JP5073150B2 - Optical deflector and optical scanning device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical deflector and an optical scanning device including the same.
[0002]
[Prior art]
Conventionally, optical deflectors have been used in various devices in various fields, and most of them deflect by mechanical movement. For example, in a magneto-optical disk tracking mechanism, light is deflected by moving a lens to the left or right or changing the direction of a reflecting mirror. This mechanical deflector has a problem that its mechanical mechanism is complicated, assembly adjustment is difficult, vibration is weak, and power consumption is relatively large. Therefore, an optical deflector using liquid crystal having no mechanical moving part is known as a device for solving these problems, and a liquid crystal deflector including a very large number of transparent electrodes has been reported (for example, Non-patent document 1).
[0003]
[Non-Patent Document 1]
STKowel, DSClerverly, PGKornreich, "Focusing by Electrical Modulation in Reflective Liquid Crystal Cells", Applied Optics (1984), Vol. 23, 278 (STKowel, DSClerverly, and PGKornreich "Focusing by electrical modulation of reflectionina Liquid crystal cell" , Applied Opt., 23, 278 (1984)
[0004]
[Problems to be solved by the invention]
However, since the liquid crystal deflector described in Non-Patent Document 1 described above performs deflection by forming a refractive index distribution in the liquid crystal by controlling the voltage applied to each electrode, the electric field in the liquid crystal The distribution does not change uniformly and is stepped. For this reason, in the liquid crystal, the refractive index distribution is also stepped, and there is a problem that the wavefront of the deflected light (hereinafter referred to as deflected light) is disturbed.
[0005]
Accordingly, various image forming apparatuses having an electrophotographic process for forming an image by optically scanning a surface to be scanned which is an image carrier such as a photosensitive member or an electrostatic recording member, such as a laser beam printer or a color laser beam printer, When this liquid crystal deflector is used in combination with an apparatus such as a multi-color laser printer or a laser facsimile, there is a risk of image quality defects such as distortion in the image.
[0006]
An object of the present invention is to provide an optical deflector and an optical scanning device that do not cause disturbance of the wave front of the deflected light, have high light utilization efficiency, and have no mechanical movable part.
[0007]
[Means for Solving the Problems]
The present invention provides a pair of transparent substrates, a transparent electrode formed on a substrate surface where the pair of transparent substrates face each other, and a predetermined angle with respect to the substrate surface of the transparent substrate between the pair of transparent substrates. And at least one of the transparent electrodes facing each other is made of a high-resistance film, and the transparent electrode made of the high-resistance film has a sheet resistance value higher than that of the high-resistance film. has at least two places the feeding electrode is made of material having low, the in the order of arrangement of the feeding electrode in the transparent electrode, Rutotomoni a power supply capable of applying an AC voltage of the AC voltage or low value of the high value, the high resistance film Provides an optical deflector having a sheet resistance value gradient in the direction of the gradient voltage generated in the transparent electrode .
[0010]
Moreover, the high resistance film, provides the above light deflector ing tin oxide thin film.
[0011]
Further, at least one light source, an optical scanning apparatus having a scanning means, and between said light scanning means and said light source, a deflecting means for deflecting the light emitted from the light source, according to the providing an optical scanning device which have a light deflector.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[0013]
[First Embodiment]
FIG. 1 is a cross-sectional view showing an optical deflector 1 according to a first embodiment of the present invention. This optical deflector 1A is a liquid crystal deflector that in principle uses a liquid crystal element (function as). The transparent electrodes 12A and 12B are arranged on the transparent substrates 11A and 11B such as glass and plastic so as to face each other.
[0014]
The transparent substrates 11A and 11B are formed of an appropriate transparent material such as glass or plastic, but a desired cell gap (transparent substrate) can be formed by bonding with the sealing material 10 so that the transparent electrodes 12A and 12B face each other. 11A and 11B). In addition, alignment films 13A and 13B are provided on the opposing surfaces of the transparent electrodes 12A and 12B, and an alignment process is performed by a rubbing method or the like.
[0015]
The sealing material 10 can be an organic material such as epoxy or acrylic adhesive, an inorganic material such as glass adhesive, or a metal material such as sand. In order to keep the cell gap uniform, the sealing material 10 may be mixed with spacers such as glass beads, resin beads, and fibers. Further, a spacer may be arranged in the cell.
