JP5126597B2 - Drive magnetic member, substrate transfer unit and substrate processing apparatus using the same - Google Patents

Description

  The present invention relates to an apparatus for processing a substrate, and more specifically, a driving magnetic member that provides a driving force by magnetic coupling, and a substrate used for manufacturing a wafer or a flat panel display device using the driving magnetic member. The present invention relates to a substrate transfer unit and a substrate processing apparatus provided with the substrate transfer unit.

  Recently, information processing equipment has been rapidly developed to have various forms of functions and faster information processing speed. Such an information processing device has a display panel that displays information on operation. Up to now, a cathode ray tube monitor has been mainly used as a display panel, but recently, with the rapid development of technology, a flat panel display device such as a liquid crystal display (LCD) that is light and occupies a small space is used. Use is increasing rapidly.

  In order to manufacture a flat display device, various processes such as vapor deposition, oxidation, diffusion, etching, and cleaning are performed, and a substrate used in the flat display device is a processing unit in which each process is performed by a transfer unit. Between or within the processing unit.

  The transfer unit has shafts arranged side by side and rotating, and rollers installed to insert each shaft and rotate with the shaft. In general, the shaft rotates while receiving the rotational force of the driving member while being supported at both ends, and a roller installed on the shaft transfers the substrate while rotating together with the shaft.

  Conventionally, a power transmission mechanism using a mechanical contact method such as a gear is mainly used to transmit the rotational force of the drive member to the shaft. Has a problem that many particles are generated. Therefore, recently, a power transmission mechanism using a magnetic force is mainly used as a means for transmitting the rotational force of the drive member to the shaft without direct contact.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a driving magnetic force member that can simplify the configuration of a power transmission mechanism, reduce costs, and increase the utilization of space, and a substrate transfer unit and a substrate processing apparatus using the driving magnetic force member. There is.

  Another object of the present invention is to provide a driving magnetic member capable of realizing stable substrate transfer, a substrate transfer unit and a substrate processing apparatus using the same.

  The purpose of the present invention is not limited here, and other objects not mentioned here will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a substrate transfer unit according to the present invention is a substrate transfer unit for transferring a substrate, and includes a substrate transfer shaft arranged side by side and a first shaft installed at one end of the shaft. A magnetic member, a second magnetic member disposed opposite to the first magnetic member so as to be magnetically coupled, and formed with a plurality of protrusions along a circumferential surface; and the second magnetic member. A power transmission member that transmits a rotational force between the second magnetic members by meshing with the protrusions formed on any two adjacent second magnetic members among the magnetic members, and the second magnetic member and a driving member for providing rotational force to any one of, wherein each of the first and second magnetic members, it and the housing, an array of ring-shaped inside the housing And the magnet of the first magnetic member is adjacently disposed between different polarities, and the magnet of the second magnetic member is adjacently disposed between different polarities. The magnets of the first and second magnetic members facing each other are arranged so as to have different polarities, and are arranged on one surface side of the plate-like magnet arranged in the housing of the second magnetic member. Is characterized in that a reinforcing plate of stainless steel material is arranged .

  In the substrate transfer unit according to the present invention having the above-described configuration, the protrusion is formed in a tooth shape of a chain gear, and the power transmission member is a chain that meshes with the protrusion of the tooth shape of the chain gear. sell.

  The protrusion may be formed in a concavo-convex shape along a circumferential direction, and the power transmission member may be a belt that meshes with the concavo-convex protrusion.

  The protrusion may be formed in a spur gear shape, and the power transmission member may be a gear that meshes with the protrusion of the spur gear shape.

In order to achieve the above object, a substrate processing apparatus according to the present invention is for transferring a process chamber in which a substrate processing process is performed, and a plurality of rollers arranged side by side in the process chamber and in contact with the substrate. A disk-shaped first magnetic member installed at one end of the shaft, and a disk-shaped second magnetic member installed outside the process chamber so as to face the first magnetic member. A power transmission member for transmitting a rotational force between the second magnetic member, and a driving member for providing the rotational force to any one of the second magnetic members, A plurality of protrusions are formed on the circumferential surface along the circumferential direction, and the power transmission member rotates by meshing with the protrusions formed on any two adjacent second magnetic force members. transmit forces, the first and second magnetic force Each of the materials includes a disk-shaped housing and a plate-shaped magnet arranged in a ring-shaped arrangement in the housing, and the magnet of the first magnetic member has different polarities The magnets of the second magnetic member are arranged adjacent to each other with different polarities, and the magnets of the first magnetic member and the second magnetic member facing each other have different polarities. A reinforcing plate made of a stainless steel material is arranged on one side of the plate-like magnet arranged and disposed in the housing of the second magnetic member .

