JP2008070398A - Rocking apparatus, optical deflector using rocking apparatus, method and apparatus of adjusting frequency of rocking apparatus and image forming apparatus using optical deflector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rocking apparatus in which the face of a movable element on the side at which the driving part for rocking the movable element is arranged is used. <P>SOLUTION: The rocking apparatus is provided with: a supporting part 105; oscillation parts 101, 102, 103 and 104; and a driving part 120 which drives the oscillation parts. The oscillation parts have at least one of the movable elements 101 and 102, including the movable element 101 having a permanent magnet 111. The movable elements 101 and 102 are rockably supported by a supporting part 105. The driving part includes the permanent magnet 111, a magnetic body 109 arranged facing to the permanent magnet 111 and a coil 110 arranged around the magnetic body 109. An open part 150 for exposing the face of at least one movable element 102 toward outside is provided in the space in the coil 110 which turns around the magnetic body 109. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to an oscillating device having an oscillating movable element, and a frequency adjusting method and apparatus therefor. Furthermore, the present invention relates to an optical deflector having such a swing device and an image forming apparatus using the same. This light deflection apparatus is suitable for an image forming apparatus such as a projection display that projects an image by light deflection scanning, a laser beam printer having an electrophotographic process, a digital copying machine, and the like.

2. Description of the Related Art Conventionally, an oscillating device having a mover that torsionally vibrates around a torsion shaft has been proposed. One application example of this oscillating device is an optical deflection device. An example in which such an optical deflecting device is used in a laser beam printer has been proposed (see Patent Document 1).

FIG. 8 is a schematic diagram showing an optical deflector disclosed in Patent Document 1. As shown in FIG. In the optical scanning device of FIG. 8, the pulse current generator 9 is connected to the coil 7 wound around the core 6 to constitute a magnetic field generating means, and the small magnet 3 and the magnetic field generating means are formed by the action of the magnetic field formed by the magnetic field generating means. The mirror surface 3a fixed to the small magnet 3 is vibrated. Then, by making the light beam 10 emitted from the light source enter the mirror surface 3a, the light beam 10 is scanned based on the vibration of the mirror surface 3a. This optical scanning device has a torsion spring 5 made of a shape memory alloy to support the small magnet 3 with respect to the housing 1 and to serve as a fulcrum for vibration of the small magnet 3.

When a magnetic field is generated by the magnetic field generating means, this magnetic field gives a torque about the torsion spring 5 to the small magnet 3. On the other hand, since the restoring force is received from the torsion spring 5 made of a shape memory alloy, the mirror surface 3a can be vibrated by applying a periodic magnetic field. In particular, when the mechanical natural frequency of the vibration system composed of the torsion spring 5 and the small magnet 3 matches the frequency of the generated magnetic field, resonance occurs and the amplitude is maximized. Since the mirror surface 3a is fixed to the surface of the small magnet 3, the light beam 10 incident on the mirror surface 3a is reflected, and the light beam 10 scans in a direction perpendicular to the torsion spring 5 that is the axis of vibration. Is done.
Japanese Patent Laid-Open No. 9-138366 (page 6, FIG. 1)

However, in this configuration, the core 6 is disposed on the back surface side where the mirror surface 3a of the small magnet 3 is fixed, and the back surface of the small magnet 3 cannot be used. On the other hand, if the space between the core 6 and the small magnet 3 is increased so that the back surface of the small magnet 3 can be used, the force applied to the small magnet 3 by the magnetic field generated from the coil 7 is reduced, and it can be vibrated efficiently. Can not.

Furthermore, the mirror surface 3a deflects light, and the flatness of the mirror surface 3a must be maintained. However, since the mirror surface 3a is fixed to the small magnet 3, it is not easy to maintain the flatness of the mirror surface 3a.

In view of the above problems, the swing device of the present invention includes a support portion, a vibration portion, and a drive portion that drives the vibration portion. The vibration unit includes at least one mover including a mover having a permanent magnet, the mover is supported to be swingable with respect to the support unit, and the drive unit includes the permanent magnet and the permanent magnet. And a coil disposed around the magnetic body. Furthermore, an opening for exposing the surface of at least one mover to the outside is provided in the space inside the coil that goes around the magnetic body.

In view of the above problems, the optical deflection apparatus of the present invention is an optical deflection apparatus that deflects and scans light using the oscillating device, and a movable surface is provided with a reflecting surface that reflects incident light. Yes.

