JP5144348B2 - Processing equipment with temperature controller - Google Patents

Description

  The present invention relates to a processing apparatus including a temperature controller that supplies temperature-controlled air to a space surrounding a processing machine.

  The processing apparatus includes a support part and a movable part movable with respect to the support part, and a gas bearing such as an air bearing can be used to support the movable part so as to be movable with respect to the support part. is there. The gas bearing is generally supplied with temperature-controlled gas. However, it is not sufficient to adjust the temperature of the gas supplied to the gas bearing because thermal displacement occurs in the workpiece and the processing machine due to changes in the ambient temperature and the like, and the processing accuracy deteriorates.

  Therefore, conventionally, as described in Patent Document 1 and Patent Document 2, the processing machine is surrounded by a cover to form a processing chamber, and air whose temperature is adjusted is supplied into the processing chamber to control the ambient temperature of the processing machine. I was trying to do it.

JP 2007-185770 A JP 2006-102939 A

  However, as in the prior art, there is a problem that a large cost is required for the introduction and operation of equipment for adjusting the temperature of the entire processing chamber. In the processing machine described in Patent Document 1, the temperature of air introduced from the outside is adjusted by an air conditioner and then supplied into the space covered with the cover, and the air in the cover is discharged to the outside of the cover. The air in the cover is not circulated. For this reason, there is a problem that a large load is applied to the air conditioner when the temperature of the external air changes greatly. On the other hand, in the processing machine facility disclosed in Patent Document 2, air in the processing chamber is circulated, but a part of the air supplied to the processing chamber is collected through a chip discharging device after passing through the processing region. In addition, mist of the machining fluid can be mixed into the circulating air. For this reason, there exists a problem that the filter for removing mist etc. is needed.

  Therefore, the object of the present invention is to solve the problems existing in the prior art and prevent thermal deformation of the processing machine at a low cost while suppressing the influence of the temperature change outside the cover surrounding the processing machine. It is to improve accuracy.

In order to achieve the above object, according to the present invention, there is provided a processing apparatus for processing by moving a tool and a workpiece relative to each other, the support unit being movable with respect to the support unit via a gas bearing. And at least one of a movable part supported by the tool, and at least one of a tool and a workpiece is attached to the at least one movable part, and the tool and the workpiece are moved relative to each other for machining. A partition that divides a processing machine, a cover that surrounds the processing machine, a space surrounded by the cover into a processing area that is a space for processing the workpiece with the tool, and a processing machine area; A first temperature controller for supplying a gas adjusted to a temperature to the gas bearing; and a gas adjusted to a predetermined temperature is supplied to the processing machine region and then recovered, and the gas is circulated in the processing machine region. First And a temperature control device, wherein the movable portion in the partition member has a through hole is provided extending through said working machine region is sealed except for the through hole, the through hole of the partition member A labyrinth structure is provided between the peripheral portion of the movable portion and the outer peripheral portion of the movable portion, and a gas regulator that passes through the labyrinth structure flows from the processing machine region to the processing region . A processing apparatus is provided.

  In the processing apparatus of the present invention, the space surrounding the processing machine with the cover is divided into the processing area and the processing machine area by the partition member, and the gas adjusted to a predetermined temperature by the second temperature controller is generated in the processing machine area. Circulate. Therefore, the temperature change of the gas in the processing machine region is small compared with the case where the gas is not circulated, and the space in which the gas adjusted to a predetermined temperature by the second temperature controller must be circulated is limited. While the burden on the second temperature controller is small, the processing machine region is maintained at a substantially constant temperature, so that thermal deformation of the processing machine can be suppressed. Further, the processing machine region is surrounded by the partition member and the cover, and is sealed except for a through-hole provided in the partition member so that the movable part of the processing machine protrudes into the processing region. In addition, since the gas supplied to the gas bearing from the first temperature controller is discharged to the processing machine region, the gas passing through the through hole flows from the processing machine region to the processing region. The gas hardly enters from the outside. Therefore, the influence of the temperature change outside the processing machine region on the temperature inside the processing machine region is reduced, and the load on the second temperature controller is further reduced.

  Furthermore, a labyrinth structure is provided between the outer edge portion of the through hole of the partition member and the outer peripheral portion of the movable portion extending through the through hole. The labyrinth structure allows movement of the movable portion with respect to the partition member. Intrusion of chips, machining fluid mist, and the like from the machining area to the machining machine area is prevented. Further, as described above, the gas passing through the through-hole, that is, the labyrinth structure flows from the processing machine region to the processing region. Therefore, chips and machining fluid mist in the machining area do not enter the machining machine area through the labyrinth structure, thereby eliminating the need to provide a filter in the second temperature controller.

