JP4989247B2 - Capacitive humidity sensor - Google Patents

Capacitive humidity sensor Download PDF

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JP4989247B2
JP4989247B2 JP2007032036A JP2007032036A JP4989247B2 JP 4989247 B2 JP4989247 B2 JP 4989247B2 JP 2007032036 A JP2007032036 A JP 2007032036A JP 2007032036 A JP2007032036 A JP 2007032036A JP 4989247 B2 JP4989247 B2 JP 4989247B2
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electrode
humidity sensor
moisture sensitive
capacitive humidity
moisture
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JP2008196955A (en
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稔 須藤
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Seiko Instruments Inc
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Seiko Instruments Inc
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本発明は、容量式湿度センサ及びその製造方法に関する。   The present invention relates to a capacitive humidity sensor and a method for manufacturing the same.

湿度を感知するものとして容量式湿度センサが知られている。図５は、従来の容量式湿度センサを示す断面図である。
従来の容量式湿度センサでは、図５に示すように、基板５１の上に感湿膜５３が形成され、感湿膜５３の上に電極５２が形成されている（例えば、特許文献１参照）。
電極５１、電極５２及び感湿膜５３は、容量を形成する。電極５１と電極５２とは、容量の電極として機能する。感湿膜５３は、湿度の変化によって比誘電率が変化する。
この容量の容量値Cは、真空の誘電率をε0とし、感湿膜の比誘電率をεHとし、基板５１と電極５２との対向する面積をＳとし、感湿膜５３の厚みをｄHとすると、
Ｃ＝ε0×εH×Ｓ／ｄH
によって算出される。
湿度が変化すると、感湿膜５３の比誘電率も変化する。すると、容量の容量値が変化する。電極５１及び電極５２を用いて容量値が測定されることにより、湿度が測定される。
特開平０６−１１４７４号（図４） A capacitive humidity sensor is known as one that senses humidity. FIG. 5 is a cross-sectional view showing a conventional capacitive humidity sensor.
In the conventional capacitive humidity sensor, as shown in FIG. 5, a moisture sensitive film 53 is formed on a substrate 51, and an electrode 52 is formed on the moisture sensitive film 53 (see, for example, Patent Document 1). .
The electrode 51, the electrode 52, and the moisture sensitive film 53 form a capacitance. The electrodes 51 and 52 function as capacitive electrodes. The relative permittivity of the moisture sensitive film 53 changes with changes in humidity.
The capacitance value C of this capacitor is that the dielectric constant of vacuum is ε 0 , the relative dielectric constant of the moisture sensitive film is ε H , the area where the substrate 51 and the electrode 52 are opposed is S, and the thickness of the moisture sensitive film 53 is Let d H be
C = ε 0 × ε H × S / d H
Is calculated by
When the humidity changes, the relative dielectric constant of the moisture sensitive film 53 also changes. Then, the capacitance value of the capacitance changes. Humidity is measured by measuring the capacitance value using the electrode 51 and the electrode 52.
Japanese Patent Laid-Open No. 06-11474 (FIG. 4)

ところで、感湿膜５３がパターニングされるように、感光性のある感湿膜５３が使用されるか、感光性のない感湿膜５３及びレジストのような感光性の膜が使用されるかする。後者の場合、レジストのような感光性の膜が感湿膜５３の上にスピンコートされ、その膜がパターニングされ、その膜をマスクとして感湿膜５３がパターニングされ、その膜が除去される。よって、前者の場合、感光性のない感湿膜５３は使用されなくなり、後者の場合、感湿膜５３の製造工程が複雑になってしまう。
本発明は、上記課題に鑑みてなされ、感光性のない感湿膜を使用でき、感湿膜の製造工程を容易にできる容量式湿度センサを提供する。 By the way, the photosensitive moisture sensitive film 53 is used so that the moisture sensitive film 53 is patterned, or the non-photosensitive moisture sensitive film 53 and a photosensitive film such as a resist are used. . In the latter case, a photosensitive film such as a resist is spin-coated on the moisture sensitive film 53, the film is patterned, the moisture sensitive film 53 is patterned using the film as a mask, and the film is removed. Therefore, in the former case, the moisture-sensitive film 53 having no photosensitivity is not used, and in the latter case, the manufacturing process of the moisture-sensitive film 53 is complicated.
The present invention has been made in view of the above problems, and provides a capacitive humidity sensor that can use a moisture-sensitive film having no photosensitivity and can facilitate the process of manufacturing the moisture-sensitive film.