[0016]
For the transparent electrodes 12A and 12B, a metal oxide material such as an ITO (Indium Tin Oxide) film can be used. However, in the configuration shown in FIG. 1, the transparent electrode 12A is a low resistance film, and the transparent electrode 12B It is a high resistance film. Near both ends of the transparent electrode 12B, which is a high resistance film, first and second power supply electrodes 15A and 15B are provided to apply a voltage to the high resistance film. These first and second power supply electrodes are provided. AC power supplies 16A and 16B are connected to the electrodes 15A and 15B, respectively. On the other hand, the transparent electrode 12A, which is a low resistance film, is grounded.
[0017]
The first and second power supply electrodes 15A and 15B may be transparent or opaque, and may be a metal oxide such as ITO, or a metal such as Cr, Ni, Au, or Ag. In particular, a metal is preferable because it has a small sheet resistance and can be easily thinned, so that the liquid crystal element can be easily downsized.
[0018]
The transparent electrode 12B, which is a high resistance film, must be transparent and have a higher sheet resistance than the first and second feeding electrodes 15A, 15B and the transparent electrode 12A, which is a low resistance film. Zinc oxide film doped with one or more elements such as silicon, yttrium and indium, tin oxide film doped with one or more elements such as silicon, antimony, indium and gallium, and undoped zinc oxide film A film, a tin oxide film, an ITO film, or the like is preferable. In addition, composite oxides such as silicon oxide and aluminum oxide are preferable. In particular, a tin oxide thin film has a high stability of sheet resistance against heat and water, and is extremely preferable in terms of production, weather resistance and reliability.
[0019]
Liquid crystal 14 is sealed in the aforementioned cell, and the liquid crystal molecules 14A form a predetermined angle (pretilt angle: for example, “θ” in FIG. 1) with respect to the surface of the alignment films 13A and 13B. Are arranged as follows. As the liquid crystal 14, for example, nematic liquid crystal can be used. Here, a liquid crystal having a positive Δε (where Δε is dielectric anisotropy) will be described. The pretilt angle determines the rising direction of liquid crystal molecules when an electric field is applied to the liquid crystal, and prevents alignment failure during driving. 1 degree or more is particularly preferable. In the present embodiment, the alignment of the liquid crystal 14 is a homogeneous alignment, but it is also possible to take a hybrid alignment, a homeotropic alignment, a twist alignment, or the like.
[0020]
For the AC power supplies 16A and 16B, a power supply having a small DC component is used to improve the reliability of the liquid crystal panel. In particular, the DC component is preferably 1% or less of the AC component in terms of reliability. The frequency of the power source is about 50 to 5000 Hz, and a rectangular AC wave or the like can be used.
[0021]
Next, the operation of the liquid crystal element portion of the optical deflector 1 of the present embodiment will be described with reference to FIG. 2 showing the correlation of the retardation value with the applied voltage.
In the liquid crystal element provided in the optical deflector 1, the retardation value has a characteristic that it gradually decreases as the applied voltage increases. However, the retardation value is a linear region with respect to the applied voltage (hereinafter referred to as a linear region). ) And the voltage in this linear region is used when driving the liquid crystal. Note that the higher and lower values of the voltage indicating the linear region are V _H and V _L , respectively.
[0022]
In the liquid crystal of FIG. 1, if the voltage of the AC power supply 16A is V _H and the voltage of the AC power supply 16B is _VL , the transparent electrode 12B is a high-resistance film. The potential of the transparent electrode 12B of the high resistance film continuously changes toward the fixed portion of the power supply electrode 15B.
[0023]
On the other hand, since the transparent electrode 12A, which is a low resistance film, is grounded, an electric field distribution having a linear gradient is formed between the transparent electrode 12B and the high resistance film. In the liquid crystal 14 existing in the electric field, since the liquid crystal is driven in the linear region described above, similarly, a refractive index distribution changing linearly (linearly) is formed.
Here, when linearly polarized light is incident in a direction perpendicular to the transparent substrate 11B and parallel to the plane inclined by the electric field of the liquid crystal molecules whose polarization direction is aligned, the incident light is directed in a direction with a large refractive index. It is bent and travels and is emitted from the transparent substrate 11A.
Therefore, incident light can be emitted after being deflected in a predetermined direction.
