JP5116313B2 - Application head - Google Patents

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JP5116313B2
JP5116313B2 JP2007027589A JP2007027589A JP5116313B2 JP 5116313 B2 JP5116313 B2 JP 5116313B2 JP 2007027589 A JP2007027589 A JP 2007027589A JP 2007027589 A JP2007027589 A JP 2007027589A JP 5116313 B2 JP5116313 B2 JP 5116313B2
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coating head
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coating
bolt
slit
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JP2008188553A (en
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敬 堀江
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東洋刃物株式会社
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Description

本発明は、板状や帯状の被塗布部材の表面に塗布液を塗布する塗布ヘッドに関する。   The present invention relates to a coating head for coating a coating liquid on the surface of a plate-shaped or belt-shaped member to be coated.

塗布ヘッドは、ガラス基板等の板状部材やテープなどの帯状部材の表面に、液晶材料や磁性材などを含有した塗布液を塗布して塗膜を形成するもので、液晶基板や磁気テープ等の製造に用いられている。
このような塗布ヘッドは、図5の正面図及び図6の側面図に示すような概略形状をしている。また、図7(図5におけるA−A断面図を表している)に示すように、塗布液を貯留するマニホールド20と塗布液を塗布ヘッド1の先端部2から吐出させるためのスリット4とを形成する少なくとも前後一対のヘッド1a,1bからなり、ボルト等によりヘッド1a,1bは一体に結合されている。この塗布ヘッド1を被塗布部材30の表面に接近させ、塗布ヘッド1と被塗布部材30とを相対的に移動させて、図示しない供給路を経てマニホールド20に供給される塗布液をスリット4の先端から吐出させ、被塗布部材30の表面に塗布膜を形成するようになっている。
The coating head forms a coating film by applying a coating solution containing a liquid crystal material or a magnetic material on the surface of a plate-like member such as a glass substrate or a strip-like member such as a tape. It is used for manufacturing.
Such a coating head has a schematic shape as shown in the front view of FIG. 5 and the side view of FIG. Further, as shown in FIG. 7 (representing the AA sectional view in FIG. 5), a manifold 20 for storing the coating liquid and a slit 4 for discharging the coating liquid from the tip 2 of the coating head 1 are provided. It comprises at least a pair of front and rear heads 1a and 1b to be formed, and the heads 1a and 1b are integrally coupled by bolts or the like. The coating head 1 is brought close to the surface of the member to be coated 30, the coating head 1 and the member to be coated 30 are relatively moved, and the coating liquid supplied to the manifold 20 through a supply path (not shown) is supplied to the slit 4. A coating film is formed on the surface of the member to be coated 30 by discharging from the tip.

ところで、液晶基板や磁気テープ等の被塗布部材の表面に塗布液を塗布する塗布ヘッドの場合、塗布液をミクロンオーダーの厚み精度で均一に塗布することが求められるため、図7に示す塗布ヘッド1の先端部2やスリット4の内面4aは高精度に加工されている。   By the way, in the case of a coating head that coats a coating solution on the surface of a member to be coated such as a liquid crystal substrate or a magnetic tape, it is required to coat the coating solution uniformly with a thickness accuracy of micron order. 1 and the inner surface 4a of the slit 4 are processed with high accuracy.

さらに、塗布液をミクロンオーダーの厚み精度で均一に塗布する上で塗布ヘッド1の先端部2のスリット間隔Sの長さ方向(図面に対して直角方向)での平行度が極めて重要になるので、そのスリット間隔Sは例えば図5或いは図7に示すような複数の差動ネジ5等によってサブミクロンの精度で調整される。   Furthermore, the parallelism in the length direction (perpendicular to the drawing) of the slit interval S of the tip 2 of the coating head 1 is extremely important for uniformly coating the coating liquid with a thickness accuracy of the order of microns. The slit interval S is adjusted with submicron accuracy by a plurality of differential screws 5 as shown in FIG. 5 or FIG.

