JP5049625B2 - Structure manufacturing method and structure manufacturing apparatus using the same - Google Patents

Description

  The present invention relates to a manufacturing method and a manufacturing apparatus for forming a structure by spraying an aerosol containing fine particles onto a substrate and depositing a fine particle material on the substrate.

  As a method for manufacturing a film or structure made of a fine particle material, there is a method called an aerosol deposition method. This is a method in which aerosol containing fine particles is sprayed from a nozzle toward the substrate at high speed to collide the fine particles with the substrate, and a polycrystalline structure is directly formed on the substrate using the mechanical impact force. This is disclosed in Patent Document 1.

  As shown in this document, the aerosol deposition method uses an aerosol generator. A powder composed of fine particles is stored in the aerosol generator, and gas is injected into the powder. Then, the fine particles are dispersed in the gas, and aerosol is generated. And this aerosol is conveyed to the nozzle side from an aerosol generator, and is sprayed to a board | substrate from a nozzle at high speed.

  In order to deposit fine particles in aerosol sprayed from a nozzle on a substrate and form a dense film with a uniform particle size, when fine particles are made of ceramic, as disclosed in Patent Document 2, aerosol generation When the average particle size of primary particles, which is the smallest unit of powder stored in the vessel, is set to a small particle size of about 0.05 to 1 μm, and it is necessary to inject the primary particles or small aggregates in which a small number of them are aggregated Is done.

  That is, not only large primary particles having a diameter larger than the average particle diameter, but also small primary particles are aggregated and formed into a relatively large agglomerate. , The particle diameter is uniform and does not contribute to the formation of a dense film.

  Similarly, in the case of fine particles other than ceramic, it is not desirable that the fine particles aggregate.

  However, a considerable amount of the powder composed of fine particles placed in the aerosol generator is often affected by static electricity or the like, and often becomes a large agglomerate from the beginning of installation in the aerosol generator.

  At the beginning of aerosolization, primary fine particles in the powder or small aggregates thereof are dispersed in the gas and discharged from the aerosol generator. However, after a while, large aggregates increase in the aerosol generator due to the influence of static electricity or the like. This large aggregate is dispersed in the gas as it is and discharged from the aerosol generator, or because of its size, it remains in the aerosol generator without being dispersed in the gas.

  For this reason, the generation efficiency of the aerosol decreases after a while after the start of aerosolization. Furthermore, the film formation efficiency also decreases.

  In order to solve the above-mentioned problem, Patent Document 1 refers to a means for crushing large aggregates present in powder contained in an aerosol generator into primary fine particles or small aggregates for aerosolization.

  In this technique, the crushed pieces are mixed with powder, and vibrations are applied to the aerosol generator to give the crushed pieces a motion. Then, collision between the crushed pieces or rotational sliding between the crushed pieces occurs, and a powder crushing effect due to contact between the crushed pieces occurs. As a result, large aggregates present in the powder between the crushed pieces can be crushed into primary fine particles or small aggregates thereof that can contribute to the formation of a dense film having a uniform particle diameter.

  The same document also describes a technique for installing a filter in an aerosol generator. In this technique, the powder is disposed on a filter having pores that do not allow the powder composed of fine particles to leak, and the gas inlet into the aerosol generator is disposed on the lower surface side of the filter. In this configuration, since a gas stream is formed through the filter, fine particles are gently rolled up from the entire surface of the powder, and a suitable aerosol can be generated.

There is also a classification technique for classifying the generated aerosol and conveying it to the nozzle side. This is provided with a filter having a hole through which only fine particles having a predetermined size pass in the vicinity of the upstream in the direction in which the gas flows with respect to the outlet for discharging the generated aerosol to the nozzle. This filter makes it possible to transport only fine particles having a predetermined size necessary for forming a film having a uniform particle diameter to the nozzle.
Japanese Patent Laid-Open No. 2003-166076 JP 2001-152360 A JP 2006-198577 A

  The conventional technology described above, in which the crushed pieces are mixed with the powder and the technology in which the powder is placed on the filter in the aerosol generator, is used in combination, and the crushed pieces and the powder are placed on the filter. If mixed and arranged, it can be expected to obtain the effects of each technology, but the following problems occur.

