JP5095224B2 - Color organic EL display and manufacturing method thereof - Google Patents

Description

  The present invention relates to a color organic EL display in which a gas barrier layer is interposed between an organic EL (electroluminescence) structure and a color filter layer, and a method for manufacturing such a color organic EL display.

  This type of color organic EL display includes a transparent substrate such as glass or resin, a base layer including a color filter layer, a gas barrier layer, a transparent conductive film such as ITO, an organic compound layer including a light emitting layer that emits light, and After sequentially laminating the cathode, a sealing can such as glass or metal is provided on the substrate, and these laminates are sealed with the sealing can.

  Here, the organic EL structure is formed by the laminated transparent conductive film, the organic compound layer, and the cathode. More specifically, when the organic EL structure that emits white light and the color filter layer are combined, the organic EL structure is transparent. A structure in which a color filter layer, an overcoat layer, a gas barrier layer, a transparent conductive film, an organic compound layer that emits white light, and a cathode are sequentially stacked on a substrate is known.

  Here, the gas barrier layer prevents the gas such as water and organic matter that volatilizes from the underlying layer, that is, the color filter layer made of resin or the overcoat layer, from entering the organic compound layer located on the gas barrier layer. It is provided to prevent dark spot portions in the organic compound layer caused by the gas. The dark spot portion is a display defect portion which is generated in the pixel and does not emit light in the pixel to emit light.

  Therefore, the gas barrier layer is required to be pinhole-less and have good step coverage. In addition to this, performance such as transparency and surface flatness is required.

  Conventionally, as an example of the gas barrier layer, silicon oxide is contained and formed by a sputtering film forming method (see, for example, Patent Document 1) or insulated as a gas barrier layer of a color conversion element (CCM). And the like (for example, refer to Patent Document 2).

  However, since pinholes are not taken into consideration in terms of gas barrier properties, a dark spot portion is easily formed by gas such as moisture and organic matter contained in the underlayer diffusing into the organic compound layer through the pinholes. . That is, a dark spot portion is likely to occur in the pixel, and a pixel that cannot maintain the light emission characteristics of a desired organic EL element is generated.

  As a method for eliminating such pinholes in the gas barrier layer, a plurality of gas barrier layers are used and a cleaning step is performed between the film forming steps of each layer (see, for example, Patent Document 3), or a plurality of gas barrier layers are provided. However, a structure in which a resin layer is dispersed in each layer (for example, see Patent Document 4) has been proposed.

  In addition to this, as a film forming method effective for pinholes, a plasma CVD method (P-CVD (for example, patent document) capable of forming a denser film than a sputtering method, which is a general gas barrier layer forming method, is used. 5))) or an atomic layer growth method (ALE method (for example, see Patent Document 6)) in which a gas barrier layer is formed.

In addition, a method for preventing defects such as dark spots by drying the substrate before forming the organic compound layer and removing moisture or organic substances contained in the color filter layer or overcoat layer has been proposed. (See Patent Document 7).
JP-A-11-260562 JP-A-8-279394 JP 2003-229271 A JP 2003-282239 A JP 2004-39468 A JP 2006-253106 A JP 2005-63927 A

  However, in the countermeasure against pinholes described in Patent Document 3 and Patent Document 4 described above, the structure and process of the gas barrier layer are complicated, and problems remain in terms of productivity and cost.

  Further, in the gas barrier layer using P-CVD as described in Patent Document 5, when the gas barrier layer is formed by P-CVD, the heat resistance of the color filter layer and the overcoat layer which are the underlayers is increased. In consideration of the properties, the film is formed at a relatively low temperature, but in this case, the denseness of the film is inferior, so that the gas barrier property is deteriorated. For this reason, another laminated structure or a thicker film is required, which still causes a problem in productivity and leads to an increase in cost.

  The gas barrier layer using ALE can also be expected to be pinhole-free in principle, but the foreign matter or the gas barrier layer may be lost in a later step in the foreign matter attached on the color filter or during the formation of the gas barrier layer. Because it is rare, it is difficult to make the pinhole completely zero. Even if it is not missing, the gas barrier layer in the foreign matter may be missing due to leakage current during driving.

