JP5165402B2 - Expanding device - Google Patents

Description

  The present invention relates to an expanding apparatus that stretches a stretchable sheet material in which a plurality of electronic components such as a semiconductor chip and a substrate are bonded to expand each other.

  Generally, when a plurality of semiconductor chips bonded to a wafer sheet made of a stretchable sheet material are picked up by a collet, the gap between the semiconductor chips is increased by stretching the wafer sheet in order to avoid contact between the semiconductor chips. Enlarging is done.

  An example of an expanding apparatus that stretches the wafer sheet is shown in Patent Document 1. As shown in FIG. 10, the expanding device disclosed in Patent Document 1 includes an annular fixing member 100, an annular pressure member 200 having an inner diameter larger than the outer diameter of the fixing member 100, and lifting and lowering that raises and lowers the pressure member 200. A mechanism 300, a rotary table 400 to which the fixing member 100 is fixed, a rotary mechanism 500 for rotating the rotary table 400, and the like are provided.

  The elevating mechanism 300 includes a plurality of male screw portions (feed screws) 301 and a plurality of female screw portions (nuts) 302 that are threadably engaged with each other. The male screw portion 301 is attached to the lifting plate 600, and the pressing member 200 is attached to the lifting plate 600. On the other hand, the female screw portion 302 is inserted into a hole provided in the apparatus main body 700. Each female thread portion 302 is integrally provided with a pulley 303, and a belt 304 is stretched around each pulley 303. The belt 304 is in pressure contact with a pulley 305 provided on the shaft of the lifting motor M1. By transmitting the rotational force of the elevating motor M1 to each pulley 303 and the female screw portion 302 via the belt 304, the male screw portion 301 is configured to move up and down.

  The rotation mechanism 500 includes a rotation motor M2, a pulley 501 provided on the shaft of the rotation motor M2, and a belt 502 spanned on the outer periphery of the pulley 501 and the rotation table 400. By transmitting the rotational force of the rotation motor M2 to the rotary table 400 via the belt 502, the rotary table 400 rotates.

Hereinafter, the operation of the expanding apparatus will be described.
First, as shown in FIG. 10, a wafer sheet 900 whose periphery is fixed to the ring frame 800 is placed on the fixing member 100. A plurality of semiconductor chips A cut in a lattice pattern by a dicer (diamond wheel) or the like is bonded onto the wafer sheet 900.

  By rotating the elevating motor M1, the pulleys 303 and the female screw portions 302 are rotated via the belt 304, and the male screw portion 301 is lowered. As shown in FIG. 11, the pressure member 200 pushes down the ring frame 800 as the male screw portion 301 is lowered. As a result, the wafer sheet 900 is radially expanded, and the space between the semiconductor chips A is expanded.

Further, when changing the circumferential direction of the semiconductor chip A picked up by the collet, the rotary table 400 is rotated by driving the motor M2 for rotation shown in FIG. Since the turntable 400, the fixing member 100, and the pressure member 200 rotate integrally, the wafer sheet 900 can be rotated in an expanded (stretched) state.
JP 2006-310438 A

  However, since the expanding device of Patent Document 1 includes separate motors M1 and M2 as drive sources for the lifting mechanism 300 and the rotating mechanism 500, the number of parts increases, the structure becomes complicated, and the cost and weight are high. There is a problem of becoming.

  In view of the above problems, the present invention provides an expanding apparatus capable of simplifying the structure.

The invention of claim 1 includes a plurality of sets of annular fixing members fixed to the rotary table and annular pressure members having an inner diameter larger than the outer diameter of the fixing members, and screwed together so as to be able to advance and retract. The rotary table and the pressure member are connected by a male screw portion and a female screw portion, and the pressure member is configured to approach and separate from the fixing member. The expandable sheet material to which the electronic components are bonded is pressed against the fixing member by the pressure member, and the sheet material is stretched to expand the space between the electronic components. An annular power transmission member that interlocks the motor for driving, one of the male threaded portion and the female threaded portion of each set, and the drive motor, and is rotatably arranged in the circumferential direction; A rotary table locking mechanism for locking the rotation of the serial rotary table, and the male screw portion or a rotation lock mechanism for locking the rotation of the female threaded portion, a drive gear coupled to the motor rotatable drive in forward and reverse directions, A plurality of driven gears arranged on one of the male screw portion and the female screw portion of each set capable of rotating , and the annular power transmission member, the first tooth row meshed with the drive gear and the plurality of driven gears The second tooth row with which the gear meshes is constituted by a ring gear formed in the circumferential direction .

