JP5042409B2 - 走査システムを校正する方法 - Google Patents

走査システムを校正する方法 Download PDF

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Publication number
JP5042409B2
JP5042409B2 JP2000611030A JP2000611030A JP5042409B2 JP 5042409 B2 JP5042409 B2 JP 5042409B2 JP 2000611030 A JP2000611030 A JP 2000611030A JP 2000611030 A JP2000611030 A JP 2000611030A JP 5042409 B2 JP5042409 B2 JP 5042409B2
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Japan
Prior art keywords
probe
stylus
machine
deflection
reference point
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Expired - Lifetime
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JP2000611030A
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English (en)
Japanese (ja)
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JP2002541469A (ja
JP2002541469A5 (enExample
Inventor
ロバーツ マクマートリィ デービット
テナント サザーランド アレクサンダー
アラン ライト デービッド
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Renishaw PLC
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Renishaw PLC
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Publication of JP2002541469A5 publication Critical patent/JP2002541469A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2000611030A 1999-04-08 2000-04-07 走査システムを校正する方法 Expired - Lifetime JP5042409B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9907868.5A GB9907868D0 (en) 1999-04-08 1999-04-08 Method of calibrating a scanning system
GB9907868.5 1999-04-08
PCT/GB2000/001315 WO2000062015A1 (en) 1999-04-08 2000-04-07 Method of calibrating a scanning system

Publications (3)

Publication Number Publication Date
JP2002541469A JP2002541469A (ja) 2002-12-03
JP2002541469A5 JP2002541469A5 (enExample) 2007-06-14
JP5042409B2 true JP5042409B2 (ja) 2012-10-03

Family

ID=10851041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000611030A Expired - Lifetime JP5042409B2 (ja) 1999-04-08 2000-04-07 走査システムを校正する方法

Country Status (6)

Country Link
US (2) US6434846B1 (enExample)
EP (1) EP1086356B1 (enExample)
JP (1) JP5042409B2 (enExample)
DE (1) DE60019219T2 (enExample)
GB (1) GB9907868D0 (enExample)
WO (1) WO2000062015A1 (enExample)