また、図5に示すように塗布ヘッド1の両側面3,3には、塗布幅を規制すると共に前記側面3からの塗布液の塗布漏れを防止するためのサイドカバー6が備えられている(例えば、特許文献1)。このサイドカバー6は、サイドカバー6の下部先端部6aと、塗布ヘッド1の先端部2とが面一になるよう位置決め調整され、図6に示すような複数のボルト7で塗布ヘッドの側面3に固定されるのが一般的である(例えば、特許文献2)。   Further, as shown in FIG. 5, both side surfaces 3 and 3 of the coating head 1 are provided with side covers 6 for restricting the coating width and preventing the coating liquid from leaking from the side surface 3 ( For example, Patent Document 1). The side cover 6 is positioned and adjusted so that the lower end portion 6a of the side cover 6 and the end portion 2 of the coating head 1 are flush with each other, and the side surface 3 of the coating head is provided with a plurality of bolts 7 as shown in FIG. It is common to fix to (for example, patent document 2).

特開2006−255646号公報JP 2006-255646 A 特開2006−198501号公報JP 2006-198501 A

ところが、サイドカバー6を固定する複数のボルト7のうち、塗布ヘッド1の側面3の先端側3aのボルト8を締め付けると、塗布ヘッド1の先端部2の側端側2aにひずみが生じるという問題があった。このようにボルト8を締め付けることによって塗布ヘッド1の先端部2の側端側2aにひずみが生じてしまう原因としては、図8(図5におけるB−B断面図を表している)に示すボルト8の軸部8aの真直度やボルト8の頭部下面8bと軸部8aとの直角度といったボルト自体の精度誤差や、ボルト8の軸部8aと塗布ヘッド1の側面3に形成されためねじ9との芯ブレ等により、塗布ヘッド1の先端部2の側端側2aに不要な方向への力が働くためと推測することができる。
また、スリット4の内面4aと塗布ヘッド1の側面3との直角度や側面3自体の平面度をミクロンオーダーで高精度に加工することには困難が伴うため、塗布ヘッド1の側面3とサイドカバー6との間に隙間が出来ることは避けられず、このことも、塗布ヘッド1の側面3の先端側3aのボルト8を締め付けると、塗布ヘッド1の先端部2の側端側2aにひずみが生じる原因になっていた。
これらのひずみによって、折角サブミクロンオーダーで調整したスリット間隔Sが先端部2の側端側2aで狂ってしまうので、サイドカバー6をボルト8で締め付けた後に再びサイドカバー6の近傍のスリット間隔Sを差動ネジ5によって再度調整し直さなければならなかった。
However, among the plurality of bolts 7 for fixing the side cover 6, when the bolt 8 on the distal end side 3 a of the side surface 3 of the coating head 1 is tightened, the side end side 2 a of the distal end portion 2 of the coating head 1 is distorted. was there. The cause of the distortion occurring on the side end 2a of the tip 2 of the coating head 1 by tightening the bolt 8 in this way is shown in FIG. 8 (representing the BB cross section in FIG. 5). The accuracy error of the bolt itself such as the straightness of the shaft portion 8a of the bolt 8 and the perpendicularity between the head lower surface 8b of the bolt 8 and the shaft portion 8a, or the screw formed on the shaft portion 8a of the bolt 8 and the side surface 3 of the coating head 1 It can be presumed that a force in an unnecessary direction acts on the side end side 2 a of the tip end portion 2 of the coating head 1 due to core blurring with the coating head 9 or the like.
In addition, since it is difficult to process the perpendicularity between the inner surface 4a of the slit 4 and the side surface 3 of the coating head 1 and the flatness of the side surface 3 itself on the order of microns, the side surface 3 and the side surface of the coating head 1 are difficult to process. It is inevitable that a gap is formed between the cover 6 and this also causes strain on the side end side 2 a of the tip end portion 2 of the coating head 1 when the bolt 8 on the tip side 3 a of the side surface 3 of the coating head 1 is tightened. It was the cause that occurred.
Due to these strains, the slit interval S adjusted on the order of the sub-micron angle is distorted on the side end side 2a of the front end portion 2. Therefore, after the side cover 6 is tightened with the bolt 8, the slit interval S in the vicinity of the side cover 6 again. Had to be readjusted with the differential screw 5 again.

