JP5164218B2 - Ultrasonic phased array transducer - Google Patents

Ultrasonic phased array transducer Download PDF

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JP5164218B2
JP5164218B2 JP2009014285A JP2009014285A JP5164218B2 JP 5164218 B2 JP5164218 B2 JP 5164218B2 JP 2009014285 A JP2009014285 A JP 2009014285A JP 2009014285 A JP2009014285 A JP 2009014285A JP 5164218 B2 JP5164218 B2 JP 5164218B2
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英樹 大平
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Tokin Corp
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Description

本発明は、水中超音波ビームを形成する超音波振動子のフェイズドアレイに関し、特に超音波振動子の配列接続方法と駆動方式の改善によって小型軽量化した超音波フェイズドアレイ送受波器に関するものである。   The present invention relates to a phased array of ultrasonic transducers that form an underwater ultrasonic beam, and more particularly to an ultrasonic phased array transducer that is reduced in size and weight by improving the array connection method and drive method of ultrasonic transducers. .

水中においては、超音波のドップラー効果を利用する速度計や超音波の伝搬時間を利用する高度計が多く使用されている。この種の高度計や速度計に用いられる代表的な送受波器は、放射された超音波ビームの先端が超音波の到達平面に形成された正方形の頂点に位置するように4つの超音波ビームを放射する直交4ビームと呼ばれる超音波ビームを持つ送受波器である。   In water, a velocimeter that utilizes the Doppler effect of ultrasonic waves and an altimeter that utilizes the propagation time of ultrasonic waves are often used. A typical transducer used in this kind of altimeter and velocimeter has four ultrasonic beams so that the tip of the emitted ultrasonic beam is positioned at the apex of a square formed in the ultrasonic plane of arrival. It is a transducer having an ultrasonic beam called a quadrature beam that radiates.

直交4ビームは到達平面図上の配置として+字型と×字型とがあり、超音波ビームの放射角度は、水平方向からの角度である俯角が60度、すなわち、鉛直線を基準としたビーム仰角で30度とするのが代表的である。   The orthogonal four beams have a + -shaped and an X-shaped arrangement on the arrival plan view, and the radiation angle of the ultrasonic beam is 60 degrees, which is an angle from the horizontal direction, that is, based on the vertical line. A typical beam elevation angle is 30 degrees.

従来の送受波器は、水中音波の波長の10〜20倍の直径を有する円盤状の超音波振動子を4個使用し、それらを超音波振動子の放射面の方向に予め仰角を持たせて送受波器内に配置する構造となっている。   The conventional transducer uses four disk-shaped ultrasonic transducers having a diameter of 10 to 20 times the wavelength of the underwater acoustic wave, and gives them an elevation angle in the direction of the radiation surface of the ultrasonic transducer in advance. Therefore, it is arranged in the transmitter / receiver.

しかしこの構造による送受波器は形状が大きいため、これを小型にすべく、各種の試みがなされている。例えば、矩形板状の小さな超音波振動子を平面上に配列し、前記の円盤状の超音波振動子1個と同程度の大きさで直交4ビームを放射できる送受波器の提案がされている。   However, since the transducer with this structure is large in shape, various attempts have been made to make it compact. For example, a transmitter / receiver has been proposed in which rectangular ultrasonic transducers arranged in a plane are arranged on a plane, and can emit four orthogonal beams with the same size as one disk-shaped ultrasonic transducer. Yes.

このように矩形板状の小さな超音波振動子を平面配列してなる送受波器は、超音波フェイズドアレイ送受波器と呼ばれる。速度や高度等の算出方法は、前記の従来の送受波器と同じであり、4つの超音波ビームの反射波を検出しその受信信号から速度や高度等が算出できる。このような超音波フェイズドアレイ送受波器は、特許文献1または特許文献2に開示されている。   A transducer formed by planarly arranging small rectangular plate-like ultrasonic transducers in this way is called an ultrasonic phased array transducer. The method of calculating the speed, altitude, etc. is the same as that of the conventional transmitter / receiver described above. The reflected waves of the four ultrasonic beams are detected, and the speed, altitude, etc. can be calculated from the received signals. Such an ultrasonic phased array transducer is disclosed in Patent Document 1 or Patent Document 2.

図4は、従来の超音波フェイズドアレイ送受波器で得られる送信指向性のチャート図の一例である。超音波振動子の超音波の放出面に垂直な方向から±30度の方向に2つの超音波ビームが放出される。   FIG. 4 is an example of a chart of transmission directivity obtained by a conventional ultrasonic phased array transducer. Two ultrasonic beams are emitted in directions of ± 30 degrees from the direction perpendicular to the ultrasonic wave emission surface of the ultrasonic transducer.

