JP5008056B2 - Correction material applicator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the drying of a correcting material at the tip part of a needle tube and to efficiently carry out a defect correcting work. <P>SOLUTION: The correcting material applying apparatus for correcting a defective part by discharging the correcting material filled in the inside of the narrow long needle tube 1 to the defective part of a pattern formed on the surface of a base plate from the needle tube 1 having opened both sides and the tip part made narrow is provided with a cylindrical cover member 2 surrounding the outer peripheral surface of the needle tube 1, formed to move back and forth along the center axis of the needle tube 1 and having a tip part capable of holding the correcting material inside and a driving means for supporting the cover member 2 to move back and forth. When the correcting material is held inside the tip part 2a of the cover member 2 in a state that the cover member 2 is moved forward and the tip part 1a of the needle tube 1 is housed in the cover member 2, the tip part 1a of the needle tube 1 is covered with the correcting material. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention corrects the defective portion by discharging a correction material filled in the needle tube from an elongated needle tube having both ends opened and a thin tip portion formed in the defective portion of the pattern formed on the substrate surface. More particularly, the present invention relates to a correction material application apparatus that prevents the correction material in the needle tube from drying at the tip portion and attempts to perform defect correction work efficiently.

  2. Description of the Related Art Conventionally, for example, a correction material coating apparatus in a defect correction apparatus that corrects a defective portion of a color filter has a capillary with a tapered tip (hereinafter referred to as a “needle tube”) attached to a holding portion and is connected via a pipe. Then, a resist (hereinafter referred to as “correcting material”) stored in the tank is appropriately supplied from the tank connected to the holding portion to the needle tube, and a minute amount is transferred from the tapered tip portion of the needle tube to the defective portion. A defective portion is corrected by dropping a droplet (see, for example, Patent Document 1).

Another correction material application device includes a standby container in which a solvent of the same type as the solvent contained in the correction material is injected outside the coating area where the correction material is applied, and the needle tube is accommodated in the standby container when waiting for discharge. By waiting in the atmosphere, the correction material in the needle tube is prevented from drying (see, for example, Patent Document 2).
JP-A-9-54206 JP 2003-71363 A

  However, in such a conventional correction material application apparatus, the one described in Patent Document 1 is such that when the tip of the needle tube is exposed to air, the defect correction operation is temporarily suspended or the following During the waiting time until the defect correction work for the substrate is started, there is a possibility that the correction material at the tip of the needle tube dries and causes a discharge failure of the correction material.

  Moreover, the correction material coating apparatus described in the above-mentioned Patent Document 2 causes the needle tube to be out of the coating area each time when the defect correction work is temporarily interrupted or during the waiting time until the next substrate defect correction work is started. It was inefficient because it was necessary to evacuate and store in the standby container. In particular, when the size of the substrate is large, the evacuation distance becomes long, so that the evacuation and return time becomes long, and the efficiency of the defect correction work is poor.

  Accordingly, the present invention provides a correction material application apparatus that addresses such problems, prevents the correction material in the needle tube from drying at the tip, and efficiently performs defect correction work. With the goal.

In order to achieve the above object, the correction material coating apparatus according to the present invention fills a defective portion of a pattern formed on a substrate surface into an elongated needle tube having both ends open and a thin tip portion. a modified material application device to correct the defect portion by discharging been modified material, larger inner diameter than the outer diameter of the needle tube, the needle while the outer peripheral surface was Tsu circumference of the needle tube A cylindrical cover member formed so as to be capable of moving back and forth along the central axis of the tube and capable of holding a correction material in the distal end portion; and a drive means for supporting the cover member to advance and retract, and the cover member is advanced When the correction material is held in the tip of the cover member in a state where the tip of the needle tube is accommodated in the cover member, the tip of the needle tube is covered with the correction material. , Said D When discharging the modified material from the distal end of the dollar tube, it is intended to expose the tip of the needle tube retracting the cover member.

With this configuration, the inner diameter of the needle tube is larger than the outer diameter of the needle tube. the cylindrical cover member that can be advanced along the central axis of the needle tube at the drive means, to retain the modified material in the tip portion of the inner cover member in a state where the tip of the needle tube is accommodated in the cover member together, to prevent drying of the correction fluid of the needle tube tip I covering the tip of the needle tube in the modified material, when ejecting the modified material from the tip of the needle tube is retracted the cover member needle The correction material is discharged with the tip of the tube exposed .

