JP5016570B2 - Clamp for vacuum chamber - Google Patents

Description

  The present invention relates to a clamp suitable for use in opening and closing a lid and a door of a vacuum chamber.

Vacuum chambers that can open and close lids and doors are well known in the art. For example, a vacuum heat treatment furnace disclosed in Japanese Utility Model Laid-Open No. 2-11153 (Patent Document 1), which is this type of vacuum chamber, can close the opening of the cylindrical main body container with a lid. The main body container and the lid are in a sealed state by tightening a bolt attached to the fastener.
Japanese Utility Model Publication No. 2-11153

  In the vacuum heat treatment furnace, when the degree of vacuum in the interior increases, the degree of close contact between the main body container and the lid body increases, but tightening with bolts may weaken and cause air leakage. Moreover, if it is going to avoid that, the operation | work which tightens a volt | bolt again will be needed.

  Therefore, an object of the present invention is to provide a vacuum chamber clamp capable of preventing air leakage in the vacuum chamber even when the vacuum degree of the vacuum chamber is increased.

  An object of the present invention for solving the above-mentioned problems includes a chamber part that can be connected to a vacuum source and has an opening for taking in and out an article, and a lid part that can open and close the opening. A clamp used to seal the opening of the vacuum chamber with the lid.

In this clamp, the present invention is characterized as follows. The clamp has a metal receiving part attached to the chamber part and a handle part attached to the lid part. The metal receiving portion includes a keeper attached to a peripheral wall forming the chamber portion, a screw that slidably penetrates a through hole in a top portion of the keeper, and a tip of the screw portion in the screw A working part that is screwed to a portion and is capable of being pressed in the direction from the inner side to the outer side of the chamber part and is biased by a spring in the direction from the outer side to the inner side ; The coil spring is located between the top portion of the keeper and the action portion and is in a stored state when the opening is closed by the lid portion . The handle portion includes a lever handle, the latch member, and a link member interposed therebetween. The lever handle pivots about the first pivot shaft fixed to the outer surface of the lid portion and repeats separation and approach to the outer surface under the action of a torsion coil spring. And the latch member is pivotable about the second pivot shaft fixed to the outer surface, and when the lever handle is pivoted so as to repeat the separation and the approach, the latch member is interposed via the link member. In order to repeat the separation with respect to the working site and the pressure contact against the urging force. When the vacuum chamber part is in a reduced pressure state and the lid part moves so as to approach the chamber part, the working part maintains the pressure contact of the latch member by the biasing force of the coil spring.

  In one embodiment of the present invention, the torsion coil spring is configured such that one end portion of the wire forming the torsion coil spring is fixed to the lever handle and the other end portion is fixed to the lid portion. ing.

  In the vacuum chamber clamp according to the present invention, when the lid portion closes the opening of the chamber portion and the lever handle is turned in a direction in which the lever handle approaches the outer surface of the lid portion, the lever handle is connected to the lever handle via the link member. The connected latch member is pressed against the working part of the metal receiving part attached to the chamber part in the direction from the inside to the outside of the chamber part. The action part is spring-biased in the direction from the outside to the inside of the chamber part. Therefore, when the degree of vacuum of the chamber part increases and the lid part moves closer to the chamber part, the movement is received. The action part of the part follows, and the latch member can maintain the pressure contact state with respect to the receiving part. As a result, there is no air leakage in the vacuum chamber.

  The details of the clamp according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a partially broken perspective view of a vacuum chamber 1 in which a clamp 16 is used. The vacuum chamber 1 has a chamber part 2 and a lid part 3, and the chamber part 2 has first, second, and third peripheral wall parts 6, 7, and 8, a top part 9, and a bottom part 10, An opening 11 is defined by the first and second peripheral wall portions 6, 7, the top portion 9, and the bottom portion 10. The third peripheral wall portion 8 is formed to be connectable to a vacuum source (not shown). The lid portion 3 is a laterally opened one that opens and closes with respect to the opening 11 for taking in and out the article, and the opened portion is indicated by a virtual line. Such a lid 3 is attached to the first peripheral wall 6 via a pair of hinges 12 and is closed to the second peripheral wall 7 via a clamp 16. The clamp 16 includes a metal receiving portion 21 attached to the second peripheral wall portion 7 and a handle portion 22 attached to the lid portion 3. When the lever handle 23 in the handle portion 22 is turned in the direction of arrow A, the handle portion 22 can move away from the receiving part 21 and open the lid part 3. The lid 3 can also be called a door.

  FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1 and shows a part of the second peripheral wall portion 7 and the lid portion 3 in addition to the internal structure of the clamp 16. The metal receiving portion 21 in the clamp 16 includes a keeper 26 attached to the second peripheral wall portion 7, a screw 27 that slidably penetrates the through hole 26 b in the top portion 26 a of the keeper 26 in the length direction thereof, and a screw 27 Is located between the top portion 26a and the action portion 28, and is stored in an energized state. And a coil spring 29. The handle portion 22 is attached to the lid portion 3 via a bracket 3 b that rises from the outer surface 3 a of the door 3, and includes a lever handle 23, a latch member 31, and a link member 32. The lever handle 23 has a gripping end portion 36 and a connecting end portion 37 connected to the link member 32, and an intermediate portion between the both end portions 36 and 37 is interposed via a first pivot shaft 38 fixed to the bracket 3 b. The gripping end 36 is pivotable in the direction of arrow A and the opposite direction B about the first pivot shaft 38. A torsion coil spring 39 is interposed between the lever handle 23 and the bracket 3b, and one end portion 39a of the wire forming the torsion coil spring 39 is attached to the pin 41 fixed to the bracket 3b. Is attached to a pin 42 fixed to the lever handle 23. In other words, one end portion 39 a is fixed to the lid portion 3 via the pin 41, and the other end portion 39 b is fixed to the lever handle 23 via the pin 42. The pin 42 in the state shown in the figure is below the line L connecting the center of the first pivot shaft 38 and the center of the pin 41, that is, closer to the chamber portion 2 than the line L, and the torsion coil spring 39 is a lever. The grip end portion 36 of the handle 23 is urged in the direction of arrow B. That is, the lever handle 23 is biased so as to approach the outer surface 3 a of the lid 3.

  The latch member 31 has a mounting end 43 and a working end 44. The attachment end 43 is rotatably attached to a second turning shaft 46 fixed to the bracket 3b, and the action end 44 can turn in a direction D opposite to the arrow C direction. The latch member 31 in the state shown in the figure turns in the direction of arrow C and presses against the action site 28 in the direction from the inside to the outside of the chamber portion 2 to compress the coil spring 29.

  The link member 32 has a first end 51 and a second end 52, and the first end 51 is rotatably attached to the connecting end 37 of the lever handle 23 via a pin 53. The second end 52 is rotatably attached to the latch member 31 via a pin 54. In the lid 3 that closes the opening 11 (see FIG. 1), the packing 56 inside the peripheral groove 3d formed on the inner surface 3c is in pressure contact with the second peripheral wall 7, and the vacuum chamber 1 is airtight. It is in.

  FIG. 3 is a view similar to FIG. 2 when the vacuum chamber 1 is connected to a vacuum source. In FIG. 2, when the vacuum chamber 1 is in a reduced pressure state, the packing 56 is deformed and the lid portion 3 approaches the chamber portion 2. Then, in the metal receiving part 21, the coil spring 29 in the stored state is extended, and the action part 28 is kept in pressure contact with the latch member 31, so that the action of the clamp 16 on the chamber part 2 and the lid part 3 is loosened. There is no.

  To open the lid 3 in FIG. 3, the lever handle 23 is turned in the direction of arrow A so as to be separated from the outer surface 3 a of the lid 3. Then, the latch member 31 connected to the lever handle 23 via the link member 32 pivots in the direction of the arrow D and disengages from the metal receiving portion 21, so that the lid portion 3 is opened using the pivoted lever handle 23 as it is. Can do. In the lever handle 23 (see FIG. 2) in the phantom line state, the pin 42 to which the end 39b of the torsion coil spring 39 is attached pivots about the first pivot shaft 38 and is above the line L. The torsion coil spring 39 biases the grip end 36 of the lever handle 23 in the direction of arrow A, that is, in the direction away from the outer surface 3a of the lid 3.

