JP5088155B2 - Optical device and optical apparatus provided with the same - Google Patents

Description

  The present invention relates to an optical device that removes dust and the like from optical components and an optical apparatus including the same.

  2. Description of the Related Art Conventionally, a system that removes dust or the like attached to a dustproof member by vibrating a dustproof member arranged in front of an image sensor has been known (see, for example, Patent Document 1).

JP 2003-338916 A

  In the above-described system, there is a case where the piezoelectric element is not provided at an optimal position for vibrating the dust-proof member in a plurality of vibration modes, and vibration cannot be efficiently generated in the dust-proof member. The problem to be solved by the present invention is to provide an optical device capable of efficiently generating vibration and an optical apparatus including the same.

The invention according to claim 1 is provided with a first short side, a second long side opposite to the first long side, a first short side provided in a direction intersecting the first long side and the second long side. An optical component (36A) having a side and a second short side opposite to the first short side and having optical transparency, and provided in the vicinity of the first short side (361) to vibrate the optical component a first vibration member (37A), have a, a second vibration member for vibrating (37B) of said optical component is provided in the vicinity of the second short side (362), the center of the optical component The distance (L ₁ ) from (365) to the first vibration member is different from the distance (L ₂ ) from the center of the optical component to the second vibration member, and from the first short side The distance between the first vibration member and the distance from the second short side to the second vibration member is substantially equal. Device.
According to a second aspect of the present invention, an optical component (36A) having optical transparency, a first piezoelectric body (38), and a first electrode (39a, 39b) are provided in the optical component, and the optical component is mounted on the optical component. A second vibration member that includes a first vibration member (37E) to be vibrated, a second piezoelectric body (38), and a second electrode (39a, 39b) and is provided in the optical component and vibrates the optical component. A distance from the center of the optical component to the first piezoelectric body is substantially equal to a distance from the center of the optical component to the second piezoelectric body, and from the center of the optical component. The optical device is characterized in that the distance to the first electrode is different from the distance from the center of the optical component to the second electrode.
The invention according to claim 3 is the optical device according to claim 1 or 2, wherein the first drive signal is supplied to the first vibration member and the second vibration member. A drive unit (28) for supplying a second drive signal, wherein the drive unit supplies the second drive signal at a timing different from the timing for supplying the first drive signal, The second drive signal is an optical device characterized by having a frequency substantially the same as the frequency of the first drive signal.
A fourth aspect of the present invention is the optical device according to the third aspect, wherein the optical component vibrates in a first bending vibration mode at a timing when the driving unit supplies the first driving signal. The drive unit vibrates in a second flexural vibration mode different from the first flexural vibration mode at a timing at which the second drive signal is supplied, and the drive unit is configured such that the optical component is the first flexural vibration mode. When vibrating in the vibration mode, the second drive signal is not supplied to the second vibration member, and when the optical component vibrates in the second bending vibration mode, the first vibration member is An optical device is characterized in that no drive signal is supplied.

Fifth aspect of the present invention, an optical device according to any one of claims 1 to 4, and said first vibration member and said second vibration member, the In the optical component, the first vibration member and the second vibration member are provided at positions that are not line-symmetric with respect to a line (363) parallel to a side provided nearby. It is an optical device.

A sixth aspect of the present invention is the optical device according to any one of the first to fifth aspects, wherein the optical component has an odd number of antinodes of vibration due to the first vibration member. And the second vibration member vibrates in the bending vibration mode in which the antinodes are even in number.

According to a seventh aspect of the present invention, there is provided an optical component (36B) having optical transparency, a first vibration member (37A) that is provided in the optical component and vibrates the optical component, and is provided in the optical component. A second vibration member (37B) that vibrates the optical component; a first drive signal that is supplied to the first vibration member; and a first drive signal that is supplied to the first vibration member. A drive unit (28) for supplying a second drive signal to the second vibration member when there is not, a distance from the center (366) of the optical component to the first vibration member ( L ₃ ) is an optical device that is different from a distance (L ₄ ) from the center of the optical component to the second vibrating member.

