JP5006827B2 - Temperature control device - Google Patents

Description

  The present invention comprises a cooling means for cooling air taken in from a chamber by a refrigeration cycle for compressing, condensing, expanding and evaporating refrigerant, and a heating means for heating, and a temperature for supplying the temperature-controlled air to the chamber. More specifically, the present invention relates to a technology for realizing highly accurate temperature control, such as clean room temperature control.

  There exist patent document 1 and patent document 2 as the above temperature control apparatuses. Patent Document 1 discloses a precision temperature / humidity control device having a refrigeration cycle in which refrigerant circulates through a compressor 14, a condenser 15, an electronic expansion valve 17, and an evaporator 19. In Patent Document 1, a reheater 20 is installed on the outlet side of an evaporator 19 that cools the outside air OA. The reheater 20 is a part of the hot gas from the compressor 14. The cooled air is reheated, and the reheated air is humidified by the humidifier 21 to obtain conditioned air SA that is temperature and humidity controlled. At the time of this control, the blowing temperature control unit 40 that controls the diversion ratio of the three-way proportional control valve 16 based on the set temperature and the temperature of the conditioned air SA, and the humidification amount in the humidifier 21 are controlled from the set humidity and the humidity of the conditioned air. The blowout humidity control unit 41, the control output to the humidifier 21 and the humidification output set value SP6 so as to have a minimum humidification amount are input in advance, and based on this, the operating frequency of the inverter device 27, the electronic expansion valve The power consumption is reduced by providing the humidification output control part 45 for producing the control output which controls the opening degree of 17 and the amount of cooling water to the condenser 15.

  Patent Document 2 discloses precise temperature control including an auxiliary electric heater 50 in addition to the configuration common to Patent Document 1. The auxiliary electric heater 50 is arranged on the upstream side in the direction of taking air into the evaporator 19. When the deviation between the outside air temperature and the set temperature is large, the auxiliary electric heater 50 heats the air to Heating is performed by the electric heater 50 and the reheater 20, and accurate temperature control can be performed satisfactorily even in a situation where the deviation between the outside air temperature and the set temperature is greatly different.

JP 2003-302088 A (paragraph numbers [0018] to [0040], FIG. 3) Japanese Patent Laying-Open No. 2004-170044 (FIG. 3)

  For example, when starting temperature control of the chamber in a situation where the temperature of the chamber is equal to the outside temperature, such as immediately after maintenance, abrupt temperature changes are avoided and heat storage in the chamber is completely removed. For this purpose, it is a general practice to control the temperature of the chamber gradually over a period of about one week. This operation of gradually adjusting the temperature over time is called aging.

  When performing this aging, it is important to measure the temperature of the chamber and perform temperature control that feeds back the temperature of the chamber so that the measured value does not fluctuate greatly within a unit time. As one form of this temperature control, a plurality of control target values are set by dividing the deviation between the temperature control target value of the chamber and the temperature of the chamber at the start of aging, for example, in units of 1 ° C. It is also conceivable to perform control in such a manner that the control target at the time of aging is sequentially changed from a control target value having a large difference from the adjustment target value to a control target having a small difference.

  However, even when temperature control is performed in such a manner that the control target is changed in this way, depending on the heat capacity of the equipment installed in the chamber, the control target may be reached in a relatively short time, and as a result, suddenly There was room for improvement because it was thought that the temperature would change significantly.

  An object of the present invention is to rationally configure a temperature control device that smoothly shifts the temperature of a chamber to a temperature control target value by aging.

