JP5023786B2 - Tracking system and tracking method thereof - Google Patents

Description

  The present invention relates to a method for tracking a workpiece in a production line composed of a plurality of transfer devices, processing devices, inspection devices, and measuring devices, and a plurality of production lines that perform management of products processed in units of single wafers such as glass substrates. Related to tracking system technology.

  Conventionally, in a factory where products such as glass substrates are manufactured in single wafer units, the position of each workpiece in a production line consisting of a plurality of facilities is recognized, and the workpiece information is signaled by sensors attached to each facility. A system for tracking a workpiece by sensing the movement of the workpiece is provided.

  Also, it has various data tables storing ID information pre-assigned to workpieces, workpiece type information and workpiece machining pattern information, and it is not a planned lot number by searching for ID information, lot number, etc. In some cases, a tracking system that prohibits conveyance as a tracking abnormality is also provided.

  There is also provided a tracking system having a function capable of generating a collation error when there is a discrepancy between the tracking data and the presence / absence of a workpiece determined from the signal of the on-board sensor.

  There is also provided a tracking system provided with tracking data correction input means capable of rewriting tracking data.

  However, these tracking systems are mainly applied to a single production line, and tracking results in the previous production line cannot be reflected in the next production line.

  In addition, when performing inspection by sampling or measuring characteristic values, sampling of the next production line may be performed randomly regardless of whether the workpiece has been inspected and measured in the previous production line. There was a problem that it was difficult to compare the characteristic values.

The known documents of the tracking system are described below.
JP 2003-67031 A

  An object of the present invention has been made in view of the above problems, and an object thereof is to enable efficient and effective work tracking and management.

The invention according to claim 1 of the present invention has a work identifier reading device for identifying a workpiece by a plurality of transfer devices, processing devices, inspection devices, input devices to a production line in which measuring devices are arranged, and recovery devices. Each work is assigned a unique work identifier for identifying the work, and there are multiple production lines where the work identifier is read at the time of loading. There,
A tracking method is characterized in that, based on the track record of the previous production line, a part for controlling movement in the production line is established in the tracking data in the next production line.

  In the invention according to claim 2 of the present invention, the tracking data includes a work identifier, an in-line control flag, and a line sharing control flag, and the in-line control flag is composed of a line common part and a line individual part. The tracking method according to claim 1, wherein:

The invention according to claim 3 of the present invention has a work identifier reader for identifying a work by a plurality of transfer devices, processing devices, inspection devices, input devices to a production line in which measuring devices are arranged, and recovery devices. In addition, each workpiece is assigned a unique workpiece identifier to identify the workpiece, and there are multiple production lines where the workpiece identifier is read at the time of input and collection, tracking the movement of the workpiece in the production system A tracking system that
A plurality of line controllers each having a plurality of production lines;
Receiving information tracking information collected by each line controller, and transmitting and storing to each line controller, information management control means for managing storage,
Each line controller is a tracking system characterized in that, based on the track record of the previous production line, the part of the tracking data in the production line that controls the movement in the production line is established.

  In the invention according to claim 4 of the present invention, the tracking data includes a work identifier, an in-line control flag, and a line sharing control flag, and the in-line control flag is composed of a line common part and a line individual part. The tracking system according to claim 3.

  In the invention according to the present invention, tracking data in a subsequent production line is established based on the track record in a certain production line, for example, measurement of characteristic values and the like are measured on all production lines. It can be used for verification of differences between processes, etc., which can identify process lines that are defective or unstable, and can stabilize quality and improve yield. It becomes possible to do.

Further, in the invention according to the present invention, the same workpiece is also extracted from the sampling inspection machine installed in the production line in the same manner as the measurement apparatus described above, and the defect for each production line is evaluated by the difference by performing the inspection. In this case, the production line which is very efficient and effective and frequently causes defects can be identified at an early stage, and it is possible to realize stable quality and improved yield.

  As described above, the invention according to the present invention has an effect of enabling efficient and effective management of work tracking.

  Hereinafter, an embodiment of a tracking system and a tracking method for a plurality of production lines according to the present invention will be described below with reference to the drawings. At this time, a plurality of drawings are referred to, but the same reference numerals are given to the same components in all the drawings.

  FIG. 1 is an explanatory diagram showing an example of a configuration of a tracking system in a plurality of production lines according to the present invention. The production lines A to N12 are provided with a line controller A to a line controller N11 for each production line. Each line controller 11 is connected to a respective device on the production line N12, and performs work tracking management, generation of tracking data, aggregation of tracking results, and the like. Each line controller is connected to the host HOST 10 and reports the tracking results to the HOST 10. The host HOST 10 is connected to the subordinate line controller A, the line controller A is connected to the equipment group of the subordinate production line A, and the line controller A tracks the work status on the production line A. The results are collected and the tracking results are reported to the HOST 10. Next, the line controller B that has received the tracking results from the HOST 10 establishes the tracking data of the production line B and instructs the production line B to control the movement of the workpiece.

