JP5017335B2 - Abnormality detection device for positive displacement pump - Google Patents

Abnormality detection device for positive displacement pump Download PDF

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JP5017335B2
JP5017335B2 JP2009195253A JP2009195253A JP5017335B2 JP 5017335 B2 JP5017335 B2 JP 5017335B2 JP 2009195253 A JP2009195253 A JP 2009195253A JP 2009195253 A JP2009195253 A JP 2009195253A JP 5017335 B2 JP5017335 B2 JP 5017335B2
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JP2011047303A (en
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元 川崎
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Tacmina Corp
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Description

本発明は、容積式ポンプ(以下、単にポンプという場合もある)から配管に吐出される流体の脈動を検知して、例えば高濃度の薬液を使用した場合に生じる、ガスの揮発によるガスロック、及びポンプの吐出口の閉塞状態の異常を検知する容積式ポンプの異常検出装置に関する。   The present invention detects a pulsation of a fluid discharged from a positive displacement pump (hereinafter sometimes simply referred to as a pump) to a pipe and, for example, a gas lock caused by gas volatilization that occurs when a high-concentration chemical is used, The present invention also relates to an abnormality detection device for a positive displacement pump that detects an abnormality in a closed state of a discharge port of the pump.

従来の容積式ポンプの異常検出装置としては、例えば、弁室が内部に形成されたポンプ本体と、該ポンプ本体に往復動自在に設けられたプランジャと、該プランジャを往復駆動させるソレノイドと、プランジャの駆動によって、弁室内の流体を出口通路に吐出させるボール弁体と、ポンプ本体に接続されると共に、弁室に連通する出口通路が内部に形成された出口通路部材と、該出口通路部材に外嵌された圧電素子とを備えたものが公知になっている。   As a conventional positive displacement pump abnormality detection device, for example, a pump body in which a valve chamber is formed, a plunger reciprocatingly provided in the pump body, a solenoid for reciprocatingly driving the plunger, a plunger And a ball valve body that discharges fluid in the valve chamber to the outlet passage, an outlet passage member that is connected to the pump body and that communicates with the valve chamber, and an outlet passage member formed in the outlet passage member. A device provided with an externally fitted piezoelectric element is known.

前記装置によれば、ソレノイドのオン・オフに同期して、プランジャ、ボール弁体を出退動作させることで、流体を吐出・吸引させる。この際、圧電素子によって、正常時の波形と、オイル切れ及び出口通路の詰まりの異常が生じたときの波形とを比較し、オイル切れ及び出口側の詰まりの異常を検知している。   According to the apparatus, the fluid is discharged and sucked by moving the plunger and the ball valve body in and out in synchronization with the on / off of the solenoid. At this time, the piezoelectric element compares the waveform at the normal time with the waveform when the oil outage and the clogging of the outlet passage are abnormal, and detects the oil outage and the clogging of the outlet side.

また、他の従来例の容積式ポンプの異常検出装置としては、駆動軸の先端部に装着されたダイヤフラムと、該ダイヤフラムとポンプ本体とで形成されたポンプ室と、該ポンプ室から下方及び上方に形成された吸入通路及び吐出通路と、該吐出通路から分岐される吐出通路及び液圧検出通路と、吐出通路に接続されるチャッキ弁と、液圧検出通路に設けられる圧力センサとを備えたものが公知になっている。そして、前記圧力センサは、圧力に応動するダイヤフラムと、該ダイヤフラムの上面に形成された、ダイヤフラムの歪みを検出する複数のピエゾ抵抗体や電子回路とで構成されている。また、ダイヤフラムは、液圧検出通路に臨むように配置されるので、接液による腐食を防止するために表面処理されている。   Further, as an abnormality detecting device for a positive displacement pump according to another conventional example, a diaphragm attached to a tip end of a drive shaft, a pump chamber formed by the diaphragm and a pump body, and below and above the pump chamber A suction passage and a discharge passage, a discharge passage and a fluid pressure detection passage branched from the discharge passage, a check valve connected to the discharge passage, and a pressure sensor provided in the fluid pressure detection passage. Things are known. The pressure sensor includes a diaphragm that responds to pressure, and a plurality of piezoresistors and electronic circuits that are formed on the upper surface of the diaphragm and detect the distortion of the diaphragm. Further, since the diaphragm is disposed so as to face the hydraulic pressure detection passage, the diaphragm is surface-treated in order to prevent corrosion due to liquid contact.

