JP5006246B2 - Environmental test equipment - Google Patents

Description

  The present invention relates to an environmental test apparatus.

2. Description of the Related Art Conventionally, an environmental test apparatus is known that can apply a thermal load to a sample by supplying hot air or cold air into a test chamber in which the sample is stored. As an environmental test apparatus of this type, as disclosed in Patent Document 1 below, a pressure adjustment chamber is provided so as to communicate with the test chamber to suppress pressure fluctuations in the test chamber, so that outside air flows into the test chamber. What is known to prevent this is known. Specifically, a pressure regulation chamber formed in a bag shape with polyethylene thin film etc. is provided so as to communicate with the test chamber, and cooling air is cooled by supplying cold air from the low temperature chamber during the low temperature test. When contracted, air in the pressure regulation chamber is introduced into the test chamber. As a result, pressure fluctuations in the test chamber are alleviated, and moisture from the outside air is prevented from flowing into the test chamber and causing frost formation.
Japanese Patent No. 397224

  However, in the environmental test apparatus disclosed in Patent Document 1, the pressure adjustment chamber only expands and contracts according to the pressure change in the test chamber, and the expansion and contraction state cannot be arbitrarily controlled. For this reason, when an environmental test apparatus starts a test from a low temperature test, there is a possibility that outside air including moisture may flow into the test chamber.

  In other words, if the pressure adjustment chamber is contracted when the test is started from the low temperature test in the environmental test apparatus, air is introduced from the pressure adjustment chamber to the test chamber when the air in the test chamber is cooled and contracts. The outside air containing moisture will flow into the test chamber.

  The present invention has been made in order to solve the above-described problems, and its purpose is to provide outside air containing moisture in a closed space inside a closed space constituting part constituting a test tank when a test is started from a low temperature test. It is an object to provide an environmental test apparatus capable of reliably suppressing supply of water.

In order to achieve the above object, an environmental test apparatus according to the present invention includes a closed space component having a closed space in which pressure varies , and at least one of the surroundings of a buffer space in which air can flow between the closed space. A pressure adjusting unit that causes air to flow between the closed space and the buffer space while expanding and contracting the airbag according to a pressure change in the closed space, and the buffer space. An air filling mechanism connected to an air flow path between the closed space and an air filling mechanism for filling the buffer space with dry air, and an opening for flowing air from the air filling mechanism to the buffer space through the flow path. a position to block the flow of air into the flow passage from the air charging mechanism, and a possible changeover valve switchable between a closed position for circulating air between said closed space and said buffer space, When the test is started from a low-temperature test in which the closed space is cooled, the switching valve enters the open position before the low-temperature test is started and allows dry air from the air filling mechanism to pass through the flow passage. While flowing to the buffer space, the flow is switched to the closed position after the start of the low temperature test to block the flow of air from the air filling mechanism to the flow passage .

In this environmental test apparatus, when the test is started from the low temperature test, the air can be inflated in advance by filling the buffer space with air dried by an air filling mechanism. Therefore, when the air is contracted in the closed space by the closed space being started cold test is cooled, air airbag is dried in the buffer space while shrinkage is supplied to the closed space, closed space pressure fluctuations definitive in is relaxed. As a result, it is possible that the outside air containing moisture in a closed space inside the closed space forming portion to reliably prevented from being supplied when the start of the test from the cold test in the environment test apparatus. In addition, in this environmental test apparatus, air can be flowed into the buffer space before the low temperature test is started and the buffer space can be filled with dry air. By switching the switching valve so as to circulate, it is possible to prevent an unnecessary air flow from being generated on the closed space side.

  In the environmental test apparatus, the air filling mechanism includes an air supply unit that supplies air to the buffer space, and a dehumidifying unit that removes moisture in the air supplied from the air supply unit to the buffer space. Is preferred.

  According to this configuration, it is possible to configure a specific structure for filling the buffer space with dry air by the air filling mechanism.

In the configuration in which the air filling mechanism includes air supply means, the air supply means preferably has not only a function of supplying air to the buffer space but also a function of sucking air from the buffer space. In this case, when the test is started from a high temperature test in which the temperature of the closed space is increased, the air supply means preferably sucks air from the buffer space before the start of the high temperature test.

  If comprised in this way, when starting a test from a high temperature test, for example, air can be previously sucked from the buffer space. Thereby, the air expanded by the temperature rise of the closed space during the high temperature test can be easily received in the buffer space.