特開2001−197595号公報JP 2001-197595 A 特開2001−305217号公報JP 2001-305217 A

しかしながら、前記の特許文献1に記載の超音波フェイズドアレイ送受波器を用いた場合は、矩形板状の小さな超音波振動子が数百個必要になるため組立が複雑で高価になるという問題があった。また、特許文献2に記載の超音波フェイズドアレイ送受波器を用いた場合は、超音波振動子の必要数は減少するが、超音波振動子に接続される変成器が4個必要となり、装置構成や動作が複雑になるという問題があった。   However, when the ultrasonic phased array transducer described in Patent Document 1 is used, hundreds of small rectangular plate-shaped ultrasonic transducers are required, so that the assembly is complicated and expensive. there were. In addition, when the ultrasonic phased array transducer described in Patent Document 2 is used, the number of ultrasonic transducers is reduced, but four transformers connected to the ultrasonic transducers are required. There was a problem that the configuration and operation became complicated.

従って、本発明の課題は、上記従来技術の問題点を解決し、必要とされる超音波振動子の数および変成器の数が少なく、組立が簡単で安価な超音波フェイズドアレイ送受波器を提供することにある。   Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, and to provide an ultrasonic phased array transducer that is simple and inexpensive to assemble, requiring a small number of ultrasonic transducers and transformers. It is to provide.

上記課題を解決するため、本発明の超音波フェイズドアレイ送受波器は、超音波を放射する放射面に設置された表面電極とその対向する面に設置された裏面電極とを有する超音波振動子が平面上にN行、M列(NとMは正の整数)となるように行列配置されてなる超音波振動子群と、それぞれ2つの平衡2次側の端子と1次側の端子とを有する第一の変成器および第二の変成器とを有し、前記N行の各行を成す超音波振動子の中心間の間隔P1および前記M列の各列を成す超音波振動子の中心間の間隔P2が、前記超音波が伝播する媒体中での波長をλとするとき、0.75λ≦P1≦1.25λ、0.75λ≦P2≦1.25λであって、前記表面電極を各行毎に結線してN本の行結線群とし、前記裏面電極を各列毎に結線してM本の列結線群とし、Kを0または正の整数とするとき、前記N本の行結線群を(1+2K)行を成す奇数行結線群と(2+2K)行を成す偶数行結線群との2つのグループに分けてそれぞれのグループを結線し、前記M本の列結線群を(1+2K)列を成す奇数列結線群と(2+2K)列を成す偶数列結線群との2つのグループに分けてそれぞれのグループを結線し、前記奇数行結線群と前記偶数行結線群をそれぞれ前記第一の変成器の平衡2次側の端子に接続し、前記奇数列結線群と前記偶数列結線群をそれぞれ前記第二の変成器の平衡2次側の端子に接続したことを特徴とする。   In order to solve the above-described problems, an ultrasonic phased array transducer according to the present invention includes an ultrasonic transducer having a surface electrode disposed on a radiation surface that emits ultrasonic waves and a back electrode disposed on a surface facing the surface electrode. Are arranged in rows and columns with N rows and M columns (N and M are positive integers), two balanced secondary terminals and a primary terminal, respectively. A first transformer having a first transformer and a second transformer, and an interval P1 between the centers of the ultrasonic transducers forming each row of the N rows and the centers of the ultrasonic transducers forming each column of the M columns The interval P2 between them is 0.75λ ≦ P1 ≦ 1.25λ and 0.75λ ≦ P2 ≦ 1.25λ, where λ is the wavelength in the medium through which the ultrasonic wave propagates, and the surface electrode is Each row is connected to form N row connection groups, and the back electrode is connected to each column to form M column connection groups. When K is 0 or a positive integer, the N row connection groups are divided into two groups: an odd row connection group forming (1 + 2K) rows and an even row connection group forming (2 + 2K) rows. Each group is connected, and the M column connection groups are divided into two groups, an odd column connection group forming (1 + 2K) columns and an even column connection group forming (2 + 2K) columns, and each group is connected. The odd row connection group and the even row connection group are respectively connected to terminals on the balanced secondary side of the first transformer, and the odd column connection group and the even column connection group are respectively connected to the second transformer. It is characterized by being connected to a terminal on the balanced secondary side.

また、前記第一の変成器および第二の変成器の1次側の端子にそれぞれ接続され該1次側の端子へ送信波を送出しかつ該1次側の端子から受信波を受信する機能を有する2つの送受波切替回路と、該2つの送受波切替回路に送信波を送出する機能を有する送波ビーム切替回路と、前記2つの送受波切替回路からの受信波の一方のみを切り替えて出力する機能を有する受波ビーム切替回路と、該受波ビーム切替回路からの受信信号を入力し該受信信号を高速フーリエ変換処理する機能を有する高速フーリエ変換処理回路とを有してもよい。   A function of transmitting a transmission wave to the primary side terminal and receiving a reception wave from the primary side terminal connected to the primary side terminal of the first transformer and the second transformer, respectively; Two transmission / reception wave switching circuits, a transmission beam switching circuit having a function of transmitting a transmission wave to the two transmission / reception wave switching circuits, and switching only one of the reception waves from the two transmission / reception wave switching circuits. There may be provided a received beam switching circuit having a function of outputting, and a fast Fourier transform processing circuit having a function of inputting a received signal from the received beam switching circuit and performing a fast Fourier transform process on the received signal.

