に並べて配置されている。   Housed in the housing 1 are first and second oscillating units 4 and 5 that generate light by exciting a laser medium gas. These first and second oscillating units 4 and 5 are arranged side by side in the optical axis direction.

第１の発振部４は、上下方向に互いに対向する一対の第１の放電電極６と、レーザ媒質ガスを第１の放電電極６間に循環させるための一対の第１のブロア７と、光軸２０ａ〜２０ｃの一側（図２の上側）に設けられレーザ媒質ガスの流路を形成する金属製の第１のダクト８と、第１のダクト８の出口と第１のブロア７との間に設けられ、第１の放電電極６間で加熱されたレーザ媒質ガスを冷却する第１の熱交換器９とを有している。   The first oscillation unit 4 includes a pair of first discharge electrodes 6 facing each other in the vertical direction, a pair of first blowers 7 for circulating the laser medium gas between the first discharge electrodes 6, and light A first duct 8 made of metal that forms a laser medium gas flow path provided on one side of the shafts 20a to 20c (the upper side in FIG. 2), an outlet of the first duct 8, and a first blower 7 And a first heat exchanger 9 for cooling the laser medium gas heated between the first discharge electrodes 6.

第２の発振部５は、上下方向に互いに対向する一対の第２の放電電極１０と、レーザ媒質ガスを第２の放電電極１０間に循環させるための一対の第２のブロア１１と、光軸２０ａ〜２０ｃの他側（図２の下側）に設けられレーザ媒質ガスの流路を形成する金属製の第２のダクト１２と、第２のダクト１２の出口と第２のブロア１１との間に設けられ、第２の放電電極１０間で加熱されたレーザ媒質ガスを冷却する第２の熱交換器（図示せず）とを有している。   The second oscillation unit 5 includes a pair of second discharge electrodes 10 facing each other in the vertical direction, a pair of second blowers 11 for circulating the laser medium gas between the second discharge electrodes 10, and light. A second duct 12 made of metal that is provided on the other side of the shafts 20a to 20c (lower side in FIG. 2) and forms a flow path of the laser medium gas, an outlet of the second duct 12, and a second blower 11 And a second heat exchanger (not shown) for cooling the laser medium gas heated between the second discharge electrodes 10.

第１及び第２の発振部４，５は、互いに同一の構成を有しており、逆向きに設置されている。これにより、第１及び第２の発振部４，５では、レーザ媒質ガスの流れの方向が互いに逆向きになっている。   The first and second oscillators 4 and 5 have the same configuration and are installed in opposite directions. As a result, in the first and second oscillating units 4 and 5, the directions of the laser medium gas flows are opposite to each other.

筐体１外の第１及び第２の光軸方向端部１ａ，１ｂ近傍には、第１及び第２の発振部４，５で発生された光を反射して筐体１内で往復させる複数の鏡、即ち共振器ミラーが設けられている。これらの共振器ミラーには、第１の光軸方向端部１ａ近傍に設けられた第１の全反射鏡１３、第２の光軸方向端部１ｂ近傍に設けられた第２及び第３の全反射鏡１４，１５、及び第１の光軸方向端部１ａ近傍に設けられた部分反射鏡１６が含まれている。   In the vicinity of the first and second optical axis direction end portions 1 a and 1 b outside the housing 1, the light generated by the first and second oscillation units 4 and 5 is reflected and reciprocated in the housing 1. A plurality of mirrors, i.e. resonator mirrors, are provided. These resonator mirrors include a first total reflection mirror 13 provided in the vicinity of the first optical axis direction end portion 1a, and a second and third mirror provided in the vicinity of the second optical axis direction end portion 1b. The total reflection mirrors 14 and 15 and the partial reflection mirror 16 provided in the vicinity of the first optical axis direction end 1a are included.

第１及び第２の発振部４，５で発生された光は、これらの鏡１３〜１６で繰り返し反射され、Ｚ字形の共振光路に沿って筐体１内を往復することによりレーザ発振し、部分反射鏡１６から出力される。   The light generated in the first and second oscillating units 4 and 5 is repeatedly reflected by these mirrors 13 to 16 and oscillates by reciprocating in the housing 1 along the Z-shaped resonant optical path, Output from the partial reflecting mirror 16.

