JP5154661B2 - Optical component adjustment method and optical component adjustment system - Google Patents

Description

  The present invention relates to an optical component adjustment method suitable for adjusting an optical component mounted on an optical instrument using a predetermined observation apparatus, and an optical component adjustment system suitable for performing the method.

  For optical devices such as laser printers and projectors, as disclosed in, for example, Japanese Patent Application Laid-Open No. 59-38723, a laser beam emitted from a light source is scanned on a scanned surface with high accuracy. Various optical components such as a container are attached to the housing of the optical device with high accuracy after an adjustment process.

  FIGS. 1 to 3 are diagrams for explaining an adjustment process that is conventionally performed. FIG. 1 is a perspective view showing a configuration of a known adjustment telescope 50 and a pair of optical axis index bodies 202a and 202b used in the adjustment process. A dotted line in FIG. 1 or subsequent figures is a central axis (optical axis) AX of an optical device (not shown) on which various optical components such as a reflection mirror and a deflector are mounted. In this specification, a direction parallel to the central axis AX is defined as “Y direction”, and two directions orthogonal to the Y direction and orthogonal to each other are defined as “X direction” and “Z direction”.

  In order to adjust various optical components, it is necessary to align the optical axis of the adjusting telescope 50 on the central axis AX of the optical device before attaching the various optical components to the housing of the optical device. For this purpose, the worker attaches the pair of optical axis index main bodies 202a and 202b to an attachment portion formed on the housing of the optical device. Since the optical axis index main bodies 202a and 202b are precisely machined, the centers of the cross-shaped indices (intersections of the lines forming the cross) 204a and 204b are positioned substantially on the central axis AX. In addition, it can be attached to the housing of optical equipment with high accuracy. In this state, the operator finely adjusts the position of the telescope body 50a in the X direction or the Y direction while looking through the eyepiece of the adjustment telescope 50, or rotates the telescope body 50a on the XY plane or the YZ plane. Fine-tune the angle of the body. The operator finely adjusts the telescope main body 50a so that the center of the reticle of the adjusting telescope 50 overlaps the two optical axis index centers 204a and 204b. When the two optical axis index centers 204a and 204b overlap the center of the reticle of the adjustment telescope 50, the operation of aligning the optical axis of the adjustment telescope 50 with respect to the center axis AX is completed.

  FIG. 2 is a perspective view showing the configuration of the adjustment telescope 50, the optical axis index bodies 202a and 202b, and the components to be adjusted. FIG. 3 is a perspective view showing the configuration of the adjustment telescope 50, the pair of component index bodies 212a and 212b, and the component to be adjusted. In FIG. 2, in order to clarify the drawing, the parts index bodies 212a and 212b are omitted in addition to the housing of the optical device. In FIG. 3, in order to clarify the drawing, the optical axis index bodies 202a and 202b are omitted in addition to the housing of the optical device.

  The operator attaches various optical components constituting the optical system mounted on the optical device, that is, various adjusted components, to the housing of the optical device, following the alignment operation of the optical axis of the adjustment telescope 50. 2 or 3, the deflector 1 (for example, a galvano mirror) and the reflection mirror 301 are illustrated as components to be adjusted, and illustration of other components to be adjusted is omitted for convenience. Furthermore, the operator attaches the component index main body for adjusting the component index main bodies 212a and 212b and other components to be adjusted not shown to the housing of the optical apparatus. All the index main bodies for components are attached to the casing of the optical apparatus with high accuracy, like the optical axis index main bodies 202a and 202b.

  The deflector 1 has the deflecting unit 10, and the reflecting mirror 301 has the mirror unit 300. The deflection unit 10 has a fine adjustment precision stage 2 that finely adjusts the position or angle of the deflector 1. In the adjustment process, the operator operates the fine adjustment precision stage 2 to adjust the position and angle of the deflector 1. The mirror unit 300 has a mirror base 302 that holds the reflecting mirror 301 so as to be rotatable on the YZ plane. In the adjustment process, the mirror table 302 is temporarily fixed to the housing of the optical device. When the mirror table 302 is in the temporarily fixed state, the operator finely adjusts the position or angle of the reflection mirror 301 by moving the mirror table 302 or the reflection mirror 301 itself by hand. The operator finely adjusts the deflector 1 or the reflection mirror 301 while looking through the eyepiece of the adjustment telescope 50, and the center of the reticle of the adjustment telescope 50 is set to the component index centers 214a and 214b of the component index bodies 212a and 212b. And overlay. When the two component index centers 214a and 214b overlap the reticle center of the adjustment telescope 50, the adjustment of the deflector 1 and the reflection mirror 301 is completed.