[0024]
In the present embodiment shown in FIG. 1, only one transparent electrode 12B is a high-resistance film, but as shown in FIG. 3, both transparent electrodes 12A and 12B facing the optical deflector 1B are high-resistance films. The power supply electrodes 15A to 15D may be provided respectively. In this case, the applied voltage can be finely controlled, and the deflection angle can be finely controlled. Furthermore, it is possible to deflect light in a two-dimensional manner by crossing the direction of the gradient voltage that can be applied to each transparent electrode. In addition, the deflection angle can be increased by stacking liquid crystal elements in multiple stages. Here, reference numerals 17A and 17B denote AC power supplies. Note that among the other reference numerals in FIG. 3, the same reference numerals as those in FIG. 1 indicate the same elements as in FIG.
[0025]
[Second Embodiment]
Next, in the optical deflector 1C shown in FIG. 4, unlike the optical deflector 1A of the first embodiment shown in FIG. 1, the first and second feeding electrodes 15A and 15B are formed on the transparent substrate 11B. In addition, a third power supply electrode 15E and an AC power supply 18 connected to the third power supply electrode 15E are provided.
When the liquid crystal element is configured in this way and, for example, voltages V _H , V _C , and V _L are applied to the first power supply electrode 15A, the third power supply electrode 15E, and the second power supply electrode 15B, respectively, About the retardation value with respect to an applied voltage, the correlation as shown in FIG. 5 is obtained.
[0026]
That is, since the transparent electrode 12B is a high-resistance film, the potential of the transparent electrode 12B of the high-resistance film continues from the fixed part of the first power supply electrode 15A toward the fixed part of the third power supply electrode 15E. The potential of the transparent electrode 12B of the high resistance film continuously changes from the fixed part of the third power supply electrode 15E toward the fixed part of the second power supply electrode 15B.
[0027]
Here, the transparent electrode 12A, which is a low-resistance film, is grounded, and in particular, since the feeding electrode is divided from the first feeding electrode 15A to the third feeding electrode 15E, the first feeding electrode 15A and the third feeding electrode 15A There are different inclinations between the feeding electrodes 15E and between the third feeding electrode 15E and the second feeding electrode 15B, that is, between each feeding electrode and the transparent electrode 12B, which is a high-resistance film. A linear region exhibiting a linear gradient electric field distribution can be formed. As described above, in the liquid crystal 14 existing in each gradient electric field, since the liquid crystal is driven in the linear region, similarly, a linearly changing refractive index distribution is formed.
[0028]
In addition, in the liquid crystal 14 between the first power supply electrode 15A and the second power supply electrode 15B, it is feasible to greatly change the refractive index distribution linearly. As a result, as shown in FIG. 5, the retardation with respect to the applied voltage in the liquid crystal element can be substantially larger than that in the first embodiment.
Note that among the other reference numerals in FIG. 4, the same reference numerals as those in FIG. 1 indicate the same elements as in FIG. 1.
[0029]
In this manner, by increasing the number of power supply electrodes to be divided, linearity can be maintained and a refractive index distribution with a large change can be secured, and the wavefront of light emitted from the liquid crystal element can be bent. The light after deflection can be emitted as a plane wave, which is preferable. In addition, even if the thickness of the liquid crystal portion is not increased, in other words, even if the liquid crystal portion is thin, a liquid crystal element having a refractive index distribution with a large change rate can be realized, which is preferable from the viewpoint of response speed.
[0030]
[Third Embodiment]
It will now be described with reference to FIGS. 1 and 2 a third embodiment of the present invention.
In the present embodiment, as the transparent electrode 12B of the optical deflector 1 A in FIG. 1, with respect to the first power supply electrode 15A toward the second power supply electrode 15B, the high-resistance film sheet resistance with a gradient Used.
[0031]
With such a configuration, when a voltage is applied to the first and second power supply electrodes 15A and 15B, the resistance increases from the fixed part of the first power supply electrode 15A toward the fixed part of the second power supply electrode 15B. The potential of the transparent electrode 12B of the film changes continuously. Here, by grounding the transparent electrode 12A, which is a low resistance film, a gradient electric field distribution corresponding to the gradient of the sheet resistance value of the high resistance film is formed between the transparent electrode 12B of the high resistance film.
[0032]
Therefore, in the transparent electrode 12B, the gradient of the sheet resistance value of the high resistance film is adjusted. That is, this gradient electric field distribution is matched with the characteristics in the curve (nonlinear region) portion of the retardation value with respect to the applied voltage of the liquid crystal element shown in FIG.