また、塗布作業を長時間休止する場合や塗布液を変更する場合、あるいは塗布ヘッド内部に何らかの理由で塗布液が固まって付着してしまった場合等には、サイドカバー6を取り外し、塗布ヘッド1を分解して洗浄することが必要になるが、この場合にも組立の際に前記の調整を行わなければならなかった。
さらに、塗布ヘッド1を研削修理するために分解して塗布ヘッド1の先端部2やスリット4の内面4aを再研削した後の組立の際にも前記同様の調整が必要になってくる。
Further, when the coating operation is paused for a long time, when the coating solution is changed, or when the coating solution is hardened and adhered to the inside of the coating head for some reason, the side cover 6 is removed and the coating head 1 is removed. However, in this case as well, the adjustment described above must be performed during assembly.
Furthermore, the same adjustment as described above is required when assembling after disassembling the coating head 1 for grinding repair and regrinding the tip 2 of the coating head 1 and the inner surface 4a of the slit 4.

本発明は、上述したような従来の塗布ヘッドの欠点に鑑みてなされたものであり、サイドカバーを塗布ヘッドの側面に取り付ける作業を行った後であっても、スリット間隔が変化することのない塗布ヘッドを提供することを課題とする。   The present invention has been made in view of the drawbacks of the conventional coating head as described above, and the slit interval does not change even after the operation of attaching the side cover to the side surface of the coating head is performed. It is an object to provide a coating head.

本発明は、前述の課題を解決するため、少なくとも前後一対のヘッドによりマニホールドとスリットとが形成され、その一対のヘッドの左右両側面には塗布幅を規制するためのサイドカバーを備え、スリットから吐出される塗布液を被塗布部材に塗布する塗布ヘッドにおいて、サイドカバーを塗布ヘッドの側面に固定するための複数のボルトのうち、塗布ヘッドの側面の先端側にある少なくとも一個以上のボルトの軸部には、ボルトの頭部下面とサイドカバーとの間に、ボルトのねじ込み量によって圧縮量を調整して、サイドカバーを塗布ヘッドの側面に所定の力で押し付けることで、塗布ヘッドの側面の先端側のひずみを防止して塗布ヘッドの側面の先端側のスリット間隔を所定の間隔に維持することが可能な付勢手段を設けた塗布ヘッドとする。 In order to solve the above-mentioned problems, the present invention has a manifold and a slit formed by at least a pair of front and rear heads, and a side cover for regulating the coating width is provided on both the left and right sides of the pair of heads. A shaft of at least one bolt on the tip side of the side surface of the coating head among a plurality of bolts for fixing the side cover to the side surface of the coating head in a coating head that applies the discharged coating liquid to the coated member. the parts, between the head lower surface and the side cover of the bolt, by adjusting the amount of compression by screwing amount of the bolt, the side cover to the side of the coating head Rukoto pressed with a predetermined force, the side of the coating head coating head provided with a biasing means capable to prevent the distortion of the tip side to maintain the distal end side of the slit spacing of the side of the coating head to a predetermined distance To.

塗布ヘッドをこのように構成し、塗布ヘッド先端部の側端側にひずみが発生しない程度の力で付勢手段によってサイドカバーを塗布ヘッドの側面に押し付けてやれば、スリット間隔Sが変化することはなくなる。   If the coating head is configured in this way and the side cover is pressed against the side surface of the coating head by a biasing means with a force that does not cause distortion on the side of the tip of the coating head, the slit interval S changes. Will disappear.