  The method of drying and removing gas such as moisture in the color filter layer and overcoat layer before forming the organic compound layer is also performed, and the drying process is performed after laminating the transparent electrode and partial gas barrier layer. It takes a considerable amount of time to remove and is not practical.

  The present invention has been made in view of the above problems, and in a color organic EL display in which a gas barrier layer is interposed between an organic EL structure and a base layer including a color filter layer, moisture contained in the base layer and Even if a dark spot portion is generated by diffusion of a gas such as an organic substance into the organic compound layer through the pinhole of the gas barrier layer, the object is to suppress the growth of the dark spot portion.

  As described above, the dark spot portion due to the gas from the underlayer of the gas barrier layer is formed by the diffusion of gas such as moisture or organic matter contained in the underlayer into the organic compound layer through the pinhole of the gas barrier layer.

  From this, it is considered that the display configuration and manufacturing method should be devised so that the gas existing in the organic compound layer in the dark spot portion is released into the sealing atmosphere in the sealing can. went. The present invention has been found experimentally as a result of this study (see FIG. 6 described later).

That is, according to the present invention, the dark spot generated in the organic compound layer (33) by diffusing the gas contained in the underlayer (10) into the organic compound layer (33) through the pinhole (21) of the gas barrier layer (20). An opening (34a) that is formed by removing the cathode (34) and discharges the gas into the sealing atmosphere in the sealing can (50) is provided on the portion (33a). The first feature is that the opening (34a) is located immediately above the pinhole (21) .

  According to this, since the gas existing in the organic compound layer (33) is released through the opening (34a), the diffusion of the gas in the organic compound layer (33) is suppressed, so that the base layer ( Even if the dark spot portion (33a) due to the gas from 10) is generated in the organic compound layer (33), the growth of the dark spot portion (33a) can be suppressed.

  Here, the opening (34a) means that at least the cathode (34) on the dark spot (33a) penetrates in the thickness direction, and only the cathode (34) is removed. However, a part or all of the organic compound layer (33) may be removed (see FIG. 7 described later).

  In addition, when the opening (34a) is formed by removing part or all of the organic compound layer (33) in addition to the cathode (34), the area of removal of the cathode (34) is more than the organic compound layer. A larger area than the removal area of the layer (33) is preferable because it can prevent the end of the cathode (34) located in the opening (34a) from sagging.

  Further, the opening (34a) may be a position that does not overlap with the pinhole (21) as long as it is located above the dark spot (33a) (see FIG. 2B described later). ), A position overlapping with the pinhole (21), that is, a position directly above the pinhole (21) (see FIG. 2A described later) is preferable.

In the present invention, an underlayer (10), a gas barrier layer (20), a transparent conductive film (31), an organic compound layer (33), and a cathode (34) are sequentially laminated on a substrate (11). After forming the laminated body (40), the gas contained in the underlayer (10) diffuses into the organic compound layer (33) through the pinhole (21) of the gas barrier layer (20), whereby the organic compound layer (33). The dark spot portion (33a) generated in the gas is detected, and the cathode (34) is removed on the dark spot portion (33a), so that the gas is put into the sealing atmosphere in the sealing can (50). An opening (34a) for discharging is formed so as to be positioned immediately above the pinhole (21) , and the dark spot (33a) is observed in a state where the laminate (40) is lit. From the center to the edge Detecting as a form of density of the dark area is gradually thinned Te, the second feature.

  According to the manufacturing method having the second feature, the dark spot portion (33a) due to the gas from the underlayer (10) is detected, and an opening is formed in the cathode (34) on the dark spot portion (33a). (34a) can be formed, and the gas present in the organic compound layer (33) can be released through the opening (34a).

  As a result, diffusion of the gas in the organic compound layer (33) is suppressed, so that the growth of the dark spot portion (33a) can be suppressed even if the dark spot portion (33a) is generated.

  In the manufacturing method having the second feature, the cathode (34) can be removed by laser irradiation.