  In FIG. 11, the crushed pieces 10 are mixed with powder on a filter 11 having pores that do not allow the fine powder 9 to leak, and the gas 31b is passed through the filter 11 into the aerosol generator. It is a figure which shows the structure to inject | pour. In this state, a part of the crushed piece 10 is in contact with the filter 11.

  The crushed piece 10 rotates in the direction of the arrow 10a while being in contact with the filter 11 by vibration or gas flow applied to the aerosol generator.

  Then, the powder crushing effect by the contact between the crushed pieces and the powder crushing effect by the contact between the crushed pieces 10 and the filter 11 are generated, and the aggregates interposed between the crushed pieces 10 and the filter 11 are crushed. Is done. However, a part of it is pushed into the inside of the filter hole 11a. If it accumulates, it will aggregate and will be pushed out to the lower surface side of the filter 11 like the aggregate 9d, and will fall to the lower side of the filter 11 like the aggregate 9e.

  Since the pores of the filter 11 are small enough to prevent fine particles from leaking, the agglomerate 9e that has fallen may be reduced by the gas flow 31b from the lower side again even if its size is small. It does not return to the side and remains on the lower surface side of the filter 11. And the aggregate 9e which fell from the filter 11 is laminated | stacked outside the air current range of the gas air current 31b.

  The inventor conducted experiments on the phenomenon in which the above-mentioned powder is pushed out to the lower surface side of the filter.

  A filter having a hole having a diameter of 30 μm is arranged in the aerosol generator, 11 g of PZT (lead zirconate titanate) powder having an average particle diameter of 0.5 μm on the upper surface side, and a zirconia ball 80 having a diameter of 5 mm as a crushed piece. The air is mixed, and dry air gas is injected at 8 L / min from the lower surface side of the filter.

  An experiment was conducted in which aerosol was generated for a predetermined period of time while vibration was applied to the aerosol generator and discharged from the generator for transport to the nozzle side.

  As a result of performing the experiment 16 times in total, 0.20 g to 4.55 g of powder having an average of 2.20 g was extruded and remained on the lower side of the mesh.

  In other words, an average of about 20% and a maximum of about 41% of the 11 g of powder was pushed out to the lower side of the filter. These could not contribute to the generation of aerosol while being crushed.

  As described above, in the configuration in which the powder is disposed on a filter having pores that do not allow the powder of fine particles to leak and the gas is injected into the aerosol generator through the filter, If mixed with powder, due to the powder crushing effect due to the contact between the crushed pieces and the filter, a considerable amount of powder is pushed out to the lower side of the filter, making it impossible to contribute to aerosol generation, and aerosol generation efficiency deteriorates. Issues arise.

(Object of invention)
The present invention solves the above-mentioned problems, and uses a technique for arranging the crushed pieces mixed with powder in the aerosol generator and a technique having a filter in the aerosol generator, and the crushed pieces and powder are placed on the filter. It is an object of the present invention to provide a manufacturing method and a manufacturing apparatus for a structure in which the generation efficiency of aerosol is continuously high even when they are mixed and arranged.

  In order to achieve the above object, the present invention is installed on the downstream side in the direction of gas flow with respect to the crushed pieces, the first filter that does not contact the crushed pieces, and the first filter, and does not pass the crushed pieces, In an aerosol generator having a second filter composed of holes larger than the holes of the first filter, a powder made of fine particles and crushed pieces are mixed to cause gas to flow to the second filter. Let's solve the above problem by arranging the gas downstream of the flow direction, injecting gas into the powder through the first filter, generating aerosol, and discharging the aerosol to the side where the substrate is installed It is what.

  According to the present invention, it is possible to provide a structure manufacturing method and a structure manufacturing apparatus in which aerosol generation efficiency is continuously high.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows a schematic diagram of a structure manufacturing method and a structure manufacturing apparatus by an aerosol deposition method.

