JP5152371B2 - Actuator - Google Patents

Description

  The present invention relates to an actuator that can be suitably used in a clean room, and more particularly to a seal structure of the actuator.

The amount of dust in the atmosphere is controlled in a clean room, and low dust generation performance is also required for an actuator that is used in such a clean room and moves a workpiece in a straight line.
Conventionally, there has been known a low dust generation actuator which attempts to meet such a demand, and an example thereof is shown in FIGS.

As shown in FIGS. 10 to 13, the actuator includes a carriage 10 that attaches a work (not shown) to the seating surface 20 and linearly reciprocates a predetermined distance, and a linear motion device that linearly reciprocates the carriage 10. A linear guide device 52 (for example, a linear guide device) that guides the linear movement of the carriage 10 and a linear drive device 51 (for example, a ball screw device or a linear motor device) that linearly moves the carriage 10 are provided inside the housing 30. The housing 30 is formed to have a length capable of accommodating the linearly reciprocating carriage 10 and the linear motion device. Further, the linear drive device 51 (in the case other than the linear motor) includes a drive transmission means 54 (for example, in the case of FIG. 10 or the like, drive transmission by a belt and a pulley, and in the case of FIG. 12 or the like, drive transmission by a joint (not shown)). ) Is driven by a driving source 53 (for example, a motor) installed so as to be able to transmit a driving force to the linear driving device 51.
Further, the one surface 31 of the housing 30 of the actuator has a slit S opened along the movement path of the carriage 10, and the mounting portion 11 of the carriage 10 on which the seat surface 20 is mounted has a gap with the slit S. And protrudes from the outer surface of the housing 30.
As a result, the mounting portion 11 can reciprocate linearly along the slit S.

  As a seal structure of such an actuator, a pair of guide grooves 33 that are opposed to each other in a direction sandwiching the opening of the slit S are formed on the pair of opposed end surfaces 32 of the slit S over the entire length of the slit S. There is known a seal structure in which a belt-like seal member, for example, a seal belt 40 is guided in the guide groove 33 of the slit S to seal the opening of the slit S. The seal belt 40 is guided to the inside of the housing S at both axial ends 34, 34 of the slit S, and forms a movable loop inside the housing S (for example, arranged on both ends in the longitudinal direction of the housing 30). A movable loop is formed in the length direction of the housing 30 via the provided pulley 41).

As shown in FIGS. 14 and 15, the mounting portion 11 of the carriage 10 that passes through the slit S of the housing 30 and protrudes to the outer surface of the housing 30 includes an attachment portion 12 that attaches the seating surface 20 and a seal belt 40. A fixing surface 112 for fixing is provided. The mounting portion 12 is formed such that the central portion of the mounting portion 11 in the axial direction (see the double-headed arrow in FIG. 14) protrudes in a stepped manner, and the fixing surface 112 has slits S on each axial direction side of the mounting portion 12. The guide groove 33 is formed so as to be opposed in the same plane.
The seal belt 40 forming a movable loop inside the housing 30 is routed to the outer surface side of the one surface 31 of the housing 30 and provided on the one surface 31 of the housing 30 as shown in FIGS. It is guided in the guide groove 33 of the slit S. The ends of the seal belt 40 are fixed to the pair of divided fixing surfaces 112 (for example, the seal belt 40 is fastened together with the male screw 113 and the female screw provided on the fixing surface 112). Has been.
With such a configuration, the seal belt 40 moves with the linear reciprocation of the mounting portion 11, and is guided by the guide groove 33 of the slit S to seal the opening of the slit S. Furthermore, a suction mechanism (not shown) is connected to the actuator so as to suck the inside air of the housing 30 (Patent Document 1 and Patent Document 2).

  10 and 11 show the case where the seating surface 20 for mounting the workpiece is mounted on one mounting portion 11, but as shown in FIGS. 12 and 13, the seating surface for mounting the workpiece. Even when 20 is mounted on two mounting portions 11, the configuration of the actuator is such that the size in the width direction of the housing 30 and the number of slits S, the number of seal belts 40, and the like are adjusted in accordance with the arrangement of the mounting portions 11. Although the arrangement of the movable loop of the seal belt 40 (for example, the pulley 41) is changed, the relationship between the linear guide device 52 and the linear drive device 51 is an example in which there is one mounting portion 11 (FIG. 10). And the configuration of FIG. 11).