筐体１内で発生された光の経路には、第１及び第２のアパーチャ部材１７，１８が設けられている。具体的には、第１のアパーチャ部材１７は、筐体１内の第１の光軸方向端部１ａ近傍で第１の全反射鏡１３及び部分反射鏡１６の前方に設けられている。また、第２のアパーチャ部材１８は、筐体１内の第２の光軸方向端部１ｂ近傍で第２及び第３の全反射鏡１４，１５の前方に設けられている。   First and second aperture members 17 and 18 are provided in the path of light generated in the housing 1. Specifically, the first aperture member 17 is provided in front of the first total reflection mirror 13 and the partial reflection mirror 16 in the vicinity of the first optical axis direction end portion 1 a in the housing 1. Further, the second aperture member 18 is provided in front of the second and third total reflection mirrors 14 and 15 in the vicinity of the second optical axis direction end portion 1 b in the housing 1.

第１のアパーチャ部材１７には、レーザビームの形状を規定するための２つの円形のアパーチャ１７ａ，１７ｂが上下に並べて設けられている。同様に、第２のアパーチャ部材１８にも、２つの円形のアパーチャ１８ａ，１８ｂが上下に並べて設けられている。   The first aperture member 17 is provided with two circular apertures 17a and 17b arranged vertically to define the shape of the laser beam. Similarly, the second aperture member 18 is also provided with two circular apertures 18a and 18b arranged one above the other.

第１の筐体内確認用窓２は、光軸２０ａ〜２０ｃに対して第２のダクト１２と同じ側に配置されている。第１の筐体内確認用窓２とそれとは光軸方向の反対側に配置された第２のアパーチャ部材１８との間に位置する第２のダクト１２の光軸方向の端部には、第１の開口が設けられており、この第１の開口には第１の透明部材２１が設けられている。第１の筐体内確認用窓２から筐体１内を目視すると、図２の矢印２３に示すように、第１の透明部材２１を通して第２のアパーチャ部材１８を観察することができる。   The first in-housing confirmation window 2 is arranged on the same side as the second duct 12 with respect to the optical axes 20a to 20c. At the end in the optical axis direction of the second duct 12 located between the first confirmation window 2 in the housing 2 and the second aperture member 18 arranged on the opposite side to the optical axis direction, 1 opening is provided, and the first transparent member 21 is provided in the first opening. When the inside of the housing 1 is viewed through the first housing confirmation window 2, the second aperture member 18 can be observed through the first transparent member 21 as indicated by an arrow 23 in FIG. 2.

第２の筐体内確認用窓３は、光軸２０ａ〜２０ｃに対して第１のダクト８と同じ側に配置されている。第２の筐体内確認用窓３とそれとは光軸方向の反対側に配置された第１のアパーチャ部材１７との間に位置する第１のダクト８の光軸方向の端部には、第２の開口が設けられており、この第２の開口には第２の透明部材２２が設けられている。第２の筐体内確認用窓３から筐体１内を目視すると、図２の矢印２４に示すように、第２の透明部材２２を通して第１のアパーチャ部材１７を観察することができる。   The second casing confirmation window 3 is arranged on the same side as the first duct 8 with respect to the optical axes 20a to 20c. At the end in the optical axis direction of the first duct 8 located between the second confirmation window 3 in the housing and the first aperture member 17 disposed on the opposite side to the optical axis direction, Two openings are provided, and a second transparent member 22 is provided in the second opening. When the inside of the housing 1 is viewed through the second housing confirmation window 3, the first aperture member 17 can be observed through the second transparent member 22 as indicated by an arrow 24 in FIG. 2.

第１及び第２の透明部材２１，２２は、例えば石英ガラス、ソーダガラス、アクリル又はポリカーボネートにより構成されている。   The first and second transparent members 21 and 22 are made of, for example, quartz glass, soda glass, acrylic, or polycarbonate.

