JP4987642B2 - Coaxial waveguide with plug - Google Patents

Coaxial waveguide with plug Download PDF

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JP4987642B2
JP4987642B2 JP2007236020A JP2007236020A JP4987642B2 JP 4987642 B2 JP4987642 B2 JP 4987642B2 JP 2007236020 A JP2007236020 A JP 2007236020A JP 2007236020 A JP2007236020 A JP 2007236020A JP 4987642 B2 JP4987642 B2 JP 4987642B2
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conductor
insertion portion
coaxial waveguide
discharge lamp
microwave oscillator
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JP2009070633A (en
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正士 神藤
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PLASMA APPLICATIONS INC.
Shizuoka University NUC
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PLASMA APPLICATIONS INC.
Shizuoka University NUC
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本発明は、マイクロ波発振器から発生した電磁波を導波する同軸導波管に関し、特に差込部付き同軸導波管に関するものである。   The present invention relates to a coaxial waveguide that guides electromagnetic waves generated from a microwave oscillator, and more particularly to a coaxial waveguide with an insertion portion.

従来の放電灯として、図8に示すものがあった。図8において、1は放電灯であり、楕円体状の放電容器2内にキセノンガスと少量の添加物とからなる発光物質を封入し、該放電容器2内に、該放電容器2の長軸に沿って長軸方向に伸びるように所定の間隔をおいて一対の棒状部材3,4を設ける。各棒状部材3,4は石英またはアルミナ等の絶縁体により形成し、先端は放電容器2内に突出させ、他端は放電容器2の外部に突出させる。   A conventional discharge lamp is shown in FIG. In FIG. 8, reference numeral 1 denotes a discharge lamp, in which a luminescent material composed of a xenon gas and a small amount of an additive is enclosed in an ellipsoidal discharge vessel 2, and the major axis of the discharge vessel 2 is placed in the discharge vessel 2. A pair of rod-shaped members 3 and 4 are provided at predetermined intervals so as to extend in the major axis direction. Each rod-shaped member 3, 4 is formed of an insulator such as quartz or alumina, and the tip is projected into the discharge vessel 2 and the other end is projected outside the discharge vessel 2.

各棒状部材3,4には、先端が先鋭に形成された金属製の棒状アンテナ部材5,6が埋設され、該棒状アンテナ部材5,6の基端部は棒状部材3,4から外部に突出されている。前記各棒状アンテナ部材5,6は放電容器2内で所定のギャップG3が保持され、アンテナの高インピーダンスを形成する。   Each rod-shaped member 3, 4 is embedded with a metal rod-shaped antenna member 5, 6 having a sharp tip, and the base end portion of the rod-shaped antenna member 5, 6 protrudes from the rod-shaped member 3, 4 to the outside. Has been. Each of the rod-shaped antenna members 5 and 6 holds a predetermined gap G3 in the discharge vessel 2 and forms a high impedance of the antenna.

一方の棒状部材3にラーンチャ7を接続する。ラーンチャ7は、導体金属製の内部円筒部材8と外部円筒部材9とが所定の間隙を保持して同軸に嵌合されてなり、前記ラーンチャ7の一端(先端)側の内部円筒部材8に前記一方の棒状部材3を嵌合させ、該ラーンチャ7の他端は同軸ケーブル10を介して固体発振器11に接続する。   A launcher 7 is connected to one rod-like member 3. The launcher 7 includes a conductive metal inner cylindrical member 8 and an outer cylindrical member 9 that are coaxially fitted with a predetermined gap therebetween. The launcher 7 is connected to the inner cylindrical member 8 on one end (tip) side of the launcher 7. One rod-like member 3 is fitted, and the other end of the launcher 7 is connected to the solid state oscillator 11 via the coaxial cable 10.

これにより、固体発振器11で発振された電磁波は、同軸ケーブル10を介してラーンチャ7に導波され、該ラーンチャ7の同軸導波路を導波して棒状アンテナ部材5,6に導波される。そして、該棒状アンテナ部材5,6の先端部から強い電磁波が放射され、放電容器2内の発光物質が発光されることになる。   Thereby, the electromagnetic wave oscillated by the solid state oscillator 11 is guided to the launcher 7 through the coaxial cable 10, and is guided to the rod-shaped antenna members 5 and 6 through the coaxial waveguide of the launcher 7. And strong electromagnetic waves are radiated | emitted from the front-end | tip part of this rod-shaped antenna member 5 and 6, and the luminescent substance in the discharge vessel 2 will light-emit.