The invention according to claim 8 is the optical apparatus according to claim 7, wherein the optical component vibrates in the first bending vibration mode at a timing when the driving unit supplies the first driving signal. The optical device vibrates in a second bending vibration mode different from the first bending vibration mode at a timing when the driving unit supplies the second driving signal.
A ninth aspect of the present invention is the optical device according to the seventh or eighth aspect, wherein the driving unit has a timing different from a timing at which the first driving signal is supplied. A driving signal is supplied, and the second driving signal has an approximately same frequency as the frequency of the first driving signal.
A tenth aspect of the present invention is the optical apparatus according to any one of the seventh to ninth aspects , wherein the optical component is substantially circular.

The invention according to claim 11 is the optical device according to claim 10 , wherein the first vibration member and the second vibration member are provided to face each other. It is an optical device.

A twelfth aspect of the present invention is the optical device according to any one of the first to eleventh aspects, wherein the first and second vibrating members have vibration efficiency with respect to the optical component. The optical device is attached to different positions.

A thirteenth aspect of the invention is the optical device according to any one of the first to twelfth aspects of the invention, wherein the optical when a predetermined drive signal is given to the first vibration member. The optical device is characterized in that a vibration amount of the component is different from a vibration amount of the optical component when the predetermined drive signal is given to the second vibration member.

A fourteenth aspect of the invention is an optical instrument comprising the optical device according to any one of the first to thirteenth aspects.

  In the present invention, vibration can be generated efficiently.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<< First Embodiment >>
1 is a block diagram showing the overall configuration of a camera according to the first embodiment of the present invention, FIG. 2 is a schematic sectional view of the optical device according to the first embodiment of the present invention, and FIG. 3 is a plan view of the optical device shown in FIG. 4A and 4B are schematic cross-sectional views along the IVA-IVA line in FIG. 3 in the primary and tertiary bending vibration modes, and FIG. 4C is along the IVC-IVC line in FIG. 3 in the secondary bending vibration mode. FIG.

  First, the entire camera according to the first embodiment of the present invention will be described with reference to FIG. The camera 1 in this embodiment is a single-lens reflex digital still camera in which a lens barrel 10 is detachably attached to a camera body 20.

  Inside the camera body 20, a mirror 21, a shutter unit 23, and an imaging unit 30 are provided. An optical lens group 11 is provided inside the lens barrel 10. With the lens barrel 10 mounted on the camera body 20, the optical lens group 11, the mirror 21, the shutter unit 23, and the imaging unit 30 are positioned on the optical axis C.

  The mirror 21 can be rotated at a predetermined angle by a mirror drive motor 22. The mirror 21 is retracted from the optical axis C or positioned on the optical axis C in accordance with ON / OFF of the release switch 29.

  The shutter unit 23 can be opened and closed by a shutter drive motor 24. The shutter unit 23 is opened for a predetermined time when the release switch 29 is pressed.

  Therefore, when the photographer does not press the release switch, the mirror 21 is positioned on the optical axis C, and the subject image incident through the optical lens group 11 is reflected by the mirror 21 and passes through the pentaprism or the like. A finder optical system (not shown) is provided. On the other hand, when the photographer presses the release switch 29, the mirror 21 is retracted from the optical axis C by the mirror drive motor 22, and the shutter unit 23 is opened by the shutter drive motor 24, so that the subject image is guided to the imaging unit 30. It is like that.

  Further, the camera body 20 includes a body CPU 25, a battery 26, a vibration mode selection circuit 27, and a dustproof member drive circuit 28. On the other hand, the lens barrel 10 incorporates a lens CPU 13. The body CPU 25 and the lens CPU 13 are electrically connected via the contact 14. Information such as the focus amount and the aperture amount is exchanged between the body CPU 25 and the lens CPU 13 via the contact point 14 and the lens driving motor 12 and the lens CPU 13 are driven from the battery 26 on the camera body 20 side. Is supplied to the lens barrel 10 side.

  For example, when the main switch (not shown) of the camera body 10 is turned on, the vibration mode selection circuit 27 instructs the dust prevention member drive circuit 28 about a vibration mode to be generated by a dust prevention member 36A (described later) of the imaging unit 30. To do. The dustproof member drive circuit 28 applies a voltage such as a periodic rectangular wave or a sine wave to the first and second piezoelectric elements 37A and 37B of the imaging unit 30 based on an instruction from the vibration mode selection circuit 27. Thus, the first and second piezoelectric elements 37A and 37B are excited. Note that the vibration frequencies of the first and second piezoelectric elements 37A and 37B are preferably frequencies that resonate the surface of the dust-proof member 36A in order to obtain a large amplitude at a low voltage. This resonance frequency depends on the shape, thickness, material, and the like of the dustproof member 36A.