  Incidentally, during the adjustment process, for example, the operator's body may come into contact with the adjustment telescope 50 and the adjustment telescope 50 may move, and the optical axis of the adjustment telescope 50 may deviate from the central axis AX. In this case, the operator operates the fine adjustment precision stage 2 to temporarily retract the deflector 1 from the central axis AX. After retracting the deflector 1, the operator finely adjusts the telescope body 50 a while looking through the eyepiece of the adjustment telescope 50, and sets the two optical axis index centers 204 a and 204 b to the center of the reticle of the adjustment telescope 50. Overlay again. When the operator finishes the adjustment operation of the optical axis of the adjustment telescope 50, the operator operates the fine adjustment precision stage 2 to return the deflector 1 to the original position. In order to continue precise adjustment work, it is necessary to return the deflector 1 to the original position with high accuracy.

  In addition, the component index bodies 212a and 212b may not be disposed at the position shown in FIG. 3, that is, on the optical path bent by the reflection mirror 301, due to the mounting space. In this case, the component index bodies 212a and 212b are accurately arranged on an extension line AX '(see FIG. 3) of the central axis AX extending from the deflector 1 to the reflection mirror 301, for example. Here, during the adjustment process, for example, the body of the operator may come into contact with the deflection unit 10 and the deflection unit 10 may move, and the position or angle of the deflection unit 10 may shift. In this case, the operator temporarily rotates the reflection mirror 301 itself or removes the mirror unit 300 from the housing of the optical device in order to temporarily retract the reflection mirror 301 from the central axis AX. After retracting the reflecting mirror 301, the operator re-adjusts the deflector 1 while looking through the eyepiece of the adjusting telescope 50 so that the center of the reticle of the adjusting telescope 50 becomes the two component index centers 214a and 214b. Overlap again. When the operator finishes the readjustment of the deflector 1, the readjustment of the reflection mirror 301 is performed in order to return the reflection mirror 301 to the original position. In order to continue precise adjustment work, it is necessary to readjust the reflection mirror 301 with high accuracy.

  However, it is extremely difficult to return the deflector 1 and the reflection mirror 301 once retracted to their original positions and angles with high accuracy. In order to accurately return the deflector 1 and the reflection mirror 301 to their original positions and angles, there are solutions that introduce, for example, a complicated structure that guarantees position reproducibility and angle reproducibility, and lengthens the adjustment time. is assumed. However, in any case, it is not an effective solution because it causes other adverse effects such as an increase in manufacturing cost and a decrease in mass productivity. In other words, in the adjustment method that has been implemented in the past, the positional accuracy and angular accuracy of another adjustable component is reduced as a compensation for correcting the deviation of the position and angle of the adjusting telescope and the adjustable component that occurred during the adjustment process. This will cause a negative effect. In addition, the optical path shift due to such a decrease in accuracy accumulates as the number of parts to be adjusted increases, and thus has a serious effect on the adjustment work.

  Although there are many documents related to the optical apparatus itself having a plurality of optical components, no appropriate prior art documents related to the background art and the problems described above have been found.

  The present invention has been made in view of the above circumstances, and the object of the present invention is to provide position accuracy and angle accuracy of other optical components even when the position and angle of the optical components are shifted during the adjustment process. It is an object of the present invention to provide an optical component adjustment method suitable for correcting a shift of such an optical component and the like, and an optical component adjustment system suitable for performing the method.

  An optical component adjustment method according to an embodiment of the present invention that solves the above-described problem is a method of adjusting an optical component mounted on an optical apparatus using a predetermined observation device, and has the following characteristics. That is, such an optical component adjustment method is a wavelength selection method in which a wavelength selection type optical component that reflects light having a wavelength used in an optical device and transmits light having a wavelength in at least a partial region other than the wavelength used is attached to the optical device. Mounting optical component step, a first index placement step for placing a predetermined index on the back side of the reflective surface of the wavelength-selective optical component, and a predetermined observation standard possessed by the observation device within the observation range of the observation device And an optical component adjustment step for adjusting the position or angle of at least one optical component optically positioned closer to the observation device than the wavelength selective optical component so that the index and the index satisfy a predetermined positional relationship. It is characterized by.

