JP4968932B2 - Optical deflection apparatus and optical scanning apparatus - Google Patents

Description

  The present invention relates to an optical deflecting device that deflects a laser beam in an image forming apparatus such as an LBP, a digital copying machine, or a digital FAX, and an optical scanning device using the same.

  2. Description of the Related Art Conventionally, an optical scanning device using an optical deflecting device that performs sinusoidal vibration has been proposed as an optical deflecting device that deflects and scans a photosensitive member with a laser beam modulated based on image information.

  An optical deflecting device having a vibration element using a Si single crystal is theoretically free from metal fatigue and can be expected to have high durability. Further, there are merits such as lower vibration and higher image quality due to the smaller mass of the deflecting member as compared with a conventional optical deflecting device using a rotating polygon mirror, and further downsizing and cost reduction.

  On the other hand, in an optical scanning system using an optical deflecting device that performs sinusoidal vibration, the luminous flux deflected by the deflecting member changes sinusoidally in angular velocity, so that when a conventional scanning lens is used as an imaging lens, Cannot scan at constant speed. In order to make this scan at a constant speed, it is necessary to use an imaging lens called an arcsin lens. In this case, the F number (a quantity indicating the brightness of the optical system) in the main scanning direction changes, and the spot diameter becomes nonuniform from the scanning center to the scanning end on the photosensitive member.

  Thus, there is an optical deflecting device that includes at least two deflecting surfaces that perform sinusoidal vibrations having different vibration periods. Accordingly, an optical scanning system has been proposed in which a laser beam is scanned at a substantially equal angular velocity, a constant speed scanning is realized on a photosensitive member via a conventional scanning lens, and a spot diameter on the photosensitive member is made uniform ( Patent Document 1).

  In addition, an optical deflecting device including a plurality of movers and a plurality of torsion springs includes a reference vibration mode that is a natural vibration mode of a reference frequency and an even-number vibration mode that is a natural vibration mode that is substantially an even multiple of the reference frequency. As a result, an optical deflecting device that performs scanning at substantially constant angular velocity on a single deflection surface and realizes scanning performance equivalent to Patent Document 1 has been proposed (see, for example, Patent Document 2).

JP 2003-279879 A JP 2005-208578 A

  However, the vibration element composed of a plurality of movers, a plurality of torsion springs, and a support frame has a cantilever shape, and when the vibration element is assembled to a fixing member in the optical deflecting device, the vibration element is simple and accurate. No mention was made of a fixing method that can reduce position fluctuations.

  An object of the present invention is to provide an optical scanning device in which a vibration element can be easily and accurately assembled to a fixed member.

In order to achieve the above object, a typical configuration according to the present invention includes: a movable element having a deflection surface and swinging; a torsion spring that supports the movable element in a swingable manner; and the movable element of the torsion spring. a vibration element of a cantilever shape with integrally with a support frame for supporting the base portion is an end portion opposite to the supporting and has a side of,
A fixing member to which the support frame is fixed by an adhesive ;
In the optical deflection device for deflecting and scanning the laser beam by the deflecting surface of the mover that possess, swings a
The fixing member includes a plurality of reference portions against which the support frame abuts without the adhesive being interposed in order to determine the position of the vibration element in a direction perpendicular to the deflection surface in the initial stationary state of the mover. An adhesive portion interposed between the adhesive and the support frame,
The adhesive portion is in the direction in which the torsion spring is extended from the support frame, between the plurality of reference portions and, characterized in that it is provided only at substantially the same position as the base portion.

  Since the present invention has the above-described configuration, it is possible to provide an optical scanning device in which the vibration element can be easily and accurately assembled to the fixed member.

[First Embodiment]
A first embodiment of the present invention will be described with reference to the drawings.

(Image forming device)
First, an outline of the configuration and operation of the image forming apparatus will be described. FIG. 1 is a cross-sectional view for explaining the configuration of an image forming apparatus provided with an optical scanning device 40.

  As shown in FIG. 1, in an image forming operation, first, a laser beam L modulated based on image information is emitted from an optical scanning device 40 and scanned on a photosensitive drum 32 as a scanning target. Thereby, a latent image is formed on the photosensitive drum 32. This latent image is formed on the surface of the photosensitive drum 32 that is uniformly charged by the primary charger 33.