  In the substrate processing apparatus according to the present invention having the above-described configuration, the protrusion is formed in a tooth shape of a chain gear, and the power transmission member is a chain that meshes with the protrusion of the tooth shape of the chain gear. sell.

  The protrusion may be formed in a concavo-convex shape along a circumferential direction, and the power transmission member may be a belt that meshes with the concavo-convex protrusion.

  The protrusion may be formed in a spur gear shape, and the power transmission member may be a gear that meshes with the protrusion of the spur gear shape.

In order to achieve the above object, a driving magnetic member according to the present invention is a driving magnetic member for providing a rotational force to a magnetically coupled driven magnetic member, a disk-shaped rotatable housing, and the housing and a plurality of plate-shaped magnets located within said housing, said housing to allow an external force acts to rotate the, have a plurality of protrusions formed to protrude along the circumferential surface, The plurality of magnets are arranged in the housing so as to form a ring-shaped arrangement, and the plurality of magnets are arranged so that different polarities are adjacent to each other, and are plate-like plates arranged in the housing. A stainless steel reinforcing plate is disposed on one side of the magnet .

  In the driving magnetic member according to the present invention having the above-described configuration, the plurality of protrusions may be formed in a tooth shape of a chain gear.

  The plurality of protrusions may be formed in an uneven shape along the circumferential direction.

  The plurality of protrusions may be formed in a spur gear shape.

  According to the present invention, the configuration of the power transmission mechanism can be simplified.

  And according to this invention, the manufacturing cost of a substrate processing apparatus can be reduced, the equipment occupation area of a substrate processing apparatus can be reduced, and the utilization degree of space can be raised.

  Further, according to the present invention, stable substrate transfer can be realized.

Hereinafter, a driving magnetic force member according to a preferred embodiment of the present invention, a substrate transfer unit and a substrate processing apparatus using the same will be described in detail with reference to the accompanying drawings. First, in assigning reference numerals to the components of each drawing, it should be noted that the same components are given the same reference numerals as much as possible even if they are displayed on other drawings. . In the description of the present invention, when it is determined that a specific description of a known configuration or function related to the present invention makes the gist of the present invention unclear, detailed description thereof is omitted.
(Embodiment)
In the present embodiment, the substrate S will be described by taking a glass substrate used for manufacturing a flat panel display device as an example. However, the substrate S can be a wafer used for manufacturing a semiconductor device in addition to the glass substrate described above.
FIG. 1 is a diagram showing a substrate processing apparatus 1 according to an embodiment of the present invention. As shown in FIG. 1, the substrate processing apparatus 1 includes a plurality of chambers 10, 22, 24, 30, a substrate transfer unit 100, and cleaning units 200, 300. Each chamber 10, 22, 24, 30 provides a space in which a substrate processing process is performed. The substrate transfer unit 100 moves the substrate S in one direction between the chambers 10, 22, 24, 30 and within the chambers 10, 22, 24, 30. The cleaning units 200 and 300 clean the substrate S transferred by the substrate transfer unit 100 in the chambers 22 and 24.

  Below, the component mentioned above is demonstrated in detail.

  Each chamber 10, 22, 24, 30 has a generally cuboidal shape with an interior vacant. The chambers 10, 22, 24, and 30 are arranged in a line. An inlet 12 through which the substrate S flows into the chambers 10, 22, 24, 30 is provided on one side wall of each of the chambers 10, 22, 24, 30. , 24, 30 through which the substrate S flows out. The substrate S is sequentially transferred from the frontmost chamber to the rearmost chamber through the inlet 12 and the outlet 14. In each chamber 10, 22, 24, 30, a predetermined process is performed on the substrate S. A cleaning process is performed in at least one of the chambers 10, 22, 24, and 30. An etching process is performed in the chamber 10 positioned in front of the chamber 22 where the cleaning process is performed, and a drying process is performed in the chamber 30 positioned behind the chamber 24 where the cleaning process is performed.

