JP4997511B2 - Vibration isolator - Google Patents

Description

  The present invention relates to a vibration isolator that mounts a precision device such as a computer, a valuable item such as an exhibit, or a large structure such as a building, and a friction damper that forms the main part of the vibration isolator, and relates to a floor or a ground due to disturbance such as an earthquake The present invention relates to a passive vibration isolator having a simple structure that insulates the force received from the motor, suppresses excessive vibration, and does not cause a positional shift after the disturbance is eliminated.

  In precision equipment such as semiconductor inspection equipment such as wafers, the required performance cannot be exhibited by vibrations transmitted from the outside, and conversely, equipment that generates vibrations such as a press machine is the other equipment in the factory. Adversely affects adjacent facilities. For this reason, various measures for vibration isolation have been conventionally taken. As an extreme method of vibration isolation measures, there is a method of insulating the lateral vibration of the foundation by sliding the structure without fixing it to the foundation or by placing it on a roller or the like. As an example, the pedestal of the Great Buddha in Kamakura slides between the stainless steel plate attached below the statue and the granite base below it, so that it does not fall down due to an earthquake. However, methods such as roller and slip do not have a restoring force, so that there is a problem that the position remains shifted after an earthquake or the like. Therefore, generally, a method of supporting with a spring like a suspension of an automobile or a vibration isolator of a press machine is used. In recent years, it has also been interested in the general public, such as being advertised in condominium sales, featuring a seismic isolation structure supported by laminated rubber.

  In the method of supporting a vibration suppression object with a spring, the insulation effect of vibration transmitted from the foundation increases as the spring stiffness decreases, but when there is a vibration source on the vibration suppression object side or disturbance is directly applied to the vibration suppression object In some cases, it vibrates greatly, and excessive vibration occurs at the time of resonance. Therefore, a damping device (damper) that absorbs kinetic energy, reduces the resonance peak, and quickly attenuates residual vibration is used. Some dampers have various characteristics. Oil dampers that use the viscous resistance of fluids and magnetic dampers that use electromagnetic force acting on eddy currents generated when a conductor moves in a magnetic field are viscous damping dampers that generate resistance forces proportional to speed. being classified. When a viscous damping damper is used, the vibration at the time of resonance can be reduced as the damping ratio is increased, but there is a trade-off relationship that the insulating effect of the vibration becomes worse.

  There are also elasto-plastic dampers that attenuate vibrations by converting kinetic energy into elasto-plastic deformation energy of the object, but friction dampers that use sliding friction have a simple basic structure and large structures such as base-isolated buildings. It is also used. However, a vibration isolator composed of a spring and a friction damper with a constant friction force is generally difficult to suppress the resonance peak of forced vibration, and in order to quickly attenuate free vibration, the friction force is increased. However, if the frictional force increases, the vibration transmissibility in the low frequency range increases and the vibration insulation deteriorates, or there is a problem that it stops after shifting from the stationary balance position. Some ideas have been made as shown.

JP 2003-301882 A JP 2004-138232 A Japanese Laid-Open Patent Publication No. 2007-177864

  In order to improve the insulation performance of a vibration isolator composed of a spring and a friction damper, it is necessary to reduce the spring stiffness and increase the period. To suppress the generated vibration and improve the damping performance It is necessary to increase the frictional force.

  However, in the above-described conventional friction damper that generates a friction force by applying a constant pressing force to the friction surface, the friction force is constant regardless of the relative displacement between the table and the base. When returning, the restoring force of the spring decreases, and when it becomes the same as the frictional force, the returning operation stops, and there is a problem that the position is shifted and stopped. In particular, if the spring stiffness is decreased and the frictional force is increased in order to increase the insulation effect and improve the damping performance, the positional deviation becomes larger.

  In order to solve the above problems, the object of the present invention is to change the magnitude of the frictional force in the friction damper according to the relative displacement and the relative speed, thereby suppressing excessive vibration without impairing the insulating effect and shifting the position. Another object of the present invention is to provide a vibration isolator and a friction damper that constitutes a main part thereof.