  As shown in the figure, the structure manufacturing apparatus 1 includes a film forming unit 2 and an aerosol generating unit 3, and in the aerosol generating unit 3, aerosol generated by dispersing fine particles in a gas is formed into the film forming unit 2. Basically, the configuration is such that 1 and 2 are connected to each other by an aerosol transport pipe 4 transported to the surface.

  The film forming section 2 has a vacuum chamber 20 that is evacuated by a vacuum pump 21, and a nozzle 5 disposed at the tip of the transport pipe 4 led into the vacuum chamber 20 is transported from the aerosol generator 3 to the aerosol. The aerosol 6 conveyed by the tube 4 is sprayed onto the substrate 7b to form the film 7a, and the structure 7 composed of the substrate 7b and the film 7a is produced. The substrate 7b is normally fixed to the stage 8, and a film is formed thereon while moving the substrate 7b in the XY direction 8a.

  The aerosol generator 3 includes an aerosol generator 30, a mass flow controller 32 for injecting gas into the aerosol generator 30 through a gas transport pipe 31, and vibration applying means 33 for applying mechanical vibration 33 a to the aerosol generator 30. At the same time, the other end of the aerosol carrying tube 4 is inserted into the upper portion of the aerosol generator 30.

  In the process of generating the aerosol in the aerosol generating unit 3, the powder 9 made of fine particles is stored in the aerosol generator 30. A dry air gas or an inert gas such as helium or nitrogen is jetted through two filters to generate an aerosol containing primary fine particles or small aggregates thereof present in the powder. The generated aerosol is discharged from the aerosol generator to the aerosol transport pipe 4.

  Examples of the fine particles in the present invention include ceramic and semiconductor brittle materials, metal materials, mixtures of these materials, and ceramic fine particles coated with ceramic, metal, or resin. The shape of the fine particles also includes a substantially spherical substance and a needle-like substance.

  FIG. 2 is a schematic diagram of an aerosol generator 30 in a structure manufacturing apparatus as Example 1 of the present invention. In the aerosol generator 30, the first filter 11 and the second filter 12 are arranged, and the powder 9 made of fine particles is mixed with a plurality of crushed pieces 10. These powder 9 and the plurality of crushed pieces 10 are arranged on the downstream side in the direction of gas flow with respect to the second filter 12, that is, on the upper side of the second filter 12, and a part of the crushed pieces 10 is the first. The positional relationship is in contact with the second filter 12.

  The gas injected into the aerosol generator changes the direction of the gas airflow 31a from the gas transport pipe 31 with the gas airflow 31b, and the first filter 11 and the second filter from the lower side of the first filter 11. 12 is injected into the aerosol generator through 12 and the powder 9 is blown up.

  Under such a configuration, the mechanical vibration 33a is added to the aerosol generator 30 and the gas stream 31a is injected.

  Then, the crushed pieces 10 generate a powder pulverizing effect due to contact between the crushed pieces and a powder pulverizing effect due to contact between the crushed pieces 10 and the second filter 12. The large aggregates present are crushed into primary fine particles or small aggregates thereof that can contribute to the formation of a dense film having a uniform particle diameter.

  Note that the pulverization / disintegration effect occurs even when a gas stream is injected into the aerosol generator, but the effect can be obtained more when mechanical vibration is applied to the aerosol generator.

  Here, FIG. 3 shows an enlarged view of part A of FIG.

  The first filter 11 installed on the upstream side in the gas flow direction with respect to the second filter 12, that is, on the lower side of the second filter 12, has pores that do not allow the powder of fine particles to leak. It is a filter. This does not contact the crushed piece 10 via the second filter 12. Since the powder 9 is supported by the first filter 11, the powder 9 exists between the second filter 12 and the first filter 11 in the figure, but the crushed pieces 10 and the second filter 12. In order to illustrate the state of the powder crushed by contact with the filter in an easy-to-understand manner, in FIG.