If the expanding apparatus according to claim 1 performing the expanding of the sheet material, and a rotary table locking mechanism in the locked state, the rotation lock mechanism to the unlock state. That is, the rotation of the rotary table is restricted, but the driven gear disposed on the male screw portion or the female screw portion can rotate. When the drive motor is rotated, the rotational force is transmitted to the driven gear via the drive gear and the ring gear, and the driven gears rotate (spin) in synchronization. By the rotation of each driven gear, the male screw portion and the female screw portion advance and retreat from each other, and the pressure member can be moved closer to and away from the fixed member.

  When changing the direction of the sheet material in the circumferential direction, the rotary table lock mechanism is unlocked and the rotation lock mechanism is locked. That is, the rotary table is rotatable, while the driven gear is restricted from rotating through the male screw portion or the female screw portion. When the drive motor is rotated, the rotational force is transmitted to the driven gear via the drive gear and the ring gear, but each driven gear is in the locked state and cannot rotate. For this reason, each driven gear rotates (revolves) together with the ring gear while being engaged with the second tooth row of the ring gear. Thereby, the rotary table can be rotated, and the circumferential direction of the sheet material can be changed.

In addition, the invention of claim 1 employs a ring gear instead of the conventional belt as a member for transmitting the power of the drive motor, so there is no possibility of contamination due to belt dust generation. Thereby, it becomes the thing excellent in maintainability.

The invention of claim 2 is the expanding apparatus according to claim 1, which the said first teeth formed on one of the outer peripheral surface and the inner peripheral surface of the ring gear, the formation of the second tooth row on the other It is. As in the invention of claim 3 , in the expanding device of claim 1 , the first tooth row and the second tooth row may be arranged in parallel on the outer peripheral surface or the inner peripheral surface of the ring gear. Further, as in a fourth aspect of the present invention, in the expanding device according to the first aspect, the second tooth row is formed on the outer peripheral surface or the inner peripheral surface of the ring gear, and the upper surface or the lower surface of the ring gear It is also possible to form the first tooth row.

Since the position which a 1st tooth row and a 2nd tooth row form can be selected as described in the 2nd - 4th , the freedom degree of the layout of a component spreads.

According to a fifth aspect of the present invention, in the expanding device according to any one of the first to fourth aspects, the ring gear is made of a resin having a self-lubricating property.

  As a result, the friction between the meshing portions of the ring gear, the driven gear, and the drive gear is reduced, and the rotational motion is transmitted smoothly. In addition, since it is not necessary to fill a lubricant between the meshing portions, the maintenance is excellent, and there is no possibility of contamination due to the scattering of the lubricant.

  According to the present invention, the raising / lowering operation of the pressure member and the rotating operation of the rotary table can be performed with one driving motor. In other words, a single motor can be used for the motor for raising and lowering the pressure member and the motor for rotating the rotary table, which have been provided separately. Thereby, the number of parts can be reduced, the structure can be simplified, the weight can be reduced, and the cost can be reduced.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
FIG. 1 is a cross-sectional view showing a first embodiment of an expanding apparatus according to the present invention. As shown in FIG. 1, the expander of the present invention includes a rotary table 2 disposed horizontally on the upper part of the expander main body 1, an annular fixing member 3 fixed to the rotary table 2, and a liftable device. And a driving mechanism 5 for rotating the rotary table 2 in the circumferential direction and moving the pressure member 4 up and down.

  The fixing member 3 is formed of a cylindrical member having an L-shaped cross section having an upper small outer diameter portion 3a and a lower large outer diameter portion 3b. The pressurizing member 4 is configured by combining a pair of semicircular arc members in an annular shape. The pressing member 4 and the fixing member 3 are coaxially arranged, and the inner diameter of the pressing member 4 is larger than the outer diameter of the small outer diameter portion 3 a of the fixing member 3.