  According to the optical component adjustment method of the present invention, since the optical component is configured to transmit light having a wavelength in a partial region, the index is different when the optical component shifted from the adjustment position is readjusted. It is observed without moving the optical parts. Therefore, the optical component shifted from the adjustment position can be readjusted without causing a decrease in the positional accuracy and angular accuracy of the other optical components. In addition, since the accuracy of other optical components is not substantially lowered, the optical path deviation due to the accuracy reduction is not accumulated, thereby preventing a precise adjustment operation from being hindered. According to another aspect, since it is not necessary to move the optical component greatly, an effect of shortening the time required for readjustment of the optical component is also achieved.

  In the first indicator placement step, the indicator is placed on, for example, an extension of the optical path of the light of the working wavelength incident on the wavelength selective optical component. Here, the optical component adjustment method according to the present invention may be a method further including a second index arrangement step of arranging an index on an optical path of light having a wavelength used when using an optical device. In this case, it is desirable that the index arranged in the first index arrangement step and the index arranged in the second index arrangement step are different in color or form so that they can be distinguished from each other.

  The predetermined positional relationship is, for example, a relationship in which the positions of the observation reference and the index within the observation range of the observation apparatus coincide.

  In the optical component adjustment step, the index is preferably stored within the depth of field of the objective optical system included in the observation apparatus.

  It is desirable that the index is directly illuminated with a predetermined illumination light so that it can be clearly seen within the observation range of the observation apparatus.

  Except when adjusting the position or angle of at least one optical component in the optical component adjustment step, light of at least a part of the wavelengths other than the used wavelength is used so that an unnecessary index is not reflected in the observation range of the observation device. It is desirable to attach the absorbing member to be absorbed to the back surface of the wavelength selective optical component.

  An optical component adjustment system according to an aspect of the present invention that solves the above-described problem is a system suitable for adjusting an optical component mounted on an optical apparatus using a predetermined observation device. Has characteristics. That is, this optical component adjustment system is a wavelength selective optical component that is attached to an optical device and reflects light having a wavelength used in the optical device and transmits light having a wavelength in at least a partial region other than the wavelength used. And an index disposed on the back side of the reflection surface of the wavelength-selective optical component, and a predetermined observation standard and the index possessed by the observation device satisfy a predetermined positional relationship within the observation range of the observation device As described above, the position or angle of at least one optical component optically positioned on the observation device side from the wavelength selective optical component is configured to be adjustable.

  Here, the index includes a first index disposed on the optical path of the light having the wavelength used, and a second index disposed on an extension of the optical path of the light having the wavelength used, which is incident on the wavelength selective optical component. Therefore, it is desirable that the first index and the second index are different in color or form so that they can be distinguished from each other.

  The optical component adjustment system according to the present invention may further include an illuminating unit that directly illuminates the index in order to clearly display the index within the observation range of the observation apparatus.

  In addition, the optical component adjustment system according to the present invention includes a wavelength selective optical component so that an unnecessary index is not reflected in the observation range of the observation apparatus except when adjusting the position or angle of at least one optical component. It is desirable to further have an absorbing member that is attached to the back surface and absorbs light having a wavelength in at least a partial region other than the used wavelength.

It is a perspective view which shows the structure of the telescope for adjustment used in the adjustment process currently implemented, and the parameter | index jig | tool. It is a perspective view which shows the structure of the telescope for adjustment used in the adjustment process currently implemented, the parameter | index jig | tool, and the to-be-adjusted component. It is a perspective view which shows the structure of the telescope for adjustment used in the adjustment process currently implemented, the parameter | index jig | tool, and the to-be-adjusted component. It is a side view which shows the structure of the optical component adjustment system which adjusts various to-be-adjusted components in embodiment of this invention, and an to-be-adjusted component. It is a perspective view which shows the structure of the optical component adjustment system which adjusts various to-be-adjusted components in embodiment of this invention, and an to-be-adjusted component. It is the schematic which shows the structure of the optical component adjustment system which adjusts various to-be-adjusted components in embodiment of this invention, and an to-be-adjusted component. It is a figure which shows an example of the pattern of the reticle which the telescope for adjustment has. It is a figure which shows the reflection spectrum of the deflection | deviation surface and mirror surface of embodiment of this invention.