A feature of the present invention is that it includes a cooling means for cooling air taken from the chamber by a refrigeration cycle for compressing, condensing, expanding and evaporating refrigerant, and a heating means for heating, and supplies the temperature-controlled air to the chamber A temperature control device,
Aging control is performed when the deviation between the internal temperature of the chamber and the temperature control target value exceeds a specified value, and control means for performing high-precision temperature control when the deviation does not exceed the specified value,
In the aging control, the control means sets a target value for aging control that is close to the temperature adjustment target value by a set value based on a measurement value of a chamber temperature sensor that measures the temperature in the chamber. The temperature change rate is obtained from the measured value of the chamber temperature sensor at the start time of the temperature control and the set time lapse time,
When the temperature change rate is less than the reference value, a standard temperature adjustment step is performed in which a target value is set based on the set value so as to maintain the temperature change rate. In the case of exceeding, the correction temperature adjustment step in which the target value at which the temperature change rate is less than the reference value is newly set is executed.

  According to this configuration, when performing the aging control, it is possible to obtain the temperature change rate reflecting the heat capacity of the device installed in the chamber by performing the temperature control based on the target value of the aging control. . Next, when the rate of temperature change is less than the reference value, it does not cause a sudden temperature change, so the target value for aging control is set based on the set value used when setting the initial target. By executing the standard temperature adjustment step, the temperature of the chamber can be brought close to the temperature adjustment target value. Also, if the rate of temperature change exceeds the reference value, it will cause a rapid temperature change, so a new target value for aging control is set based on a value smaller than the set value used when setting the initial target. By executing the correction temperature adjustment step, the temperature of the chamber can be brought close to the temperature adjustment target value. As a result, a temperature control device that smoothly shifts the temperature of the chamber to the temperature control target value by aging is configured.

  In the present invention, after the difference between the measured value of the chamber temperature sensor and the temperature adjustment target value reaches less than a preset threshold value, the control means sets the target value of the aging control to control the temperature control May be started, and the control may be shifted to the control for obtaining the temperature change rate. According to this, the timing for executing the control for obtaining the temperature change rate can be appropriately set in relation to the temperature adjustment target value.

  In the present invention, the control means is a timing at which a set time has elapsed in one of the standard temperature adjustment steps, and the temperature change rate is determined from the measured value of the chamber temperature sensor at the start of the standard temperature adjustment step and after the set time has elapsed. If it is determined that the temperature change rate exceeds the reference value, a correction value is set according to the temperature change rate, and a target value for aging control is set based on the correction value. And you may transfer to the said correction | amendment temperature control step. According to this, even when the standard temperature adjustment step is executed for a set time, if the temperature change rate of the chamber is high, it is possible to shift to the correction temperature adjustment step corresponding to this temperature change rate.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Basic configuration of temperature control device]
As shown in FIG. 1 and FIG. 2, by supplying air to the chamber R after adjusting the temperature by sucking the air in the chamber R into the facility equipped with the chamber R which is a clean room to be maintained at a constant temperature. A temperature control device is configured to perform control to circulate air and maintain the temperature of the chamber R at a target temperature (temperature control target value, for example, 23 ° C.).

  Inside the chamber R, a device B constituting a semiconductor production line or the like that requires precise temperature control is installed. The side wall 1 of the chamber R is formed of a wall material having excellent heat insulation for temperature control, and the ceiling wall 2 is a wall material having a structure having a mesh or a slit that allows air to pass therethrough for air circulation. A smooth floor surface 3 is formed. One of the plurality of side walls 1 is formed with an intake opening 1A for sending air to the temperature control system. In addition, you may form the path | route for discharging | emitting air from this chamber R below the floor surface 3, and in this case, many opening through which air distribute | circulates is formed in the floor surface 3. FIG.

  The temperature control device cools the air sucked from the intake opening 1A through the introduction space 5 by the cooling unit C as a cooling means and then heats it by the first heating unit D and is heated by the first heating unit D. Air is sent to the fan 7 through the duct 6, and then the air sent out from the fan 7 is heated by the second heating unit E and supplied to the upper space 9 of the chamber R through the air passage 8, and the air filter 10. Is provided with a circulation system for removing dust and supplying air from the ceiling wall 2 of the chamber R into the chamber R. The first heating part D and the second heating part E constitute the heating means of the present invention.

