JP5028341B2 - Attitude detection sensor and portable device - Google Patents

Description

  The present invention relates to an attitude detection sensor and a portable device that output an attitude detection signal according to a conduction state between electrodes.

  In recent years, in portable devices with a display such as a mobile phone, it has been desired that the display on the display is switched to an appropriate display in conjunction with the posture of the portable device as the display becomes multifunctional. Such a portable device has a built-in posture detection sensor that outputs a detection signal corresponding to the posture of the portable device, and the display on the display can be switched in conjunction with the detection signal output by the posture detection sensor. It has become.

Conventionally, as such a posture detection sensor, one that detects the posture of a mobile device using a plurality of acceleration sensors is known (see, for example, Patent Document 1). The plurality of acceleration sensors have a capacitor composed of a fixed electrode and a movable electrode, and the capacitance acts on the movable electrode so that the capacitance of the capacitor changes. And the attitude of the electronic device is detected based on the calculation result.
JP 2002-31644 A

  However, since the conventional attitude detection sensor calculates the acceleration from the change in the capacitance of the capacitor, it is necessary to incorporate an IC chip for calculation, and the control becomes complicated and the production cost increases. was there.

  The present invention has been made in view of this point, and an object of the present invention is to provide an attitude detection sensor and a portable device that can detect an attitude with a simple mechanical configuration and can reduce production costs.

  The posture detection sensor of the present invention is a posture detection sensor that outputs a posture detection signal according to the conduction state between the electrodes, has conductivity, has a support part connected to the electrodes, and has conductivity. A spring part having one end connected to the support part and conductive, connected to the support part via the spring part, and swingable to the support part in a posture positioned below the support part And a contact electrode installed in a swing range of the weight portion when the weight portion is positioned downward with the support portion as a center, and the weight portion is the support portion. The weight portion and the contact electrode are in contact with each other when the posture is positioned below, and the weight portion and the contact electrode are not in contact with each other when the weight portion is not positioned below the support portion. To do.

According to this configuration, when the weight portion is positioned below the support portion, the weight portion and the contact electrode are in contact with each other, the electrode on the support portion side and the contact electrode are electrically connected, and the weight portion is below the support portion. When the posture is not positioned, the weight portion and the contact electrode are not in contact with each other, and the electrode on the support portion side and the contact electrode are not conducted. Therefore, two types of attitude detection signals can be output depending on whether the electrode on the support portion side and the contact electrode are conductive or not. For example, a posture detection signal indicating a vertical posture is output when the electrode on the support portion side and the contact electrode are conductive, and a posture detection signal indicating a horizontal posture is output when the electrode on the support portion side and the contact electrode are not conductive. Can be output.
Also, since the posture detection signal corresponding to the posture is output using the weight of the weight portion, it is not necessary to provide an IC chip for calculation and perform complicated calculations, such as a weight portion, a spring portion, and a contact electrode. The posture can be detected with a simple mechanical configuration, and the production cost can be reduced.

  Another posture detection sensor of the present invention is a posture detection sensor that outputs a posture detection signal in accordance with a conduction state between electrodes, and has conductivity, and has a support portion connected to the electrodes and conductivity. A plurality of spring portions each provided in a plurality of directions around the support portion, each having one end portion connected to the support portion, and provided in each direction in which the plurality of spring portions are provided. A plurality of weight parts that are connected to the support part via the spring part in the same direction and are swingably supported by the support part in the same direction in a posture positioned below the support part; A plurality of contact electrodes provided in correspondence with the weight portions in each direction, and installed in a swing range of the weight portion in a posture in which the corresponding weight portions are positioned below in each direction, At least one of the plurality of weights is the support. The one or more weight parts and the contact electrode corresponding to the one or more weight parts are in contact with each other at the time of the posture positioned below the part, and the weight parts other than the one or more weight parts and the other than the one or more weight parts The contact electrode corresponding to the weight portion is non-contact.