In order to achieve the above object, according to the first aspect of the present invention, the table 1 on which the vibration isolation object is mounted can be moved relative to the base 2 in the horizontal linear direction via the guide members 3a to 3d. In order to give the table 1 a restoring force, in the vibration isolator in which the table 1 and the base 2 are connected by the restoring springs 4a and 4b, an excessive external vibration when an external force is acting is suppressed and an acting external force As a damping mechanism for quickly converging the vibration after leaving, a block-shaped friction member (cylindrical members 7, 7a, 7b ) is provided on one opposing surface of the table 1 or the base 2, and the table 1 or the base 2 on the other facing surface, a lever (8a to 8g, 8p to 8s) whose base portion is rotatable around the rotation axis and a pressing force for pressing the inner surface on the tip side of the lever against the outer peripheral surface of the friction member. A pressing device comprising the clamping springs 10a to 10f is provided, and the surface of the lever that comes into contact with the friction member is inclined with respect to the relative movement direction, thereby causing relative displacement between the table 1 and the base 2. In this case, the vibration isolation device using the friction damper (101 to 106) in which the magnitude of the frictional force generated between the friction member and the lever changes as a result of the pressing force by the pressing device changing corresponding to the relative displacement. And

The friction damper has a function of changing the magnitude of the frictional force in proportion to the relative displacement between the table and the base.
In this case, the proportionality includes a linear direct proportionality in a narrow sense, but as a broader concept, includes a non-linear characteristic in which the magnitude of the frictional force increases as the magnitude of the relative displacement increases. Further, the direction of the frictional force is opposite to the relative speed.

According to a fourth aspect of the present invention , in the vibration isolator according to the first aspect, a plurality of sets, for example, two sets, are arranged one above the other so that the directions of relative movement of the table with respect to the base are perpendicular to each other. As a result, the vibration insulation action corresponding to the two-dimensional plane motion is performed.

The vibration isolator according to claim 1 is a device corresponding to a linear movement in a single direction, but in claim 4 , a plurality of sets, for example, two sets of mechanisms are overlapped so that the directions of relative movement are orthogonal to each other. By arranging them, it is possible to realize a vibration isolator that supports two-dimensional planar motion.

In claim 1, as shown in FIG. 1 and FIG. 2, the block-shaped friction member is constituted by cylindrical members 7a and 7b, and the lever constituting the pressing device is formed substantially on the opposing outer peripheral surface of the cylindrical member. The friction damper 101 includes a pair of levers 8a to 8d that are in contact with each other and whose front end side can be freely opened and closed .
The friction damper is composed of a plurality of sets, at least two sets of friction dampers 101, 101 arranged at a distance along the direction of relative linear movement between the table 1 and the base 2. The inclination directions of the pair of substantially C-shaped levers of the two sets of friction dampers 101 and 101 are symmetrically arranged along the relative linear movement direction in a substantially C shape and a substantially inverted C shape.

According to claim 2 , in the vibration isolator according to claim 1 , as shown in FIG. 9, the block-shaped friction member is constituted by a cylindrical member 7, and the lever constituting the pressing device is opposed to the cylindrical member. The friction damper 102 includes a pair of levers 8e and 8f that contact the outer peripheral surface in a substantially parallel inclined shape.

If the surface of the lever that contacts the cylindrical member is inclined with respect to the direction of relative displacement as in claim 1 or 2 , when the relative displacement occurs between the table and the base, the cylindrical member rotates the lever. Therefore, the force of the spring that presses the lever against the cylindrical member changes according to the rotation angle of the lever. As a result, the pressing force between the lever and the cylindrical member changes, and the magnitude of the frictional force also changes.

  By the way, in the mechanism of the friction dampers 101 and 102 described so far, the cylindrical member is used to cope with the change in the angle of the lever with the relative displacement of the table and the base. However, in this structure, since the cylindrical member and the lever are in line contact, there is a drawback that the contact portion is easily worn.

  As a measure to remedy this drawback, it is conceivable to provide a prismatic member rotatable around an axis in place of the cylindrical member so as to perform the same operation. With this structure, the angle of the contact surface of the prismatic member also changes in accordance with the change in the angle of the lever.

That is, in the reference example , in the friction damper used in the vibration isolator according to claim 1 or 2, as shown in FIGS. 13 and 14, a prismatic member capable of rotating the block-shaped friction member around an axis. The friction damper 104 includes 31a to 31d, and the surfaces of the levers 8a to 8d constituting the pressing device are in contact with the rotating outer surface of the prism member.

  In the above-described apparatus, a mechanism that generates a frictional force by pressing a lever that can rotate around an axis against a cylindrical member or a prismatic member with a spring has been described. It becomes unnecessary and the structure is simplified.