  The HOST 10 generates the tracking data 20 for the next production line B based on the current track record of the production line A from the line controller A, and the work identification ID from the line controller B that manages the next production line B. The tracking data 20 generated when an inquiry is made is notified to the line controller B. Thereafter, similarly, the tracking data 20 is shared by sharing a work identification ID among the plurality of production lines.

  Here, the work identification ID is a character string formed by combining at least one or more characters (including numbers and symbols) and uniquely assigned to each work.

  The work identifier refers to a pattern representing the work identification ID attached to the work itself by writing or pasting the work itself. As the work identifier, a character string of a work identification ID represented by a bar code, various two-dimensional codes, OCR characters, or the like can be used.

  FIG. 2 shows an example of tracking data 20 used by the line controller 11 for transport control. The tracking data 20 includes a work identification ID 21 for individually identifying the work within the line, an in-line control Flag 22 used for controlling the line, and a line sharing control used for controlling the line. It consists of Flag23.

  Since the work identification ID 21 is used to individually identify the work within the line, it may be used as it is for processing the tracking data within the line. However, since the number of characters in the character string of the work identification ID that is uniquely assigned to each work is generally large, using the work identification ID as it is in the line controller is inconvenient due to limitations on the data capacity of the line controller. Sometimes it is. In such a case, each line controller can generate a substitute ID that has a one-to-one correspondence with the work identification ID and has a reduced number of characters, and can use it only within the line.

  The in-line control Flag 22 further includes a line common unit 24 and a line individual unit 25, and the line common unit 24 is used for control and performance of a device that performs common inspection and measurement in the production line. The individual line unit is used for control and performance of devices that measure characteristic values unique to each production line.

  The line sharing control Flag 23 is not used individually for each production line, for example, prohibition of shipment of workpieces or identification of sample workpieces, but is shared by all production lines and used for control and performance.

  FIG. 3 shows an example of the tracking data 20. Control information and performance information in the in-line control Flag 22 and the line sharing control Flag 23 are represented by bits “0” and “1”.

  Each bit of the in-line control Flag 22 is assigned to control and performance for each device that needs to be controlled in the production line. The control bit is defined as “1” when it is carried into the coping apparatus, and “0” when it is not carried in. The initial values of all the results bits are “0”. However, as they progress through the production line, “1” is displayed when the target device is loaded, and “0” is set when it is not loaded (initial value). Value).

  Further, in the line sharing control Flag 23, each bit such as a shipment prohibition 30 and a sample work 31 is assigned, and when the work is prohibited from shipment, the shipment prohibition 30 is set to “1”. The work 31 is defined as “1”. The same applies to other sharing applications.

  FIG. 4 is an explanatory diagram showing an example of a production line to which the tracking system according to the present invention is applied. The production line A and the production line B are 42a, 42b, 47a, 47b as conveying devices for loading and collecting workpieces, 43a, 43b as processing devices for processing workpieces, conveyors for conveying processed workpieces, etc. The transport apparatus is composed of a plurality of apparatuses, 44a and 44b, inspection apparatuses for inspecting the processed workpieces 45a and 45b, and measuring apparatuses for measuring the characteristic values of the processed workpieces 46a and 46b. ing.

  A workpiece identifier reader 40 is installed in the transfer devices 42a, 42b, 47a, 47b for loading and collecting workpieces. When loading and collecting workpieces, the workpiece identifiers are read and input and the collected workpieces are discriminated. Yes.

  Each bit of the in-line control flag in the production line A and the production line B is defined as follows. 48a1 and 48b1 are used for controlling the inspection devices 45a and 45b, 48a2 and 48b2 are used for the results, 48a3 and 48b3 are used for controlling the measuring devices 46a and 46b, and 48a4 and 48b4 are used for the results. .

  Although the production line A and the production line B have the same line configuration for explanation, they may not be the same in particular.

  The in-line control Flag 22 of the work identifier XYZ inspected and measured in the production line A is “1” for 48a2 and “1” for 48a4. That is, the inspection and measurement results are flagged. In other words, inspection and measurement remain as performed. When the workpiece is collected by the transport device 47a, the workpiece identifier is read by the workpiece identifier reader 40, and the line controller 11 reports the result to the HOST 10 as the tracking result 48a.

  The HOST 10 that has received the report of tracking results generates tracking data for the next production line B. In the line common part of the in-line control flag, the control flag for the next production line is based on the introduction results of the same kind of inspection machines and measuring machines. Stand up.

  Since the production line A and the production line B each have an inspection machine and a measuring machine, the control flag 48b1 of the inspection machine of the production line B becomes “1” from the inspection machine processing result 48a2 of the production line A. Similarly, from the processing results 48a4 of the measuring machine on the production line A, the control flag 48b3 of the measuring machine on the production line B becomes “1”.