According to this configuration, when at least one of the plurality of weight portions is positioned below the support portion, the one or more weight portions and the contact electrodes corresponding to the one or more weight portions are in contact with each other. The weight part other than the one or more weight parts and the contact electrode corresponding to the weight part other than the one or more weight parts are in non-contact, and the electrode on the support part side and the contact electrode corresponding to the one or more weight parts And conduct. Therefore, it is possible to output a plurality of types of posture detection signals according to the contact electrodes that are conducted to the electrode on the support portion side. For example, if the contact electrodes corresponding to the vertical orientation are conducted and the contact electrodes corresponding to the horizontal orientation are not conducted by providing the contact electrodes corresponding to the vertical orientation and the horizontal orientation, the vertical orientation is used. When the contact electrode corresponding to the vertical orientation is not conducted and the contact electrode corresponding to the lateral orientation is conducted, the orientation detection signal indicating the lateral orientation can be output.
Also, since the posture detection signal corresponding to the posture is output using the weight of the weight portion, it is not necessary to provide an IC chip for calculation and perform complicated calculations, such as a weight portion, a spring portion, and a contact electrode. The posture can be detected with a simple mechanical configuration, and the production cost can be reduced.

  Further, the present invention provides the posture detection sensor, wherein the plurality of weight portions are supported in a state of being floated from the same substrate by the connected spring portions, and at least one weight portion of the plurality of weight portions. A substrate electrode is formed on a substrate opposed to the substrate.

  According to this configuration, when the substrate electrode is positioned below the weight portion, the support-side electrode and the substrate electrode are electrically connected, and the posture detection signal indicating the posture where the substrate electrode is on the lower side can be output. it can.

  In the posture detection sensor according to the present invention, the support portion, the spring portion, and the weight portion are formed by processing the same conductive layer formed on the substrate via an insulating layer.

  According to this configuration, since the support portion, the spring portion, and the weight portion are formed of the same conductive layer, it is easy to align the electrical characteristics between the components, and it is possible to eliminate the work of attaching each component later, thereby reducing the manufacturing cost. Reduction can be achieved.

  A portable device according to the present invention includes the posture detection sensor described above, and controls the posture of a display image in conjunction with a posture detection signal output from the posture detection sensor.

  According to this configuration, since the posture of the display image of the mobile device is controlled in conjunction with the posture detection signal output from the posture detection sensor, the user can easily view the display image regardless of the posture of the mobile device. You can switch to a posture.

  According to the present invention, it is possible to provide an attitude detection sensor and a portable device that can detect an attitude with a simple mechanical configuration and can reduce production costs.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is a schematic top view of the posture detection sensor, FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1, and FIG. 3 is an enlarged view of a swinging spring portion of the posture detection sensor.

  As shown in FIG. 1 and FIG. 2, the posture detection sensor 1 outputs a posture detection signal corresponding to the posture of a portable device such as a mobile phone, and is formed on a silicon substrate. And a switch portion 5 joined to the surface of the substrate via an insulating portion 4.

  The switch unit 5 is formed by processing a conductive layer of a silicon substrate, and outputs posture detection signals corresponding to four types of postures according to the conductive state between the electrodes. The switch unit 5 includes four peripheral anchors 11, 12, 13, and 14 disposed at the positions of the vertices of the rectangle, an anchor 15 disposed between the peripheral anchors 11 and 14, a peripheral anchor 11, 12, between the peripheral anchors 12, 13, between the peripheral anchors 13, 14, respectively, are arranged corresponding to each of the three contact electrodes 17, 18, 19 and each contact electrode 17, 18, 19. Three weight portions 21, 22, and 23 are provided.

  Also, the four peripheral anchors 11, 12, 13, 14, anchor 15, three contact electrodes 17, 18, 19 are fixed on the insulating portion 4, and the three weight portions 21, 22, 23 are insulated. It is positioned above the cavity 25 formed by removing the portion 4 and is supported by the peripheral anchors 11, 12, 13, 14 and the anchor 15 so as to be swingable in a state of floating above the base portion 3.

  The posture detection sensor 1 is attached to a mounting board 7 to be described later of the portable device. When the portable device assumes a vertical posture, which is a basic posture, the anchor 15 is vertically upward and the contact electrode 18 is It is attached so that the contact electrode 17 is positioned on the right side in the horizontal direction, and the contact electrode 19 is positioned on the left side in the horizontal direction. That is, the contact electrode 18 positioned in the vertical direction with respect to the anchor 15 is an electrode for outputting a posture detection signal indicating a vertical posture, and the contact electrode 17 positioned in the right direction with respect to the anchor 15 indicates the right horizontal posture. An electrode for outputting a posture detection signal and a contact electrode 19 positioned in the left direction with respect to the anchor 15 are electrodes for outputting a posture detection signal indicating a left lateral posture.