また、前記第一の変成器への送信波の送出により、前記超音波振動子群のほぼ中心を通り前記放射面に垂直な直線、すなわち中心線を含み、前記N行に配列された超音波振動子の行間隔方向に平行な平面内にあって、かつ前記中心線に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム、すなわち縦ツインビームを送出する機能と、前記第二の変成器への送信波の送出により、前記中心線を含み、前記M列に配列された超音波振動子の列間隔方向に平行な平面内にあって、かつ前記中心線に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム、すなわち横ツインビームを送出する機能とを有し、前記高速フーリエ変換処理回路は、前記縦ツインビームを成す2つの超音波ビームのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能、および前記横ツインビームを成す2つの超音波ビームのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能を有してもよい。   Further, by transmitting the transmission wave to the first transformer, the ultrasonic waves arranged in the N rows including a straight line that passes through substantially the center of the ultrasonic transducer group and is perpendicular to the radiation surface, that is, a center line. A function of transmitting two ultrasonic beams that are in a plane parallel to the row interval direction of the transducers and have propagation axes in directions symmetric with respect to the center line, that is, a vertical twin beam; By transmitting the transmission wave to the transformer, the center line is included in a plane parallel to the row interval direction of the ultrasonic transducers arranged in the M rows, and is symmetric with respect to the center line. A function of transmitting two ultrasonic beams having a propagation axis in a specific direction, that is, a transverse twin beam, and the fast Fourier transform processing circuit includes ultrasonic waves of each of the two ultrasonic beams forming the longitudinal twin beam. Receiving by reflection of the beam Function of separating the frequency of the signal, and the horizontal twin beam two frequencies of the received signal due to reflection of the respective ultrasonic beam of the ultrasonic beam may have a function of separating forming the.

また、当該超音波フェイズドアレイ送受波器は移動体に搭載されるものであって、前記縦ツインビームを成す2つの超音波ビームの伝播軸を含む面および前記横ツインビームを成す2つの超音波ビームの伝播軸を含む面が前記移動体の進行方向に対して45度の角度を成すように配置してもよい。   The ultrasonic phased array transducer is mounted on a moving body, and includes a plane including propagation axes of two ultrasonic beams forming the vertical twin beam and two ultrasonic waves forming the horizontal twin beam. You may arrange | position so that the surface containing the propagation axis of a beam may make an angle of 45 degrees with respect to the advancing direction of the said mobile body.

また、前記超音波振動子の放射面は正方形または円形であることが望ましい。   The radiation surface of the ultrasonic transducer is preferably square or circular.

本発明の超音波フェイズドアレイ送受波器では、上記のように、従来の矩形板状の小さな超音波振動子の寸法、配列方法および接続方法を従来の方法より変更し、さらに高速フーリエ変換(FFT)処理回路を追加することにより、必要とされる超音波振動子の数および変成器の数が少なく、組立が簡単で安価な超音波フェイズドアレイ送受波器が得られる。例えば、特許文献1の超音波フェイズドアレイ送受波器では、超音波振動子の数量が292個必要であったのに対し、本発明では超音波振動子の数量を60個に減らすことができ、また、変成器の数も2個と少ない。本発明の超音波フェイズドアレイ送受波器により組立が簡単で安価な小型の高度計や速度計を提供することができる。   In the ultrasonic phased array transducer of the present invention, as described above, the size, arrangement method and connection method of the conventional rectangular plate-shaped small ultrasonic transducers are changed from those of the conventional method, and fast Fourier transform (FFT) is performed. ) By adding a processing circuit, the number of ultrasonic transducers and the number of transformers required is small, and an ultrasonic phased array transducer that is easy to assemble and inexpensive can be obtained. For example, in the ultrasonic phased array transducer of Patent Document 1, the number of ultrasonic transducers was 292, whereas in the present invention, the number of ultrasonic transducers can be reduced to 60, Also, the number of transformers is as small as two. The ultrasonic phased array transducer of the present invention can provide a compact altimeter and speedometer that are simple and inexpensive to assemble.

本発明による超音波フェイズドアレイ送受波器の一実施の形態の構成図。1 is a configuration diagram of an embodiment of an ultrasonic phased array transducer according to the present invention. FIG. 本実施の形態の超音波フェイズドアレイ送受波器による超音波ビームを示す斜視図。The perspective view which shows the ultrasonic beam by the ultrasonic phased array transducer of this Embodiment. 本実施の形態の超音波フェイズドアレイ送受波器で得られる送信指向性のチャート図の一例。An example of the chart of transmission directivity obtained with the ultrasonic phased array transducer according to the present embodiment. 従来の超音波フェイズドアレイ送受波器で得られる送信指向性のチャート図の一例。An example of the chart of the transmission directivity obtained with the conventional ultrasonic phased array transducer.