  Hereinafter, an optical component adjustment system and an optical component adjustment method according to the present invention will be described with reference to the drawings.

  In an embodiment of the present invention, a plurality of optical components, that is, adjusted components are attached to a housing of an optical device (an optical device that scans laser light on a surface to be scanned, such as a laser printer or a projector). In addition, a plurality of index bodies necessary for adjusting the various parts to be adjusted are attached to the housing of the optical apparatus during the adjustment process. In each of the drawings explaining the present embodiment, the housing of the optical device is not shown for the sake of clarity. In the following drawings, the same or similar components as those shown in FIGS. 1 to 3 are denoted by the same or similar reference numerals, and the description thereof will be omitted.

  4, 5, and 6 are a side view, a perspective view, and a schematic view, respectively, showing a configuration of a system (optical component adjustment system) for adjusting various adjusted components in the embodiment of the present invention. In FIG. 4, in order to schematically describe the configuration of the adjustment telescope 50, some components incorporated in the adjustment telescope 50 are indicated by broken lines. 4 and FIG. 5, the deflector 11 (for example, a galvano mirror) and the reflection mirror 301 are illustrated as components to be adjusted, and illustration of other components to be adjusted is omitted for the sake of convenience. 4 and 5 show the component index bodies 212a and 212b, and the other index bodies are not shown for convenience. FIG. 6 illustrates the deflector 11 and the reflection mirrors 301, 401, 501, and 601 as the components to be adjusted, and the illustration of other components to be adjusted is omitted for the sake of convenience. FIG. 6 illustrates the optical axis index bodies 202a and 202b and the component index bodies 212a, 212b, 222a, and 222b, and the other index bodies are not shown for convenience.

  Also in the adjustment process of the present embodiment, as in the prior art, first, the optical axis of the adjustment telescope 50 is aligned with the central axis (optical axis) AX of the housing of the optical device. Such an optical axis alignment operation will be described with reference to FIG. 1 with reference to the configuration diagram of the adjustment telescope 50 shown in FIG. 4 or FIG.

  The telescope 50 for adjustment includes, for example, an alignment telescope of Coastal Optical System ([November 2008 search], Internet, URL: <http://www.coastalopt.com/index.php?option=com_docman&task = doc_download & gid = 11 & Itemid = 99999999>) is used. As shown in FIG. 4, the adjustment telescope 50 holds an objective optical system 54, a reticle 55, and an eyepiece optical system 56 inside a telescope body 50a. The light incident on the objective optical system 54 from the outside of the telescope body 50a passes through various optical elements (not shown) inside the telescope body 50a and forms an intermediate image on the reticle 55. The operator observes the reticle 55 and an image formed on the reticle 55 through the eyepiece optical system 56. Although the objective optical system 54 and the eyepiece optical system 56 are each shown as a single lens in FIG. 4, they are actually composed of a plurality of lenses.

  As shown in FIG. 4 or FIG. 5, the adjustment telescope 50 has a focusing knob 57. In the objective optical system 54, some lens groups move according to the amount of operation of the focusing knob 57 by the operator. The focal position of the objective optical system 54 is adjusted by moving the lens group in conjunction with the focusing knob 57. In the alignment operation of the optical axis of the adjusting telescope 50, the objective optical system 54 is focused so that any of the optical axis index centers 204a and 204b disposed on the substantially central axis AX is within the depth of field. Adjusted. Note that the extension line where the optical axis index centers 204a and 204b are located, which extends to the opposite side of the adjustment telescope 50 with the deflector 11 interposed therebetween, is not strictly the central axis AX of the optical apparatus, but here it is for convenience of explanation. The center axis AX is described.

  The adjustment telescope 50 includes a vertical adjustment micrometer 58 and a horizontal adjustment micrometer 59. The vertical adjustment micrometer 58 and the horizontal adjustment micrometer 59 are interlocked with the reticle 55. The reticle 55 moves in the Z direction or the X direction according to the operation amount of the vertical adjustment micrometer 58 or the horizontal adjustment micrometer 59 by the operator. FIG. 7 shows an example of the pattern of the reticle 55 that appears in the visual field range 60 of the telescope 50 when the adjustment telescope 50 is viewed.