次に、上記のようなレーザ発振器における共振器ミラーの角度調整方法について説明する。図４は図１のレーザ発振器の共振器ミラーの角度調整中の状態を光軸に対して横から見た構成図、図５は図４のレーザ発振器を光軸に対して上から見た構成図である。   Next, a method for adjusting the angle of the resonator mirror in the laser oscillator as described above will be described. FIG. 4 is a configuration diagram of the state of adjusting the angle of the resonator mirror of the laser oscillator of FIG. 1 as viewed from the side with respect to the optical axis, and FIG. 5 is a configuration of the laser oscillator of FIG. FIG.

共振器ミラーの角度調整を行う場合、可視光レーザ光源２５を部分反射鏡１６に対向して配置する。そして、例えばＨｅＮｅレーザ等の可視光レーザビーム２６を、部分反射鏡１６から筐体１内に入射し、第１のアパーチャ部材１７の下側のアパーチャ１７ｂを通過させ、第２のアパーチャ部材１８の下側のアパーチャ１８ｂに照射する。このとき、可視光レーザビーム２６に拡がりを持たせ、図６に示すように、可視光レーザビーム２６の径がアパーチャ１８ｂの径よりも少し大きくなるようにする。   When adjusting the angle of the resonator mirror, the visible light laser light source 25 is disposed to face the partial reflection mirror 16. Then, for example, a visible light laser beam 26 such as a HeNe laser enters the housing 1 from the partial reflection mirror 16, passes through the lower aperture 17 b of the first aperture member 17, and passes through the second aperture member 18. Irradiate the lower aperture 18b. At this time, the visible light laser beam 26 is spread so that the diameter of the visible light laser beam 26 is slightly larger than the diameter of the aperture 18b as shown in FIG.

この状態で、第１の筐体内確認用窓２から第２のアパーチャ部材１８を観察し、アパーチャ１８ｂと可視光レーザビーム２６の輪郭とが同心円となるように、可視光レーザ光源２５の位置及び角度を調整する。これにより、可視光レーザビーム２６の光軸が図１の光軸２０ａと一致する。   In this state, the second aperture member 18 is observed from the first confirmation window 2 in the casing, and the position of the visible light laser light source 25 and the contour of the visible light laser beam 26 are concentric with each other. Adjust the angle. As a result, the optical axis of the visible light laser beam 26 coincides with the optical axis 20a of FIG.

次に、アパーチャ１８ｂを通過し第３の全反射鏡１５で反射された可視光レーザビーム２６を、第１のアパーチャ部材１７の上側のアパーチャ１７ａに照射する。このときも、可視光レーザビーム２６が拡がりを持っているため、図７に示すように、可視光レーザビーム２６の径がアパーチャ１７ａの径よりも少し大きくなる。   Next, the upper side aperture 17 a of the first aperture member 17 is irradiated with the visible light laser beam 26 that has passed through the aperture 18 b and reflected by the third total reflection mirror 15. Also at this time, since the visible light laser beam 26 has a spread, as shown in FIG. 7, the diameter of the visible light laser beam 26 is slightly larger than the diameter of the aperture 17a.

この状態で、第２の筐体内確認用窓３から第１のアパーチャ部材１７を観察し、アパーチャ１７ａと可視光レーザビーム２６の輪郭とが同心円となるように、第３の全反射鏡１５の角度を調整する。これにより、可視光レーザビーム２６の光軸が図１の光軸２０ｂと一致する。   In this state, the first aperture member 17 is observed from the second confirmation window 3 in the housing, and the third total reflection mirror 15 is arranged so that the aperture 17a and the contour of the visible light laser beam 26 are concentric. Adjust the angle. Thereby, the optical axis of the visible light laser beam 26 coincides with the optical axis 20b of FIG.