  As shown in FIGS. 2 and 3, the imaging unit 30 includes an imaging element 31, an optical low-pass filter 34, a dustproof member 36A, and piezoelectric elements 37A and 37B.

  The image sensor 31 is configured by, for example, a CCD image sensor, a CMOS image sensor, or the like, and is mounted on the substrate 32. The electrical image signal photoelectrically converted by the image sensor 31 is stored in a memory (not shown).

  A low-pass filter 34 is disposed on the image sensor 31 via a spacer 33. The low-pass filter 34 includes, for example, two quartz birefringence plates and one λ / 4 plate (wavelength plate). A space between the image sensor 31 and the low-pass filter 34 is sealed with a spacer 33 and protected from dust and the like.

  A dustproof member 36 </ b> A is disposed on the low-pass filter 34 via a seal member 35. The dustproof member 36A is made of, for example, transparent infrared absorbing glass, and is fixed to the substrate 32 or the seal member 35 using screws (not shown) or the like. A space between the low-pass filter 34 and the dust-proof member 36A is sealed with a seal member 35, and is protected from dust and the like.

  The dustproof member 36A has, for example, a ratio between a length along the X direction and a length along the Y direction, and a ratio between a length along the X direction of the imaging surface of the imaging element 31 and a length along the Y direction. It is substantially the same. In the present invention, as the dust-proof member 36A, for example, a glass other than infrared absorbing glass, or a light transmissive member such as a lens or a filter may be used.

  The dust-proof member 36 </ b> A has a substantially rectangular shape that is wider in the X-axis direction than the low-pass filter 34, and the first side 361 and the second side 362 opposite to the first side 361 protrude from the seal member 35. The first and second piezoelectric elements 37A and 37B are fixed to the lower surface of the side end portion of the dust-proof member 36A using an adhesive or the like, and an area 364 necessary for imaging (hatched portion in FIG. 3). Arranged to avoid. The first and second piezoelectric elements 37A and 37B may be provided on the upper surface of the dustproof member 36A.

As shown in FIG. 2, each of the first and second piezoelectric elements 37A and 37B includes a piezoelectric body 38 and a pair of electrodes 39a and 39b sandwiching the piezoelectric body 38 therebetween. Examples of the material constituting the piezoelectric body 38 include lead zirconate titanate (PZT), barium titanate (BT), potassium dihydrogen phosphate (KDP), crystal (SiO ₂ ), and lithium tantalate (LiTaO ₃ ). And lithium niobate (LiNbO ₃ ). Moreover, as a material which comprises electrode 39a, 39b, gold | metal | money, platinum, silver etc. can be illustrated, for example. The electrodes 39a and 39b are connected to the dustproof member drive circuit 28.

As shown in FIG. 3, the first piezoelectric element 37 </ b> A is disposed in the vicinity of the approximate center of the first side 361. On the other hand, the second piezoelectric element 37B is arranged above the vicinity of the center of the second side 362 in the figure, and is attached at a position that is asymmetric with respect to the first piezoelectric element 37A. It has been. That is, the first piezoelectric element 37 </ b> A and the second piezoelectric element 37 </ b> B are not line-symmetric with respect to the virtual line 363 substantially parallel to the first and second sides 361 and 362. The distance _{L 1} from the center 365 of the dustproof member 36A to the first piezoelectric element 37A is shorter than the distance _{L 2} from the center 365 to the second piezoelectric element 37B _(L 1 _<L 2) . Thus, in the present embodiment, the first piezoelectric element 37A and the second piezoelectric element 37B are arranged at positions where the vibration efficiency with respect to the dustproof member 36A is different. The vibration efficiency refers to the efficiency of generating vibration in the dustproof member 36A when excited at the same frequency. Incidentally, in the drawing, the second piezoelectric element 37B is arranged at a position about ¼ from the upper end of the second side 362, and caused the dust-proof member 36A to vibrate in the secondary vibration mode. At this time, the second piezoelectric element 37B is positioned on the antinode of the vibration.

  Hereinafter, the operation of removing dust and the like from the dust-proof member 36A by the first and second piezoelectric elements 37A and 37B will be described with reference to FIGS. 4A to 4C.