  This temperature control device includes a chamber temperature sensor TS3 that measures the internal temperature of the device B installed in the chamber R, a blower temperature sensor TS1 that measures the temperature of air sent from the fan 7, and a ceiling wall 2. A blowout temperature sensor TS2 that measures the temperature of the air supplied into the chamber is provided. These sensors use a thermistor or the like that acquires the air temperature as an electrical signal.

  Further, the temperature control device is based on the main control unit HR3, the first control unit HR1 that controls the first heating unit D based on the measurement value of the blower temperature sensor TS1, and the measurement value of the blowout unit temperature sensor TS2. And a second control unit HR2 that controls the second heating unit E.

  The main control unit HR3, the first control unit HR1, and the second control unit HR2 have the function of independently controlling the temperature by outputting a control signal to the controlled object. A signal system to be performed is formed. And the temperature control is performed by giving the information of the program set in the main control unit HR3 to the first control unit HR1 and the second control unit HR2. By this temperature control, highly accurate temperature management is realized in which the internal temperature of the chamber R falls within a range of ± 0.05 ° C. with respect to the temperature control target value.

[Temperature control system]
The cooling unit C includes a refrigeration cycle that cools air using a refrigerant. In other words, the refrigerant compressed by the compressor 12 is sequentially sent to the condenser 14 and the expansion valve 15 arranged along the main flow path Lm, and then sent to the evaporator 16 constituting the cooling unit C. The refrigeration cycle is configured to return to the compressor 12. Further, a part of the refrigerant compressed by the compressor 12 is diverted to the branch flow path Lb and sent to the reheater 17 constituting the first heating unit D, and the expansion valve of the main flow path Lm through the expansion valve 13. 15 and the evaporator 16.

  In addition, you may comprise the 1st heating part D so that air may be heated with an electric heater. 1 and 2, the expansion valve 13, the condenser 14, and the expansion valve 15 are shown as the refrigerant processing unit F.

  The compressor 12 functions as a pump that compresses the refrigerant, and a three-phase motor is used as the electric motor M that drives the compressor 12.

The expansion valve 13 has a function of allowing the refrigerant to expand, adjusts the flow rate of the refrigerant by operating an actuator such as an electromagnetic valve, and further adjusts the flow ratio of the refrigerant in the branch flow path Lb to the main flow path Lm. Adjustment is performed electromagnetically.
The condenser 14 includes a heat exchange system that cools and compresses the compressed refrigerant with cooling water or outside air. The expansion valve 15 has a function of allowing expansion of the liquefied refrigerant, and is configured to be able to adjust the flow rate of the refrigerant by operating an actuator such as an electromagnetic valve.

  The cooling unit C has a structure including a large number of fins that expand the contact area with air in the evaporator 16. As described above, the first heating unit D has a structure including a large number of fins that expand the contact area with air in the reheater 17 so that the latent heat of the refrigerant sent to the main flow path Lm is given to the air. Yes. The cooling unit C shows a general configuration, and any other configuration may be used as long as it has a cooling function.

  As the fan 7, a sirocco fan driven by an electric motor is used. The second heating unit E includes an electric heater 18 that generates heat when energized.

  The main control unit HR3 includes a motor control circuit (not shown) for controlling the electric motor M and a valve control circuit (not shown) for controlling the expansion valve 15, and controls the temperature of the chamber R. High-precision temperature control unit 21 for maintaining the target value with high accuracy, and aging that realizes aging control in a situation where the deviation between the temperature control target value and the measured value measured by the chamber temperature sensor TS3 exceeds a specified value And a control unit 22. The high-precision temperature control unit 21 and the aging control unit 22 are configured by software, but may be configured by a combination of software and hardware.