  The latent image is visualized by the developer (toner) of the developing device 34. Thereafter, the toner images formed on the surface of the photosensitive drum 32 are sequentially transferred onto the transfer material 36 conveyed to the transfer nip portion by the transfer charging roller 35, and a toner image is formed on the transfer material 36. The image formed on the transfer material 36 is heat-fixed by a fixing device 37 and then output to the outside of the apparatus by a discharge roller 38 or the like.

(Optical scanning device)
Next, a schematic configuration and operation of the optical scanning device will be described. FIG. 2 is a perspective view illustrating a schematic configuration of the optical scanning device 40.

  As shown in FIG. 2, the collimated light 42 indicated by the broken line emitted from the light source device 41 passes through the cylindrical lens 43 and then reaches the reflection mirror 44. The angle of the collimated light 42 is changed by the reflection mirror 44, and while passing through the scanning deflecting mirror 45 while being deflected and scanned by the optical deflecting device 100, which will be described later, the collimated light 42 is reflected by the folding mirror 46. Reach the surface.

  Further, the collimated light 42 is shaped by the scanning lens 45 so as to be scanned as a beam that is optimally narrowed within the width of the photosensitive drum 32 that is a scanned body. At the same time, a part 48 of the scanning beam is reflected by a BD (abbreviation of beam detect) mirror 49 and is detected by the BD sensor 50. The BD sensor 50 generates an output signal, and synchronizes the writing signal for each scanning time based on the output signal from the BD sensor 50. Thus, the collimated light 42 also has an effect of adjusting the beam writing position.

  In addition, a cylindrical lens 43 is used to prevent a beam position shift in the sub-scanning direction on the photosensitive drum 32 due to a tilt error in the sub-scanning direction of the movable element (deflector) 2 of the optical deflecting device 100. The cylindrical lens 43 compresses the beam extracted from the light source device 41 on the movable element (deflector) 2 in the sub-scanning direction to form a line image. In addition, the movable element (deflector) 2 and the surface of the photosensitive drum 32 are conjugated in the sub-scanning direction. The sub-scanning direction is a direction perpendicular to the optical axis and the beam scanning direction, and a transfer material feeding direction (Z direction).

  The optical element group such as the optical deflecting device 100, the scanning lens 45, and the folding mirror 46 described above is contained in an optical box 51 made of resin. The upper opening of the optical box 51 is closed by a lid member (not shown).

(Light deflection device)
Next, the light deflection apparatus 100 will be described. FIG. 3 is a perspective view showing a part of the surface of the light deflection apparatus 100.

  As shown in FIG. 3, the fixing member 9 on the surface of the light deflection apparatus 100 is configured by integrally fixing the vibration element 1 on the front surface side and arranging the actuator unit 16 on the back surface side.

  The vibration element 1 includes a movable element (deflector) 2 and a movable element (driver) 3 of the vibration element 1. The movers 2 and 3 are driven by the actuator unit 16 and swing by resonance vibration to deflect and scan the laser beam. A circuit board (not shown) for supplying electric power to the actuator unit 16 is disposed on the back side of the fixing member 9.

  In the optical deflecting device 100 of the present embodiment, the vibration element 1 includes permanent magnets (magnets) 6a and 6b. The vibration element 1 is disposed at a predetermined gap from an actuator unit 16 including an iron core (core) 15 and a winding (coil) 14 and the like. A magnetic circuit is formed in the gap, and the movable elements 2 and 3 are driven by applying a predetermined current to the winding 14.

  The vibration element 1 is manufactured by etching a Si single crystal wafer. The vibration element 1 includes at least two movers 2 and 3. These movers 2 and 3 are supported by torsion springs 4 and 5 so as to be swingable. Further, the bottom end portion 17 of the torsion spring 5 is integrally fixed to the support frames 7 and 8.