  Then, as shown in FIG. 3, the aggregates interposed between the crushed pieces 10 and the second filter 12 are crushed. However, a part thereof is pushed into the inside of 12a that is the hole of the second filter 12 and accumulates to become an aggregate 9b. This is pushed out to the lower surface side of the 2nd filter 12, and falls to the lower side of the 2nd filter 12 like the aggregate 9c. However, in the present embodiment, since the first filter 11 is disposed below the second filter 12, the aggregate 9c is supported by the first filter 11, and does not fall below the first filter 11. . The aggregate 9c passes through the hole 12a of the second filter 12 by the gas flow 31b and rises, so that it can be crushed again by the crushed pieces.

  As shown in FIG. 2, the gas stream 31b blows up the powder 9 to disperse primary fine particles or small aggregates thereof in the gas to form an aerosol.

  The formed aerosol is transported into the aerosol transport pipe 4 as shown by an arrow 4 a and is discharged from the aerosol generator 30. The discharged aerosol is conveyed to the nozzle 5 side and is sprayed from the nozzle 5 onto the substrate 7b at a high speed to form a film 7a.

  The structure 7 is produced by the substrate 7b and the film 7a.

  Here, the details of the structure will be described.

  The first filter 11 must have pores that do not leak the powder stored in the aerosol generator.

  On the other hand, the second filter 12 has no role of supporting the powder, and the pores of the second filter 12 do not need to be pores. The following points must be considered.

  As shown in FIG. 4, when the crushed pieces 10 come into contact with the first filter 11, a powder crushing effect occurs between the first filter 11 and the crushed pieces 10, and exists between the filters. Part of the powder 9A is pushed into the hole 11a of the first filter 11 and accumulates to become an aggregate 9d, which falls from the filter.

  Therefore, the 2nd filter 12 needs to be comprised by the hole of the magnitude | size which can support so that the crushing piece 10 may not contact the filter 11. FIG.

  Further, the second filter 12 is configured with a hole larger than the hole of the first filter 11 so that the powder supported on the first filter 11 can be returned to the second filter 12 again by the gas flow. There is a need to be done.

  In consideration of the necessity, it is preferable to select an optimum pore diameter that can more effectively exhibit the powder crushing effect due to the contact between the crushing piece 10 and the second filter 12.

  Further, as shown in FIG. 3, the first filter 11 not in contact with the second filter 12 in contact with the analysis piece is not brought into close contact, and as described in the explanation of FIG. It is better to provide a gap having a width that does not contact or a width greater than that.

  As shown in the enlarged view of the vicinity of the filter in FIG. 5, even if no gap is provided between the first filter and the second filter without contacting the crushed pieces and the first filter, The leaked powder can be received by the first filter and returned to the second filter again with a gas stream to contribute to aerosolization.

  However, if the filter is brought into close contact, when the powder 9 pushed into the hole 12a of the second filter 12 by the crushed piece 10 is pushed out from the hole by further pressing from above, the first filter continues. 11 may be pushed into the hole 11a and pushed out to the lower side of the first filter 11. If even a slight gap is provided between the second filter 12 and the first filter 11, it is not pushed into the hole 11a of the first filter 11, and the possibility of moving in the lateral direction of the gap increases.

  A filter or the like is installed in consideration of the above.

  As described above, according to the present embodiment, what is stacked under the first filter 11 in the prior art and cannot contribute to the generation of aerosol can contribute to the generation of aerosol. Therefore, the aerosol generation efficiency can be continuously increased even after the start of aerosolization.

  In order to confirm the effect of this embodiment, the inventor conducted an experiment using an aerosol generator having the same form. Similar to the description of the prior art in [Background Art] described above, a second filter having a mesh of holes having a diameter of 1 mm is disposed as a filter in the aerosol generator, and an average particle size of 0.5 μm is disposed on the upper surface side thereof. 11 g of PZT (lead zirconate titanate) powder and 80 zirconia balls having a diameter of 5 mm as crushed pieces were mixed. Thereto, dry air gas is injected through the first filter having a diameter of 30 μm from the lower surface side of the mesh at 8 L / min.