  The aging control unit 22 is assumed in advance as an initial control module 22a that performs initial control of aging control, a temperature change rate acquisition module 22b that acquires a temperature change rate of the chamber R during aging control, and a target value for aging control. A standard temperature control module 22c that performs temperature control by setting a value, and a corrected temperature control module 22d that performs temperature control by setting a corrected value as a target value for aging control. The control mode of the aging control unit 22 will be described later.

  The first control unit HR1 includes a valve control circuit (not shown) for controlling the expansion valve 13 in order to control the temperature of the first heating unit D based on the measured value of the blower temperature sensor TS1, and this Software for realizing control of the first heating unit D is provided.

  The second control unit HR2 controls the power supplied to the electric heater 18 of the second heating unit E in order to control the temperature of the second heating unit E based on the measurement value of the blowing unit temperature sensor TS2. (Not shown) and software for realizing the control of the second heating unit E.

  In the present embodiment, a control unit that realizes temperature control is configured by combining the main control unit HR3, the first control unit HR1, and the second control unit HR2.

[Control form]
In this temperature control apparatus, when the deviation between the measured value PV3 measured by the chamber temperature sensor TS3 and the temperature control target value SP3 as the control target in the chamber R exceeds a specified value, aging control is performed, and the deviation is specified. If the value does not exceed the value, the control mode of the control means is set so as to perform the high-precision temperature control, and this control mode can be shown as the flowchart of FIG. In addition, the correspondence relationship between the flowchart and the codes used in the specification is listed in FIG.

  The temperature control described below sets a control target value to be measured by the blower temperature sensor TS1 and the blowout temperature sensor TS2 with reference to the target value (SP), and these blower temperature sensors TS1. The cooling unit C, the first heating unit D, the second heating unit E, the main control unit HR3 corresponding to them, and the first control unit The control is performed by the HR1 and the second control unit HR2. That is, by performing the temperature control, it is possible to control the temperature PV3 of the chamber temperature sensor TS3 to be balanced at the target value SP by adjusting the temperature of the air supplied to the chamber R.

  The meaning of the control to be balanced in these controls does not indicate the control in which the control target (target value SP) and the sensor measurement value (measurement value PV3, etc.) completely coincide with each other. Control that increases or decreases the temperature of the air so that the measured values of the sensor are included in the temperature range set on the high temperature side and the low temperature side. The equilibrium can also be described as a state in which the absolute value of the deviation between the control target and the measured value reaches less than a predetermined value.

  When the temperature control is started, the temperature control target value SP3 as a control target in the chamber R and the measured value PV3 measured by the chamber temperature sensor TS3 are acquired, and the temperature controlled target value SP3 and the measured value PV3 are acquired. The absolute value of the deviation is acquired and compared with the specified value S ° C.

  When the absolute value of the deviation between the temperature control target value SP3 and the measured value PV3 exceeds the specified value S ° C. by this comparison, the aging control is performed to shift the temperature of the chamber R toward the temperature control target value SP3 over a set time. (Aging control unit 22 executes). On the contrary, when the absolute value of the deviation between the temperature adjustment target value SP3 and the measured value PV3 is less than the specified value S ° C., the measured value PV3 of the chamber temperature sensor TS3 is balanced with the temperature adjustment target value SP3. High-precision temperature control is performed (steps # 101 and # 115 and executed by the high-precision temperature control unit 21).

  In the aging control, the temperature adjustment control is started by setting a value close to the temperature adjustment target value SP3 by a predetermined value from the measurement value PV3 of the chamber temperature sensor TS3 as the target value SP of the aging control. The temperature control is continued until the absolute value of the difference from the measured value PV3 of the chamber temperature sensor TS3 is reduced below the threshold T ° C. (Steps # 102 and # 103). The aging control at this stage is an aging control at a preparation stage before the temperature change rate is obtained and controlled.

  The initial temperature control of the aging control is realized by the initial control module 22a. Further, the absolute value of the difference between the target value SP of the aging control and the measured value PV3 of the chamber temperature sensor TS3 is acquired, and the temperature control is performed until the absolute value is reduced below the threshold T ° C. 2 The temperature of the air supply system including the air passage 8, the upper space 9, and the air filter 10 is shifted from the heating section E to a temperature that approximates the target value SP, and the heat storage in this air supply system is removed, The influence on the control of the heat capacity of the supply system will be reduced.