  The operator adjusts the pattern center 55 c of the reticle 55 to the center of the visual field range 60 by using the vertical adjustment micrometer 58 or the horizontal adjustment micrometer 59 while looking through the eyepiece of the adjustment telescope 50. Then, the operator finely adjusts the position of the telescope main body 50a in the X direction or the Y direction as shown in FIG. 1, or rotates the telescope main body 50a on the XY plane or the YZ plane to change the angle of the main body. Are finely adjusted, and the pattern center 55c of the reticle 55 is superimposed on the two optical axis index centers 204a and 204b. Thereby, the alignment operation of the optical axis of the telescope for adjustment 50 is completed.

  The operator attaches various parts to be adjusted to the housing of the optical device after the adjustment operation of the optical axis of the adjustment telescope 50. FIG. 6 shows the deflector 11 and the reflection mirrors 301, 401, 501, and 601 as the components to be adjusted that are attached to the housing of the optical device. However, in practice, more parts to be adjusted are attached to the housing of the optical device. As shown in FIG. 4 or 5, the deflector 11 has the deflecting unit 100, and the reflecting mirror 301 has the mirror unit 300. Similar to the reflection mirror 301, the reflection mirrors 401, 501, and 601 are rotatably held on the YZ plane by a mirror base (not shown).

  The deflection unit 100 includes a fine adjustment precision stage 2 in addition to the deflector 11. The fine adjustment precision stage 2 includes a general-purpose stage (for example, TSD-409C, TSD-409S, TSD-609C, TSD-609, manufactured by Sigma Koki Co., Ltd.) that finely adjusts the position or angle of the component to be adjusted in the four-axis direction. 609S etc. ([November 2008 search], Internet, URL: <http://www.sigma-koki.com/english/C/ManualStages/MultiAxezStages/TSD-XYZQ/TSD-XYZQ.html>)) Is used. In the adjustment process, the operator operates the fine adjustment precision stage 2 to finely adjust the position of the deflector 11 in the X, Y, and Z directions, or the angle of the deflector 11 on the XY plane. Fine adjustments can be made. The angle of the deflector 11 on the YZ plane can be adjusted electrically or manually by an actuator not shown.

  The operator also attaches a component indicator main body for adjusting the component to be adjusted to the housing of the optical device. FIG. 6 shows component index bodies 212a, 212b, 222a, and 222b as component index bodies that are attached to the housing of the optical apparatus. However, in practice, more parts index bodies are attached to the housing of the optical device. Although all the component index bodies attached to the housing have a dimensional difference or the like, the basic configuration is the same as the component index bodies 212a and 212b.

  Since the component index bodies 212a and 212b are precisely machined, the component index centers 214a and 214b (the centers of the cross-shaped indices of the component index bodies 212a and 212b) are substantially on the central axis AX. It is attached to the casing of the optical device with high accuracy so as to be positioned at the position. The component index main bodies 222a and 222b are housings of the optical apparatus such that the component index centers 224a and 224b are positioned on a substantially extended line AX1 (see FIG. 6) of the central axis AX extending from the reflection mirror 501 to the reflection mirror 601. Can be attached with high accuracy.

  Among the components to be adjusted, the mirror surface 601R of the deflecting surface 11P of the deflector 11 and the reflecting mirror (here, the reflecting mirror 601 shown in FIG. 6) in which the component index main body is arranged on the back side has a specific wavelength range ( Specifically, a special coating is applied so as to reflect only light in a region including a used wavelength actually used for scanning by an optical instrument. FIG. 8 shows the reflection spectra of the deflection surface 11P and the mirror surface 601R. The vertical axis in FIG. 8 indicates the reflectance (unit:%), and the horizontal axis in FIG. 8 indicates the wavelength (unit: nm). Further, the solid line in FIG. 8 indicates the P-polarized reflection spectrum, and the broken line in FIG. 8 indicates the S-polarized reflection spectrum. As shown in FIG. 8, each surface of the deflection surface 11P and the mirror surface 601R is configured to mainly reflect light having a wavelength in the vicinity of 380 to 450 nm and transmit light having other wavelengths. Further, the rear surfaces of the deflection surface 11P and the mirror surface 601R are configured to transmit light having a wavelength in the visible light region and the vicinity thereof. In other words, the light incident on the deflector 11 and the reflection mirror 601 reflects light having a wavelength in the vicinity used for scanning, and transmits light having other wavelengths. On the other hand, the mirror surfaces of the reflection mirrors 301, 401, and 501 are general mirror surfaces, and reflect light having a wavelength in the visible light region and the vicinity thereof, for example.