また、塗布ヘッド先端部の側端側にある前記ボルトの軸部の一部には小径軸部が形成され、その小径軸部には付勢手段のはずれ防止用止め輪が設けられ、付勢手段はボルトの頭部下面とはずれ防止用止め輪との間に装着されている構成とするのが望ましい。これにより、付勢手段がボルトから外れることがなくなる。   In addition, a small diameter shaft portion is formed on a part of the shaft portion of the bolt on the side end side of the coating head front end portion, and the small diameter shaft portion is provided with a retaining ring for preventing the urging means from coming off. The means is preferably mounted between the bottom surface of the bolt head and the retaining ring for preventing slippage. As a result, the urging means does not come off from the bolt.

また、付勢手段はコイルバネ或いは、ゴムや軟質樹脂材等からなる弾性体とする。付勢手段としてコイルバネやゴム等を用いることにより、ボルトのねじ込みによる付勢手段の圧縮量で、必要とされる押し付け力を得ることができるようになる。   The urging means is a coil spring or an elastic body made of rubber or soft resin material. By using a coil spring, rubber, or the like as the urging means, the required pressing force can be obtained with the amount of compression of the urging means by screwing in the bolt.

本発明によれば、サイドカバーを取り付けた後のスリット間隔の再調整が不要になる。その結果、塗布ヘッドの組立調整の作業効率が極めて良くなる。   According to the present invention, readjustment of the slit interval after the side cover is attached becomes unnecessary. As a result, the work efficiency of assembling and adjusting the coating head is extremely improved.

以下、本発明の実施形態について図1乃至図4を用いて説明してゆく。
図1は本発明に係る塗布ヘッドの一実施形態を示す部分正面図である。図2は本発明に係る塗布ヘッドの別の実施形態を説明するための部分正面図である。図3は本発明に係る塗布ヘッドの別の実施形態を説明するための部分正面図である。図4は本発明に係る塗布ヘッドの別の実施形態を説明するための部分正面図である。
Embodiments of the present invention will be described below with reference to FIGS.
FIG. 1 is a partial front view showing an embodiment of a coating head according to the present invention. FIG. 2 is a partial front view for explaining another embodiment of the coating head according to the present invention. FIG. 3 is a partial front view for explaining another embodiment of the coating head according to the present invention. FIG. 4 is a partial front view for explaining another embodiment of the coating head according to the present invention.

図1において、サイドカバー6を固定する複数のボルト7のうち、塗布ヘッド1の側面3の先端側3aにねじ込まれる少なくとも一個以上のボルト8には、ボルト8の頭部下面8bとサイドカバー6との間に、ボルト8のねじ込みによりサイドカバー6を塗布ヘッド1の側面3に所定の圧縮力で押し付ける付勢手段10が設けられている。付勢手段10は、本実施例ではコイルバネを用いている。   In FIG. 1, among the plurality of bolts 7 that fix the side cover 6, at least one or more bolts 8 that are screwed into the distal end side 3 a of the side surface 3 of the coating head 1 include the head lower surface 8 b of the bolt 8 and the side cover 6. Between them, there is provided a biasing means 10 that presses the side cover 6 against the side surface 3 of the coating head 1 with a predetermined compressive force by screwing in the bolts 8. The biasing means 10 uses a coil spring in this embodiment.