  As the support frames 7 and 8, first, there is the first support frame 7 disposed at the lower end of the torsion spring 5 (the end opposite to the side supporting the movers 2 and 3). The second support frame 8 (8a, 8b) is configured integrally with the first support frame 7 and is provided with a predetermined gap on the side along the direction in which the torsion spring 5 extends. ) A boundary line (dotted line) between the first support frame 7 and the second support frames 8a and 8b is shown in FIG.

  Of the movers 2 and 3 of the vibration element 1, rod-shaped permanent magnets 6 (6 a and 6 b) are integrally fixed to the mover 3. The surface of the mover 2 is provided with a reflective film suitable for reflecting a laser beam by depositing aluminum or the like, and a reflecting surface (deflection surface) for reflecting the beam as indicated by an arrow A is provided. Is formed. These at least two movers 2 and 3 have a plurality of natural vibration modes, and have a fundamental frequency corresponding to the scanning period and a vibration mode having a frequency at least twice the fundamental frequency.

  The optical deflecting device 100 according to the present embodiment is driven by superposing a plurality of natural frequencies (at least twice the basic frequency) of the vibration element 1. This will be described with reference to FIG. FIG. 4 is a graph showing the time change of the amplitude of the vibration element in the optical deflecting device 100.

  As shown in FIG. 4, when the amplitude angle of the mover 2 used for the deflection of the laser beam is θ, the behavior expressed by Equation 1 is shown.

θ (t) = A ₁ sin (ωt) + A ₂ sin (2ωt + φ) + A ₃ [Formula 1]
In Equation 1, A ₁ : amplitude at the fundamental frequency (fundamental wave), A ₂ : amplitude at twice the fundamental frequency (harmonic wave), ω: fundamental frequency, φ: phase difference between fundamental wave and harmonic wave, A ₃ : Static angle error, for example, the angle error of the posture when the deflector is not vibrating. In FIG. 4, φ = 0 and A ₃ = 0.

  Here, by appropriately setting each parameter, it can be approximated as Formula 2 within a specific range within one period.

θ (t) ≒ kt + α [Formula 2]
In Equation 2, k and α are constants.

  In this range, the movable element 2 vibrates at a substantially constant angular velocity, and the laser beam incident on the movable element 2 is deflected and scanned at a substantially uniform angular speed.

(Fixing of the vibration element 1 to the fixing member 9)
Next, fixing of the vibration element 1 and the fixing member 9 will be described. FIG. 5 is an exploded perspective view of a part of the surface of the light deflection apparatus 100 according to the first embodiment.

  As shown in FIG. 5, the vibration element 1 is fixed to the fixing member 9 in a direction perpendicular to the reflection surface (deflection surface) of the mover 2 in the initial stationary state of the mover 2. Specifically, the vibration element 1 is installed such that the first support frame 7 and the second support frames 8a and 8b are in contact with the reference surface portions 10 (10a, 10b, and 10c) of the fixing member 9, respectively. The An adhesive 12 is applied on the adhesive surface portion 11 (11a, 11b).

  As the adhesive 12, an ultraviolet curable adhesive (hereinafter referred to as a UV curable adhesive) is used. The reason why the UV curable adhesive is used is that it can be cured and fixed with a UV irradiation time of several seconds. This is because the working time can be shortened in the mass production process, and the production efficiency is improved.

  As shown in FIG. 5, in the vibration element 1, the second support frames 8 a and 8 b are formed so as to extend toward the movers 2 and 3 along the direction in which the torsion spring 5 extends. This is because the longer the second support frames 8 a and 8 b are along the torsion spring 5, the less affected by the unevenness of the surfaces of the fixing member 9 and the support frames 7 and 8. If comprised in this way, it can suppress that the reflective surface of the needle | mover 2 falls in a Z-axis direction, and can fix the vibration element 1 to the fixing member 9 with sufficient precision. Further, with respect to the X direction and the Y direction, the vibration element 1 is abutted against and fixed to the fixing convex portion 13 (13a, 13b) of the fixing member 9.