  According to an example, the first cleaning chamber 22, the second cleaning chamber 24, and the drying chamber 30 are sequentially arranged in a row. Cleaning units 200 and 300 are installed in the first cleaning chamber 22 and the second cleaning chamber 24. The cleaning unit provided in the first cleaning chamber 22 is a brush cleaning member 200, and the cleaning unit provided in the second cleaning chamber 24 is a fluid supply nozzle 300.

  The substrate S is cleaned while being transferred to the first cleaning chamber 22 and the second cleaning chamber 24, and thereafter transferred to the drying chamber 30 and dried. The brush cleaning member 200 cleans the area on the substrate S using the physical contact force of the brush. The fluid supply nozzle 300 removes particles that are not removed from the first cleaning chamber 22 and the substrate S by the brush cleaning member 200, but removes particles remaining on the substrate S or on the upper part of the substrate S from the substrate S. The fluid supply nozzle 300 has a structure in which high-pressure gas is supplied to deionized water so that the deionized water is sprayed and then sprayed deionized water is sprayed onto the substrate S. As the fluid supply nozzle 300, a slit nozzle having a long length in one direction can be used.

  A drying nozzle 30 a that supplies a drying gas to the substrate S is installed in the drying chamber 30. The drying nozzle 30a can dry the substrate S by supplying heated air or an inert gas such as heated nitrogen gas. The drying nozzle 30a selectively supplies an organic solvent such as isopropyl alcohol (Iso-Propyl Alcohol, IPA) to the substrate S, and then supplies the heated air described above to the substrate S to dry the substrate S. Can do. As the drying nozzle 30a, a slit nozzle having a long length in one direction can be used.

  FIG. 2 is a diagram showing an embodiment of the substrate transfer unit 100 of FIG.

  As shown in FIG. 2, the substrate transfer unit 100 has a plurality of shafts 110. The shafts 110 are arranged in parallel with each other in the chamber 22. The shaft 110 is provided from a position adjacent to the inlet (reference numeral 12 in FIG. 1) to a position adjacent to the outlet (reference numeral 14 in FIG. 1). Each shaft 110 is provided with a plurality of rollers 112 along its length. The roller 112 is in contact with the lower surface of the substrate. The roller 112 is rotated by the rotation of the shaft 110, and the substrate S moves linearly along the arrangement direction of the shafts 110 with the lower surface thereof being in contact with the roller 112. The shaft 110 may be disposed horizontally such that the substrate S is transferred in a horizontal state. The one end and the other end of the shaft 110 can be positioned at different heights so that the substrate S is selectively transferred in an inclined state.

  The first magnetic member 120 is installed at one end of the shaft 110 disposed inside the chamber 22. The second magnetic member 130 is installed outside the chamber 22 so as to face the first magnetic member 120. Inside the first magnetic member 120 and the second magnetic member 130, magnets 124 and 134 described later are built. The first magnetic member 120 and the second magnetic member 130 are magnetically coupled by the magnetic force between the magnets 124 and 134.

  Each of the first magnetic members 120 includes a housing 122 and a magnet 124 as shown in FIGS. 3 and 4. The housing 122 has a disk shape, and is coupled to one end of the shaft 110 with the center of the housing 122 aligned with the center of the shaft 110. The housing 122 may be manufactured from a polyvinyl chloride (PVC) material. A space in which the magnet 124 is installed is provided inside the housing 122. As shown in FIG. 4, approximately eight magnets 124 may be provided, and a different number of magnets 124 may be provided. Each magnet 124 has a disk shape and is arranged so as to form a ring shape with the center of the housing 122 as the center. The adjacent magnets 124 are arranged to have different polarities when viewed from the arrangement plane of the magnets 124. That is, the magnets 124 having the N-pole polarity and the magnets 124 having the S-pole polarity are alternately arranged. A reinforcing plate 125 made of stainless steel can be disposed on one side of the magnet 124 in order to increase the magnetic force transmitted between the magnets 124.