本発明は、上記課題を解決するため、容量式湿度センサにおいて、一部分が第二電極の一部分に挟まれ、基板の上に櫛歯状に形成された第一電極と、一部分が前記第一電極の一部分に挟まれ、前記基板の上に櫛歯状に形成された前記第二電極と、所定量の感湿液が前記第一電極及び前記第二電極の上の所定の箇所に吹き付けられることによって前記第一電極及び前記第二電極の上及び間に形成され、湿度の変化によって比誘電率が変化する感湿膜と、前記第一電極、前記第二電極及び前記感湿膜よりも厚い、前記第一電極及び前記第二電極を囲む絶縁体と、を備えていることを特徴とする容量式湿度センサを提供する。   In order to solve the above-mentioned problems, the present invention provides a capacitive humidity sensor in which a part of the second electrode is sandwiched between parts of the second electrode and formed in a comb-like shape on a substrate, and part of the first electrode A second electrode formed in a comb-like shape on the substrate, and a predetermined amount of moisture sensitive liquid is sprayed to a predetermined location on the first electrode and the second electrode. A moisture sensitive film formed on and between the first electrode and the second electrode, the dielectric constant of which changes with humidity, and is thicker than the first electrode, the second electrode, and the moisture sensitive film And an insulator surrounding the first electrode and the second electrode. A capacitive humidity sensor is provided.

また、容量式湿度センサにおいて、島状に複数形成された第一電極と、全ての前記第一電極を接続している金属配線と、前記第一電極をそれぞれ囲む形状で形成された第二電極と、所定量の感湿液が前記第一電極及び前記第二電極の上の所定の箇所に吹き付けられることによって前記第一電極及び前記第二電極の上及び間に形成され、湿度の変化によって比誘電率が変化する感湿膜と、前記第一電極、前記第二電極及び前記感湿膜よりも厚い、全ての前記第一電極及び前記第二電極を囲む絶縁体と、を備えていることを特徴とする容量式湿度センサを提供する。   Further, in the capacitive humidity sensor, a plurality of first electrodes formed in an island shape, a metal wiring connecting all the first electrodes, and a second electrode formed in a shape surrounding each of the first electrodes And a predetermined amount of moisture sensitive liquid is formed on and between the first electrode and the second electrode by being sprayed to a predetermined location on the first electrode and the second electrode, and changes in humidity A moisture-sensitive film having a change in relative dielectric constant; and an insulator surrounding all the first electrode and the second electrode that are thicker than the first electrode, the second electrode, and the moisture-sensitive film. A capacitive humidity sensor is provided.

また、容量式湿度センサの製造方法において、第一電極及び第二電極が基板の上に形成されるステップと、前記第一電極及び前記第二電極を囲む絶縁体が前記基板の上に形成されるステップと、所定量の感湿液が前記第一電極及び前記第二電極の上の所定の箇所に吹き付けられるステップと、吹き付けられた直後の前記感湿液は、中心付近では厚いが、それ以外では薄く、自然に重力によって高い所から低い所に流れておよそ円形に広がっていき、所定時間経過後に前記基板の上の前記絶縁体に囲まれた領域で略水平な感湿膜になるステップと、を備えていることを特徴とする容量式湿度センサの製造方法を提供する。   In the method of manufacturing a capacitive humidity sensor, a step in which the first electrode and the second electrode are formed on the substrate, and an insulator surrounding the first electrode and the second electrode are formed on the substrate. The step of spraying a predetermined amount of moisture sensitive liquid on the first electrode and the second electrode on the predetermined location, and the moisture sensitive liquid immediately after being sprayed are thick near the center, Other than the above, the step is thin, naturally flows from a high place to a low place by gravity and spreads in a circular shape, and becomes a substantially horizontal moisture-sensitive film in a region surrounded by the insulator on the substrate after a predetermined time. A method for manufacturing a capacitive humidity sensor is provided.

本発明では、感湿膜の形成時にフォトプロセスが不要になるので、感光性のない感湿膜を使用することができる。また、感湿膜の製造工程を容易にすることができ、容量式湿度センサのコストを低くできる。 In the present invention, since a photo process is not required when forming the moisture sensitive film, a moisture sensitive film having no photosensitivity can be used. In addition, the manufacturing process of the moisture sensitive film can be facilitated, and the cost of the capacitive humidity sensor can be reduced.