  In addition, the dark spot portion (33a) can be easily detected by performing the revealing process for revealing the dark spot portion (33a) before the dark spot portion (33a) is detected. As such a manifestation process, a heat treatment can be performed on the laminate (40), or a reverse bias voltage can be applied.

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, parts that are the same or equivalent to each other are given the same reference numerals in the drawings for the sake of simplicity.

(First embodiment)
FIG. 1 is a diagram showing a schematic cross-sectional configuration of a color organic EL display 100 according to the first embodiment of the present invention. FIG. 2 is a cross-sectional view of the color organic EL display 100 in FIG. It is a schematic sectional drawing shown by.

  The substrate 11 is made of a glass substrate, a resin substrate, or the like. Here, the substrate 11 is a transparent substrate 11 made of a glass substrate. On one surface of the glass substrate 11, a laminated body 40 in which an underlayer 10 including a color filter layer 13, a gas barrier layer 20, and an organic EL structure 30 are sequentially laminated is provided.

  On one surface of the glass substrate 11, a shadow mask (so-called black matrix) 12 for separating the color filter layer 13 is formed, and the red, blue and green color filter layers 13 which are the three primary colors of light are formed on this. Is provided. A transparent overcoat layer 14 is formed as a planarizing layer on the top.

  The color filter layer 13 and the overcoat layer 14 are mainly formed of an acrylic resin. The underlayer 10 includes the shadow mask 12, the color filter layer 13, and the overcoat layer 14.

  The gas barrier layer 20 is formed by an atomic layer growth method (atomic layer epitaxy method, hereinafter referred to as ALE method) so as to cover the underlayer 10.

The gas barrier layer 20 is an inorganic film made of one selected from Al ₂ O ₃ , TiO ₂ , SiN, SiO ₂ , SiON, ZrO ₂ , MgO, CaO, GeO _2, ZnO, and the like. It is a laminated film of alumina (Al ₂ O ₃ ) formed with a thickness and titania (TiO ₂ ) of about 5 nm.

  An organic EL structure 30 as an organic electronic device is formed on the gas barrier layer 20. The organic EL structure 30 is a structure in which an organic compound layer 33 that includes an organic light emitting material and emits light is disposed between a pair of electrodes 31 and 34 facing each other. This organic EL structure 30 can employ materials and film configurations used for ordinary organic EL elements.

  On the gas barrier layer 20, an anode 31 is first formed as a transparent conductive film. The anode 31 is made of a transparent conductive film such as an ITO (indium tin oxide) film, and functions as a hole injection electrode.

  For example, the anode 31 is formed in a stripe shape extending in the left-right direction in FIG. 1 by patterning, for example, an ITO film having a thickness of 150 nm formed on the gas barrier layer 20 by a sputtering method by etching or the like. Is. As an example of the stripe shape, a strip-shaped anode 31 having a width of 500 μm may be arranged in a stripe shape at an interval of 50 μm.

Further, an insulating film 32 made of an insulating material is formed in order to prevent a short circuit at the edge of the anode 31. Similarly, a cathode partition wall 35 made of a resin or the like for separating the cathode 34 is formed. On the anode 31, an organic compound layer 33 is provided. The organic compound layer 33 emits light when voltage is applied from the anode 31 and the cathode 34, and can be the same as a general organic EL element. For example, as the organic compound layer 33, although not shown, a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer made of an organic light emitting material can be sequentially formed.

  A cathode 34 is formed on the organic compound layer 33. The cathode 34 is formed by depositing Al on a film such as LiF, for example, and is formed in a stripe shape extending in the left-right direction in FIG. The stripe shape of the cathode 34 is orthogonal to the anode 31, but can be the same shape as the anode 31.

  As described above, in the organic EL structure 30 in the color organic EL display 100 of the present embodiment, a region where the stripe-shaped anode 31 and the cathode 34 intersecting each other and overlapping each other is a portion where light emission display is to be performed. Constitutes a pixel. That is, the color organic EL display 100 of this embodiment constitutes a dot matrix display.

  Moreover, as FIG. 1 and FIG. 2 show, in this embodiment, the laminated body 40 provided on the one surface of the glass substrate 11 is sealed with the sealing can 50. FIG. The sealing can 50 is for blocking moisture from the organic EL structure 30, and is made of a stainless or glass can with a desiccant.