  The second magnetic member 130 corresponds to the first magnetic member 120 on a one-to-one basis, and is provided outside the chamber 22 so as to face the first magnetic member 120. As shown in FIGS. 5 to 7, the second magnetic member 130 has a disk-shaped housing 132, and a magnet 134 is provided inside the housing 132. The magnet 134 has a disk shape, and the arrangement structure of the magnets 134 is similar to the arrangement structure of the magnets 124 of the first magnetic member 120. However, the magnet 134 of the second magnetic member 130 is arranged to have a polarity different from that of the magnet 124 of the first magnetic member 120. That is, among the magnets 134 of the second magnetic member 130, the magnet 134 having the N-polarity is disposed so as to face the magnet 124 having the S-polarity of the first magnetic member 120, and the second magnetic member 130. Among the magnets 134, the magnet 134 having the polarity of the S pole is disposed so as to face the magnet 124 having the polarity of the N pole of the first magnetic member 120. Due to the arrangement structure of the magnets 124 and 134, a magnetic attractive force acts between the first magnetic member 120 and the second magnetic member 130, and the first magnetic member 120 and the second magnetic member 130 are generated by this force. And are magnetically coupled. A reinforcing plate 135 made of stainless steel can be disposed on one side of the magnet 134 in order to increase the magnetic force transmitted between the magnets 134.

  Further, as shown in FIG. 2, each of the second magnetic member 130 magnetically coupled to the first magnetic member 120 is rotatably supported by a rotating shaft 136 and a bearing member 137. Each of the second magnetic members 130 is transmitted with a rotational force from the second magnetic members 130 disposed adjacent to each other. The transmission of the rotational force between the second magnetic members 130 is performed by the power transmission member 140, and the driving member 150 provides the rotational force to any one of the second magnetic members 130. If the rotational force of the driving member 150 is provided to any one of the second magnetic members 130, the rotational force is transmitted between the adjacent second magnetic members 130 by the power transmission member 140, and the second magnetic member The rotational force 130 is transmitted to the first magnetic member 120 that is magnetically coupled to the second magnetic member 130. By such a driving mechanism, the rotational force of the driving member 150 is finally transmitted to the shaft 110 coupled to the first magnetic member 120, whereby the substrate S that is contacted and supported by the roller 112 of the shaft 110 is transferred in one direction. The

  As a driving mechanism for transmitting the rotational force of the driving member 150 between the second magnetic member 130, a direct driving method such as a chain gear driving method, a belt driving method, a gear train driving method, or the like is used. Can be. The direct drive method refers to a drive method in which the rotational force of the drive member 150 is directly transmitted to at least one second magnetic member 130 and the rotational force is directly transmitted between the second magnetic members 130. The indirect driving method, which is a concept corresponding to this, is a driving method in which the rotational force of the driving member 150 is indirectly transmitted to the second magnetic member 130 through an intermediate medium such as a belt-pulley assembly. Say.

  In order to transmit the rotational force of the driving member 150 to the second magnetic member 130 using the direct drive method, an external force that rotates the second magnetic member 130 acts on the circumferential surface of the second magnetic member 130. Thus, the protrusions must be formed, and the power transmission member 140 must be engaged with the protrusions formed on any two adjacent second magnetic members 130.

  For example, in the case of the chain gear drive system shown in FIG. 2, the protruding portion is a chain gear tooth shape, and the power transmission member 140 is a chain that meshes with the chain gear tooth shape. As shown in FIGS. 5 to 7, the chain gear teeth 138 a and 138 b can be formed on the circumferential surface of the housing 132 at regular intervals along the circumferential direction. It can be formed side by side in a two-row structure along the axial direction. As shown in FIG. 8, the power transmission member 140, that is, the chain meshes with chain gear teeth 138 a and 138 b formed on any two second magnetic force members 130 adjacent to each other. Meanwhile, the driving member 150 may be provided to transmit a rotational force directly to any one of the second magnetic members 130, and the rotational force may be applied to the second magnetic member 130 as a chain gear drive system. It can also be provided to communicate.

  Hereinafter, as a driving mechanism for transmitting the rotational force of the driving member 150 between the second magnetic member 130, a belt driving method and a gear train driving method will be described as examples.