  FIG. 4 is a partially cutaway side view of the hinge 12 used in the vacuum chamber 1 of FIG. 1, but the chamber portion 2 and the lid portion 3 are indicated by phantom lines. The hinge 12 has a first blade 61 attached to the chamber portion 2 using bolts 78 and a second blade 62 attached to the lid portion 3 using bolts 79. These blades 61 and 62 are assembled so as to be rotatable with respect to each other via a shaft 64 extending in the vertical direction E in the figure. The shaft 64 is formed in the sleeve 66 with respect to the first blade 61, and the cross section having the long diameter in the lateral direction F in the drawing is accommodated in the insertion hole 67 having an oval shape, and the second blade 62 is in contact with the second blade 62. Is formed in the sleeve 69 and accommodated in an insertion hole (not shown) having a diameter slightly larger than that of the shaft 64. A pair of coil springs 71 extending in the lateral direction F are interposed between the first blade 61 and the second blade 62 in a compressed state. However, an intermediate member 72 is interposed between the coil spring 71 and the sleeve 69 for pressing the end of the coil spring 71 against the sleeve 69. Such a coil spring 71 acts so as to separate the first blade 61 and the second blade 62 in the lateral direction F, and a space P in the lateral direction F is formed in the sleeve 66. A space Q is formed between the blade 61 and the intermediate member 72. In such a hinge 12, when the vacuum chamber 1 is in a reduced pressure state and the lid 3 tries to move in a direction approaching the chamber 2, the lid 3 compresses the coil spring 71 via the second blade 62. By doing so, the spaces P and Q are shortened, and the second blade 62 is brought close to the first blade 61.

  The vacuum chamber 1 preferably uses such a hinge 12 in combination with the clamp 16 according to the present invention.

The perspective view of a vacuum chamber. II-II sectional view taken on the line of FIG. FIG. 3 is a view similar to FIG. 2 when the vacuum chamber is in a reduced pressure state. The partially broken side view of a hinge.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Chamber part 3 Lid part 3a Outer surface 11 Opening 16 Clamp 21 Receiving part 22 Handle part 23 Lever handle 28 Action part 31 Hatch member 32 Link member 38 First rotating shaft 39 Torsion coil spring 39a The other end 39b One end 46 Second turning axis

Claims (2)

A vacuum chamber including a chamber portion that is connectable to a vacuum source and has an opening for taking in and out articles, and a lid portion that can open and close the opening is used to seal the opening of the vacuum chamber with the lid portion. A clamp,
The clamp has a receiving part attached to the chamber part, and a handle part attached to the lid part,
The metal receiving portion includes a keeper attached to a peripheral wall forming the chamber portion, a screw that slidably penetrates a through hole in a top portion of the keeper, and a tip of the screw portion in the screw A working part that is screwed to a portion and is capable of being pressed in the direction from the inner side to the outer side of the chamber part and is biased by a spring in the direction from the outer side to the inner side ; A coil spring that is located between the top of the keeper and the working site and is in a stored state when the opening is closed by the lid ;
The handle portion includes a lever handle, the latch member, and a link member interposed therebetween, and the lever handle has a first pivot shaft fixed to the outer surface of the lid portion. And pivoting to the center to repeat separation and approach to the outer surface under the action of a torsion coil spring, and the latch member is centered on the second swivel shaft fixed to the outer surface When the lever handle is swung so as to repeat the separation and the approach, the lever handle is swung through the link member to resist the separation with respect to the working portion and the spring bias. all SANYO to repeat the pressure,
When said vacuum chamber portion the lid portion becomes decompressed state is moved so as to approach to the chamber part, characterized that you keep the pressure of the working site the latch member by the biasing force of the coil spring Said clamp.   2. The clamp according to claim 1, wherein one end of a wire forming the torsion coil spring is fixed to the lever handle, and the other end is fixed to the lid.

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