  The environmental test apparatus preferably includes a pressurizing mechanism for pressurizing the airbag so as to contract the airbag.

  If comprised in this way, an air bag can be shrunk by a pressurization mechanism, and the dry air in a buffer space can be pushed away to the closed space side. For this reason, even when the pressure change in the closed space is rapid, dry air corresponding to the pressure change can be supplied to the closed space.

  In the environmental test apparatus, the closed space component is a test tank, the closed space is a space for storing a sample in the test tank, and the buffer space is for storing a sample in the test tank. You may communicate with the space to do.

  If comprised in this way, when starting a test from a low-temperature test, it can suppress that the external air containing moisture flows in the space which stores the sample in a test tank, and can control that frost formation arises. Can do.

  In the environmental test apparatus, the closed space constituent part is a hollow main body part of a heat insulating panel constituting a wall of the test tank, the closed space is a space in the main body part, and the buffer space is The space in the main body may be communicated.

  In this configuration, when the test is started from the low temperature test, when the air in the main body of the heat insulation panel becomes low temperature and contracts as the temperature in the test tank decreases, the dry air from the buffer space is supplied into the main body of the heat insulation panel. can do. For this reason, even if the temperature in the main body is lowered, the pressure change in the main body can be relaxed, and the outside air containing moisture flows into the space in the main body through the joint portion and the seal portion of the panel material constituting the main body. Can be suppressed. As a result, dew condensation in the main body can be suppressed, wetting of the heat insulating material in the main body can be suppressed, and deterioration of the heat insulating performance of the test tank can be suppressed. And since the dew condensation in a heat insulation panel is suppressed, it can suppress that the water leak from a heat insulation panel arises.

  As described above, according to the environmental test apparatus of the present invention, when the test is started from the low temperature test, the outside air containing moisture is supplied to the closed space inside the closed space constituting part constituting the test tank. It can be surely suppressed.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a cross-sectional view schematically showing an overall configuration of an environmental test apparatus 10 according to an embodiment of the present invention. FIG. 2 is a cross-sectional view schematically showing a part of the wall 18 of the environmental test apparatus 10 shown in FIG. FIG. 3 is a cross-sectional view schematically showing the pressure adjusting unit 50, the air filling mechanism 60, and the pressurizing mechanism 70 of the environmental test apparatus 10 shown in FIG. FIG. 4 is a circuit diagram for explaining the configuration of the pressurizing mechanism 70 shown in FIG. First, with reference to FIGS. 1-4, the structure of the environmental test apparatus 10 by one Embodiment of this invention is demonstrated.

  As shown in FIG. 1, the environmental test apparatus 10 according to the present embodiment includes a test tank 12 in which a sample W can be accommodated, and a space ST (hereinafter referred to as a test space ST) in the test tank 12. A heat load can be applied to the stored sample W. In other words, this environmental test apparatus 10 is a thermal shock test apparatus that applies a thermal stress to the sample W by alternately exposing the sample W to a low temperature and a high temperature, or continuously exposes the sample W to an atmosphere of a predetermined condition and applies a thermal load to the sample W. It is configured as a constant temperature bath or a constant temperature and humidity chamber. Examples of the sample W include a printed board on which a semiconductor chip is mounted. The test tank 12 is included in the concept of the closed space constituent part of the present invention, and the test space ST is included in the concept of the closed space of the present invention.

  The environmental test apparatus 10 includes a heating chamber 14, a cooling chamber 16, a wall 18 that defines the test space ST, and an open / close door 22 attached to the wall 18.

  The heating chamber 14 is a room for heating the air circulating between the test space ST and is used for raising the temperature of the test space ST. A heater 24 and a blower 26 are disposed in the heating chamber 14.

  The cooling chamber 16 is a room for cooling the air circulating between the test space ST and is used for lowering the temperature of the test space ST. In the cooling chamber 16, a cooler 28, a blower 30, and an auxiliary heater 32 are disposed. The auxiliary heater 32 is driven when the air supplied from the cooling chamber 16 to the test space ST becomes lower than the target temperature.

  The high temperature side partition wall 35 between the test space ST and the heating chamber 14 is provided with a suction port 35a and a blowout port 35b. Opening and closing dampers 35c are provided in the suction port 35a and the blowout port 35b, respectively. ing. The open / close damper 35c is operated by air pressure supplied from a compressor (not shown). The suction port 35 a is an opening for introducing the air in the test space ST into the heating chamber 14. The outlet 35b is an opening through which high-temperature air heated in the heating chamber 14 flows into the test space ST. The open / close damper 35c opens the inlet 35a and the outlet 35b when the temperature in the test space ST is raised, and closes the inlet 35a and the outlet 35b when the temperature in the test space ST is lowered.