  Next, after newly setting a target value SP obtained by bringing the target value SP closer to the temperature control target value SP3 by the shift value U ° C., temperature control (standard temperature control step) is executed until V time elapses. (Steps # 104 to # 106).

  This standard temperature adjustment step is realized by the standard temperature adjustment control module 22c. In this standard temperature adjustment step, the measured value PV3 of the chamber temperature sensor TS3 at the start of the standard temperature adjustment step and the measured value PV3 ′ of the chamber temperature sensor TS3 at the end of the standard temperature adjustment step (at the time V time has elapsed). The absolute value of the difference (corresponding to the temperature change rate) is acquired and compared with the reference value W (step # 107).

  The process of step # 107 is realized by the temperature change rate acquisition module 22b. When the absolute value of the difference between the measured value PV3 and the measured value PV3 ′ is less than the reference value W by this comparison, the temperature change rate (temperature gradient) is lower than the reference value W (the temperature shift is performed at a low speed). Therefore, unless the target value SP approximates the temperature adjustment target value SP3 (step # 108), the temperature adjustment control of the standard temperature adjustment step is resumed from the step # 104.

  This standard temperature adjustment step is performed repeatedly, and realizes temperature control that shifts the temperature of the chamber R by less than 0.2 ° C. every 60 minutes. As shown in FIG. 4, when the shift value U is given a value of 1.0 ° C. and the reference value W is given 0.2 ° C., the loop of the standard temperature adjustment step is repeated five times or more. As a result, the temperature of the chamber R can be raised by 1 ° C.

  For this reason, in step # 104, the target value SP of the aging control is brought close to the temperature control target value SP3 by the shift value U ° C. when the process passing through the loop of the standard temperature control step is repeated five times or more. The target value SP is updated.

  Incidentally, the process of updating the target value SP so as to bring the target value SP closer to the temperature adjustment target value SP3 by the shift value U ° C. in step # 104 is not performed based on the number of times of passing through the loop. For example, the processing form may be set so that the target value SP is updated when the difference between the value of PV3 ′ and the target value SP approaches less than the set value.

  When the standard temperature adjustment step is repeatedly performed and the target value SP is updated, it is determined in step # 108 that the target value SP has reached a value that approximates the temperature control target value SP3. Specifically, when the absolute value of the difference between the target value SP and the temperature adjustment target value SP3 reaches less than the reference value Y ° C., the process shifts to high-precision temperature adjustment control (# 113 step).

  Contrary to the above, when the absolute value of the difference between the measured value PV3 and the measured value PV3 ′ exceeds the reference value W, it means that the temperature change is performed rapidly. Instead of the set target value SP, a value close to the temperature adjustment target value by a correction shift value X ° C. that is smaller than the shift value U ° C. with respect to the target value SP before the shift value U ° C. is given. After setting the target value SP, temperature control (corrected temperature control step) is executed until V time elapses (steps # 109 to # 111).

  This correction temperature adjustment step is executed by the correction temperature adjustment control module 22d. Further, the correction shift value X is set based on the absolute value of the difference between the measurement value PV3 and the measurement value PV3 'acquired in step # 107. That is, this absolute value indicates a temperature change rate (temperature gradient), and this temperature change rate reflects the heat capacity of the chamber R. For this reason, the larger the temperature change rate, the smaller the shift value U ° C. is given as the correction shift value X that is inversely proportional to the temperature change rate.

  Further, when the target value SP is set based on the correction shift value X, the temperature change of the chamber R is suppressed, and as a result, the temperature of the chamber R after the lapse of V time in the correction temperature adjustment step, The correction shift value X is set so that the absolute value of the difference from the temperature of the chamber R at the start of the correction temperature adjustment step does not exceed 0.2 ° C.