前記従来のものは、外部導体と内部導体とを一体的に組み付けてラーンチャ(同軸導波管)7が形成されていたので、固体発振器11、放電灯1等への取付け、取り外しに手数及び熟練を要するものであった。
特開2007−115534号公報
In the prior art, the launcher (coaxial waveguide) 7 is formed by integrally assembling the outer conductor and the inner conductor. Therefore, it takes time and skill to attach to and remove from the solid state oscillator 11 and the discharge lamp 1. Was necessary.
JP 2007-115534 A

本発明は、固体マイクロ波発振器、放電灯等への取付け、取り外しが容易に行なえる差込部付き同軸導波管を得ることを目的とする。 An object of the present invention is to obtain a coaxial waveguide with an insertion portion that can be easily attached to and detached from a solid-state microwave oscillator, a discharge lamp, or the like.

請求項1に係る発明は、一端部に外差込部26aを、中間部に環状の係合溝を、他端部に保持部を一体に有し円筒状に形成される外部導体26と、一端部に内差込部を、他端部に筒状の嵌合部を有しピン状に形成される内部導体30とを設け、マイクロ波発振器15の同軸ケーブル先端に設けられた出力コネクターの外筒17aに前記外部導体の外差込部26aが連結され、前記出力コネクターの芯体18aに前記内部導体の内差込部30aが抜き差し可能に嵌合されることで、内部導体が外部導体の軸心部に所定の間隙を有して配置されるとともに、両者が配置された際の特性インピーダンスを前記マイクロ波発振器が有する特性インピーダンスに対応させる構成にしたものである。
請求項2に係る発明は、外部導体の外周部に連結具27を遊嵌させるとともに、該連結具の他端部を外部導体の係合溝26bに回転可能に係合させたものである。
請求項3に係る発明は、内部導体30の他端部に形成した筒状の嵌合部30bに放電灯35を連結したものである。
The invention according to claim 1 includes an outer conductor 26 formed in a cylindrical shape having an outer insertion portion 26a at one end , an annular engagement groove at an intermediate portion, and a holding portion at the other end . An internal insertion portion is provided at one end, an inner conductor 30 having a cylindrical fitting portion at the other end and formed in a pin shape is provided, and an output connector provided at the tip of the coaxial cable of the microwave oscillator 15 is provided. An outer insertion portion 26a of the outer conductor is connected to the outer cylinder 17a, and the inner insertion portion 30a of the inner conductor is detachably fitted to the core body 18a of the output connector so that the inner conductor becomes an outer conductor. together they are arranged with a predetermined gap in the axial portion of the one in which the characteristic impedance when both are disposed with a configuration to correspond to the characteristic impedance of said microwave oscillator.
In the invention according to claim 2, the connector 27 is loosely fitted to the outer peripheral portion of the outer conductor, and the other end portion of the connector is rotatably engaged with the engaging groove 26b of the outer conductor .
The invention according to claim 3 is such that the discharge lamp 35 is connected to a cylindrical fitting portion 30 b formed at the other end of the internal conductor 30 .