  The adhesive surface portions 11a and 11b in the fixing member 9 are set to be lower by about 0.5 mm than the reference surface portions 10a, 10b, and 10c. For this reason, a slight gap is created between the vibration element 1 and the fixing member 9. This gap is a space where the adhesive 12 is applied, and plays a role of an adhesive reservoir. When UV light is irradiated from the X-axis direction, this gap causes the UV light to be applied to the adhesive. Irradiation can be ensured. It should be noted that the size of the gap between the reference surface portions 10a, 10b, and 10c and the vibration element 1 may be selected optimally depending on the respective states such as the material of the adhesive, the material of the fixing member, and the contact area.

  Here, when the cantilever-shaped vibrating element as in this embodiment is bonded and fixed, the torsion spring collapses (hereinafter referred to as “shaft collapse”) due to the effects of curing shrinkage and thermal expansion of the bonded portion. There is a problem that it is easy. When the axis is tilted, the movable element (deflection surface) 2 is tilted, and the irradiation position of the laser beam is shifted in the vertical direction from the original position. Therefore, a desired beam shape is not formed on the scanned body, and an image defect occurs. Furthermore, when the optical deflecting device is deformed due to a temperature rise, there is a problem that deterioration of the axis of the vibration element, displacement, and the like are likely to occur.

  Therefore, the adhesive application position in the vibration element 1 is desirably a location on the boundary line (dotted line) between the first support frame 7 and the second support frames 8a and 8b and not in contact with the root portion 17. By bonding at this position, it is possible to suppress the torsion springs 4 and 5 from falling in the Z direction due to contraction when the adhesive 12 is cured. Further, even when thermal expansion repeatedly occurs due to temperature change, the tilt in the Z direction can be suppressed.

(Fixing position of the vibration element 1 with respect to the fixing member 9)
The configuration of the resonator element 1 according to this embodiment will be described with reference to FIGS. 6 and 7. 6A and 6B are side views of the vibration element 1 according to the first embodiment, in which FIG. 6A shows a state before deformation and FIG. 6B shows a state after deformation. FIG. 7 is a side view of a more preferable vibration element 1 in the first embodiment.

  As shown in FIG. 6A, the vibration element 1 of the present embodiment is fixed to the fixing member 9 as follows. That is, the bonded portion 18 in the support frames 7 and 8 of the vibration element 1 is substantially at the same position as the root portion 17 of the torsion spring 5 and the axial direction (direction in which the torsion spring extends: Y direction in the figure). And it exists in the location which does not contact | abut to the root part 17. FIG.

  Further, in the same manner as described above, the bonded portion 18 is substantially the same position as the root portion 17 of the torsion spring 5 in the axial direction and is not in contact with the root portion 17. It is good.

That is, as shown in FIG. 7, first, with respect to the axial direction, is substantially equal to the length of the length L ₂ and the length L ₁ of the first support frame 7 second supporting frame 8 (8a, 8b) . Then, it is assumed that an adhesive is applied to a location that does not contact the root portion 17 on the boundary line (dotted line) between the first support frame 7 and the second support frame 8 (8a, 8b).

(Behavior of vibration element 1 due to curing of adhesive 12)
Next, the behavior when the adhesive 12 is cured and contracted when the vibration element 1 is fixed will be described in comparison with the comparative example of FIG. 8 in which the relationship between the position of the adhesive surface portion 11 and the vibration element 1 is changed. FIG. 8 is a diagram showing a comparative example in the first embodiment, where (a) shows before deformation and (b) shows after deformation.

  In FIG. 8A which is a comparative example, the bonded portion 18 in the support frames 7, 8 of the vibration element 1 is compared with the position of the root portion 17 of the torsion spring 5. It is located on the right side in the figure.

  In the case of this configuration, when the adhesive 12 is cured and contracted, the bonded portion 18 of the vibration element 1 is pulled in the β direction. Then, as illustrated in FIG. 8B, the reference surface portions 10 a and 10 b are supported at two points, and the bonded portion 18 of the vibration element 1 bends in the β direction. Accordingly, the root portion 17 of the torsion spring 5 rotates in the α direction with the reference surface portion 10a as a fulcrum, and the torsion springs 4 and 5 and the movers 2 and 3 associated with the torsion springs 4 and 5 fall down.