In view of the above problems, an image forming apparatus according to the present invention includes a light source, the light deflecting device, and a photosensitive member. Light from the light source is deflected by the reflecting surface, and at least the deflected light is transmitted. A light source, a light deflection device, and a photoconductor are arranged so that a part of the photoconductor is irradiated.

Further, in view of the above problem, the frequency adjustment method of the present invention is a frequency adjustment method of the vibration part of the rocking device, and performs laser processing by irradiating at least one movable element with laser light through the opening. .

Moreover, in view of the said subject, the frequency adjustment apparatus of this invention is a frequency adjustment apparatus which performs the said frequency adjustment method. And having a laser processing light source, irradiating at least one movable element with light from the laser processing light source through the opening, and adjusting the natural vibration mode of the vibration part by changing the mass of the movable element To do.

According to the present invention, since the surface of at least one mover is exposed to the outside from the opening or the vertical hole, light can be incident on the surface of the mover. Therefore, this opening can be used for, for example, detecting the vibration angle of the mover and adjusting the frequency of the vibration part including the mover. In this regard, in the above-described conventional example, since the core wound with the coil is disposed on the lower surface of the mover so as to concentrate the magnetic field on the magnet formed on the mover, the lower surface of the mover cannot be used and is movable. It was difficult for light to enter from the side where the coil on the lower surface of the child was present.

Hereinafter, examples will be described in order to clarify specific embodiments of the present invention.

(Example 1)
A rocking device according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1A is a perspective view of the swing device of the present embodiment, and FIGS. 1B and 1C are sectional views thereof. As shown in FIG. 1, the oscillating device of this embodiment has two types of movable elements 101 and 102 and two types of elements arranged on a straight line (torsion shaft 108) connecting the two movable elements 101 and 102 in series. Torsion springs 103 and 104 are provided. The two movers are a second mover 102 formed at the center and having a reflection surface, and a first mover 101 which is an outer frame portion arranged so as to surround the reflection surface. The two movers 101 and 102 and the two types of torsion springs 103 and 104 constitute a vibration part.

More specifically, as shown in FIG. 1A, the second movable element 102 having a reflecting surface is supported by two second torsion springs 104. The first movable element 101 supports two second torsion springs 104 on the inner side, and is supported on the outer side by two first torsion springs 103. The support substrate 105, which is a support portion, supports the two first torsion springs 103 on the inner side. The support substrate 105 is bonded to a plate member (not shown). In the first mover 101, two permanent magnets 111 are bonded at positions facing each other across the second mover 102.

A drive means for driving the second movable element 102, that is, a drive section for driving the vibration section will be described with reference to FIGS. FIG. 1B shows a cross section taken along the plane 107 in FIG. The plane 107 is a plane perpendicular to the torsion axis 108 and intersecting the first mover 101. FIG. 1C shows a cross section cut along a plane that passes through the torsion shaft 108 and perpendicularly intersects the plane of the second movable element 102 at rest.

In the above configuration, a light reflecting film is bonded to the lower surface of the second movable element 102. The usage of this light reflecting film will be described later. A light reflecting film may also be bonded to the upper surface of the second movable element 102. This upper surface light reflecting film is typically used for deflecting and scanning incident light. Permanent magnets 111 are bonded to the lower surfaces of the first mover 101 at positions facing each other with the second mover 102 therebetween. Here, the permanent magnets 111 may be bonded to the upper surface of the first mover 101 one by one. Furthermore, a core 109, which is a magnetic body or a first magnetic body made of a material having a high magnetic permeability, is disposed one by one below the two permanent magnets 111, and a coil 110 is disposed around the two cores 109. Is being circulated. The core 109 and the plate member are bonded to a fixed base (not shown). The permanent magnet 111, the coil 110, and the core 109 constitute an electromagnetic actuator 120 that is a drive unit. When a current is passed through the coil 110, torque acts on the permanent magnet 111, causing the first mover 101 and the second mover 102 to vibrate around the torsion shaft 108. Here, the two cores 109 are arranged at intervals, and the coil 110 is circulated around them. This interval forms an opening 150 for exposing the lower surface of the second movable element 102 to the outside. If such an opening 150 is secured, the two cores 109 may be connected to each other at the side, for example.

