JP5090151B2 - Damper device - Google Patents

Description

  The present invention relates to a damper device, and more particularly to a damper device suitable for being disposed in a gas passage through which a high-temperature gas containing a component that condenses and exhibits tackiness when cooled is circulated.

  For example, in a factory having a process using an organic solvent, a process gas containing an organic substance such as a spear component that condenses and exhibits tackiness when cooled with the solvent gas in the exhaust air is discharged from the solvent use process. The process gas is supplied to the combustion processing apparatus, subjected to combustion processing, and then released into the atmosphere. Further, as the combustion processing device, a heat storage combustion device has been proposed as one that reduces the amount of fuel used for the combustion processing and performs the combustion processing at a low running cost (see, for example, Patent Document 1).

  As shown in FIG. 6, in this type of heat storage combustion apparatus 40, a plurality of heat storage chambers 42a and 42b for preheating the process gas supplied to the combustion chamber 41 are arranged in parallel, and a process is performed in one heat storage chamber 42a. After the gas is preheated, it is sent to the combustion chamber 41 so that it burns at a high temperature that can decompose the organic matter with a small amount of fuel, and the high-temperature combustion gas after the organic matter is decomposed at a high temperature passes through the other heat storage chamber 42b When the other heat storage chamber 42b is sufficiently heated as a result, the process gas is preheated in the other heat storage chamber 42b and then supplied to the combustion chamber 41, and the high-temperature combustion gas is supplied to one heat storage chamber 42b. The operation of discharging into the atmosphere through the chamber 41a is repeated alternately.

  The process gas discharged from the solvent use step 51 passes through the supply duct 55 in which the main damper device 52, the first switching damper device 53, and the first blower exhaust fan 54 are disposed, and both the heat storage chambers 42a, It is selectively fed to both the heat storage chambers 42a and 42b via supply dampers 43a and 43b respectively arranged corresponding to 42b. Further, the combustion gas selectively discharged from both the heat storage chambers 42a and 42b is released into the atmosphere through the exhaust duct 45 through the exhaust dampers 44a and 44b respectively disposed corresponding to the both heat storage chambers 42a and 42b. The Further, in order to release process gas into the atmosphere during maintenance of the heat storage combustion device 40, a branch discharge duct 56 is branched from the supply duct 55 between the main damper device 52 and the first switching damper device 53. A second switching damper device 57 and a second blower fan 58 are disposed in the discharge duct 56. Further, in order to introduce outside air when the heat storage combustion device 40 is started up, an outside air introduction duct 60 in which a third switching damper device 59 is disposed between the first switching damper device 53 and the first blower fan 54 is connected. Has been.

As shown in FIG. 7, the first to third switching damper devices 53, 57, 59 have a pair of dampers 60 a, 60 a arranged in parallel so as to cross the passages of the ducts 55, 56, 60. A closed position in which the pivotal support 60b at the center position of each damper 60a is rotatably supported and blocked across the passage as indicated by a solid line, and an open position parallel to the passage direction as indicated by an imaginary line. The air cylinder 61 is configured to be switchable via a link opening / closing mechanism 62.
JP 2003-161424 A

  By the way, although the temperature of the process gas discharged | emitted from the solvent use process 51 is about 200 degreeC, if the temperature falls to about 120 degreeC, the organic substance in process gas will condense and it will become a spear component which exhibits adhesiveness. Will adhere. Therefore, in the state in which the heat storage combustion device 40 is normally operated, the damper (movable plate) 60a of the first switching damper device 53 is substantially the same as the process gas temperature, so no spear component adheres. Since the damper 60a of the second and third switching damper devices 57 and 59 has one surface in contact with the process gas and the other surface in contact with the atmosphere, the temperature of the damper 60a is low. In this process, the dust component in the process gas adheres to one surface of the damper 60a, and the stain component gradually accumulates between the damper 60a and the seal seat surface 62 on the ducts 55, 56, 60 side, Even if the damper 60a is fixed with the spear component and the first switching damper device 53 is closed during maintenance and the second switching damper device 57 is opened by the air cylinder 61, the damper 60a can be opened. Is a problem that it is not. The same problem also occurs in the third switching damper device 59. Furthermore, since the first switching damper device 53 is in the same state during maintenance, there is a problem that it may not be able to be opened even if the air cylinder 61 is opened after the maintenance is completed.

  SUMMARY OF THE INVENTION In view of the above-described conventional problems, the present invention provides a damper device that can be opened and closed smoothly even when disposed in a gas passage through which a high-temperature gas containing a component that condenses and exhibits adhesiveness when cooled is circulated. Objective.