  On the other hand, in the configuration of the present embodiment shown in FIG. 6, as described above, the bonded portion 18 in the support frames 7 and 8 of the vibration element 1 is substantially in the same position as the root portion 17 of the torsion spring 5 in the axial direction. And it exists in the location which does not contact | abut to the root part 17. FIG. In this case, even if the bonded portion 18 of the vibration element 1 is bent in the β direction due to the curing shrinkage of the adhesive 12, the root portion 17 does not rotate in the α direction with the reference surface portion 10 a as a fulcrum. For this reason, as shown in FIG.6 (b), the torsion springs 4 and 5 and the needle | mover 2 and 3 accompanying it cannot fall down. In addition, temperature changes are repeatedly applied in an actual product use environment, and the adhesive repeatedly expands or contracts. Even in this case, since the root portion 17 does not rotate in the α direction with the reference surface portion 10a as a fulcrum, the movers 2 and 3 cannot fall down.

  The configuration shown in FIG. 7 is a derivative form of the vibration element 1 in the first embodiment. In this case, in the root portion 17 of the torsion spring 5, the deflection amount from the reference surface portions 10a and 10b is substantially equal. Become. For this reason, the fixation which suppressed the axis collapse more than the form of FIG. 6 which is this embodiment is attained.

  Here, an example using a UV curable adhesive has been described, but other adhesives may be used, and when the amount of UV irradiation light cannot be secured, for example, a moisture curing imparting type UV adhesive or heat curing imparting It can be fixed by using a type of UV adhesive or the like.

  In the present embodiment, the reference surface portions 10a, 10b, and 10c are described as being provided at three locations. However, this is because a surface is usually formed by three locations and the position is determined stably, and not necessarily at three locations. Also good.

  A unique effect of this embodiment is that there is a gap between the vibration element 1 and the fixing member 9, thereby serving as an adhesive reservoir and also when UV light is irradiated from the X-axis direction. This makes it possible to reliably irradiate the adhesive with UV light. Therefore, the vibration element 1 can be easily and accurately assembled to the fixing member 9.

  Furthermore, the adhesive application position in the vibration element 1 is a place on the boundary line (dotted line) between the first support frame 7 and the second support frames 8 a and 8 b and not in contact with the root portion 17. As a result, when the vibration element 1 is fixed to the fixing member 9 by bonding, even if the vibration element 1 is bent by a tensile force due to curing shrinkage of the adhesive 12, the torsion springs 4, 5 and the movable elements 2, 3 fall down. Can be suppressed. Further, even if the temperature change is repeatedly applied in the actual product use environment and the adhesive 12 repeatedly expands or contracts, the torsion springs 4 and 5 and the movers 2 and 3 do not fall down. As a result, it is possible to provide an optical scanning device that can obtain stable optical characteristics and good printing accuracy without causing a deviation of the irradiation position of the laser beam.

[Second Embodiment]
A second embodiment of the present invention will be described with reference to the drawings. FIG. 9 is an exploded perspective view of a part of the surface of the light deflection apparatus in the second embodiment. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 9, the fixing member 9 in the second embodiment has three reference surface portions 71 (71a, 71b, 71c). Moreover, the adhesive recessed part 72 (72a, 72b, 72c) formed in the concave shape is formed in the side surface of the reference surface part 71 (71a, 71b, 71c), respectively. Furthermore, adhesive 73 (73a, 73b, 73c) is respectively applied to the adhesive recesses 72 (72a, 72b, 72c) to fix the vibration element 1.

  Further, with respect to the X and Y directions, the vibration element 1 is abutted against and fixed to the fixing convex portion 13 (13a, 13b) in the fixing member 9. As a result, positioning in the X and Y directions is possible, and displacement due to environmental fluctuations can be suppressed.

  The adhesives 73a, 73b, and 73c may be UV curable adhesives, and the openings of the adhesive recesses 72a, 72b, and 72c are arranged in the direction of the arrow in the drawing in consideration of the assemblability of the vibration element 1. It is installed in a direction that facilitates light irradiation. In the present embodiment, the openings of the adhesive recesses 72 a, 72 b and 72 c are installed toward the outer side of the fixed member 9 in a direction parallel to the deflection surface of the mover 2 in the initial stationary state of the mover 2.