  The low-temperature side partition wall 36 between the test space ST and the cooling chamber 16 is provided with a suction port 36a and a blow-out port 36b, and an open / close damper 36c is disposed in each of the suction port 36a and the blow-out port 36b. ing. The open / close damper 36c is operated by the air pressure supplied from the compressor (not shown). The suction port 36 a is an opening for introducing the air in the test space ST into the cooling chamber 16. The outlet 36b is an opening through which the low-temperature air cooled in the cooling chamber 16 flows into the test space ST. The open / close damper 36c opens the inlet 36a and the outlet 36b when the temperature in the test space ST is lowered, and closes the inlet 36a and the outlet 36b when the temperature in the test space ST is increased.

  The wall body 18 includes a plurality of wall bodies 20 constituting the test chamber 12, a plurality of wall bodies 19 surrounding the heating chamber 14, and a plurality of wall bodies 21 surrounding the cooling chamber 16. As shown in FIG. 2, all of these wall bodies 19, 20, and 21 are constituted by a heat insulating panel 40. The heat insulating panel 40 includes a hollow main body 40a having a configuration in which a plurality of panel members 42 are assembled, and a heat insulating material 40b provided inside the main body 40a. The panel material 42 is made of, for example, a stainless steel plate, and the main body portion 40a of the heat insulating panel 40 is formed in a hollow shape by joining edges of the panel material 42 that has been bent and a flat panel material 42, for example. Yes. Then, a sealing material (not shown) is applied to the joint portion 42a between the panel members 42 so that external air does not enter the main body portion 40a through the joint portion 42a as much as possible. The heat insulating material 40b is a heat insulating material 40b having a cotton-like laminate such as glass wool or rock wool.

  The opening / closing door 22 is provided so as to be able to open / close a sample W entrance / exit provided on the wall 20 constituting the test tank 12. The opening / closing door 22 also has a heat insulating property like the wall body 20. That is, the open / close door 22 has a configuration in which a plurality of panel members 44 are assembled in a hollow shape and a heat insulating material 22a is disposed therein. This heat insulating material 22a is a heat insulating material 22a having a cotton-like laminate such as glass wool or rock wool.

  And in the environmental test apparatus 10 of this embodiment, as shown in FIG. 3, the pressure adjustment part 50, the air filling mechanism 60, and the pressurization mechanism 70 are provided.

  The pressure adjusting unit 50 allows air to flow between the test space ST and relax the pressure change in the test space ST.

  Specifically, the pressure adjustment unit 50 includes a housing 52, an airbag 54, and a distribution duct 56.

  The casing 52 is formed in a hollow box shape, and includes a duct side portion 52 a connected to the circulation duct 56 and a pressurizing mechanism side portion 52 b connected to the pressurizing mechanism 70. The casing 52 is configured by fastening the flange portion 52c of the duct side portion 52a and the flange portion 52d of the pressure mechanism side portion 52b with bolts 52e and nuts 52f.

  The airbag 54 is provided in the housing 52. The airbag 54 is made of a stretchable film body formed using a soft material such as polyethylene or vinyl resin. The airbag 54 is sandwiched between the flange portion 52c of the duct side portion 52a and the flange portion 52d of the pressure mechanism side portion 52b, and the flange 54c and 52d are fastened together. Is fixed. The edge portion of the airbag 54 is also used as a packing for closing the gap between the flange portions 52c and 52d.

  And the airbag 54 is comprised so that it may inflate in the pressurization mechanism side part 52b, and has covered buffer space SB in the pressurization mechanism side part 52b. A vent 52g is provided in the duct side portion 52a of the casing 52, and one end of the circulation duct 56 is connected to the vent 52g. The other end of the circulation duct 56 is inserted into a through hole 20a provided in the wall body 20 constituting the test space ST. The other end of the circulation duct 56 enters the test space ST. As a result, air can flow between the buffer space SB and the test space ST through the vent 52 g and the flow passage in the flow duct 56. For this reason, in the pressure adjusting unit 50, the air flows between the test space ST and the buffer space SB while the airbag 54 is expanded and contracted in accordance with the pressure change in the test space ST, thereby changing the pressure change in the test space ST. It has come to ease. That is, if the pressure in the test space ST is higher than the pressure in the buffer space SB, the air moves from the test space ST toward the buffer space SB to inflate the airbag 54. On the other hand, if the pressure in the test space ST is lower than the pressure in the buffer space SB, air moves from the buffer space SB toward the test space ST, and the airbag 54 is contracted.