Further, in the reference example , in the friction damper according to any one of claims 1 to 4 , as shown in FIG. 16, instead of providing a rotation shaft and a spring of the lever, the lever is held by leaf springs 41a to 41d. In addition, the friction damper 106 is characterized in that it can rotate around its axis and is elastically pressed against the outer peripheral surface of the friction member.

According to a third aspect of the present invention , in the friction damper according to the first or second aspect , by providing an offset by separating the rotation center shaft portion of the lever from the frictional force acting line, the frictional force generates a rotational moment on the lever and presses the lever. It features a friction damper that utilizes a self-boosting effect that amplifies changes in the magnitude of the friction force as a result of increasing or decreasing the force.
The offset is formed by bending the rotation base portion of the lever main body into an L shape, and a rotation shaft is provided at the tip portion of the bent piece constituting the offset.

As described in claim 3 , by providing an offset by separating the center of rotation of the lever from the frictional force acting line, the frictional force generates a rotational moment in the lever and increases or decreases the pressing force. The change in size is also amplified. This mechanism is the same as that known as a self-boosting effect, such as a drum brake of an automobile. Since the spring that presses the lever against the cylindrical member also works in the direction of relative displacement, it also acts as a restoring force. Especially when the tilt angle of the lever is large, the spring constant of the insulation device as a whole is increased to insulate. Although the effect may be reduced, if the offset is provided and the self-boosting effect is used, it is not necessary to strengthen the spring that presses the lever, so that the adverse effect acting as a restoring force can be reduced.

  In addition, when using the self-boosting effect by providing an offset, the frictional force is proportional to the relative displacement even if the lever is not rotated to increase the force of the pressing spring when the cylindrical member moves. Therefore, the surface of the lever that contacts the cylindrical member may be arranged in parallel to the direction of relative displacement. However, in this case, it is necessary to give a minute pressing force even when the stationary displacement position has a relative displacement of zero. For this reason, the frictional force at the relative displacement of 0 does not become 0, and it is impossible to completely suppress the shift of the stationary balance position, but the deviation is smaller than that of the damper having a constant frictional force.

  Since the present invention is configured and functions as described above, in the vibration isolator composed of the proportional friction damper and the restoring spring, the magnitude of the frictional force increases as the relative displacement between the table and the base increases. The kinetic energy is changed to thermal energy and excessive resonance vibration is suppressed. On the other hand, when returning to the stationary balance position after the disturbance has left, the restoring force of the spring decreases as the relative displacement decreases, but the magnitude of the frictional force also decreases, so that a constant frictional force acts Thus, there is no problem that the table and the base are shifted from the stationary balance position and stopped.

1 is an exploded perspective view showing a configuration of Example 1. FIG. In the structure of Example 1, it is the top view (a) of the part except a table, and the front view (b) which excluded a part of guide member. In Example 1, it is a top view showing the change of the positional relationship of a lever, a cylindrical member, and a lever pressing spring when a table moves relatively with respect to a base. In Example 1, it is a figure explaining the spring force N, the pressing force P, and the frictional force F which act on a lever when the relative displacement x and the relative speed v are positive. In Example 1, it is a figure explaining the geometrical relationship of a cylindrical member and a lever in the case of relative displacement x. In Example 1, when the relative displacement x and the relative speed v are positive, it is a figure explaining the pressing force P, the frictional force F, and the resultant force Q which act on a cylindrical member. In Example 1, it is an example of the diagram which shows the relationship between the pressing force P and the relative displacement x. In Example 1, an example of a graph showing the relationship between the x-direction component Q _x and the relative displacement x of the resultant force Q acting on the cylindrical member. 6 is a plan view showing a configuration of Example 2. FIG. In Example 3, it is explanatory drawing of the force which acts on a lever. In Example 3, it is an example of the diagram which shows the relationship between the pressing force P and the relative displacement x. In Example 3, it is an example of the diagram which shows the relationship between the x direction component Qx of the resultant force Q which acts on a cylindrical member, and the relative displacement x. It is a disassembled perspective view which shows the structure of Example 4 as a reference example . In the structure of Example 4, it is the top view of the part except a table, and the front view which excluded a part of guide member. It is a top view which shows the structural example of Example 5 as a reference example . It is a top view which shows the structural example of Example 6 as a reference example .

