JP5086755B2 - Waveguide type optical device module and manufacturing method thereof - Google Patents

Description

  The present invention belongs to the field of waveguide-type optical device modules, such as optical modulator modules with high production yield and high reliability.

As a typical waveguide type optical device module, a substrate having a so-called electro-optic effect in which a refractive index is changed by applying an electric field, such as lithium niobate (LiNbO ₃ ) (hereinafter, a lithium niobate substrate is referred to as an LN substrate). LN optical modulator module (optical modulator module, or module), which is a traveling wave electrode type lithium niobate optical modulator (hereinafter abbreviated as LN optical modulator) in which an optical waveguide and a traveling wave electrode are formed. Simply called an optical modulator). This LN optical modulator is applied to a large capacity optical transmission system of 2.5 Gbit / s and 10 Gbit / s because of its excellent chirping characteristics. Recently, application to an ultra large capacity optical transmission system of 40 Gbit / s is also being studied, and it is expected as a key device.

(Conventional technology)
This LN optical modulator includes a type using a z-cut substrate and a type using an x-cut substrate (or y-cut substrate). Here, an x-cut substrate LN optical modulator using an x-cut LN substrate and a coplanar waveguide (CPW) traveling wave electrode is taken up as a prior art, and a perspective view thereof is shown in FIG. FIG. 15 is a cross-sectional view taken along line AA ′ of FIG. The following discussion holds true for z-cut substrates as well. In the case of a z-cut LN substrate, the cross-sectional structure is as shown in FIG.

In FIG. 14, 1 is an x-cut LN substrate, 2 is a transparent SiO ₂ buffer layer having a thickness of about 200 nm to 1 μm in the wavelength region used in optical communication such as 1.3 μm or 1.55 μm, and 3 is an x-cut. This is an optical waveguide formed by thermally diffusing Ti at about 1050 ° C. for 10 hours after vapor deposition of Ti on the LN substrate 1, and constitutes a Mach-Zehnder interference system (or Mach-Zehnder optical waveguide). Reference numerals 3a and 3b denote optical waveguides (or interactive optical waveguides) in a portion where an electrical signal and light interact (referred to as an interaction portion), that is, two arms of a Mach-Zehnder optical waveguide. The CPW traveling wave electrode 4 includes a central conductor 4a and ground conductors 4b and 4c. In FIG. 16, a z-cut LN substrate 1 ′ is used as the substrate. Hereinafter, the x-cut LN substrate 1 and the z-cut LN substrate 1 ′ are collectively referred to as an LN substrate. The traveling wave electrode is also simply called an electrode.

In the LN optical modulator, a bias voltage (usually a DC bias voltage) and a high-frequency electrical signal (also referred to as an RF electrical signal or simply an electrical signal) are superimposed and applied between the center conductor 4a and the ground conductors 4b and 4c. . The buffer layer 2 is effective microwave refractive index n _m of the optical waveguide 3a of the high-frequency electrical signals, 3b by approximating the effective refractive index n _o of the propagating light and the important role of expanding a light modulation band ing.

  Next, the operation of the LN optical modulator configured as described above will be described. The voltage-light output characteristic shown in FIG. 17 is the voltage-light output characteristic of the LN optical modulator in a certain state, and Vb is a DC bias voltage at that time. As shown in FIG. 16, the DC bias voltage Vb is normally set at the midpoint between the peak and bottom of the light output characteristic.

In FIGS. 15 and 16, a voltage of about 5 V is applied between the center conductor 4a and the ground conductor 4b, but these gaps are as small as about 15 μm. Therefore, a high electric field of about 3 × 10 ⁵ V / m is applied between the center conductor 4a and the ground conductor 4b. For this reason, when moisture enters the inside of the housing 10 in which the LN optical modulator is built, an electrical short state occurs between the center conductor 4a and the ground conductor 4b, and the optical modulator module is broken.

  In order to prevent this, it is essential to hermetically seal the optical modulator module. A solder material is generally used for this hermetic sealing. The prior art disclosed in Patent Document 1 shown in FIG. 18 is an example of hermetic sealing with a solder material.