請求項1に係る発明は、外差込部26a及び内差込部30aをマイクロ波発振器、放電管、同軸ケーブル等、各機器の差込口に抜き差しすることによって同軸導波管の各機器への取付取り外しが容易に行なえることになる。また、内部導体30の嵌合部に放電管35のアンテナ部材37等の機器を嵌合させ熔接することによって、該機器を差込部付き同軸導波管25に高精度に取り付けることができる。また、外部導体26の保持部に放電灯用反射器40等の機器を高精度に取り付けることができる。また、同軸導波管の特性インピーダンスをマイクロ波発振器が有する特性インピーダンスに対応させているので、同軸導波管の特性インピーダンスを整合させるための特別な補助器を必要とせす、装置が小型にかつ簡素になる。
請求項2に係る発明は、連結具27により差込部付き同軸導波管25をマイクロ波発振器等の機器に強固に連結することができる。
請求項3に係る発明は、内部導体30を外部導体26の軸心部に所定の間隙を有して配置させると、放電灯35が同軸導波管25に対して高精度にかつ容易に位置決めされることになる。
According to the first aspect of the present invention, the outer insertion portion 26a and the inner insertion portion 30a are inserted into and removed from the insertion port of each device such as a microwave oscillator, a discharge tube, a coaxial cable, etc. Can be easily attached and removed. Further, by fitting and welding a device such as the antenna member 37 of the discharge tube 35 to the fitting portion of the inner conductor 30, the device can be attached to the coaxial waveguide 25 with the insertion portion with high accuracy. In addition, a device such as the discharge lamp reflector 40 can be attached to the holding portion of the outer conductor 26 with high accuracy. Further, since the characteristic impedance of the coaxial waveguide is made to correspond to the characteristic impedance of the microwave oscillator, a special auxiliary device for matching the characteristic impedance of the coaxial waveguide is required, the device is small and Be simple.
According to the second aspect of the present invention, the coaxial waveguide 25 with an insertion portion can be firmly connected to a device such as a microwave oscillator by the connector 27.
In the invention according to claim 3, when the inner conductor 30 is arranged with a predetermined gap in the axial center portion of the outer conductor 26, the discharge lamp 35 is easily and accurately positioned with respect to the coaxial waveguide 25. Will be.

以下、本発明の実施の形態を図面に基いて説明する。図面において、図1は本発明による差込部付き同軸導波管のマイクロ波発振器への取付け態様を示す分解した断面図、図2は差込部付き同軸導波管をマイクロ波発振器に取り付けた状態の断面図、図3は内部導体を放電灯に取り付けた状態の部分断面図、図4は放電灯をマイクロ波発振器に取り付けた状態の断面図、図5は凹面反射器を取り付けた状態の断面図、図6は楕円面反射器を取り付けた状態の断面図、図7は差込部付き同軸導波管の同軸ケーブルへの取付け態様を示す分解した断面図である。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, FIG. 1 is an exploded cross-sectional view showing the manner in which a coaxial waveguide with an insertion portion according to the present invention is attached to a microwave oscillator, and FIG. 2 is an attachment of the coaxial waveguide with an insertion portion to the microwave oscillator. 3 is a partial cross-sectional view of the state where the internal conductor is attached to the discharge lamp, FIG. 4 is a cross-sectional view of the state where the discharge lamp is attached to the microwave oscillator, and FIG. 5 is a state where the concave reflector is attached. FIG. 6 is a sectional view showing a state in which an ellipsoidal reflector is attached, and FIG. 7 is an exploded sectional view showing a manner of attaching a coaxial waveguide with an insertion portion to a coaxial cable.

図1〜図4において、15は固体マイクロ波発振器であり、本例では2.45GHzのマイクロ波が発振されるようになっている。該固体マイクロ波発振器のケース15aの一側に出力コネクター16が取り付けられている。該出力コネクター16は、導体性の外筒17と線状の芯体18とを絶縁体19を介して同軸に嵌合され、外筒17、及び芯体18の各外端部に筒状のめす差込み口17a,18aが間隙を保持して同軸に形成されている。   1 to 4, 15 is a solid-state microwave oscillator, and in this example, a microwave of 2.45 GHz is oscillated. An output connector 16 is attached to one side of the case 15a of the solid-state microwave oscillator. The output connector 16 includes a conductive outer cylinder 17 and a linear core body 18 which are coaxially fitted via an insulator 19, and the outer cylinder 17 and the cylindrical body 18 are cylindrical at each outer end. Female insertion ports 17a and 18a are formed coaxially while maintaining a gap.

前記外筒17の外端の外周部に接続管20が固着され、該接続管20の両端部におねじ20a,20bが形成され、基部側のおねじ20aに連結ナット21がねじ嵌合され、該連結ナット21を固体マイクロ波発振器のケース15aに形成したボス15bに係合させて出力コネクター16をケース15aに固定する。   The connecting tube 20 is fixed to the outer peripheral portion of the outer end of the outer cylinder 17, screws 20 a and 20 b are formed at both ends of the connecting tube 20, and a connecting nut 21 is screwed to the base-side male screw 20 a. The connecting nut 21 is engaged with a boss 15b formed on the case 15a of the solid-state microwave oscillator to fix the output connector 16 to the case 15a.

