JP4963864B2 - Electromagnetic actuator - Google Patents

Description

  The present invention relates to an electromagnetic actuator using a semiconductor substrate, and more particularly to an electromagnetic actuator that can reduce the manufacturing cost by reducing the number of manufacturing steps of a drive coil.

  Conventionally, as a planar electromagnetic actuator using a semiconductor substrate, a frame-shaped support portion, a movable portion, and a torsion bar that pivotally supports the movable portion within the frame of the support portion are integrally formed on the semiconductor substrate. In addition, there is a configuration in which, for example, a permanent magnet is provided as a static magnetic field generating means for applying a static magnetic field to the drive coil portions on both sides of the movable portion parallel to the axial direction of the torsion bar.

  Such an electromagnetic actuator is movable by electromagnetic force acting on both sides of the movable part parallel to the axial direction of the torsion bar due to the interaction between the magnetic field generated in the drive coil by the current supplied from the drive circuit and the static magnetic field by the permanent magnet. Drive part. If the movable part is provided with a reflecting mirror, the light beam applied to the reflecting mirror can be scanned by rotating the movable part. As an optical actuator for optical scanning, an optical switch, an optical scanning device, etc. Applicable. (For example, refer to Patent Document 1).

This type of electromagnetic actuator is manufactured by using a semiconductor manufacturing technique as described in Patent Document 2, for example, and an outline of a conventional manufacturing process is shown in FIG.
That is, in the step (a), a first layer coil pattern 2A and one electrode terminal region are formed on a semiconductor substrate (silicon substrate) 1. Next, in step (b), the insulating film 3 is formed on the coil pattern 2A except for the contact portion forming portion. Thereby, the contact part 2a is formed. In step (c), a second layer coil pattern 2B that is electrically connected to the first layer coil pattern 2A through the contact portion 2a and the other electrode terminal region are formed. Thereby, the above-described drive coil is formed. Next, in the step (d), the protective film 4 is formed on the second layer coil pattern 2B and part of each electrode terminal region. Thereby, a pair of electrode terminal portions 5A and 5B for electrically connecting the drive coil to an external circuit (not shown) by wire bonding is formed. In step (e), the semiconductor substrate portion excluding the frame-shaped support portion forming portion, the movable portion forming portion, and the torsion bar forming portion is removed by etching, and the frame-shaped support portion 6, the movable portion 7, and the pair of torsion bars 8, 8 are formed and formed into chips. When an electromagnetic actuator for optical scanning is used, a step of forming the reflection mirror 9 on the movable portion 7 is added as a step (f) after the etching step (e), and then a chip may be formed.
JP 2003-153518 A JP 2006-42487 A

  By the way, in this electromagnetic actuator, it is necessary to increase the number of turns of the coil on the movable part in order to increase the electromagnetic driving force. For this reason, conventionally, the number of coil turns on the movable portion is increased by performing the coil formation step a plurality of times and laminating the coil patterns. Therefore, in the conventional electromagnetic actuator, as shown in FIGS. 21A to 21D, at least 4 of the first layer coil formation → interlayer insulation film formation → second layer coil formation → protection film formation is performed as the coil formation process. There is a problem that a process is required and the manufacturing process is large and the manufacturing cost is high.

  The present invention has been made paying attention to the above problems, and an object of the present invention is to provide an electromagnetic actuator with a small number of coil forming steps and a low manufacturing cost.

For this reason, the invention of claim 1 integrally forms a frame-shaped support portion, a movable portion, and a torsion bar that pivotally supports the movable portion within the frame of the support portion with a semiconductor substrate, The movable portion includes a drive coil, and includes static magnetic field generating means for applying a static magnetic field to the drive coil portions of the opposite sides parallel to the torsion bar of the movable portion, and the pair of electrode terminals of the drive coil are An electromagnetic actuator configured to be provided in a support portion, wherein the drive coil is wired from one of the pair of electrode terminals to the movable portion via a torsion bar, and then the support portion side via the torsion bar the drawer, again, the after wiring on a movable part via a torsion bar, and wiring to connect to the other of the pair of electrode terminals are drawn out to the support part side via the torsion bar, the A layer, and, together with a plurality of turns wiring on said movable portion and configured to be connected to the pair of electrode terminals, and characterized in that said static magnetic field generating means, and be arranged on the inner side of the supporting part To do.