  Here, 1 is an LN substrate, 7b is a fiber jacket of a single mode optical fiber that extracts light from the optical modulator, 8b is a single mode optical fiber strand (or optical fiber strand) for output, 10 is Package housing (or housing), 10a is a lid (or lid) of the housing, 10b is a brazing portion, 10c is an outer sleeve, 10d is an intermediate sleeve, 30 is an adhesive reinforcing block, 31 is an adhesive reinforcing capillary, 32 is a metal solder material, 38 is an inner sleeve, and 39 is an adhesive.

As can be seen from FIG. 18, in order to perform hermetic sealing using the solder material 32, it is necessary to metallize the strands of the single mode optical fiber. However, it is generally difficult to metalize a single-mode optical fiber having a diameter of 125 μm and a thin and round wire 8b, which increases the cost of the optical modulator module. Furthermore, in order to melt the solder material, it is necessary to raise the temperature to 200 to 300 ° C., and it is difficult to raise the temperature locally. Further, in the prior art shown in FIG. 18, the optical modulator module is broken in a hermetic sealing process that is performed immediately before the product is finished, such as damage to the adjacent optical fiber 8b when the temperature is increased with a soldering iron. May end up. And the yield deterioration in this process greatly affects the cost of the product.
Japanese Patent Laid-Open No. 7-198997

  As described above, the conventional technology that hermetically seals with a solder material requires optical fiber metallization and is expensive, and it is necessary to raise the temperature locally, so it is technically difficult. When using a soldering iron In some cases, the optical fiber was damaged. Therefore, it has been desired to develop a hermetic seal with a high yield as a product by a simpler process.

In order to solve the above-mentioned problems, a waveguide type optical device module according to claim 1 of the present invention is a substrate, an optical waveguide for guiding light formed on the substrate, and for inputting the light. In a waveguide type optical device module comprising an input optical fiber, an output optical fiber for extracting the light, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate for both sides of the light to the side where the light is input to the waveguide type optical device module output from the waveguide type optical device module, an inner holder which encloses the input optical fiber and the output optical fiber, said housing mounted externally of the body comprises an external holder enclosing the internal holder, the only inner holder comprises a notch for internal holder, in at least a portion of the inside of the inner holder With serial and the inner holder and the input optical fiber and the output optical fiber by an adhesive through the notch inner holder is filled is fixed, at least to the inner holder the gap of the external holder some adhesive is in between the outer holder mounted externally of said housing and said inner holder are fixed by Rukoto filled, the said input optical fiber and the output optical fibers inside the holder and the outer holder The hermetic sealing between the two is completed .

A waveguide type optical device module according to claim 2 of the present invention includes a substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, or the light. In a waveguide type optical device module having either one of output optical fibers for taking out, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate, An inner holder containing the input optical fiber and the output optical fiber, on one side where light is input to the waveguide type optical device module or on the side where the light is output from the waveguide type optical device module ; comprising an external holder enclosing the internal holder mounted externally, the only inner holder comprises a notch for an internal holder, within at least one said inner holder Wherein by an adhesive through the notch inner holder is filled with said inner holder and said input optical fiber or the output optical fiber is fixed, and the inner holder of clearance of the outer holder at least part adhesive is filled in by Rukoto and the external holder mounted externally of said housing and said inner holder is fixed, the inner holder and the outer and the input optical fiber or the output optical fiber A hermetic seal between the holder and the holder is completed .

A waveguide type optical device module according to claim 3 of the present invention includes a substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, and the light. In a waveguide-type optical device module comprising an output optical fiber for taking out, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate, the light is a waveguide-type light An internal holder that encloses the input optical fiber and the output optical fiber, and an external holder that is attached from the outside of the housing , on both the side that inputs to the device module and the side that outputs the light from the waveguide type optical device module each includes an outer holder enclosing an inner holder, said portion cutout which internal holder inside the holder has a portion cutout which external holder to the external holder, cutting deleted for the external holder With at least a part does not overlap the inner holder notch in the radial direction of the parts, by the adhesive is filled through the internal holder notch in at least a portion of the inside of the inner holder wherein with the input optical fiber and the output optical fiber and the inner holder is fixed, mounted from the outside of the housing by Rukoto adhesive is filled in at least part of the gap between the inner holder the outer holder The outer holder and the inner holder are fixed, and hermetic sealing between the input optical fiber and the output optical fiber and the inner holder and the outer holder is completed .

