JP5077119B2 - Lamp unit - Google Patents

Description

  The present invention relates to a lamp unit, and more particularly to a lamp unit for irradiating a large object such as a large liquid crystal glass substrate.

  Patent Document 1 discloses a light irradiation apparatus 100 as shown in FIG. As shown in the figure, this apparatus includes a lighting fixture 101 having a one-side opening, a lamp support portion 102 extending toward the opening side of the lighting fixture 101, a plurality of excimer lamps 103 supported by the lamp support portion 102, and an illumination. It is located on the opening side of the instrument 101 and is composed of a transport mechanism such as a roller 104. In this apparatus, since the lower part of the luminaire 101 is opened, the vacuum ultraviolet rays from the excimer lamp 103 are absorbed by oxygen and the illuminance decreases. Therefore, the excimer lamp 103 and the workpiece 105 are arranged close to each other in a range of 3 to 5 mm, for example.

For example, when the workpiece 105 is a glass substrate for liquid crystal, the irradiation tool 101 is also enlarged with the recent increase in size of the glass substrate. Furthermore, in order to process the large workpiece 105, it is necessary to lengthen the excimer lamps 103 in the longitudinal direction or to arrange a plurality of them. As the excimer lamp 103 is elongated or arranged in the longitudinal direction, the irradiation tool 101 that supports the excimer lamp 103 is also increased in size. In the case of the elongated excimer lamp 103, the excimer lamp 103 may be bent by its own weight, so that the lamp support portion 102 that supports the central portion thereof is necessary. When a plurality of excimer lamps 103 are arranged, a holding body extending from the irradiation tool 101 can be provided at one end facing the irradiation tool 101 among both ends in the longitudinal direction of the excimer lamp 103. Since the other end side of 103 is located at the central portion of the irradiating device 101, it can only be supported by a lamp support portion 102 extending from the irradiating device 101.
JP 2005-222905 A

In FIG. 20, a high frequency high voltage is applied to the excimer lamp 103 when the lamp is lit, and at this time, vacuum ultraviolet rays are irradiated from the discharge vessel of the excimer lamp 103. The discharge vessel at this time generates heat, and the radiant heat heats the lighting fixture 101. Further, the excimer lamp 103 emits light having a long wavelength in addition to the vacuum ultraviolet rays, and the lighting fixture 101 is also heated by this light. Although the lighting fixture 101 expands by this heating, since the lighting fixture 101 is also enlarged with the enlargement of the to-be-processed object 105, the expansion amount of the lighting fixture 101 also becomes large. Therefore, as shown in FIG. 21, since the peripheral portion of the lighting fixture 101 is fixed, the expansion amount is pulled by the load of the lamp support portion 102 located at the central portion of the lighting fixture 101, and the center of the lighting fixture 101 is Will be bent toward the workpiece 105 side. The central end portion of the excimer lamp 103 supported by the lamp support portion 102 moves toward the object to be processed 105 as the lighting fixture 101 expands, and the excimer lamp 103 and the object to be processed 105 are separated from each other. Since they are arranged close to each other, the end of the excimer lamp 10 on the center side and the workpiece 105 come into contact with each other, and the workpiece 105 and the excimer lamp 103 are damaged.

  In view of the above-described problems, an object of the present invention is to provide a lamp unit that prevents drooping due to thermal expansion of a suspension body that is provided in a housing and supports an excimer lamp.

The present invention employs the following means in order to solve the above problems.
The first means includes a housing having an opening on one surface, a suspension supported by the housing, a lamp support portion supported by the suspension, an excimer lamp supported by the lamp support portion, and the housing. And a support unit provided on the body, wherein the suspension is supported on the support unit so as to be able to expand and contract by expansion in a horizontal direction.
The second means is the first means, wherein the suspension body is a plate body or a rod body extending in the longitudinal direction of the excimer lamp, and the suspension body or the support portion is provided along the longitudinal direction of the suspension body. A lamp unit characterized in that a sliding contact portion is provided.
In the first means or the second means, a third means is provided with a restricting portion for restricting movement of the suspension body in the horizontal direction on one end side of the suspension body, so that the suspension body is expanded in the horizontal direction. The lamp unit is characterized in that a gap allowing the above is provided between the other end side of the suspension body and the housing.
The fourth means is a restricting portion that prevents the suspension body or the support portion from changing in the vertical direction from the support portion of the suspension body in any one of the first to third means. The lamp unit is characterized in that is provided.