In such a configuration, the drive moving the coil, after wiring on a movable portion via the torsion bar from one of the pair of electrode terminals, the drawer to the support part side via the torsion bar, again, the torsion bar After wiring on the movable part via the torsion bar , the drive coil is connected to the other of the pair of electrode terminals through the torsion bar and connected to the other of the pair of electrode terminals. In the formation process, a plurality of turns can be wired on the same layer and on the movable part, and a sufficient driving force can be obtained as in the conventional case. And by arranging the static magnetic field generating means inside the support part, the influence of the magnetic field generated by the drive coil arranged in the support part part on the moving part rotating operation when the electromagnetic actuator is further miniaturized, etc. Can be reduced.

As claim 2, in the same layer as the driving coil, the amplitude detecting coil of the movable unit may be configured to interconnect.
With this configuration, the drive coil and the amplitude detection coil of the movable part can be formed simultaneously.
According to a third aspect of the present invention, the movable portion includes an inner movable portion and a frame-like outer movable portion provided outside the inner movable portion, and the outer movable portion is rotated by the outer torsion bar to the support portion. The inner movable portion may be pivotally supported by the inner movable portion so as to be rotatable by the inner torsion bar orthogonal to the axial direction of the outer torsion bar. In this case, as described in claim 4 , the drive coil may include an inner drive coil portion wired a plurality of turns to the inner movable portion and an outer drive coil portion wired a plurality of turns to the outer movable portion. .

In such a configuration, the inner movable portion and the outer movable portion can be independently rotated, and a two-dimensional electromagnetic actuator can be obtained.
As in claim 5, the movable part, it may be configured to form a reflective mirror.
With such a configuration, the electromagnetic actuator can be applied as a light beam scanning actuator.

According to the electromagnetic actuator of the present invention, it is possible to form a plurality of turns on the movable part in one coil pattern forming step by wiring a part of the drive coil using the support part, and a pair of support parts. Can be connected to electrode terminals. As a result, the coil pattern forming step can be reduced and the coil pattern need not be stacked, and the interlayer insulating film forming step can be omitted. Therefore, the number of coil forming processes is small, the manufacturing process can be simplified, and the manufacturing cost of the electromagnetic actuator can be greatly reduced. Further, since a plurality of turns can be formed on the movable portion, the same driving force as in the conventional case can be secured and the electrode terminal of the support portion can be connected, so that the wire bonding work for connecting to the external circuit can be facilitated as in the conventional case. Furthermore, by disposing the static magnetic field generating means inside the support portion, the influence of the magnetic field generated by the drive coil arranged in the support portion on the rotating operation of the movable portion when the electromagnetic actuator is further miniaturized, etc. Can be reduced.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a plan view of a first reference example of an electromagnetic actuator according to the present invention.
In FIG. 1, the electromagnetic actuator of this reference example is pivotally supported by a frame-like support portion 11 via a pair of torsion bars 12A and 12B so that the movable portion 13 can rotate. The support part 11, the torsion bars 12A and 12B, and the movable part 13 are integrally formed of a semiconductor substrate such as a silicon substrate. In the movable portion 13, a drive coil 14 that generates a magnetic field by energizing the peripheral portion is wired for a plurality of turns (2 turns in this reference example ) and connected to a pair of electrode terminals 15 </ b> A and 15 </ b> B provided on the support portion 11. . On the outside of the opposite side parallel to the axial direction of the torsion bars 12A and 12B of the support portion 11, a pair of acting a static magnetic field on the drive coil portions of the opposite sides of the movable portion parallel to the axial direction of the torsion bars 12A and 12B. As the static magnetic field generating means, permanent magnets 16 and 16 are provided so that opposite magnetic poles face each other. The static magnetic field generating means may be an electromagnet.

  After the drive coil 14 substantially circulates around its peripheral portion on the movable portion 13 from one electrode terminal 15A of the pair of electrode terminals 15A, 15B formed on the support portion 11 via one torsion bar 12A, Pulled out to the support portion 11 side via the torsion bar 12A, wired along the other electrode terminal 15B, and again inside the first turn of the movable portion 13 via the torsion bar 12A from between the electrode terminals 15A and 15B. After being substantially circulated, wiring is performed so as to be drawn out to the support portion 11 side via the torsion bar 12A and connected to the other electrode terminal 15B.