For example, when the photographer turns on the main switch (not shown) of the camera 1, the vibration mode selection circuit 27 transmits a control signal to the dustproof member drive circuit 28 so as to execute the primary bending vibration mode. Dustproof member driving circuit 28, based on this control signal, the first excitation signal of the frequency f ₁ is outputted to the first piezoelectric element 37A, as shown by the solid line and the dotted line in FIG. 4A, the dustproof member 36A is primary It vibrates in the vibration mode.

Next, the vibration mode selection circuit 27 transmits a control signal to the dustproof member drive circuit 28 so as to execute the tertiary bending vibration mode. Based on this control signal, the dustproof member drive circuit 28 outputs an excitation signal of the _second frequency f ₂ (> f ₁ ) to the first piezoelectric element 37A, as shown by a solid line and a dotted line in FIG. The dustproof member 36A vibrates in the tertiary vibration mode.

Finally, the vibration mode selection circuit 27 transmits a control signal to the dustproof member drive circuit 28 so as to execute the secondary bending vibration mode. Based on this control signal, the dustproof member drive circuit 28 outputs an excitation signal of the _third frequency f ₃ (f ₁ <f ₃ <f ₂ ) to the second piezoelectric element 37B, and the solid and dotted lines in FIG. 4C. As shown, the dust-proof member 36A vibrates in the secondary vibration mode.

Note that the first and second piezoelectric elements 37A and 37B may be vibrated in a third-order or higher order vibration mode. Moreover, the frequency | count and timing which vibrate 1st and 2nd piezoelectric element 37A, 37B can be set arbitrarily. Furthermore, the frequency of the excitation signal output to the first piezoelectric element 37A and the frequency of the excitation signal output to the second piezoelectric element 37B may be substantially the same. For example, the dustproof member driving circuit 28, first and second piezoelectric elements 37A, may output an excitation signal of the third frequency f ₃ at different timings to 37B. Also, dustproof member driving circuit 28, first and second piezoelectric elements 37A, may output an excitation signal of the third frequency f ₃ at the same timing to 37B. First and second piezoelectric elements 37A, 37B, since it is arranged so as to be asymmetrical with each other in the dustproof member 36A, to vibrate the dustproof member 36A at a plurality of vibration modes be excited at the same frequency f ₃ Because it can.

  In the present embodiment, by executing the bending vibration mode as described above, the dust-proof member 36A vibrates and dust or the like attached to the surface of the dust-proof member 36A is removed. At this time, the dust-proof member 36A is vibrated in a plurality of flexural vibration modes, and vibrations having different vibration amounts are generated in the dust-proof member 36A. Therefore, the dust-proof member 36A can be removed without leaving dust or the like. In the present embodiment, since vibration can be applied at the antinodes in each bending vibration mode, vibration can be efficiently generated in the dustproof member 36A. The amount of vibration refers to a physical quantity that causes dust removal such as vibration displacement, vibration speed, vibration acceleration, and the like.

<< Second Embodiment >>
FIG. 5 is a plan view of an optical device according to the second embodiment of the present invention. This embodiment is different from the first embodiment in that it includes third and fourth piezoelectric elements 37C and 37D in addition to the first and second piezoelectric elements 37A and 37B, but other configurations. Is the same as in the first embodiment. Only the differences from the first embodiment will be described below with respect to the optical device according to the second embodiment, and the same reference numerals will be given to portions having the same configurations as those in the first embodiment, and description thereof will be omitted.

  In the present embodiment, the third piezoelectric element 37C is disposed in the vicinity of the approximate center of the second side 362 of the dust-proof member 36A, and is line-symmetric with respect to the first piezoelectric element 37A with the virtual line 363 as the center. It has become.

  On the other hand, the fourth piezoelectric element 37D is disposed above the vicinity of the center of the first side 361 of the dust-proof member 36A, and is line-symmetric with respect to the second piezoelectric element 37B around the virtual line 363. It has become. The structures of the third and fourth piezoelectric elements 37C and 37D are the same as those of the first and second piezoelectric elements 37A and 37B.

  In the present embodiment, the third piezoelectric element 37C is vibrated at the same timing and at the same frequency as the first piezoelectric element 37A. Similarly, the fourth piezoelectric element 37D is vibrated at the same timing and at the same frequency as the second piezoelectric element 37B.