  The drive mechanism 5 has lifting means 6 that lifts and lowers the pressure member 4. Specifically, the elevating means 6 includes a plurality of sets of male screw portions 6a and female screw portions 6b that are screwed together. For example, the female screw portion 6b is a nut having a screw hole formed in the center, and the male screw portion 6a is a screw rod (feed screw) that is screwed into the screw hole of the nut. Each female screw portion 6 b is rotatably inserted into a through hole provided in the turntable 2. On the other hand, the upper end of each male screw portion 6 a is fixed to the lower surface of the pressure member 4. By rotating the female screw portion 6b in the forward direction or the reverse direction, the male screw portion 6a moves forward and backward (up and down) with respect to the female screw portion 6b. That is, the pressurizing member 4 is configured to move up and down by the forward and backward movement of the male screw portion 6a.

  The drive mechanism 5 includes a drive motor M that can rotate in forward and reverse directions, a drive gear 7 connected to the shaft of the drive motor M, a plurality of driven gears 8, and a ring gear 9. .

  FIG. 2 is a plan view of the drive gear 7, the driven gear 8, and the ring gear 9. As shown in FIG. 2, tooth rows 9a and 9b are formed in the circumferential direction on the outer circumferential surface and inner circumferential surface of the ring gear 9, respectively. The drive gear 7 meshes with the tooth row 9a on the outer peripheral side of the ring gear 9, and a plurality of driven gears 8 mesh with the tooth row 9b on the inner peripheral side. Hereinafter, the tooth row 9a meshed with the drive gear 7 is referred to as a first tooth row 9a, and the tooth row 9b meshed with the driven gear 8 is referred to as a second tooth row 9b.

  In this embodiment, there are four driven gears 8, and each driven gear 8 is arranged at equal intervals in the circumferential direction of the ring gear 9, that is, at 90 ° intervals. However, the number of driven gears 8 is not limited to this. As a material of the ring gear 9, a resin having self-lubricating property is adopted in order to reduce friction between the meshing portions with the driven gear 7 and between the meshing portions with the drive gear 8 and smoothly transmit power. Is preferred.

  In addition, the first tooth row 9a and the second tooth row 9b are arranged in reverse to FIG. 2 with respect to the ring gear 9, and the second tooth row 9b is formed on the outer peripheral surface of the ring gear 9, and the inner circumference The first tooth row 9a may be formed on the surface (not shown).

  As shown in FIG. 1, the ring gear 9 is supported by a rotation support member 10 such as a plurality of rollers so as to be rotatable in the circumferential direction. Each driven gear 8 is integrally attached to the lower portion of the female screw portion 6b, and is configured such that when the driven gear 8 rotates, the female screw portion 6b also rotates. In addition, you may form the driven gear 8 directly in the outer peripheral surface of the internal thread part 6b (illustration omitted). Each driven gear 8 is supported by the turntable 2 via a female screw portion 6 b and is configured to move integrally in the same direction as the turntable 2.

  The expanding device of the present invention includes a rotary table lock mechanism 11 that locks the rotation of the rotary table 2. The rotary table lock mechanism 11 includes, for example, a pressing member 12 that can be pressed against the outer peripheral surface 2 a of the rotary table 2. The pressing surface 12a that presses against the rotary table 2 of the pressing member 12 is formed in a concave arc shape corresponding to the outer peripheral surface 2a of the rotary table 2 (see FIG. 2). Although the pressing member 12 may be single, in order to prevent the axial center of the rotary table 2 from being displaced by the pressing force of the pressing member 12, a plurality of pressing members 12, such as two or three, are provided on the rotary table 2. It is preferable to arrange them at equal intervals in the circumferential direction.

  Further, the expanding device of the present invention includes a rotation lock mechanism 13 that locks the rotation of each driven gear 8. The rotation lock mechanism 13 includes a locking member 14 that is swingably disposed (see FIG. 2). A claw portion 14 a that can be engaged with the gear portion of the driven gear 8 is formed at the swinging tip end of the locking member 14. In FIG. 2, the rotation lock mechanism 13 (locking member 14) is provided corresponding to all the driven gears 8, but may be provided for only one driven gear 8 or a part of the driven gears 8. Good.

  Since the rotary table lock mechanism 11 and the rotation lock mechanism 13 shown in FIGS. 1 and 2 are one embodiment, structures other than those shown in the drawings can be employed. For example, the rotation lock mechanism 13 may be configured to press the outer peripheral surface of the female screw portion 6b and lock the rotation of the female screw portion 6b.