次に、アパーチャ１７ａを通過し第１の全反射鏡１３で反射された可視光レーザビーム２６を、第２のアパーチャ部材１８の上側のアパーチャ１８ａに照射する。そして、第１の筐体内確認用窓２から第２のアパーチャ部材１８を観察し、アパーチャ１８ａと可視光レーザビーム２６の輪郭とが同心円となるように、第１の全反射鏡１３の角度を調整する。これにより、可視光レーザビーム２６の光軸が図１の光軸２０ｃと一致する。   Next, the visible light laser beam 26 that has passed through the aperture 17 a and reflected by the first total reflection mirror 13 is irradiated onto the upper aperture 18 a of the second aperture member 18. Then, the second aperture member 18 is observed from the first confirmation window 2 in the housing, and the angle of the first total reflection mirror 13 is set so that the aperture 18a and the contour of the visible light laser beam 26 are concentric. adjust. Thereby, the optical axis of the visible light laser beam 26 coincides with the optical axis 20c of FIG.

この後、第２の全反射鏡１４の角度を調整し、第２の全反射鏡１４からの反射光が可視光レーザ光源２５の出射部に戻るようにする。このようにして、共振器ミラーのうちの全反射鏡１３〜１５の角度が調整される。部分反射鏡１６の角度は、レーザ発振をさせ、出力が最も高くなるように調整する。   Thereafter, the angle of the second total reflection mirror 14 is adjusted so that the reflected light from the second total reflection mirror 14 returns to the emission part of the visible light laser light source 25. In this way, the angles of the total reflection mirrors 13 to 15 among the resonator mirrors are adjusted. The angle of the partial reflection mirror 16 is adjusted so that laser oscillation is performed and the output becomes the highest.

このようなレーザ発振器では、第１及び第２の筐体内確認用窓２，３とそれらに対向するアパーチャ部材１８，１７との間に位置する第１及び第２のダクト８，１２の光軸方向の端部に、第１及び第２の透明部材２１，２２を設けたので、第１及び第２の発振部４，５におけるレーザ媒質ガスの流れを互いに対向させた方式であるにも拘わらず、筐体１内を確認する位置と全反射鏡１３〜１５を調整する位置とを近くすることができる。   In such a laser oscillator, the optical axes of the first and second ducts 8 and 12 positioned between the first and second in-housing confirmation windows 2 and 3 and the aperture members 18 and 17 facing them. Since the first and second transparent members 21 and 22 are provided at the ends in the direction, the laser medium gas flows in the first and second oscillation units 4 and 5 are opposed to each other. The position for checking the inside of the housing 1 and the position for adjusting the total reflection mirrors 13 to 15 can be made closer.

従って、作業者は、アパーチャ１８ｂ，１７ａ，１８ａに照射された可視光レーザビーム２６の輪郭を確認しながら可視光レーザ光源２５及び全反射鏡１３〜１５の調整を１人で行うことができる。即ち、第１及び第２のダクト８，１２の機能を保ったまま、ガス流方向の温度分布に伴う光軸の曲がりを抑制しつつ、全反射鏡１３〜１５の角度調整を容易に精度良く行うことができる。   Therefore, the operator can adjust the visible light laser light source 25 and the total reflection mirrors 13 to 15 by one person while confirming the outline of the visible light laser beam 26 irradiated to the apertures 18b, 17a, and 18a. That is, while maintaining the functions of the first and second ducts 8 and 12, the angle adjustment of the total reflection mirrors 13 to 15 can be easily and accurately performed while suppressing the bending of the optical axis accompanying the temperature distribution in the gas flow direction. It can be carried out.

実施の形態２．
次に、図８はこの発明の実施の形態２による三軸直交型ＣＯ２レーザ発振器を光軸に対して横から見た構成図、図９は図８のレーザ発振器を光軸に対して上から見た構成図である。 Embodiment 2. FIG.
Next, FIG. 8 is a configuration diagram of a three-axis orthogonal CO 2 laser oscillator according to the second embodiment of the present invention viewed from the side with respect to the optical axis, and FIG. 9 is a plan view of the laser oscillator of FIG. It is the block diagram seen from.

図において、第１の筐体側面部１ｃの第１及び第２の発振部４，５間に対向する部分には、第１の筐体内確認用窓３１が設けられている。第２の筐体側面部１ｄの第１及び第２の発振部４，５間に対向する部分には、第２の筐体内確認用窓３２が設けられている。   In the figure, a first in-housing confirmation window 31 is provided in a portion of the first housing side face 1c that faces between the first and second oscillators 4 and 5. A second in-housing confirmation window 32 is provided in a portion of the second housing side face portion 1d that faces between the first and second oscillators 4 and 5.