以下、本発明の実施の形態を図面を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は、本発明による超音波フェイズドアレイ送受波器の一実施の形態の構成図であり、超音波振動子の配列とそれらと変成器との結線の状態、および信号処理の入出力回路の構成、さらに放射される超音波ビームの方向を示している。   FIG. 1 is a configuration diagram of an embodiment of an ultrasonic phased array transducer according to the present invention. The arrangement of ultrasonic transducers, the connection state between them and a transformer, and the input / output circuit for signal processing The configuration and the direction of the emitted ultrasonic beam are shown.

図1において、本実施の形態の超音波フェイズドアレイ送受波器1Aは超音波を放射する正方形の放射面に設置された表面電極とその対向する面に設置された裏面電極とを有する超音波振動子2が平面上にN行、M列(ここでは、N=10、M=10)となるように行列配置されてなる超音波振動子群と、2つの平衡2次側の端子F1、F2と1次側の端子とを有する変成器T1、および、2つの平衡2次側の端子R1、R2と1次側の端子とを有する変成器T2とを備えている。また、10行の各行を成す超音波振動子2の中心間の間隔P1および10列の各列を成す超音波振動子2の中心間の間隔P2は、超音波が伝播する水中での波長をλとするとき、0.75λ≦P1≦1.25λ、0.75λ≦P2≦1.25λを満たす値に設定している。さらに、超音波振動子2の表面電極を各行毎に結線して10本の行結線群31とし、超音波振動子2の裏面電極を各列毎に結線して10本の列結線群32とし、さらに10本の行結線群31を奇数行を成す奇数行結線群と偶数行を成す偶数行結線群との2つのグループに分けてそれぞれのグループを結線し、同様に10本の列結線群32を奇数列を成す奇数列結線群と偶数列を成す偶数列結線群との2つのグループに分けてそれぞれのグループを結線し、奇数行結線群と偶数行結線群をそれぞれ変成器T1の平衡2次側の端子F1、F2に接続し、奇数列結線群と偶数列結線群をそれぞれ変成器T2の平衡2次側の端子R1、R2に接続している。   In FIG. 1, an ultrasonic phased array transducer 1A according to the present embodiment has an ultrasonic vibration having a surface electrode installed on a square radiation surface that emits ultrasonic waves and a back electrode installed on the opposite surface. An ultrasonic transducer group in which the child 2 is arranged in a matrix so that there are N rows and M columns (N = 10, M = 10 in this case) on the plane, and two balanced secondary side terminals F1 and F2 And a transformer T2 having two balanced secondary terminals R1 and R2 and a primary terminal. Further, the interval P1 between the centers of the ultrasonic transducers 2 forming 10 rows and the interval P2 between the centers of the ultrasonic transducers 2 forming 10 columns each represent the wavelength in water in which the ultrasonic waves propagate. When λ is set, values satisfying 0.75λ ≦ P1 ≦ 1.25λ and 0.75λ ≦ P2 ≦ 1.25λ are set. Further, the surface electrode of the ultrasonic transducer 2 is connected to each row to form ten row connection groups 31, and the back electrode of the ultrasonic transducer 2 is connected to each column to form ten column connection groups 32. Further, the 10 row connection groups 31 are divided into two groups, an odd row connection group that forms odd rows and an even row connection group that forms even rows, and each group is connected. Similarly, 10 column connection groups 32 is divided into two groups, an odd-numbered column connection group that forms an odd-numbered column and an even-numbered column connection group that forms an even-numbered column, and each group is connected. The secondary-side terminals F1 and F2 are connected, and the odd-numbered and even-numbered connection groups are connected to the balanced secondary-side terminals R1 and R2 of the transformer T2, respectively.

また、本実施の形態では、変成器T1および変成器T2の1次側の端子にそれぞれ接続されこれらの1次側の端子へ送信波を送出しかつこれらの1次側の端子から受信波を受信する機能を有する2つの送受波切替回路4A、4Bと、送受波切替回路4Aおよび4Bに送信波を送出する機能を有する送波ビーム切替回路5と、送受波切替回路4Aおよび4Bからの受信波の一方のみを切り替えて出力する機能を有する受波ビーム切替回路6と、受波ビーム切替回路6からの受信信号を入力しその受信信号を高速フーリエ変換処理する機能を有するFFT処理回路7とを備えている。   In the present embodiment, the transmission wave is transmitted to the primary side terminals of the transformer T1 and the transformer T2, respectively, and the reception wave is transmitted from these primary side terminals. Two transmission / reception switching circuits 4A and 4B having a function of receiving, a transmission beam switching circuit 5 having a function of transmitting transmission waves to the transmission / reception switching circuits 4A and 4B, and reception from the transmission / reception switching circuits 4A and 4B A receiving beam switching circuit 6 having a function of switching and outputting only one of the waves, and an FFT processing circuit 7 having a function of inputting a received signal from the receiving beam switching circuit 6 and performing a fast Fourier transform process on the received signal; It has.

超音波振動子2の具体的一例としては、その形状を、縦9.5mm、横9.5mm、高さ約10mmのブロックとし、このブロックの縦と横の成す正方形面の2面に電極を設け一方を正極、他方を負極としたものを使用することができる。   As a specific example of the ultrasonic transducer 2, the shape is a block having a length of 9.5 mm, a width of 9.5 mm, and a height of about 10 mm. One provided with a positive electrode and the other with a negative electrode can be used.