<< Third Embodiment >>
6 is a plan view of an optical device according to a third embodiment of the present invention, FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 6, and FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. This embodiment is different from the first embodiment in that it includes fifth and sixth piezoelectric elements 37E and 37F instead of the first and second piezoelectric elements 37A and 37B. Is the same as in the first embodiment. Hereinafter, only the differences from the first embodiment of the optical device in the third embodiment will be described, and portions having the same configuration as in the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.

  In the fifth piezoelectric element 37 </ b> E in the present embodiment, the electrodes 39 a and 39 b are disposed only in the substantially central portion of the piezoelectric body 38 as shown in FIG. 7. On the other hand, in the sixth piezoelectric element 37F, the electrodes 39a and 39b are arranged only at one end of the piezoelectric body 38 as shown in FIG. Therefore, in the fifth piezoelectric element 37E, the piezoelectric effect is generated only in the substantially central portion, whereas in the sixth piezoelectric element 37F, the piezoelectric effect is generated only in one end portion. In the fifth and sixth piezoelectric elements 37E, one of the electrodes 39a and 39b may be formed on the entire surface of one main surface of the piezoelectric body 38.

  As shown in FIG. 6, the fifth and sixth piezoelectric elements 37 </ b> E and 37 </ b> F are provided in the vicinity of the approximate centers of the first and second sides 361 and 362 of the dust-proof member 36 </ b> A, respectively, and the virtual line 363. The line is symmetrical about the center. Therefore, the portions that generate the piezoelectric effect in each of the piezoelectric elements 37E and 37F are asymmetric on the dust-proof member 36A.

<< 4th Embodiment >>
FIG. 9 is a plan view showing an optical device according to the fourth embodiment of the present invention. In the present embodiment, the shape of the dustproof member and the installation position of the piezoelectric element are different from those of the first embodiment, but other configurations are the same as those of the first embodiment. In the following, only the differences from the first embodiment of the optical device in the fourth embodiment will be described, and the same reference numerals will be given to portions having the same configuration as in the first embodiment, and description thereof will be omitted.

In the present embodiment, as shown in FIG. 9, the dust-proof member 36B has a substantially circular shape. The dustproof member 36B, first and second piezoelectric elements 37A, although 37B are attached, the distance _{L 3} from the center 366 of the dustproof member 36B to the first piezoelectric element 37A is, from said center 366 second It is longer than the distance _{L 4} to the piezoelectric element _{37B (L 3> L 4)} . The first piezoelectric element 37A and the second piezoelectric element 37B are disposed so as to face each other with the center 366 of the dust-proof member 36B as the center. As described above, in the present embodiment, the first piezoelectric element 37A and the second piezoelectric element 37B are arranged at positions where the vibration efficiency with respect to the dustproof member 36B is different.

  The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, instead of the piezoelectric elements 37A to 37F, magnetostrictive elements that vibrate the magnetostrictive body by applying magnetism to the magnetostrictive body may be used.

  In the above-described embodiment, an example in which the present invention is applied to a single-lens reflex type digital camera has been described. For example, a digital still camera, a digital video camera, and a microscope in which a lens barrel and a camera body cannot be attached and detached are described. The present invention may be applied to a mobile phone or other optical equipment.

FIG. 1 is a block diagram showing the overall configuration of the camera according to the first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the optical device according to the first embodiment of the present invention. FIG. 3 is a plan view of the optical device shown in FIG. 4A is a schematic cross-sectional view taken along the line IVA-IVA of FIG. 3 in the primary bending vibration mode. 4B is a schematic cross-sectional view taken along the line IVA-IVA of FIG. 3 in the third-order bending vibration mode. 4C is a schematic cross-sectional view taken along the line IVC-IVC in FIG. 3 in the secondary bending vibration mode. FIG. 5 is a plan view of an optical device according to the second embodiment of the present invention. FIG. 6 is a plan view of an optical device according to the third embodiment of the present invention. 7 is a cross-sectional view taken along line VII-VII in FIG. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. FIG. 9 is a plan view showing an optical device according to the fourth embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Camera 10 ... Lens barrel 20 ... Camera body 27 ... Vibration mode selection circuit 28 ... Dust-proof member drive circuit 30 ... Imaging unit 31 ... Imaging element 34 ... Optical low pass filter 36A, 36B ... Dust-proof member 361 ... First side 362 ... second side 363 ... imaginary line 365, 366 ... center 37A to 37F ... first to sixth piezoelectric elements 38 ... piezoelectric bodies 39a, 39b ... electrodes