前記出力コネクター16に本発明の特徴とする差込部付き同軸導波管(以下単に同軸導波管という)25を着脱可能に連結する。該同軸導波管25は円筒状の外部導体26の軸心部に、半径方向に所定の間隙をおいて内部導体30が抜き差し可能に嵌合されてなり、両者が嵌合した際の同軸導波管25の特性インピーダンスは、固体マイクロ波発振器15が有する特性インピーダンスと等しくなるように設定、本例では50Ωに設定されている。前記外部導体26及び内部導体30は銅等の導体性資材により形成される。   The output connector 16 is detachably connected to a coaxial waveguide with an insertion portion (hereinafter simply referred to as a coaxial waveguide) 25 which is a feature of the present invention. The coaxial waveguide 25 is fitted to the axial center portion of the cylindrical outer conductor 26 so that the inner conductor 30 can be inserted and removed with a predetermined gap in the radial direction. The characteristic impedance of the wave tube 25 is set to be equal to the characteristic impedance of the solid-state microwave oscillator 15, and is set to 50Ω in this example. The outer conductor 26 and the inner conductor 30 are formed of a conductive material such as copper.

前記外部導体26は、図1に示すように、左部から右部(先端部)に向かって段状に大径となる段付き円筒状に形成され、左端部に小径の差込み差込部)26aを、左右中間部に環状の係合溝26bを、右端部に大径の保持部26cを一体に有し、左部側の外周に連結具27を遊嵌させるとともに、該連結具27の右端を前記係合溝26bに回転可能に係合させる。該連結具27は左部内周にめねじ27aを形成し、該めねじ27aを前述した接続管20の右端部のおねじ20bに着脱可能にねじ込む。 As shown in FIG. 1, the outer conductor 26 is formed in a stepped cylindrical shape having a large diameter stepwise from the left portion toward the right portion (tip portion), and a small-diameter insertion tube ( external difference) at the left end portion. ) 26a, an annular engaging groove 26b at the right and left intermediate portion, a large-diameter holding portion 26c at the right end, and a connecting tool 27 loosely fitted on the outer periphery on the left side. The right end of the tool 27 is rotatably engaged with the engagement groove 26b. The connector 27 forms a female screw 27a on the inner periphery of the left portion, and the female screw 27a is detachably screwed into the male screw 20b of the right end portion of the connecting pipe 20 described above.

前記内部導体30は、図1に示すように、ピン状に形成し、左端部に小径の差込みピン(内差込部)30aを形成し、右端部に円周方向に分割された筒状の嵌合部(ソケット)30bを形成する。前記差込みピン30aは前述した出力コネクター16の芯体18のめす差込口18aに抜き差し可能に差し込む。また、前記嵌合部(ソケット)30bは、円周方向に分割された筒状に形成し、該嵌合部30bに、後述する放電灯35の第1アンテナ部材37が抜き差し可能に差し込まれる。   As shown in FIG. 1, the inner conductor 30 is formed in a pin shape, a small-diameter insertion pin (inner insertion portion) 30a is formed at the left end portion, and a cylindrical shape divided in the circumferential direction at the right end portion. A fitting portion (socket) 30b is formed. The insertion pin 30a is removably inserted into the female insertion port 18a of the core 18 of the output connector 16 described above. In addition, the fitting portion (socket) 30b is formed in a cylindrical shape divided in the circumferential direction, and a first antenna member 37 of a discharge lamp 35 described later is inserted into the fitting portion 30b in a detachable manner.