  First, the belt driving method will be described with reference to FIGS. Here, the same components as those shown in FIG. 2 and FIGS. 5 to 8 are denoted by the same reference numerals, and detailed description thereof will be omitted.

  As shown in FIG. 9, the second magnetic member 130 ′ is provided outside the chamber 22 so as to correspond to the first magnetic member 120 on a one-to-one basis and to face the first magnetic member 120. As shown in FIGS. 10 to 12, the second magnetic member 130 ′ has a disk-shaped housing 132, and a magnet 134 is provided inside the housing 132. Each magnet 134 has a disk shape and is arranged in a ring shape with the center of the housing 132 as the center. The adjacent magnets 134 are arranged to have different polarities when viewed from the arrangement plane of the magnets 134. The magnet 134 of the second magnetic member 130 ′ is arranged to have a polarity different from that of the magnet 124 of the first magnetic member 120. Due to the arrangement structure of the magnets 124 and 134, a magnetic attractive force acts between the first magnetic member 120 and the second magnetic member 130 ', and the first magnetic member 120 and the second magnetic member 130 are caused by this force. 'Is magnetically coupled. A reinforcing plate 135 made of stainless steel can be disposed on one side of the magnet 134 in order to increase the magnetic force transmitted between the magnets 134.

  As shown in FIG. 9, each of the second magnetic member 130 ′ magnetically coupled to the first magnetic member 120 is rotatably supported by a rotating shaft 136 and a bearing member 137. Each of the second magnetic members 130 ′ receives a rotational force from the second magnetic members 130 ′ arranged adjacent to each other. The rotational force is transmitted between the second magnetic member 130 ′ by the power transmission member 140 ′, and the driving member 150 applies the rotational force to any one of the second magnetic members 130 ′. provide.

  A belt driving system is used as a driving mechanism for transmitting the rotational force of the driving member 150 between the second magnetic member 130 '. In the case of the belt drive system shown in FIG. 9, the protrusion 138 ′ to which an external force for rotating the second magnetic member 130 ′ is formed is an uneven shape formed on the circumferential surface of the housing 132, and the power transmission member Reference numeral 140 ′ denotes a belt that meshes with the protruding portion 138 ′ having an uneven shape. As shown in FIGS. 10 to 12, the uneven protrusion 138 ′ can be formed on the circumferential surface of the housing 132 along the circumferential direction. The concave portion and the convex portion of the protruding portion 138 ′ can be formed to have the same width when viewed from the arrangement plane of the magnets 134. An uneven shape corresponding to the uneven shape on the circumferential surface of the housing 132 is formed on the power transmission member 140 ′, that is, the inner surface of the belt, and the belt 140 ′ has any two adjacent to each other as shown in FIG. The projections 138 ′ having a concavo-convex shape formed on the two second magnetic members 130 ′ mesh with each other.

  Next, a gear train drive system will be described with reference to FIGS. Here, the same components as those shown in FIG. 2 and FIGS. 5 to 8 are assigned the same reference numerals, and a specific description thereof will be omitted.

  As shown in FIG. 14, the second magnetic member 130 ″ has a one-to-one correspondence with the first magnetic member 120 and is provided outside the chamber 22 so as to face the first magnetic member 120. As shown in FIGS. 15 to 17, the second magnetic member 130 ″ includes a disk-shaped housing 132, and a magnet 134 is provided inside the housing 132. Each magnet 134 has a disk shape and is arranged in a ring shape with the center of the housing 132 as the center. The adjacent magnets 134 are arranged to have different polarities when viewed from the arrangement plane of the magnets 134. The magnet 134 of the second magnetic member 130 ″ is arranged to have a polarity different from that of the magnet 124 of the first magnetic member 120. Due to the arrangement structure of the magnets 124 and 134, a magnetic attractive force acts between the first magnetic member 120 and the second magnetic member 130 ″, and the first magnetic member 120 and the second magnetic member are caused by this force. The member 130 ″ is magnetically coupled. A reinforcing plate 135 made of stainless steel can be disposed on one side of the magnet 134 in order to increase the magnetic force transmitted between the magnets 134.