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US6810597B2 (en) * 1999-04-08 2004-11-02 Renishaw Plc Use of surface measuring probes
GB9907868D0 (en) * 1999-04-08 1999-06-02 Renishaw Plc Method of calibrating a scanning system
JP3473937B2 (ja) 1999-07-27 2003-12-08 日立建機株式会社 走査型プローブ顕微鏡とその走査方法
JP4660779B2 (ja) * 2000-08-18 2011-03-30 学校法人 中央大学 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法
GB0106245D0 (en) * 2001-03-14 2001-05-02 Renishaw Plc Calibration of an analogue probe
GB0126232D0 (en) 2001-11-01 2002-01-02 Renishaw Plc Calibration of an analogue probe
DE10207228A1 (de) * 2002-02-21 2003-09-04 Bosch Gmbh Robert Verfahren zur Kalibrierung eines Sensors und Schaltungsanordnung zum Betreiben eines Sensors
GB0205332D0 (en) * 2002-03-06 2002-04-17 Renishaw Plc Dynamic artefact comparison
GB0215478D0 (en) * 2002-07-04 2002-08-14 Renishaw Plc Method of scanning a calibrating system
US6895682B2 (en) * 2002-11-08 2005-05-24 North Carolina State University Polar coordinate-based profilometer and methods
GB0228371D0 (en) * 2002-12-05 2003-01-08 Leland E C E Workpiece inspection method
US6721675B1 (en) * 2003-01-31 2004-04-13 The Boeing Company Machine capability verification and diagnostics (CAP/DIA) system, method and computer program product
DE10327867A1 (de) * 2003-05-28 2004-12-16 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Kalibrierung eines Tasters
WO2004106854A1 (de) * 2003-05-28 2004-12-09 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur kalibrierung eines tasters
GB0322115D0 (en) 2003-09-22 2003-10-22 Renishaw Plc Method of error compensation
US6948254B2 (en) * 2003-10-27 2005-09-27 Micronic Laser Systems Ab Method for calibration of a metrology stage
US7543393B2 (en) 2003-12-16 2009-06-09 Renishaw Plc Method of calibrating a scanning system
GB0329098D0 (en) 2003-12-16 2004-01-21 Renishaw Plc Method of calibrating a scanning system
GB0417536D0 (en) * 2004-08-06 2004-09-08 Renishaw Plc The use of surface measurement probes
DE102006019382A1 (de) * 2006-04-24 2007-10-25 Carl Zeiss Industrielle Messtechnik Gmbh Scanning einer Oberfläche mit einem Koordinatenmessgerät
GB0608235D0 (en) * 2006-04-26 2006-06-07 Renishaw Plc Differential calibration
GB0611109D0 (en) * 2006-06-06 2006-07-19 Renishaw Plc A method for measuring workpieces
EP2064027B1 (en) 2006-08-31 2013-08-28 Faro Technologies Inc. Smart probe
GB0703423D0 (en) * 2007-02-22 2007-04-04 Renishaw Plc Calibration method and apparatus
GB0707720D0 (en) * 2007-04-23 2007-05-30 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
GB0707921D0 (en) 2007-04-24 2007-05-30 Renishaw Plc Apparatus and method for surface measurement
GB0716218D0 (en) 2007-08-20 2007-09-26 Renishaw Plc Measurement path generation
US7712224B2 (en) * 2007-10-03 2010-05-11 Hexagon Metrology Ab Validating the error map of CMM using calibrated probe
JP4653824B2 (ja) * 2008-07-29 2011-03-16 ファナック株式会社 機上計測装置にて計測対象物の形状を計測する工作機械システム
DE102008049751A1 (de) * 2008-10-01 2010-04-08 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Vermessen eines Werkstücks, Kalibrierverfahren sowie Koordinatenmessgerät
CN102197274B (zh) * 2008-10-29 2015-03-25 瑞尼斯豪公司 用于坐标测量系统的方法
GB0901040D0 (en) * 2009-01-22 2009-03-11 Renishaw Plc Optical measuring method and system
GB201003599D0 (en) * 2010-03-04 2010-04-21 Renishaw Plc Measurement method and apparatus
EP2492635B1 (de) * 2011-02-22 2013-05-29 Siemens Aktiengesellschaft Kalibrierverfahren für einen kugelförmigen Messtaster
GB201113715D0 (en) 2011-08-09 2011-09-21 Renishaw Plc Method and apparatus for inspecting workpieces
CN103175489A (zh) * 2011-12-21 2013-06-26 鸿富锦精密工业（深圳）有限公司 探针回弹方向确定系统及方法
GB201204947D0 (en) * 2012-03-21 2012-05-02 Renishaw Plc Method and apparatus for inspecting workpieces
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
US10955238B1 (en) * 2013-03-15 2021-03-23 Kerr Machine Co. In-process automatic recalibration
GB201308467D0 (en) 2013-05-10 2013-06-19 Renishaw Plc Method and Apparatus for Inspecting Workpieces
GB201311600D0 (en) * 2013-06-28 2013-08-14 Renishaw Plc Calibration of a contact probe
EP3051253B1 (en) * 2015-02-02 2018-08-22 Rolls-Royce North American Technologies, Inc. Multi-axis calibration block
JP6484108B2 (ja) * 2015-05-22 2019-03-13 株式会社ミツトヨ 形状測定装置の制御方法
EP3542130B1 (en) 2016-11-16 2024-01-03 Renishaw PLC Method of calibrating an analogue contact probe and method of transforming a probe signal from an analogue contact probe into a spatial measurement value
CN113188493B (zh) * 2021-03-31 2022-04-08 成都飞机工业（集团）有限责任公司 一种确定在线测量点位的测量轨迹的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986007A (en) * 1975-08-20 1976-10-12 The Bendix Corporation Method and apparatus for calibrating mechanical-visual part manipulating system
US4523450A (en) * 1981-11-07 1985-06-18 Carl-Zeiss-Stiftung, Heidenheim/Brenz Method of calibrating probe pins on multicoordinate measurement machines
GB8713715D0 (en) * 1987-06-11 1987-07-15 Renishaw Plc Workpiece inspection method
US4939678A (en) * 1987-11-19 1990-07-03 Brown & Sharpe Manufacturing Company Method for calibration of coordinate measuring machine
DE69211210T2 (de) * 1991-04-12 1996-10-10 Renishaw Transducer Syst Kalibriervorrichtung für Maschine
GB9224335D0 (en) * 1992-11-20 1993-01-13 Renishaw Metrology Ltd A method of measuring workpieces using a surface contacting measuring probe
DE4326551C2 (de) * 1993-08-07 1997-04-17 Heidenhain Gmbh Dr Johannes Kalibrier-Verfahren zum Ermitteln und Kompensieren unterschiedlicher Antastkraft-Verhältnisse bei Mehrkoordinaten-Tastsystemen
DE4436507A1 (de) 1994-10-13 1996-04-18 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
US6161079A (en) * 1997-08-18 2000-12-12 Giddings & Lewis, Llc Method and apparatus for determining tolerance and nominal measurement values for a coordinate measuring machine
GB9907868D0 (en) * 1999-04-08 1999-06-02 Renishaw Plc Method of calibrating a scanning system

Also Published As

Publication number Publication date
JP2002541469A (ja) 2002-12-03
DE60019219D1 (de) 2005-05-12
US6434846B1 (en) 2002-08-20
DE60019219T2 (de) 2005-09-22
WO2000062015A1 (en) 2000-10-19
GB9907868D0 (en) 1999-06-02
EP1086356B1 (en) 2005-04-06
EP1086356A1 (en) 2001-03-28
US20020174555A1 (en) 2002-11-28
US6601311B2 (en) 2003-08-05

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