In such a seal structure, the opening of the slit S is substantially closed, and the inside air of the housing 30 is sucked to suppress the discharge of dust to the outside.
However, there is still room for improvement in order to meet the demand for higher speed of the carriage 10 and more stringent cleanliness.
As shown in FIG. 15, in the region between the both ends of the slit in the moving direction of the mounting portion 11 (see the double arrow in the figure) and the mounting portion 11 (region F2 in the drawing, hereinafter referred to as F2 region), the slit S Is substantially sealed by the seal belt 40, so that the inside and the outside of the housing 30 can be substantially separated, so that the effect of low dust generation can be expected.
However, in the facing region (the region F1 in the drawing, hereinafter referred to as the F1 region) between the side surface 111 and the slit S perpendicular to the moving direction of the mounting portion 11 of the carriage 10 (see the double arrow in the drawing), the carriage 10 There is a gap G between the S and the slit S. As a result of the investigation, despite the combined use of the suction mechanism, there is still discharge of dust to the outside through this part. , Turned out to be negligible.

JP 2003-49921 A JP 2004-84824 A

  An object of the present invention is to provide an actuator, particularly an actuator sealing structure, which seals the entire area of a slit provided in a housing and has a high effect of low dust generation and can be suitably used in a clean room.

In order to achieve the above object, the present invention includes a carriage having a mounting portion on which a seat surface is mounted, a linear motion device that linearly reciprocates the carriage, the carriage and the linear motion device, and the carriage including the carriage. A housing having a length that can linearly reciprocate in the axial direction of the linear motion device , and a suction mechanism that sucks the inside air of the housing , and a slit that opens along the movement path of the carriage on one surface of the housing The opening of the slit is mounted in a state where the carriage mounting portion protrudes to the outside of the housing through the slit and the inside air is sucked by the suction mechanism and the inside of the housing is kept at a negative pressure. in the actuator having a sealing structure that is sealed while moving along with the movement of the parts, the sealing structure is slit both ends in the mounting portion moving direction and tower And a gap seal member that seals the gap between the side surface of the mounting portion and the slit in the direction orthogonal to the mounting portion moving direction, and a slit opening member The pair of opposed end faces are provided with a pair of guide grooves that are opened facing each other across the entire length of the slit and sandwiching the slit, and the gap seal member is guided to the guide groove together with the belt-shaped seal member. This seals the entire area of the slit opening and separates the inside and outside of the housing, and the guide groove is narrower on the groove bottom side or on the slit end face side than the other. In the seal structure, the gap seal member is formed separately from the belt-like seal member, and the gap provided in the mounting portion is sealed so as to seal the gap between the side surface of the mounting portion and the slit. In addition, the mounting portion is mounted in the axial center of the mounting portion so as to protrude in a stepped shape to form a mounting surface, and a fixing surface facing the slit is formed on each axial direction side of the mounting portion. A band-shaped seal member that seals a region between the both ends of the slit in the moving direction of the mounting portion and the mounting portion is fixed to each fixed surface, and the bowl-shaped sealing member is an end surface of the mounting portion that faces the slit. And a distal end portion extending from the proximal end portion toward the end surface of the slit of the housing in the same plane as the belt-like seal member, A facing region between the side surface orthogonal to the moving direction of the mounting portion and the slit is sealed.

  In that case, a pair of guide grooves that are opened to face each other in the direction of sandwiching the slits over the entire length of the slits are provided on a pair of opposed end faces of the slit openings, and a belt-like seal member and a bowl-like seal are provided. It is preferable to have a seal structure in which a seal is formed by the member being guided in the guide groove.

The belt-like seal member can be a seal belt that is guided into the housing at both axial ends of the slit and forms a movable loop inside the housing.
Further, the bowl-shaped seal member can be integrally formed on the side surface of the mounting portion.

  According to the present invention, it is possible to provide an actuator, particularly an actuator sealing structure, which seals the entire area of the slit provided in the housing, has a high effect of low dust generation, and can be suitably used in a clean room. became.