筐体１内には、第１の筐体内確認用窓３１と第１のダクト８の光軸方向の端部とに斜めに対向する第１の観察用鏡３３と、第２の筐体内確認用窓３２と第２のダクト１２の光軸方向の端部とに斜めに対向する第２の観察用鏡３４とが設けられている。   In the housing 1, a first observation mirror 33 that obliquely opposes the first in-housing confirmation window 31 and the end of the first duct 8 in the optical axis direction, and a second in-housing confirmation A second observation mirror 34 that obliquely opposes the working window 32 and the end of the second duct 12 in the optical axis direction is provided.

第１の観察用鏡３３に対向する第１のダクト８の端部には、第１の透明部材３５が設けられている。第２の観察用鏡３４に対向する第２のダクト１２の端部には、第２の透明部材３６が設けられている。   A first transparent member 35 is provided at the end of the first duct 8 facing the first observation mirror 33. A second transparent member 36 is provided at the end of the second duct 12 facing the second observation mirror 34.

第１の筐体内確認用窓３１から筐体１内を目視すると、図９の矢印３７に示すように、第１の観察用鏡３３及び第１の透明部材３５を通して第１のアパーチャ部材１７を観察することができる。また、第２の筐体内確認用窓３２から筐体１内を目視すると、図９の矢印３８に示すように、第２の観察用鏡３４及び第２の透明部材３６を通して第２のアパーチャ部材１８を観察することができる。他の構成は、実施の形態１と同様である。   When the inside of the housing 1 is viewed through the first housing confirmation window 31, the first aperture member 17 is passed through the first observation mirror 33 and the first transparent member 35 as indicated by an arrow 37 in FIG. 9. Can be observed. When the inside of the housing 1 is viewed through the second housing confirmation window 32, the second aperture member passes through the second observation mirror 34 and the second transparent member 36 as shown by an arrow 38 in FIG. 18 can be observed. Other configurations are the same as those in the first embodiment.

図１０は図８のレーザ発振器の共振器ミラーの角度調整中の状態を光軸に対して上から見た構成図である。実施の形態２の共振器ミラーの角度調整方法では、アパーチャ部材１７，１８の観察を行う位置が実施の形態１と異なっている。   FIG. 10 is a configuration diagram of the state in which the angle of the resonator mirror of the laser oscillator of FIG. 8 is being adjusted as viewed from above with respect to the optical axis. In the resonator mirror angle adjusting method of the second embodiment, the position at which the aperture members 17 and 18 are observed is different from that of the first embodiment.

即ち、可視光レーザ光源２５により、第２のアパーチャ部材１８に照射された可視光レーザビーム２６は、矢印３８に沿って、第２の筐体内確認用窓３２から第２の観察用鏡３４及び第２の透明部材３６を介して観察する。また、第１のアパーチャ部材１７に照射された可視光レーザビーム２６は、矢印３７に沿って、第１の筐体内確認用窓３１の外側から第１の観察用鏡３３及び第１の透明部材３５を介して観察する。   That is, the visible light laser beam 26 applied to the second aperture member 18 by the visible light laser light source 25 passes through the second observation mirror 34 and the second observation mirror 34 along the arrow 38. Observation is performed through the second transparent member 36. Further, the visible light laser beam 26 irradiated to the first aperture member 17 is, along the arrow 37, the first observation mirror 33 and the first transparent member from the outside of the first housing confirmation window 31. Observe through 35.