以下、本発明の実施形態を、図面を参照して説明する。
［第一実施形態］（櫛歯状の電極を持つ１つの容量式湿度センサ）
まず、容量式湿度センサについて説明する。図１は、容量式湿度センサを示す図であり、（Ａ）は、容量式湿度センサの平面図を示し、（Ｂ）は、（Ａ）の容量式湿度センサにおけるＸ−Ｘ”間の断面図を示している。 Embodiments of the present invention will be described below with reference to the drawings.
[First embodiment] (One capacitive humidity sensor having comb-like electrodes)
First, the capacitive humidity sensor will be described. 1A and 1B are diagrams showing a capacitive humidity sensor, FIG. 1A is a plan view of the capacitive humidity sensor, and FIG. 1B is a cross-section taken along line XX ″ in the capacitive humidity sensor of FIG. The figure is shown.

容量式湿度センサでは、図１に示すように、電極１１及び電極１２が、基板１０の上に櫛歯状に形成され、絶縁体１３によって囲まれている。電極１１の一部分は、電極１２の一部分に挟まれ、電極１２の一部分は、電極１１の一部分に挟まれている。また、図１の（Ｂ）に示すように、電極１１及び電極１２の上及び間に、感湿膜１４（例えば、厚さ５ｕｍ〜１０ｕｍ）が形成されている。絶縁体１３は、電極１１、電極１２及び感湿膜１４よりも厚くなっている。
電極１１、電極１２及び感湿膜１４は、容量を形成する。電極１１及び電極１２は、容量の電極として機能する。感湿膜１４は、湿度の変化によって比誘電率が変化する。
次に、湿度の測定方法について説明する。 In the capacitive humidity sensor, as shown in FIG. 1, the electrode 11 and the electrode 12 are formed in a comb shape on the substrate 10 and surrounded by an insulator 13. A part of the electrode 11 is sandwiched between a part of the electrode 12, and a part of the electrode 12 is sandwiched between a part of the electrode 11. Further, as shown in FIG. 1B, a moisture sensitive film 14 (for example, a thickness of 5 μm to 10 μm) is formed on and between the electrode 11 and the electrode 12. The insulator 13 is thicker than the electrode 11, the electrode 12, and the moisture sensitive film 14.
The electrode 11, the electrode 12, and the moisture sensitive film 14 form a capacitance. The electrodes 11 and 12 function as capacitive electrodes. The relative humidity of the moisture sensitive film 14 varies with changes in humidity.
Next, a method for measuring humidity will be described.

湿度が変化すると、感湿膜１４の比誘電率も変化する。すると、容量の容量値が変化する。電極１１及び電極１２を用いて容量値が測定されることにより、湿度が測定される。   When the humidity changes, the relative dielectric constant of the moisture sensitive film 14 also changes. Then, the capacitance value of the capacitance changes. Humidity is measured by measuring the capacitance value using the electrode 11 and the electrode 12.