(A) is a perspective view which shows the relationship between the carriage and seal belt of the seal structure of the actuator which concern on the 1st Embodiment of this invention, (b) is the assembly figure of the figure (a). Sectional drawing along the width direction of the actuator provided with the seal structure which concerns on the 1st Embodiment of this invention. (A) is a principal part expanded sectional view which shows an example of the relationship between a seal belt and the guide groove of a slit, (b) is a principal part expanded cross section which shows the other example of the relationship between a seal belt and the guide groove of a slit. FIG. 4C is an enlarged cross-sectional view of a main part showing another example of the relationship between the seal belt and the guide groove of the slit. The top view which shows the relationship between the seal structure of the actuator which concerns on the 1st Embodiment of this invention, and a slit. (A) is a perspective view which shows the relationship between the carriage and seal belt of the seal structure of the actuator which concern on the 2nd Embodiment of this invention, (b) is the assembly figure of the figure (a). (A) is a perspective view which shows the relationship between the carriage and seal belt of the seal structure of the actuator which concern on the modification of 2nd Embodiment, (b) is an assembly drawing of the figure (a). Sectional drawing which shows the structure of the conventional bearing unit. (A) is a perspective view which shows the relationship between the carriage and seal belt of the seal structure of the actuator which concern on the 3rd Embodiment of this invention, (b) is the assembly figure of the figure (a). Sectional drawing along the width direction of the actuator provided with the seal structure which concerns on the 3rd Embodiment of this invention. The top view which shows the relationship between the seal structure of the actuator which concerns on the 3rd Embodiment of this invention, and a slit. The perspective view which shows an example of a structure of the conventional actuator. FIG. 11 is a partial cross-sectional view taken along the line AA in FIG. 10 showing an example of the configuration of a conventional actuator. The perspective view which shows the other example of a structure of the conventional actuator. The fragmentary sectional view in alignment with the BB line of FIG. 12 which shows the other example of a structure of the conventional actuator. The perspective view which shows the relationship between the carriage and seal belt of the sealing structure of the conventional actuator. The top view which shows the relationship between the seal structure of the conventional actuator, and a slit.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In the present invention, a region between the slit both ends of the slit S provided in the housing 30 and the mounting portion 11 (hereinafter, this opening region is also referred to as an F2 region), and a side surface orthogonal to the moving direction of the mounting portion 11. The entire area of the slit opening (hereinafter, this entire opening area is also referred to as F area) of the opposing area between 111 and the slit S (hereinafter, this opening area is also referred to as F1 area) is sealed. Although it isolates the inside from the outside, it has a feature in the seal structure that seals the gap G between the slit S and the mounting portion 11 particularly in the F1 region. Specific embodiments thereof will be described below in detail with reference to FIGS.

In addition, since the structure of the prior art mentioned above including the seal structure in F2 area | region can be employ | adopted for structures other than the seal structure in F1 area | region, here, the seal structure in F1 area | region which is a structure peculiar to this invention is centered. The description of other components will be omitted.
Moreover, although the case of the actuator provided with the two mounting parts 11 is demonstrated in the following embodiments, the seal structure by this invention is applicable also in the case of the actuator provided with the one mounting part 11. FIG. Further, the types and types of the linear guide device, the linear drive device, the drive source, etc. are not limited to the following embodiments.

  1 to 4 show a first embodiment of the present invention. A mounting portion 11 of a carriage 10 to which a seating surface 20 is attached and an F1 region of a slit S are formed by a belt-like seal member fixed to the mounting portion 11 of the carriage 10. The seal structure to seal is shown. In addition, the thing of the structure similar to the past is used for the mounting part 11. FIG.

In this embodiment, a seal belt 40 is employed as the belt-like seal member. The seal belt 40 is formed so that the entire length of the slit S can be continuously sealed with the movement of the mounting portion 11. The seal belt 40 is guided into the housing 30 from both end sides 34 and 34 of the slit S, and is disposed in a loop shape inside the housing 30, thereby forming a movable loop. For example, in the present embodiment, a movable loop is formed through pulleys 41 disposed on both ends in the length direction of the housing 30 as in the conventional case (see FIGS. 10 and 12).
The means for forming the movable loop may be any means as long as the seal belt 40 can move smoothly, and is not particularly limited here.

Further, the seal belt 40 is formed to have a width that can span between the guide grooves 33 of the slit S.
Further, the seal belt 40 is provided with a hole 42 formed slightly larger than the mounting portion 12 in accordance with the center in the width direction, and the seal belt 40 is attached to the mounting portion 11 in the hole 42. The part 12 is fixed to the fixed surface 112 in a state where it penetrates.
When the seal belt 40 is fixed to the fixing surface 112, the hole 42 of the seal belt 40 is disposed on the fixing surface 112 of the mounting portion 11 so that the mounting portion 12 penetrates, and the seal belt 40 is fixed to the fixing surface 112. 112 is fixed. As a result, both end sides in the width direction of the seal belt 40 protrude from the mounting portion 12, and the tip end side of the protruding portion 60 is inserted into the opening of the guide groove 33 of the slit S. The seal belt 40 is guided in the guide groove 33 by moving in the axial direction (see the double arrow in the figure).