  In addition, it is preferable that the capacity | capacitance in the housing | casing 52, specifically, the capacity | capacitance of the space in the pressurization mechanism side part 52b is smaller than the maximum capacity | capacitance of the airbag 54. FIG. In this case, since the airbag 54 does not expand beyond the limit in the housing 52, the airbag 54 is reliably prevented from rupturing.

  Inside the duct side portion 52a of the housing 52, a slit plate 53 is provided so as to be separated from the vent hole 52g. The slit plate 53 is disposed perpendicular to the direction in which air flows through the vent hole 52g. The slit plate 53 is installed inside the duct side portion 52a by fixing its edge to the inner surface of the duct side portion 52a. This slit plate 53 has a plurality of slits, and when air flows out from the buffer space SB through the vent 52g while allowing air to flow between the air bag 54 and the space on the vent 52g side. The air bag 54 contracted to prevent the air vent 52g from being blocked.

  In the housing 52, the space opposite to the buffer space SB with respect to the airbag 54 is a pressurized space SP. The pressurizing mechanism side portion 52b of the casing 52 is provided with a pressurizing vent 52h to which the pressurizing mechanism 70 is connected, and air supplied from the pressurizing mechanism 70 is pressurized as described below. By being introduced into the pressurizing space SP through the opening 52h, the airbag 54 is pressurized so as to contract.

  Further, an exhaust port 52 i is provided in the pressurizing mechanism side portion 52 b of the housing 52. On the outer surface of the pressurizing mechanism side portion 52b, an opening / closing mechanism 55 is provided for switching between an exhaustable state and an unexhaustable state through the exhaust port 52i.

  Specifically, the opening / closing mechanism 55 includes an exhaust port cover 55a, an opening / closing slit plate 55b, and an air cylinder 55c.

  The exhaust port cover 55a is provided on the outer surface of the pressurizing mechanism side portion 52b so as to cover the exhaust port 52i. A plurality of slits are formed in the exhaust port cover 55a.

  The open / close slit plate 55b has a plurality of slits and is provided so as to be in sliding contact with the outer surface of the exhaust port cover 55a.

  The rod portion 55d of the air cylinder 55c is connected to the open / close slit plate 55b, and operates so that the open / close slit plate 55b slides with respect to the exhaust port cover 55a. The sliding movement of the open / close slit plate 55b by the air cylinder 55c causes the slit of the open / close slit plate 55b to be aligned with the slit of the exhaust port cover 55a, thereby opening the slit of the exhaust port cover 55a, and the pressurizing space SP of the housing 52. It becomes possible to exhaust from the inside. On the other hand, when the portion between the slits of the opening / closing slit plate 55b fits the slit of the exhaust port cover 55a, the slit of the exhaust port cover 55a is shielded, and the pressurized space SP in the housing 52 cannot be exhausted.

  The air filling mechanism 60 is for filling the buffer space SB with dry air.

  Specifically, the air filling mechanism 60 includes an air supply unit 62 and a dehumidifying unit 64.

  The air supply means 62 includes a blower or a pump, and supplies air to the buffer space SB. The air supply means 62 is connected to the circulation duct 56 through a supply duct 63.

  The dehumidifying part 64 is provided in the supply duct 63 and removes moisture in the air supplied from the air supply means 62. This dehumidifying part 64 consists of what has a desiccant and other dehumidification functions, for example. With such a configuration, the air supplied from the air supply means 62 is dehumidified by the dehumidifying unit 64 and then introduced into the buffer space SB through the space in the supply duct 63 and the distribution duct 56. .

  In addition, it is also possible to suck air from the buffer space SB by rotating the blower or the pump constituting the air supply unit 62 in the reverse direction.

  A switching valve 66 is provided at a connection point between the supply duct 63 and the circulation duct 56. The switching valve 66 is for switching whether air flows from the air supply means 62 to the buffer space SB or whether air is circulated between the test space ST and the buffer space SB.