  At this time, an experiment was performed in which aerosol was generated for a predetermined time while mechanical vibration was applied to the aerosol generator, and the generated aerosol was discharged to be transported to the nozzle side for spraying toward the substrate. As a result of the experiment conducted 16 times in total, only 0.009 g to 0.034 g of powder and 0.03 g on average remained on the lower side of the second filter. The great effect of reducing the amount to 1/100 was confirmed.

  FIG. 6 shows a second embodiment of the present invention. The aerosol generator 30 according to the present embodiment is different from the first embodiment in the configuration of the gas transport pipe 16. In the aerosol generator 30, when the aerosol transport direction is set to the upper side, the gas transport pipe 16 penetrates the second filter 12 and the first filter 11 from the upper side surface of the aerosol generator 30 and the first filter 11. It is led to the lower side. And it is guide | induced so that it may become horizontal with the bottom face of the aerosol generator 30, and it is the structure which inject | pours the gas flow 31c finally along a bottom face. In this configuration, the gas flow 31c can generate a spiral aerosol flow in the aerosol generator, and the primary fine particles or small aggregates thereof are efficiently wound up, so that the aerosol generation efficiency is higher.

  FIG. 7 shows a third embodiment of the present invention. In addition to the structure of the first embodiment, the aerosol generator 30 of this configuration includes the third filter 13 and the fourth filter in the downstream direction in which the gas flows with respect to the second filter, that is, on the upper side of the second filter. The filter 14 is provided.

  The third filter 13 is configured with holes that allow only fine particles having a predetermined size to pass therethrough.

The fine particles having a predetermined size are primary fine particles having an average particle diameter of 0.05 to 1 μm or small aggregates in which a small number of them are aggregated when the fine particles are made of ceramic, and form a uniform and dense film. It has a particle size suitable for.
Even when the fine particles are made of a material other than ceramic, when forming a film with the material, the particle diameter suitable for forming a dense film with a uniform particle diameter (length in the longitudinal direction in the case of needles) is used. What is included is referred to as fine particles having a predetermined size.

  On the other hand, the fourth filter 14 is installed with a gap between the third filter 13 and the third filter 13 on the upstream side in the gas flow direction so that fine particles having a predetermined size can pass therethrough. The crushed pieces are composed of holes having a size that cannot pass through.

  These filters have a predetermined size that prevents large agglomerates from being discharged from the aerosol generator and causes nozzle clogging, and is suitable for forming a dense film with a uniform particle size. Only fine particles are discharged from the aerosol generator.

  The crushed pieces are mixed with two types of crushed pieces, a crushed piece 15 having a weight wound up in the direction of the fourth filter by the gas stream and a crushed piece 10 having a weight not rolled up.

  At this time, as in the first embodiment, the hole of the second filter 12 can support the crushed pieces 10 and 15 so as not to contact the first filter 11, and at the same time, the hole of the first filter. It is necessary to make the size larger than that of the crushed pieces 10 and 15 so that the pulverizing effect can be further exerted.

  As for the gas injected into the aerosol generator, the gas flow 31a from the gas transport pipe 31 changes direction with the gas flow 31b, and the first filter 11 and the second filter 12 from the lower side of the first filter 11 are used. And is injected into an aerosol generator, and the powder 9 is blown up and dispersed in the gas to form an aerosol as shown in Example 1.

  The fine particles in the aerosol thus formed ride on the gas stream and are sent in the third and fourth filter directions. At the same time, the lighter crushed piece 15 is also wound up in the direction of the third and fourth filters by the gas stream.

  Details are shown in FIG.

  Among the fine particles carried to the fourth filter 14 side by the gas stream 31a, there are aggregates that are not crushed in addition to those that are crushed on the second filter and become primary fine particles or small aggregates thereof. There are aggregates of various sizes that have not been crushed to a predetermined size even when crushed.

  Fine particles 9a having a predetermined size including those that have been crushed on the second filter 12 and have become primary fine particles or small aggregates thereof pass through the fourth filter 14 as they are.