The seal belt 40 is fastened and fixed together by a male screw 113 and a female screw provided on the fixing surface 112 as in the conventional case.
The means for fixing the seal belt 40 to the fixing surface 112 is not particularly limited because any fixing method may be used as long as the seal belt 40 is firmly fixed to the fixing surface 112. For example, it may be fixed by a strong adhesive. Further, the material of the seal belt 40 is not particularly limited as long as it can seal the opening of the slit S. For example, it may be formed of a resin such as rubber or a flexible metal, or may be formed of a fiber formed by impregnating a resin such as polyurethane.
Further, a suction mechanism (not shown) is connected to the actuator so that the inside air of the housing 30 is sucked.

  At this time, the portion 60 of the seal belt 40 that protrudes from the mounting portion 12 extends from the side surface 111 perpendicular to the moving direction of the mounting portion 11 (see the double arrow in the figure) to the guide groove 33 as shown in FIG. Passed. As a result, the gap G in the facing region (F1 region) between the side surface 111 of the mounting portion 11 and the end surface 32 of the slit S is sealed, so that the inside and the outside of the housing 30 are separated. Further, since the groove surface 36 on the inner side of the guide groove 33 and the protruding portion 60 of the seal belt 40 are in surface contact with each other over a wide area, the inside of the housing 30 is negatively pressurized and dust is discharged to the outside of the housing 30. Combined with the suction mechanism for preventing the release of the toner, the negative pressure causes the protruding portion 60 of the seal belt 40 to be attracted to the surface 36 of the guide groove 33, so that the inside and outside of the housing 30 can be reliably isolated. It becomes possible.

  As shown in FIG. 3B, the portion of the protruding portion 60 of the seal belt 40 that is located in the guide groove 33 may be prevented from contacting the housing 30. According to such a configuration, the gap G in the F1 region is sealed, and the protruding portion 60 of the seal belt 40 does not slide into contact with the housing 30, so that the seal belt 40 is not worn. The inside and outside of the housing 30 communicate with each other through a minute gap. However, since the gap is minute, the inflow rate of outside air increases due to the venturi effect accompanying the suction of the inside air by the suction mechanism. Since dust discharge to the is suppressed, this portion is also substantially sealed. Further, in the figure, the width of the groove bottom is made narrower with respect to the shape of the guide groove 33 in order to enhance the venturi effect accompanying suction by the suction mechanism.

  Further, as shown in FIG. 3C, the inner shape of the guide groove 33 may be formed such that the end surface 32 side of the slit S is narrow and widens toward the groove bottom 35 side. According to such a configuration, since the gap G in the F1 region is sealed, the contact area between the inner surface 36 of the guide groove 33 and the protruding portion 60 of the seal belt 40 can be kept small. The sliding resistance when the protruding portion 60 of the belt 40 is guided by the guide groove 33 can be reduced.

Further, the seal belt 40 is guided by the guide groove 33 of the slit S from the mounting portion 11 toward the both ends 34 and 34 in the axial direction of the slit S. As a result, the F2 region of the slit S is sealed.
Thus, in the first embodiment of the present invention, in the F2 region, the seal belt 40 is guided by the guide groove 33 of the slit S in the F2 region, so that the opening of the slit S is formed by the seal belt 40. A seal structure to be sealed is configured.

Further, also in the F1 region, the protruding portion 60 of the seal belt 40 fixed to the mounting portion 11 of the carriage 10 is guided by the guide groove 33 of the slit S, so that the side surface 111 of the mounting portion 11 and the end surface of the slit S are provided. 32 constitutes a sealing structure in which the gap G in the opposing region between the sealing members 32 is sealed (see FIGS. 2 to 4).
Accordingly, since the F2 region and the F1 region are continuously sealed, the entire region having the length of the slit S provided in the housing 30 (the F region which is the entire opening region including the F1 region and the F2 region). ), The inside and the outside of the housing 30 are separated from each other, and the effect of low dust generation can be enhanced.