  Specifically, when the switching valve 66 is disposed at the closed position A and the opening at the end of the supply duct 63 is closed, the air from the air supply means 62 is not supplied into the circulation duct 56, and the circulation duct. The air flow between the test space ST and the buffer space SB is smoothly performed through the flow path in 56 without being obstructed. On the other hand, when the switching valve 66 is disposed at the open position B, the opening at the end of the supply duct 63 is opened, and the flow passage in the flow duct 56 is blocked, the space between the test space ST and the buffer space SB. Air circulation is interrupted, and air is supplied from the air supply means 62 to the buffer space SB.

  When the amount of air required in the test space ST is insufficient in the capacity of the airbag 54 when the pressure in the test space ST is reduced, the switching valve 66 is positioned between the closed position A and the open position B. It is also possible to replenish air from the air supply means 62.

  The pressurizing mechanism 70 is for pressurizing the air bag 54 from the pressurizing space SP side so as to contract the air bag 54, and the pressurizing vent 52 h of the pressurizing mechanism side portion 52 b of the casing 52. It is connected to the.

  Specifically, the pressurization mechanism 70 includes an air source 72 and a pressurization adjustment unit 74 as shown in FIG.

  As the air source 72, an air pressure generating facility or various compressors provided in a factory or the like is used. As the air source 72, a compressor (not shown) that supplies air pressure to operate the open / close dampers 35c and 36c may be shared.

  The pressure adjusting unit 74 has an upstream side connected to the air source 72 via an air supply duct 73 and a downstream side connected to the pressure vent 52 h via a pressure duct 75. The pressurizing adjustment unit 74 adjusts the pressure of air supplied from the air source 72 to a predetermined pressure. The pressure adjustment unit 74 includes an oil removing filter 74a, a pressure reducing valve 74b for reducing the pressure of supplied air to a predetermined pressure, a pressure gauge 74c for measuring the pressure of the air after pressure reduction, a filter 74d, An on-off valve 74e that controls whether or not air pressure is supplied to the pressure adjusting unit 50 is connected in this order from the upstream side to the downstream side.

  With such a configuration, after the air supplied from the air source 72 is depressurized to a predetermined pressure by the pressurizing adjustment unit 74 and foreign matter such as oil is removed, the casing of the pressure adjusting unit 50 is passed through the pressurizing duct 75. The pressure is supplied to the pressurizing space SP in 52. The air bag 54 is pressurized so as to contract by the pressure of the air supplied to the pressurizing space SP, and the air in the buffer space SB is forcibly pushed out, and the test space is passed through the flow passage in the flow duct 56. It is designed to flow to ST.

  Next, the operation of the environmental test apparatus 10 configured as described above will be described. The driving operation described below is a driving operation when starting from a low temperature test first in a thermal shock test in which a high temperature test in which the sample W in the test space ST is exposed to a high temperature atmosphere and a low temperature test in which the sample W is exposed to a low temperature atmosphere are alternately repeated. .

  In this operation, the switching valve 66 is switched to the open position B in advance during the preparatory operation of the low temperature chamber before starting the low temperature test, and the buffer space SB is filled with the dry air by the air filling mechanism 60. As a result, the airbag 54 is inflated in the housing 52. At this time, the slit of the exhaust port cover 55a is opened in the opening / closing mechanism 55 so that the air in the pressurized space SP is exhausted through the exhaust port 52i and the slit as the airbag 54 is inflated.

  During the low temperature test, the suction port 36a and the outlet 36b of the low temperature side partition wall 36 are opened while the sample W is set in the test space ST, while the inlet 35a and the outlet 35b of the high temperature side partition wall 35 are opened. Close. Then, the cooler 28 and the blower 30 are driven to cool the air by the cooler 28 and circulate the air cooled to the low temperature between the cooling chamber 16 and the test space ST. As a result, the test space ST is cooled to a predetermined temperature, maintained at this predetermined temperature for a certain period of time, and the sample W is exposed to a low temperature.

  When exposed to a low temperature, the air in the space ST contracts as the temperature of the test space ST decreases, but the air in the buffer space SB passes through the flow passage in the circulation duct 56 as the airbag 54 contracts. Therefore, the pressure drop in the test space ST is alleviated. For this reason, it is suppressed that the external air containing moisture flows into test space ST through the junction part of the heat insulation panels 40 which comprise the test tank 12, and seal parts, such as a door packing and a cable hole. During this low temperature exposure, the opening / closing mechanism 55 keeps the slit of the exhaust port cover 55a open.