この場合、共振器ミラーの角度調整とアパーチャ部材１７，１８の確認とを同時に行うことはできない。しかし、アパーチャ部材１７，１８を確認する位置とアパーチャ板１７，１８と間の距離が短いため、アパーチャ部材１７，１８をよりはっきり確認でき、共振器ミラーの角度を精度良く調整できる。即ち、ガス流方向の温度分布に伴う光軸の曲がりを抑制しつつ、全反射鏡１３〜１５の角度調整を容易に精度良く行うことができる。   In this case, the angle adjustment of the resonator mirror and the confirmation of the aperture members 17 and 18 cannot be performed simultaneously. However, since the distance between the position where the aperture members 17 and 18 are confirmed and the aperture plates 17 and 18 is short, the aperture members 17 and 18 can be more clearly confirmed, and the angle of the resonator mirror can be adjusted with high accuracy. That is, the angle adjustment of the total reflection mirrors 13 to 15 can be easily and accurately performed while suppressing the bending of the optical axis accompanying the temperature distribution in the gas flow direction.

なお、実施の形態１、２に示したようなレーザ発振器は、部分反射鏡１６から出射されたレーザ光を被加工物に照射して加工を行うレーザ加工装置に用いることができる。   The laser oscillator as shown in the first and second embodiments can be used in a laser processing apparatus that performs processing by irradiating a workpiece with laser light emitted from the partial reflection mirror 16.

この発明の実施の形態１による三軸直交型ＣＯ２レーザ発振器を光軸に対して横から見た構成図である。Is a structural view seen from the side with respect to the optical axis a three-axis orthogonal type CO 2 laser oscillator according to a first embodiment the present invention. 図１のレーザ発振器を光軸に対して上から見た構成図である。It is the block diagram which looked at the laser oscillator of FIG. 1 from the top with respect to the optical axis. 図１のレーザ発振器を光軸方向から見た構成図である。It is the block diagram which looked at the laser oscillator of FIG. 1 from the optical axis direction. 図１のレーザ発振器の共振器ミラーの角度調整中の状態を光軸に対して横から見た構成図である。FIG. 2 is a configuration diagram of a state in which the angle of a resonator mirror of the laser oscillator of FIG. 1 is being adjusted as viewed from the side with respect to an optical axis. 図４のレーザ発振器を光軸に対して上から見た構成図である。FIG. 5 is a configuration diagram of the laser oscillator of FIG. 4 as viewed from above with respect to the optical axis. 図４の第２のアパーチャ部材の下側のアパーチャに可視光レーザビームが照射された状態を示す正面図である。FIG. 5 is a front view showing a state in which a visible light laser beam is irradiated on the lower aperture of the second aperture member of FIG. 4. 図４の第１のアパーチャ部材の上側のアパーチャに可視光レーザビームが照射された状態を示す正面図である。FIG. 5 is a front view showing a state in which a visible light laser beam is irradiated on the upper aperture of the first aperture member of FIG. 4. この発明の実施の形態２による三軸直交型ＣＯ２レーザ発振器を光軸に対して横から見た構成図である。Is a structural view seen from the side with respect to the optical axis a three-axis orthogonal type CO 2 laser oscillator according to Embodiment 2 of the present invention. 図８のレーザ発振器を光軸に対して上から見た構成図である。It is the block diagram which looked at the laser oscillator of FIG. 8 from the top with respect to the optical axis. 図８のレーザ発振器の共振器ミラーの角度調整中の状態を光軸に対して上から見た構成図である。FIG. 9 is a configuration diagram of a state in which the angle of the resonator mirror of the laser oscillator of FIG. 8 is being adjusted as viewed from above with respect to the optical axis.