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

(Overall structure and basic operation)
FIG. 1 is an exploded perspective view showing an embodiment of the vibration isolator of the present invention. FIG. 2 (a) is a plan view of the remaining part of FIG. 1 excluding the table 1, and FIG. FIG. In addition, in FIG.2 (b), description of the guide members 3a and 3b is abbreviate | omitted.

  The table 1 is connected to the base 2 via guide members 3a to 3d. These guide members are installed for the purpose of restraining the table 1 and the base 2 so that the table 1 and the base 2 smoothly move relative to each other only in the x direction and do not generate relative movement in the y direction and the z direction. . In this case, even if the floor surface on which the base 2 is installed swings in the x direction, no force is transmitted to the table 1 and the table does not move. However, in this state, the position of the table 1 is not determined, and when a force is applied to the table 1, the table 1 moves to the movable limit of the guide members 3a to 3d. Therefore, a restoring spring is provided as follows.

  Table-side support members 5a and 5b for restoration springs are provided on the lower surface of the table 1, and base-side support members 6a and 6b for restoration springs are provided on the upper surface of the base 2, which are connected by restoration springs 4a and 4b, respectively. Yes. When a force is applied to the table 1 or the base 2 moves and a relative displacement x occurs between the table 1 and the base 2, the restoring springs 4a and 4b generate a restoring force proportional to the relative displacement x and the relative displacement is zero. The table 1 is pushed back in the direction toward the balance position (origin).

  However, even if the table 1 returns to the stationary balance position where the relative displacement is zero and the restoring force becomes zero, the movement continues in the reverse direction due to the inertial force due to the mass of the table 1 and the load placed thereon. I will go too far. By repeating this, there is a problem that the vibration continues for a long time and the resonance amplitude becomes excessive with only the restoring spring. Therefore, vibration is suppressed by installing a friction damper 101 as described below and dissipating it by changing kinetic energy into heat energy.

  Cylindrical members 7 a and 7 b are provided on the lower surface of the table 1, and lever rotation shafts 9 a to 9 d are provided on the upper surface of the base 2. The rotary shafts 9a to 9d are provided with levers 8a to 8d so as to freely rotate around the rotary shaft (z-axis direction). These levers 8a to 8d are connected to the pressing springs 10a to 10d held by the base side support members 11a to 11d, and are arranged so as to contact the cylindrical members 7a and 7b. At this time, when the table 1 is in the stationary balance position, the pressing springs 10a to 10d are adjusted so that the pressing force at the contact portion between the levers 8a to 8d and the cylindrical members 7a and 7b becomes zero.

  As shown in FIG. 2A, the levers 8a and 8b have a V-shape (substantially C-shape) in which the interval on the rotating shaft side is narrow and the interval on the side in contact with the cylindrical member 7a is wide. , And are arranged to be inclined with respect to the direction of relative displacement. Further, the levers 8c and 8d are similarly arranged in a V-shape (substantially reverse C-shape) opposite to the cylindrical member 7b.

  When the relative displacement x occurs between the table 1 and the base 2 and the table 1 moves to the right in FIG. 2, the cylindrical member 7a provided on the lower surface of the table 1 also moves to the right. The lever 8a disposed at an angle with respect to the shaft is pressed by the cylindrical member 7a and rotates clockwise with respect to the rotating shaft 9a, and the pressing spring 10a is contracted. On the contrary, since the reaction force acts from the pressing spring 10a so as to press the lever 8a against the cylindrical member 7a, a frictional force is generated at the contact portion between the lever 8a and the cylindrical member 7a. These forces increase as the relative displacement x increases.

  A frictional force is similarly generated for the lever 8b. The x-direction component of the resultant force of these frictional forces becomes a resistance force against the motion of the table 1 and functions to dissipate the kinetic energy. Although the cylindrical member 7b also moves in the right direction, in this case, the levers 8c and 8d are separated from the cylindrical member 7b, so that no frictional force is generated between them.

  Contrary to the above, when the table 1 moves leftward in FIG. 2, a frictional force is generated at the contact portion between the levers 8c and 8d and the columnar member 7b. On the other hand, since the levers 8a and 8b are separated from the cylindrical member 7a, no frictional force is generated between them. By repeating these actions, vibration is insulated and suppressed.