In the manufacturing process of the electromagnetic actuator of the first reference example , a silicon substrate is thermally oxidized as in the conventional case, and then, for example, an aluminum thin film is formed on the oxide film by sputtering or the like. Then, the portion corresponding to the coil pattern of the wiring form and the pair of electrode terminal regions is masked with a positive resist, the aluminum thin film is etched, and then the positive resist is removed. Thereby, the drive coil 14 and the pair of electrode terminals 15A and 15B are formed in the same layer. And after forming the protective film 4 (refer FIG. 21) in the drive coil 14 and a pair of electrode terminal 15A, 15B, the part except a support part formation part, a movable part formation part, and a torsion bar formation part of a silicon substrate is formed. Remove by etching. Thereby, the support part 11, a pair of torsion bars 12A and 12B, and the movable part 13 are formed.

When the drive coil 14 and the pair of electrode terminals 15A and 15B are formed of a material that does not require corrosion countermeasures such as gold, the protective film forming step can be omitted. In the case of an optical actuator for optical scanning, a process of forming a reflection mirror is added after the process of forming the support part 11 for etching the silicon substrate, the pair of torsion bars 12A and 12B, and the movable part 13.
According to such an electromagnetic actuator, since a part of the drive coil 14 is formed into a coil pattern that is routed and wired to the support part 11, a plurality of drive coils are formed in the movable part 13 as in the prior art, and the electrode terminal of the support part is formed. There is no need to stack coil patterns in order to connect them. As a result, the drive coil 14 that has a plurality of turns on the movable portion 13 and can be connected to the pair of electrode terminals 15A and 15B disposed on the support portion 11 can be formed in one coil forming step. In addition to the reduction, the interlayer insulating film forming step for insulating the first layer coil and the second layer coil can be omitted. Therefore, the number of coil forming processes is small, the manufacturing process can be simplified, and the manufacturing cost of the electromagnetic actuator can be greatly reduced. In addition, since a plurality of turns can be formed on the movable portion 13, the same driving force as in the prior art can be ensured. In addition, since the pair of electrode terminals 15A and 15B can be disposed on the support portion 11 which is a fixed portion, wire bonding for connecting the drive coil 14 to an external circuit can be easily performed as in the conventional case.

  The operation of this electromagnetic actuator is the same as in the prior art. When a current is supplied from the external drive circuit to the drive coil 14 on the movable portion 13, a magnetic field is generated, and due to the interaction between this magnetic field and the static magnetic field generated by the permanent magnets 16 and 16. Lorentz force is generated, electromagnetic forces in opposite directions are generated on both sides of the movable part parallel to the axial direction of the torsion bars 12A and 12B, and the movable part 13 rotates about the torsion bars 12A and 12B as the axis. The torsion bars 12A and 12B are twisted along with this turning operation, and a spring force is generated in the torsion bars 12A and 12B. 13 rotates.

  If a direct current is passed through the drive coil 14, the movable portion 13 stops at a rotation position corresponding to the amount of current, so that the rotation angle of the movable portion 13 can be controlled according to the amount of current. If an alternating current such as a sine wave is passed through the drive coil 14, the movable part 13 can be swung. If the movable part 13 is provided with a reflection mirror, the light beam can be deflected and scanned by the reflection mirror as an optical actuator for optical scanning, and the frequency of the alternating current supplied to the drive coil 14 is set to the resonance of the oscillation motion of the movable part 13. If the frequency is set, an optical scanning device capable of continuous scanning at a constant period can be realized.

2 and 3 show different wiring pattern examples of the drive coil 14, respectively. 2 and 3, the pair of permanent magnets 16 and 16 are not shown.
The wiring pattern of the drive coil 14 shown in FIG. 2 is obtained by making one half of the periphery of the movable portion 13 from one electrode terminal 15A of the support portion 11 via one torsion bar 12A and then via the other torsion bar 12B. Pull it out to the support 11 side. Further, after approximately half the circumference of the support portion 11, wiring is performed around the electrode terminal 15A, and the support portion 11 is again drawn out to the support portion 11 via the torsion bar 12A, the movable portion 13, and the torsion bar 12B through the same route. After that, the support portion 11 is substantially circulated, contrary to the above, from the torsion bar 12B side to the support portion 11 from the torsion bar 12A and substantially half a circumference along the peripheral portion of the movable portion 13 on the non-wiring side. Furthermore, after wiring along the electrode terminal 15B and substantially half-turning the support portion 11, the other electrode terminal is drawn out to the support portion 11 via the torsion bar 12B, the movable portion 13, and the torsion bar 12A through the same route. Wire to connect to 15B.

