JP5045054B2 - 圧電デバイス - Google Patents

圧電デバイス Download PDF

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Publication number
JP5045054B2
JP5045054B2 JP2006277684A JP2006277684A JP5045054B2 JP 5045054 B2 JP5045054 B2 JP 5045054B2 JP 2006277684 A JP2006277684 A JP 2006277684A JP 2006277684 A JP2006277684 A JP 2006277684A JP 5045054 B2 JP5045054 B2 JP 5045054B2
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Japan
Prior art keywords
base
piezoelectric
electrode
arm
package
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Expired - Fee Related
Application number
JP2006277684A
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English (en)
Japanese (ja)
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JP2008098909A5 (enrdf_load_stackoverflow
JP2008098909A (ja
Inventor
正幸 菊島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2006277684A priority Critical patent/JP5045054B2/ja
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Publication of JP2008098909A5 publication Critical patent/JP2008098909A5/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2006277684A 2006-10-11 2006-10-11 圧電デバイス Expired - Fee Related JP5045054B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006277684A JP5045054B2 (ja) 2006-10-11 2006-10-11 圧電デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006277684A JP5045054B2 (ja) 2006-10-11 2006-10-11 圧電デバイス

Publications (3)

Publication Number Publication Date
JP2008098909A JP2008098909A (ja) 2008-04-24
JP2008098909A5 JP2008098909A5 (enrdf_load_stackoverflow) 2009-11-05
JP5045054B2 true JP5045054B2 (ja) 2012-10-10

Family

ID=39381307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006277684A Expired - Fee Related JP5045054B2 (ja) 2006-10-11 2006-10-11 圧電デバイス

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JP (1) JP5045054B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス
WO2010061469A1 (ja) 2008-11-28 2010-06-03 セイコーインスツル株式会社 圧電振動子の製造方法、並びに圧電振動子、発振器、電子機器及び電波時計
WO2010061468A1 (ja) * 2008-11-28 2010-06-03 セイコーインスツル株式会社 圧電振動子の製造方法、並びに圧電振動子、発振器、電子機器及び電波時計
JP5621285B2 (ja) * 2010-03-16 2014-11-12 セイコーエプソン株式会社 振動片、振動子および発振器
JP5085681B2 (ja) 2010-03-31 2012-11-28 日本電波工業株式会社 圧電振動片、圧電デバイスおよび圧電振動片の製造方法
JP2014197728A (ja) * 2013-03-29 2014-10-16 セイコーエプソン株式会社 振動片の製造方法
JP6346423B2 (ja) * 2013-09-25 2018-06-20 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子
JP2015097366A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56737A (en) * 1979-06-15 1981-01-07 Seiko Epson Corp Tuning fork type crystal oscillator
JPS5665516A (en) * 1979-11-02 1981-06-03 Seiko Epson Corp Quartz oscillator of composite oscillation
JPS60153212A (ja) * 1984-01-20 1985-08-12 Matsushima Kogyo Co Ltd 音叉型水晶振動子
JP2002111437A (ja) * 2000-09-29 2002-04-12 Daishinku Corp 水晶片及び水晶振動子
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP2006262456A (ja) * 2005-02-21 2006-09-28 Seiko Instruments Inc 圧電振動片とその製造方法、圧電振動子、発振器、電子機器及び電波時計

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Publication number Publication date
JP2008098909A (ja) 2008-04-24

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