Although the above-mentioned space is provided between the two cores 109, since the two cores 109 are present, leakage of the magnetic field generated by the coil 110 can be suppressed and a magnetic field can be effectively applied to the two permanent magnets 111. . Further, a large magnetic field generated by the single coil 110 can be equally applied to the two permanent magnets 111. In the configuration of the present embodiment, the first movable element 101 has a smaller torsional vibration angle around the torsion shaft 108 than the second movable element 102, so that the first movable element 101 can be brought closer to the core 109. Thereby, the rocking body including the two movers 101 and 102 can be driven efficiently. At this time, even if the first movable element 101 is brought close to the core 109, since the opening 150 is formed, the structure in which the back surface of the second movable element 102 is exposed to the outside can be maintained. Furthermore, in the present embodiment, since the permanent magnet 111 is not provided on the second movable element 102, the flatness of the light reflecting film adhered thereto can be ensured better.

An example of the driving principle of the rocking device having the above configuration will be described. The oscillating body or oscillating portion of the oscillating device has a primary natural vibration mode of the frequency f _{0 serving} as the reference frequency and a frequency approximately twice the reference frequency for torsional vibration about the torsion shaft 108 2 It can be treated as a two-degree-of-freedom vibration system having the following natural vibration modes. The electromagnetic actuator 120 including the coil 110 shown in FIG. 1 can drive the oscillating body at two frequencies: the frequency of the primary natural vibration mode and the frequency that is approximately twice the same in phase.

The state of this driving will be described in detail. FIG. 3A is a diagram for explaining the displacement angle of torsional vibration of the second mover 102 at the frequency f _{0 with} the horizontal axis as time t. In this specification, the displacement angle of the reciprocating vibration of the mover and the displacement angle of the light deflected and scanned by the optical deflecting device using the oscillating device only differ by a constant amount, and therefore are treated equivalently. FIGS. 3 (a) shows a portion corresponding to one cycle T ₀ of the torsional vibration of the second movable element _{105 (-T 0/2 <X} <T 0/2).

A curve 61 shows a component of the reference frequency f _{0 in} the drive signal for driving the coil 110. The curve 61 reciprocates in the range of the maximum amplitude ± φ ₁ , and the time t and the angular frequency w ₀ = 2πf ₀ are expressed as follows. This is a sinusoidal vibration expressed by Equation 1.
θ ₁ = φ ₁ sin [w ₀ t] (Formula 1)

On the other hand, the curve 62 shows the double frequency component of the reference frequency f _0, and oscillates in the range of the maximum amplitude ± phi _2, a sinusoidal vibration is expressed by the following equation 2.
θ ₂ = φ ₂ sin [2w ₀ t] (Formula 2)

A curve 63 indicates a displacement angle of torsional vibration of the second movable element 102 resulting from such driving. Optical deflecting device, a reference frequency f ₀ and 2 times the 2f ₀ near to each adjusted frequency f ₁ natural oscillation mode and the frequency f ₂ 2-order natural oscillation mode of the torsional axis 108 center of the as previously described Has torsional vibration. Therefore, resonance excited by the drive signals of θ ₁ and θ ₂ occurs in the optical deflector. That is, the displacement angle of the second mover 102 on the curve 63 is a vibration of superposition of two sinusoidal vibrations, and a sawtooth vibration represented by the following Expression 3.
θ = θ ₁ + θ ₂ = φ ₁ sin [w ₀ t] + φ ₂ sin [2w ₀ t] (Formula 3)

FIG. 3B shows curves 61a, 63a and a straight line 64a obtained by differentiating the curves 61 and 63 and the straight line 64 of FIG. 3A, and the angular velocities of these curves are explained. Compared with the curve 61a which is the angular velocity of the sinusoidal vibration of the reference frequency f ₀ , the curve 63a which shows the angular velocity of the sawtooth reciprocating vibration of the second mover 102 has the maximum angular velocity V ₁ and the minimum in the section NN ′. The angular velocity is within a range in which the angular velocity V ₂ of the point is maximum / minimum. Therefore, in the application using the deflection scanning of the light by the optical deflector using the oscillating device, if V ₁ and V ₂ exist within the allowable error of the angular velocity from the straight line 64a which is the equiangular velocity scanning, the section N -N 'can be considered a substantially equiangular scan. In this way, the angular velocity of the deflection scan can be set to a wide area where the displacement angle is substantially equal to that of the sinusoidal wave due to the sawtooth reciprocating vibration, so that it can be used for the entire deflection scan. Can be enlarged.

In the above description, the relationship in which the frequencies of the two natural vibration modes are approximately doubled has been described, but when this is approximately tripled, the shape of the superimposed vibration is substantially a triangular wave. In this case, since a region having a substantially constant angular velocity appears in the reciprocation of the deflection scanning, it is particularly suitable for an application using the constant angular velocity in the reciprocation.