  Further, the surface portion of the base portion 3 exposed by the cavity 25 is an electrode for outputting a posture detection signal indicating a backward posture. The attitude detection sensor 1 outputs an attitude detection signal when the contact electrodes 17, 18, 19 and the base portion 3 are electrically connected to the mounting board 7 of the portable device. Thus, in this Embodiment, the base part 3 comprises the board | substrate electrode which concerns on this invention. A substrate electrode may be provided on the base portion 3 that faces any of the weight portions 21, 22, and 23. In this case, the base part 3 is comprised with a nonelectroconductive member.

  The anchor 15 has a pair of oblique sides and is formed in a substantially base shape. The anchor body 15a is connected to the common electrode, and the support extends from the short side of the anchor body 15a toward the center of the switch portion 5. Part 15b. Three swing springs 27, 28, and 29 extending toward the contact electrodes 17, 18, and 19 are connected to the support portion 15 b, and the swing springs 27, 28, and 29 are connected to the support portions 15 b. The weight parts 21, 22, and 23 are supported by the support part 15b.

  The weights 21, 22, and 23 correspond to the trapezoidal portions 21a, 22a, and 23a having the same inclination angle as the pair of oblique sides of the anchor main body 15a and the long sides of the trapezoidal portions 21a, 22a, and 23a, respectively. It comprises contact portions 21b, 22b, and 23b that extend toward the contact electrodes 17, 18, and 19 and that are separated from and in contact with the contact electrodes 17, 18, and 19, respectively. The trapezoidal portions 21a, 22a, and 23a are arranged so as to surround the support portion 15b together with the anchor main body 15a, and an insulating gap is formed between the members. Each trapezoidal part 21a, 22a, 23a is supported by the support part 15b by swinging spring parts 27, 28, 29 connected to the short side part, respectively, and a pair of supports connected to both ends of the long side part. The springs 31, 32, 33 are supported on the peripheral anchors 11, 12, 13, 14.

  Each contact portion 21b, 22b, 23b has a corresponding contact electrode depending on the gravity acting on each weight portion 21, 22, 23 and the supporting force of the swinging spring portions 27, 28, 29 and the supporting spring portions 31, 32, 33. It swings between a contact position in contact with 17, 18, 19 and a spaced position spaced from the corresponding contact electrode 17, 18, 19. When the contact portions 21b, 22b, and 23b come into contact with the corresponding contact electrodes 17, 18, and 19, the contact electrodes 17, 18, and 19 become weight portions 21, 22, and 23, swinging spring portions 27, 28, and 29, and anchors. 15 through the common electrode.

  As shown in FIG. 3, the swinging spring portions 27, 28, and 29 have nine horizontal beam portions 35 that are long in the width direction and eight vertical beam portions 36 that are short in the expansion / contraction direction in the same plane. It is comprised so that it may meander in. The swinging spring portions 27, 28, and 29 are configured by meandering a long beam portion 35 and a short beam portion 36 in the same plane so that they are deformed by a force acting in the width direction. It is difficult to expand and contract by a force acting in the expansion / contraction direction, and slightly bends by a force acting in the thickness direction perpendicular to the expansion / contraction direction and the width direction.

  Each of the weights 21, 22, and 23 resists the supporting force of the swinging springs 27, 28, and 29 and the supporting springs 31, 32, and 33 when gravity acts in the same direction as the swinging direction. Thus, the displacement amount in the swinging direction becomes maximum, and the contact portions 21b, 22b, and 23b come into contact with the corresponding contact electrodes 17, 18, and 19. Further, when the gravity portions 21, 22, 23 are subjected to gravity in the width direction perpendicular to the swing direction, the weight portions 21, 22, 23 have their own weights, as will be described later, the swing spring portion 27, 28 and 29 are not applied in the swinging direction, so that the displacement amount is minimized by the support force of the swinging spring portions 27, 28, 29 and the supporting spring portions 31, 32, 33, and the contact portions 21b, 22b, 23b are contacted. It is held at a position farthest from the electrodes 17, 18, and 19.

  Further, each of the weight portions 21, 22, and 23 has the swing spring portions 27, 28, and 29 and the support spring portion 31, when gravity acts in the thickness direction perpendicular to the swing direction and the width direction, respectively. The amount of bending is maximized against the support force of 32 and 33, and comes into contact with the base portion 3 that functions as a substrate electrode.