A waveguide type optical device module according to claim 4 of the present invention includes a substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, or the light. In a waveguide type optical device module having either one of output optical fibers for taking out, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate, An internal holder that contains the input optical fiber or the output optical fiber on one of the side on which light is input to the waveguide type optical device module or the side on which the light is output from the waveguide type optical device module ; the attached externally provided with external holder enclosing the internal holder, said portion cutout which internal holder inside the holder, cutting the external holder to the external holder missing Has a section, the state in which at least part of the outer holder notches portion does not overlap the inner holder notch in the radial direction, is fixed, for the inner holder in at least a portion of the inside of the inner holder The input optical fiber or the output optical fiber and the inner holder are fixed by being filled with an adhesive through a notch, and are bonded to at least a part of the gap between the inner holder and the outer holder. agent is fixed and the inner holder and the outer holder mounted from the outside of the housing by Rukoto is filled, between the input optical fiber or the output optical fiber and the inner holder and the outer holder The hermetic sealing is completed .

  The waveguide type optical device module according to claim 5 of the present invention is characterized in that the notch portion for the inner holder and the notch portion for the outer holder do not overlap.

  The waveguide type optical device module according to claim 6 of the present invention is characterized in that the rear end of the outer holder projects beyond the rear end of the inner holder.

  The waveguide type optical device module according to claim 7 of the present invention is characterized in that a lid is provided at a rear end of the external holder.

  The waveguide type optical device module according to claim 8 of the present invention is characterized in that the substrate has an electro-optic effect.

  The waveguide type optical device module according to claim 9 of the present invention is characterized in that the substrate is made of lithium niobate.

  The waveguide type optical device module according to claim 10 of the present invention is characterized in that the substrate is made of a semiconductor.

  The waveguide type optical device module according to an eleventh aspect of the present invention is characterized in that the electrode includes a central conductor and a ground conductor for modulating the light.

  A method for manufacturing a waveguide-type optical device module according to claim 12 of the present invention includes a substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, An output optical fiber for extracting the light, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate, and the light is input to the waveguide type optical device module An inner holder containing the input optical fiber or the output optical fiber, and an outer holder containing the inner holder for at least one of the side and the side from which the light is output from the waveguide type optical device module, A method of manufacturing a waveguide-type optical device module having a notch for an inner holder in an inner holder and a notch for the outer holder in an outer holder. Inserting the input optical fiber or the output optical fiber, filling the internal holder with an adhesive from the notch for the internal holder, and fixing the input optical fiber or the output optical fiber and the internal holder A step of disposing the outer holder on an outer periphery of the inner holder, and setting a relative position of the notch portion for the inner holder and the notch portion for the outer holder at a predetermined position; and the notch portion for the outer holder And a step of filling an adhesive into at least a part of a gap between the internal holder and the external holder, and at least a part of the notch for external holder overlaps the notch for internal holder in the radial direction. And rotating the external holder so as to be eliminated.

In the method of manufacturing a waveguide type optical device module according to claim 13 of the present invention, in the step of rotating the outer holder, the notch for the inner holder and the notch for the outer holder are rotated so that the positions of the notch do not overlap. It is characterized by making it.
A method of manufacturing a waveguide type optical device module according to claim 14 of the present invention includes a substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, An output optical fiber for extracting the light, a housing for incorporating the substrate, and an electrode formed on one surface side of the substrate, and the light is input to the waveguide type optical device module An inner holder containing the input optical fiber or the output optical fiber, and an outer holder containing the inner holder for at least one of the side and the side from which the light is output from the waveguide type optical device module, A method of manufacturing a waveguide type optical device module having a notch for an internal holder in an internal holder, wherein the input optical fiber or the output optical fiber is placed in the internal holder A step of filling the inner holder with an adhesive from the notch for the inner holder, fixing the input optical fiber or the output optical fiber and the inner holder, and an outer periphery of the inner holder. A step of applying an adhesive, and a step of fixing the internal holder and the external holder by disposing the external holder on the outer periphery of the internal holder from the outside of the housing.