前記装置によれば、圧力センサで検出する出力に基づいて、吐出サイクルの開始タイミングを検出すると共に、ポンプの脈動に応じた所定のパルスを出力するようにしている。そして、ポンプ内部に空気が混入される異常時においては、液圧検出通路の圧力が急激に低下することになり、パルス信号の出力が停止して、警報が出力されるようになっている。   According to the apparatus, the start timing of the discharge cycle is detected based on the output detected by the pressure sensor, and a predetermined pulse corresponding to the pulsation of the pump is output. When the air is mixed into the pump, the pressure in the fluid pressure detection passage rapidly decreases, the pulse signal output is stopped, and an alarm is output.

特開2002−48073号公報JP 2002-48073 A 特許第3343042号公報Japanese Patent No. 3334402

しかしながら、前者の容積式ポンプの異常検出装置は、ソレノイド式ポンプに適用できるものの、モータポンプに適用できる記載事項は何ら開示乃至示唆されておらず、汎用性が低いと考えられる。   However, although the former positive displacement pump abnormality detection device can be applied to a solenoid pump, the description applicable to a motor pump is not disclosed or suggested, and is considered to be less versatile.

また、後者の容積式ポンプの異常検出装置は、圧力センサを使用しているので、ダイヤフラムの接液面に表面処理を施す必要があり、その分、製造工程が多くなってコスト高になると考察される。   In addition, the latter positive displacement pump anomaly detection device uses a pressure sensor, so it is necessary to perform surface treatment on the liquid contact surface of the diaphragm. Is done.

本発明は、上記の事情に鑑みてなされたものであり、ソレノイド及びモータを駆動源とするポンプの何れにも適用できて、しかも、簡単且つ安価に製造できる汎用性の高い容積式ポンプの異常検出装置を提供することを課題とする。   The present invention has been made in view of the above circumstances, and can be applied to any pumps that use solenoids and motors as drive sources, and can be easily and inexpensively manufactured. It is an object to provide a detection device.

上記課題を解決するために、本発明の容積式ポンプの異常検出装置は、ソレノイドまたはモータのいずれかを駆動源とする容積式ポンプ2の異常を検出する容積式ポンプの異常検出装置において、容積式ポンプ2の吐出口に接続される配管3に外嵌される、圧電素子で構成されるセンサ10を備え、ソレノイドを駆動源とした場合におけるセンサ10の検知信号を処理する第一信号処理手段と、モータを駆動源とした場合におけるセンサ10の検知信号を処理する第二信号処理手段とが、前記各駆動源に応じて切り換えできるように構成される信号処理部15を備える。
In order to solve the above-described problem, an abnormality detection device for a positive displacement pump according to the present invention is an abnormality detection device for a positive displacement pump that detects an abnormality of the positive displacement pump 2 using either a solenoid or a motor as a drive source. Signal processing means for processing a detection signal of the sensor 10 when the solenoid 10 is used as a drive source, and includes a sensor 10 composed of a piezoelectric element that is fitted on a pipe 3 connected to the discharge port of the pump 2 when, a second signal processing means for processing a detection signal of the sensor 10 in the case where the motor as a driving source is Ru with a composed signal processing section 15 so as to be switched in accordance with the respective drive sources.