  The cover member is formed with a thin tip. Thereby, the correction material is held at the tip of the cover member that is formed thin.

  Furthermore, the cover member is formed of a transparent glass tube. Thereby, a correction material is hold | maintained at the front-end | tip part of the cover member formed with the transparent glass tube.

  And the power source of the said drive means is an air cylinder. Accordingly, the driving means is driven using the air cylinder as a power source, and the cover member is advanced and retracted.

According to the first aspect of the present invention, the cover member is advanced, the correction member is held in the tip portion of the cover member in a state where the tip portion of the needle tube is accommodated in the cover member, and the needle is formed by the correction member. Since the tip of the tube is covered, the correction material in the needle tube can be prevented from drying at the tip. Further, in correcting the defective portion can retracting the cover member to expose the distal portion of the needle tube Runode, stably eject modified material in the defect portion from the tip of the needle tube. Therefore, each time the defect correction operation is suspended or the waiting time until the next substrate defect correction operation is started, the needle tube is withdrawn from the coating area and stored in a standby container filled with a solvent. Therefore, the defect can be repaired efficiently.

  Moreover, according to the invention which concerns on Claim 2, since the front-end | tip part of the cover member is formed thinly, it becomes easy to hold | maintain a correction material in a front-end | tip part.

  Further, according to the invention of claim 3, since the cover member is formed of a transparent glass tube, it is confirmed from the outside that the tip of the needle tube is in contact with the correction material inside the cover member. Can do. Therefore, drying of the correction material at the tip of the needle tube can be reliably prevented.

  According to the fourth aspect of the invention, since the cover member is advanced and retracted using the air cylinder as a power source, the structure of the driving means for advancing and retracting the cover member is simplified.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a partially sectional front view showing an embodiment of a correction material applying apparatus according to the present invention, and FIG. 2 is a side view of FIG. This correction material device corrects a defective portion by discharging a correction material to a defective portion of a pattern formed on the substrate surface. The needle tube 1, the cover member 2, the holding member 3, the driving means 4, Consists of.

  The needle tube 1 discharges an appropriate amount of a correction material to a defective portion of a pattern formed on a substrate. As shown in FIG. 3, an elongated transparent glass tube having both ends opened and a tip portion 1a formed thin. The correction material can be filled in the tube. The needle tube 1 is formed by, for example, heating a part of a glass tube having an outer diameter of about 1 mm and an inner diameter of about 0.3 mm, and pulling the glass tube in its length direction so that the tip portion is tapered. Thus, it is possible to easily form the tip 1a having an inner diameter of several μm.

  A cover member 2 is provided so as to surround the outer peripheral surface of the needle tube 1. The cover member 2 holds a correction material in the distal end portion 2a in a state where the distal end portion 1a of the needle tube 1 is accommodated therein, covers the distal end portion 1a of the needle tube 1 with the correction material, 1 to prevent the correction material in 1 from drying out at the tip 1a, and is formed in a cylindrical shape as shown in FIG. 3 so as to advance and retreat in the directions of arrows A and B along the central axis of the needle tube 1. ing. Specifically, for example, it is formed of a transparent glass tube having an outer diameter of about 1.7 mm and an inner diameter of 1.3 mm. As a result, the correction material can be held at the tip 2a of the cover member 2 by capillary force. In particular, if the tip 2a of the cover member 2 is narrowed, the correction material can be held more easily. Moreover, since the transparent glass tube is used, it can be confirmed from the outside that the tip 1a of the needle tube 1 is covered with the correction material in the cover member 2.

  A holding member 3 is provided to hold the rear end side of the needle tube 1. The holding member 3 enables the needle tube 1 to be attached to and detached from the main body of a defect correcting device (not shown).

  A driving means 4 is attached to a side surface of the holding member 3 by a stopper 5. The driving means 4 supports the cover member 2 and advances and retracts the cover member 2 along the central axis of the needle tube 1, and includes an air cylinder 6, a guide member 7, and guide pins 8.

  The air cylinder 6 serves as a power source for the driving means 4, and is composed of a cylindrical container 9 in which air is sealed and a piston 10 that reciprocates inside the container 9. A guide member 7 is attached to the tip of the piston 10. This guide member 7 supports the rear end 2b side of the cover member 2, and moves in the directions of arrows A and B in FIG. 1 or 2 in conjunction with the reciprocating motion of the piston 10. ing. Further, the guide member 7 is provided with a pair of guide pins 8 with the cover member 2 interposed therebetween. The guide pin 8 is for moving the guide member 7 smoothly, and is formed to extend in the directions of arrows A and B. The guide pin 8 can freely advance and retreat in the guide hole 11 provided in the holding member 3. It is said that.