  In the present embodiment, the case where the seal belt 40 is looped inside the housing to form a movable loop has been described. However, the entire region (the F1 region and the F2 region) having the slit S is provided. This is not a limitation as long as the F region, which is the entire opening region, can be sealed with the seal belt 40. For example, a configuration in which the seal belt 40 is wound around the both ends 34, 34 of the slit S may be employed. In this case, it is preferable to add a mechanism that gives the seal belt 40 a constant tension so that the seal belt 40 is arranged without slack in the entire region (F region). For example, a spring mechanism may be added to the winding device to give the seal belt 40 a certain tension.

  Further, in the present embodiment, the seal structure in which the slit S is provided with the guide groove 33 and the seal belt 40 is guided and sealed by the guide groove 33 has been described, but the slit S is not provided with the guide groove 33. Are also within the scope of the present invention. In this case, in order to improve the sealing performance, the seal belt is preferably provided with a configuration such as a lip that is slidably contacted with a wall surface near the opening of the slit S in the F1 region and the F2 region.

FIG. 5 is a second embodiment of the present invention, and shows a case where the mounting portion 11 of the carriage 10 is a split type. In this case, the mounting portion 11 includes a fixing portion 114 that is formed integrally with the carriage 10 and a mounting portion 12 that is formed separately from the carriage 10 and attaches the seating surface 20. The seal belt 40 includes the fixing portion 114. And the fixing portion 12 are fixed to form a seal structure in the F1 region. Since other configurations and operational effects are the same as those of the first embodiment described above, here, the configuration and arrangement relationship between the mounting portion 11 and the seal belt 40 in the second embodiment will be mainly described. The description of the configuration other than is omitted.
The seal belt 40 used in the present embodiment has the same configuration as that of the first embodiment.

Specifically, a stepped recess 115 is formed in the central portion of the fixing portion 114 formed integrally with the carriage 10 in the axial direction (see the double-headed arrow in the figure), and on each axial direction side of the recess 115, A fixed surface 112 is provided that is opposed to the guide groove 33 of the slit S of the housing 30 in the same plane.
On the other hand, the mounting portion 12 for mounting the seating surface 20 has one surface to which the seating surface 20 is mounted, and a pressing surface formed on the other surface of the mounting portion 12 so as to face the fixing surface 112 of the fixing portion 114. 121. Further, a convex portion 122 that fits with the concave portion 115 of the fixing portion 114 is formed at the center portion of the pressing surface 121 in the axial direction (see the double arrow in the figure).

  When fixing the seal belt 40 to the mounting portion 11, first, the seal belt 40 is covered with the convex portion 122 of the mounting portion 12 so that the convex portion 122 of the mounting portion 12 penetrates the hole 42 of the seal belt 40. . Further, by fitting the mounting portion 12 and the fixing portion 114 so that the convex portion 122 and the concave portion 115 are fitted, the seal belt 40 is sandwiched between the pressing surface 121 of the mounting portion 12 and the fixing surface 112 of the fixing portion 114. Is done. Then, by fixing the attachment portion 12 and the fixing portion 114, the seal belt 40 sandwiched between the pressing surface 121 of the attachment portion 12 and the fixing surface 112 of the fixing portion 114 is fixed to the fixing surface 112.

  In this embodiment, the means for fixing the seal belt 40 to the fixing surface 112 is, for example, a screw hole that penetrates the convex portion 122 from one surface of the attachment portion 12 and a female screw provided in the concave portion 115 of the fixing portion 114. And means for fastening the fixing portion 114 and the attachment portion 12 together by the male screw 113 is employed. The fixing means of the seal belt 40 is not limited to this as long as the fixing portion 114 and the attachment portion 12 are firmly fixed while sandwiching the seal belt 40, and for example, strong bonding is possible. It may be fixed by an agent.

  In this embodiment, the fixing portion 114 is provided with the concave portion 115 and the mounting portion 12 is provided with the convex portion 112. However, the fixing portion 114 may be provided with the convex portion and the mounting portion 12 may be provided with the concave portion. good. Furthermore, as long as the seal belt 40 is securely clamped and firmly fixed, a configuration in which the concave portion and the convex portion are not provided may be employed. In that case, in order to fix the fixing part 114 and the attachment part 12 firmly, for example, fixing means such as fastening the attachment part 12 to the fixing part 114 with a screw while sandwiching the seal belt 40 is used. It is preferable.