  For example, when the posture detection sensor 1 takes a vertical posture in which the anchor 15 is on the upper side, the swinging direction of the weight portion 22 positioned on the lower side with respect to the anchor 15 matches the gravity direction, and the anchor The swinging direction of the weight portion 23 located on the left side with respect to 15 and the weight portion 21 located on the right side with respect to the anchor 15 and the direction of gravity intersect perpendicularly. Therefore, the component of the gravity swing direction acting on the weight portion 22 is maximized, the component of the gravity swing direction acting on the weight portions 21 and 23 is minimized, and the contact portion 22b of the weight portion 22 is the contact electrode. 18, the contact portions 21 b and 23 b of the weight portions 21 and 23 are separated from the contact electrodes 17 and 19. As a result, the common electrode connected to the anchor 15 and the contact electrode 18 are brought into conduction, and a posture detection signal indicating a vertical posture is output to the mounting substrate 7 of the portable device.

  As described above, since the amount of displacement of the weights 21, 22, and 23 varies depending on the magnitude of the component of the gravity swinging direction acting on the weights 21, 22, and 23, the detection when the posture detection sensor 1 is tilted. The sensitivity is adjusted by the distance d between the contact portions 21b, 22b, and 23b and the contact electrodes 17, 18, and 19. Hereinafter, the detection sensitivity of the posture detection sensor 1 will be described with reference to FIG. Since the weight portions 21, 22, and 23 have the same configuration as described above, the posture detection sensor 1 is changed from the vertical posture to the right posture using the weight portion 21 located on the right side with respect to the anchor 15. A case of defeating will be described as an example.

FIG. 4 is a graph showing the relationship between the inclination angle of the weight portion and the displacement amount.
As shown in FIG. 4, when the tilt angle of the weight portion 21 is 0 degree [degree], the displacement amount of the weight portion 21 is 0.0 μm. This indicates that the swing direction of the weight portion 21 is perpendicular to the gravity direction, and the magnitude of the component of the gravity swing direction acting on the weight portion 21 is minimal. From this state, when the inclination angle of the weight portion 21 is increased so that the swinging direction of the weight portion 21 approaches the gravity direction, the magnitude of the component of the gravity swinging direction acting on the weight portion 21 increases and the amount of displacement is increased. Will increase. When the inclination angle of the weight portion 21 is 90 degrees [degree], that is, when the swing direction of the weight portion 21 and the gravity direction coincide with each other, the magnitude of the component of the gravity swing direction acting on the weight portion 21 is large. Becomes the maximum, and the displacement amount of the weight portion 21 is 2.7 μm.

  Therefore, the swing range of the weight portion 21 is from a minimum of 0 μm to a maximum of 2.7 μm, and the detection sensitivity when the posture detection sensor 1 is tilted can be adjusted by setting the interval d within this swing range. It can be done. For example, when the interval d is set to 1.4 μm, an attitude detection signal is output when the attitude detection sensor 1 is tilted by 30 degrees [degree] or more, and when the interval d is set to 2.4 μm, the attitude detection is performed. When the sensor 1 is tilted by 60 degrees [degree] or more, an attitude detection signal is output. Therefore, when it is desired to increase the detection sensitivity of the posture detection sensor 1, the interval d is narrowed between 0 μm and 2.7 μm, and when it is desired to decrease the detection sensitivity of the posture detection sensor 1, it is 0 μm to 2.7 μm. The interval d is widened.

  In the present embodiment, the detection sensitivity of the posture detection sensor 1 is adjusted by setting the distance d as described above. However, the mass of the weight portion 21, the spring coefficient of the swinging spring portion 27, and the support spring portion It is also possible to adjust the detection sensitivity of the posture detection sensor 1 by changing the 31 spring coefficient.

  With reference to FIG. 5 and FIG. 6, an example of a manufacturing method of the attitude detection sensor having the above-described configuration will be described. 5 (a) to 5 (e), 6 (a), and 6 (b) are transition diagrams showing a method for manufacturing the attitude detection sensor. 5 and 6 are schematic transition diagrams mainly illustrating the swinging spring portion, and the weight portion is omitted.