It is preferable that the first temperature controller and the second temperature controller can independently adjust the temperature of the gas to be supplied.
Moreover, it is preferable that the said processing machine is installed in the installation surface via the air spring.
Moreover, it is preferable that the said partition member is deformable.

  According to the present invention, since the gas whose temperature is adjusted is circulated in the processing machine region which is a substantially sealed space, the processing machine region is maintained at a substantially constant temperature, and thermal deformation of the processing machine can be suppressed. it can. In addition, since the processing machine area is almost sealed, the temperature change outside the processing machine area has little effect on the temperature in the processing machine area, and the load on the temperature controller when keeping the temperature in the processing machine area constant. Becomes smaller. In addition, since a labyrinth structure is provided between the outer edge of the through hole provided in the partition plate that partitions the processing area and the processing machine area and the outer peripheral part of the movable part that passes through the through hole, And machining fluid mist do not enter the processing machine region from the processing region, and it is not necessary to provide a filter in the temperature controller. Therefore, it is possible to improve the processing accuracy by suppressing thermal deformation of the processing machine at low cost.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
First, the overall configuration of the processing apparatus 10 of the present invention will be described with reference to FIG. In the following description, the direction perpendicular to the paper surface of FIG. 1 is the X-axis direction, the vertical direction of FIG. 1 is the Y-axis direction, and the horizontal direction of FIG. The processing apparatus 10 includes a processing machine 12 that processes a workpiece (not shown) using a tool (not shown), and a cover 14 that surrounds the processing machine 12 and forms a processing chamber. The processing machine 12 shown in FIG. 1 includes a horizontal table 16 having a support surface extending in the horizontal direction and a vertical table 18 having a support surface extending in the vertical direction. This is a platform machine type machine tool to which a tool (not shown) can be attached and a workpiece (not shown) can be attached to the other table.

  The processing machine 12 includes a machine base 22 installed on an installation surface 20 such as a factory floor, a base 24 installed on the machine base 22, and an X-axis direction on the base 24 (paper surface in FIG. 1). An X-axis slider 26 movably provided in the vertical direction), a Z-axis slider 28 movably provided on the base 24 in the Z-axis direction (left-right direction in FIG. 1), and the Z-axis slider 28 And a Y-axis slider 30 provided to be movable in the Y-axis direction (vertical direction in FIG. 1). The base 24 is preferably fixed to the machine base 22 via an air spring 32. Thus, by installing the base 24 using the air spring 32 without directly contacting the machine base 22, even when the temperature of the machine base 22 changes due to the influence of the installation surface 20 or outside air, the base 24. However, it becomes difficult to be affected by the temperature change of the machine base 22, and the effect of improving the processing accuracy by preventing thermal deformation of the base 24 can be achieved.

  In the embodiment shown in FIG. 1, the X-axis slider 26 is supported on the base 24 via an air bearing 34 and is hardly affected by friction, and is an X-axis feed mechanism (not shown). To drive the base 24. On the other hand, the Z-axis slider 28 is supported on the base 24 via a sliding bearing, and is driven in the Z-axis direction with respect to the base 24 by a Z-axis feed mechanism (not shown). Is supported on the Z-axis slider 28 via a sliding bearing, and is driven in the Y-axis direction with respect to the Z-axis slider 28 by a Y-axis feed mechanism (not shown). However, it is also possible to support the Z-axis slider 28 on the base 24 via an air bearing and to support the Y-axis slider 30 on the Z-axis slider 28 via an air bearing.

  On the X-axis slider 26, the horizontal table 16 is supported via an air bearing 36 so as to be rotatable about a first rotation axis O1 extending in the vertical direction, that is, parallel to the Y-axis, while the Y-axis slider 30 is supported. Above, the vertical table 18 is supported via an air bearing 38 so as to be rotatable around a second rotation axis O2 extending in the horizontal direction parallel to the Z axis. Each of the horizontal table 16 and the vertical table 18 is provided with a spindle attachment and / or a gripping mechanism (not shown) for attaching a tool or a workpiece.