サイドカバー6を取り付ける際に、サイドカバー6と側面3との間に液漏れがなく、また塗布ヘッド1の先端部2の側端側2aにひずみが発生しない程度の圧縮力に付勢手段10の圧縮高さXを調整する。この場合、サイドカバー6を側面3に押し付ける力は、例えば大人が親指で押し付ける程度の力で十分であり、3Kg〜10Kgの範囲とするのが好ましい。また、このときの付勢手段10の圧縮高さXを測定しておけば、サイドカバー6の取り付けを繰り返し行っても、付勢手段10の圧縮高さXによりボルト8のねじ込み量を容易に設定することができる。
また、付勢手段10としてコイルバネを用いることにより、付勢に必要なバネ圧や、ボルト8に装着するのに必要な寸法などを市場に流通しているコイルバネから選定することが容易であり、安価に購入できる。
When the side cover 6 is attached, the biasing means 10 applies a compressive force that does not cause liquid leakage between the side cover 6 and the side surface 3 and that does not cause distortion on the side end side 2 a of the tip end portion 2 of the coating head 1. The compression height X is adjusted. In this case, the force that presses the side cover 6 against the side surface 3 is sufficient, for example, to the extent that an adult presses with the thumb, and is preferably in the range of 3 kg to 10 kg. If the compression height X of the urging means 10 at this time is measured, the screw 8 can be easily screwed in by the compression height X of the urging means 10 even if the side cover 6 is repeatedly attached. Can be set.
Further, by using a coil spring as the urging means 10, it is easy to select a spring pressure necessary for urging, a dimension necessary for mounting on the bolt 8, and the like from coil springs in the market, It can be purchased at a low price.

図2に、本発明に係る塗布ヘッドの別の実施形態を示す。図2に示すように、ボルト8の軸部8aの一部に小径軸部11を形成し、その小径部軸部11に付勢手段10の外れを防止するための止め部材12を設けるようにする。小径軸部11の形状は、ボルト8を塗布ヘッド1の側面3に設けためねじ9にねじ込んでいく時に、止め部材12がサイドカバー6に当接してボルト8の頭部下面8bとの間にある付勢手段10を圧縮しながら、小径軸部11の軸方向に付勢手段10が所定の圧縮力になる位置まで移動できる形状にする。これにより、サイドカバー6の取り付け取り外しの時には付勢手段10がボルト8から外れることがなくなるので、サイドカバー6の取り付け取り外しが容易に行えるようになる。この止め部材12としては、市販のE型止め輪を用いることができる。止め部材としてE型止め輪を用いることにより、ボルト8の小径軸部11に容易に装着することができる。   FIG. 2 shows another embodiment of the coating head according to the present invention. As shown in FIG. 2, a small-diameter shaft portion 11 is formed on a part of the shaft portion 8 a of the bolt 8, and a stop member 12 for preventing the urging means 10 from coming off is provided on the small-diameter portion shaft portion 11. To do. The shape of the small diameter shaft portion 11 is such that when the bolt 8 is provided on the side surface 3 of the coating head 1 and screwed into the screw 9, the stop member 12 abuts against the side cover 6 and is between the head lower surface 8 b of the bolt 8. While a certain urging means 10 is compressed, the urging means 10 is moved in the axial direction of the small-diameter shaft portion 11 to a position where the urging means 10 reaches a predetermined compression force. As a result, the biasing means 10 is not detached from the bolt 8 when the side cover 6 is attached or detached, so that the side cover 6 can be easily attached or detached. A commercially available E-type retaining ring can be used as the retaining member 12. By using the E-type retaining ring as the retaining member, it can be easily mounted on the small diameter shaft portion 11 of the bolt 8.

また、付勢手段10とボルト8の頭部下面8bとの間に図3のように座金40を設けることで、より好ましい実施形態となり、座金40及び止め部材12の形状をボルト8の頭部の外径より大きくすることによりコイルバネの外径を大きくすることができ、より安定感のある付勢手段を備えた塗布ヘッドとすることも可能になる。   Further, by providing a washer 40 between the urging means 10 and the head lower surface 8b of the bolt 8 as shown in FIG. 3, it becomes a more preferred embodiment, and the shape of the washer 40 and the stopper member 12 is changed to the head of the bolt 8. The outer diameter of the coil spring can be increased by making the outer diameter larger than the outer diameter of the coil head, and it becomes possible to provide a coating head having a more stable biasing means.