符号の説明Explanation of symbols

１ 筐体、１ａ 第１の光軸方向端部、１ｂ 第２の光軸方向端部、１ｃ 第１の筐体側面部、１ｄ 第２の筐体側面部、２，３１ 第１の筐体内確認用窓、３，３２ 第２の筐体内確認用窓、４ 第１の発振部、５ 第２の発振部、６ 第１の放電電極、８ 第１のダクト、１０ 第２の放電電極、１２ 第２のダクト、１３ 第１の全反射鏡、１４ 第２の全反射鏡、１５ 第３の全反射鏡、１６ 部分反射鏡、１７ 第１のアパーチャ部材、１７ａ，１７ｂ，１８ａ，１８ｂ アパーチャ、１８ 第２のアパーチャ部材、２１，３５ 第１の透明部材、２２，３６ 第２の透明部材、３３ 第１の観察用鏡、３４ 第２の観察用鏡。   DESCRIPTION OF SYMBOLS 1 Case, 1a 1st optical-axis direction edge part, 1b 2nd optical-axis direction edge part, 1c 1st housing | casing side surface part, 1d 2nd housing | casing side surface part, 2,31 In 1st housing | casing Confirmation window, 3, 32 Confirmation window in second housing, 4 1st oscillation part, 5 2nd oscillation part, 6 1st discharge electrode, 8 1st duct, 10 2nd discharge electrode, 12 Second duct, 13 First total reflection mirror, 14 Second total reflection mirror, 15 Third total reflection mirror, 16 Partial reflection mirror, 17 First aperture member, 17a, 17b, 18a, 18b Aperture , 18 2nd aperture member, 21, 35 1st transparent member, 22, 36 2nd transparent member, 33 1st observation mirror, 34 2nd observation mirror.

Claims (4)