この場合、容積式ポンプ2の吐出口に接続される配管3に、圧電素子で構成されるセンサ10を外嵌するようにしたので、センサ10の検知面を接液させることなく、流体の脈動を、配管3を介して検知することができる。このため、従来のように、センサ10の検知面に表面処理を施す必要がなく、その分加工工程が不要になり、コストも低減できる。   In this case, since the sensor 10 composed of a piezoelectric element is externally fitted to the pipe 3 connected to the discharge port of the positive displacement pump 2, the pulsation of the fluid can be achieved without bringing the detection surface of the sensor 10 into contact with liquid. Can be detected through the pipe 3. For this reason, it is not necessary to perform the surface treatment on the detection surface of the sensor 10 as in the prior art, and accordingly, the machining process is unnecessary, and the cost can be reduced.

この場合、ソレノイド、モータのいずれを駆動源とする容積式ポンプ2であっても、駆動源に応じた信号処理が行われるようになり、汎用性が高くなる。   In this case, even if it is the positive displacement pump 2 which uses either a solenoid or a motor as a drive source, the signal processing according to a drive source will be performed, and versatility will become high.

本発明によれば、容積式ポンプの吐出口に接続される配管に、圧電素子で構成されるセンサを外嵌し、配管に伝達される流体の脈動を検知するようにしたので、簡単且つ安価に製造できる効果がある。   According to the present invention, a sensor constituted by a piezoelectric element is externally fitted to the pipe connected to the discharge port of the positive displacement pump, and the pulsation of the fluid transmitted to the pipe is detected. There is an effect that can be manufactured.

本発明の一実施形態に係る容積式ポンプの異常検出装置を備えた流体搬送装置の概略構成図。The schematic block diagram of the fluid conveyance apparatus provided with the abnormality detection apparatus of the positive displacement pump which concerns on one Embodiment of this invention. 圧電素子が内装された固定アダプタを示す分解斜視図。The disassembled perspective view which shows the fixed adapter by which the piezoelectric element was equipped internally. 図2の固定部材を上下方向に断面した斜視図。FIG. 3 is a perspective view of the fixing member of FIG. 固定部材にボルトが螺合した状態の平断面図。The plane sectional view in the state where the bolt screwed to the fixing member. (a)は、ソレノイドのオン信号と、該オン信号にセンサの検知信号を同期させて、第一及び第二設定レベルの範囲内にある検知信号をA/D変換して、正常波形を形成する状態を示す図。(b)は、ソレノイドのオン信号と、該オン信号にセンサの検知信号を同期させて、第二設定レベルを越える検知信号をA/D変換して、閉塞波形を形成する状態を示す図。(c)は、ソレノイドのオン信号と、該オン信号にセンサの検知信号を同期させて、第一設定レベルよりも低い検知信号をA/D変換して、ガスロック波形を形成する状態を示す図。(A) Synchronizes the solenoid ON signal and the sensor detection signal to the ON signal, and A / D converts the detection signal within the first and second setting levels to form a normal waveform. The figure which shows the state to do. FIG. 6B is a diagram showing a state in which a closed waveform is formed by A / D converting a solenoid ON signal and a detection signal exceeding the second set level by synchronizing the detection signal of the sensor with the ON signal. (C) shows a state in which a gas lock waveform is formed by A / D converting a solenoid ON signal and a detection signal lower than the first set level by synchronizing the sensor detection signal with the ON signal. Figure.

以下、本発明に係る容積式ポンプの異常検出装置の実施形態について、図1〜図5を参照しつつ説明する。   Hereinafter, an embodiment of an abnormality detecting device for a positive displacement pump according to the present invention will be described with reference to FIGS.