図3において、35は前記同軸導波管25に接続される放電灯であり、透光性資材、本例では石英ガラスにより中空の球状に形成された放電容器36の長軸側両端部に第1アンテナ部材37、及び第2アンテナ部材38を取付け、該放電容器36内に発光物質を封入してなる。該発光物質は、キセノン、水銀、硫黄とアルゴン、あるいはこれらと少量の添加物等からなる。   In FIG. 3, reference numeral 35 denotes a discharge lamp connected to the coaxial waveguide 25. The discharge lamp 35 is formed at both ends of the long axis side of a discharge vessel 36 formed into a hollow sphere with a translucent material, in this example, quartz glass. A first antenna member 37 and a second antenna member 38 are attached, and a light emitting material is enclosed in the discharge vessel 36. The luminescent material is made of xenon, mercury, sulfur and argon, or these and a small amount of additives.

前記第1、第2アンテナ部材37,38は、導体性資材、例えばタングステン、モリブデン等の耐熱性資材、あるいは放電ガスに対して耐腐食性を有する白金、金等によりピン状、あるいは帯板(ストリップライン)状に形成されてなり、先端部37a,38aを放電容器36の長軸側両端部から、該放電容器36に突出させ、外端側を保持体39a,39b内に埋設する。該保持体39a,39bは放電容器36を形成する資材の一部からなる。前記先端部37a,38aは放電容器36内の中心部で互いに対向させ、両者の間隙、つまりギャップG1は放電に適した値、本例では2mm〜3mmとする。なお、前記第1、第2アンテナ部材37,38の先端部37a,38aは保持体39a,39bと同資材により包囲するようにしてもよい。   The first and second antenna members 37 and 38 are made of a conductive material, for example, a heat-resistant material such as tungsten or molybdenum, or a pin or band plate made of platinum, gold or the like having corrosion resistance against discharge gas. The tip portions 37a and 38a are projected from both ends of the long axis side of the discharge vessel 36 into the discharge vessel 36, and the outer ends are embedded in the holding bodies 39a and 39b. The holding bodies 39a and 39b are made of a part of the material forming the discharge vessel 36. The tip portions 37a and 38a are opposed to each other at the central portion in the discharge vessel 36, and the gap between them, that is, the gap G1, is set to a value suitable for discharge, in this example, 2 mm to 3 mm. The tip portions 37a, 38a of the first and second antenna members 37, 38 may be surrounded by the same material as the holding bodies 39a, 39b.

そして、前記内部導体30を放電灯35に取付ける。即ち、図3に示すように、内部導体30の嵌合部(ソケット)30bを、一方の保持体、本例では第1アンテナ部材37が埋設された保持体39aの端部に嵌合させ、接着剤等により一体的に固定する。一方、前記外部導体26を出力コネクター16の外筒17に固定する。即ち、外部導体26の外差込部26aを出力コネクター16の外筒17に形成しためす差込み口17aに差込み、連結具27を接続管20のおねじ20bにねじ込んで前記外部導体26を出力コネクター16の外筒17に固定する。 Then, the inner conductor 30 is attached to the discharge lamp 35. That is, as shown in FIG. 3, the fitting portion (socket) 30b of the inner conductor 30 is fitted to one holding body, in this example, the end of the holding body 39a in which the first antenna member 37 is embedded, It is fixed integrally with an adhesive. On the other hand, the outer conductor 26 is fixed to the outer cylinder 17 of the output connector 16. That is, the outer insertion portion 26a of the outer conductor 26 is inserted into the insertion port 17a for forming the outer cylinder 17 of the output connector 16, and the connector 27 is screwed into the male screw 20b of the connecting tube 20 to connect the outer conductor 26 to the output connector. It is fixed to 16 outer cylinders 17.

次いで、図4に示すように、前記内部導体30の差込みピン30aを出力コネクター16の芯体18に形成しためす差込み口18aに差込み、前記放電灯35を出力コネクター16に連結するとともに、内部導体30を外部導体26内に同軸に嵌合させ、該内部導体30と外部導体26とで同軸導波管25を構成する。   Next, as shown in FIG. 4, the insertion pin 30a of the inner conductor 30 is inserted into the insertion port 18a for forming the core 18 of the output connector 16, and the discharge lamp 35 is connected to the output connector 16 and the inner conductor. 30 is coaxially fitted in the outer conductor 26, and the inner conductor 30 and the outer conductor 26 constitute a coaxial waveguide 25.