That is, even in the nonlinear region of the retardation curve in FIG. 2, the linearity (between the first and second feeding electrodes 15A and 15B is adjusted by adjusting the gradient rate of the electric field distribution so as to cancel the curvature change there. A refractive index distribution that changes linearly can be formed.
[0033]
As a result, the linear region in the retardation graph with respect to the applied voltage of the liquid crystal element shown in FIG. 2 can be substantially increased, so that the wavefront of the light emitted from the liquid crystal element can be bent over a wide area. It is preferable because light can be emitted. Also in this embodiment mode, the thickness of the liquid crystal portion can be reduced, which is preferable in terms of response speed.
[0034]
[Fourth Embodiment]
Next, an optical scanning device according to a fourth embodiment of the present invention will be described with reference to FIG.
The optical scanning device shown in FIG. 6 is applied to a printer, and includes a light source 2, a voltage control device 3, a polygon mirror 4, an imaging lens 5 such as an fθ lens, and a photosensitive drum that forms an electrostatic latent image. 6 is provided with the optical deflector 1 of the present invention (any one of the first to third embodiments).
Note that parallel light forming means such as a collimating lens (not shown) is disposed on the optical path between the light source 2 and the optical deflector 1 in order to collimate the emitted light.
[0035]
The optical deflector 1 is arranged so that the deflection direction of the light incident thereon coincides with the Y direction in the figure. The optical deflector 1 is connected to a voltage control device 3 that applies an AC voltage.
[0036]
Therefore, according to the optical scanning device of the present embodiment, the light emitted from the light source 2 and passing through the optical deflector 1 is reflected by the rotating polygon mirror 4 and collected on the photosensitive drum 6 by the imaging lens 5. Lighted. At this time, the light condensed in the Z direction by the imaging lens 5 is swept on the photosensitive drum 6 by the rotation of the polygon mirror 4.
[0037]
Further, when the optical scanning device of the present embodiment is assembled and adjusted, or when the optical axis is shifted over time, the voltage control device 3 adjusts and controls the voltage value applied to the optical deflector 1. By deflecting the light projected on the photosensitive drum 6 in the Y direction, the light can be accurately condensed at a predetermined light projecting position on the photosensitive drum 6.
[0038]
【Example】
Next, an embodiment of the optical deflector 1 of the present invention and an optical scanning device including the same will be described with reference to FIG.
For example, in the optical deflector 1A according to the first embodiment, first, a non-alkali glass with a thickness of 0.6 mm is used as the transparent substrate 11A, and a required sheet resistance of 300Ω / □ is formed on the surface by sputtering. An ITO film is formed to form a low-resistance transparent electrode 12A. On the surface of the transparent electrode 12A, a polyimide film is formed as the alignment film 13A with a thickness of 50 nm by flexographic printing.
[0039]
On the other hand, as a transparent substrate 11B which is a high resistance film, a Cr film having a sheet resistance of 1Ω / □ is first formed on a non-alkali glass surface having a thickness of 0.6 mm by a sputtering method, and then unnecessary by an etching technique. The first and second power supply electrodes 15A and 15B are formed by removing the portion. Thereafter, a tin oxide thin film having a sheet resistance of 100 kΩ / □ is deposited by sputtering, thereby forming a transparent electrode 12B having a high resistance film.
[0040]
Thereafter, on one surface of the transparent electrode 12B (opposing surface facing the transparent electrode 12A), a polyimide film is formed as the alignment film 13B to a thickness of 50 nm by a flexographic printing method. The polyimide film is subjected to an orientation treatment by a rubbing method, and then a sealing material 10 made of an epoxy resin is printed on the transparent substrates 11A and 11B, and a cell is produced by thermocompression bonding. A glass fiber spacer (not shown) was mixed in the sealing material 10 to make the cell gap uniform and 10 μm. The feeding electrodes 15A and 15B are formed on the surface opposite to the facing surface of the transparent electrode 12B, and the feeding electrodes 15A and 15B are connected to the AC power sources 16A and 16B with appropriate wires.
[0041]
Next, after injecting the liquid crystal 14 having a refractive index anisotropy Δn (= 0.18) into the cell by vacuum injection, sealing with a sealing material (not shown), the optical deflector 1A becomes Complete.