  The wiring pattern of the drive coil 14 shown in FIG. 3 is supported from the one electrode terminal 15A of the support part 11 through the torsion bar 12A through the torsion bar 12A, and then through the other torsion bar 12B. Pull out to the part 11 side. Further, after substantially supporting the support portion 11, the periphery of the movable portion 13 is substantially circulated between the electrode terminals 15A and 15B via the torsion bar 12A, and then pulled out to the support portion 11 via the torsion bar 12A. Thereafter, the support portion 11 is substantially half-circled around the electrode terminal 15B, the peripheral portion of the movable portion 13 is substantially half-circulated from the torsion bar 12B side, and is drawn from the torsion bar 12A to the support portion 11, and then the other electrode terminal 15B. Wire to connect.

2 and 3, the drive coil 14 can be wired in the same layer and a plurality of turns (two turns in the figure) on the movable portion 13, and can be wired via a pair of electrode terminals 15 </ b > A and 15 </ b > B disposed on the support portion 11. This structure can be connected to an external circuit by bonding.
FIG. 4 is a plan view of a second reference example of the present invention in which the electromagnetic actuator of FIG. 1 is provided with an amplitude detection coil.

In FIG. 4, the amplitude detection coil 17 is connected to a pair of electrode terminals 18 </ b > A and 18 </ b > B provided on the support portion 11 by wiring a plurality of turns (two turns in the drawing) inside the drive coil at the peripheral portion of the movable portion 13.
The amplitude detection coil 17 is formed simultaneously with the drive coil 14 and wired in the same layer. Similar to the drive coil 14, the wiring pattern passes through the torsion bar 12 </ b> A after substantially rounding the peripheral part on the movable part 13 from the electrode terminal 18 </ b> A formed on the support part 11 via the torsion bar 12 </ b> A. Then, it is pulled out to the support part 11 side, wired along the other electrode terminal 18B, and again around the inside of the first turn of the movable part 13 through the torsion bar 12A again, and then through the torsion bar 12A. Then, wiring is performed so as to lead out to the support portion 11 side and connect to the other electrode terminal 18B.

The amplitude detection coil 17 and the pair of electrode terminals 18A and 18B can be formed by patterning simultaneously with the patterning of the drive coil in the coil pattern forming process of the drive coil 14. Therefore, this reference example can be manufactured with the same number of manufacturing steps as the first reference example .
In the amplitude detection coil 17, when the movable portion 13 swings in the static magnetic field, an induced electromotive voltage is generated in the amplitude detection coil 17 along with the swing operation, and the induced electromotive voltage is detected to move the movable portion 13. The swing angle of the part 13 can be detected.

5 is an example in which the amplitude detection coil 17 is wired to the electromagnetic actuator of FIG. 2 and FIG. 6 is wired to the electromagnetic actuator of FIG.
4 to 6, the pair of permanent magnets 16 and 16 shown in FIG. 1 are not shown.
By the way, in this type of electromagnetic actuator, a part of the drive coil 14 is routed around the support part 11, and the influence on the rotating operation of the movable part 13 by the magnetic field generated in this part of the drive coil 14 can be considered. The influence is negligible because the permeability is low in air. However, the magnetic field generated in the drive coil 14 in the support portion 11 cannot be ignored due to further miniaturization of the electromagnetic actuator . For this reason, in the present invention, for example, a pair of permanent magnets 16 and 16 as static magnetic field generating means are arranged inside the support portion 11.

FIG. 7 shows a configuration of the first embodiment of the electromagnetic actuator of the present invention, in which the permanent magnets 16 are arranged inside the support portion 11. Although the drive coil is not shown for simplification of the drawing, it goes without saying that the drive coil is wired in any one of the wiring patterns shown in FIGS.
8 and 9 show another configuration example of the present invention, which is a case of an optical scanning electromagnetic actuator in which a movable mirror 13 is provided with a reflection mirror 19, and the movable portion 13 has a peripheral portion wired with a drive coil. In the case of a structure in which the central reflection mirror 19 is separated, the permanent magnets 16 and 16 are arranged so as to sandwich the peripheral portion where the drive coil 14 of the movable portion 13 is wired.