(Detailed description of operation)
Next, the operation of this apparatus will be described in detail with reference to FIG. 3, FIG. 4, FIG. 5 and FIG. FIG. 3 shows a change in the positional relationship of the cylindrical member 7a, the lever 8a, and the pressing spring 10a when the table 1 is moved to the right by the relative displacement x with respect to the base 2. The broken line is before the change, and the solid line is after the change. Indicates. In the state of the relative displacement x = 0 before the change, the center of the cylindrical member 7a is at the position of the point O, and the initial angle of the lever 8a arranged so as to be in contact with the pressing force 0 is θ ₀ . In the state of the relative displacement x after the change, the center of the cylindrical member 7a is moved to the position of the point O _x , and θ is the angle change when the lever 8a rotates the rotation shaft 9a clockwise. In addition, since the rotating shaft 9a and the spring support member 11a are attached to the upper surface of the base 2, a position does not change.

  FIG. 4 shows the lever 8a in a state where the cylindrical member 7a and the table 1 are at the position of the relative displacement x in the right direction and the relative velocity v is moving in the right direction with a positive speed (v = dx / dt> 0). , N is the force of the pressing spring 10a, P is the pressing force acting on the contact portion C with the cylindrical member 7a, and F is the frictional force. When the distance from the rotating shaft 9a to the line of action of these forces is d, s, e (offset), respectively, and considering the balance of moments about the rotating shaft 9a

It becomes. When the angle change θ of the lever 8a is small, the length change of the spring 10a is proportional to θ, and the spring force N is also proportional to θ.

It can be expressed as. Furthermore, assuming Coulomb friction and friction coefficient μ

It becomes. Where sgn (v) is the sign function

It is. As described above, this is a case where the direction of the friction force F shown in FIG. 4 is moving in the right direction where the relative speed is positive (v = dx / dt> 0), and the relative speed is negative (v = This is because the direction of force is reversed when moving to the left of dx / dt <0).

  If you transform and arrange Equation 1 to Equation 3

It becomes.

  In Equation 5, when the relative displacement x increases, the distance s from the rotating shaft 9a to the contact portion C decreases and the lever angle change θ increases, so that the pressing force P increases as the relative displacement x increases. I understand. Considering this characteristic and Equation 3, it can be seen that the frictional force F increases as the relative displacement x increases.

In Equation 5, if the pressing force when the offset e = 0 is P ₀ ,

Thus, it can be seen that P ₀ is determined only depending on the relative displacement x, regardless of the sign of the relative velocity v.

On the other hand, when e> 0, it varies greatly depending on the sign of the relative speed v. Specifically, if the pressing force when relative speed v> 0 is P _P and the pressing force when v <0 is P _M , Equation 5 is

It becomes. Relates denominator of equation (7), because it is s + μe> s-μe, it is understood that _{P P <P M.} Since s is closer to 0 the denominator of P _M is the closer to the value of [mu] e, P _M becomes extremely large, the s = [mu] e P _M becomes infinite. This means that the lever and the cylindrical member are fixed, and the table and the base are locked. Therefore, in practical use, it is necessary to pay attention to use in the range of s> μe. Such characteristics are the same as the self-boosting action known for drum brakes, as described above.

  Furthermore, when the relationship between the relative displacement x, the distance s, and the angle change θ of the lever is mathematically derived, the following relationship is obtained from the geometric relationship shown in FIG.

  5, L is an x-direction distance from the center O of the cylindrical member 7a to the center of the rotating shaft 9a when the relative displacement x = 0, and R is a radius of the cylindrical member 7a. h is the distance from the x coordinate axis passing through the center of the cylindrical member 7a to the center of the rotation axis 9a, and

It is.

Next, the force which acts on the cylindrical member 7a is shown in FIG. From the relationship of action / reaction with the lever 8a shown in FIG. 3, the pressing force P and the frictional force F act on the contact portion C with the lever 8a in the opposite direction to that when acting on the lever. If these resultant forces are Q, the x direction component is Q _x , and the y direction component is Q _y.

These forces act on the table 1 via the cylindrical member 7a.

Using the above formula 3 to formula 11, the following equation is used: e = 38 mm, h = 10 mm, R = 55 mm, L = 136 mm, kd = 30000 N · mm / rad, μ = 0.6 FIG. 7 shows the relationship between the displacement x, and FIG. 8 shows the relationship between the x-direction component Q _x of the resultant force and the relative displacement x. These numerical values are set for trial calculation, and when actually manufactured, there are various values such as the mass of the object to be insulated, the frequency range to be insulated, the resonance frequency and the height of the resonance peak. It is necessary to set the optimum parameters in consideration of various factors.