  The processing apparatus 10 is provided with an air bearing compressed air temperature controller 40 that adjusts the compressed air supplied from a compressed air source such as a compressor to a predetermined temperature or temperature range. The bearings 34 and 36 and the air bearing 38 of the vertical table 18 are provided from the air bearing compressed air temperature controller 40 to the machine base 22, the base 24, the X-axis slider 26, the Y-axis slider 30 and the Z-axis slider 28. Compressed air adjusted to a preset temperature or temperature range is supplied through the compressed air passage 42 formed.

  A space surrounded by the cover 14 includes a processing region 46 that is a space for processing a workpiece with a tool by a partition member 44 made of a deformable material such as a flexible sheet, and other spaces. And is partitioned into a processing machine region 48 in which the processing machine 12 is disposed. A through hole 50 is formed in the partition member 44, and the horizontal table 16 and the vertical table 18, which are movable parts of the processing machine 14 disposed in the processing machine region 48, extend to the processing region 46 through the through hole 50. A spindle attachment and / or a tool or workpiece fixed to the horizontal table 16 and the vertical table 18 can be arranged in the machining area 46. On the other hand, the cover 14 in the processing region 46 is provided with a discharge portion 52 for discharging the air in the processing region 46 to the outside of the cover 14. The discharge part 52 may have a hole shape for exhaust, or may be a gap such as a sheet metal constituting the cover 14.

  In addition, a labyrinth structure 54 is provided between the outer peripheral surfaces of the horizontal table 16 and the vertical table 18 that are movable portions and the peripheral portion of the through hole 50 of the partition member 44. For example, the labyrinth structure 54 formed between the outer peripheral surface of the vertical table 18 and the peripheral edge portion of the through hole 50 of the partition member 44 has an outer peripheral portion of the vertical table 18 that is a movable portion, as shown in FIG. An annular pocket portion 56 that is elongated in the direction of the rotational axis O2 of the vertical table 18 that is formed only on the side of the Y-axis slider 30 that is the support portion, and a sleeve portion 58 that is at least partially inserted into the annular pocket 56. And a sleeve support member 60 that extends from the Y-axis slider 30 that is a support portion and supports the sleeve portion 58 at a distance from the outer peripheral surface of the vertical table 18 so as to keep no contact with the vertical table 18. ing. The sleeve support member 60 includes an annular radial extension 60a extending radially outward from the periphery of the sleeve portion 58, a cylindrical portion 60b extending in the direction of the rotation axis O2 from the outer periphery of the radial extension 60a, and a cylinder. The partition member 44 is fixed to the outer peripheral surface of the cylindrical portion 60 b of the sleeve support member 60. The connection member 60 c connects the portion 60 b and the Y-axis slider 30. Similar to the labyrinth structure 54 provided between the outer peripheral surface of the horizontal table 16 and the peripheral edge portion of the through hole 50 of the partition member 44, also on the outer peripheral surface of the vertical table 18 and the peripheral edge portion of the through hole 50 of the partition member 44. Although the labyrinth structure 54 is provided, since it is the same structure, description is abbreviate | omitted here.

  By providing such a labyrinth structure 54, while allowing rotation of movable parts such as the horizontal table 16 and the vertical table 18 with respect to the partition member 44, mist of chips and machining liquid generated in the machining area 46 during machining is provided. Is prevented from entering the processing machine region 48 through the through hole 50. The labyrinth structure 54 only needs to be able to prevent chips and machining fluid mist generated in the processing region 46 during processing from entering the processing machine region 48 through the through hole 50, and has the configuration shown in FIG. It is not limited.

  Further, since the partition member 44 is made of a deformable material such as a flexible sheet, the horizontal table 16 and the vertical table 18 are moved by the movement of the X-axis slider 26, the Y-axis slider 30, and the Z-axis slider 28. Even when moving in the direction of the axis, the Y-axis or the Z-axis, the partition member 44 is deformed and can follow the movement of the horizontal table 16 or the vertical table 18 together with the labyrinth structure 54. Since the sleeve portion 58 of the labyrinth structure 54 is supported by the sleeve support member 60 fixed to the X-axis slider 26 or the Y-axis slider 30 that is a support portion, the horizontal table 16 or the vertical table 18 that is a movable portion. The relative position between the sleeve portion 58 and the horizontal table 16 or the vertical table 18 does not change even when the sleeve moves, and the relative positional relationship of the labyrinth structure 54 can be maintained.