  If the absolute value of the difference between the temperature adjustment target value SP3 and the target value SP is less than the reference value Y ° C. when the V time has elapsed in the correction temperature adjustment step, this correction temperature adjustment step is repeated. (Step # 112).

  This correction temperature adjustment step is performed repeatedly, and realizes temperature adjustment control for shifting the temperature of the chamber R by a value less than 0.2 ° C. every 60 minutes. Accordingly, in step # 109, as in the case of step # 104 described above, when the process of passing through the loop of the correction temperature adjustment step is repeated a set number of times, the target value SP of aging control is set to the temperature adjustment target value by the correction shift value X ° C. The target value SP is updated so as to approach SP3.

  Then, when the target value SP reaches a situation that approximates the temperature control target value SP3, specifically, the absolute value of the difference between the target value SP and the temperature control target value SP3 has reached less than the reference value Y ° C. If it is determined in step # 112, the process shifts to high-precision temperature control.

  In the high-accuracy temperature control (# 113 step), a temperature slightly lower than the temperature adjustment target value SP3 is set as the blower target value SP1 in the measurement portion of the blower temperature sensor TS1, and the temperature of the blower temperature sensor TS1 is set. Control for balancing the measured value PV1 and the blower target value SP1 is executed. Further, the temperature adjustment target value SP3 is set as the blowout part target value SP2 in the measurement part of the blowout part temperature sensor TS2, and the control for balancing the measurement value PV2 of the blowout part temperature sensor TS2 and the blowout part target value SP2 is executed. Is done. Furthermore, the temperature control target value SP3 at the measurement part of the chamber temperature sensor TS3 is set, and the temperature control for balancing the measurement value PV3 of the chamber temperature sensor TS3 and the temperature control target value SP3 is executed, and this highly accurate temperature control is performed. Is continued until reset (step # 114).

[Another embodiment of control]
(A) In the loop of steps # 104 to # 107 in the temperature control, since control for obtaining a temperature change rate (temperature gradient) less than a set value is performed, the target value SP of aging control is set. As a shift value U for setting, for example, a value approaching the temperature adjustment target value SP3 by 0.2 ° C. is given, and then it is determined that the shift has been performed by 0.2 ° C. over a set time. Returning to the processing of step # 104, the processing mode may be set so that the target value SP of aging control is given a value that approaches the temperature adjustment target value SP3 by 0.2 ° C. in step # 104.

  That is, when passing through the # 104 step, the control value loop is always updated so that the target value SP of the aging control is updated by the shift value U, and the process returns to the # 104 step when the temperature of the chamber R is shifted by the shift value U. Is set.

  In the case where the control form is set in this way, the target value SP set in the step # 104 has a smaller shift amount of the target value SP than the previously set target value SP, which causes a sudden temperature change. Absent. Further, when passing through the step # 104 in the control loop, a necessary temperature shift is performed, so that a highly accurate temperature increase is realized.

  Even when the processing mode is set as in this alternative embodiment, the temperature change rate is acquired in the loop of steps # 104 to # 107, and the temperature change rate thus acquired exceeds the reference value W. Therefore, the control to shift to the correction temperature control is necessary.

(B) In the loop of steps # 109 to # 112 in the temperature control, control for obtaining a temperature change rate (temperature gradient) less than a set value is performed. Accordingly, in this control as well, as in the other embodiment of (a), the control mode is set so that the aging control target value SP is always updated by the correction shift value X when step # 109 is passed. Also good.

(C) At the start of temperature control, when it is clear that the deviation between the internal temperature of the chamber R and the temperature control target value SP3 exceeds the specified value, instead of the process of step # 101, The processing form is set so that the aging control is started by an operation such as an operator manually operating the switch.