10 and 11 are reference examples for reducing the influence of the magnetic field generated in the drive coil 14 of the support portion on the rotating operation of the movable portion 13, and the support portion 11 portion parallel to the axial direction of the torsion bars 12A and 12B. Are formed at an angle with respect to the opposite side portion of the movable portion parallel to the axial direction of the torsion bars 12A, 12B so that the drive coil portion of the support portion 11 is not parallel to the drive coil portion of the movable portion 13. The magnetic field component that may affect the rotating operation of the movable portion 13 is reduced.
As another configuration example of the present invention, in the electromagnetic actuator of FIG. 11, a configuration in which the permanent magnets 16, 16 are arranged inside the support portion 11 as indicated by a broken line in the drawing can be considered.

FIG. 12 is a plan view of a two-dimensional type electromagnetic actuator which is a third reference example .
In FIG. 12, in the electromagnetic actuator of this reference example , a frame-shaped outer movable portion 23A is pivotally supported by a frame-shaped support portion 21 via a pair of outer torsion bars 22A, 22B. A flat plate-like inner movable portion 23B is pivotally supported on the outer movable portion 23A via a pair of inner torsion bars 24A and 24B orthogonal to the axial direction of the outer torsion bars 22A and 22B. The support portion 21, the outer and inner torsion bars 22A, 22B, 24A, 24B and the outer and inner movable portions 23A, 23B are integrally formed of a semiconductor substrate such as a silicon substrate. The outer movable portion 23A and the inner movable portion 23B are wired with a plurality of turns (two turns in the drawing) of a drive coil 25 that generates a magnetic field when energized, and are connected to a pair of electrode terminals 26A and 26B provided on the support portion 21. The A pair of permanent magnets 27A and 27A are parallel to the axial direction of the outer torsion bars 22A and 22B, and a pair of permanent magnets 27B and 27B are parallel to the axial direction of the inner torsion bars 24A and 24B. The magnetic poles opposite to each other are provided so as to face each other. These apply a static magnetic field to the drive coil portions on both sides of the outer movable portion and the drive coil portions on the opposite sides of the inner movable portion.

  The drive coil 25 goes from the electrode terminal 26A formed on the support portion 21 through the outer torsion bar 22A to the outer movable portion 23A by approximately ¼, and passes through the inner torsion bar 24A to the inner movable portion 23B. Wiring. Further, after substantially circling the inner movable part 23B, the inner movable part 23B is pulled out to the outer movable part 23A via the inner torsion bar 24A, and after the outer movable part 23A is made approximately 3/4 rounds, the support part via the outer torsion bar 22A. Pull out to 21. Furthermore, after wiring along the other electrode terminal 26B and wiring again between the electrode terminals 26A and 26B via the outer torsion bar 22A to the outer movable portion 23A, the same path (outer movable portion 23A1) as described above is used. / 4 turn → inner torsion bar 24A → inner movable part 23B lap → inner torsion bar 24A → outer movable part 23A3 / 4 turn → outer torsion bar 22A → support part 21) and wired to connect to electrode terminal 26B. . Here, the drive coil 25 formed in a plurality of turns in the outer movable portion 23A constitutes an outer drive coil portion, and the drive coil 25 formed in a plurality of turns in the inner movable portion 23B constitutes an inner drive coil portion.

The manufacturing process of the electromagnetic actuator of the third reference example is different from the first reference example of FIG. 1 only in the coil pattern and the etching shape of the silicon substrate, and can be formed with the same number of manufacturing processes as the first reference example. The drive coil 25 can be formed in a single coil formation process.
According to the two-dimensional type electromagnetic actuator having such a configuration, similarly to the electromagnetic actuators of FIGS. 1 to 3, each of the pair of electrode terminals 26 </ b> A of the support portion 21 has a plurality of turns of the outer drive coil portion and the inner drive coil portion. , 26B can be formed in a single coil forming process, the number of coil forming processes is small, the manufacturing process can be simplified, and the manufacturing cost of the electromagnetic actuator can be greatly reduced.

This electromagnetic actuator rotates and drives the outer movable portion 23A and the inner movable portion 23B by inputting a signal in which the resonance frequencies of the outer movable portion 23A and the inner movable portion 23B are superimposed on the drive coil 25. Can do.
13 and 14 show examples of wiring patterns of the drive coil 14 different from those in FIG. In FIGS. 13 and 14, the permanent magnets 27A, 27A and 27B, 27B are not shown.