  The specific effects in the present embodiment are as follows. Since the reference surface portion 71 of the vibration element 1 has a concave shape opened to the outside, the concave portion serves as an adhesive reservoir, and irradiation with UV light can be performed easily and reliably. Therefore, the vibration element 1 can be easily and accurately assembled to the fixing member 9. Furthermore, even if the adhesive 73 is cured and contracted by applying the adhesive 73 near the reference surface portion of the fixing member 9, the place to be pressurized is constant at the reference surface portion 71. For this reason, the vibration element 1 is not easily deformed or bent, and the torsion springs 4 and 5 and the movers 2 and 3 do not fall down.

  Further, even if the temperature change is repeatedly applied in the actual product use environment and the adhesive 73 repeatedly expands or contracts, there is an effect that the torsion springs 4 and 5 and the movers 2 and 3 do not fall down. As a result, it is possible to provide an optical scanning device that can obtain stable optical characteristics and good printing accuracy without causing a deviation of the irradiation position of the laser beam.

  If the adhesive 73 applied to the adhesive recess 72 wraps around between the reference surface portion and the vibration element, the UV light is not irradiated. For this reason, the adhesive may remain uncured. In that case, for example, the moisture curing imparting type UV adhesive or the heat curing imparting type UV adhesive described in the first embodiment is used. Thereby, an unhardened part can be prevented and the vibration element 1 can be stably fixed to the fixing member 9.

[Third Embodiment]
A third embodiment of the present invention will be described with reference to the drawings. FIG. 10 is an exploded perspective view of a part of the surface of the light deflection apparatus in the third embodiment. The same components as those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 10, the fixing member 9 in the third embodiment is provided with adhesive surface portions 82 (82a, 82b, 82c, 82d, 82e) on both sides of each of the three reference surface portions 81 (81a, 81b, 81c). 82f). For this reason, there are a total of six bonding surface portions 82. An adhesive 83 (83a, 83b, 83c, 83d, 83e, 83f) is applied to each of the adhesive surface portions 82 (82a, 82b, 82c, 82d, 82e, 82f). Here, the reference surface portion 81 and the bonding surface portion 82 are separated so as to form a predetermined gap.

  The specific effects of this embodiment are as follows. That is, the reference surface portion 81a is separated from the adhesive surface portion 82a and the adhesive surface portion 82b, the reference surface portion 81b is separated from the adhesive surface portion 82c and the adhesive surface portion 82d, and the reference surface portion 81c is separated from the adhesive surface portion 82e and the adhesive surface portion 82f. Yes. For this reason, the adhesive 83 applied on the adhesive surface portion 82 does not wrap around the reference surface portion 81.

  In addition, when the adhesive 83 is applied to both sides of the reference surface portion 81 of the fixing member 9 when viewed from the direction perpendicular to the deflection surface of the movable element 2 in the initial stationary state of the movable element 2, the adhesive 83 is cured and contracted. When waking up, force is applied to both sides of the reference surface. For this reason, a force is applied to the reference surface portion as a resultant force, and the vibration element 1 is unlikely to be deformed or bent as in the second embodiment. As a result, there is an effect that the torsion springs 4 and 5 and the movers 2 and 3 do not fall down. Further, even if the temperature change is repeatedly applied in the actual product use environment and the adhesive 83 repeatedly expands or contracts, the torsion springs 4 and 5 and the movers 2 and 3 do not fall down. As a result, it is possible to provide an optical scanning device that can obtain stable optical characteristics and good printing accuracy without causing a deviation of the irradiation position of the laser beam.

FIG. 3 is a cross-sectional view illustrating a configuration of an image forming apparatus including an optical scanning device 40. FIG. 3 is a perspective view illustrating a schematic configuration of an optical scanning device 40. The perspective view which shows a part of surface of the optical deflection apparatus 100 in 1st Embodiment. 6 is a graph showing a change over time in the amplitude of a vibration element in the optical deflection apparatus. The disassembled perspective view of a part of surface of the optical deflection apparatus 100 in 1st Embodiment. The side view of the vibration element 1 in 1st Embodiment. The side view of the more suitable vibration element 1 in 1st Embodiment. The figure which shows the comparative example of the vibration element 1 in 1st Embodiment. The disassembled perspective view of a part of surface of the light deflection apparatus in the second embodiment. The disassembled perspective view of a part of the surface of the optical deflecting device in the third embodiment.