  In addition, when the temperature of the test space ST is rapidly lowered and the pressure drop in the space ST is abrupt, air of a predetermined pressure is introduced into the pressurized space SP in the housing 52 by the pressurizing mechanism 70, The airbag 54 is contracted by the pressure of the air. As a result, the air in the airbag 54, that is, the air in the buffer space SB is pushed through the flow duct 56 to the test space ST. As a result, it is possible to cope with a sudden pressure drop in the test space ST, and the pressure drop in the test space ST is alleviated. When air is introduced into the pressurizing space SP by the pressurizing mechanism 70, the slit of the exhaust port cover 55a is closed in the opening / closing mechanism 55.

  When a certain time has elapsed, the suction port 35a and the blowout port 35b of the high temperature side partition wall 35 are opened, and the suction port 36a and the blowout port 36b of the low temperature side partition wall 36 are closed. Then, the heater 24 and the blower 26 are driven to heat the air in the heating chamber 14 and circulate the air heated to this high temperature between the heating chamber 14 and the test space ST. As a result, the test space ST is heated to a predetermined temperature, maintained at this predetermined temperature for a certain period of time, and the sample W is exposed to a high temperature. Thereafter, the sample W can be subjected to thermal stress by alternately repeating the low temperature exposure and the high temperature exposure.

  When exposed to a high temperature, the air in the space ST expands as the test space ST rises in temperature, but a part of the expanded air flows into the buffer space SB through the flow passage in the flow duct 56. Since the airbag 54 is inflated, the pressure increase in the test space ST is alleviated. For this reason, it is suppressed that the air in test space ST leaks outside through sealing parts, such as a junction part of the heat insulation panels 40 which comprise the test tank 12, and door packing, a cable hole. During this high temperature exposure, the opening / closing mechanism 55 maintains the slit of the exhaust port cover 55a.

  As described above, in this embodiment, when the test is started from the low temperature test, the buffer space SB communicating with the test space ST is filled with the dry air by the air filling mechanism 60 and the airbag 54 is inflated in advance. Can do. For this reason, when air is contracted in the test space ST by starting the low temperature test and cooling the test space ST, dry air in the buffer space SB is supplied to the test space ST while the airbag 54 contracts. The pressure fluctuation in the test space ST is alleviated. As a result, when the environmental test apparatus 10 starts a test from a low temperature test, it is possible to reliably suppress the supply of outside air containing moisture to the test space ST. Thereby, it can suppress that frost formation arises on the partition surface, the cooler 28, etc. which comprise test space ST and the cooling chamber 16. FIG.

  Further, in the present embodiment, air is allowed to flow from the air supply means 62 to the buffer space SB at the connection point between the air supply means 62 and the distribution duct 56, or air is circulated between the test space ST and the buffer space SB. A change-over valve 66 is provided that can be switched. Therefore, before starting the low temperature test, the switching valve 66 can be placed in the open position B to allow air to flow from the air supply means 62 to the buffer space SB and fill the buffer space SB with dry air. After the start, the position of the switching valve 66 is switched to the closed position A for circulating air between the test space ST and the buffer space SB, and the air supplied from the air supply means 62 is unnecessary air in the test space ST. It is possible to prevent the flow from occurring.

  In the present embodiment, the air supply means 62 has not only a function of supplying air to the buffer space SB but also a function of sucking air from the buffer space SB. Air can be sucked from the SB. As a result, it is possible to make it easier for the buffer space SB to receive the air expanded by the temperature rise of the test space ST during the high temperature test.

  Further, in the present embodiment, the pressurizing mechanism 70 for pressurizing the airbag 54 so as to contract the airbag 54 is provided, so that the airbag 54 is contracted by the pressurizing mechanism 70 so that the buffer space is compressed. Dry air in the SB can be forced to flow into the test space ST. For this reason, even when the pressure change in the test space ST is rapid, dry air corresponding to the pressure change can be supplied to the test space ST.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the spirit of the present invention.

  For example, as in the first modification of the embodiment shown in FIG. 5, the buffer space SB is a space in the main body portion 40 a of the heat insulating panel 40 that constitutes the wall body 20 of the test tank 12 through the flow passage in the flow duct 56. You may communicate with SW. In the first modification, the main body portion 40a of the heat insulating panel 40 is included in the concept of the closed space constituent portion of the present invention, and the space SW in the main body portion 40a is included in the concept of the closed space of the present invention. It is included.