  The wiring pattern of the drive coil 25 shown in FIG. 13 is such that the outer movable portion 23A is turned approximately ¼ from the electrode terminal 26A of the support portion 21 via the outer torsion bar 22A, and the inner movable portion via the inner torsion bar 24A. Wire to 23B. Further, after substantially circling the inner movable portion 23B, the inner movable portion 23B is pulled out to the outer movable portion 23A via the inner torsion bar 24A, and after approximately ¼ cycle, the inner movable portion 23B is pulled out to the support portion 21 via the outer torsion bar 22B. Further, the support portion 21 is substantially half-circulated and wired along the electrode terminal 26A, and then again wired between the electrode terminals 26A and 26B to the outer movable portion 23A via the outer torsion bar 22A. Thereafter, the support portion 21 is routed in the same path as described above (outer movable portion 23A1 / 4 turn → inner torsion bar 24A → inner movable portion 23B orbit → inner torsion bar 24A → outer movable portion 23A1 / 4 turn → outer torsion bar 22B). Pull out. Further, after the support portion 21 is substantially circulated, wiring is performed in the order of the outer torsion bar 22B → the outer movable portion 23A half circumference → the outer torsion bar 22A → the support portion 21. Further, after half-circulating the support portion 21, it is pulled out to the support portion 21 through the same path as described above (outer torsion bar 22B → outer movable portion 23A half-turn → outer torsion bar 22A → support portion 21) and connected to the other electrode terminal 26B. To do.

The wiring pattern of the drive coil 25 in FIG. 14 is as follows: from the electrode terminal 26A to the outer torsion bar 22A → the outer movable portion 23A1 / 4 round → the inner torsion bar 24A → the inner movable portion 23B, the inner torsion bar 24A → the outer movable portion 23A1 / 4. The outer movable portion 23A is wired in the order of circumference → outer torsion bar 22B → support portion 21 half circumference → outer torsion bar 22A → outer movable portion 23A1 / 4 round → inner torsion bar 24A → inner movable portion 23B orbit → inner torsion bar 24A. The process is the same as in FIG. Thereafter, the outer movable portion 23A is made approximately 3/4 round, pulled out to the support portion 21 via the outer torsion bar 22A, and after the support portion 21 is substantially half-turned, the outer movable portion 23A is passed through the outer torsion bar 22B. Is pulled out to the support portion 21 via the outer torsion bar 22A and connected to the other electrode terminal 26B.
FIG. 15 is a plan view of a fourth reference example of the present invention in which an amplitude detection coil is provided in the electromagnetic actuator of FIG.

In FIG. 15, the amplitude detection coil 28 is a pair of electrodes provided on the support portion 21 by wiring a plurality of turns (two turns in the drawing) inside the drive coil of the outer movable portion 23A and outside the drive coil of the inner movable portion 23B . Connected to terminals 29A and 29B.
The amplitude detection coil 28 is formed simultaneously with the drive coil 25 and wired in the same layer. The wiring pattern is routed from one electrode terminal 29A through the outer torsion bar 22A to the outer movable part 23A by approximately ¼, and wired to the inner movable part 23B via the inner torsion bar 24A. After substantially circling the inner movable part 23B, the inner movable part 23B is pulled out to the outer movable part 23A via the inner torsion bar 24A, and after approximately three quarters, it is pulled out to the support part 21 via the outer torsion bar 22A. Further, after wiring along the other electrode terminal 29B and wiring again between the electrode terminals 29A and 29B via the torsion bar 22A to the outer movable portion 23A, the same path as described above (outer movable 23A1 / 4 turn → inner torsion bar 24A → inner movable part 23B lap → inner torsion bar 24A → outer movable part 23A3 / 4 turn → outer torsion bar 22A → support part 21) and connected to the other electrode terminal 29B Wiring to do.

16 is an example in which the amplitude detection coil 28 is wired to the electromagnetic actuator of FIG. 13 and FIG. 17 is wired to the electromagnetic actuator of FIG.
15 to 17, the pair of permanent magnets 27A, 27A and 27B, 27B shown in FIG. 12 are not shown.
According to the configuration of the electromagnetic actuator shown in FIGS. 15 to 17, both the drive coil 25 and the amplitude detection coil 28 are formed on the outer movable portion 23 </ b> A and the inner movable portion 23 </ b> B by a plurality of turns. It is also possible to use an amplitude detection coil and the amplitude detection coil 28 as a drive coil. Also in the case of these electromagnetic actuators, the amplitude detection coil 28 and the pair of electrode terminals 29A and 29B can be formed by patterning simultaneously with the drive coil in the coil pattern forming process of the drive coil 25.