  The damper device according to the present invention is a damper device disposed in a gas passage, and is a gas damper or a shut-off damper that shuts off the gas passage and the outside, and a side facing the gas passage from the shut-off damper on the upper side of the gas flow direction. And a control damper that opens and closes at an arbitrary opening, and a high-temperature gas supply means that supplies high-temperature gas to the space between the shut-off damper and the control damper.

  According to this configuration, the high temperature gas is supplied to the space between the shut-off damper and the control damper, so that the control damper that is always in contact with the gas flowing through the gas passage is maintained at a high temperature, and thus flows through the gas passage. Even if it is a high-temperature gas containing a component that condenses and exhibits adhesive properties when cooled, the components that exhibit adhesive properties can be prevented from adhering to the control damper, and can be opened and closed smoothly. Since the gas contacts the control damper and does not contact the shut-off damper disposed with a space, the gas can be opened and closed smoothly without the risk of adhering adhesive components.

  The gas passage is a gas passage that is introduced into a combustion processing device that performs combustion processing of the gas, and a blower fan that blows the gas toward the combustion processing device is disposed between the combustion processing device and the damper device, and the high-temperature gas When the feeding means comprises means for introducing high-temperature air in the combustion processing apparatus, when the gas is a gas to be burned, the high-temperature gas in the combustion processing apparatus is used by using the high-temperature air in the combustion processing apparatus. There is no need to provide a separate high-temperature gas generating means for generating energy, and energy saving and cost saving can be achieved.

  Further, if the peripheral portion of the shut-off damper and the control damper that are in contact with the seal seat surface on the gas passage side is provided with a protrusion that makes a substantially line contact with the seal seat surface, the contact between the seal seat surface and the peripheral portion of the damper The area can be reduced, and even if an adhesive component adheres to a part, it can be opened and closed smoothly with a small opening and closing force.

  In addition, the damper device having the above configuration is particularly effective when the gas is exhaust gas exhausted from the solvent use process.

  Also, when the damper device is in the shut-off state, if the shut-off damper is shut off and the control damper is opened by a small opening, the high temperature purge gas passes through the periphery of the damper while ensuring the shut-off state by the shut-off damper. By flowing to the side, the periphery of the damper is reliably maintained at a high temperature, and adhesion of the adhesive component to the periphery of the damper can be more reliably prevented.

  In that case, when the damper device is opened, the control damper is once closed, then the shut-off damper is fully opened, and then the control damper is fully opened, so that the shut-off damper is in two positions, the fully open position and the fully closed position. Even those that operate between the two are preferably operated by gradually opening and closing the control damper so that a sudden change in the air current does not occur during opening and closing.

  According to the damper device of the present invention, the high-temperature gas is fed to the space between the shut-off damper and the control damper so that the control damper that is always in contact with the gas flowing through the gas passage can be maintained at a high temperature, Even if the gas that circulates is a high-temperature gas containing components that condense and exhibit stickiness when cooled, the control damper can be prevented from adhering to the control damper and can be smoothly opened and closed, and This gas contacts the control damper and does not contact the shut-off damper disposed with a space therebetween, so that it can be smoothly opened and closed without fear of adhering adhesive components.

  Hereinafter, an embodiment of a damper device of the present invention will be described with reference to FIGS.

  The present embodiment relates to a facility for processing a process gas discharged from a process using an organic solvent in a manufacturing plant such as a display panel substrate or a circuit board in a heat storage combustion apparatus as a combustion processing apparatus. . In FIG. 1, the process gas discharged from the solvent use step 1 is supplied to the heat storage combustion device 3 through the supply duct 2. In the feeding duct 2, a main damper device 4, a first switching damper device 5, and a first blower fan 6 are arranged in this order.

  The heat storage combustion apparatus 3 includes a combustion chamber 7 that performs a combustion treatment of process gas at a high temperature that can reliably decompose organic substances, and a plurality of heat storage units arranged in parallel so as to preheat the process gas supplied to the combustion chamber 7. Chambers 8a and 8b, and as indicated by solid arrows in FIG. 1, the process gas is preheated in one heat storage chamber 8a and then supplied to the combustion chamber 7 for combustion treatment. When the other heat storage chamber 8b is heated, the other heat storage chamber 8b is heated and then discharged into the atmosphere through the discharge duct 9. As a result, when the other heat storage chamber 8b is sufficiently heated, 1, the process gas is preheated in the other heated heat storage chamber 8 b and then supplied to the combustion chamber 7 for combustion treatment, and the high-temperature combustion gas after the combustion treatment is supplied to one heat storage chamber, as indicated by a broken line arrow 1. 8a through which the one heat storage chamber 8a is heated. When one of the heat storage chambers 8a is sufficiently heated as a result of being discharged into the atmosphere through the duct 9, the process gas is then preheated in the one heat storage chamber 8a and then sent to the combustion chamber 7 alternately. It is configured to repeat.