図5において、40は前記放電灯35を包囲する凹面反射器であり、アルミ材により長軸方向中心部で分割した半楕円型に形成され、内面は鏡面に仕上げられて電磁波が円滑に反射する反射面40aとなっている。該凹面反射器40の長軸側壁の中心部にボス41が形成され、該ボス41を前述した同軸導波管25の保持部26cに嵌合させ、ボルト42により固定する。前記ボス41の中心部には、凹面反射器40内に収容された放電灯35の第1アンテナ部材37が挿通され、該第1アンテナ部材37に接続された内部導体30を芯体18に接続し、前記放電灯35の第1、第2アンテナ部材37,38の放射光部(光源)を凹面反射器40の焦点F1部に位置させる。 In FIG. 5, reference numeral 40 denotes a concave reflector surrounding the discharge lamp 35. The concave reflector 40 is formed in a semi-elliptical shape divided by a central portion in the major axis direction by an aluminum material, and the inner surface is finished to a mirror surface to smoothly reflect electromagnetic waves. It is a reflective surface 40a. A boss 41 is formed at the center of the long-axis side wall of the concave reflector 40, and the boss 41 is fitted into the holding portion 26 c of the coaxial waveguide 25 described above and fixed by a bolt 42. The first antenna member 37 of the discharge lamp 35 accommodated in the concave reflector 40 is inserted into the central portion of the boss 41, and the internal conductor 30 connected to the first antenna member 37 is connected to the core body 18 . Then, the radiated light portions (light sources) of the first and second antenna members 37 and 38 of the discharge lamp 35 are positioned at the focal point F1 of the concave reflector 40.

前記実施例によれば、固体マイクロ発振器15から発振された電磁波は、同軸導波路(ラーンチャ)を導波して第1、第2アンテナ部材37,38に導波され、該第1、第2アンテナ部材37,38の先端部37a,38aから強い電磁波が放射されてプラズマが発生し、放電容器36内の発光物質が発光されることになる。 According to the embodiment, the electromagnetic wave oscillated from the solid-state microwave oscillator 15 is guided to the first and second antenna members 37 and 38 through the coaxial waveguide (launcher). Two strong electromagnetic waves are radiated from the tip portions 37a and 38a of the two antenna members 37 and 38 to generate plasma, and the luminescent material in the discharge vessel 36 emits light.

前記放電灯35の光は、焦点F1部から凹面反射器40の反射面40aによって反射され、外部に向かって効率よく発射されることになる。   The light from the discharge lamp 35 is reflected from the focal point F1 by the reflecting surface 40a of the concave reflector 40 and is efficiently emitted toward the outside.

図6において、45は楕円面反射器であり、該楕円面反射器45は長軸方向(左右)中心部で2分割したアルミ製の凹面反射器46a,46bを向き合わせて内部に楕円反射面46cが形成され、長軸側の各壁の中心部にボス47,48が形成されている。 In FIG. 6, reference numeral 45 denotes an ellipsoidal reflector. The ellipsoidal reflector 45 has aluminum ellipsoidal reflectors 46a and 46b facing each other in the major axis direction (left and right) center portion, and an ellipsoidal reflecting surface inside. 46c is formed, and bosses 47 and 48 are formed at the center of each wall on the long axis side.

一方(左部)のボス47の中心部から放電灯35が楕円面反射器45内に収容され、左部の保持体39aを介して前記ボス47に固定される。また、他方(右部)のボス48の中心部に光ケーブル材からなる光放出体50が嵌合固定され、その一端部(左端部)が楕円面反射器45内に突出されている。   The discharge lamp 35 is accommodated in the ellipsoidal reflector 45 from the center of one (left) boss 47 and fixed to the boss 47 via the left holding body 39a. A light emitter 50 made of an optical cable material is fitted and fixed to the center of the other (right) boss 48, and one end (left end) of the light emitter 50 protrudes into the elliptical reflector 45.