  Further, an in-machine temperature controller 62 is connected to the processing machine area 48 partitioned by the cover 14 and the partition member 44. The in-machine temperature controller 62 supplies air adjusted to a preset temperature or temperature range to the processing machine region 48 through the supply duct 64. As shown in FIG. 1, the air supplied from the in-machine temperature controller 62 through the supply duct 64 is preferably circulated into the processing machine region 48 after passing through the diffusion plate 66. Thereby, the flow velocity of the air supplied from the supply duct 64 can be reduced, and the supplied air can be prevented from becoming turbulent. The air supplied to the processing machine region 48 is recovered to the in-machine temperature controller 62 through the recovery duct 68, adjusted again to a preset temperature or temperature range, and then supplied to the processing machine region 48 through the supply duct 64. . In this manner, air adjusted to a predetermined temperature or temperature range is circulated in the processing machine region 48 by the in-machine temperature controller 62.

Next, the operation of the processing apparatus 10 according to the embodiment shown in FIGS. 1 and 2 will be described.
In the processing apparatus 10 according to the present embodiment, air bearings 36 and 38 are used between the support unit including the X-axis slider 26 and the Y-axis slider 30 and the movable unit such as the horizontal table 16 and the vertical table 18, so Since friction does not occur, frictional heat is less likely to be generated and the heat generated in the bearing part can be reduced. In addition, since the frictional resistance is low, even if a motor is used to drive a movable part such as a table, the drive power Therefore, the heat generation of the motor can be reduced. As a result, thermal deformation of the processing machine 12 is suppressed, leading to improvement of processing accuracy.

  The air bearings 34, 36, and 38 have air adjusted to a predetermined temperature or temperature range by the air bearing compressed air temperature controller 40 through the compressed air flow path 42 provided in the processing machine 12. Supplied. Since the compressed air flow path 42 is provided to extend inside the processing machine 12, it is generated by driving the X-axis slider 26, the Y-axis slider 30, the Z-axis slider 28, the horizontal table 16, and the vertical table 18. It also functions to absorb the heat and cool the processing machine 12 to keep the temperature inside the processing machine 12 constant and suppress thermal deformation of the processing machine 12.

  Further, the processing machine area 48 in which the processing machine 12 is disposed is a substantially sealed space partitioned by the cover 14 and the partition member 44, and there is almost no inflow of air from the outside of the cover 14, and the in-machine temperature is reduced. Since the air adjusted to a predetermined temperature or temperature range by the adjuster 62 is circulated inside, the processing machine region 48 is substantially constant without being affected by the temperature change outside the processing apparatus 12. It is possible to suppress the occurrence of thermal deformation in the processing machine 12. Thereby, processing accuracy can be improved.

  Moreover, the compressed air supplied to each air bearing 34,36,38 is discharged | emitted by the processing machine area | region 48 through an air bearing surface, as FIG. 2 shows. Since the processing machine region 48 is substantially sealed as described above, the compressed air discharged to the processing machine region 48 is mixed with the air circulating in the processing machine region 48 and a part thereof passes through the labyrinth structure 54. It flows out into the processing area 46 and is further discharged out of the cover 14 through the discharge portion 52 of the processing area 46. Since air flows in the labyrinth structure 54 from the processing machine region 48 to the processing region 46 in this way, chips and processing fluid mist generated in the processing region 46 are obstructed by the above-described air flow and pass through the labyrinth structure 54. Intrusion into 48 can be prevented, and the air flowing into the processing region 46 through the labyrinth structure 54 can keep the processing region 46 at a constant temperature and suppress thermal deformation of the processing machine. Further, since air in the processing region 46 is prevented from flowing into the processing machine region 48 through the labyrinth structure 54, air outside the cover 14 does not flow into the processing machine region 48. The effect of keeping the temperature constant and suppressing thermal deformation of the processing machine is enhanced.

  In addition, an air bearing compressed air temperature controller 40 that supplies compressed air to the air bearings 34, 36, and 38 and an in-machine temperature controller 62 that circulates air to the processing machine region 48 are separately provided. The temperature or temperature range can be set independently for the compressed air supplied to the air bearings 34, 36, and 38 and the air supplied to the processing machine region 48. The compressed air supplied to the air bearings 34, 36, and 38 is affected by adiabatic expansion when discharged from the air bearing portion and heat generation of the processing machine 12, while the air supplied to the processing machine region 48 is supplied by a supply duct 64. It is affected by heat transfer during the passage of heat and adiabatic expansion during passage of the diffusion plate 66. On the other hand, according to the processing apparatus 10 of the present embodiment, the air bearing compressed air is used so that the respective temperatures are substantially the same when supplied into the processing machine region 48, considering each effect separately. It becomes possible to set the temperature or temperature range in the temperature controller 40 and the in-machine temperature controller 62. Further, while setting the set temperature or set temperature range of the air bearing compressed air temperature controller 40 to be constant, the set temperature or set temperature range of the in-machine temperature controller 62 is changed according to the temperature in the processing machine region 48. It is also possible.