本発明の一実施形態に係る容積式ポンプの異常検出装置について、該容積式ポンプによって流体を搬送する流体搬送装置を含めて、図1〜図4を参照しつつ説明する。流体として、例えば高濃度の薬液が貯留されるタンク1と、該タンク1の流体を吸引・吐出して、後述する接続配管3を経て供給配管4に流体を搬送する容積式ポンプ2と、該容積式ポンプ2の吐出口に接続される接続配管3と、該接続配管3に接続される供給配管4と、接続配管3に、固定アダプタ5によって外嵌されるセンサ10と、容積式ポンプ2の駆動源(ソレノイド及びモータ)に応じて、センサ10の検知信号を処理する信号処理部15と、該信号処理部15に備えられた、駆動源に応じてセンサ10の検知信号の信号処理を行う複数の信号処理手段を切り換える切換スイッチ(図示せず)とで構成されている。   An abnormality detection device for a positive displacement pump according to an embodiment of the present invention will be described with reference to FIGS. 1 to 4 including a fluid conveyance device that conveys a fluid by the positive displacement pump. As a fluid, for example, a tank 1 in which a high concentration chemical solution is stored, a positive displacement pump 2 that sucks and discharges the fluid in the tank 1 and conveys the fluid to a supply pipe 4 through a connection pipe 3 described later, A connection pipe 3 connected to the discharge port of the positive displacement pump 2, a supply pipe 4 connected to the connection pipe 3, a sensor 10 fitted on the connection pipe 3 by a fixed adapter 5, and a positive displacement pump 2 The signal processing unit 15 that processes the detection signal of the sensor 10 according to the driving source (solenoid and motor), and the signal processing of the detection signal of the sensor 10 according to the driving source provided in the signal processing unit 15 It comprises a changeover switch (not shown) for switching a plurality of signal processing means to perform.

容積式ポンプ2は、図示していないが、ソレノイドを駆動源とし、該ソレノイドのオフ・オンによって、プランジャが往復動して、流体を吸引・吐出し、下流側の供給配管4に搬送するように構成されている。   Although not shown, the positive displacement pump 2 uses a solenoid as a drive source, and when the solenoid is turned off and on, the plunger reciprocates to suck and discharge the fluid and transport it to the supply pipe 4 on the downstream side. It is configured.

固定アダプタ5は、図2〜図4に示すように、角柱状の固定部材6と、該固定部材6に螺合するボルトBとを備えている。該固定部材6は、一側面の中央部から中心部にかけてボルトBのねじ孔7が形成される一方、該ねじ孔7に直交するように、該一面に隣接する他面の中央部から対向する面の中央部にかけて接続配管3の挿通孔8が形成されている。また、図4に示すように、ねじ孔7に対向する挿通孔8の内面に、センサ10をセットするための凹部8aが形成されている。そして、センサ10が凹部8aにセットされた状態においては、センサ10の検知面10aが挿通孔8の内面から臨出した状態、即ちセンサ10の検知面10aが接続配管3の外面に当接する状態にある。   As shown in FIGS. 2 to 4, the fixing adapter 5 includes a prismatic fixing member 6 and a bolt B that is screwed into the fixing member 6. The fixing member 6 is formed with a screw hole 7 of the bolt B from the central part of one side surface to the central part, and is opposed to the central part of the other surface adjacent to the one surface so as to be orthogonal to the screw hole 7. An insertion hole 8 of the connection pipe 3 is formed over the center of the surface. Further, as shown in FIG. 4, a recess 8 a for setting the sensor 10 is formed on the inner surface of the insertion hole 8 facing the screw hole 7. When the sensor 10 is set in the recess 8a, the detection surface 10a of the sensor 10 protrudes from the inner surface of the insertion hole 8, that is, the detection surface 10a of the sensor 10 contacts the outer surface of the connection pipe 3. It is in.

センサ10は、図2〜図4に示すように、直径5mm、厚さ1.5mmの円板状のピエゾ素子(圧電素子)で構成されている。そして、接続配管3に流れる流体の脈動を検知した検知信号を、後述する信号処理部15によって、所要の信号処理を行う。即ち、センサ10の検知信号を、ソレノイドのオン信号に同期させると共に、所定のレベルに設定される二つの閾値(設定レベル)と比較し、ポンプ2の正常・異常を判断する。この信号処理については、後から詳細に説明する。   As shown in FIGS. 2 to 4, the sensor 10 includes a disk-shaped piezoelectric element (piezoelectric element) having a diameter of 5 mm and a thickness of 1.5 mm. And the detection signal which detected the pulsation of the fluid which flows into the connection piping 3 performs required signal processing by the signal processing part 15 mentioned later. That is, the detection signal of the sensor 10 is synchronized with the solenoid ON signal and compared with two threshold values (set levels) set to a predetermined level to determine whether the pump 2 is normal or abnormal. This signal processing will be described in detail later.