  As shown in FIG. 14, each of the first magnetic member 120 and the magnetically coupled second magnetic member 130 ″ is rotatably supported by a rotating shaft 136 and a bearing member 137. Each of the second magnetic members 130 ″ receives a rotational force from the second magnetic members 130 ″ arranged adjacent to each other. Transmission of rotational force between the second magnetic member 130 ″ is performed by the power transmission member 140 ″, and the driving member 150 is one of the second magnetic member 130 ″ and the second magnetic member 130 ″. To provide rotational force.

  A gear train drive system is used as a drive mechanism for transmitting the rotational force of the drive member 150 between the second magnetic member 130 ″. In the case of the gear train drive system shown in FIG. 14, the protrusion 138 ″ on which an external force for rotating the second magnetic member 130 ″ acts is a spur gear formed on the circumferential surface of the housing 132. The power transmission member 140 ″ is a gear that meshes with the spur gear-shaped protrusion 138 ″. As shown in FIGS. 15 to 17, the spur gear-shaped protrusion 138 ″ is formed on the circumferential surface of the housing 132 along the circumferential direction. As shown in FIG. 18, the gear 140 ″ used as the power transmission member is located between any two adjacent second magnetic members 130 ″ and formed in the second magnetic member 130 ″. Meshes with the protruding portion 138 ″.

  As described above, a direct drive system such as a chain gear drive system, a belt drive system, or a gear train drive system is used as a drive mechanism for transmitting the rotational force of the drive member 150 between the second magnetic force members 130. Accordingly, there is an advantage that the configuration of the driving mechanism that transmits the rotational force between the second magnetic member can be simplified as compared with the indirect driving method using the conventional belt-pulley assembly.

  The manufacturing cost of the substrate processing apparatus can be reduced by simplifying the driving mechanism, and the space occupied by the substrate processing apparatus can be reduced to increase the utilization of the space.

  In addition, it uses a direct drive method such as a chain gear drive method, a belt drive method, or a gear train drive method to transmit the rotational force between the second magnetic members, so it is more stable than the conventional indirect drive method. The substrate can be transported in an automatic manner.

  On the other hand, the first magnetic member and the second magnetic member referred to in the above-described embodiment correspond to a driven magnetic member and a driving magnetic member according to the claims.

  The above description is merely illustrative of the technical idea of the present invention. Any person having ordinary knowledge in the technical field to which the present invention pertains departs from the essential characteristics of the present invention. Various modifications and variations may be possible without departing from the scope. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention, but to explain them, and the scope of the technical idea of the present invention is limited by such embodiments. Is not to be done. The protection scope of the present invention must be analyzed by the claims, and all technical ideas within the equivalent scope must be analyzed to be included in the scope of the right of the present invention.

1 is a diagram illustrating a substrate processing apparatus according to an embodiment of the present invention. It is a figure which shows one Embodiment of the board | substrate transfer unit in FIG. It is sectional drawing of the 1st magnetic member in FIG. It is sectional drawing which follows the AA 'line in FIG. It is a perspective view of the 2nd magnetic member in FIG. It is sectional drawing of the 2nd magnetic member in FIG. It is sectional drawing which follows the BB 'line in FIG. It is sectional drawing which follows the CC 'line in FIG. It is a figure which shows other embodiment of the board | substrate transfer unit in FIG. FIG. 10 is a perspective view of a second magnetic member in FIG. 9. It is sectional drawing of the 2nd magnetic member in FIG. It is sectional drawing which follows the DD 'line in FIG. It is sectional drawing which follows the EE 'line in FIG. It is a figure which shows other embodiment of the board | substrate transfer unit in FIG. It is a perspective view of the 2nd magnetic member in FIG. It is sectional drawing of the 2nd magnetic member in FIG. It is sectional drawing which follows the FF 'line in FIG. It is sectional drawing which follows the GG 'line | wire in FIG.