[0042]
When the retardation value characteristic with respect to the applied voltage was measured for the liquid crystal element portion of the optical deflector 1A according to the first embodiment formed as described above, the characteristic shown in FIG. 2 was obtained. That is, the region where the linearity of the retardation is obtained is a region where the applied voltage is 1.2 V _rms to 2.0 V _rms , and the maximum obtained retardation value is 680 nm.
[0043]
A laser beam having a wavelength of 650 nm was passed through the liquid crystal element, and the deflection angle when a voltage was applied was measured. The transparent electrode 12A was grounded, and 1.2V _rms and a rectangular alternating current with a frequency of 1000 Hz were applied to the first feeding electrode 15A, and a rectangular alternating current of 2.0V _rms and a frequency of 1000 Hz was applied to the second feeding electrode 15B. At this time, the phase difference between the rectangular alternating currents applied to the first and second feeding electrodes 15A and 15B was set to zero.
[0044]
As a result of passing a laser beam having a wavelength of 650 nm through the optical deflector 1A under such conditions, it was confirmed that the angle was deflected by about 1 minute. On the other hand, when the voltages applied to the first and second power supply electrodes 15A and 15B were reversed, it was confirmed that the angle could be changed (deflected) for about 1 minute in the reverse direction. Further, the wavefront of the light emitted from the liquid crystal element when deflecting was measured, and it was about 0.03 mλ _rms , and it was confirmed that there was no problem that the wavefront disturbance was small.
[0045]
Further, when the optical deflector 1A (liquid crystal element) thus manufactured is mounted on the optical scanning device portion of the laser beam printer shown in FIG. 6, the laser that has passed through the liquid crystal element by the voltage applied to the AC power source 16 is used. It was confirmed that the deflection angle of light can be linearly adjusted within a predetermined voltage value range (V _{L to} V _H ).
[0046]
【Effect of the invention】
As described above, according to the optical deflector of the present invention, when the incident light is deflected and emitted, the refractive index distribution changes linearly, so that the wave front of the deflected light is not disturbed. Also, it is possible to provide a refractive index distribution type optical deflector having high light utilization efficiency and no mechanical moving parts.
[Brief description of the drawings]
FIG. 1 is a side view showing an optical deflector (liquid crystal element) according to a first embodiment of the present invention.
2 is a graph showing an example of applied voltage-retardation characteristics of the optical deflector (liquid crystal element) shown in FIG.
FIG. 3 is a side view showing a modification of the optical deflector (liquid crystal element) according to the first embodiment of the present invention.
FIG. 4 is a side view showing an optical deflector (liquid crystal element) according to a second embodiment of the present invention.
5 is a graph showing an example of applied voltage-retardation characteristics of the optical deflector (liquid crystal element) shown in FIG.
FIG. 6 is a perspective view showing an example of a schematic configuration of an optical scanning device according to the present invention.
[Explanation of symbols]
1, 1A-1C: Optical deflector (liquid crystal element)
10: Sealing material 11A, 11B: Transparent substrate 12A, 12B: Transparent electrode 13A, 13B: Alignment film 14: Liquid crystal 14A: Liquid crystal molecules 15A, 15B, 15C, 15D, 15E: Power feeding electrodes 16A, 16B, 17A, 17B, 18 : AC power supply 2: Light source 3: Voltage control device 4: Polygon mirror 5: Imaging lens 6: Photosensitive drum

Claims (3)

A pair of transparent substrates;
A transparent electrode formed on the substrate surface where the pair of transparent substrates face each other;
A liquid crystal in which molecular directions are arranged at a predetermined angle with respect to the substrate surface of the transparent substrate between the pair of transparent substrates;
At least one of the transparent electrodes facing each other is made of a high resistance film,
The transparent electrode made of the high resistance film has at least two feeding electrodes made of a material having a sheet resistance value lower than that of the high resistance film,
According to the order in which the power supply electrodes are arranged in the transparent electrode, the sheet resistance value is provided in the direction of the gradient voltage that can be applied to the transparent electrode, and includes a power source that can apply a high value AC voltage or a low value AC voltage. An optical deflector having a gradient of The optical deflector according to claim 1, wherein the high resistance film is formed of a tin oxide thin film. In an optical scanning device comprising at least one light source and optical scanning means,
3. An optical scanning device having the optical deflector according to claim 1 or 2, as deflection means for deflecting light emitted from the light source between the light source and the optical scanning means.

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