  The present invention includes an inner holder and an outer holder that contain an optical fiber, at least the inner holder has a notch, and an adhesive for hermetically sealing the inside of the inner holder and between the inner holder and the outer holder Can be hermetically sealed by a simple process without using a solder material. Furthermore, when not only the inner holder but also the outer holder has a notch, the notch part of the inner holder and the notch part of the outer holder are aligned with each other so that not only the inner holder but also the outer holder Desirably, the adhesive can be filled between the inner holders with good reproducibility, and the outer holder is rotated after filling the adhesive, thereby reducing the overlap between the notches of the inner holder and the outer holder. Compared to the case where an external holder is newly provided by eliminating the overlapping part, the airtightness is maintained without increasing the member cost and mounting man-hours and keeping the outer shape of the fiber mounting part compact. The structure can be improved. According to the present invention, it is possible to provide an excellent optical modulator module having a high yield, excellent manufacturability, and high airtightness, that is, a waveguide type optical device module.

  Hereinafter, embodiments of the present invention will be described. However, since the same numbers as those in the prior art shown in FIGS. 14 to 15 correspond to the same function units, description of the function units having the same numbers is omitted here.

(First embodiment)
An optical modulator module is taken up as a waveguide type optical device module according to the present invention. Then, paying attention to the fiber termination portion, the structure of the first embodiment and the manufacturing method thereof will be described with reference to FIGS. The manufacturing procedure is as follows.

  As described above, when solder material is used for hermetic sealing, it becomes indispensable to metallize optical fibers, which increases costs, and a technology that is difficult to raise locally to high temperatures is required. As a result, there was a problem that the optical fiber could be damaged. Therefore, in the present invention, airtight sealing with an adhesive, which is a simpler process, is performed.

  A schematic top view of an optical modulator module hermetically sealed with an adhesive is shown in FIG. 1 as a first embodiment of a waveguide type optical device module. Here, 7a and 7b are fiber jackets of single-mode optical fibers for inputting or outputting light to the optical modulator module, and 8a and 8b are single-mode optical fibers for input and output, respectively. It is a strand (or an optical fiber strand) of each (referred to as an input optical fiber and an output optical fiber, respectively). Reference numerals 9a and 9b denote an input optical fiber inner holder and an output optical fiber inner holder, both of which are simply referred to as inner holders. 10 is a package housing (or housing), and 11a and 11b are adhesives for fixing the optical fiber wires 8a and 8b or the fiber jackets 7a and 7b. The internal holders 9a and 9b are fixed to the housing 10.

  FIG. 2 is an enlarged view of the portion I on the light output side in FIG. Here, 12 is a window opened in the internal holder 9b, which is one of the features of the present invention. In an actual optical modulator module, an output optical fiber external holder (or simply an external holder) 14 is provided outside the internal holder 9b in FIGS. 1 and 2 as shown in FIGS. Although not shown in the figure, the input optical fiber side actually has the same structure, and there is an input optical fiber external holder (or simply an external holder).

The light modulator module of the first embodiment is described with reference to FIGS. 3 and 4 as a cross-sectional view taken along the line BB ′ in FIG. 1, taking the light output side as an example. Such an optical fiber mounting portion is also called a fiber termination portion.
(1) As shown in FIG. 3, after inserting the single-mode optical fiber 8b and the fiber jacket 7b into the inner holder 9b, the adhesive 11b is removed from the window (notch) 12 provided in the inner holder 9b. Inject and fix these.
(2) An adhesive 13 for hermetic sealing is applied to the entire outside of the inner holder 9b in FIG.
(3) As shown in FIG. 4, the outer holder 14 is inserted into the outer side of the inner holder 9b using the capillary phenomenon. Actually, in the step (1), the external holder 14 can be smoothly inserted when the adhesive 11b is formed in a recessed shape in the window 12.

  Finally, the structure shown in FIG. 4 enables hermetic sealing with an easy-to-handle adhesive without using a solder material.

(Second Embodiment)
Although the first embodiment enables hermetic sealing with an adhesive, there may be a problem in the first embodiment. This will be described in detail below.

  In the first embodiment, as shown in FIG. 3, the external holder 14 is inserted after the adhesive is applied to the entire outside of the internal holder 9b. At this time, the external holder 14 may push the adhesive 13 out.

  If the external holder 14 pushes the adhesive 13 away, the adhesive 13 rises and accumulates at the contact portion between the housing 10 and the external holder 14 in FIG. 4, so that the external holder 14 is placed outside the internal holder 9b. It is necessary to wipe off the excess adhesive 13 with an organic solvent after it is completely inserted. However, if this wiping is not complete, there may be a problem with the beauty of the optical modulator module. Further, since the wiping process takes time, the cost of the optical modulator module also increases.