  As a modification of the seal belt 40 used in the present embodiment, for example, as shown in FIG. 6, the seal belt 40 is divided at a portion fixed to one fixing surface 112 of the fixing portion 114. It may be configured. Even in this case, the portion fixed to the fixing portion 112 of the seal belt 40 and the portion provided with the hole 42 are sandwiched and fixed between the fixing portion 114 and the mounting portion 12 to form a seal structure in the F1 region. .

  In this case, in order to secure the fixing of the seal belt 40 to the fixing portion 114, in addition to the configuration in which the sealing belt 40 of the present embodiment is sandwiched and fixed between the fixing portion 114 and the mounting portion 12, It is preferable to provide means for directly fixing each of the divided seal belts 40 to the fixing surface 112. The fixing means of the seal belt 40 is not particularly limited as long as the seal belt 40 is firmly fixed to the fixing surface 112. For example, the sealing belt 40 is formed by a male screw 116 and a female screw provided on the fixing surface 112. May be fixed together, or may be fixed by a strong adhesive.

  Further, in this modification, the case where the seal belt 40 is divided only at the portion fixed to the one fixing surface 112 of the fixing portion 114 is not limited to this, but the seal belt 40 is fixed. For example, as long as the portion provided with the hole 42 of the seal belt 40 forms a seal structure in the F1 region, it is fixed to the pair of fixing surfaces 112 of the fixing portion 114. It may be divided at each part.

  7 to 9 show a third embodiment of the present invention. The seal structure according to this embodiment includes both end portions 34 and 34 of the slit S in the mounting portion moving direction (see double arrows in the figure). A region (F2 region) between the mounting portion 11 is sealed by a band-shaped seal member, and a facing region (F1 region) between the mounting portion 11 and the slit S is provided in the mounting portion 11. The case where it is sealed by 60 is shown. In this embodiment as well, the seal belt 40 is used as a belt-like seal member, and the configuration of the mounting portion 11 and the seal belt 40 and the seal structure in the F2 region are the same as those in the conventional art. The description will focus on the configuration and the arrangement relationship between the seal structure provided in the F1 region and the slit S in FIG.

  The bowl-shaped seal member 60 provided in the mounting portion 11 is continuously connected to the outer side surface 111 of the mounting portion 11 of the carriage 10 facing the end surface 32 of the slit S over the axial length of the side surface 111. Is provided. Further, the fixed portion to the side surface 111 is a base end portion 51, and the front end portion 52 extends from the base end portion 51 toward the end surface 32 of the slit S of the housing 30 in the same plane as the seal belt 40. It is installed.

  In addition, since the hook-shaped seal member 60 needs to be firmly fixed to the side surface 111, in the present embodiment, an L-shaped member that is an L-shaped member that is reversely viewed in cross section and is fixed along the side surface 111 is used. One of the plate-like portions is defined as a base end portion 51. Thereby, the base end part 51 and the side surface 111 are fixed in a wide area, and a firm fixation is ensured. The means for fixing the base end portion 51 to the side surface 111 is not particularly limited. For example, it may be a means for fixing the base end portion 51 to the side surface 111 with a screw, or may be fixed with a strong adhesive. Alternatively, the base end portion 51 may be configured integrally with the side surface 111, and the distal end portion 52 may extend directly from the side surface 111. For example, the hook-shaped seal member 60 may be integrally formed when the mounting portion 11 is formed.

Furthermore, the extended tip 52 is continuously provided over the axial length of the mounting portion 11, and the tip of the tip 52 is inserted into the guide groove 33 and guided. The opening of the groove 33 is arranged so as to be movable in the axial direction (see a double-headed arrow in the figure). As a result, the distal end portion 52 is guided by the guide groove 33, and the flange-shaped seal member 60 has a seal structure that seals the F1 region.
In the present embodiment, the case where the bowl-shaped seal member 60 is provided at least in the width direction outer side end portion 111 of the mounting portion 11 of the carriage 10 has been described, but both the width direction outer side and the inner side of the carriage 10 are described. The end 111 may be provided. By disposing the bowl-shaped seal member 60 on both the outer side and the inner side in the width direction of the carriage 10, the F1 region between the mounting portions 11 of the carriage 10 is also sealed, so that the inside and outside of the housing 30 can be reliably isolated. It becomes possible. Other configurations and operational effects are the same as those of the above-described embodiments, and thus description thereof is omitted.