  Aggregates 9f larger than the holes of the fourth filter 14 are blocked from passing through the filter and adhere to the lower surface of the fourth filter 14.

  Here, for example, consider a case where the hole of the fourth filter 14 and the hole of the third filter 13 have the same size.

  The fine particles 9a having a predetermined size that have passed through the fourth filter 14 also pass through the third filter 13 as they are. Alternatively, it adheres to the upper surface of the fourth filter 14 due to static electricity. This may be laminated to form an aggregate 9h having a predetermined size or more.

  When the crushed pieces are blown up by the gas stream and collide with the third filter 13, the aggregates attached to the lower surface and the upper surface of the fourth filter 14 are peeled off by the vibration.

  The aggregate 9f peeled from the lower surface of the fourth filter 14 falls as it is and can be crushed again.

  Further, 9h which is laminated on the upper surface of the fourth filter 14 and becomes an aggregate having a predetermined size or larger is peeled off and is blocked by the third filter 13 and adhered to the lower surface like the aggregate 9g.

  The fine particles 9a having a predetermined size after passing through the third filter also adhere to the upper surface of the third filter due to static electricity. This may be laminated to form an aggregate 9i having a predetermined size or larger.

  In the present embodiment, the crushed piece 10 collides only with the fourth filter 14, and the influence of this collision is given only to the fourth filter 14, and is not given to the third filter 13.

  Therefore, the large aggregate 9 i attached to the upper surface of the third filter 13 is not peeled off and discharged from the aerosol generator 30.

  Aggregates 9g adhering to the lower surface side of the third filter 13 are fine particles 9a having a predetermined size ejected by the gas air flow 31a from the upstream side or aggregates separated from the upper surface of the fourth filter 14. Part of the first filter 11 is peeled off by the collision of the aggregate 9h.

  Among the aggregates 9g and 9h existing between the two filters, the one having a predetermined size after peeling passes through the hole of the third filter 13 and is discharged from the generator. Or it falls through the 4th filter which has a hole of the same size as the hole of the 3rd filter.

  Among the aggregates 9g and 9h existing between the two filters, those having a size larger than the pores of both filters are in a floating state between the filters. In the meantime, there is a case where the fine particles of a predetermined size are changed by contact with both filters, and the fine particles pass through the holes of the third filter 13 and are discharged from the generator. Alternatively, it falls through the hole of the fourth filter 14.

  As shown in FIG. 3, the third filter 13 and the fourth filter 14 are not brought into close contact with each other, and the impact when the fourth filter 14 collides with the crushed pieces 10 is not given to the third filter 13. Install with a gap having a width of.

  When these filters are brought into close contact with each other, when the fourth filter 14 collides with the crushed piece 10 wound up by the gas air flow 31 a, the influence is given to the third filter 13 as it is, and the upper surface side of the third filter 13. The large aggregate 9i adhering to the surface is peeled off.

  Further, if the hole of the fourth filter is made larger than the hole of the third filter in a range where the crushed pieces do not pass, aggregates that are separated from the filter and float between the filters pass through the second filter. Fall and become easy to be crushed again.

  As described above, the configuration of Example 3 not only continuously increases the aerosol generation efficiency, but also reduces the possibility of discharging large aggregates, so that nozzle clogging can be prevented. Furthermore, since particles having a uniform particle diameter are discharged, the efficiency of forming a uniform film is increased.

  FIG. 9 shows a fourth embodiment of the present invention. The aerosol generator 30 in this form is obtained by changing only the form of the gas transport pipe for injecting the gas airflow from the structure of the third embodiment.

  Specifically, upstream of the fourth filter 14 in the gas flow direction, that is, an inlet of the gas carrier pipe 17 is provided on the lower surface, and an inlet of the gas carrier pipe 18 is provided on the lower surface of the first filter 11. .

  When the gas transport pipe 17 and the gas transport pipe 18 are guided horizontally along the inner side surface of the aerosol generator 30 and the gas stream is injected horizontally with respect to the bottom surface of the aerosol generator 30, the gas flows in opposite directions. When guided, the gas flow in the opposite direction from the gas transfer pipe 17 is collided with the spiral aerosol flow generated by the gas flow injected from the lower surface of the first filter 11 by the gas transfer pipe 18.