次に、容量式湿度センサの製造方法について説明する。図２は、感湿液吹き付け直後の容量式湿度センサを示す図であり、（Ａ）は、容量式湿度センサの平面図を示し、（Ｂ）は、（Ａ）の容量式湿度センサにおけるＸ−Ｘ”間の断面図を示している。
電極１１及び電極１２が基板１０の上に形成された後、絶縁体１３が基板１０の上に形成される。その後、感湿液１４ａを所定の箇所に吐出する装置が基板１０の上に設けられていて、その装置により、図２の（Ｂ）に示すように、所定量の感湿液１４ａが電極１１及び電極１２の上の所定の箇所に吹き付けられる。ここでは、感湿液１４ａは、２箇所に吹き付けられている。吹き付けられる感湿液１４ａの量は、図１の（Ｂ）に示すような感湿膜１４に厚さ、図２の（Ａ）に示すような絶縁体１３に囲まれて露出している基板１０の面積、溶剤の種類や量に基づいた感湿液１４ａの粘度（例えば、１００ｃｐｓ〜１５０００ｃｐｓ）、感湿液１４ａに含まれる揮発性物質の量などに基づいて予め設計される。吹き付けられた直後の感湿液１４ａは、図２に示したように、円の中心付近では厚いが、それ以外では薄い。この感湿液１４ａは、自然に重力によって高い所から低い所に流れ、およそ円形に広がっていく。最終的に、感湿液１４ａは、図１の（Ｂ）に示すように、所定時間経過後に、基板１０の上の絶縁体１３に囲まれた領域で略水平な感湿膜１４になる。
ここで、Ｓｉなどの半導体が基板１０として使用され、半導体フォトプロセスが使用される場合、酸化することやＳｉＯ2をデポジットすることにより、絶縁体層が基板１０の表面に容易に設けられる。その後、アルミなどの金属のスパッタ後または蒸着後、その金属がパターニングされ、容易に図１に示すような櫛歯状の電極１１及び電極１２が基板１０の上の絶縁体層の上に形成される。電極形成後、ＣＶＤ（Chemical Vapor Deposition）装置により、ＳｉＯ2膜や窒化膜がデポジットされ、絶縁体１３が基板１０の上の絶縁体層の上に形成される。なお、ポリイミド膜も絶縁体１３として設けられてもよい。つまり、半導体フォトプロセスを使用することにより、電極１１及び電極１２が形成されること、及び、電極１１、電極１２及び感湿膜１４よりも厚い絶縁体１３が形成されることは容易である。
また、感湿液１４ａを所定の箇所に吐出する装置による液体吐出方法は、熱源によって感湿液１４ａに気泡を発生させ、その時の力で感湿液１４ａを吐出する方法、圧電体などの変形によって感湿液１４ａの体積を変化させ、その時の力で感湿液１４ａを吐出する方法などがある。
このようにすると、感湿膜１４の形成時にフォトプロセスが不要になるので、感光性のない感湿膜１４を使用することができる。また、感湿膜１４の製造工程を容易にすることができ、容量式湿度センサのコストを低くできる。 Next, a method for manufacturing a capacitive humidity sensor will be described. 2A and 2B are diagrams illustrating a capacitive humidity sensor immediately after spraying a moisture-sensitive liquid. FIG. 2A is a plan view of the capacitive humidity sensor, and FIG. 2B is an X in the capacitive humidity sensor of FIG. The cross-sectional view between -X "is shown.
After the electrodes 11 and 12 are formed on the substrate 10, the insulator 13 is formed on the substrate 10. After that, a device for discharging the moisture sensitive liquid 14a to a predetermined location is provided on the substrate 10, and the predetermined amount of the moisture sensitive liquid 14a is applied to the electrode 11 by the device as shown in FIG. And it sprays on the predetermined location on the electrode 12. Here, the moisture sensitive liquid 14a is sprayed in two places. The amount of the moisture-sensitive liquid 14a to be sprayed is the thickness of the moisture-sensitive film 14 as shown in FIG. 1B and the exposed substrate surrounded by the insulator 13 as shown in FIG. Designed in advance based on the area of 10, the viscosity of the moisture sensitive liquid 14a based on the type and amount of the solvent (for example, 100 cps to 15000 cps), the amount of volatile substances contained in the moisture sensitive liquid 14a, and the like. As shown in FIG. 2, the moisture-sensitive liquid 14a immediately after being sprayed is thick near the center of the circle, but is thin otherwise. The moisture sensitive liquid 14a naturally flows from a high place to a low place by gravity and spreads in a circular shape. Finally, as shown in FIG. 1B, the moisture-sensitive liquid 14a becomes a substantially horizontal moisture-sensitive film 14 in a region surrounded by the insulator 13 on the substrate 10 after a predetermined time has elapsed.
Here, when a semiconductor such as Si is used as the substrate 10 and a semiconductor photo process is used, the insulator layer is easily provided on the surface of the substrate 10 by oxidizing or depositing SiO 2 . Thereafter, after sputtering or vapor deposition of a metal such as aluminum, the metal is patterned, and the comb-like electrode 11 and the electrode 12 as shown in FIG. 1 are easily formed on the insulator layer on the substrate 10. The After the electrodes are formed, a SiO 2 film or a nitride film is deposited by a CVD (Chemical Vapor Deposition) apparatus, and the insulator 13 is formed on the insulator layer on the substrate 10. Note that a polyimide film may also be provided as the insulator 13. That is, it is easy to form the electrode 11 and the electrode 12 and to form the insulator 13 thicker than the electrode 11, the electrode 12, and the moisture sensitive film 14 by using the semiconductor photo process.
Moreover, the liquid discharge method by the apparatus which discharges the moisture sensitive liquid 14a to a predetermined location is a method in which bubbles are generated in the moisture sensitive liquid 14a by a heat source and the moisture sensitive liquid 14a is discharged with the force at that time. There is a method of changing the volume of the moisture sensitive liquid 14a and discharging the moisture sensitive liquid 14a with the force at that time.
This eliminates the need for a photo process when the moisture sensitive film 14 is formed, so that the moisture sensitive film 14 having no photosensitivity can be used. Moreover, the manufacturing process of the moisture sensitive film | membrane 14 can be made easy, and the cost of a capacitive humidity sensor can be made low.