  The sealing can 50 is fixed to the periphery of the glass substrate 11 by adhesion or the like, and the inside of the sealing can 50 is, for example, an inert gas such as nitrogen containing a trace amount of oxygen or an atmosphere of the inert gas. ing.

  In this color organic EL display 100 as described above, in a desired display pixel, a driving DC voltage having a predetermined duty ratio is applied between the anode 31 and the cathode 34 by an external circuit (not shown). Light is emitted.

  That is, holes move from the anode 31 and electrons move from the cathode 34, and these holes and electrons recombine in the light emitting layer in the organic compound layer 33, and the emission energy causes the recombination in the light emitting layer. The fluorescent material emits light. The emitted light is extracted from the glass substrate 11 side through the color filter layer 13.

  Here, in the color organic EL display 100 of the present embodiment, the gas barrier layer 20 is configured by the ALE method and realizes a film configuration free from pinholes as much as possible. However, the gas barrier layer 20 by such an ALE method is used. However, it is difficult to completely eliminate the pinhole as described above. Therefore, as shown in FIGS. 1 and 2, the pinhole 21 exists in the gas barrier layer 20.

  That is, in the color organic EL display 100, the pinhole 21 is present in the gas barrier layer 20, but the portion of the organic compound layer 33 above the pinhole 21 is moisture or organic matter contained in the underlayer 10. The gas is diffused through the pinhole 21 into the organic compound layer 33, so that the dark spot portion 33a is formed.

  In the color organic EL display 100, as shown in FIGS. 1 and 2, an opening formed by removing the cathode 34 on the pinhole 21, that is, on the dark spot portion 33a. A portion 34a is provided. Specifically, the opening 34 a is a hole that penetrates the cathode 34 above the dark spot portion 33 a in the thickness direction, that is, a hole that reaches the organic compound layer 33 from the surface of the cathode 34.

  The opening 34a is for releasing the gas of the underlayer 10 into the sealing atmosphere in the sealing can 50, and the gas present in the dark spot portion 33a of the organic compound layer 33 is It is discharged into the sealing can 50 through the opening 34a.

  Here, FIG. 3 is a schematic plan view showing a planar configuration of the opening 34a. The opening 34a only needs to be positioned above the dark spot 33a. However, as shown in FIG. 3A, the opening 34a is located at a position where the opening 34a overlaps the pinhole 21, that is, a pin. The case where it is located immediately above the hole 21 and the case where the opening 34a is located above the pinhole 21 but does not overlap with the pinhole 21 are possible as shown in FIG. .

  In this case, since it is more likely that the opening 34a as shown in FIG. 3A is located immediately above the pinhole 21 is located at the center of the dark spot 33a, It is preferable in that the above gas is released.

  Next, the manufacturing method of the color organic EL display 100 of this embodiment is described. First, the base layer 10 including the color filter layer 13 is formed on one surface of the substrate 11 by a known method. Thereafter, if necessary, the substrate 11 is put into a constant temperature bath or a high-temperature vacuum chamber at 200 ° C. for degassing and dehydrating treatment.

  Thereafter, the gas barrier layer 20 is formed on the underlayer 10 by the ALE method. For example, when the gas barrier layer 20 is a laminated film of alumina and titania as described above, the ALE method is performed using trimethylaluminum, which is an organic metal as an alumina raw material, and titanium tetrachloride as a titania raw material. Thereby, the gas barrier layer 20 can be formed at a film formation temperature that does not damage the color filter layer 13 and the overcoat layer 14, for example, at a relatively low temperature of about 100 to 250 ° C.

  Then, the organic EL structure 30 is formed on the gas barrier layer 20. Specifically, the anode 31 made of ITO patterned in a stripe shape is first formed on the gas barrier layer 20 by a sputtering method, a photolithographic method, or the like. Next, the insulating film 32 is formed between the anodes 31, and the cathode partition walls 35 are formed on the insulating film 32.