Explanation of symbols

22 Chamber 100 Substrate transfer unit 110 Shaft 120 First magnetic member 124, 134 Magnet 130, 130 ′, 130 ″ Second magnetic member 138a, 138b, 138 ′, 138 ″ Protrusion 140, 140 ′, 140 ″ Power Transmission member 150 Drive member

Claims (12)

A substrate transfer unit for transferring a substrate,
A substrate transfer shaft arranged side by side;
A first magnetic member installed at one end of the shaft;
A second magnetic member that is installed facing the first magnetic member so as to be magnetically coupled, and has a plurality of protrusions formed along a circumferential surface;
A power transmission member that transmits a rotational force between the second magnetic members by meshing with the protrusions formed on any two adjacent second magnetic members of the second magnetic members;
A driving member that provides rotational force to any one of the second magnetic members ;
Each of the first and second magnetic members is
A housing;
A plate-like magnet arranged in a ring shape in the housing, and
The magnets of the first magnetic member are arranged adjacent to each other with different polarities, and the magnets of the second magnetic member are arranged adjacent to each other with different polarities, and the first and second magnetic members are opposed to each other. The magnets are arranged to have different polarities;
A substrate transfer unit , wherein a reinforcing plate made of a stainless steel material is arranged on one surface side of the plate-like magnet arranged in the housing of the second magnetic member . The protrusion is formed in a tooth shape of a chain gear,
The substrate transfer unit according to claim 1, wherein the power transmission member includes a chain that meshes with the protruding portion of the tooth shape of the chain gear. The protrusion is formed in an uneven shape along the circumferential direction,
2. The substrate transfer unit according to claim 1, wherein the power transmission member includes a belt that meshes with the projecting portion having a concavo-convex shape. The protrusion is formed in a spur gear shape,
The substrate transfer unit according to claim 1, wherein the power transmission member includes a gear that meshes with the spur gear-shaped protrusion. A process chamber in which a substrate processing process is performed;
A transfer shaft arranged side by side in the process chamber and provided with a plurality of rollers in contact with the substrate;
A disk-shaped first magnetic member installed at one end of the shaft;
A disk-shaped second magnetic member installed on the outside of the process chamber so as to face the first magnetic member;
A power transmission member for transmitting a rotational force between the second magnetic members;
A driving member that provides rotational force to any one of the second magnetic members;
A plurality of protrusions are formed along a circumferential direction on a circumferential surface of the second magnetic member, and the power transmission member is formed by any two adjacent second magnetic members. Rotating force is transmitted by meshing with the part,
Each of the first and second magnetic members is
A disk-shaped housing;
A plate-like magnet arranged in a ring shape in the housing, and
The magnets of the first magnetic member are adjacently disposed between different polarities, and the magnets of the second magnetic member are adjacently disposed between different polarities of the first magnetic member and the second magnetic member. The magnets facing each other are arranged to have different polarities,
A substrate processing apparatus, wherein a reinforcing plate made of a stainless steel material is arranged on one surface side of the plate-like magnet arranged in the housing of the second magnetic member . The protrusion is formed in a tooth shape of a chain gear,
The substrate processing apparatus according to claim 5, wherein the power transmission member includes a chain that meshes with the protruding portion of a tooth shape of a chain gear . The protrusion is formed in an uneven shape along the circumferential direction,
The substrate processing apparatus according to claim 5, wherein the power transmission member includes a belt that meshes with the projection having an uneven shape . The protrusion is formed in a spur gear shape,
The substrate processing apparatus according to claim 5, wherein the power transmission member includes a gear that meshes with the spur gear-shaped protrusion . A driving magnetic member for providing a rotational force to a magnetically coupled driven magnetic member,
A disc-shaped rotatable housing;
A plurality of plate-like magnets disposed in the housing,
Said housing, said housing to allow an external force acts to rotate the, have a plurality of protrusions formed to protrude along the circumferential surface,
The plurality of magnets are arranged in the housing so as to form a ring-shaped arrangement,
The plurality of magnets are arranged such that different polarities are adjacent to each other,
A driving magnetic force member, wherein a reinforcing plate made of a stainless steel material is disposed on one surface side of the plate-shaped magnet disposed in the housing. The drive magnetic force member according to claim 9, wherein the plurality of protrusions are formed in a tooth shape of a chain gear . The drive magnetic force member according to claim 9, wherein the plurality of protrusions are formed in a concavo-convex shape along a circumferential direction . The driving magnetic force member according to claim 9, wherein the plurality of protrusions are formed in a spur gear shape.

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