  Therefore, in order to selectively supply the process gas supplied through the supply duct 2 to the two heat storage chambers 8a and 8b, supply dampers 10a and 10b are provided corresponding to the two heat storage chambers 8a and 8b, respectively. In addition, in order to release the combustion gas selectively discharged from both the heat storage chambers 8a and 8b to the atmosphere through the discharge duct 9, exhaust dampers 11a and 11b are provided corresponding to both the heat storage chambers 8a and 8b, respectively. The supply damper 10a and the exhaust damper 11a are opened and the supply damper 10b and the exhaust damper 11b are opened alternately.

  Further, since the process gas is released into the atmosphere without passing through the heat storage combustion device 3 during maintenance of the heat storage combustion device 3, it is branched and discharged from the feed duct 2 between the main damper device 4 and the first switching damper device 5. The duct 12 is branched, and the second switching damper device 13 and the second blower fan 14 are disposed in the branch discharge duct 12. Further, in order to introduce outside air when the heat storage combustion device 3 is started up, an outside air introduction duct 15 in which a third switching damper device 16 is disposed between the first switching damper device 5 and the first blower fan 6 is branched. It is connected.

  The first to third switching damper devices 5, 13, and 16 are configured by a damper device 20 as shown in FIG. During operation of the heat storage combustion device 3, the supply duct 2 constitutes a gas passage 21 in which the damper device 20 (first switching damper device 5) is disposed, and the branch discharge duct 12 and the outside air. The introduction duct 15 constitutes an external communication portion with the gas passage 21, and a damper device 20 (second and third switching damper devices 13 and 16) that shuts off the gas passage 21 and the outside is disposed in the communication portion. Has been.

  The damper device 20 is disposed with a space 24 on the gas passage 21 or a shut-off damper 22 that shuts off the gas passage 21 and the outside, and a space 24 on the upper side of the gas flow direction from the shut-off damper 22 or on the side facing the gas passage 21. A control damper 23 that can be opened and closed at an arbitrary opening degree, and a high-temperature gas supply means 25 that supplies a high-temperature gas to a space 24 between the shut-off damper 22 and the control damper 23 are provided.

  The shut-off damper 22 is arranged in parallel so that a pair of dampers (movable plates) 26a traverse the gas passages 21, and is shut off across the gas passages 21 at the central support portion 26b of each damper 26a. The air cylinder 27 is supported so as to be opened and closed via a link opening / closing mechanism 27, and is supported rotatably between a blocking position and an opening position parallel to the passage direction.

  The control damper 23 is arranged in parallel so that a pair of dampers (movable plates) 29a cross the gas passages 21, and is cut off across the gas passages 21 at a pivotal support portion 29b at the center of each damper 29a. The control air cylinder 30 is rotatably supported between a blocking position to be opened and an opening position parallel to the passage direction, and has an electropneumatic positioner 30a and can be driven back and forth at any speed at any speed. Is configured to be capable of being opened and closed via a link opening / closing mechanism 31.

  A seal seat 32 is provided in the gas passage 21 so that the peripheral edges of the dampers 26 a and 29 a of the cutoff damper 22 and the control damper 23 are in contact with each other. As shown in FIG. 3, the seal seat 32 has a seal seat surface 33 made of ceramic wool or the like in order to have high sealing performance and heat resistance. On the other hand, a protrusion 34 that abuts the seal seat surface 33 in a substantially line contact state is provided on the periphery of each damper 26a, 29a.

  In this embodiment, as shown in FIG. 1, the high-temperature gas supply means 25 has a high-temperature atmosphere space in the heat storage combustion apparatus 3, that is, a temperature of about 140 to 150 ° C. higher than the condensation temperature of the spear component in the process gas. The high-temperature gas introduction pipe 35 communicates the space of the high-temperature atmosphere and the space 24 of the damper device 20. As a result, when the blower fan 6 or 14 is activated, hot air in the heat storage combustion device 3 is sucked and introduced into the space 24. Therefore, in the present embodiment, as shown in FIG. 4, in the damper device 20 in the cut-off state, the cut-off damper 22 is completely cut off, while the control damper 23 is opened by a minute opening, As shown by the arrow, the high-temperature gas introduced into 24 is sucked toward the blower fan 6 or 14 through a slight gap between the periphery of the damper 29a and the seal seat surface 33. . Of course, the high temperature gas supply means 25 may be configured to forcibly supply the high temperature gas into the space 24 by a high temperature gas generation means such as a heater and a blower means, and even in that case, the periphery of the damper 29a and the seal seat By forming a slight gap between the surface 33 and the surface 33, the high temperature gas can be reliably brought into contact with the periphery of the damper 29a and the seal seat surface 33.