Next, means for detecting the operating state of the second mover 102 will be described. FIG. 2 is a diagram for explaining the operation state detecting means of the present embodiment. FIG. 2 shows a cross section cut along the same plane as FIG. The laser light 203 emitted from the laser light source 201 passes through the lens 202, is irradiated on the lower surface of the second movable element 102 to which the light reflecting film is bonded, and is reflected here. Then, the reflected laser beam 203 is incident on the photodetector 204. Here, using the signal obtained by detecting the output signal from the photodetector 204, any one of the angle, angular velocity, angular acceleration, and amplitude in the torsional vibration of the second movable element 102 is detected.

As described above, in the swing device of the present embodiment having the opening 150 for exposing the lower surface of the second movable element 102 to the outside, the lower surface of the swing body that is not possible with the conventional swing device is used. Can do. Thereby, the angle, angular velocity, angular acceleration, amplitude, etc. in the torsional vibration of the vibration part can be detected. Based on the detection result, the electromagnetic actuator can be feedback-controlled to adjust the frequency of the reciprocating vibration of the second mover. In addition, it is possible to perform processing adjustment of the vibrating portion as described in the embodiments described later.

As described above, according to this embodiment, since the second movable element is exposed from the opening or the vertical hole, light can be incident on the lower surface of the second movable element, and the angle detection and frequency of the second movable element can be obtained. It can be used for adjustment. Further, in the optical deflector using the oscillating device of the present embodiment, no magnet is formed on the second movable element having the reflecting surface, and the flatness of the reflecting surface can be maintained well.

(Example 2)
A rocking device of Example 2 will be described. FIG. 4A is a perspective view showing a configuration of the second embodiment, and FIG. 4B is a cross-sectional view for explaining a driving unit or a driving unit for driving the second movable element 402. FIG. 4B shows a cross section taken along the plane 407 in FIG. The plane 407 is a plane perpendicular to the torsion axis 408 and intersecting the first mover 401.

In the present embodiment, the second movable element 402 is supported by the two second torsion springs 404 so as to be able to vibrate around the torsion shaft 408. Each of the two first movers 401 supports two second torsion springs 404 on the inner side and is supported on the outer side by two first torsion springs 403. The support substrate 405 supports the two first torsion springs 403 on the inside thereof. The support substrate 405 is bonded to a plate member (not shown). In each first mover 401, a permanent magnet 410 is bonded. Further, a light reflecting film is bonded to the lower surface of the second movable element 402. A light reflecting film may also be bonded to the upper surface of the second movable element 102.

As shown in FIG. 4B, permanent magnets 411 are bonded one by one on the lower surfaces of the two first movers 401 at positions facing each other with the second mover 402 interposed therebetween. Here, the permanent magnets 411 may be bonded to the upper surface of the first mover 401 one by one. Further, below the two permanent magnets 411, two cores 409 made of a material having high magnetic permeability are arranged with an opening 450 interposed therebetween, and a coil 410 is circulated around the core 409. Further, a first yoke 412 and a second yoke 413, which are second magnetic bodies, are arranged around the coil 410 along a magnetic path. The first yoke 412 is bonded to the core 409 and the plate member. The first yoke 412 is bonded to the second yoke 413 at its upper end. The permanent magnet 411, the coil 410, the core 409, the first yoke 412, and the second yoke 413 constitute an electromagnetic actuator 420. When a current is passed through the coil 410, a torque acts on the permanent magnet 411, and the first movable The child 401 and the second mover 402 are vibrated. In this embodiment, the other points are the same as those in the first embodiment.

In the present embodiment, as described above, by arranging the first yoke 412 and the second yoke 413 along the flow (magnetic path) of the magnetic field generated by the coil 410, the magnetic field is more efficiently applied to the permanent magnet 411. Can concentrate. As a result, the current that flows to obtain the torque necessary to torsionally vibrate the vibrating portion including the first movable element 401 and the second movable element 402 is relatively suppressed.

Further, in the present embodiment, as shown in FIG. 4, in order to make the lower surface of the second movable element 402 available, the first yoke 412 is spaced between two cores 409 around which one coil 410 is wound. The two second yokes 413 are connected to the two first yokes 412 respectively. Thus, there are two sets of magnetic structures composed of the first magnetic body and the second magnetic body. However, it is not easy to accurately arrange these two cores 409 so that the magnetic field concentrates on the permanent magnet 411. Therefore, as shown in FIG. 5, it is effective to connect the portions of the two sets of magnetic structures while securing the opening 550 that allows the lower surface of the second movable element 402 to be used. In FIG. 5, a coil and a vibrating portion that circulates around the two cores 509 arranged with the opening 550 interposed therebetween are omitted. Thus, by connecting a part of the two first yokes 512 and the second yoke 513, the alignment accuracy between the core 509 and the permanent magnet 411 on the first movable element 401 can be easily improved.