互いに対向する第１及び第２の光軸方向端部を有し、レーザ媒質ガスが封入される筐体、
互いに対向する一対の第１の放電電極と、光軸に対して垂直方向に位置し、ガス流方向において上記第１の放電電極よりも下流側に設けられ、上記レーザ媒質ガスが光軸と垂直方向に流れる流路を形成する第１のダクトとを有し、上記筐体内に設けられている第１の発振部、
互いに対向する一対の第２の放電電極と、光軸に対して垂直方向に位置し、ガス流方向において上記第２の放電電極よりも下流側で上記筐体内光軸に対して上記第１の発振部の反対側に設けられ、上記レーザ媒質ガスが光軸と垂直方向に流れる流路を形成する第２のダクトとを有し、上記第１の発振部に対して光軸方向に並べて上記筐体内に設けられている第２の発振部、
上記第１及び第２の光軸方向端部の近傍に設けられ、上記第１及び第２の発振部で発生された光を反射して上記筐体内で往復させる複数の鏡、及び
上記第１及び第２の光軸方向端部の近傍に設けられ、レーザビームの形状を規定するためのアパーチャがそれぞれ設けられている複数のアパーチャ部材
を備え、
上記第１の光軸方向端部には、第１の筐体内確認用窓が設けられており、
上記第２の光軸方向端部には、第２の筐体内確認用窓が設けられており、
上記第１及び第２の筐体内確認用窓とそれらとは光軸方向の反対側に配置された上記アパーチャ部材との間に位置する上記第１及び第２のダクトの光軸方向の端部には、第１及び第２の透明部材が設けられていることを特徴とするレーザ発振器。 A housing having first and second optical axis direction ends facing each other and enclosing a laser medium gas;
A pair of first discharge electrodes facing each other, and positioned in a direction perpendicular to the optical axis, provided downstream of the first discharge electrode in the gas flow direction, and the laser medium gas is perpendicular to the optical axis A first duct that forms a flow path that flows in a direction, and is provided in the housing,
A pair of second discharge electrodes opposed to each other and the first discharge electrode are positioned in a direction perpendicular to the optical axis and are downstream of the second discharge electrode in the gas flow direction with respect to the optical axis in the housing. provided on the opposite side of the oscillator, and a second duct to form a flow path in which the laser medium gas flows perpendicular to the optical axis direction, side by side in the optical axis direction with respect to said first oscillation section above A second oscillating portion provided in the housing;
A plurality of mirrors provided in the vicinity of the first and second end portions in the optical axis direction, for reflecting light generated by the first and second oscillating units and reciprocating in the housing; and the first And a plurality of aperture members provided in the vicinity of the second optical axis direction end, each provided with an aperture for defining the shape of the laser beam,
The first optical axis direction end is provided with a first in-housing confirmation window,
The second optical axis direction end portion is provided with a second in-housing confirmation window,
End portions in the optical axis direction of the first and second ducts located between the first and second in-housing confirmation windows and the aperture member disposed on the opposite side to the optical axis direction. Includes a first and a second transparent member. 互いに対向する第１及び第２の光軸方向端部と、互いに対向する第１及び第２の筐体側面部とを有し、レーザ媒質ガスが封入される筐体、
互いに対向する一対の第１の放電電極と、光軸に対して垂直方向に位置し、ガス流方向において上記第１の放電電極よりも下流側に設けられ、上記レーザ媒質ガスが光軸と垂直方向に流れる流路を形成する第１のダクトとを有し、上記筐体内に設けられている第１の発振部、
互いに対向する一対の第２の放電電極と、光軸に対して垂直方向に位置し、ガス流方向において上記第２の放電電極よりも下流側で上記筐体内光軸に対して上記第１の発振部の反対側に設けられ、上記レーザ媒質ガスが光軸と垂直方向に流れる流路を形成する第２のダクトとを有し、上記第１の発振部に対して光軸方向に並べて上記筐体内に設けられている第２の発振部、
上記第１及び第２の光軸方向端部の近傍に設けられ、上記第１及び第２の発振部で発生された光を反射して上記筐体内で往復させる複数の鏡、及び
上記第１及び第２の光軸方向端部の近傍に設けられ、レーザビームの形状を規定するためのアパーチャがそれぞれ設けられている複数のアパーチャ部材
を備え、
上記第１の筐体側面部の上記第１及び第２の発振部間に対向する部分には、第１の筐体内確認用窓が設けられており、
上記第２の筐体側面部の上記第１及び第２の発振部間に対向する部分には、第２の筐体内確認用窓が設けられており、
上記筐体内には、上記第１の筐体内確認用窓と上記第１のダクトの光軸方向の端部とに斜めに対向する第１の観察用鏡と、上記第２の筐体内確認用窓と上記第２のダクトの光軸方向の端部とに斜めに対向する第２の観察用鏡とが設けられており、
上記第１の観察用鏡に対向する上記第１のダクトの端部には、第１の透明部材が設けられており、
上記第２の観察用鏡に対向する上記第２のダクトの端部には、第２の透明部材が設けられていることを特徴とするレーザ発振器。 A housing having first and second optical axis direction end portions facing each other and first and second housing side surfaces facing each other, in which a laser medium gas is enclosed;
A pair of first discharge electrodes facing each other, and positioned in a direction perpendicular to the optical axis, provided downstream of the first discharge electrode in the gas flow direction, and the laser medium gas is perpendicular to the optical axis A first duct that forms a flow path that flows in a direction, and is provided in the housing,
A pair of second discharge electrodes opposed to each other and the first discharge electrode are positioned in a direction perpendicular to the optical axis and are downstream of the second discharge electrode in the gas flow direction with respect to the optical axis in the housing. provided on the opposite side of the oscillator, and a second duct to form a flow path in which the laser medium gas flows perpendicular to the optical axis direction, side by side in the optical axis direction with respect to said first oscillation section above A second oscillating portion provided in the housing;
A plurality of mirrors provided in the vicinity of the first and second end portions in the optical axis direction, for reflecting light generated by the first and second oscillating units and reciprocating in the housing; and the first And a plurality of aperture members provided in the vicinity of the second optical axis direction end, each provided with an aperture for defining the shape of the laser beam,
A first housing confirmation window is provided in a portion of the side surface of the first housing facing the first and second oscillators.
A second in-housing confirmation window is provided in a portion of the side surface of the second housing facing the first and second oscillating parts.
In the housing, there are a first observation mirror that obliquely opposes the first in-housing confirmation window and an end of the first duct in the optical axis direction, and the second in-housing confirmation. A second observation mirror that is obliquely opposed to the window and the end of the second duct in the optical axis direction;
A first transparent member is provided at an end of the first duct facing the first observation mirror,
A laser oscillator, characterized in that a second transparent member is provided at an end of the second duct facing the second observation mirror. 請求項１に記載されたレーザ発振器を備えていることを特徴とするレーザ加工装置。   A laser processing apparatus comprising the laser oscillator according to claim 1. 請求項２に記載されたレーザ発振器を備えていることを特徴とするレーザ加工装置。   A laser processing apparatus comprising the laser oscillator according to claim 2.
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