In Figure 7 and 8, the diagram 50a and diagrams 51a is the case of the relative velocity v> 0, with the relative displacement x increases, the x-direction component Q _x of the pressing force P and the resultant force increases from zero. On the other hand, the diagrams 50b and 51b are cases where the relative speed v <0, and the relative displacement x decreases and the pressing force P decreases to zero at the stationary balance position. Further, the x-direction component Q _x of the resultant force is a negative value and acts in the direction opposite to the arrow shown in FIG. 6, but its magnitude decreases to zero.

The energy dissipated before the relative displacement x increases from 0 to x _M and returns to 0 corresponds to the area of the region 52 surrounded by the diagrams 51a and 51b and x = x _M in FIG. As this increases, vibration is suppressed.

So far, the case where the levers 8a to 8d are arranged to be inclined with respect to the direction of the relative displacement x as shown in FIG. 2 has been considered, but the case where these are arranged in parallel will be considered. In this case, in FIG. 3, the initial angle θ ₀ of the lever 8a is 0, and the angle change θ is always 0 regardless of the relative displacement x.

When the lever 8a is inclined, the spring force N is set to be proportional to the angle change θ so that N = 0 when θ = 0 as shown in Equation 2, but the lever 8a is parallel. If the spring 10a is adjusted so that the spring force N ₀ of a certain magnitude acts slightly, and N = N _{0 in the} equation (5),

It becomes. Also, the geometric relational expression for the distance s is

It becomes. Furthermore, the x-direction component Q _x and the y-direction component Q _y of the resultant force Q acting on the cylindrical member 7a are set as θ = θ ₀ = 0 in Expression 11.

It becomes.

Although the numerator of Equation 12 is constant, since the denominator s changes with the relative displacement x, the x-direction component Q _{x of} the pressing force P and the resultant force Q also changes. The basic feature is that the levers 8a to 8d are relatively displaced. This is the same as the case where it is arranged to be inclined with respect to the direction x.

The above description has focused on the action of the lever 8a in the case of the relative displacement x> 0 in which the table 1 has moved to the right. However, the lever 8b also contacts the cylindrical member 7a and acts in the same manner as the lever 8a. . On the other hand, since the cylindrical member 7b and the levers 8c and 8d are not in contact with each other during this period, no frictional force is generated. Therefore, the total resultant force substantially acting on the table 1 (cylindrical member 7a) is twice as large as Q _x given by the formula 11 or the formula 14. Incidentally, the lever 8a and 8b with respect the y-direction in FIG. 2, for pressing the table 1 (columnar member 7a) in opposite directions, the resultant force in the y-direction forces Q _y is 0, the resultant force in the x direction in the table 1 Will only work. For this reason, an unreasonable force does not act on the guide members 3a to 3d, resulting in a smooth motion in the x direction.

  When the table 1 moves relatively to the left and the relative displacement x <0, the cylindrical member 7a and the levers 8a and 8b are separated from each other, and conversely, the cylindrical member 7b and the levers 8c and 8d are The contact force comes into contact, and a frictional force is generated in the opposite direction with the same action as described above.

  1 to 6 described so far, the cylindrical members 7 a and 7 b are installed on the lower surface of the table 1, and the rotary shafts 9 a to 9 d of the lever and the lever pressing spring support members 11 a to 11 d are installed on the upper surface of the base 2. However, conversely, the cylindrical members 7a and 7b are installed on the upper surface of the base 2, and the lever rotation shafts 9a to 9d and the lever pressing spring support members 11a to 11d are installed on the lower surface of the table 1. The same function can be demonstrated even if

  The embodiment of the present invention has been described above. However, this embodiment is not limited to the configuration shown in FIGS. The friction damper 102 shown in FIG. 9 is provided with a cylindrical member 7 on the lower surface of the table 1, and provided with lever rotation shafts 9e and 9f on the upper surface of the base 2, and the levers 8e and 8f can be freely rotated around this. Provide. These levers 8e and 8f are connected to the pressing springs 10e and 10f held by the base-side support members 11e and 11f, and are arranged so as to contact the cylindrical member 7.