  3 and 4 show a second embodiment of the expanding device of the present invention. The expanding device of the second embodiment also includes a drive gear 7, a driven gear 8, and a ring gear 9 as in the first embodiment. However, as shown in FIG. 3, the drive gear 7 and the driven gear 8 are disposed on the inner peripheral side of the ring gear 9. Specifically, as shown in FIG. 4, a first tooth row 9 a meshed with the drive gear 7 and a second tooth row 9 b meshed with the driven gear 8 are arranged in parallel on the upper and lower portions of the inner peripheral surface of the ring gear 9. Has been established. Note that the first tooth row 9a and the second tooth row 9b can be arranged on the outer peripheral surface of the ring gear 9 (not shown).

  Moreover, you may form the 1st tooth row | line | column 9a with which the drive gear 7 meshes | engages in the upper surface or lower surface of the ring gear 9 like 3rd Embodiment of this invention shown in FIG. In FIG. 5, the second tooth row 9 b with which the driven gear 8 meshes is formed on the inner peripheral surface of the ring gear 9, but the second tooth row 9 b can also be formed on the outer peripheral surface of the ring gear 9. Yes (not shown).

  In the second embodiment and the third embodiment, configurations other than those described above are the same as those in the first embodiment, and the rotation lock mechanism and the like are omitted in FIGS.

Hereinafter, the operation of the expanding apparatus will be described by taking the first embodiment as an example.
As shown in FIG. 6, the wafer sheet 16 whose periphery is fixed to the ring frame 15 is transported by a transport device (not shown) and placed on the fixing member 3. The wafer sheet 16 is made of a stretchable sheet material, and a plurality (or many) of semiconductor chips A are bonded to the upper surface thereof.

  At this time, the pressing member 4 is disposed at a predetermined position above the fixing member 3. Further, the pressing member 12 of the rotary table lock mechanism 11 is moved in the direction of the arrow in the figure to press the outer periphery of the rotary table 2. By the press contact of the pressing member 12, the rotary table 2 is in a locked state in which the rotation in the circumferential direction is locked (restricted). On the other hand, each driven gear 8 is not locked by the rotation lock mechanism 13. That is, the driven gear 8 is in a state where it can rotate.

  Based on a signal from a control device (not shown), the drive motor M and the drive gear 7 are rotated in a predetermined direction (forward direction). As shown in FIG. 7, for example, when the drive gear 7 is rotated clockwise, the ring gear 9 is rotated counterclockwise along with this rotation. Since each driven gear 8 can rotate, it rotates counterclockwise (synchronously) with the rotation of the ring gear 9.

  As shown in FIG. 8, when each driven gear 8 and the female screw portion 6b attached thereto rotate, the male screw portion 6a is screwed into the female screw portion 6b and descends. As the male screw portion 6a is lowered, the pressure member 4 is lowered to push down the ring frame 15. As a result, the wafer sheet 16 is stretched radially, and the space between the semiconductor chips A can be enlarged.

  When the wafer sheet 16 is stretched (expanded) and rotated in the circumferential direction, the pressing member 12 is separated from the rotary table 2 to release the locked state. On the other hand, each driven gear 8 is locked by the rotation lock mechanism 13. Specifically, as shown in FIG. 9, the locking member 14 is swung to engage the claw portion 14 a at the tip thereof with the driven gear 8. The rotation of the driven gear 8 is locked (restricted) by the engagement of the claw portion 14a.

  In FIG. 9, when the drive gear 7 is rotated clockwise, the ring gear 9 rotates counterclockwise along with this rotation. The rotational force of the ring gear 9 is transmitted to each driven gear 8, but the driven gear 8 is in the locked state and cannot rotate. For this reason, each driven gear 8 rotates counterclockwise together with the ring gear 9 while being engaged with the second tooth row 9 b of the ring gear 9. That is, the driven gear 8 revolves around the center O of the turntable 2, and the turntable 2 rotates counterclockwise along with this revolution. Thereby, the wafer sheet 16 can be rotated in the circumferential direction, and the direction of the semiconductor chip A on the wafer sheet 16 can be changed.

  When loosening or releasing the expansion of the wafer sheet 16, the driven gear 8 is released from the locked state and the rotary table 2 is again set to the locked state (see FIG. 7). Then, the drive motor M is rotated in the opposite direction to the predetermined direction (forward direction), and the driven gear 8 is rotated (rotated) in the opposite direction. As a result, the male screw portion 6a is screwed upward from the female screw portion 6b to raise the pressure member 4.