  According to the present invention, since the suspension body is arranged on the support portion so as to allow expansion in the horizontal direction, it is possible to prevent the suspension body from hanging down due to thermal expansion, and the conventional excimer lamp due to the suspension body hanging down Can be prevented from being damaged by contact with the workpiece.

A first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a plan view showing a configuration of a lamp unit according to the invention of the present embodiment, FIG. 2 is a side view showing the configuration of the lamp unit viewed from the AA section of FIG. 1, and FIG. It is an enlarged view of the B section shown in FIG.
As shown in FIG. 1 and FIG. 2, the housing 1 is open on one side, and the housing 1 is provided with a support portion 4 along the side surface in the housing 1. A suspension body 2 made of a plate body is supported. The suspension 2 is provided with a lamp support 6 that supports a plurality of excimer lamps 3. In addition, although the lamp support part 6 may provide the number of the excimer lamps 3 from the suspension body 2, as shown in FIG. 2, it is set as the simple structure which put together the two lamp support parts 6 on the way. You can also.

  As shown in FIGS. 2 and 3, one or two or more rod-like pins 41 are provided on the support portion 4, and an opening 21 is provided at a position corresponding to the pin 41 in the suspension body 2. ing. The pin 41 is fitted into the opening 21 with a predetermined gap 7 around the pin 41. Further, a gap 8 is also provided between the surfaces of both ends in the longitudinal direction of the suspension body 2 and the housing 1. When the suspension body 2 is heated and expanded in the horizontal direction, the amount of expansion is allowed in the gaps 7 and 8.

A second embodiment of the present invention will be described with reference to FIGS.
FIG. 4 is a plan view showing the configuration of the lamp unit according to the invention of the present embodiment, FIG. 5 is a side view showing the configuration of the lamp unit as seen from the CC section of FIG. 4, and FIG. FIG. 7 is an enlarged view of the E portion shown in FIG. 5.
As shown in FIGS. 4 and 5, the housing 1 is open on one side, and the housing 1 is provided with a support portion 4 along the side surface in the housing 1. A suspension body 2 made of a plate body is supported. The suspension 2 is provided with a lamp support 6 that supports a plurality of excimer lamps 3.

  As shown in FIGS. 6 and 7, rod-like pins 41 are provided in the vicinity of both ends in the longitudinal direction of the suspension body 2 on the support portion 4, and the suspension body 2 is provided at locations corresponding to the pins 41. An elongated opening 21 </ b> A is provided in the expansion direction of the suspension body 2. The suspension 2 is fitted into the opening 21A with a predetermined gap 7 around the pin 41, and a gap 8 is also provided between the surfaces of both ends in the longitudinal direction of the suspension 2 and the housing 1. Yes. Further, a sliding contact portion 22 is formed on the surface of the opening portion 21A in contact with the pin 41. When the suspension body 2 is heated and expanded in the horizontal direction, the sliding contact portion 22 expands by sliding contact with the pin 41, The expansion amount is allowed in the gaps 7 and 8. By providing the slidable contact portion 22 slidably in contact with the pin 41 on the suspension body 2, the suspension body 2 can be prevented from rotating.

A third embodiment of the present invention will be described with reference to FIGS.
FIG. 8 is a front view showing the configuration of the lamp unit according to the invention of the present embodiment, and FIG. 9 is a side view showing the configuration of the lamp unit as viewed from the FF section of FIG.
As shown in these drawings, the housing 1 is open on one side, and the housing 1 is provided with a support portion 4A along the longitudinal side surface in the housing 1, and the support portion 4A is The bottom surface in the longitudinal direction of the suspension 2A made of a rod is supported. The suspension body 2A is provided with a lamp support portion 6 that supports a plurality of excimer lamps 3, and a gap 8 is provided between one end surface in the longitudinal direction of the suspension body 2A and the housing 1. When the suspension 2 </ b> A made of a rod is heated and expanded in the horizontal direction, the suspension 2 </ b> A expands along the support portion 4 </ b> A, and the expansion amount is allowed in the gap 8.