図4は付勢手段10としてゴムや軟質樹脂等からなる弾性体を用いたものであり、前述したコイルバネと同様の効果を得ることができる。   FIG. 4 uses an elastic body made of rubber, soft resin or the like as the urging means 10 and can obtain the same effect as the coil spring described above.

尚、前述した実施形態において、サイドカバー6を塗布ヘッド1の側面3に押し付ける力を3Kg〜10Kgとしたが、この値に限定されるものではなく、塗布ヘッド1の側面3とサイドカバー6との間に塗布液漏れがなく、且つ、塗布ヘッド1の先端部2の側端側2aにひずみが生じてスリット間隔Sが変化してしまうことがない押し付け力であれば問題ないことは勿論のことである。   In the above-described embodiment, the force for pressing the side cover 6 against the side surface 3 of the coating head 1 is 3 kg to 10 kg. However, the force is not limited to this value, and the side surface 3 of the coating head 1 and the side cover 6 Of course, there is no problem as long as there is no leakage of the coating liquid and the pressing force does not change the slit interval S due to distortion at the side end 2a of the tip 2 of the coating head 1. That is.

また、弾性体の付勢手段10としてゴムや軟質樹脂等を例示したが、これに限定されるものではなく、皿バネやバネ座金を数枚重ねて使うこともできる。   Moreover, although rubber, soft resin, etc. were illustrated as the urging | biasing means 10 of an elastic body, it is not limited to this, Several disk springs or a spring washer can also be used in piles.

また、止め部材12としてE型止め輪を例示したが、これに限定されるものではなく、本発明の目的を果たすものであればよい。   Moreover, although the E-type retaining ring has been exemplified as the retaining member 12, the present invention is not limited to this, and any retaining member may be used as long as it fulfills the object of the present invention.

以上、本実施の形態ではヘッドが前後一対のものについて記述したが、前後のヘッドの中間に中央ヘッドを備えてスリットを2列にした3ヘッドの塗布ヘッドに用いても同様の効果を得ることができる。   As described above, in this embodiment, a pair of front and rear heads has been described. However, the same effect can be obtained by using a three-head coating head having a central head in the middle of the front and rear heads and two rows of slits. Can do.

本発明に係る塗布ヘッドの一実施形態を示す部分正面図。The partial front view which shows one Embodiment of the coating head which concerns on this invention. 本発明に係る塗布ヘッドの別の実施形態を示す部分正面図。The partial front view which shows another embodiment of the coating head which concerns on this invention. 本発明に係る塗布ヘッドの別の実施形態を示す部分正面図。The partial front view which shows another embodiment of the coating head which concerns on this invention. 本発明に係る塗布ヘッドの別の実施形態を示す部分正面図。The partial front view which shows another embodiment of the coating head which concerns on this invention. 塗布ヘッドの概要を説明するための塗布ヘッドの正面図。The front view of the coating head for demonstrating the outline | summary of a coating head. 塗布ヘッドの概要を説明するための塗布ヘッドの側面図。The side view of the coating head for demonstrating the outline | summary of a coating head. 図5のA−A断面図。AA sectional drawing of FIG. 図5のB−B断面図。BB sectional drawing of FIG.

符号の説明Explanation of symbols

1 塗布ヘッド
2 (塗布ヘッド1の)先端部
2a (先端部2の)側端側
3 (塗布ヘッド1の)側面
3a (側面3の)先端側
4 スリット
4a スリットの内面
5 差動ネジ
6 サイドカバー
6a サイドカバーの先端部
7 ボルト
8 ボルト
8a ボルトの軸部
8b ボルトの頭部下面
9 めねじ
10 付勢手段
11 小径軸部
12 止め部材
20 マニホールド
30 被塗布部材
40 座金
S スリット間隔
X 圧縮高さ
DESCRIPTION OF SYMBOLS 1 Application | coating head 2 Tip part 2a (of application head 1) Side end side 3 (of application head 1) Side surface 3a (of application head 1) End side 4 Slit 4a Inner surface of slit 5 Differential screw 6 Side Cover 6a Side cover tip 7 Bolt 8 Bolt 8a Bolt shaft 8b Bolt head bottom surface 9 Female screw 10 Energizing means 11 Small-diameter shaft 12 Stopping member 20 Manifold 30 Applied member 40 Washer S Slit interval X Compression height The