  In the first modified example, when the test is started from the low temperature test, when the air in the main body 40a becomes low temperature and contracts as the temperature of the test space ST decreases, the air dried from the buffer space SB is supplied into the flow duct 56. It can be supplied to the space SW in the main body 40a through the flow path. For this reason, even if the temperature of the space SW in the main body 40a is lowered, the pressure drop in the space SW can be alleviated, and the joint 42a and the seal portion between the panel members 42 (see FIG. 2) constituting the main body 40a. It is possible to suppress the outside air including moisture from flowing into the space SW in the main body 40a. As a result, dew condensation in the main body 40a can be suppressed, wetting of the heat insulating material 40b in the main body 40a can be suppressed, and deterioration of the heat insulating performance of the test tank 12 can be suppressed. Can do. And since the dew condensation in the heat insulation panel 40 is suppressed, it can suppress that the water leak from the heat insulation panel 40 arises.

  In the first modification, in the high temperature test, the air in the space SW in the main body 40a becomes hot and expands as the test space ST rises in temperature. At this time, a part of the expanded air flows into the buffer space SB through the flow passage in the circulation duct 56 and inflates the airbag 54, so that the pressure increase in the space SW in the main body 40a is alleviated. For this reason, it is suppressed that the air in the main-body part 40a leaks outside through the junction part 42a and the seal part of the panel materials 42 (refer FIG. 2) which comprise the main-body part 40a.

  Further, the configuration of the airbag 54 and the mounting structure of the airbag 54 in the pressure adjusting unit 50 are not limited to those shown in the above embodiment.

  For example, as in the second modification of the above-described embodiment shown in FIG. 6, the airbag 54 is formed of a stretchable bag body, and the airbag 54 projects into the housing 52 through the vent 52g. The opening of the airbag 54 may be in close contact with the outer surface of the end of the circulation duct 56 so as not to leak air.

  In the configuration of the second modification, the housing 52, the pressurizing mechanism 70, and the opening / closing mechanism 55 are not necessarily provided, and may be omitted.

  Further, the airbag 54 may have a shape other than a film body or a bag body, for example, a bellows-shaped one.

As a reference example, the distribution duct 56 is omitted, and the airbag 54 is directly attached to the outer surface of the wall body 20 so as to cover the outside of the through hole 20a of the wall body 20, and the air filling mechanism 60 is provided in the airbag 54. The supply duct may be inserted so that dry air can be supplied from the air filling mechanism 60 to the buffer space SB in the airbag 54.

  In the configuration of the above embodiment, the pressurizing mechanism 70 may be omitted.

  Moreover, you may use things other than an air blower and a pump as an air supply means of the air filling mechanism 60. FIG. For example, an air pressure generating facility installed in a factory or the like or other blower facilities may be used as the air supply means.

  Further, the dehumidifying portion of the air filling mechanism 60 may be disposed at a place other than the supply duct 63. For example, a dehumidifying portion may be provided at a predetermined location in the buffer space SB in the casing 52 or a predetermined location on the air supply path from the air supply means 62 to the buffer space SB in the circulation duct 56.

  Moreover, fluids such as gas other than air and various liquids may be used as a medium for introducing the pressurized space SP in the casing 52 and pressurizing the airbag 54 so as to contract.

  Further, as a pressurizing mechanism for pressurizing the airbag 54 so as to contract the airbag 54, a mechanism that pressurizes the airbag 54 with a piston may be used.

  Further, instead of the slit plate 53, a plate material in which a plurality of through holes are formed may be used.

  Further, instead of the slit plate 53, a cylindrical body provided with a plurality of slits penetrating in the radial direction and a plurality of through holes may be used.

  Specifically, the cylinder is attached to the vent 52g of the casing 52 so as to protrude into the casing 52, and the airbag 54 made of a film body is covered with the periphery of the cylinder protruding into the casing 52. It may be attached to the casing 52, or the airbag 54 made of a bag may be attached to the cylindrical body protruding into the casing 52 so that the opening of the airbag 54 is in close contact with the outer surface of the cylindrical body. In this case, even if a part of the airbag 54 contracted when the air flows out from the buffer space SB in the airbag 54 through the cylinder and the distribution duct 56 closes the opening at the end of the cylinder, Air can be allowed to flow from the buffer space SB in the airbag 54 to the flow passage of the flow duct 56 through the slits or through holes on the outer periphery.