  As shown in FIG. 5A, a conductive layer 41, an insulating layer 42, and a base layer 43 are laminated to form a silicon substrate 38. As shown in FIG. 5B, a predetermined position on the conductive layer 41 is formed. Further, an electrode material is deposited by sputtering.

  Next, as shown in FIG. 5C, photolithography is performed using a mask in which the outer shape of the cavity 45 is patterned, and then a part of the surface of the conductive layer 41 is thinly removed by dry etching to form the cavity. It is formed.

  Next, as shown in FIG. 5D, photolithography is performed by using a mask in which the details of the posture detection sensor 1 are patterned, and thereafter, the weight portions 21, 22, 23, and the swinging spring portion 27 are performed by dry etching. , 28, 29, peripheral anchors 11, 12, 13, 14, anchor 15, and support spring portions 31, 32, 33 are removed leaving the outer shape. The depth after dry edging at this time corresponds to the thickness of the weight parts 21, 22, 23 and the swinging spring parts 27, 28, 29.

  Finally, as shown in FIG. 5 (e), the insulating layer 42 is partially corroded and melted by wet etching, and the attitude detection sensor 1 is formed on the silicon substrate 38. Thus, the weight parts 21, 22, 23, the swinging spring parts 27, 28, 29, the peripheral anchors 11, 12, 13, 14, the anchor 15, and the support spring parts 31, 32, 33 are unnecessary from the conductive layer 41. By removing this part, it is formed integrally.

  The posture detection sensor 1 formed through the respective steps of FIGS. 5A to 5E is turned upside down from the upward state shown in FIG. 6A to the downward state shown in FIG. It is attached to the mounting board 7 of the device.

  A usage example of a portable device in which the above-described posture detection sensor is mounted will be described. In addition, although there exist a mobile phone, PDA, a portable television, a portable game device etc. as a portable device, for convenience of explanation, it demonstrates as what uses a mobile phone as a portable device. FIG. 7 is an explanatory diagram showing an example of use of a mobile phone equipped with a posture detection sensor, FIG. 8 is an explanatory diagram showing another usage example of a mobile phone equipped with a posture detection sensor, and FIG. 9 is a control block diagram of the mobile phone. is there.

  As shown in FIG. 7, the mobile phone 51 includes a first casing 53 having a rectangular display section 52 and a second casing 55 having an input section 54 that are foldably connected via a hinge section 56. In addition, the posture detection sensor 1 is built in the second casing 55. The posture detection sensor 1 is attached so as to be parallel to each of the rectangular peripheral surfaces of the second casing 55, the detection electrode 17 is the right front side of the mobile phone 51, and the contact electrode 18 is the mobile phone 51. The contact electrode 19 faces the front left side of the mobile phone 51.

  As shown in FIG. 9, the mobile phone 51 includes a display control unit 57 connected to the attitude detection sensor 1 and the display unit 52, and the display control unit 57 is a ROM (Read Only) that stores a processing program. Memory (RAM), RAM (Random Access Memory) that temporarily stores data, and a CPU (Central Processing Unit) that performs arithmetic processing according to a processing program. When the posture detection signal is input from the posture detection sensor 1, the display control unit 57 rotates the image data based on the input posture detection signal and outputs the image data to the display unit 52.

  Then, as shown in FIG. 7, when the mobile phone 51 is in the vertical orientation, the orientation detection signal indicating the vertical orientation is output from the orientation detection sensor 1 to the display control unit 57, and the display unit 52 is A display image 59 with the direction as the vertical direction is displayed. When the mobile phone 51 is tilted in the direction of arrow A from this vertical orientation, a posture detection signal indicating the right horizontal posture is output from the posture detection sensor 1 to the display control unit 57, and the display image 59 is displayed 90 degrees on the left side. Is displayed in a vertical orientation. Conversely, when the mobile phone 51 is tilted in the arrow B direction from the vertical orientation, a posture detection signal indicating the left horizontal posture is output from the posture detection sensor 1 to the display control unit 57, and a display image 59 is displayed on the display unit 52. It is rotated to the right and displayed in a vertical orientation.

  Further, as shown in FIG. 8, when the mobile phone 51 is tilted in the arrow C direction from the vertical orientation, the orientation detection signal indicating the backward orientation is output from the orientation detection sensor 1 to a drive control unit (not shown). Power ON / OFF can be switched. As described above, the posture detection signal according to the posture of the mobile phone 51 is output by the posture detection sensor 1, whereby various functions can be added to the mobile phone 51 according to the posture of the mobile phone 51. .