また、スクリーン印刷によって感湿膜１４が形成される場合、スクリーン印刷で使用されるステンレスなどの金属マスク（例えば、厚さ６０ｕｍ〜１００ｕｍ）を薄くすることが困難であるので、感湿膜１４も薄くなりにくいが、本発明では、感湿膜１４が、スクリーン印刷によって形成されないので、また、感湿液１４ａの量が、感湿膜１４に厚さ、絶縁体１３に囲まれて露出している基板１０の面積、溶剤の種類や量に基づいた感湿液１４ａの粘度、感湿液１４ａに含まれる揮発性物質の量などに基づいて予め設計されるので、感湿膜１４を薄くすることができる。
［第二実施形態］（櫛歯状の電極を持つ複数の容量式湿度センサ）
また、第一実施形態で1つの電極対について説明したが、複数の電極対が一緒に形成されてもよい。図３は、複数の容量式湿度センサを示す図である。 Further, when the moisture sensitive film 14 is formed by screen printing, it is difficult to thin a metal mask (for example, thickness 60 um to 100 um) such as stainless steel used in the screen printing. In the present invention, since the moisture sensitive film 14 is not formed by screen printing, the amount of the moisture sensitive liquid 14a is exposed to the moisture sensitive film 14 being thick and surrounded by the insulator 13. The moisture sensitive film 14 is thinned because it is preliminarily designed based on the area of the substrate 10, the viscosity of the moisture sensitive liquid 14a based on the type and amount of the solvent, and the amount of volatile substances contained in the moisture sensitive liquid 14a. be able to.
[Second Embodiment] (Multiple capacitive humidity sensors having comb-like electrodes)
Further, although one electrode pair has been described in the first embodiment, a plurality of electrode pairs may be formed together. FIG. 3 is a diagram showing a plurality of capacitive humidity sensors.

第一実施形態と同一の容量式湿度センサが、２つ形成されている。一の容量式湿度センサは、電極１１及び電極１２を備え、他の容量式湿度センサは、電極１１ａ及び電極１２ａを備えている。   Two capacitive humidity sensors identical to those of the first embodiment are formed. One capacitive humidity sensor includes an electrode 11 and an electrode 12, and the other capacitive humidity sensor includes an electrode 11a and an electrode 12a.

異なる感湿液が各電極対の上にそれぞれ吹き付けられると、湿度に対する反応性が異なる容量式湿度センサが２つ形成される。例えば、一の容量式湿度センサでは湿度０％〜５０％で感度の高い感湿液が電極１１及び電極１２の上に吹き付けられ、他の容量式湿度センサでは湿度５０％〜１００％で感度の高い感湿液が電極１１ａ及び電極１２ａの上に吹き付けられるようにし、湿度０％〜５０％で感度の高い容量式湿度センサ及び湿度５０％〜１００％で感度の高い容量式湿度センサが形成されるようにする。
このようにすると、湿度に基づいて最適な容量式湿度センサが選択され、湿度が正確に測定される。 When different moisture sensitive liquids are sprayed on each electrode pair, two capacitive humidity sensors having different responsiveness to humidity are formed. For example, in one capacitive humidity sensor, a highly sensitive humidity sensitive liquid is sprayed on the electrode 11 and the electrode 12 at a humidity of 0% to 50%, and in the other capacitive humidity sensor, the sensitivity is 50% to 100%. A high humidity sensitive liquid is sprayed on the electrode 11a and the electrode 12a to form a capacitive humidity sensor having a high sensitivity at a humidity of 0% to 50% and a capacitive humidity sensor having a high sensitivity at a humidity of 50% to 100%. So that
In this way, an optimal capacitive humidity sensor is selected based on the humidity, and the humidity is accurately measured.