  Next, a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are sequentially formed on the anode 31 as the organic compound layer 33. An example of such an organic compound layer 33 will be described. In this example, first, copper phthalocyanine is formed as a hole injection layer to a thickness of 20 nm by vacuum deposition. A triphenylamine tetramer (HOMO: 5.4 eV, LUMO: 2.4 eV, Eg: 3.0 eV) is formed thereon as a hole transporting layer by a vacuum evaporation method to a thickness of 40 nm.

  Further, as a red light emitting layer, a triphenylamine tetramer added with 1% of DCJT (HOMO: 5.3 eV, LUMO: 3.2 eV, Eg: 2.1 eV) is formed to 2 nm by a vacuum deposition method. On top of that, BAlq (HOMO: 5.8 eV, LUMO: 3) added with 1 wt% of perylene (HOMO: 5.5 eV, LUMO: 2.6 eV, Eg: 2.9 eV) as a fluorescent dye functioning as a blue light emitting layer. 0.0 eV, Eg: 2.8 eV) is formed to 40 nm by a vacuum deposition method.

  Further, an aluminum chelate is formed as an electron transport layer by a 20 nm vacuum deposition method. Thus, the organic compound layer 33 made of a laminated film from the hole injection layer to the electron transport layer is formed. Then, a LiF film is formed thereon with a thickness of 0.5 nm, for example, and then Al is formed with a film thickness of 100 nm, for example, to form the cathode 34.

  In this way, the base layer 10 including the color filter layer 13, the gas barrier layer 20, the anode 31 as the transparent conductive film, the organic compound layer 33, and the cathode 34 are sequentially stacked on the transparent substrate 11 to form the stacked body 40. After forming, a sealing can 50 is provided on the substrate 11. Thereby, the laminate 40 is sealed in a dry inert gas atmosphere in the sealing can 50.

  In this way, a substantially operable state of the color organic EL display 100 is completed. The state until the sealing process of the laminated body 40 by this sealing can 50 is shown by sectional drawing of FIG.

  As described above, as shown in FIG. 4, the pinhole 21 also exists in the gas barrier layer 20 configured by the ALE method. Then, the gas such as moisture and organic matter contained in the underlayer 10 diffuses into the organic compound layer 33 through the pinhole 21 as shown by the arrows in FIG. A dark spot portion 33a is formed.

  Therefore, in the manufacturing method of the present embodiment, thereafter, the dark spot portion 33a due to the gas contained in the underlayer 10 is detected (dark spot portion detecting step). Specifically, a lighting test is performed on some of the color organic EL displays 100 to which the sealing cans 50 are assembled, and those in which the dark spot portions 33a are generated are extracted by microscopic observation or CCD observation.

  In this dark spot portion detection step, it is necessary to distinguish the dark spot portion 33a caused by the gas from the underlayer 10 from a dark spot portion that is simply generated due to foreign matter or patterning failure of the anode 31 or the like.

  FIG. 5 is a diagram schematically showing the dark spot portion generated in the pixel based on the observation result of the pixel. FIG. 5A shows the dark spot portion 33a due to the gas from the underlayer 10, and FIG. Indicates the dark spot portion 33a 'due to the above-mentioned foreign matter or the like.

  As shown in FIG. 5B, the dark spot portion 33a ′ due to foreign matter or the like is dark in the whole dark portion and has a clear edge, whereas as shown in FIG. The dark spot portion 33a due to the gas has a shape in which the dark portion darkens from the center to the edge, and the edge is blurred. Based on such a difference, in this manufacturing method, the dark spot portion 33a due to the gas from the underlayer 10 is detected.

  Subsequently, in this manufacturing method, in the extracted color organic EL display 100, the cathode 34 is removed on the dark spot portion 33a to form the opening 34a (opening forming step).

  The opening 34a is formed by irradiating a portion of the cathode 34 located above the dark spot portion 33a with laser light to remove the portion. Laser light irradiation is performed from the glass substrate 11 side, and the cathode 34 is burned out by irradiating the cathode 34 with the laser light through the substrate 11, the base layer 10, and the stacked body 40.