  Furthermore, the adhesive 13 is not completely filled between the inner holder 9b and the outer holder 14, and a gap 15 may be generated as shown in FIG. When the area of the gap 15 formed in this way is large, as shown in FIG. 5, water molecules 16 in the atmosphere permeate the adhesive 13 from the rear ends of the inner holder 9b and the outer holder 14, and the housing 15 It will enter the inside of the body 10. If moisture enters the inside of the housing 10, the electrical resistance decreases between the center conductor 4a and the ground conductor 4b, which is not preferable from the viewpoint of the characteristics of the LN optical modulator.

In order to solve this, the second embodiment has been developed. The structure and manufacturing method will be described with reference to FIGS.
(1) As shown in FIG. 6, the adhesive 11b is injected from the notch (or the notch for inner holder) 12 of the inner holder 9b, and the optical fiber 8b and the fiber jacket 7b are fixed to the inner holder 9b. (However, the optical fiber 8b and the fiber jacket 7b may not be fixed, and the adhesive 11b may be injected), and the external holder 18 having a notch (or a notch for external holder) 17 is attached. Insert from the outside of the internal holder 9b.
(2) The notch portion 12 of the inner holder 9b and the notch portion 17 of the outer holder 18 are aligned with each other, and an adhesive 19 for hermetic sealing is injected from the notch portion 17. At this time, the adhesive 19 tends to enter the gap between the inner holder 9b and the outer holder 18 due to capillary action. Alternatively, when the outer holder 18 is slightly inserted into and removed from the inner holder 9b or rotated, the adhesive 19 is more likely to enter the gap between the inner holder 9b and the outer holder 18.
(3) Finally, the outer holder 18 is rotated by a maximum of 180 degrees with respect to the inner holder 9b so that the notch 12 of the inner holder 9b and the notch 17 of the outer holder 18 are preferably not completely overlapped. Increase sex.

  In this embodiment, since the adhesive 19 for maintaining airtightness is injected from the cutout portion 17 of the external holder 18, the adhesive 19 is likely to penetrate between the external holder 18 and the internal holder 9b. In an actual experiment, as shown in FIG. 7, the adhesive 19 sufficiently penetrated between the outer holder 18 and the inner holder 9b and oozed out to the fiber jacket 7b. As described above, the yield of the optical modulator module as a fiber termination portion is remarkably improved, and the process is simple, so that the number of manufacturing steps is reduced and the cost can be reduced.

  Further, in the present embodiment, the outer holder 18 is rotated up to 180 degrees so that the notch 12 of the inner holder 9b and the notch 17 of the outer holder 18 do not completely overlap each other. By doing so, the airtightness can be remarkably improved as compared with the case where the notch 12 and the notch 17 of the external holder 18 overlap.

  That is, in the present invention, when the optical modulator module is manufactured, the two notches 12 and 17 are made to coincide with each other, so that even when the adhesive 11b is recessed in the notch 12, it can be filled. 19 easily fills the space between the outer holder 18 and the inner holder 9b (FIGS. 6 to 8 correspond to this case. Further, since the adhesive 11b does not protrude upward from the cutout portion 12, the outer holder 19 18 is easy to insert). Further, the adhesive 19 can be oozed out to the rear end portion of the external holder 18.

  In FIG. 6, after fixing the fiber jacket 7b to the internal holder 9b first, the adhesive 11b is injected into the internal holder 9b from the window 12, and then the external holder 18 is inserted from the outside. The adhesive 19 may be injected from the notch 17 together with the notch 17 of the window 12 and the external holder 18.

  Then, by rotating the external holder 18, the two notches 12 and 17 can be prevented from overlapping, and as a result, high airtightness can be realized with a short man-hour. In other words, it is a structure that can simultaneously achieve high manufacturability, cost reduction, and high airtightness, and can be said to be a manufacturing method. Although the number of parts increases by one, the airtightness can be further enhanced by adhering a small lid covering the outside of the notch 17 or applying a metal adhesive.

  FIG. 9 is a graph showing the degree of overlap between the two notches 12 and 17 and the rate at which water molecules in the outside air permeate into the housing 10. As can be seen from the figure, it is desirable that the two notches 12 and 17 do not completely overlap in the end. However, even if they overlap to some extent, high airtightness can be realized by reducing the overlap. In FIG. 9, the transmittance of water molecules when the overlapping degree is 0% is almost the same as the case where the optical fiber 8b is metalized and then sealed with a solder material, and is in the range of measurement error.