  In the above configuration, during normal operation of the heat storage combustion device 3, the first damper device 6 is opened, the second and third damper devices 13, 16 are closed, and the first blower fan 6 is operating. The high-temperature process gas discharged from the solvent use step 1 passes through the feed duct 2 and is sucked by the blower fan 6 through the main damper device 4 and the first damper device 6 and directed to the heat storage combustion device 3. Then, the combustion gas is burned in the heat storage combustion device 3, and the treated combustion gas is discharged into the atmosphere through the discharge duct 9.

  During the processing of this process gas, the cutoff damper 22 and the dampers 26a and 29a of the control damper 23 in the first damper device 6 are fully opened and the whole is about 200 ° C. as shown in FIG. Since it exists in the high-temperature process gas atmosphere, the spear component that condenses at about 120 ° C. does not adhere to the dampers 26a and 29a.

  On the other hand, in the second and third damper devices 13 and 16, as shown in FIG. 4, the damper 26a of the shut-off damper 22 is completely closed, and the damper 29a of the control damper 23 is a minute angle (about 5 °). The process gas flowing through the supply duct 2 is in contact with one surface of the damper 29a of the control damper 23. Therefore, when the other surface of the damper 29a is in contact with the low temperature outside air as in the prior art, the spear component in the process gas in contact with the low temperature damper 29a is condensed and attached. Then, since high-temperature air is introduced into the space 24 between the control damper 23 and the shut-off damper 22 through the high-temperature gas introduction pipe 35 as compared to the condensation temperature of 140 to 150 ° C. in the heat storage combustion device 3, The control damper 23 is maintained at a high temperature so that no dust component adheres to the damper 29a, and the process gas does not come into contact with the damper 26a of the shut-off damper 22, so that the stain component does not naturally adhere. Therefore, when the second or third damper device 13 or 16 is switched from the shut-off state to the open state, the shut-off damper 22 and the control damper 23 are smoothly opened and closed by the air cylinder 27 and the control air cylinder 30, respectively. Can do.

  Further, in the shut-off state of these second and third damper devices 13, 16 (damper device 20), the shut-off damper 22 is shut off as described above, and the control damper 23 is in a state opened by a minute opening degree. The high temperature gas introduced into the space 24 is sucked by the blower fan 6 disposed in the feed duct 2 while the cutoff state is secured by the cutoff damper 22, so that the high temperature gas is controlled by the control damper 23. The damper 29a flows to the feed duct 2 side through the periphery of the damper 29a, so that the periphery of the damper 29a is reliably maintained at a high temperature, and adhesion of the adhesive component to the periphery of the damper 29a can be more reliably prevented. In addition, since the high-temperature air in the combustion processing apparatus 3 is used as the high-temperature gas introduced into the space 24, energy saving and cost saving can be achieved.

  During maintenance of the heat storage combustion device 3 performed on a factory holiday or the like, the second damper device 13 is opened, the second blower fan 14 is activated, the first damper device 5 is shut off, and the first damper device 5 is shut off. The blower fan 6 is actuated to circulate the process gas through the branch discharge duct 12 and release it into the atmosphere. When the damper device 20 of the second damper device 13 is in the open state, the control damper 23 is once closed from the shut-off state shown in FIG. 4 as shown in FIG. As shown in FIG. 5, the shut-off damper 22 is fully opened, and then the control damper 23 is gradually opened by the control air cylinder 30 and fully opened as shown in FIG. By doing so, even if the shut-off damper 22 is fully opened by the air cylinder 27 at once, it is possible to prevent a sudden change in airflow. On the other hand, when the damper device 20 of the first damper device 5 is brought into the shut-off state, conversely, the state shown in FIG. 4 is changed from the state shown in FIG. 5C to the state shown in FIGS. 5B and 5A. Thus, even if the shut-off damper 22 is shut off at once by the air cylinder 27, it is possible to prevent an abrupt change in airflow.

  At the time of maintenance of the heat storage combustion device 3, the first damper device 5 is shut off, so that one surface of the damper 29a of the control damper 23 is in contact with the process gas, and the other surface of the damper 26a of the shut-off damper 22 is in a low-temperature atmosphere. However, since the space 24 between the control damper 23 and the shut-off damper 22 is maintained at a high temperature with a high-temperature gas in the same manner as described above, it is possible that the dust component adheres to one surface of the damper 29a. Therefore, even when the first damper device 5 is opened after the maintenance is completed, the opening / closing operation can be smoothly performed.