  This laser irradiation can be performed by focusing the laser beam on the cathode 34 from the substrate 11 side. Further, an opening 34a is formed as the cathode 34 is removed by burning, and the opening 34a can be formed in two patterns as shown in FIGS. 3 (a) and 3 (b). It is.

  Specifically, the opening can be formed by laser irradiation by irradiating a portion of the cathode 34 positioned on the dark spot portion 33a with, for example, an Nd: YAG laser having a wavelength of 1064 nm and removing the portion. For the removal of the cathode 34 by this laser, an apparatus generally used for laser repair in an EL display can be used.

  FIG. 6 is a schematic cross-sectional view of the work after the opening forming step. By forming the opening 34a in this way, the color organic EL display 100 of this embodiment is completed.

  As described above, according to the color organic EL display 100 and the manufacturing method thereof of the present embodiment, the dark spot portion 33a due to the gas from the underlayer 10 is detected, and an opening is formed in the cathode 34 on the dark spot portion 33a. 34a is formed. Therefore, the gas present in the organic compound layer 33 can be released into the sealing atmosphere of the sealing can 50 through the opening 34a, as shown by the arrow in FIG.

  Thereby, since diffusion of the gas in the organic compound layer 33 is suppressed, even if the dark spot portion 33a is generated in the organic compound layer 33 by passing the gas from the base layer 10 through the pinhole 21, The growth of the dark spot portion 33a can be suppressed.

  As a result, as in the prior art described above, the gas barrier layer is formed into a plurality of layers without complicating the structure and process, and the gas such as moisture in the color filter layer and overcoat layer is supplied before the organic compound layer is formed. The color organic EL display 100 excellent in yield can be realized while suppressing an increase in productivity and cost without being removed by drying.

  Although it does not limit about the growth inhibitory effect of this dark spot part 33a by this embodiment, a specific example of an investigation result is shown. In order to observe the growth of the dark spot portion 33a, the color organic EL display was left in a constant temperature bath at 100 ° C. for 500 hours, and the dark spot diameter before and after being left, that is, the size of the dark spot portion 33a was measured.

  FIG. 7 is a chart showing the results of this investigation. In the chart shown in FIG. 7, sample 1 to sample 7 are obtained by irradiating the dark spot portion 33a with laser to form the opening 34a, and sample 8 to sample 10 are subjected to the laser irradiation as a comparative example. It was not done.

  As can be seen from this result, the dark spot diameter hardly changed in the present embodiment in which the cathode 34 was removed and the opening 34a was formed, whereas in the comparative example in which the opening 34a was not formed, the dark spot diameter did not change. The spot diameter grew to several times larger, and the effect of opening formation was confirmed.

(Second Embodiment)
FIG. 8 is a schematic cross-sectional view showing the main part of the color organic EL display according to the second embodiment of the present invention. The color organic EL display of the present embodiment can be the same as that of the first embodiment except for the portion shown in FIG. 8, and the manufacturing method thereof is also the same.

  As described above, the opening 34a only needs to penetrate the cathode 34 above the dark spot portion 33a in the thickness direction, and only the cathode 34 is removed as shown in FIG. It may be done.

  However, in the opening forming step, it is sufficient that only the cathode 34 is burned out and removed by laser irradiation. However, as shown in FIG. 8, part or all of the organic compound layer 33 located thereunder is It may be removed by laser irradiation. Although FIG. 8 shows an example in which the entire organic compound layer 33 is removed, a part may remain.

  In this case, the opening 34 a is configured such that a part or all of the organic compound layer 33 is removed in addition to the cathode 34 on the pinhole 21 of the gas barrier layer 20. Also in this case, the gas in the dark spot portion 33a is released from the opening 34a, and the same effect as in the above embodiment is exhibited.

  In the present embodiment, as shown in FIG. 8, it is preferable that the removal area of the cathode 34 is larger than the removal area of the cathode 34 and the removal area of the organic compound layer 33 in the opening 34 a. That is, in FIG. 8, the removal width d1 of the cathode 34 in the drawing is larger than the removal width d2 of the organic compound layer 33.