  As a result, the aerosol containing the primary fine particles or small aggregates thereof gathers in the vicinity of the central axis portion of the aerosol generator 30 and can be effectively discharged from the aerosol generator 30 and injected onto the substrate.

  FIG. 10 shows a fifth embodiment of the present invention. This configuration can further obtain the same effect as in the third embodiment. The aerosol generator 30 in this form performs aerosolization of the powder by injecting the gas air flow 31b in the gas transport pipe 31 from the upstream, that is, the lower surface in the gas flow direction with respect to the first filter 11.

  At the same time, the vicinity of the central axis portion of the aerosol generator 30 by gas injection in the opposite directions from the gas transport pipe 19 and the gas transport pipe 20 led between the second filter 12 and the fourth filter 14. The aerosol containing the primary fine particles or the small aggregates thereof gathers, and can be effectively discharged from the aerosol generator 30 and injected onto the substrate.

Schematic diagram of an apparatus for producing structures by aerosol deposition method The figure explaining the aerosol generator of Example 1. FIG. The figure explaining the effect of Example 1 The figure explaining the detail of Example 2 The figure explaining the detail of Example 2 The figure explaining the aerosol generator of Example 2. FIG. The figure explaining the aerosol generator of Example 3. The figure explaining the detail of Example 3 The figure explaining the aerosol generator of Example 4. The figure explaining the aerosol generator of Example 5. Diagram explaining the problems of the prior art

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Structure production apparatus 2 Film formation part 3 Aerosol generating part 4 Aerosol conveyance pipe 5 Nozzle 6 Conveyed aerosol 7 Structure 7a Film 7b Substrate 8 Stage 9 Fine particle powder 9a Fine particle 9b-9i having a predetermined size Aggregate 10, 15 Breaking piece 11, 1st filter 12, 2nd filter 13, 3rd filter 14, 4th filter 16-20, 31 Gas conveyance pipe 20 Vacuum chamber 21 Vacuum pump 30 Aerosol generator 31a ~ 31c Gas flow 32 Mass flow controller 33 Vibration adding means

Claims (8)

  In a method for producing a structure by an aerosol deposition method in which an aerosol in which fine particles are dispersed in a gas is sprayed onto a substrate to form a film on the substrate, a crushed piece, a first filter that does not contact the crushed piece, A second filter that is installed on the downstream side of the first filter in the direction in which the gas flows, and does not pass through the crushed pieces, and is configured with a hole larger than the hole of the first filter. In an aerosol generator, the powder composed of the fine particles and the crushed pieces are mixed and disposed downstream of the second filter in the direction in which the gas flows, and the powder passes through the first filter. A method for producing a structure, wherein the gas is injected into a body to generate an aerosol, and the aerosol is discharged to be transported to a direction where the substrate is installed.   The method for producing a structure according to claim 1, wherein the fine particles are made of ceramic.   The method for producing a structure according to claim 1, wherein mechanical vibration is applied to the aerosol generator.   The method for manufacturing a structure according to claim 1, wherein a gap is provided between the first filter and the second filter. An apparatus for making a structure with an aerosol particles in the aerosol generator injected gas within occurs by the Rukoto is dispersed minute, the aerosol generator includes a first filter therein second With a filter
The second filter is provided on the upper side of the first filter so that the pulverized piece housed together with the powder made of the fine particles inside the aerosol generator and the first filter do not come into contact with each other. Does not pass crushed pieces, has a hole larger than the hole of the first filter ,
An apparatus for producing a structure , wherein the gas is injected into the aerosol generator from below the first filter .   6. The structure manufacturing apparatus according to claim 5, wherein the fine particles are made of ceramic.   The apparatus for producing a structure according to claim 5 or 6, further comprising vibration means for applying mechanical vibration to the aerosol generator.   The structure manufacturing apparatus according to claim 5, wherein a gap is provided between the first filter and the second filter.

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