  The operation of adjusting the deflector 11 and the reflection mirror 301 will be described with reference to FIGS. The operator performs fine adjustment of the deflector 11 or the reflection mirror 301 while looking through the eyepiece of the adjustment telescope 50. Specifically, the operator operates the focusing knob 57 of the adjustment telescope 50 to focus the objective optical system 54 so that the component index centers 214a and 214b are within the depth of field of the objective optical system 54. Adjust. Next, the operator operates the fine adjustment precision stage 2 to adjust the position and angle of the deflector 11, while moving the mirror table 302 or the reflection mirror 301 by hand to adjust the position and angle of the reflection mirror 301. The pattern center 55c of the reticle 55 is overlapped with the component index centers 214a and 214b. When the two component index centers 214a and 214b overlap the pattern center 55c, both the deflector 11 and the reflection mirror 301 are adjusted to appropriate positions and angles. When the operator finishes the adjustment of the deflector 11 and the reflection mirror 301, the clamps of the fine adjustment precision stage 2 are tightened, and the mirror stage 302 is finally tightened to attach the deflector 11 and the reflection mirror 301 to the optical device. Secure to the chassis.

  By the way, as described above, the deflecting surface 11P of the deflector 11 transmits light having a wavelength in a partial region, so that the index images of the component index bodies 212a and 212b are reflected by the deflecting surface 11P and each of its back surfaces. Thus, there is a disadvantage that the double image of the index is observed within the visual field range 60 of the adjustment telescope 50. In order to prevent the occurrence of such a double image, in principle, a monochromatic plain paper or the like (a member that absorbs light having a wavelength in the visible light region and its vicinity) is attached to the back surface of the deflection surface 11P in principle during the adjustment process. ing.

  Here, during the adjustment process, for example, the operator's body may come into contact with the adjustment telescope 50 and the adjustment telescope 50 may move, and the optical axis of the adjustment telescope 50 may deviate from the central axis AX. In this case, the operator removes the paper attached to the back surface of the deflection surface 11P and rotates the deflection surface 11P at an angle substantially orthogonal to the optical axis AX. Next, the operator adjusts the focus of the objective optical system 54 by operating the focusing knob 57 while looking through the eyepiece of the adjusting telescope 50. When the focal point of the objective optical system 54 is moved rearward from the deflection surface 11P, the deflector 11 transmits light having a wavelength in a partial region into the visual field range 60 of the adjustment telescope 50. An image of an object located on the side (excluding an image of light having a wavelength in the vicinity used for scanning), that is, an image of an index on the optical axis index bodies 202a and 202b is observed.

  Therefore, the operator can perform the alignment operation of the optical axis of the adjustment telescope 50 without operating the fine adjustment precision stage 2 to retract the deflector 11 from the central axis AX. Thus, according to the adjustment method of the present embodiment, it is not necessary to operate the fine adjustment precision stage 2 to move the deflector 11. Therefore, the problem that the positional accuracy and the angular accuracy of the deflector 11 that have conventionally occurred when correcting the positional and angular deviation of the adjusting telescope 50 is effectively avoided. Since such a decrease in accuracy does not substantially occur, the optical path shift caused by the decrease in accuracy does not accumulate and prevent precise adjustment work. According to another aspect, since it is not necessary to retract the deflector 11 from the central axis AX, an effect of shortening the time required for the alignment operation of the optical axis of the adjustment telescope 50 is also achieved.

  Next, an operation for adjusting the reflection mirrors 401 and 501 will be described with reference to FIG. Similarly to the back surface of the deflecting surface 11P, monochromatic plain paper or the like is attached to the back surface of the surface having wavelength selectivity such as the mirror surface 601R. The operator removes the paper on the back surface of the mirror surface 601R when adjusting the reflection mirrors 401 and 501. Next, the operator finely adjusts the reflection mirror 401 or 501 while looking through the eyepiece of the adjustment telescope 50. Specifically, the operator operates the focusing knob 57 of the adjustment telescope 50 to focus the objective optical system 54 so that the component index centers 224a and 224b are within the depth of field of the objective optical system 54. Adjust. Next, the operator manually adjusts the position and angle of the reflecting mirror 401 or 501 by moving the mirror base of each reflecting mirror or the reflecting mirror 401 or 501 by hand, and sets the pattern center 55c of the reticle 55 to the component index center 224a, Overlapping with 224b. When the two component index centers 224a and 224b overlap the pattern center 55c, the reflection mirrors 401 and 501 are adjusted to appropriate positions and angles. When the operator finishes the adjustment of the reflection mirrors 401 and 501, the paper is pasted on the back surface of the mirror surface 601R again. Further, the mirror bases of the reflection mirrors 401 and 501 are finally tightened to fix the reflection mirrors 401 and 501 to the housing of the optical device.