信号処理部15は、ソレノイドを駆動源としてセンサ10の検知信号を処理する第一信号処理手段と、モータを駆動源としてセンサ10の検知信号を処理する第二信号処理手段と、ソレノイドまたはモータの駆動源に応じて、各信号処理手段を切り換える駆動源切換モードとを備えている。 The signal processing unit 15, a first signal processing means for processing a detection signal of the sensor 10 the solenoid as a drive source, a second signal processing means for processing a detection signal of the sensor 10 by using a motor as a drive source, a solenoid or motor And a drive source switching mode for switching each signal processing means according to the drive source.

第一信号処理手段は、ソレノイドのオン信号と、センサ10の検知信号とを同期させ、同期させた検知信号を、所定のレベルに設定された第一及び第二設定レベルと比較し、図5(a)に示すように、第一及び第二設定レベルの範囲に、検知信号のレベル(約2V)がある場合は、判定した検知信号を正常波形として、A/D変換、即ちパルス波形に変換し、該パルス波形を外部に常時出力する。また、図5(b)に示すように、検知信号のレベルが、第二設定レベルを超える(約5V)場合は、判定した検知信号を閉塞波形としてパルス波形に変換し、該パルス波形が連続(例えば、1〜5回)して検知された場合は、閉塞警報を出す。また、図5(c)に示すように、検知信号のレベルが、第一設定レベル未満(約0〜1V)の場合は、判定した検知信号をガスロック波形としてパルス波形に変換し、該パルス波形が所定回数連続して検知された場合は、ガスロック警報を出す。また、閉塞及びガスロック警報が出されている場合に、正常波形が連続して検知された場合は、各警報を停止するように構成されている。   The first signal processing means synchronizes the solenoid ON signal and the detection signal of the sensor 10, and compares the synchronized detection signal with the first and second set levels set to a predetermined level. As shown to (a), when the level of a detection signal (about 2V) exists in the range of a 1st and 2nd setting level, it makes A / D conversion, ie, a pulse waveform, using the determined detection signal as a normal waveform. The pulse waveform is constantly output to the outside. Further, as shown in FIG. 5B, when the level of the detection signal exceeds the second set level (about 5V), the determined detection signal is converted into a pulse waveform as a closed waveform, and the pulse waveform is continuous. If it is detected (for example, 1 to 5 times), a blockage alarm is issued. As shown in FIG. 5C, when the level of the detection signal is less than the first set level (about 0 to 1 V), the determined detection signal is converted into a pulse waveform as a gas lock waveform, and the pulse If the waveform is detected a predetermined number of times, a gas lock alarm is issued. Further, when the blockage and gas lock alarms are issued and the normal waveforms are continuously detected, each alarm is stopped.

第二信号処理手段は、図5(a)に示す正常波形が、所定時間(例えば1〜60秒)内、即ちポンプの運転サイクルの最低1サイクルを越える時間内に、に入力されなければ、ガスロック状態であると、判断してガスロック警報を発する。また、図5(b)に示す閉塞波形が、前記所定時間内に連続(例えば、1〜5回)して出力されると、閉塞状態であると判断して閉塞警報を発する。また、図5(c)に示すガスロック波形が、前記所定時間内に連続して出力されると、ガスロック状態であると判断してガスロック警報を発する。また、正常波形、閉塞波形、ガスロック波形のいずれも前記所定時間に出力されない場合は、ガスロック警報を発する。   If the normal waveform shown in FIG. 5 (a) is not input within a predetermined time (for example, 1 to 60 seconds), that is, within a time exceeding at least one cycle of the pump operation cycle, the second signal processing means, It judges that it is in a gas lock state, and issues a gas lock alarm. When the block waveform shown in FIG. 5B is output continuously (for example, 1 to 5 times) within the predetermined time, it is determined that the block is in the block state and a block alarm is issued. Further, when the gas lock waveform shown in FIG. 5C is continuously output within the predetermined time, it is determined that the gas lock state is set, and a gas lock alarm is issued. If none of the normal waveform, blockage waveform, and gas lock waveform is output during the predetermined time, a gas lock alarm is issued.