Claims (14)

A first long side; a second long side opposite to the first long side; a first short side provided in a direction intersecting the first long side and the second long side; and the first short side. And an optical component having a second short side facing and having light transmittance;
A first vibration member provided in the vicinity of the first short side and vibrating the optical component;
Have a, a second vibration member for vibrating the optical component is provided in the vicinity of the second short side,
The distance from the center of the optical component to the first vibration member is different from the distance from the center of the optical component to the second vibration member,
An optical apparatus , wherein a distance from the first short side to the first vibration member is substantially equal to a distance from the second short side to the second vibration member . An optical component having optical transparency;
A first vibration member that has a first piezoelectric body and a first electrode and is provided in the optical component and vibrates the optical component;
A second excitation member that has a second piezoelectric body and a second electrode and is provided in the optical component and vibrates the optical component;
The distance from the center of the optical component to the first piezoelectric body is substantially equal to the distance from the center of the optical component to the second piezoelectric body,
The distance from the center of the optical component to said first electrode, an optical device, wherein different from the distance from the center of the optical component to said second electrode. An optical device according to claim 1 or claim 2 , wherein
A drive unit for supplying a first drive signal to the first vibration member and supplying a second drive signal to the second vibration member;
The drive unit supplies the second drive signal at a timing different from the timing of supplying the first drive signal;
The optical device, wherein the second drive signal has a frequency substantially the same as the frequency of the first drive signal. An optical device according to claim 3 , wherein
The optical component vibrates in the first bending vibration mode at the timing when the driving unit supplies the first driving signal, and the first bending at the timing when the driving unit supplies the second driving signal. Vibrates in a second flexural vibration mode different from the vibration mode ;
The drive unit does not supply a second drive signal to the second vibration member when the optical component vibrates in the first bending vibration mode, and the optical component is in the second bending vibration mode. An optical apparatus, wherein the first drive signal is not supplied to the first vibration member when vibrating . An optical device according to any one of claims 1 to 4 , wherein
The first vibration member and the second vibration member are a line parallel to a side of the optical component in which the first vibration member and the second vibration member are provided in the vicinity. The optical device is provided at a position that is not line symmetric. An optical device according to any one of claims 1 to 5 , wherein
The optical component vibrates in a bending vibration mode in which the antinode of vibration is an odd number by the first vibration member, and vibrates in a bending vibration mode in which the antinode of vibration is an even number by the second vibration member. An optical device. An optical component having optical transparency;
A first vibration member that is provided in the optical component and vibrates the optical component;
A second vibration member that is provided in the optical component and vibrates the optical component;
The first drive signal is supplied to the first vibration member, and the second drive signal is supplied to the second vibration member when the first drive signal is not supplied to the first vibration member. A drive unit for supplying
The optical apparatus is characterized in that a distance from the center of the optical component to the first vibration member is different from a distance from the center of the optical component to the second vibration member.   The optical device according to claim 7, comprising:
  The optical component vibrates in the first bending vibration mode at the timing when the driving unit supplies the first driving signal, and the first bending at the timing when the driving unit supplies the second driving signal. An optical device that vibrates in a second bending vibration mode different from the vibration mode.   An optical device according to claim 7 or claim 8, wherein
  The drive unit supplies the second drive signal at a timing different from the timing of supplying the first drive signal;
  The optical device, wherein the second drive signal has a frequency substantially the same as the frequency of the first drive signal. An optical device according to any one of claims 7 to 9 ,
The optical device is characterized in that the optical component is substantially circular. The optical device according to claim 10 , comprising:
The optical device, wherein the first vibration member and the second vibration member are provided to face each other. An optical device according to any one of claims 1 to 11, wherein
The optical apparatus, wherein the first and second vibration members are attached at positions where vibration efficiency with respect to the optical component is different. An optical device according to any one of claims 1 to 12 ,
The amount of vibration of the optical component when a predetermined drive signal is applied to the first vibration member, and the amount of vibration of the optical component when the predetermined drive signal is applied to the second vibration member An optical device characterized by being different. An optical apparatus comprising the optical device according to any one of claims 1 to 13 .

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