  During the adjustment of the reflecting mirror 601, not only the indices of the component index bodies 222a and 222b but also the indices of the component index bodies 212a and 212b are blurred in the visual field range 60 of the adjustment telescope 50. The indexes of the component index bodies 212a and 212b have different cross angles, colors, or shapes so that they can be distinguished from all other indexes. For this reason, the operator does not confuse the index of the component index bodies 212a and 212b with another index (here, the index of the component index bodies 212a and 212b) of the component to be adjusted (here, the reflection mirrors 401 and 501). Adjustments can be made.

  In the present embodiment, since the deflector 11, the reflection mirror 601 and the like reflect only light having a wavelength in a partial region, an index at a position optically separated from the adjustment telescope 50 is within the visual field range 60 of the adjustment telescope 50. There is a concern that it will appear dark and blurred. Since the index at a position optically separated from the adjusting telescope 50 is also clearly captured in the visual field range 60, each index is directly illuminated by, for example, white light from an incandescent lamp.

  Here, during the adjustment process, for example, the body of the operator may hit any of the adjusted parts, and the adjusted part may be displaced from the adjustment position. In this case, the operator performs the following operations in order to identify and re-adjust the part to be adjusted that has shifted from the adjustment position.

  That is, the operator looks through the eyepiece of the adjustment telescope 50 and confirms whether the pattern center 55c of the reticle 55 is overlapped with the component index centers 214a and 214b. When the component index centers 214a and 214b are observed deviating from the pattern center 55c, at least one of the deflector 11 and the reflecting mirror 301 is deviated from the adjustment position. For this reason, the operator performs adjustment work of the deflector 11 or the reflection mirror 301.

  On the other hand, when the pattern center 55c is observed so as to overlap with the component index centers 214a and 214b, the parts to be adjusted other than the deflector 11 and the reflection mirror 301 are shifted from the adjustment positions. The operator removes the paper on the back surface of the mirror surface 601R of the reflection mirror 601 in order to specify the part to be adjusted that is shifted from the adjustment position. When the component index centers 224a and 224b are observed deviating from the pattern center 55c, at least one of the reflection mirror 401 or 501 is deviated from the adjustment position. Therefore, the operator performs the adjustment work of the reflection mirror 401 or 501.

  When the pattern center 55c is observed so as to overlap with the component index centers 224a and 224b, any of the adjusted components that are optically separated from the adjustment telescope 50 rather than the reflection mirror 501 are shifted from the adjustment position. become. The operator continues the same operation as described above, and specifies the part to be adjusted that has deviated from the adjustment position and readjusts the specified part to be adjusted.

  As described above, according to the adjustment method of the present embodiment, it is not necessary to move another adjusted component when specifying the adjusted component shifted from the adjustment position. Therefore, the problem that the position accuracy and angle accuracy of the other part to be adjusted, which has conventionally occurred when readjusting the part to be adjusted that is shifted from the adjustment position, can be effectively avoided. Since such a decrease in accuracy does not substantially occur, the optical path shift caused by the decrease in accuracy does not accumulate and prevent precise adjustment work. According to another aspect, since it is not necessary to retract the adjusted component from the central axis AX, an effect of shortening the time required for readjustment of the adjusted component is also achieved.

  Note that the mirror surface 601R and the back surface of the reflection mirror 601 are disposed to be inclined with respect to the central axis AX. Therefore, the images of the component index centers 224 a and 224 b are refracted when passing through the reflection mirror 601. Therefore, when the component index centers 224a and 224b are located on the extension line AX1, strictly speaking, they are not overlapped with the pattern center 55c of the reticle 55 and are observed to be shifted from the center 55c. However, the amount of deviation at this time is so small that it can be ignored.