  Here, in FIGS. 7 to 8, if the rear end of the outer holder 18 is protruded from the rear end of the inner holder 9b so that Δ has a positive value, the airtightness and the fixing strength of the output optical fiber 7b can be obtained. From the viewpoint of The value of Δ is preferably a positive value, but it goes without saying that the effect of the present invention can be exhibited even if it is zero or a negative value.

  According to the structure and the manufacturing method of the second embodiment of the present invention, it is possible to reduce the cost as an optical modulator, maintain a high yield, and maintain excellent airtightness.

(Third embodiment)
FIG. 10 shows a cross-sectional view of a third embodiment of the present invention. FIG. 11 shows a schematic diagram viewed from the fiber jacket 7b side in FIG. As can be seen from the drawing, in the present embodiment, by providing the lid 20, it is possible to prevent moisture from entering from the rear end of the external holder 18, so that the airtightness is higher than that of the first embodiment or the second embodiment. Can be further increased.

  In the shape of the lid 20 in FIG. 11, it is necessary to pass the optical fiber 8b and the fiber jacket 7b through the holes in the lid 20. By processing the lid as shown in 21 in FIG. 12, the optical modulator module is assembled. It can be inserted later from above or from the side. Furthermore, the airtightness can be further improved by alternately combining two lids 21 as shown in FIG.

(About each embodiment)
For example, the adhesives 11b, 13, and 19 in the first to third embodiments may be the same type or different types, such as a UV curable adhesive and an airtight seal adhesive. Various adhesives can be applied.

  Moreover, in the above description, it demonstrated that the adhesive agent for airtight was filled in the whole inside of the internal holder 9b. Of course, it is most desirable that the entire interior of the inner holder 9b is filled, but it goes without saying that the effect of the present invention can be exhibited even if it is not partially filled.

  Moreover, although the notch part 12 of the internal holder 9b and the notch part 17 of the external holder 18 are both described as holes in the above description, the shape is not limited thereto. That is, it goes without saying that at least one of the notch portion 12 of the inner holder 9b and the notch portion 17 of the outer holder 18 may be notched to the rear end of each holder.

  Moreover, although the two holders of the internal holder 9b and the external holder 18 have been described as the holder, it goes without saying that there may be more holders than this. Furthermore, since sufficient airtightness can be realized with two holders, when a holder is further provided on the outer side, there is no need to have a notch, or an object such as a rubber cover may be easily attached. . And these things about the kind of adhesive and the shape and number of notches can be said about all the embodiments of the present invention.

  Although the CPW electrode has been described as an example of the traveling wave electrode, it goes without saying that various traveling wave electrodes such as an asymmetric coplanar strip (ACPS) and a symmetric coplanar strip (CPS), or a lumped constant electrode may be used. In addition to the Mach-Zehnder type optical waveguide, it goes without saying that other optical waveguides such as directional couplers and straight lines may be used as the optical waveguide.

  In the above embodiment, the crystal orientation of x-cut, y-cut or z-cut, that is, the x-axis, y-axis or z-axis of the crystal is perpendicular to the substrate surface (cut plane). The surface orientation in each of the embodiments described above may be the main surface orientation, and other surface orientations may be mixed as surface orientations subordinate to these, and not only the LN substrate but also the lithium tantalum. It goes without saying that other substrates such as rates and semiconductors may be used.

  The present invention can be applied not only to an optical modulator module but also to other waveguide type optical device modules that require airtightness. The present invention can also be applied to a waveguide type optical device having only an input optical fiber, such as a photodiode module, and a waveguide type optical device having only an output optical fiber, such as a semiconductor laser module using a tip spherical fiber.

  As described above, the waveguide type optical device module according to the present invention can increase the airtightness without increasing the material cost and mounting man-hours and keeping the outer shape of the fiber mounting portion compact. It is useful as an excellent optical modulator module having high yield, excellent manufacturability, and high airtightness.