  Furthermore, in order to control the temperature of the air, a temperature sensor for detecting the temperature of the air supplied from the temperature controller is required. However, the temperature sensor is provided separately in association with each temperature controller, for example, a temperature sensor 70 associated with the air bearing compressed air temperature controller 40 is provided outside the cover 14, and the in-machine temperature controller 62. There may be a case where a temperature sensor 72 associated with is provided inside the cover 14. When the temperature sensor is installed outside the cover 14, the air supplied from the temperature controller is affected by the temperature of the outside air outside the cover 14 before reaching the inside of the cover 14. For this reason, there is almost no effect when the temperature difference between the air inside and outside the cover 14 is small, but when the temperature difference between the air inside and outside the cover 14 is large, the temperature supplied after the temperature supplied from the temperature controller passes through the temperature sensor installation location. It can change. For example, in the case of the above example, the temperature sensor 70 associated with the air bearing compressed air temperature controller 40 is provided outside the cover 14, so that the temperature measured by the temperature sensor 70 is actually in the cover 14. The set temperature or set temperature range of the air bearing compressed air temperature controller 40 needs to be a value that allows for the temperature change. According to the processing apparatus 10 of this embodiment, the adjustment temperature or the adjustment temperature range of the air bearing compressed air temperature controller 40 and the in-machine temperature controller 62 can be set independently. It is possible to respond.

  The embodiment of the present invention has been described above by taking the processing apparatus 10 using the platform machine type processing machine 12 as an example, but the present invention is not limited to the illustrated embodiment. For example, in the above-described embodiment, a platform machine type machine tool is used as the processing machine 12, but the processing machine 12 of the present invention is movable with respect to the support portion via the air bearings 34, 36, and 38. It is sufficient that at least one supported movable part is provided and that the tool and the workpiece can be moved relative to each other so that the machining can be performed. For example, a machining center or a lathe provided with an air bearing may be used.

It is a whole block diagram of the processing apparatus provided with the temperature controller by this invention. It is an enlarged view of the labyrinth structure near the vertical table of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Processing apparatus 12 Processing machine 14 Cover 16 Horizontal table 18 Vertical table 34 Air bearing 36 Air bearing 38 Air bearing 40 Air bearing compressed air temperature controller 44 Partition member 46 Processing area 48 Processing machine area 50 Through-hole 54 Labyrinth structure 62 In-machine Temperature controller

Claims (4)

A processing apparatus for processing by moving a tool and a workpiece relative to each other,
A support part and at least one movable part supported to be movable with respect to the support part via a gas bearing, and attaching at least one of a tool and a workpiece to the at least one movable part, A processing machine for processing by moving the tool and the workpiece relative to each other; and
A cover surrounding the processing machine;
A partition member that divides the space surrounded by the cover into a processing region that is a space for processing the workpiece with the tool, and a processing machine region;
A first temperature controller for supplying a gas adjusted to a predetermined temperature to the gas bearing;
A second temperature controller that recovers the gas adjusted to a predetermined temperature after being supplied to the processing machine region and circulates the gas in the processing machine region;
The partition member is provided with a through-hole through which the movable portion extends, the processing machine region is sealed except for the through-hole, and the peripheral portion of the through-hole of the partition member and the A processing apparatus provided with a temperature controller , wherein a labyrinth structure is provided between the movable portion and an outer peripheral portion, and gas passing through the labyrinth structure flows from the processing machine region to the processing region .   The processing apparatus provided with the temperature controller according to claim 1, wherein the first temperature controller and the second temperature controller can independently adjust a temperature of a gas to be supplied.   The processing apparatus provided with the temperature controller according to claim 1 or 2, wherein the processing machine is installed on an installation surface via an air spring.   The processing apparatus provided with the temperature controller according to any one of claims 1 to 3, wherein the partition member is deformable.

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