  Moreover, in the said embodiment, although it was set as 3 zone structure by which the indoor space divided by the wall 18 was divided into three space (test space ST, the heating chamber 14, and the cooling chamber 16) by the heat insulation walls 35 and 36, It is not limited to this. For example, it is good also as an environmental test apparatus of the 1 tank structure where the indoor space divided by the wall of a test tank is not partitioned off by the heat insulation wall. In this environmental test apparatus, an indoor space is configured as a test space. The test space is partitioned by a partition plate into a sample chamber in which a sample is set and an air conditioning chamber in which air is heated or cooled. The air conditioning chamber is provided with a blower, a heater, a cooler, and the like, and air heated or cooled in the air conditioning chamber is blown into the test space through a communication hole provided in the partition plate. For this reason, the wall body is heated or cooled as the air in the test space is heated or cooled, and the air in the space in the heat insulation panel constituting the test space and the wall body is expanded or contracted accordingly. Therefore, even in such an environmental test apparatus, the three-zone configuration according to the above embodiment is applied by applying the configuration of the present invention in which air flows between the test space as a closed space or the space in the heat insulation panel and the buffer space. The same effects as those of the environmental test apparatus 10 can be obtained.

It is sectional drawing which shows roughly the whole structure of the environmental test apparatus which concerns on one Embodiment of this invention. It is sectional drawing which shows roughly a part of wall body of the environmental test apparatus shown in FIG. It is sectional drawing which shows schematically the pressure adjustment part of the environmental test apparatus shown in FIG. 1, an air filling mechanism, and a pressurization mechanism. It is a circuit diagram for demonstrating the structure of the pressurization mechanism shown in FIG. It is sectional drawing which shows schematically the pressure adjustment part of the environmental test apparatus which concerns on the 1st modification of one Embodiment of this invention, an air filling mechanism, and a pressurization mechanism. It is sectional drawing which shows schematically the pressure adjustment part of the environmental test apparatus which concerns on the 2nd modification of one Embodiment of this invention, an air filling mechanism, and a pressurization mechanism.

Explanation of symbols

SB buffer space ST test space W sample 10 environmental test apparatus 12 test tank 20 wall body 40 heat insulation panel 40a body part 40b heat insulation material 42 panel material 50 pressure adjusting part 54 air bag 60 air filling mechanism 62 air supply means 64 dehumidification part 66 switching Valve 70 Pressurization mechanism

Claims (7)

A closed space component having a closed space in which pressure varies ,
An air bag covering at least a part of the periphery of the buffer space through which air can flow between the closed space and the closed space and the air bag while expanding and contracting the air bag according to a pressure change in the closed space; A pressure adjusting unit for flowing air between the buffer space and
An air filling mechanism connected to an air flow path between the buffer space and the closed space for filling the buffer space with dry air ;
An open position where air from the air filling mechanism flows to the buffer space through the flow passage, and a flow of air from the air filling mechanism to the flow passage is blocked, and the air is between the closed space and the buffer space. A switching valve that can be switched to a closed position for circulating the
When the test is started from a low-temperature test in which the closed space is cooled, the switching valve is in the open position before the low-temperature test is started, and the dry air from the air filling mechanism is passed through the flow passage. An environmental test apparatus that circulates to the buffer space and switches to the closed position after the low-temperature test is started to block air flow from the air filling mechanism to the flow passage .   2. The air filling mechanism according to claim 1, comprising: an air supply unit that supplies air to the buffer space; and a dehumidifying unit that removes moisture in the air supplied from the air supply unit to the buffer space. Environmental test equipment. The environmental test apparatus according to claim 2, wherein the air supply unit has not only a function of supplying air to the buffer space but also a function of sucking air from the buffer space.   The environmental test apparatus according to claim 3, wherein when the test is started from a high temperature test in which the closed space is heated, the air supply unit sucks air from the buffer space before the start of the high temperature test. .   The environmental test apparatus of any one of Claims 1-4 provided with the pressurization mechanism for pressurizing the airbag so that the said airbag may be contracted. The closed space component is a test tank, and the closed space is a space for storing a sample in the test tank,
The environmental test apparatus according to claim 1, wherein the buffer space communicates with a space for storing a sample in the test tank. The closed space component is a hollow main body portion of a heat insulating panel constituting a wall of the test tank, and the closed space is a space in the main body portion,
The environmental test apparatus according to claim 1, wherein the buffer space communicates with a space in the main body.

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