前記放電灯35の光源、即ち、第1、第2アンテナ部材37,38の放射光は前記楕円面反射器45の一方の焦点F1部に位置し、前記光放出体50の突出端は楕円面反射器45の他方の焦点F2部に位置している。前記楕円面反射器45はボス47を同軸導波管25の保持部26cに嵌合させてボルト51により固定し、保持部26cを介して固体マイクロ発振器15の出力コネクター16に支持される。   The light source of the discharge lamp 35, that is, the radiated light of the first and second antenna members 37 and 38 is located at one focal point F1 of the elliptical reflector 45, and the protruding end of the light emitter 50 is an elliptical surface. It is located at the other focal point F2 portion of the reflector 45. The ellipsoidal reflector 45 is supported by the output connector 16 of the solid-state micro-oscillator 15 through the holding portion 26c by fitting the boss 47 to the holding portion 26c of the coaxial waveguide 25 and fixing it with the bolt 51.

前記図6によれば、放電灯35の光源から発せられた光L1は楕円反射面46cに反射されて他方の焦点F2部に集合し、光放出体50を介して外部に放出される。また、光に変換されなかった電磁波M1は他方の焦点(F2)側から一方の焦点F1部に戻され、第1、第2アンテナ部材37,38によって光に変換されることになる。このため、電磁波の光変換効率が高くなるとともに、楕円面反射器45内で生成された光が光放出体50によって外部に効率よく放出されることになる。 According to FIG. 6, the light L1 emitted from the light source of the discharge lamp 35 is reflected by the ellipsoidal reflecting surface 46c, gathers at the other focal point F2, and is emitted to the outside through the light emitter 50. The electromagnetic wave M1 that has not been converted to light is returned from the other focal point (F2) side to the one focal point F1 and converted into light by the first and second antenna members 37 and 38. For this reason, the light conversion efficiency of electromagnetic waves is increased, and the light generated in the ellipsoidal reflector 45 is efficiently emitted to the outside by the light emitter 50.

図7は同軸導波管25の基端部(左端部)を同軸ケーブル55のめす側接続部55aに接続し、該同軸ケーブル55のおす側接続部を固体マイクロ発振器15の出力コネクター16に接続したものである。   7, the base end portion (left end portion) of the coaxial waveguide 25 is connected to the female side connection portion 55 a of the coaxial cable 55, and the male side connection portion of the coaxial cable 55 is connected to the output connector 16 of the solid-state micro-oscillator 15. It is a thing.

このようにすれば、同軸導波管25を、同軸ケーブル55を介して固体マイクロ発振器15に容易に接続することができ、固体マイクロ発振器15から離れた位置に同軸導波管25を容易に取り付けることができる。 Thus, the coaxial waveguide 25 through the coaxial cable 55 can be easily connected to the solid-state microwave oscillator 15, facilitates the coaxial waveguide 25 at a position distant from the solid microwave oscillator 15 Can be attached to.

図1は本発明による差込部付き同軸導波管のマイクロ波発振器への取付け態様を示す分解した断面図である。FIG. 1 is an exploded cross-sectional view showing a mode of attaching a coaxial waveguide with an insertion portion to a microwave oscillator according to the present invention. 図2は差込部付き同軸導波管をマイクロ波発振器に取り付けた状態の断面図である。FIG. 2 is a cross-sectional view of a state where the coaxial waveguide with an insertion portion is attached to a microwave oscillator. 内部導体を放電灯に取り付けた状態の部分断面図である。It is a fragmentary sectional view in the state where the inner conductor was attached to the discharge lamp. 放電灯をマイクロ波発振器に取り付けた状態の断面図である。It is sectional drawing of the state which attached the discharge lamp to the microwave oscillator. 凹面反射器を取り付けた状態の断面図である。It is sectional drawing of the state which attached the concave reflector. 楕円面反射器を取り付けた状態の断面図である。It is sectional drawing of the state which attached the ellipsoidal reflector. 差込部付き同軸導波管の同軸ケーブルへの取付け態様を示す分解した断面図である。It is sectional drawing which decomposed | disassembled which shows the attachment aspect to the coaxial cable of the coaxial waveguide with an insertion part. 従来の放電灯の差込部付き同軸導波管を示す断面図である。It is sectional drawing which shows the coaxial waveguide with an insertion part of the conventional discharge lamp.