同一の感湿液が各電極対の上にそれぞれ吹き付けられると、湿度に対する反応性が同一の容量式湿度センサが２つ形成される。   When the same moisture sensitive liquid is sprayed on each electrode pair, two capacitive humidity sensors having the same reactivity to humidity are formed.

このようにすると、２つの容量式湿度センサが出力信号を出力し、それらの出力信号の平均値が算出されることができ、その平均値を用いることによって湿度が正確に測定される。
［第三実施形態］（島状の電極を持つ１つの容量式湿度センサ）
また、櫛歯状の電極について説明したが、他の形状の電極が形成されてもよい。図４は、島状の電極が形成された容量式湿度センサを示す図である。
容量式湿度センサでは、図４に示すように、電極３１が島状に複数形成され、電極３２が電極３１をそれぞれ囲む形状で形成されている。全ての電極３１は、図示しないが、金属配線によって接続されている。また、全ての電極３１及び電極３２は、絶縁体３３によって囲まれている。また、図４に示すように、電極３１及び電極３２の上及び間に、感湿膜３４（例えば、厚さ５ｕｍ〜１０ｕｍ）が形成されている。絶縁体３３は、電極３１、電極３２及び感湿膜３４よりも厚くなっている。 In this way, two capacitive humidity sensors output output signals, and the average value of the output signals can be calculated, and the humidity is accurately measured by using the average value.
[Third embodiment] (One capacitive humidity sensor having island-shaped electrodes)
Moreover, although the comb-shaped electrode has been described, electrodes having other shapes may be formed. FIG. 4 is a diagram showing a capacitive humidity sensor in which island-shaped electrodes are formed.
In the capacitive humidity sensor, as shown in FIG. 4, a plurality of electrodes 31 are formed in an island shape, and electrodes 32 are formed so as to surround the electrodes 31. All the electrodes 31 are connected by metal wiring, although not shown. All the electrodes 31 and 32 are surrounded by an insulator 33. Further, as shown in FIG. 4, a moisture sensitive film 34 (for example, a thickness of 5 μm to 10 μm) is formed on and between the electrode 31 and the electrode 32. The insulator 33 is thicker than the electrode 31, the electrode 32, and the moisture sensitive film 34.

次に、容量式湿度センサの製造方法について説明する。
電極３１及び電極３２が基板の上に形成された後、絶縁体３３が基板の上に形成される。その後、所定量の感湿液が電極３１及び電極３２の上の所定の箇所に吹き付けられる。吹き付けられた直後の感湿液は、所定時間経過後に、基板の上の絶縁体３３に囲まれた領域で略水平な感湿膜３４になる。
［第四実施形態］（島状の電極を持つ複数の容量式湿度センサ）
また、第三実施形態で1つの電極対について説明したが、複数の電極対が一緒に形成されてもよい。
図示しないが、第三実施形態と同一の容量式湿度センサが、２つ形成されてもよい。
なお、基板１０は、絶縁機能を有すればよく、セラミック基板、エポキシ基板、半導体基板などでもよい。
また、容量式湿度センサが製造されるように、湿度の変化によって比誘電率が変化する感湿液１４ａが電極１１及び電極１２の上に吹き付けられているが、容量式の液体検出センサや気体検出センサが製造されるように、酸を含む液体やＨ2などに反応して比誘電率が変化する液体が電極１１及び電極１２の上に吹き付けられてもよい。
また、容量式湿度センサ単体のみについて説明したが、半導体基板上に、容量式湿度センサと容量式湿度センサからの信号を処理する信号処理回路とが一緒に集積化されて形成されてもよい。この時、一つの半導体装置により、信号処理、インピーダンス変換などが行われ、容量値（つまり、湿度）が半導体装置外部に出力される。よって、電極１１及び電極１２と信号処理回路とを接続する配線における寄生容量が小さくなる。また、容量式湿度センサ及び信号処理回路が小型化する。 Next, a method for manufacturing a capacitive humidity sensor will be described.
After the electrode 31 and the electrode 32 are formed on the substrate, the insulator 33 is formed on the substrate. Thereafter, a predetermined amount of moisture sensitive liquid is sprayed onto predetermined locations on the electrode 31 and the electrode 32. The moisture-sensitive liquid immediately after being sprayed becomes a substantially horizontal moisture-sensitive film 34 in a region surrounded by the insulator 33 on the substrate after a lapse of a predetermined time.
[Fourth embodiment] (Multiple capacitive humidity sensors with island-shaped electrodes)
Further, although one electrode pair has been described in the third embodiment, a plurality of electrode pairs may be formed together.
Although not shown, two capacitive humidity sensors identical to those in the third embodiment may be formed.
The substrate 10 only needs to have an insulating function, and may be a ceramic substrate, an epoxy substrate, a semiconductor substrate, or the like.
Further, in order to manufacture a capacitive humidity sensor, a humidity sensitive liquid 14a whose relative dielectric constant changes with changes in humidity is sprayed on the electrode 11 and the electrode 12, but a capacitive liquid detection sensor or gas A liquid whose relative dielectric constant changes in response to a liquid containing an acid or H 2 may be sprayed on the electrode 11 and the electrode 12 so that the detection sensor is manufactured.
Although only the capacitive humidity sensor has been described, a capacitive humidity sensor and a signal processing circuit for processing a signal from the capacitive humidity sensor may be integrated and formed on a semiconductor substrate. At this time, signal processing, impedance conversion, and the like are performed by one semiconductor device, and a capacitance value (that is, humidity) is output to the outside of the semiconductor device. Therefore, the parasitic capacitance in the wiring connecting the electrodes 11 and 12 and the signal processing circuit is reduced. In addition, the capacitive humidity sensor and the signal processing circuit are reduced in size.