そして、センサ10を接続配管3に内装するには、予め、固定部材6の挿通孔8の凹部8aに、センサ10をセットすると共に、固定部材6のねじ孔7に、ボルトBを螺合させて仮締めしておき、固定部材6の挿通孔8に接続配管3を挿通する。その後、ボルトBを本締めすることで、接続配管3に固定部材6が固定されて、接続配管3の外面にセンサ10の検知面10aが圧接し、接続配管3を流れる流体の脈動がセンサ10によって検知される。   In order to install the sensor 10 in the connection pipe 3, the sensor 10 is set in advance in the recess 8 a of the insertion hole 8 of the fixing member 6, and the bolt B is screwed into the screw hole 7 of the fixing member 6. Then, the connection pipe 3 is inserted into the insertion hole 8 of the fixing member 6. Thereafter, the fastening member 6 is fixed to the connection pipe 3 by finally tightening the bolt B, the detection surface 10a of the sensor 10 is pressed against the outer surface of the connection pipe 3, and the pulsation of the fluid flowing through the connection pipe 3 is detected by the sensor 10. Detected by.

そして、容積式ポンプ2の駆動源に応じてセンサ10の検知信号を処理できるように、信号処理部15の駆動源切換モードを、切換スイッチによって、ソレノイドまたはモータのいずれかに切り換える。例えば、容積式ポンプ2の駆動源がソレノイドの場合、切換スイッチを「ソレノイド」に切り換える。その後、容積式ポンプ2を駆動させると、流体が接続配管3を通って供給配管4に搬送され、センサ10が接続配管3を介して脈動を検知する。具体的には、上述した信号処理部15の第一信号処理手段において、図5(a)〜(c)に示すように、ソレノイドにオン信号が入力されると、これに同期するように、センサ10の検知信号を出力させ、該検知信号が、第一及び第二設定レベルの範囲内であるか、高めに設定されている第二設定レベルを超えたか否か、低めに設定された第一設定レベルよりも低いか否かを判断して、ポンプ2の正常・異常を判断する。   Then, the drive source switching mode of the signal processing unit 15 is switched to either the solenoid or the motor by the changeover switch so that the detection signal of the sensor 10 can be processed according to the drive source of the positive displacement pump 2. For example, when the drive source of the positive displacement pump 2 is a solenoid, the changeover switch is switched to “solenoid”. Thereafter, when the positive displacement pump 2 is driven, the fluid is conveyed to the supply pipe 4 through the connection pipe 3, and the sensor 10 detects pulsation through the connection pipe 3. Specifically, in the first signal processing means of the signal processing unit 15 described above, when an ON signal is input to the solenoid, as shown in FIGS. The detection signal of the sensor 10 is output, and whether the detection signal is within the range of the first and second setting levels or exceeds the second setting level set higher, the first set to be lower It is determined whether or not the pump 2 is lower than one set level, and whether the pump 2 is normal or abnormal is determined.