15 固体マイクロ波発振器
16 出力コネクター
17 外筒
17a めす差込み口
18 芯体
18a めす差込み口
19 絶縁体
20 接続管
20a、20b おねじ
21 連結具
25 差込部付き同軸導波管(ラーンチャ)
26 外部導体
26a 差込み筒(差込部)
26b 係合溝
26c 保持部
27 連結具
27a めねじ
30 内部導体
30a 内差込部
30b 嵌合部
35 放電灯
36 放電容器
37 第1アンテナ部材
38 第2アンテナ部材
37a,38a 先端部
39a,39b 保持体
40 凹面反射器
40a 反射面
41 ボス
42 ボルト
45 楕円面反射器
46a,46b 凹面反射器
46c 楕円反射面
47,48 ボス
50 光放出体
51 ボルト
55 同軸ケーブル
55a めす側接続部
55b おす側接続部
15 Solid Microwave Oscillator 16 Output Connector 17 Outer Tube 17a Female Insertion Port 18 Core 18a Female Insertion Port 19 Insulator 20 Connection Tube 20a, 20b Male Thread 21 Connector 25 Coaxial Waveguide with Insert Port (Luncher)
26 Outer conductor 26a Insertion tube ( outer insertion part)
26b Engaging groove 26c Holding part 27 Connecting tool 27a Female thread 30 Internal conductor 30a Inner insertion part 30b Fitting part 35 Discharge lamp 36 Discharge vessel 37 First antenna member 38 Second antenna member 37a, 38a Tip part 39a, 39b Holding Body 40 Concave reflector 40a Reflective surface 41 Boss 42 Bolt 45 Ellipsoidal reflector 46a, 46b Concave reflector 46c Elliptical reflector 47, 48 Boss 50 Light emitter 51 Bolt 55 Coaxial cable 55a Female side connection 55b Male side connection

Claims (3)

一端部に外差込部(26a)を、中間部に環状の係合溝(26b)を、他端部に保持部(26c)を一体に有し円筒状に形成される外部導体(26)と、一端部に内差込部(30a)を、他端部に筒状の嵌合部(30b)を有しピン状に形成される内部導体(30)とを設け、マイクロ波発振器(15)の同軸ケーブル先端に設けられた出力コネクターの外筒(17)に前記外部導体(26)の外差込部(26a)が連結され、前記出力コネクターの芯体(18)に前記内部導体(30)の内差込部(30a)が抜き差し可能に嵌合されることで、内部導体(30)が外部導体(26)の軸心部に所定の間隙を有して配置されるとともに、両者が配置された際の特性インピーダンスを前記マイクロ波発振器(15)が有する特性インピーダンスに対応させたことを特徴とする放電灯の差込部付き同軸導波管。 An outer conductor (26) formed integrally with an outer insertion portion (26a) at one end , an annular engagement groove (26b) at the middle, and a holding portion (26c) at the other end. An internal insertion portion (30a) at one end, and an internal conductor (30) formed in a pin shape having a cylindrical fitting portion (30b) at the other end , and a microwave oscillator (15 The outer insertion portion (26a) of the outer conductor (26) is connected to the outer tube (17) of the output connector provided at the end of the coaxial cable of the outer connector), and the inner conductor (18) is connected to the core (18) of the output connector. 30) the inner insertion portion (30a) is detachably fitted so that the inner conductor (30) is arranged with a predetermined gap in the axial center portion of the outer conductor (26). characteristic impedance of but having said characteristic impedance when placed microwave oscillator (15) Insertion portion with the coaxial waveguide of the discharge lamp, characterized in that to correspond to. 外部導体(26)の外周部に連結具(27)を遊嵌させるとともに、該連結具(27)の他端部を外部導体(26)の係合溝(26b)に回転可能に係合させたことを特徴とする請求項1に記載の差込部付き同軸導波管。 The coupling tool (27) is loosely fitted to the outer periphery of the outer conductor (26), and the other end of the coupling tool (27) is rotatably engaged with the engagement groove (26b) of the outer conductor (26). The coaxial waveguide with an insertion portion according to claim 1. 内部導体(30)の他端部に形成した筒状の嵌合部(30b)に放電灯(35)を連結したことを特徴とする請求項1または2記載の差込部付き同軸導波管。 The coaxial waveguide with an insertion portion according to claim 1 or 2 , wherein a discharge lamp (35) is connected to a cylindrical fitting portion (30b) formed at the other end of the inner conductor (30). .
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