JP5176236B2 - 水素ガスセンサ及びその製造方法 - Google Patents
水素ガスセンサ及びその製造方法 Download PDFInfo
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- JP5176236B2 JP5176236B2 JP2008269569A JP2008269569A JP5176236B2 JP 5176236 B2 JP5176236 B2 JP 5176236B2 JP 2008269569 A JP2008269569 A JP 2008269569A JP 2008269569 A JP2008269569 A JP 2008269569A JP 5176236 B2 JP5176236 B2 JP 5176236B2
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- JP
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- Prior art keywords
- fine
- hydrogen gas
- less
- sensor
- cylinder
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 38
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 21
- 229910052697 platinum Inorganic materials 0.000 claims description 19
- 229910052763 palladium Inorganic materials 0.000 claims description 18
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 16
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 14
- 239000010936 titanium Substances 0.000 claims description 14
- 229910052719 titanium Inorganic materials 0.000 claims description 14
- 239000012212 insulator Substances 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 description 24
- 239000010409 thin film Substances 0.000 description 23
- 239000001257 hydrogen Substances 0.000 description 17
- 229910052739 hydrogen Inorganic materials 0.000 description 17
- 230000004044 response Effects 0.000 description 17
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 15
- 239000010408 film Substances 0.000 description 15
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 15
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000010407 anodic oxide Substances 0.000 description 6
- 238000007743 anodising Methods 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 238000002048 anodisation reaction Methods 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910002070 thin film alloy Inorganic materials 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000001659 ion-beam spectroscopy Methods 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- UUWCBFKLGFQDME-UHFFFAOYSA-N platinum titanium Chemical compound [Ti].[Pt] UUWCBFKLGFQDME-UHFFFAOYSA-N 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
Claims (2)
- 絶縁体の基板表面上に、内径500nm以下の微細孔又は外径1000nm以下の微細筒が形成され且つ前記微細孔及び前記微細筒の長軸方向が前記基板の法線方向に配向する構造のチタン酸化物を主成分とするセンサ素子を備え、前記センサ素子は、パラジウム又は白金を質量百分率0.01%以上含むチタン合金の陽極酸化皮膜であることを特徴とする水素ガスセンサ。
- 請求項1において、
前記内径500nm以下の微細孔として、内径50nm以下の微細孔が形成され、前記外径1000nm以下の微細筒として、外径100nm以下の微細筒が形成されることを特徴とする水素ガスセンサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008269569A JP5176236B2 (ja) | 2008-10-20 | 2008-10-20 | 水素ガスセンサ及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008269569A JP5176236B2 (ja) | 2008-10-20 | 2008-10-20 | 水素ガスセンサ及びその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012257072A Division JP5207425B2 (ja) | 2012-11-26 | 2012-11-26 | 水素ガスセンサ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010096694A JP2010096694A (ja) | 2010-04-30 |
JP5176236B2 true JP5176236B2 (ja) | 2013-04-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008269569A Active JP5176236B2 (ja) | 2008-10-20 | 2008-10-20 | 水素ガスセンサ及びその製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP5176236B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011054501A1 (de) | 2011-10-14 | 2013-04-18 | Heinrich-Heine-Universität Düsseldorf | Sensor und Verfahren zum Herstellen eines Sensors |
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2008
- 2008-10-20 JP JP2008269569A patent/JP5176236B2/ja active Active
Also Published As
Publication number | Publication date |
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JP2010096694A (ja) | 2010-04-30 |
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