  Further, the dampers 26a and 29a of the shut-off damper 22 and the control damper 23 have a configuration in which a protrusion 34 that is substantially in line contact with the seal seat surface 33 is provided at a peripheral portion that contacts the seal seat surface 33 on the gas passage 21 side. Therefore, the contact area between the seal seat surface 33 and the peripheral portions of the dampers 26a and 29a can be reduced. As a result, even if an adhesive component adheres to a part, the opening / closing operation of the shut-off damper 22 and the control damper 23 is small. It can be opened and closed smoothly by the opening and closing force.

  In the above description of the embodiment, the example in which the high-temperature air in the combustion processing apparatus 3 is used as the high-temperature gas introduced into the space 24 has been described. However, a high-temperature gas generation unit that generates high-temperature gas is separately provided. May be. Further, instead of a state in which the damper 29a of the control damper 23 is opened by a minute opening, a minute through hole may be formed in the damper 29a. Moreover, the damper device of the present invention is not limited to the combustion treatment facility for the process gas discharged from the solvent use step 1, but is applied to a gas passage through which a high-temperature gas containing a component that condenses and exhibits stickiness when cooled is circulated. By doing so, a remarkable effect is exhibited.

  In the damper device of the present invention, the high temperature gas is supplied to the space between the shut-off damper and the control damper, and the control damper that is always in contact with the gas flowing through the gas passage is maintained in the high temperature state. Even if it is a high-temperature gas containing a component that condenses and exhibits stickiness when the gas flowing through it is cooled, the component exhibiting adhesiveness adheres to the control damper and the shut-off damper disposed with a space. It can be reliably prevented, and the shut-off damper and the control damper can be opened and closed smoothly, and can be suitably used for a damper device disposed in a gas passage through which a high-temperature gas containing a component that condenses and exhibits stickiness when cooled is circulated. .

BRIEF DESCRIPTION OF THE DRAWINGS The whole schematic block diagram of the facility which carries out the combustion process of the process gas to which the damper apparatus of one Embodiment of this invention is applied with a thermal storage combustion apparatus. Sectional drawing which shows the structure of the damper apparatus of the embodiment. The expanded sectional view of the seal part of the damper device. Sectional drawing of the interruption | blocking state of the damper apparatus. Sectional drawing which shows the switching process from the interruption | blocking state to an open state of the damper apparatus. The whole schematic block diagram of the equipment which carries out the combustion process of the process gas which applied the damper apparatus of the prior art example with a thermal storage combustion apparatus. Sectional drawing which shows the structure of the damper apparatus of the prior art example.

Explanation of symbols

1 Solvent use process 2 Supply duct (gas passage)
3 Thermal storage combustion equipment (combustion treatment equipment)
5 First switching damper device 6 First blower fan 12 Branch discharge duct (gas passage)
DESCRIPTION OF SYMBOLS 13 2nd switching damper apparatus 14 2nd ventilation fan 15 Outside air introduction duct 16 3rd switching damper apparatus 20 Damper apparatus 21 Gas passage 22 Shut off damper 23 Control damper 24 Space 25 High temperature gas feed means 26a Damper 29a Damper 33 Seal Seat 34 Projection

Claims (6)

  A damper device disposed in a gas passage, the gas passage or a shut-off damper that shuts off the gas passage and the outside, and a space on the upper side of the gas flow direction from the shut-off damper or on the side facing the gas passage. A damper device comprising: a control damper that opens and closes at an arbitrary opening degree; and a high-temperature gas supply means that supplies high-temperature gas to a space between the shut-off damper and the control damper.   The gas passage is a gas passage that is introduced into a combustion processing device that performs combustion processing of gas, and a blower fan that blows the gas toward the combustion processing device is disposed between the combustion processing device and the damper device to supply high-temperature gas. 2. The damper apparatus according to claim 1, wherein the means comprises means for introducing high-temperature air in the combustion processing apparatus.   The damper device according to claim 1, wherein a protrusion that substantially contacts the seal seat surface is provided at a peripheral portion of the shut-off damper that contacts the seal seat surface on the gas passage side and the control damper.   The damper device according to any one of claims 1 to 3, wherein the gas is an exhaust gas exhausted from the solvent use step.   5. The damper device according to claim 1, wherein the damper device is in a state of being shut off and the control damper is opened by a minute opening degree.   6. The damper device according to claim 5, wherein when the damper device is in an open state, the control damper is once closed, then the shut-off damper is fully opened, and then the control damper is fully opened.

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