また、図1に示すように、超音波振動子2の数を60個とし、上から下に行番号を1行目〜10行目とし、右から左に列番号を1列目〜10列目となるように行列配列する。超音波振動子2の配列は、超音波振動子2の正極を表面電極にし、負極を裏面電極として表面電極が表になるように揃える。ここで、図1のように、各行、各列とも同数個の超音波振動子2を配列するのではなく、配列された超音波振動子群の超音波放出面の外形を円形に近づけるように、各行、各列とも配列する超音波振動子2の数を調整している。   Further, as shown in FIG. 1, the number of ultrasonic transducers 2 is 60, row numbers are from the first row to the tenth row from the top to the bottom, and column numbers are from the first column to the tenth column from the right to the left. The matrix is arranged so that it becomes eyes. The arrangement of the ultrasonic transducers 2 is aligned so that the positive electrode of the ultrasonic transducer 2 is a front electrode and the negative electrode is a back electrode, and the front electrode is front. Here, as shown in FIG. 1, instead of arranging the same number of ultrasonic transducers 2 in each row and each column, the outer shape of the ultrasonic emission surface of the arranged ultrasonic transducer group is made close to a circle. The number of ultrasonic transducers 2 arranged in each row and each column is adjusted.

送受波切替回路4A、4Bは、送信信号と受信信号の流れる方向の切り替えを行う。ここで、送波ビーム切替回路5は、送受波切替回路4Aおよび送受波切替回路4Bに送波信号を切り替えて送る回路である。   The transmission / reception wave switching circuits 4A, 4B switch the direction in which the transmission signal and the reception signal flow. Here, the transmission beam switching circuit 5 is a circuit that switches and transmits a transmission signal to the transmission / reception switching circuit 4A and the transmission / reception switching circuit 4B.

図2は、図1に示した本実施の形態の超音波フェイズドアレイ送受波器による超音波ビームを示す斜視図である。送波ビーム切替回路5から送受波切替回路4Aを通して変成器T1へ送出された送信波により、超音波振動子群1Bのほぼ中心を通り放射面に垂直な中心線10を含み、各行に配列された超音波振動子2の行間隔方向に平行な平面内にあって、中心線10に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム9A,9Cからなる縦ツインビームが送出され、送受波切替回路4Bを通して変成器T2へ送出された送信波により、中心線10を含み、各列に配列された超音波振動子2の列間隔方向に平行な平面内にあって、中心線10に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム9B,9Dからなる横ツインビームが送出される。超音波振動子2の配列方向に対する超音波ビームの放射方向を図1の破線に示す。   FIG. 2 is a perspective view showing an ultrasonic beam by the ultrasonic phased array transducer of the present embodiment shown in FIG. The transmission wave transmitted from the transmission beam switching circuit 5 to the transformer T1 through the transmission / reception wave switching circuit 4A includes the center line 10 that passes through substantially the center of the ultrasonic transducer group 1B and is perpendicular to the radiation surface, and is arranged in each row. A vertical twin beam consisting of two ultrasonic beams 9A and 9C, which are in a plane parallel to the row interval direction of the ultrasonic transducer 2 and have propagation axes in directions symmetric with respect to the center line 10, is sent out. The transmission line sent to the transformer T2 through the transmission / reception switching circuit 4B includes the center line 10 and is in a plane parallel to the column interval direction of the ultrasonic transducers 2 arranged in each column. A horizontal twin beam composed of two ultrasonic beams 9B and 9D having propagation axes in directions symmetrical to each other is sent out. The radiation direction of the ultrasonic beam with respect to the arrangement direction of the ultrasonic transducers 2 is shown by a broken line in FIG.

本実施の形態の超音波フェイズドアレイ送受波器を移動体に搭載するとき、図2に示すように、その移動体の進行方向をX方向とするとき、縦ツインビームを成す2つの超音波ビーム9A、9Cの伝播軸9AP、9CPを含む面および横ツインビームを成す2つの超音波ビーム9B、9Dの伝播軸9BP、9DPを含む面がX方向に対して45度の角度を成すように配置する。すなわち、進行方向に対して×字型に配置する。   When the ultrasonic phased array transducer of this embodiment is mounted on a moving body, as shown in FIG. 2, when the moving direction of the moving body is the X direction, two ultrasonic beams forming a vertical twin beam The plane including the propagation axes 9AP and 9CP of 9A and 9C and the plane including the propagation axes 9BP and 9DP of the two ultrasonic beams 9B and 9D forming a transverse twin beam are arranged at an angle of 45 degrees with respect to the X direction. To do. That is, it arrange | positions in x shape with respect to the advancing direction.