Explanation of symbols

  L ... laser beam, 1 ... vibrating element, 2 ... mover (deflector), 3 ... mover (driver), 4 ... torsion spring, 5 ... torsion spring, 7 ... first support frame, 8 ... second support Frame, 9 ... fixing member, 10 ... reference surface portion, 11 ... adhesion surface portion, 12 ... adhesive, 71 ... reference surface portion, 72 ... adhesion recess, 73 ... adhesive, 81 ... reference surface portion, 82 ... adhesion surface portion, 83 ... adhesion Agent, 100 ... Light deflection device

Claims (8)

A movable element formed with a deflection surface and swinging, a torsion spring that supports the movable element in a swingable manner , and a root part that is the end of the torsion spring opposite to the side that supports the movable element A cantilever-shaped vibration element integrally provided with a support frame for supporting
A fixing member to which the support frame is fixed by an adhesive ;
In the optical deflection device for deflecting and scanning the laser beam by the deflecting surface of the mover that possess, swings a
The fixing member includes a plurality of reference portions against which the support frame abuts without the adhesive being interposed in order to determine the position of the vibration element in a direction perpendicular to the deflection surface in the initial stationary state of the mover. An adhesive portion interposed between the adhesive and the support frame,
The adhesive portion is in the direction in which the torsion spring is extended from the support frame, between the plurality of reference portions and the light, characterized in that only provided at substantially the same position with the root portion Deflection device. The light deflection apparatus according to claim 1, wherein the adhesive is not applied to the root portion . The support frame, said the root portion side of the torsion spring is extended around the first support frame portion extending to the opposite side, the torsion spring about said root portion is extended side comprising a second support frame portion extending, to light according to claim 1 or 2 wherein the plurality of reference portions are characterized in that abuts on the first supporting frame portion and the second support frame portion Deflection device. The lengths of the first support frame portion and the second support frame portion in the direction in which the torsion spring extends from the support frame are substantially equal, and the reference portion includes the first support frame portion and the second support frame portion. The light deflection apparatus according to claim 3, wherein the support frame portion abuts against an end portion on the opposite side of the root portion in a direction in which the torsion spring extends from the support frame . A swinging movable element formed with a deflection surface, a torsion spring that supports the movable element in a swingable manner, and a root that is the end of the torsion spring opposite to the side that supports the movable element A cantilever-shaped vibration element that integrally includes a support frame that supports the portion;
A fixing member to which the support frame of the vibration element is fixed by an adhesive;
An optical deflector that deflects and scans a laser beam on the deflecting surface of the swinging movable element,
The fixing member has three reference portions against which the support frame abuts without the adhesive being interposed in order to determine the position of the vibration element in a direction perpendicular to the deflection surface in the initial stationary state of the mover. And an adhesive portion where the adhesive is interposed between the support frame,
The root portion is located inside a triangle formed by connecting the three reference portions when viewed from a direction perpendicular to the deflection surface in the initial stationary state of the mover, and the adhesive portion is the 3 An optical deflecting device provided only next to each of the two reference portions . When viewed from the direction perpendicular to the deflection surface in the initial stationary state of the mover, each of the three reference portions has a concave shape, and viewed from the direction perpendicular to the deflection surface in the initial stationary state of the movable element. The optical deflection apparatus according to claim 5, wherein the adhesive portion is provided at a recessed portion of the three reference portions . The optical deflection according to claim 5, wherein the adhesive portions are provided on both sides of the three reference portions when viewed from a direction perpendicular to the deflection surface in the initial stationary state of the movable element. Equipment . Has a light source for emitting a laser beam,
An optical scanning device characterized in that the laser beam emitted from the light source is deflected and scanned using the optical deflection device according to any one of claims 1 to 7 .

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