Schematic top view of the first embodiment of the present invention Enlarged view of I (near fiber termination) in FIG. The figure explaining the manufacturing process of the 1st Embodiment of this invention with sectional drawing of the BB 'part of FIG. The figure explaining the manufacturing process of the 1st Embodiment of this invention with sectional drawing of the BB 'part of FIG. The figure explaining the problem of the 1st Embodiment of this invention with sectional drawing of the BB 'part of FIG. Sectional drawing explaining the structure and manufacturing process of the 2nd Embodiment of this invention Sectional drawing explaining the structure and manufacturing process of the 2nd Embodiment of this invention Sectional drawing explaining the structure and manufacturing process of the 2nd Embodiment of this invention The figure explaining the principle of the airtight sealing of the 2nd Embodiment of this invention Sectional drawing explaining the structure and manufacturing process of the 3rd Embodiment of this invention Rear end view of the third embodiment of the present invention Lid used in the third embodiment of the present invention Lid used in the third embodiment of the present invention Perspective view of an optical modulator according to the prior art Sectional view along the A-A 'line of the prior art (in the case of an x-cut substrate) Sectional view along the A-A 'line of the prior art (in the case of a z-cut substrate) The figure explaining operation | movement of the optical modulator based on a prior art Schematic cross-sectional structure of an optical modulator module according to the prior art

Explanation of symbols

1: x-cut LN substrate (LN substrate)
1 ': z-cut LN substrate (LN substrate)
2: SiO ₂ buffer layer (buffer layer)
3: Optical waveguide 3a, 3b: Optical waveguide of the interaction part (optical waveguide)
4: traveling wave electrode 4a: center conductor 4b, 4c: ground conductor 5: microwave power supply cable 6: microwave output cable 7a, 7b: fiber jacket 8a, 8b: single-mode optical fiber 9a 9b: Internal holder 10: Package housing (housing)
10a: Case lid (lid)
10b: brazing portion 10c: outer sleeve 10d: intermediate sleeve 11a, 11b: adhesive 12: window opened in the inner holder 13: adhesive 14, 18: outer holder 15: gap 16: water molecule 19: adhesive 20 , 21: Lid 30: Adhesive reinforcing block 31: Adhesive reinforcing capillary 32: Solder material 36: Metallized part 38: Inner sleeve 39: Adhesive

Claims (14)