FFT処理回路7は、超音波ビーム9A、9Cのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能、および超音波ビーム9B、9Dのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能を有している。すなわち、超音波ビーム9Aと超音波ビーム9Cからの反射波の合成波信号にFFT処理を実施し、それぞれの反射波の周波数を算出する。速度計として使用する場合、移動体が停止していればドップラー周波数偏倚はなく超音波ビーム9Aと超音波ビーム9Cの反射波からは送信周波数と同じ周波数foの1つの周波数が算出される。移動体が航走していれば水中で使用する主な航走体の航走方向は波等によりX方向からのずれが生ずるが、超音波ビーム9Aは前方であるためその反射波の周波数として前方向と右方向の合成周波数fo+Δf、超音波ビーム9Cは後方であるためその反射波の周波数として後方向と左方向の合成周波数fo−Δf(ここでΔfはドップラー周波数偏倚)の2つの周波数が算出される。   The FFT processing circuit 7 separates the frequency of the received signal by the reflection of the ultrasonic beams 9A and 9C, and the frequency of the received signal by the reflection of the ultrasonic beams 9B and 9D. It has a function to separate. That is, FFT processing is performed on the combined wave signal of the reflected waves from the ultrasonic beam 9A and the ultrasonic beam 9C, and the frequency of each reflected wave is calculated. When used as a speedometer, if the moving body is stopped, there is no Doppler frequency deviation, and one frequency fo of the same frequency fo as the transmission frequency is calculated from the reflected waves of the ultrasonic beam 9A and the ultrasonic beam 9C. If the moving body is traveling, the traveling direction of the main traveling body used underwater deviates from the X direction due to waves or the like, but since the ultrasonic beam 9A is ahead, the frequency of the reflected wave is The combined frequency fo + Δf in the forward direction and the right direction, and the ultrasonic beam 9C is behind. Therefore, the frequency of the reflected wave has two frequencies: the combined frequency fo−Δf in the backward direction and the left direction (where Δf is Doppler frequency deviation). Calculated.

同様に、超音波ビーム9Bと超音波ビーム9Dからの反射波の合成波信号にFFT処理を実施し、それぞれの反射波の周波数を算出する。速度計として使用する場合、移動体が停止していればドップラー周波数偏倚はなく同じ周波数foの1つの周波数が算出され、航走していれば前方にある超音波ビーム9Bの反射波の周波数として前方向と左方向の合成周波数fo+Δf、後方にある超音波ビーム9Dの反射波の周波数として後方向と右方向の合成周波数fo−Δf、の2つの周波数が算出される。   Similarly, FFT processing is performed on the combined wave signal of the reflected waves from the ultrasonic beam 9B and the ultrasonic beam 9D, and the frequency of each reflected wave is calculated. When used as a speedometer, if the moving body is stopped, there is no Doppler frequency deviation and one frequency of the same frequency fo is calculated. If the vehicle is sailing, the frequency of the reflected wave of the ultrasonic beam 9B ahead is calculated. Two frequencies of a combined frequency fo + Δf in the forward direction and the left direction and a combined frequency fo−Δf in the backward direction and the right direction are calculated as frequencies of the reflected wave of the ultrasonic beam 9D located behind.

図3は、本実施の形態の超音波フェイズドアレイ送受波器で得られる送信指向性のチャート図の一例を示す。送波ビーム切替回路5により送受波切替回路4Aに送信信号を送り発生させた超音波ビーム9Aと超音波ビーム9Cからなる縦ツインビームと、送波ビーム切替回路5により送受波切替回路4Bに送信信号を送り発生させた超音波ビーム9Bと超音波ビーム9Dからなる横ツインビームについてシミュレーションした結果である。図4に示した従来の超音波フェイズドアレイ送受波器と同様に超音波振動子の超音波の放出面に垂直な方向から±30度の方向に2つの超音波ビームが放出されており、従来よりもサイドローブの少ない良好な指向性が得られている。   FIG. 3 shows an example of a chart of transmission directivity obtained by the ultrasonic phased array transducer according to the present embodiment. The transmission beam switching circuit 5 transmits a transmission signal to the transmission / reception wave switching circuit 4A, and the ultrasonic beam 9A and the longitudinal twin beam composed of the ultrasonic beam 9C are transmitted. The transmission beam switching circuit 5 transmits the transmission signal to the transmission / reception wave switching circuit 4B. It is the result of having simulated about the transverse twin beam which consists of ultrasonic beam 9B and ultrasonic beam 9D which sent and generated the signal. Similar to the conventional ultrasonic phased array transducer shown in FIG. 4, two ultrasonic beams are emitted in the direction of ± 30 degrees from the direction perpendicular to the ultrasonic wave emission surface of the ultrasonic transducer. Good directivity with fewer side lobes is obtained.

以上のように、本発明による超音波フェイズドアレイ送受波器では、超音波振動子を行および列方向をおよそ超音波の波長の間隔で配列し、それらの電極を適切に結線して2つの変成器に接続すること、縦及び横ツインビームからの反射による受波信号をFFT処理で分離検出することにより、超音波振動子の数および変成器の数が減り、配線等の組立が容易になる。   As described above, in the ultrasonic phased array transducer according to the present invention, two transducers are formed by arranging ultrasonic transducers in the row and column directions approximately at intervals of the wavelength of ultrasonic waves, and appropriately connecting those electrodes. By connecting to the detector, and separating and detecting the received signals by reflection from the vertical and horizontal twin beams by FFT processing, the number of ultrasonic transducers and the number of transformers are reduced, and assembly of wiring and the like is facilitated. .