また、容積式ポンプ2の駆動源がモータの場合、切換スイッチを「モータ」に切り換え、容積式ポンプ2を駆動させると、ポンプのオン信号の立上りから所定時間内、即ちポンプの運転サイクルの最低1サイクルを越える時間内に、信号処理部15の第二信号処理手段において、図5(a)に示す正常波形、図5(b)に示す閉塞波形、及び、図5(c)に示すガスロック波形が出力されるか否かで、ポンプ2の正常異常を判断する。   When the drive source of the positive displacement pump 2 is a motor, when the changeover switch is switched to “motor” and the positive displacement pump 2 is driven, within a predetermined time from the rise of the pump ON signal, that is, at the minimum of the operation cycle of the pump. Within the time exceeding one cycle, in the second signal processing means of the signal processing unit 15, the normal waveform shown in FIG. 5 (a), the closed waveform shown in FIG. 5 (b), and the gas shown in FIG. 5 (c). Whether the pump 2 is normal or not is determined based on whether or not a lock waveform is output.

なお、前記実施形態の場合、信号処理部15における複数の信号処理手段を駆動源に応じて切換スイッチ(手動)で切り換えるようにしたが、容積式ポンプの吸引・吐出に同期する同期信号の有無を検知して自動で切り換えるようにしてもよい。   In the case of the above-described embodiment, the plurality of signal processing means in the signal processing unit 15 are switched by the changeover switch (manual) according to the drive source, but the presence or absence of the synchronization signal synchronized with the suction / discharge of the positive displacement pump May be detected and switched automatically.

また、前記実施形態の場合、図5(a)に示す正常波形をカウントすることで、ポンプの異常を検知するようにしたが、搬送される流体の流量や、ポンプの運転時間を測定することもできるため、ポンプの流量計や寿命管理をする装置にも適用することができる。   In the case of the above embodiment, the abnormality of the pump is detected by counting the normal waveform shown in FIG. 5A, but the flow rate of the fluid to be conveyed and the operation time of the pump are measured. Therefore, it can also be applied to pump flowmeters and life management devices.

また、前記実施形態の場合、角柱状の固定部材6としたが、二つに分割された固定部材であってもよく、分割された固定部材によって、配管3を挟むように装着するようにしてもよい。   In the case of the above embodiment, the prismatic fixing member 6 is used. However, the fixing member may be divided into two, and the piping 3 may be sandwiched by the divided fixing member. Also good.

1…タンク、2…容積式ポンプ、3…接続配管、4…供給配管、5…固定アダプタ、6…固定部材、7…ねじ孔、8…挿通孔、8a…凹部、10…センサ、10a…センサの検知面、15…信号処理部、B…ボルト。   DESCRIPTION OF SYMBOLS 1 ... Tank, 2 ... Positive displacement pump, 3 ... Connection piping, 4 ... Supply piping, 5 ... Fixed adapter, 6 ... Fixing member, 7 ... Screw hole, 8 ... Insertion hole, 8a ... Recessed part, 10 ... Sensor, 10a ... Detection surface of sensor, 15 ... signal processing unit, B ... bolt.

Claims (1)

ソレノイドまたはモータのいずれかを駆動源とする容積式ポンプ(2)の異常を検出する容積式ポンプの異常検出装置において、
容積式ポンプ(2)の吐出口に接続される配管(3)に外嵌される、圧電素子で構成されるセンサ(10)を備え
ソレノイドを駆動源とした場合におけるセンサ(10)の検知信号を処理する第一信号処理手段と、モータを駆動源とした場合におけるセンサ(10)の検知信号を処理する第二信号処理手段とが、前記各駆動源に応じて切り換えできるように構成される信号処理部(15)を備えたことを特徴とする容積式ポンプの異常検出装置。
In an abnormality detection device for a positive displacement pump that detects an abnormality of a positive displacement pump (2) using either a solenoid or a motor as a drive source,
A sensor (10) composed of a piezoelectric element, fitted on a pipe (3) connected to the discharge port of the positive displacement pump (2) ;
First signal processing means for processing the detection signal of the sensor (10) when the solenoid is used as the drive source, and second signal processing means for processing the detection signal of the sensor (10) when the motor is used as the drive source An apparatus for detecting an abnormality of a positive displacement pump , comprising a signal processing unit (15) configured to be switchable according to each driving source .
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