This is equivalent to the structure in which the levers 8b and 8d and the rotary shaft and spring related thereto are removed in FIG. Therefore, the action of the columnar member 7 and the lever 8e when the table 1 provided with the columnar member 7 is relatively displaced x in the right direction is the force acting on the columnar member 7a and the lever 8a described with reference to FIGS. The relationship is exactly the same. However, since there is no lever corresponding to the lever 8b in FIG. 2, the total resultant force x-direction component that substantially acts on the table 1 is only Q _x given by Equation 11, and the y-direction component Q _y is canceled. Although left without being, the guide member 3a~3d is able to support fully the y direction component Q _y, can achieve the purpose of the same as in example 1 by giving a performance that can hold a smooth linear motion.

  Next, the main points of the third embodiment of the present invention will be described with reference to FIGS. In FIG. 10, the rotating shaft 9g of the lever 8g constituting the friction damper 103 is arranged offset to the opposite side to the cylindrical member 7a with respect to the line of action of the frictional force F. This is on the opposite side of the first embodiment in which the rotating shaft 9a of the lever 8a shown in FIG. 4 is arranged on the same side as the cylindrical member 7a with respect to the line of action of the frictional force F.

In the case of this embodiment, the relational expression between the pressing force P acting on the contact portion C of the lever and the cylindrical member and the x-direction component Q _x of the resultant force acting on the cylindrical member and the relative displacement x is expressed by Formula 1 to Formula 11. Where e is replaced with -e. As an example, when e = 15 mm, h = 60 mm, R = 55 mm, L = 136 mm, kd = 30000 N · mm / rad, μ = 0.6, the relationship between the pressing force P and the relative displacement x is obtained as shown in FIG. Thus, the relationship between the x direction component Q _x of the resultant force and the relative displacement x is obtained as shown in FIG.

In Figure 11, the diagram 53a and diagrams 54a is the case of the relative velocity v> 0, with the relative displacement x increases, the x-direction component Q _x of the pressing force P and the resultant force increases from zero. On the other hand, the diagrams 53b and 54b are cases where the relative speed v <0, and the relative displacement x decreases, and the pressing force P decreases to zero at the stationary balance position. Comparing the magnitudes of these forces, the first example of FIGS. 7 and 8 is large when the relative speed v <0, and conversely, the third example of FIGS. 11 and 12 is large when the relative speed v> 0. . This is because, due to the balance between the position of the offset e and the relative speed v, the self-boosting effect that the moment caused by the friction force F increases or decreases the pressing force P acts on the contrary.

  Note that the settings as in the first and second embodiments are suitable when manufacturing a device that places importance on vibration isolation performance, and the settings as in the third embodiment are preferred when importance is placed on suppressing the amplitude and resonance peak. Is suitable.

  In the embodiments so far, as shown in FIG. 2, the mechanism has been a mechanism for generating frictional force by pressing the levers 8 a to 8 d against the columnar members 7 a and 7 b provided on the lower surface of the table 1. The reason for this is to cope with the change in the tilt angle θ of the lever together with the relative displacement x as shown in FIG. However, since the cylindrical member and the lever are in line contact, there is a drawback that the contact portion is easily worn. A friction damper 104 according to an embodiment in which this drawback is improved will be described with reference to FIGS. Around the rotary shafts 30a to 30d provided on the lower surface of the table 1, prismatic members 31a to 31d that can freely rotate are arranged, and the levers 8a to 8d are in contact with these prismatic members. Although the inclination angle θ of the lever changes with the relative displacement x of the table 1, the angle of the prism member also changes accordingly, and the lever and the prism member always come into surface contact, so that wear can be reduced.

  As described in the first embodiment, the levers 8a to 8d can be arranged in parallel to the direction of the relative displacement x. In this case, since the inclination angle θ of the lever is always 0, the contact surfaces of the prism members 31a to 31d with the lever can be fixedly installed so as to be parallel to the direction of the relative displacement x, and the rotary shaft 30a. ˜30d becomes unnecessary.

  In the embodiments so far, as shown in FIG. 2, the springs 10a to 10d held by the base-side support members 11a to 11d are used to press the levers 8a to 8d against the cylindrical members 7a and 7b. There is no need for such a configuration, and various methods are conceivable. For example, in the friction damper 105 of the embodiment shown in FIG. 15, the levers 8a and 8b are connected by the connecting spring 20a, the levers 8c and 8d are connected by the connecting spring 20b, and these levers are pressed against the cylindrical members 7a and 7b. It has a structure.

  Further, if the rotary shafts 9a to 9d themselves are used as springs of a torsion bar (torsion shaft) and the levers 8a to 8d are fixed thereto, there is no need to provide springs such as the connecting springs 20a and 20b.