  Next, with reference to FIGS. 10 and 11, the internal operation of the posture detection sensor accompanying the posture change of the mobile phone will be described. FIGS. 10A and 10B are diagrams for explaining the operation of the posture detection sensor. FIG. 10A shows a state in which the weight portion and the contact electrode are separated from each other, and FIG. 10B shows a state in which the weight portion and the contact electrode are in contact with each other. Show. FIG. 11 is a diagram for explaining another operation of the posture detection sensor. FIG. 11A shows a state in which the weight portion and the base portion are separated from each other, and FIG. It shows the state. Here, the description will be made using the weight portion 21 positioned on the right side with respect to the anchor 15.

  As shown in FIG. 10A, when gravity acts in the width direction perpendicular to the swinging direction of the weight portion 21, the position where the contact portion 21 b of the weight portion 21 is separated from the contact electrode 17. Retained. From this state, as shown in FIG. 10 (b), when the posture detection sensor 1 is tilted to the right by a predetermined angle, the component in the rocking direction of gravity acting on the weight portion 21 increases, and the contact point of the weight portion 21 The part 21 b contacts the contact electrode 17. When the contact portion 21b of the weight portion 21 and the contact electrode 17 come into contact with each other, the common electrode connected to the anchor 15 and the contact electrode 17 become conductive, and the posture detection sensor 1 transfers to the display control portion 57 of the mobile phone 51. A posture detection signal indicating the right lateral posture is output, and the posture of the image on the display unit 52 is controlled.

  Further, as shown in FIG. 11A, when gravity acts in the swinging direction of the weight portion 21, the contact portion 21 b of the weight portion 21 contacts the contact electrode 17 and is separated from the base portion 3. Held in position. From this state, as shown in FIG. 11B, when the posture detection sensor 1 is inclined at a predetermined angle in the backward direction, the component in the thickness direction of the gravity acting on the weight portion 21 becomes large, and the weight portion 21 becomes the base portion. 3 is touched. When the weight portion 21 comes into contact with the electrode of the base portion 3, the common electrode connected to the anchor 15 and the base portion 3 are brought into conduction, and a posture detection signal indicating a backward posture is sent from the posture detection sensor 1 to the drive control portion. Is output, and ON / OFF of the mobile phone 51 is controlled.

As described above, according to the posture detection sensor 1 according to the present embodiment, when one of the three weight portions 21, 22, and 23 is positioned below the anchor 15, The weight portion located at the contact point and the contact electrode corresponding to the weight portion come into contact with each other, and the common electrode and the contact electrode are brought into conduction. Accordingly, a plurality of types of posture detection signals can be output in accordance with the contact electrodes that are conducted to the anchor 15.
In addition, since the posture detection signal corresponding to the posture is output using the weight of the weight part, it is not necessary to perform a complicated calculation by providing an IC chip for calculation, and the posture can be detected with a simple mechanical configuration. , Production costs can be reduced.

  In the present embodiment, the weights 21, 22, 23, the swinging springs 27, 28, 29 and the contact electrodes 17, 18, 19 are provided in three directions with respect to the anchor 15. 12, the weight 63, the swinging spring 64, and the contact electrode 65 may be provided in one direction with respect to the anchor 62. With this configuration, two types of posture detection signals can be output depending on whether the common electrode and the contact electrode 65 are conductive or not. For example, a posture detection signal indicating a vertical posture is output when the common electrode and the contact electrode 65 are conductive, and a posture detection signal indicating a horizontal posture is output when the common electrode and the contact electrode 65 are not conductive. it can.

  In the present embodiment, the posture detection signal is output by conduction between the common electrode and any one of the three contact electrodes 17, 18, and 19, but the common electrode and the plurality of contacts are output. The posture detection signal may be output by conduction with the electrode.

  Further, in the present embodiment, as shown in FIG. 13A, the posture detection sensor 1 formed from a silicon substrate is turned upside down and attached to the upper side of the mounting substrate 7, but in FIG. As shown, it may be attached to the lower side of the mounting substrate 8 formed in a lid shape without being inverted upside down.