A fourth embodiment of the present invention will be described with reference to FIGS.
10 is a plan view showing the configuration of the lamp unit according to the invention of the present embodiment, FIG. 11 is a side view showing the configuration of the lamp unit as seen from the GG section of FIG. 10, and FIG. FIG. 13 is an enlarged view of the portion I shown in FIG. 11.
As shown in FIG. 10 and FIG. 11, the housing 1 is opened on one side, and the support 1 is provided on the barrel 1 along the side surface in the housing 1. A suspension body 2 made of a plate body is supported. The suspension 2 is provided with a lamp support 6 that supports a plurality of excimer lamps 3. On one end side of the suspension body 2, a restriction portion 9 that restricts the movement of the suspension body 2 in the horizontal direction is provided.

  As shown in FIGS. 12 and 13, rod-like pins 41 and 42 are provided near both ends in the longitudinal direction of the suspension body 2 on the support portion 4. The suspension body 2 is provided with a long opening 21 </ b> A in the expansion direction of the suspension body 2 at a position corresponding to one pin 41, and the suspension body 2 is opened around the pin 41 with a predetermined gap 7. It is fitted in the part 21A. Further, a gap 8 is provided between the surface of one end in the longitudinal direction of the suspension body 2 and the housing 1. Furthermore, the sliding contact part 22 is formed in the surface which contact | connects the pin 41 of 21 A of opening parts. In addition, the suspension body 2 is provided with a restriction portion 9 that restricts the movement of the suspension body 2 including the pin 42 and the through hole 23 that fits the pin 42 at a position corresponding to the other pin 42. When the suspension body 2 is heated and expanded in the horizontal direction, the movement of one of the suspension bodies 2 is restricted by the restricting portion 9, but the other sliding contact portion 22 of the suspension body 2 slidably contacts the pin 41 and expanded. The amount of expansion is allowed in these gaps 7 and 8.

A fifth embodiment of the present invention will be described with reference to FIGS.
14 is a plan view showing the configuration of the lamp unit according to the invention of the present embodiment, FIG. 15 is a side view showing the configuration of the lamp unit as seen from JJ in FIG. 14, and FIG. 16 is shown in FIG. FIG.
As shown in FIGS. 14 and 15, the housing 1 is open on one side, and the housing 1 is provided with a support portion 4B along the side surface in the housing 1. An opening groove 43 is formed along the longitudinal direction of the suspension body 2 made of a plate, and the longitudinal direction of the suspension body 2 is slidably held in the opening groove 43. The suspension 2 is provided with a lamp support 6 that supports a plurality of excimer lamps 3.

  As shown in FIGS. 15 and 16, the opening groove 43 includes a restriction portion 44 that restricts vertical fluctuations of the suspension body 2 and a sliding contact portion 45 that is in sliding contact with the suspension body 2, and the suspension body 2 is heated. When expanded in the horizontal direction, the suspension body 2 expands along the opening groove 43 of the support portion 4B, and the amount of expansion is allowed in the gaps 8, and the rotation of the suspension body 2 is restricted, and the vertical direction of the suspension body Is also regulated by the regulation unit 44.

  In the fifth embodiment, the support portion 4B is provided with the opening groove 43 including the restriction portion 44 that restricts the vertical fluctuation of the suspension body 2 and the sliding contact portion 45 that is in sliding contact with the suspension body 2. Instead of this, an opening groove for fitting the support portion may be provided in the suspension body, and the vertical movement of the suspension body may be restricted by the restriction portion provided in the opening groove.

  In each of the above-described embodiments, the case where the excimer lamps are arranged in a staggered manner and a plurality of excimer lamps are arranged has been described. However, the arrangement of the excimer lamps is not limited to such an arrangement. A plurality of these connected in series may be arranged in a plurality of rows. Furthermore, the present invention is not limited to a staggered arrangement or a plurality of series arrangements of a plurality of series arrangements, and one long tubular excimer lamp supported by a suspension body at one or more places other than both ends may be arranged in a plurality of rows. .