  In addition, the bowl-shaped seal member 60 in the present embodiment needs to be formed of a material capable of holding at least the distal end portion 52 in a predetermined position in order to stably exhibit the sealing performance. For example, in the present embodiment, the bowl-shaped seal member 60 is formed of a metal material. The bowl-shaped seal member 60 may be formed of other materials as long as the tip 52 can be held at a predetermined position, for example, may be formed of a resin such as rubber, and may be formed of polyurethane or the like. You may form with the fiber formed by impregnating resin. In this embodiment, the case where the bowl-shaped seal member 60 is continuously provided over the axial length of the side surface 111 has been described. However, the seal member 60 is not necessarily integrated as long as the seal performance can be stably exhibited. For example, a plurality of bowl-shaped seal members 60 may be arranged without gaps over the length of the side surface 111 in the axial direction.

Furthermore, in the present embodiment, it is not excluded that the belt-like seal member 40 is provided so as to overlap the hook-like seal member 60 in the form provided with such a bowl-like seal member 60. In that case, the mounting portion 11 described in the first embodiment and the second embodiment described above is used, and the F1 region is sealed by the hook-shaped seal member 60 and the belt-shaped seal member 40.
Also in this embodiment, even if the slit S is not provided with the guide groove 33 as in the above embodiments, it is within the scope of the present invention. The configuration example of the seal belt 40 in this case is as described above.

DESCRIPTION OF SYMBOLS 10 Carriage 11 Mounting part 20 Seat surface 30 Housing 31 Housing one surface 32 A pair of end surface 33 of opening 33 Guide groove 60 The protruding part of a seal belt, the saddle-shaped seal member 111 The width direction end surface F1 of a mounting part, and the moving direction of a carriage mounting part Opposite region (F1 region) between the orthogonal side surface and the slit
F2 Area between the slit ends in the moving direction of the mounting part and the mounting part (F2 area)
G Gap S Slit

Claims (4)

A carriage having a mounting portion for mounting a seating surface;
A linear motion device that linearly reciprocates the carriage;
A housing that includes the carriage and the linear motion device, and has a length that allows the carriage to reciprocate linearly in the axial direction of the linear motion device ;
A suction mechanism for sucking the inside air of the housing ,
A slit that opens along the carriage movement path is provided on one surface of the housing, and the carriage mounting portion protrudes outside the housing through the slit.
In an actuator having a seal structure in which the opening of the slit is sealed while moving with the movement of the mounting portion in a state where the inside air is sucked by the suction mechanism and the inside of the housing is maintained at a negative pressure ,
The seal structure includes a band-shaped seal member that seals a region between both ends of the slit and the mounting portion in the mounting portion moving direction, and a gap between the side surface of the mounting portion and the slit in the direction orthogonal to the mounting portion moving direction. A gap seal member for sealing
The pair of opposed end faces of the slit opening are provided with a pair of guide grooves that are opened facing each other across the entire length of the slit and sandwiching the slit. The entire area of the slit opening is sealed by being guided, and the inside and outside of the housing are separated,
In the guide groove, either the width on the groove bottom side or the width on the end face side of the slit is narrower than the other,
In the seal structure, the gap seal member is separate from the belt-like seal member, and is a saddle-like seal member provided in the mounting portion so as to seal the gap in the facing region between the side surface of the mounting portion and the slit. Configured, and
An axial center portion of the mounting portion protrudes in a step shape to form a mounting portion for attaching a seating surface, and a fixing surface facing the slit is formed on each axial direction side of the mounting portion,
On each fixed surface, a band-shaped seal member that seals the region between the slit both ends in the mounting portion moving direction and the mounting portion is fixed,
The hook-shaped seal member extends in the same plane as the belt-shaped seal member from the base end portion provided on the end surface of the mounting portion facing the slit and from the base end portion toward the end surface of the slit of the housing. An actuator comprising: a tip portion provided, and the tip portion seals a facing region between a side surface perpendicular to the moving direction of the mounting portion and the slit . A pair of end faces facing the opening of the slit are provided with a pair of guide grooves that are opened facing each other across the entire length of the slit and sandwiching the slit. The actuator according to claim 1 , wherein a seal is formed by being guided in a groove. 3. The actuator according to claim 1 , wherein the belt-shaped seal member is a seal belt that is guided into the housing at both ends in the axial direction of the slit and forms a movable loop inside the housing. The actuator according to claim 1 , wherein the hook-shaped seal member is integrally formed on a side surface of the mounting portion.

Images