A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, an output optical fiber for extracting the light, and for incorporating the substrate In a waveguide type optical device module comprising a housing and an electrode formed on one surface side of the substrate,
An internal holder that contains the input optical fiber and the output optical fiber for both the side where the light is input to the waveguide type optical device module and the side where the light is output from the waveguide type optical device module ; An external holder that is attached from the outside and encloses the internal holder,
Only the inner holder comprises a notch for the inner holder,
The input optical fiber, the output optical fiber, and the inner holder are fixed by filling an adhesive into at least a part of the inside of the inner holder through the notch for the inner holder, and internal holder and the result by the Rukoto adhesive to at least a portion of the gap of the outer holder is filled with the external holder mounted externally of said housing and said inner holder is fixed, the input optical fiber and said output 2. A waveguide type optical device module, wherein an airtight seal between an optical fiber and the inner holder and the outer holder is completed . A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, or an output optical fiber for extracting the light, In a waveguide type optical device module comprising a housing for incorporating a substrate and an electrode formed on one surface side of the substrate,
An internal holder that contains the input optical fiber and the output optical fiber on one of the side where the light is input to the waveguide type optical device module or the side where the light is output from the waveguide type optical device module ; An external holder that is attached from the outside and encloses the internal holder,
Only the inner holder comprises a notch for the inner holder,
The input optical fiber or the output optical fiber and the inner holder are fixed by filling an adhesive into the inner holder through the notch for the inner holder, and the inner holder is fixed. internal holder and the result by the Rukoto adhesive to at least a portion of the gap of the outer holder is filled with the external holder mounted externally of said housing and said inner holder is fixed, the input optical fiber or the output 2. A waveguide type optical device module, wherein an airtight seal between an optical fiber and the inner holder and the outer holder is completed . A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, an output optical fiber for extracting the light, and for incorporating the substrate In a waveguide type optical device module comprising a housing and an electrode formed on one surface side of the substrate,
An internal holder that contains the input optical fiber and the output optical fiber for both the side where the light is input to the waveguide type optical device module and the side where the light is output from the waveguide type optical device module ; Each having an external holder that is attached from the outside and encloses the internal holder,
The internal holder has a notch for internal holder, and the external holder has a notch for external holder,
An adhesive is provided on at least a part of the interior of the inner holder via the notch for the inner holder in a state where at least a part of the notch for the outer holder does not overlap the notch for the inner holder in the radial direction. said There together with said inner holder and said input optical fiber and the output optical fiber is fixed by being filled by Rukoto adhesive is filled in at least part of the gap between the inner holder the outer holder The external holder and the internal holder attached from the outside of the housing are fixed, and the hermetic sealing between the input optical fiber and the output optical fiber and the internal holder and the external holder is completed. A waveguide-type optical device module. A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, or an output optical fiber for extracting the light, In a waveguide type optical device module comprising a housing for incorporating a substrate and an electrode formed on one surface side of the substrate,
An inner holder containing the input optical fiber or the output optical fiber, and a housing for either the side where the light is input to the waveguide type optical device module or the side where the light is output from the waveguide type optical device module; An external holder attached from outside the body and enclosing the internal holder;
The internal holder has a notch for internal holder, and the external holder has a notch for external holder,
The outer holder notch is fixed in a state where at least a part of the notch for the outer holder does not overlap the notch for the inner holder in the radial direction, and the notch for the inner holder is inserted into at least a part of the inside of the inner holder. said inner holder and said input optical fiber or the output optical fiber by the adhesive is filled with becomes fixed, adhesive Ru is filled in at least part of the gap of the outer holder and the inner holder Te Thereby, the external holder and the internal holder attached from the outside of the housing are fixed, and the hermetic sealing between the input optical fiber or the output optical fiber and the internal holder and the external holder is completed. A waveguide-type optical device module.   5. The waveguide type optical device module according to claim 3, wherein the notch portion for the inner holder and the notch portion for the outer holder do not overlap each other.   6. The waveguide type optical device module according to claim 1, wherein a rear end of the outer holder projects beyond a rear end of the inner holder.   7. The waveguide type optical device module according to claim 1, further comprising a lid at a rear end of the external holder.   The waveguide type optical device module according to claim 1, wherein the substrate has an electro-optic effect.   The waveguide type optical device module according to claim 1, wherein the substrate is made of lithium niobate.   9. The waveguide type optical device module according to claim 1, wherein the substrate is made of a semiconductor.   The waveguide type optical device module according to claim 1, wherein the electrode includes a center conductor and a ground conductor for modulating the light. A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, an output optical fiber for extracting the light, and for incorporating the substrate A housing and an electrode formed on one side of the substrate;
An inner holder containing the input optical fiber or the output optical fiber, at least one of a side where the light is input to the waveguide type optical device module and a side where the light is output from the waveguide type optical device module; Each includes an external holder that encloses a holder, the internal holder has a notch portion for an internal holder, and the external holder has a notch portion for an external holder.
Inserting the input optical fiber or the output optical fiber into the internal holder;
Filling the internal holder with an adhesive from the notch for the internal holder, and fixing the input optical fiber or the output optical fiber and the internal holder;
Disposing the outer holder on the outer periphery of the inner holder, and setting a relative position of the inner holder notch and the outer holder notch to a predetermined position;
Filling an adhesive into at least a part of a gap between the inner holder and the outer holder from the notch for the outer holder;
Rotating the external holder so that at least a part of the notch for external holder does not overlap the notch for internal holder in the radial direction;
A method for manufacturing a waveguide type optical device module, comprising:   13. The waveguide type optical device module according to claim 12, wherein in the step of rotating the external holder, the waveguide holder is rotated so that the positions of the notch portion for the internal holder and the notch portion for the external holder do not overlap. Manufacturing method. A substrate, an optical waveguide for guiding light formed on the substrate, an input optical fiber for inputting the light, an output optical fiber for extracting the light, and for incorporating the substrate A housing and an electrode formed on one side of the substrate;
An inner holder containing the input optical fiber or the output optical fiber, at least one of a side where the light is input to the waveguide type optical device module and a side where the light is output from the waveguide type optical device module; Each includes an external holder that encloses a holder, and the internal holder is a method for manufacturing a waveguide-type optical device module having a notch for the internal holder,
Inserting the input optical fiber or the output optical fiber into the internal holder;
Filling the internal holder with an adhesive from the notch for the internal holder, and fixing the input optical fiber or the output optical fiber and the internal holder;
Applying an adhesive to the outer periphery of the inner holder;
Arranging the external holder from the outside of the housing on the outer periphery of the internal holder to fix the internal holder and the external holder;
A method for manufacturing a waveguide type optical device module, comprising:

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