(D) In the high-precision temperature control, the temperature control target value SP3 in the measurement part of the chamber temperature sensor TS3 is a fixed value, but the air supply part target value SP1 or the blow-out part in the measurement part of the air blower temperature sensor TS1. The blower target value SP2 at the measurement site of the temperature sensor TS2 may be set to any value as long as the blower target value SP1 is lower than the blower target value SP2 and is a value that realizes efficient control. Good.

[Example effects]
Thus, as in the case where the temperature of the chamber R is controlled from a state where the temperature of the chamber R is equal to the external air temperature, the temperature adjustment target value SP3 (target temperature of the chamber R) of the measurement part of the chamber temperature sensor TS3 and When performing aging control from a situation where the temperature difference from the measured value PV3 of the chamber temperature sensor TS3 is large, the temperature of the system for supplying air for temperature control to the chamber R first by the control of the initial control module 22a. Is set to a value close to the temperature control target value SP3, the effect of the heat capacity of the air supply system can be eliminated in the subsequent temperature control.

  Next, under the control of the standard temperature control module 22c, the temperature control can be performed by the standard temperature control step of shifting the temperature of the chamber R in a state where the target value SP of the aging control is set based on the shift value U. Further, the temperature change rate (temperature gradient) can be acquired by controlling the temperature change rate acquisition module 22b during temperature adjustment in the standard temperature adjustment step.

  Since this temperature change rate reflects the heat capacity of the chamber R, when this temperature change rate is less than a desired value, the standard temperature adjustment step can be executed while updating the target value SP. On the contrary, if the temperature change rate exceeds a desired value, a new target value SP is set based on the correction shift value X, and a correction temperature adjustment step for setting the temperature change rate to a desired value is executed. it can. After that, since the control shifts to high-precision temperature control, the temperature is shifted at a slow speed while suppressing a rapid temperature change in the chamber R, so that the temperature does not adversely affect the device B installed in the chamber R. Key control is realized.

Diagram showing chamber and temperature controller Diagram showing refrigeration cycle and control configuration Flow chart of temperature control A diagram that lists the codes used for control

Explanation of symbols

C Cooling means (cooling part)
X Correction value (correction shift value)
R chamber T threshold value W reference value SP target value SP3 temperature control target value HR3 control means (main control unit HR3)
TS2 Outlet temperature sensor TS3 Chamber temperature sensor

Claims (3)

A temperature control device that includes a cooling unit that cools air taken from a chamber by a refrigeration cycle that compresses, condenses, expands, and evaporates a refrigerant, and a heating unit that heats the air. And
Aging control is performed when the deviation between the internal temperature of the chamber and the temperature control target value exceeds a specified value, and control means for performing high-precision temperature control when the deviation does not exceed the specified value,
In the aging control, the control means sets a target value for aging control that is close to the temperature adjustment target value by a set value based on a measurement value of a chamber temperature sensor that measures the temperature in the chamber. The temperature change rate is obtained from the measured value of the chamber temperature sensor at the start time of the temperature control and the set time lapse time,
When the temperature change rate is less than the reference value, a standard temperature adjustment step is performed in which a target value is set based on the set value so as to maintain the temperature change rate. A temperature adjustment device that executes a correction temperature adjustment step in which a target value at which the temperature change rate is less than the reference value is newly set.   After the difference between the measured value of the chamber temperature sensor and the temperature adjustment target value reaches less than a preset threshold, the control means sets the target value of the aging control and starts temperature adjustment control. The temperature control device according to claim 1, wherein the control proceeds to control for obtaining the temperature change rate.   The control means obtains the temperature change rate from the measured value of the chamber temperature sensor at the start of the standard temperature adjustment step and after the set time has elapsed at the timing when the set time has elapsed in one standard temperature adjustment step, When it is determined that the temperature change rate exceeds the reference value, a correction value is set corresponding to the temperature change rate, and a target value for aging control is set based on the correction value, and the correction is performed. The temperature control apparatus of Claim 1 or 2 which transfers to a temperature control step.

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