本発明による超音波フェイズドアレイ送受波器は、ドップラー効果を利用する速度計や伝搬時間を利用する高度計などの測定や測量を水中で行う計測機器に広く利用することができる。   The ultrasonic phased array transducer according to the present invention can be widely used in measuring instruments that perform measurement and surveying underwater such as a velocimeter using the Doppler effect and an altimeter using propagation time.

なお、本発明は上記の実施の形態に限定されるものではないことはいうまでもなく、目的や用途に応じて設計変更可能である。例えば、変成器に送信信号を送出する部分の回路の構成や変成器からの受信信号を検出する部分の回路の構成は上記の実施の形態に限定されるものではなく、超音波フェイズドアレイ送受波器に対する要求機能、要求性能によって回路機能の変更や追加が可能である。また、超音波振動子の放射面の形状も正多角形、正方形に近い長方形、円形に近い楕円形なども可能であり、その配列の間隔についても多少のばらつきは許容可能である。超音波振動子の数も要求性能によって設計可能である。   Needless to say, the present invention is not limited to the above-described embodiment, and the design can be changed according to the purpose and application. For example, the configuration of the circuit for transmitting the transmission signal to the transformer and the configuration of the circuit for detecting the reception signal from the transformer are not limited to the above-described embodiment, but are an ultrasonic phased array transmission / reception wave. The circuit function can be changed or added depending on the required function and required performance of the device. In addition, the shape of the radiation surface of the ultrasonic transducer can be a regular polygon, a rectangle close to a square, an ellipse close to a circle, etc., and some variation in the arrangement interval is acceptable. The number of ultrasonic transducers can also be designed according to the required performance.

2 超音波振動子
5 送波ビーム切替回路
6 受波ビーム切替回路
7 FFT処理回路
10 中心線
31 行結線群
32 列結線群
1A 超音波フェイズドアレイ送受波器
1B 超音波振動子群
4A、4B 送受波切替回路
9A、9B、9C、9D 超音波ビーム
9AP、9BP、9CP、9DP 伝播軸
F1、F2、R1、R2 平衡2次側の端子
T1、T2 変成器
2 Ultrasonic transducer 5 Transmitted beam switching circuit 6 Received beam switching circuit 7 FFT processing circuit 10 Center line 31 Row connection group 32 Column connection group 1A Ultrasonic phased array transducer 1B Ultrasonic transducer group 4A, 4B Transmission / reception Wave switching circuit
9A, 9B, 9C, 9D Ultrasonic beams 9AP, 9BP, 9CP, 9DP Propagation axes F1, F2, R1, R2 Balanced secondary terminals T1, T2 Transformer

Claims (5)