  The opening 34a may have a smaller removal area of the cathode 34. However, when the removal area of the cathode 34 is smaller, the organic compound layer 33 is located under the end of the cathode 34 located in the opening 34a. The state where there is no exists. In this case, the end of the cathode 34 hangs down, and as a result, contacts the anode 31 and may cause a short circuit.

  In that respect, if the removal area of the cathode 34 is larger than the removal area of the organic compound layer 33, the end of the cathode 34 is supported by the organic compound layer 33 below, and the above-described drooping possibility is caused. Can be eliminated.

(Other embodiments)
In the method of manufacturing the color organic EL display shown in the above embodiment, before performing the dark spot portion detection step, a revealing process for revealing the dark spot portion 33a, that is, a dark spot portion revealing step is performed. May be.

  Here, revealing the dark spot portion 33a means not only growing the size of the dark spot portion 33a that is too small to be detected, but increasing the size, and the portion where the pinhole 21 is likely to occur. This includes generating the pinhole 21 positively and causing the dark spot portion 33a. By doing in this way, the detection of the dark spot part 33a becomes easy, and the dark spot part 33a generated during use can be detected in advance and a countermeasure can be taken.

  Specifically, such a clarification process includes a heating process for heating the stacked body 40. For example, the work after sealing with the sealing can 50 is put in an oven or the like and subjected to heat treatment.

  The temperature of this heat treatment is preferably equal to or lower than the lowest temperature among the glass transition temperatures of the organic compounds constituting the organic compound layer 33 and equal to or higher than the display operation guarantee temperature. This makes it possible to realize the display in a short time while maintaining the quality of the display as much as possible.

  Although it does not limit, an example of manifestation by the heat processing which this inventor performed is given. The display having the dark spot portion 33a was allowed to stand at room temperature, and it was confirmed that the size of one of the dark spot portions 33a was 50 μm, which was twice as large as the initial 25 μm, and took 1500 hours.

  Thereafter, the same display was left in a constant temperature bath at 100 ° C., and when it was confirmed that the size of the one dark spot portion 33a further doubled to a diameter of 100 μm, it took 175 hours. As described above, in this example, by performing the heat treatment, it was possible to achieve the growth similar to the room temperature in a short time of 1/8 hour or less.

  Further, as the revealing treatment, a reverse bias voltage may be applied in the laminate 40 with the anode 31 being negative and the cathode 34 being positive. In this case, it is desirable that the reverse bias voltage to be applied is a voltage equal to or lower than the display withstand voltage (for example, several tens of volts) and equal to or higher than the reverse bias voltage (for example, about 15 V) used for driving the display.

  The inventor has experimentally confirmed the effect of the revealing process using the reverse bias voltage. As this mechanism, it is estimated that when a reverse bias voltage is applied, the pinhole 21 is positively generated at a portion where the pinhole 21 is likely to be generated by the energy, so that the dark spot portion 33a becomes apparent.

  In the manufacturing method shown in the first embodiment, the laser beam is irradiated from the glass substrate 11 side in the opening forming step, but the sealing can 50 is transparent to the extent that the laser beam can be transmitted. If there is, conversely, laser light may be irradiated to the cathode 34 from the sealing can 50 side.

  Moreover, in the said 1st Embodiment, after sealing the laminated body 40 with the sealing can 50, although the dark spot part detection process and the opening part formation process were performed, before performing this sealing, these You may perform a process and may perform sealing by the sealing can 50 after that. In this case, for example, in the room or chamber having the same atmosphere as the sealing atmosphere by the sealing can 50, the dark spot portion is detected and the opening is formed by laser irradiation. What is necessary is just to seal with the can 50. FIG.

  Further, the opening 34a may be formed by means other than laser irradiation. For example, if possible, the opening 34a may be formed by mechanical removal using sandblast or the like.

  In the above-described color organic EL display 100, the gas barrier layer 20 is formed by the ALE method, but may be formed by a sputtering method, P-CVD, or the like.

  The color organic EL display 100 shown in FIG. 1 and FIG. 2 is only an embodiment, and the display includes a transparent substrate, a base layer including a color filter layer, a gas barrier layer, and a transparent substrate. A conductive film, an organic compound layer that emits light, and a cathode are sequentially stacked, and these stacked bodies may be sealed with a sealing can. For example, the underlayer 10 may be one without the overcoat layer 14 in the above configuration.