  The line sharing control Flag 23 is taken over as the line sharing control Flag 23 of the next production line without any particular change.

When the workpiece identifier XYZ is loaded into the production line B, the workpiece identifier is read by the workpiece identifier reading device 40 of the transfer device 42b. At that time, the line controller 11 inquires the tracking data of the workpiece identifier XYZ to the HOST 10. The HOST 10 notifies the tracking data generated as described above to the line controller 11 and becomes the tracking data 48b in the production line B.

  In the tracking data 48b, since the control flag 48b1 of the inspection device 45b and the control flag of the measurement device 48b3 are both “1”, the workpiece with the workpiece identifier XYZ is automatically inspected and measured in the production line B as well. Is called.

  By taking over the tracking in the next line of the production line B as well, the same workpiece can be efficiently inspected and measured even in the production process passing through a plurality of production lines.

  FIG. 5 is an explanatory diagram showing an example of tracking data applied to a tracking system for a line having a plurality of production lines according to the present invention. As described above, in the line tracking system having a plurality of production lines according to the present invention, each production line is controlled and managed using the tracking data, and in the case of actual results, the production line A shown in FIG. The work identifier XYZ tracking data 48a, and in the case of control, the work identifier XYZ tracking data 48b of the production line B in FIG. 5B. In the present invention, the tracking data in the next production line, that is, the production line B (FIG. 5B) based on the tracking result of the previous production line, that is, the tracking result of the production line A (see FIG. 5A). Establish a reference).

It is explanatory drawing which shows an example of a structure of the tracking system which concerns on this invention. It is explanatory drawing which shows the structure of the tracking data of this invention. It is explanatory drawing which shows the specific tracking data of this invention. It is explanatory drawing which shows an example of the production line which applies the tracking system of the line in which multiple production lines of this invention exist. It is explanatory drawing which shows an example of the tracking data applied to the tracking system of the line in which multiple production lines of this invention exist.

Explanation of symbols

1 ... Production system 10 with multiple production lines ... HOST
11 ... Line controllers A to N
12 ... Production lines A to N
20 ... Tracking data 21 ... Work identification ID
22 ... In-line control flag
23 ... Line sharing control Flag
24 ... Line common part 25 of the in-line control flag 25 ... Line individual part 30 of the in-line control flag ... Shipment prohibited flag
31 ... Sample work Flag
40 ... Work identifier reading device 41 ... Work 42a ... Transport device for production line A (input)
42b ... Conveyor for production line B (input)
43a ... Processing device 43b of production line A ... Processing device 44a of production line B ... Conveying device 44b of production line A ... Conveying device 45a of production line B ... Inspection device 45b of production line A ... Inspection device 46a of production line B ... Measuring device 46b on production line A ... Measuring device 47a on production line B ... Conveying device (collection) on production line A
47b ... Conveying device (collection) of production line B
48a ... Tracking data 48a1 of work identifier XYZ in production line A ... Inspection device control flag of production line A
48a2 ... Production line A inspection device results Flag
48a3 ... Measuring device control flag of production line A
48a4 ... Measurement results of production line A Flag
48b ... Tracking data 48a1 of work identifier XYZ in production line B ... Inspection device control flag of production line B
48a2 ... Production line B inspection device results Flag
48a3 ... Measurement device control flag of production line B
48a4 ... Flag of measuring equipment on production line B Flag

Claims (4)

A plurality of transfer devices, processing devices, inspection devices, input devices to a production line in which measuring devices are arranged, and recovery devices have work identifier reading devices for identifying the work, and each work is for specifying the work A method for tracking the movement of a workpiece in a production system, in which there are a plurality of production lines to which a unique workpiece identifier is assigned and at least when the workpiece identifier is read at the time of input,
A tracking method characterized by establishing a portion for controlling movement in a production line of tracking data in a next production line based on a track record of a previous production line.   2. The tracking according to claim 1, wherein the tracking data includes a work identifier, an in-line control flag, and a line sharing control flag, and the in-line control flag includes a line common part and a line individual part. Method. A plurality of transfer devices, processing devices, inspection devices, input devices to a production line in which measuring devices are arranged, and recovery devices have work identifier reading devices for identifying the work, and each work is for specifying the work A tracking system for tracking the movement of a workpiece in a production system, in which there are a plurality of production lines to which unique workpiece identifiers are assigned and the workpiece identifiers are read at the time of input and collection,
A plurality of line controllers each having a plurality of production lines;
Receiving information tracking information collected by each line controller, and transmitting and storing to each line controller, information management control means for managing storage,
A tracking system in which each line controller establishes a portion for controlling movement in the production line of tracking data in the production line based on the track record of the previous production line.   4. The tracking according to claim 3, wherein the tracking data includes a work identifier, an in-line control flag, and a line sharing control flag, and the in-line control flag is composed of a line common part and a line individual part. system.

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