Claims (4)

少なくとも前後一対のヘッドによりマニホールドとスリットとが形成され、前記一対のヘッドの左右両側面には塗布幅を規制するためのサイドカバーを備え、前記スリットから吐出される塗布液を被塗布部材に塗布する塗布ヘッドにおいて、
前記サイドカバーを前記塗布ヘッドの側面に固定するための複数のボルトのうち、前記塗布ヘッドの側面の先端側にある少なくとも一個以上のボルトの軸部には、該ボルトの頭部下面と前記サイドカバーとの間に、前記ボルトのねじ込み量によって圧縮量を調整して、前記サイドカバーを前記塗布ヘッドの側面に所定の力で押し付けることで、前記塗布ヘッドの側面の先端側のひずみを防止して該塗布ヘッドの側面の先端側の前記スリット間隔を所定の間隔に維持することが可能な付勢手段が設けられていることを特徴とする塗布ヘッド。
A manifold and a slit are formed by at least a pair of front and rear heads, and side covers for regulating the coating width are provided on both left and right side surfaces of the pair of heads, and a coating liquid discharged from the slit is applied to a member to be coated. In the application head
Among the plurality of bolts for fixing the side cover to the side surface of the coating head, at least one of the bolts on the tip side of the side surface of the coating head includes a bottom surface of the head of the bolt and the side. prevention between the cover, by adjusting the amount of compression by screwing amount of the bolt, in Rukoto pressing the side cover with a predetermined force to the side of the coating head, the strain of the distal side of the coating head The application head is provided with an urging means capable of maintaining the slit interval at the front end side of the side surface of the application head at a predetermined interval .
前記塗布ヘッドの側面の先端側にある少なくとも一個以上のボルトの軸部の一部には小径軸部が形成され、該小径軸部には前記付勢手段のはずれ防止用止め部材が設けられ、前記付勢手段は、前記ボルトの頭部下面と前記はずれ防止用止め部材との間に装着されていることを特徴とする請求項1に記載の塗布ヘッド。 A small-diameter shaft portion is formed on a part of the shaft portion of at least one bolt on the front end side of the side surface of the coating head, and the small-diameter shaft portion is provided with a stop member for preventing the biasing means from coming off, 2. The coating head according to claim 1, wherein the urging unit is mounted between a lower surface of the head of the bolt and the stopper member for preventing detachment. 前記付勢手段がコイルバネであることを特徴とする請求項1または請求項2に記載の塗布ヘッド。 Coating head according to claim 1 or claim 2 wherein the biasing means is characterized by a coil spring. 前記付勢手段が弾性体であることを特徴とする請求項1または請求項2に記載の塗布ヘッド。 Coating head according to claim 1 or claim 2, wherein said biasing means is an elastic body.
JP2007027589A 2007-02-07 2007-02-07 Application head Active JP5116313B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007027589A JP5116313B2 (en) 2007-02-07 2007-02-07 Application head

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Application Number Priority Date Filing Date Title
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JP7311446B2 (en) * 2020-03-10 2023-07-19 株式会社Screenホールディングス Slit nozzle and substrate processing equipment

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IT1134153B (en) * 1979-11-21 1986-07-31 Siv Soc Italiana Vetro NOZZLE FOR STORING CONTINUOUSLY ON A SUBSTRATE A LAYER OF A SOLID MATERIAL
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