1 is a schematic cross-sectional view of a color organic EL display according to a first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing the color organic EL display in FIG. 1 in a cross section perpendicular to the paper surface of FIG. FIG. 2 is a schematic plan view showing a planar configuration of an opening in the first embodiment, where (a) shows a case where the opening and the pinhole are overlapped, and (b) shows that the opening and the pinhole overlap. The case where it is in a position that is not allowed is shown. It is process drawing of the manufacturing method of the color organic electroluminescent display which concerns on the said 1st Embodiment. It is a figure which shows typically the dark spot part which generate | occur | produces in a pixel, (a) shows the dark spot part by the gas from a base layer, (b) shows the dark spot part by a foreign material. It is process drawing of the manufacturing method following FIG. It is a graph which shows the investigation result of the growth inhibitory effect of the dark spot part in the said 1st Embodiment. It is a schematic sectional drawing which shows the principal part of the color organic EL display which concerns on 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Underlayer, 11 ... Glass substrate as a substrate, 13 ... Color filter layer,
20 ... Gas barrier layer, 21 ... Pinhole, 31 ... Anode as transparent conductive film,
33 ... Organic compound layer, 33a ... Dark spot part, 34 ... Cathode, 34a ... Opening part,
40 ... Laminated body, 50 ... Sealing can.

Claims (8)

On the transparent substrate (11), the base layer (10) including the color filter layer (13), the gas barrier layer (20), the transparent conductive film (31), the organic compound layer (33) that emits light, and the cathode (34). ) Are sequentially laminated, and a laminate (40) is provided.
In a color organic EL display in which these laminates (40) are sealed with a sealing can (50) provided on the substrate (11),
A dark spot portion generated in the organic compound layer (33) by diffusing the gas contained in the underlayer (10) into the organic compound layer (33) through the pinhole (21) of the gas barrier layer (20). On top of 33a)
An opening (34a) that is formed by removing the cathode (34) and discharges the gas into the sealing atmosphere in the sealing can (50) is provided ,
The color organic EL display, wherein the opening (34a) is located immediately above the pinhole (21) .   The color organic EL according to claim 1, wherein the opening (34a) is formed by removing part or all of the organic compound layer (33) in addition to the cathode (34). display.   The removal area of the cathode (34) is larger between the removal area of the cathode (34) and the removal area of the organic compound layer (33) in the opening (34a). A color organic EL display as described in 1. On the transparent substrate (11), the base layer (10) including the color filter layer (13), the gas barrier layer (20), the transparent conductive film (31), the organic compound layer (33) that emits light, and the cathode (34). ) Are sequentially laminated, and then a color organic EL display in which a sealing can (50) is provided on the substrate (11) to seal the laminated body (40). In the manufacturing method of
After the formation of the laminate (40), the gas contained in the underlayer (10) diffuses into the organic compound layer (33) through the pinhole (21) of the gas barrier layer (20), thereby the organic compound layer (33). A dark spot portion (33a) generated in the compound layer (33) is detected;
By removing the cathode (34) on the dark spot portion (33a), an opening (34a) for releasing the gas into the sealing atmosphere in the sealing can (50) is formed. , Formed so as to be located immediately above the pinhole (21) ,
The dark spot portion (33a) is detected as a shape in which the dark portion darkens from the center to the edge by observing the laminated body (40) in a lighted state. A manufacturing method of a color organic EL display. The method of manufacturing a color organic EL display according to claim 4 , wherein the removal of the cathode (34) is performed by laser irradiation. The dark spot unit prior to detecting (33a), a color organic EL display manufacturing method according to claim 4 or 5, characterized in that the dark spot portion (33a) actualization process to elicit. The method of manufacturing a color organic EL display according to claim 6 , wherein the revealing process is a heating process for heating the stacked body (40). The method of manufacturing a color organic EL display according to claim 6 , wherein in the revealing process, a reverse bias voltage is applied to the stacked body (40).

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