(Example 3)
Example 3 will be described. FIG. 6 is a perspective view showing a specific configuration of the present embodiment. The configuration of the rocking device here is basically the same as that of the first embodiment. That is, the oscillating device has two movable elements 601 and 602 and two types of torsion springs 603 and 604 arranged on a straight line connecting the two movable elements 601 and 602 in series. The first torsion spring 603 is supported by a support substrate 605, and a core 609 disposed with the opening 650 interposed therebetween and a coil 610 that circulates the core 609 are disposed below the vibration unit.

In FIG. 6, the laser beam 612 emitted from the laser light source 611 passes through the condenser lens 613 and is condensed on the lower surface of the second movable element 602 when stationary. The second movable element 602 is laser-processed by the condensed laser light, and its mass can be reduced or adjusted. As a result, for example, it is possible to mainly change either the reference frequency (primary natural vibration mode) or the secondary natural vibration mode of the vibration part to maintain the torsional natural vibration mode at a desired frequency ratio. it can. In this way, for example, it is possible to adjust the variation in shape when the vibration part is manufactured, or to maintain a plurality of torsional natural vibration modes that change due to environmental changes such as temperature changes at a desired frequency ratio.

By the way, a feature of the oscillation device of the present invention is that the drive unit includes a permanent magnet, a magnetic body for the permanent magnet, and a coil that circulates the magnetic body, and the surface of at least one mover is provided in the space inside the coil. There exists an opening part exposed outside. Therefore, the said Example is an illustration to the last, The number of the needle | mover of a vibration part, the form of a needle | mover, a rocking | fluctuation aspect, the form of the magnetic body of a drive part, etc. can be variously changed. For example, the number of movers may be one, or there may be three or more movers provided in a nested manner as in the first embodiment. Further, the swinging mode of the mover is not limited to the torsional vibration around the torsion axis. For example, a mode in which the movable member in the form of a cantilever vibrates in a flap manner using the bending deformation of the end portion is also possible. It is.

(Example 4)
FIG. 7 is a perspective view showing a basic configuration of an image forming apparatus according to Embodiment 4 using an optical deflecting device using the swinging device of the present invention. In FIG. 7, reference numeral 1001 denotes a laser light source, reference numeral 1002 denotes a lens, reference numeral 1005 denotes a writing lens, and reference numeral 1006 denotes a drum-shaped photoconductor. An optical deflector 1004 is arranged between the writing lens 1005 and the lens 1002. As the optical deflector 1004, the oscillation device shown in the first and second embodiments can be used. Further, the frequency adjustment method for the oscillating device shown in the third embodiment can also be used.

The image forming apparatus of this embodiment functions as an optical scanner device that scans light in a one-dimensional direction parallel to the rotation center 10A of the drum-shaped photosensitive member 1006 by the optical deflector 1004. That is, the laser light 1003 emitted from the laser light source 1001 passes through the lens 1002 and is scanned one-dimensionally by the optical deflector 1004. On the other hand, the drum-shaped photoconductor 1006 rotates at a constant speed around the rotation center 10A. The surface of the drum-shaped photoconductor 1006 is uniformly charged by a charger (not shown). Accordingly, based on the scanning by the optical deflector 1004 and the rotation of the drum-shaped photoconductor 1006, a light pattern is formed on the surface of the drum-shaped photoconductor 1006. Thus, an electrostatic latent image is formed on the surface of the drum-shaped photoconductor 1006. It is formed. Further, a toner image having a pattern corresponding to the electrostatic latent image on the surface of the drum-shaped photoconductor 1006 is formed by a developing device (not shown). A visible image can be formed by transferring and fixing this onto a sheet (not shown).