  Furthermore, in the friction damper 106 of Example 6 shown in FIG. 16, one end of the leaf springs 41a to 41d is fixed to the support members 40a to 40d provided on the upper surface of the base, and the levers 8p to 8s are attached to the other ends of these leaf springs. It has a fixed structure. In this case, the rotating shafts 9a to 9d as shown in FIG.

DESCRIPTION OF SYMBOLS 1 Table 2 Base 3a-3d Guide member 4a, 4b Restoration spring 5a, 5b Rest side spring support member 6a, 6b Restoration spring base side support member 7, 7a, 7b Cylindrical member 8a-8g, 8p-8s Lever 9a ˜9g Lever rotation shafts 10a to 10f Pressing springs 11a to 11f Pressing spring support members 20a and 20b Linking springs 30a to 30d Square column member rotation shafts 31a to 31d Square column members 40a to 40d 50b, 53a, 53b pressing force P and the relative displacement x of the relational diagram 51a, 51b, 54a, 54b force the x direction component Q _x and the relative displacement x of the relational diagram 52 corresponding to the region 101 to 106 friction damper dissipates energy C Contact portion between lever and cylindrical member O In cylindrical member when relative displacement x is 0 Acting on the force Q columnar member of the frictional force N pressing spring acting between the pressing force F lever and columnar member acting between the position P lever and the cylindrical member of the cylinder member center if O _x relative displacement of the x-position of the Resultant force Q _x x-direction component of resultant force Q acting on cylindrical member Q _y y-direction component of resultant force Q acting on cylindrical member v relative speed of table relative to base x relative displacement of table relative to base, coordinate axis y coordinate axis on horizontal plane Coordinate axis perpendicular to z z Vertical coordinate axis θ ₀ Inclination angle of lever when relative displacement x is 0 θ Change amount of lever inclination angle when relative displacement x occurs d Action line of force of pressing spring from lever rotation axis S Distance from the lever rotation axis to the contact part C between the lever and the cylindrical member e Distance from the lever rotation axis to the friction force action line (offset)
h Distance from the x axis passing through the center of the cylinder member to the rotation axis of the lever L Distance from the rotation axis of the lever to the center of the cylinder member when the relative displacement x is 0 R Radius of the cylinder member

Claims (4)

The table on which the object to be insulated is mounted can move relative to the base in the horizontal linear direction via the guide member, and the table and base are connected by a restoring spring to give the table a restoring force. In the insulation device,
As a damping mechanism to suppress excessive resonance vibration when an external force is acting and to quickly converge the vibration after the external force is left, a block-shaped friction member is placed on one opposing surface of the table or base. And a pressing device comprising a lever whose base portion is rotatable about the rotation axis and a pressing spring for pressing the inner surface of the front end side of the lever against the outer peripheral surface of the friction member. If a relative displacement occurs between the table and the base by arranging the lever surface that contacts the friction member to be inclined with respect to the relative movement direction, the pressing force applied by the pressing device in response to the relative displacement Is a vibration isolator using a friction damper in which the magnitude of the friction force generated between the friction member and the lever changes as a result of
The friction member constituting the friction damper is constituted by a pair of left and right cylindrical members arranged at a distance in a horizontal linear direction that is a relative movement direction of the table and the base, and the lever constituting the pressing device is A pair of levers that contact the outer peripheral surfaces of the pair of columnar members in a substantially C shape and whose front end side can be freely opened and closed, and the pressing spring includes a support member provided on a table or a base and each lever A vibration isolator which is interposed between the outer surface of the front end side of each of the above . The vibration isolator according to claim 1.
A vibration isolator comprising a pair of levers that contact the outer peripheral surface of each cylindrical member in a substantially parallel inclined manner with the lever constituting the pressing device. The vibration isolator according to claim 1 or 2,
By providing an offset by separating the rotation shaft portion of each lever from the frictional force acting line, the frictional force generates a rotational moment on the lever, and the pressing force is increased or decreased. A vibration isolator using a self-boosting effect for amplification . The vibration isolator according to any one of claims 1 to 3 , wherein two or more sets of upper and lower are arranged so that directions of relative movement of the table with respect to the base are orthogonal to each other, thereby providing two-dimensional planar movement. A vibration isolation device characterized in that a vibration isolation action corresponding to is performed.