容量式湿度センサを示す図であり、（Ａ）は、容量式湿度センサの平面図を示し、（Ｂ）は、（Ａ）の容量式湿度センサにおけるＸ−Ｘ”間の断面図を示している。It is a figure which shows a capacitive humidity sensor, (A) shows the top view of a capacitive humidity sensor, (B) shows sectional drawing between XX "in the capacitive humidity sensor of (A). Yes. 感湿液吹き付け直後の容量式湿度センサを示す図であり、（Ａ）は、容量式湿度センサの平面図を示し、（Ｂ）は、（Ａ）の容量式湿度センサにおけるＸ−Ｘ”間の断面図を示している。It is a figure which shows the capacity | capacitance type humidity sensor immediately after spraying a moisture sensitive liquid, (A) shows the top view of a capacity type humidity sensor, (B) is between XX "in the capacity type humidity sensor of (A). FIG. 複数の容量式湿度センサを示す図である。It is a figure showing a plurality of capacity type humidity sensors. 島状の電極が形成された容量式湿度センサを示す図である。It is a figure which shows the capacitive humidity sensor in which the island-shaped electrode was formed. 従来の容量式湿度センサを示す断面図である。It is sectional drawing which shows the conventional capacitive humidity sensor.

符号の説明Explanation of symbols

１１ 電極 １２ 電極 １３ 絶縁体 １４ 感湿膜
１０ 基板 11 Electrode 12 Electrode 13 Insulator 14 Moisture Sensitive Film 10 Substrate

Claims (1)

容量式湿度センサにおいて、
島状に複数形成された第一電極と、
全ての前記第一電極を接続している金属配線と、
前記第一電極をそれぞれ囲む形状で形成された第二電極と、
所定量の感湿液が前記第一電極及び前記第二電極の上の所定の箇所に吹き付けられることによって前記第一電極及び前記第二電極の上及び間に形成され、湿度の変化によって比誘電率が変化する感湿膜と、
前記第一電極、前記第二電極及び前記感湿膜よりも厚い、全ての前記第一電極及び前記第二電極を囲む絶縁体と、
を備えていることを特徴とする容量式湿度センサ。 For capacitive humidity sensors,
A plurality of first electrodes formed in an island shape;
Metal wiring connecting all the first electrodes;
A second electrode formed in a shape surrounding each of the first electrodes;
A predetermined amount of moisture sensitive liquid is formed on and between the first electrode and the second electrode by being sprayed to a predetermined location on the first electrode and the second electrode, and a relative dielectric is formed by a change in humidity. A moisture sensitive film with a variable rate;
An insulator surrounding all of the first electrode and the second electrode, which is thicker than the first electrode, the second electrode and the moisture sensitive film;
A capacitive humidity sensor comprising:
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