Next, defect correction using the correction material applying apparatus configured as described above will be described with reference to FIG.
First, air pressure is applied to the piston 10 of the air cylinder 6 in the direction of arrow A shown in FIG. 1 to move the piston 10 in the direction of arrow A, and the cover member 2 is moved to the tip of the needle tube 1 as shown in FIG. Advance to the part 1a side. Then, the distal end 1 a side of the needle tube 1 is inserted into the correction material 13 stored in the container 12 in a state where the distal end portion 1 a of the needle tube is accommodated in the cover member 2. As a result, the correction material 13 is sucked up into the needle tube 1 and the cover member 2 by capillary action. In order to suck the correction material 13 into the needle tube 1, the rear end portion of the needle tube 1 may be set to a negative pressure.

  Next, as shown in FIG. 4B, the needle tube 1 is pulled up from the container 12 and held in a state where the tip portion 1 a of the needle tube 1 is accommodated inside the cover member 2. As a result, the distal end portion 1a of the needle tube 1 is covered with the correction material 13 held in the distal end portion 2a of the cover member 2, and the distal end portion 1a of the needle tube 1 is exposed to the air, so that the needle tube 1 The inside of the correction material 13 is dried and solidified at the front end portion 1a, and the problem that the correction material 13 cannot be discharged stably can be prevented.

  Next, when correcting the defective portion, the air pressure in the direction of arrow B shown in FIG. 1 is applied to the piston 10 of the air cylinder 6 to move the piston 10 in the direction of arrow B, and the cover member 2 is moved to the position shown in FIG. ) As shown in the arrow B direction. Thereby, the front-end | tip part 1a of the needle tube 1 is exposed. In this state, the tip 1a of the needle tube 1 is positioned at the defective portion of the pattern formed on the surface of the substrate 14, and compressed air is introduced into the rear end of the needle tube 1 so that the positive pressure in the direction of arrow C is applied to the correction material 13. And the correction material 13 is discharged from the tip end portion 1a to the defective portion to correct the defective portion.

  In the above embodiment, the case where only one needle tube 1 is attached to the holding member 3 has been described. However, the present invention is not limited to this, and a plurality of needle tubes 1 may be attached to the holding member 3. . In this case, a plurality of cover members 2 are supported by the guide members 7 corresponding to the needle tubes 1.

  In the above embodiment, the case where the driving means 4 for moving the cover member 2 back and forth is constituted by the air cylinder 6, but the present invention is not limited to this, and the driving means 4 may be an actuator or a solenoid. Good.

  Furthermore, although the case where the needle tube 1 and the cover member 2 are made of glass has been described in the above description, the needle tube 1 and the cover member 2 are not limited to glass but may be made of metal.

It is a partial cross section front view which shows embodiment of the correction material application | coating apparatus by this invention. It is a side view of FIG. It is sectional drawing which shows the needle tube and cover member of the said correction material application apparatus. It is explanatory drawing shown about the defect correction using the said correction material application apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Needle tube 1a ... Tip part of needle tube 2 ... Cover member 2a ... Tip part of cover member 4 ... Drive means 6 ... Air cylinder 13 ... Correction material 14 ... Substrate

Claims (4)

Correcting material application for correcting the defective portion by discharging the correcting material filled in the needle tube from an elongated needle tube having both ends opened and narrowed at the tip portion to the defective portion of the pattern formed on the substrate surface A device,
Larger inner diameter than the outer diameter of the needle tube, the needle tube outer peripheral surface is in a state Tsu circumference movably formed along the central axis of the needle tube may hold the modified material in the tip section A cylindrical cover member;
Drive means for supporting the cover member to advance and retreat, and
When the correction material is held in the distal end portion of the cover member in a state in which the cover member is advanced and the distal end portion of the needle tube is accommodated inside the cover member, the distal end portion of the needle tube is formed by the correction material. When the correction material is discharged from the tip of the needle tube, the cover member is retracted to expose the tip of the needle tube .   The correction material coating apparatus according to claim 1, wherein the cover member has a thin tip.   The correction material applying apparatus according to claim 1, wherein the cover member is formed of a transparent glass tube.   The correction material coating apparatus according to any one of claims 1 to 3, wherein a power source of the driving means is an air cylinder.

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