  The embodiment disclosed this time is illustrative in all respects and is not limited to this embodiment. The scope of the present invention is shown not by the above description of the embodiments but by the scope of the claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

  As described above, the present invention has an effect that the posture can be detected with a simple mechanical configuration and the production cost can be reduced, and in particular, the posture that outputs the posture detection signal according to the conduction state between the electrodes. Useful for detection sensors and portable devices.

It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is an upper surface schematic diagram of an attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is sectional drawing in the AA cross section of FIG. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is an enlarged view of the rocking | fluctuation spring part of an attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is the graph which showed the relationship between the inclination-angle of a weight part, and a displacement amount. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, (a) to (e) is a transition diagram which shows the manufacturing method of an attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, (a) And (b) is a transition diagram which shows the manufacturing method of an attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is explanatory drawing which shows the usage example of the mobile telephone which mounted the attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is explanatory drawing which shows the other usage example of the mobile telephone which mounted the attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is a control block diagram of a mobile telephone. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is operation | movement explanatory drawing of an attitude | position detection sensor. It is a figure which shows embodiment of the attitude | position detection sensor which concerns on this invention, and is another operation | movement explanatory drawing of an attitude | position detection sensor. It is a figure which shows other embodiment of the attitude | position detection sensor which concerns on this invention, and is an upper surface schematic diagram of an attitude | position detection sensor. It is a figure which shows the modification of the attitude | position detection sensor which concerns on this invention.

Explanation of symbols

1 Attitude detection sensor 3 Base part (substrate electrode)
4 Insulating part 5 Switch part 7 Mounting substrate 11, 12, 13, 14 Peripheral anchor 15 Anchor 15a Anchor body 15b Support part 17, 18, 19 Contact electrode 21, 22, 23 Weight part 21a, 22a, 23a Trapezoid part 21b, 22b 23b Contact part 25, 45 Cavity 27, 28, 29 Oscillating spring part (spring part)
31, 32, 33 Supporting spring part 35 Horizontal beam part 36 Vertical beam part 38 Silicon substrate 41 Conductive layer 42 Insulating layer 43 Base layer 51 Mobile phone (mobile device)
52 display unit 53 first housing 54 input unit 55 second housing 56 hinge unit 57 display control unit 59 display image

Claims (5)

An attitude detection sensor that outputs an attitude detection signal according to a conduction state between electrodes,
A support having electrical conductivity and connected to the electrode;
A spring part having conductivity and having one end connected to the support part;
A weight portion that is electrically conductive and is connected to the support portion via the spring portion, and is swingably supported by the support portion in a posture positioned below the support portion;
A contact electrode installed within a swing range of the weight portion when the weight portion is positioned below the support portion as a center;
When the weight portion is positioned below the support portion, the weight portion and the contact electrode are in contact with each other, and when the weight portion is not positioned below the support portion, the weight portion and the contact electrode are not contacted. An attitude detection sensor characterized by contact. An attitude detection sensor that outputs an attitude detection signal according to a conduction state between electrodes,
A support having electrical conductivity and connected to the electrode;
A plurality of spring portions each having conductivity, provided in a plurality of directions around the support portion, each having one end connected to the support portion;
Each of the plurality of spring portions is provided in each direction, has conductivity, is connected to the support portion via the spring portion in the same direction, and is in the posture positioned below the support portion. A plurality of weight portions that are swingably supported by the directional support portion;
A plurality of contact electrodes provided in correspondence with the weight portions in each direction, and installed in a swing range of the weight portion in a posture in which the corresponding weight portions are positioned below in each direction;
When at least one of the plurality of weight parts is positioned below the support part, the one or more weight parts are in contact with contact electrodes corresponding to the one or more weight parts, and the one or more weight parts are in contact with each other. A posture detection sensor, wherein a weight portion other than the weight portion and a contact electrode corresponding to the weight portion other than the one or more weight portions are not in contact with each other.   The plurality of weight portions are supported by the connected spring portions in a floating state from the same substrate, and a substrate electrode is formed on a substrate facing at least one weight portion of the plurality of weight portions. The posture detection sensor according to claim 2, wherein   The said support part, the said spring part, and the said weight part process the same conductive layer formed through the insulating layer on the said board | substrate, The any one of Claims 1-3 characterized by the above-mentioned. Attitude detection sensor. The posture detection sensor according to claim 1 is provided,
A portable device that controls a posture of a display image in conjunction with a posture detection signal output from the posture detection sensor.

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