超音波を放射する放射面に設置された表面電極とその対向する面に設置された裏面電極とを有する超音波振動子が平面上にN行、M列(NとMは正の整数)となるように行列配置されてなる超音波振動子群と、それぞれ2つの平衡2次側の端子と1次側の端子とを有する第一の変成器および第二の変成器とを有し、
前記N行の各行を成す超音波振動子の中心間の間隔P1および前記M列の各列を成す超音波振動子の中心間の間隔P2が前記超音波が伝播する媒体中での波長をλとするとき、0.75λ≦P1≦1.25λ、0.75λ≦P2≦1.25λであって、
前記表面電極を各行毎に結線してN本の行結線群とし、前記裏面電極を各列毎に結線してM本の列結線群とし、Kを0または正の整数とするとき、前記N本の行結線群を(1+2K)行を成す奇数行結線群と(2+2K)行を成す偶数行結線群との2つのグループに分けてそれぞれのグループを結線し、前記M本の列結線群を(1+2K)列を成す奇数列結線群と(2+2K)列を成す偶数列結線群との2つのグループに分けてそれぞれのグループを結線し、
前記奇数行結線群と前記偶数行結線群をそれぞれ前記第一の変成器の平衡2次側の端子に接続し、前記奇数列結線群と前記偶数列結線群をそれぞれ前記第二の変成器の平衡2次側の端子に接続したことを特徴とする超音波フェイズドアレイ送受波器。
An ultrasonic transducer having a front surface electrode disposed on a radiation surface for radiating ultrasonic waves and a back surface electrode disposed on the opposite surface thereof has N rows and M columns (N and M are positive integers) on a plane. An ultrasonic transducer group arranged in a matrix so as to have a first transformer and a second transformer each having two balanced secondary terminals and a primary terminal,
The interval P1 between the centers of the ultrasonic transducers forming each of the N rows and the interval P2 between the centers of the ultrasonic transducers forming each column of the M columns are the wavelengths in the medium through which the ultrasonic waves propagate. Where 0.75λ ≦ P1 ≦ 1.25λ, 0.75λ ≦ P2 ≦ 1.25λ,
When the front electrode is connected to each row to form N row connection groups, the back electrode is connected to each column to form M column connection groups, and when K is 0 or a positive integer, The row connection group is divided into two groups, an odd row connection group forming (1 + 2K) rows and an even row connection group forming (2 + 2K) rows, and each group is connected, and the M column connection groups are divided into two groups. Dividing into two groups, an odd number column connection group forming a (1 + 2K) column and an even number column connection group forming a (2 + 2K) column, and connecting each group.
The odd row connection group and the even row connection group are respectively connected to terminals on the balanced secondary side of the first transformer, and the odd column connection group and the even column connection group are respectively connected to the second transformer. An ultrasonic phased array transducer connected to a balanced secondary terminal.
前記第一の変成器および第二の変成器の1次側の端子にそれぞれ接続され該1次側の端子へ送信波を送出しかつ該1次側の端子から受信波を受信する機能を有する2つの送受波切替回路と、該2つの送受波切替回路に送信波を送出する機能を有する送波ビーム切替回路と、前記2つの送受波切替回路からの受信波の一方のみを切り替えて出力する機能を有する受波ビーム切替回路と、該受波ビーム切替回路からの受信信号を入力し該受信信号を高速フーリエ変換処理する機能を有する高速フーリエ変換処理回路とを有することを特徴とする請求項1に記載の超音波フェイズドアレイ送受波器。   Each of the first transformer and the second transformer is connected to a primary side terminal and has a function of transmitting a transmission wave to the primary side terminal and receiving a reception wave from the primary side terminal. Two transmission / reception switching circuits, a transmission beam switching circuit having a function of transmitting transmission waves to the two transmission / reception switching circuits, and only one of the reception waves from the two transmission / reception switching circuits are switched and output. A receiving beam switching circuit having a function, and a fast Fourier transform processing circuit having a function of inputting a received signal from the receiving beam switching circuit and performing a fast Fourier transform process on the received signal. 1. The ultrasonic phased array transducer according to 1. 前記第一の変成器への送信波の送出により、前記超音波振動子群のほぼ中心を通り前記放射面に垂直な直線、すなわち中心線を含み、前記N行に配列された超音波振動子の行間隔方向に平行な平面内にあって、かつ前記中心線に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム、すなわち縦ツインビームを送出する機能と、前記第二の変成器への送信波の送出により、前記中心線を含み、前記M列に配列された超音波振動子の列間隔方向に平行な平面内にあって、かつ前記中心線に対して互いに対称な方向に伝播軸を有する2つの超音波ビーム、すなわち横ツインビームを送出する機能とを有し、
前記高速フーリエ変換処理回路は、前記縦ツインビームを成す2つの超音波ビームのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能、および前記横ツインビームを成す2つの超音波ビームのそれぞれの超音波ビームの反射による受信信号の周波数を分離する機能を有することを特徴とする請求項2に記載の超音波フェイズドアレイ送受波器。
By transmitting a transmission wave to the first transformer, the ultrasonic transducers including a straight line that passes through substantially the center of the ultrasonic transducer group and is perpendicular to the radiation surface, that is, a center line, arranged in the N rows. A function of transmitting two ultrasonic beams, that is, longitudinal twin beams, which are in a plane parallel to the row interval direction and have a propagation axis in a direction symmetrical to the center line, and the second transformation By transmitting a transmission wave to a vessel, the directions are in a plane that includes the center line and is parallel to the column spacing direction of the ultrasonic transducers arranged in the M columns, and that are symmetrical with respect to the center line. And two ultrasonic beams having a propagation axis, that is, a function of transmitting a transverse twin beam,
The fast Fourier transform processing circuit has a function of separating a frequency of a reception signal by reflection of each of the two ultrasonic beams forming the vertical twin beam, and a function of separating the two ultrasonic beams forming the horizontal twin beam. 3. The ultrasonic phased array transducer according to claim 2, wherein the ultrasonic phased array transducer has a function of separating the frequency of a reception signal by reflection of each ultrasonic beam.
当該超音波フェイズドアレイ送受波器は移動体に搭載されるものであって、前記縦ツインビームを成す2つの超音波ビームの伝播軸を含む面および前記横ツインビームを成す2つの超音波ビームの伝播軸を含む面が前記移動体の進行方向に対して45度の角度を成すように配置することを特徴とする請求項3に記載の超音波フェイズドアレイ送受波器。   The ultrasonic phased array transducer is mounted on a moving body, and includes a plane including propagation axes of two ultrasonic beams forming the vertical twin beam and two ultrasonic beams forming the horizontal twin beam. 4. The ultrasonic phased array transducer according to claim 3, wherein a plane including a propagation axis is arranged so as to form an angle of 45 degrees with respect to a traveling direction of the moving body. 前記超音波振動子の放射面は正方形または円形であることを特徴とする請求項1〜4のいずれか1項に記載の超音波フェイズドアレイ送受波器。   The ultrasonic phased array transducer according to any one of claims 1 to 4, wherein a radiation surface of the ultrasonic transducer is square or circular.
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