As described above, in the image forming apparatus using the optical deflecting device using the swinging device of the present invention, light is deflected by one movable element (not shown) having the reflecting surface in the optical deflector 1004. Therefore, the surface tilt that occurs in the configuration using the rotary polygon mirror does not occur, and an optical deflecting device that does not require a surface tilt correction system can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 illustrates a rocking device according to a first embodiment of the present invention. FIG. 3 is a diagram illustrating an angle detection unit of the swing device according to the first embodiment. (A) is a figure which shows the displacement angle at the time of the torsional vibration of the rocking body of Example 1, (b) is a figure which shows the angular velocity at the time of the torsional vibration of the rocking body of Example 1. It is a figure explaining the rocking | swiveling apparatus of Example 2 of this invention. 6 is a view for explaining a modification of the magnetic body including the core of the oscillation device of Embodiment 2. FIG. FIG. 6 is a diagram for explaining a configuration of a third embodiment of the present invention and a frequency adjustment method for an oscillator. FIG. 6 is a diagram illustrating an image forming apparatus according to Example 4 of the present invention. It is a figure which shows the optical deflection apparatus of a prior art example.

Explanation of symbols

101, 401, 601 Vibrating part (first mover)
102, 402, 602 Vibrating part (at least one mover, second mover)
103, 403, 603 Vibration part (first torsion spring)
104, 404, 604 Vibration part (second torsion spring)
105, 405, 605 Support (support substrate)
108, 408 Torsion shaft
109, 409, 509, 609 Magnetic body (first magnetic body, core)
110, 410, 610 Drive unit (coil)
111, 411 Drive unit (permanent magnet)
120, 420 Drive unit (electromagnetic actuator)
150, 450, 550, 650 Opening (vertical hole)
201 Laser light source
203 Laser light
204 photodetector
412 and 512 2nd magnetic body (1st yoke)
413, 513 Second magnetic body (second yoke)
611 Light source for laser processing (laser light source)
612 laser light
1001 Light source (laser light source)
1003 light (laser light)
1004 Optical deflector (optical deflector)
1006 Photoconductor (Drum-type photoconductor)

Claims (10)

A support unit, a vibration unit, and a drive unit that drives the vibration unit,
The vibration unit includes at least one mover including a mover having a permanent magnet,
The mover is supported to be swingable with respect to the support portion,
The drive unit includes the permanent magnet, a magnetic body disposed with respect to the permanent magnet, and a coil disposed around the magnetic body,
An oscillating device characterized in that an opening for exposing the surface of at least one mover to the outside is provided in a space inside a coil that circulates around a magnetic body. The vibrating section includes a first mover and a second mover that are torsionally vibrated around a single torsion axis, and a plurality of vibration parts arranged on a straight line that connects the first mover and the second mover in series. A first torsion spring and a plurality of second torsion springs,
The second mover is supported by the first mover with a plurality of second torsion springs opposed across the second mover,
The first mover is provided with two permanent magnets at positions facing each other with the second mover interposed therebetween, and is supported by the support portion with a plurality of first torsion springs facing each other with the first mover interposed therebetween,
The drive unit includes two first magnetic bodies arranged with the opening interposed therebetween, a coil arranged around the two first magnetic bodies, and the two permanent magnets,
2. The oscillating device according to claim 1, wherein the two first magnetic bodies are arranged one by one so as to face the two permanent magnets. 3. The oscillating device according to claim 2, wherein the first movable element has one and is formed so as to surround the second movable element. 3. The oscillating device according to claim 2, wherein the first movable element has two, and is disposed at positions facing each other with the second movable element interposed therebetween. The drive unit includes a second magnetic body that circulates around the first magnetic body, the coil, the first mover, and the permanent magnet and that is coupled to the first magnetic body. 5. The rocking device according to claim 2, wherein: Operating state detecting means for detecting the operating state of the movable element or the second movable element by applying light through the opening to the surface of the movable element or the second movable element and receiving the reflected light by a photodetector. 6. The oscillating device according to claim 1, further comprising: 7. An optical deflecting device that deflects and scans light using the oscillating device according to claim 1, wherein the movable element or the second movable element is provided with a reflecting surface that reflects incident light. An optical deflector characterized by that. A light source, the light deflection apparatus according to claim 7, and a photosensitive member,
The light source, the light deflecting device, and the photosensitive member are arranged so that light from the light source is deflected by the reflecting surface and at least a part of the deflected light is irradiated onto the photosensitive member. Image forming apparatus. 9. The method of adjusting the frequency of the vibration part of the oscillation device according to claim 1, wherein laser processing is performed by irradiating the movable element or the second movable element with laser light through the opening. A characteristic frequency adjustment method. A frequency adjustment device that executes the frequency adjustment method according to claim 9,
A light source for laser processing,
Irradiating light from a laser processing light source through the opening to the movable element or the second movable element, and adjusting a natural vibration mode of the vibrating part by changing a mass of the movable element or the second movable element. A frequency adjusting device characterized by the above.

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