A sixth embodiment of the present invention will be described with reference to FIGS.
17 is a front view showing the configuration of the lamp unit according to the invention of the present embodiment, FIG. 18 is a plan view showing the configuration of the lamp unit, and FIG. 19 is a lamp viewed from the LL section of FIG. It is a side view which shows the structure of a unit.
As shown in FIGS. 17 and 19, the housing 1 is open on one side, and the housing 1 is provided with a support portion 4 along the side surface in the housing 1. A suspension body 2 made of a plate body is supported. The suspension body 2 is provided with a lamp support 6 that supports one long tubular excimer lamp 3.

As shown in these drawings, one or two or more rod-like pins 41 are provided on the support portion 4, and an opening 21 is provided at a position corresponding to the pin 41 in the suspension body 2. . The pin 41 is fitted into the opening 21 with a predetermined gap 7 around the pin 41. Further, a gap 8 is also provided between the surfaces of both ends in the longitudinal direction of the suspension body 2 and the housing 1. When the suspension body 2 is heated and expanded in the horizontal direction, the amount of expansion is allowed in the gaps 7 and 8.

It is a top view which shows the structure of the lamp unit which concerns on invention of 1st Embodiment. It is a side view which shows the structure of the lamp unit seen from the AA cut surface of FIG. It is an enlarged view of the B section shown in FIG. It is a top view which shows the structure of the lamp unit which concerns on invention of 2nd Embodiment. It is a side view which shows the structure of the lamp unit seen from the CC cut surface of FIG. It is an enlarged view of the D section shown in FIG. It is an enlarged view of the E section shown in FIG. It is a front view which shows the structure of the lamp unit which concerns on invention of 3rd Embodiment. It is a side view which shows the structure of the lamp unit seen from the FF cut surface of FIG. It is a top view which shows the structure of the lamp unit which concerns on invention of 4th Embodiment. It is a side view which shows the structure of the lamp unit seen from the GG cut surface of FIG. It is an enlarged view of the H section shown in FIG. It is an enlarged view of the I section shown in FIG. It is a top view which shows the structure of the lamp unit which concerns on invention of 5th Embodiment. It is a side view which shows the structure of the lamp unit seen from the JJ cut surface of FIG. It is an enlarged view of the K section shown in FIG. It is a front view which shows the structure of the lamp unit which concerns on invention of 6th Embodiment. It is a top view which shows the structure of the lamp unit which concerns on invention of the embodiment. It is a side view which shows the structure of the lamp unit seen from the LL cut surface of FIG. It is a figure which shows the structure of the optical heating apparatus which concerns on a prior art. It is a figure which shows the state at the time of the expansion | swelling of the suspension body in the optical heating apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Case 2 Suspension body 2A Suspension body 21 Opening part 21A Opening part 22 Sliding contact part 23 Through-hole 3 Excimer lamp 4 Support part 4A Support part 4B Support part 41 Pin 42 Pin 43 Opening groove 44 Restriction part 45 Sliding part 5 Covered Processed object 6 Lamp support 7 Clearance 8 Clearance 9 Restriction

Claims (4)

  A housing having an opening on one surface; a suspension supported by the housing; a lamp support supported by the suspension; an excimer lamp supported by the lamp support; and a support provided in the housing A lamp unit, wherein the suspension body is supported on the support portion so as to allow expansion and contraction due to expansion in a horizontal direction.   The suspension body is a plate body or a rod body extending in the longitudinal direction of the excimer lamp, and the suspension body or the support portion is provided with a sliding contact portion along the longitudinal direction of the suspension body. The lamp unit according to claim 1.   A limiting portion that restricts the horizontal movement of the suspension body is provided on one end side of the suspension body, and a gap that allows expansion of the suspension body in the horizontal direction is provided between the other end side of the suspension body and the housing. The lamp unit according to claim 1, wherein the lamp unit is provided between the lamp units.   The regulation part which prevents the fluctuation | variation of an up-down direction from the said support part of the said suspension body was provided in the said suspension body or the said support part, The Claim 1 characterized by the above-mentioned. Lamp unit.