  The operation of the expanding apparatus according to the present invention has been described above by taking the first embodiment as an example. However, the operations in the second and third embodiments are the same, and thus the description thereof is omitted.

  The expanding device of the present invention can perform the raising / lowering operation of the pressing member and the rotating operation of the rotary table with one driving motor. In other words, a single motor can be used for the motor for raising and lowering the pressure member and the motor for rotating the rotary table, which have been provided separately. Thereby, the number of parts can be reduced, the structure can be simplified, the weight can be reduced, and the cost can be reduced.

  The present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be made without departing from the gist of the present invention. For example, the male screw portion 6a and the female screw portion 6b are disposed so as to be reversed in the vertical direction, the upper portion of the female screw portion 6b is attached to the pressure member 4, and the driven gear 8 is attached to the lower portion of the male screw portion 6a. May be. Further, if necessary, a mechanism for moving the wafer sheet 16 in the horizontal direction in an expanded state may be provided. In addition to the semiconductor chip, a substrate or other electronic component can be employed as the member bonded to the wafer sheet 16.

It is sectional drawing which shows 1st Embodiment of the expanding apparatus which concerns on this invention. It is a top view which shows the principal part of the said 1st Embodiment. It is a top view which shows the principal part of 2nd Embodiment of the expanding apparatus which concerns on this invention. It is sectional drawing which shows the principal part of the said 2nd Embodiment. It is a top view which shows the principal part of 3rd Embodiment of the expanding apparatus which concerns on this invention. It is sectional drawing for demonstrating operation | movement of the expanding apparatus which concerns on this invention. It is a top view for demonstrating operation | movement of the expanding apparatus which concerns on this invention. It is sectional drawing for demonstrating operation | movement of the expanding apparatus which concerns on this invention. It is a top view for demonstrating operation | movement of the expanding apparatus which concerns on this invention. It is sectional drawing of the conventional expanding apparatus. It is sectional drawing for demonstrating operation | movement of the conventional expanding apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 Rotating table 3 Fixing member 4 Pressure member 6a Male thread part 6b Female thread part 7 Drive gear 8 Driven gear 9 Ring gear 9a 1st tooth row 9b 2nd tooth row 11 Rotary table lock mechanism 13 Rotation lock mechanism 15 Ring frame 16 Wafer sheet A Semiconductor chip M Drive motor

Claims (5)

An annular fixing member fixed to the rotary table, and an annular pressure member having an inner diameter larger than the outer diameter of the fixing member,
The rotary table and the pressure member are connected by a plurality of sets of male screw portions and female screw portions that are threadably engaged with each other, and the pressure member is configured to approach and separate from the fixed member.
An expanding device that expands between the electronic components by pressing a stretchable sheet material having a peripheral edge fixed to the ring frame and bonding a plurality of electronic components against the fixing member by the pressure member. In
A driving motor that can be rotated in the forward and reverse directions, and one of the sets of male screw portions and female screw portions that can rotate, and the driving motor are interlocked and connected to each other, and an annular ring that is rotatably arranged in the circumferential direction. Connected to a power transmission member, a rotary table lock mechanism that locks the rotation of the rotary table, a rotation lock mechanism that locks the rotation of the male screw portion or the female screw portion, and a drive motor that can rotate in the forward and reverse directions A plurality of driven gears disposed on one of the drive gears and one of the male screw part and the female screw part that can rotate .
The annular power transmission member is composed of a ring gear in which a first tooth row meshed with the drive gear and a second tooth row meshed with the plurality of driven gears are formed in the circumferential direction, respectively. apparatus. The expanding device according to claim 1, wherein the first tooth row is formed on one of an outer peripheral surface and an inner peripheral surface of the ring gear, and the second tooth row is formed on the other . Expanding apparatus according to claim 1, said first teeth and second teeth arranged side by side on the outer peripheral surface or inner peripheral surface of the ring gear. The expanding apparatus according to claim 1 , wherein the second tooth row is formed on an outer peripheral surface or an inner peripheral surface of the ring gear, and the first tooth row is formed on an upper surface or a lower surface of the ring gear . The expanding device according to any one of claims 1 to 4, wherein the ring gear is made of self-lubricating resin.

Images