  On the other hand, the shift amount is known, for example, from the angle and refractive index of the reflection mirror 601, the positions of the component index bodies 222a and 222b, and the like. The operator may adjust the pattern center 55c and the component index center 224a or 224b in consideration of a known deviation amount in order to perform a more accurate adjustment operation. According to another aspect, in order to further improve the adjustment accuracy, the component index centers 224a and 224b correspond to the amount of deviation from the extension line AX1 when the component index bodies 222a and 222b are attached to the housing. The component index bodies 222a and 222b may be configured so as to be shifted by a distance. According to this configuration, both the component index centers 224a and 224b form an image on the pattern center 55c of the reticle 55 by refraction by the reflection mirror 601 and the optical action of the optical system inside the telescope body 50a.

  The above is the embodiment of the present invention. The optical component adjustment system and the optical component adjustment method according to the present invention are not limited to the above configuration or method, and various modifications are possible within the scope of the technical idea of the present invention. For example, in order to adjust the part to be adjusted, at least one index may be arranged on the side farthest from the adjusting telescope 50 of the part to be adjusted optically farthest from the adjusting telescope 50.

  The shape of each index is not limited to a cross shape. Each index only needs to have a form that allows the operator to specify the center of the index, for example.

Claims (12)

In an optical component adjustment method for adjusting an optical component mounted on an optical device using a predetermined observation device,
A wavelength-selective optical component mounting step that attaches a wavelength-selective optical component that reflects light of a wavelength used in the optical device and transmits light of a wavelength in at least a partial region other than the wavelength used to the optical device;
A first index arrangement step of arranging a predetermined index on the back side of the reflection surface of the wavelength-selective optical component;
At least optically positioned closer to the observation device than the wavelength-selective optical component so that a predetermined observation standard of the observation device and the index satisfy a predetermined positional relationship within the observation range of the observation device An optical component adjustment step for adjusting the position or angle of one optical component;
An optical component adjustment method comprising:   The said 1st parameter | index arrangement | positioning step WHEREIN: The said parameter | index is arrange | positioned on the extension line | wire of the optical path of the light of the said use wavelength which injects into the said wavelength selection type optical component, The Claim 1 characterized by the above-mentioned. Optical component adjustment method. A second indicator arrangement step of arranging an indicator on the optical path of the light having the wavelength used when using the optical device;
The indicator arranged in the first indicator placement step and the indicator placed in the second indicator placement step are different in color or form so that they can be distinguished from each other. Optical component adjustment method.   4. The optical according to claim 1, wherein the predetermined positional relationship is a relationship in which positions of the observation reference and the index coincide with each other within an observation range of the observation apparatus. Parts adjustment method.   5. The optical component adjustment method according to claim 1, wherein the index is stored within a depth of field of an objective optical system included in the observation device in the optical component adjustment step. .   6. The optical component adjustment method according to claim 1, wherein the index is directly illuminated by predetermined illumination light.   Except when adjusting the position or angle of the at least one optical component in the optical component adjustment step, an absorbing member that absorbs light of at least a partial region of wavelengths other than the used wavelength is used for the wavelength selective optical component. The optical component adjustment method according to claim 1, wherein the optical component adjustment method is attached to the back surface. In an optical component adjustment system suitable for adjusting an optical component mounted on an optical device using a predetermined observation device,
A wavelength-selective optical component that is attached to the optical device and reflects light having a wavelength used in the optical device and transmits light having a wavelength in at least a partial region other than the wavelength used;
An index placed on the back side of the reflective surface of the wavelength-selective optical component;
Have
At least optically positioned closer to the observation device than the wavelength-selective optical component so that a predetermined observation standard of the observation device and the index satisfy a predetermined positional relationship within the observation range of the observation device An optical component adjustment system, wherein the position or angle of one optical component is adjustable.   9. The optical component adjustment system according to claim 8, wherein the index is arranged on an extension line of an optical path of light of the used wavelength incident on the wavelength selective optical component. The index includes a first index arranged on the optical path of the light having the used wavelength and a second index arranged on an extension line of the optical path of the light having the used wavelength incident on the wavelength selective optical component. There is
The optical component adjustment system according to claim 9, wherein the first index and the second index are different in color or form so as to be distinguished from each other.   The optical component adjustment system according to claim 8, further comprising an illuminating unit that directly illuminates the index.   An absorbing member that is attached to the back surface of the wavelength-selective optical component other than when adjusting the position or angle of the at least one optical component and absorbs light of at least a partial region of wavelengths other than the used wavelength; The optical component adjustment system according to claim 8, comprising: an optical component adjustment system according to claim 8.

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