FIG. 18 is a plan view showing a configuration in which an outer drive coil and an inner drive coil are independently formed in a two-dimensional type electromagnetic actuator, and the outer movable portion and the inner movable portion can be driven independently.
In FIG. 18, reference numeral 31 denotes an outer drive coil, which is wired for a plurality of turns (two turns in the figure) to the outer movable portion 23 </ b > A and is connected to a pair of electrode terminals 32 </ b > A and 32 </ b > B provided on the support portion 21. Reference numeral 33 denotes an inner drive coil, which is wired a plurality of turns (two turns in the figure) to the inner movable portion 23B, and is connected to a pair of electrode terminals 34A and 34B provided on the support portion 21.

  The outer drive coil 31 substantially circulates the outer movable portion 23A from one electrode terminal 32A formed on the support portion 21 via the outer torsion bar 22A, and then the support portion 21 side via the outer torsion bar 22A. , Routed along the other electrode terminal 32B, wired between the electrode terminal 32A and the electrode terminal 34A, and again passed through the outer torsion bar 22A to approximately the inner side of the first turn of the outer movable portion 23A. After going around, it is pulled out to the support portion 21 side via the outer torsion bar 22A and connected to the other electrode terminal 32B.

The wiring pattern of the inner drive coil 33 is the same as the wiring pattern of the amplitude detection coil 28 described in FIG.
19 and 20 show examples of wiring patterns different from the wiring pattern of the outer drive coil 31 of FIG. The wiring pattern of the inner drive coil 33 is the same as that in FIG.

  In the wiring pattern of the outer drive coil 31 in FIG. 19, the electrode terminal 32A passes through one outer torsion bar 22A and then substantially circulates outside the inner drive coil of the outer movable portion 23A, and then passes through the other outer torsion bar 22B. To the support portion 21 side. Further, after substantially half-turning the support portion 21, wiring is provided between the electrode terminals 32A and 34A, and the same route is taken out to the support portion 21 again via the outer torsion bar 22A, the outer movable portion 23A, and the outer torsion bar 22B. . Thereafter, the support portion 21 is turned around substantially, and contrary to the above, the outer movable portion 23A is substantially half-turned from the outer torsion bar 22B and pulled out from the outer torsion bar 22A to the support portion 21. Further, after wiring between the electrode terminals 34B and 32B and half-turning the support portion 21, the same route is taken out to the support portion 21 via the outer torsion bar 22B, the outer movable portion 23A, and the outer torsion bar 22A. Wiring is performed so as to connect to the electrode terminal 32B.

  The outer drive coil 31 shown in FIG. 20 has a wiring pattern in which the outer periphery of the inner drive coil of the outer movable portion 23A is substantially half-circulated from the electrode terminal 32A via the outer torsion bar 22A, and then the support portion 21 via the outer torsion bar 22B. Pull it out to the side. Further, after half-circulating the support portion 21, wiring is provided between the electrode terminals 32A and 34A, and the periphery of the outer movable portion 23A is substantially circulated via the torsion bar 22A, and then supported via the outer torsion bar 22A. Pull out to part 21. After that, wiring is made between the electrode terminals 34B and 32B, the support part 21 is made a half turn, the outer movable part 23A is substantially made a half turn from the torsion bar 22B side, and the electrode terminal 32B is drawn from the outer torsion bar 22A to the support part 21. Wire to connect to.

In the electromagnetic actuator having the configuration shown in FIGS. 18 to 20, since the drive current can flow independently through the outer drive coil 31 and the inner drive coil 33, the outer movable portion 23 </ b> A and the inner movable portion 23 </ b> B are driven to rotate independently of each other. it can.
Also in the case of a two-dimensional type electromagnetic actuator, since the drive coil is wired to the support portion that supports the movable part, the magnetic field generated in the drive coil of the support portion due to the further miniaturization of the electromagnetic actuator is generated. In consideration of the case where it cannot be ignored, a static magnetic field generating means such as a permanent magnet is arranged inside the support portion although not shown.

The top view which shows the 1st reference example of the electromagnetic actuator to which this invention is applied A plan view showing an example of a drive coil wiring pattern different from FIG. Further, a plan view showing another example of the drive coil wiring pattern The top view which shows the example which provided the coil for amplitude detection in the electromagnetic actuator of FIG. The top view which shows the example which provided the coil for amplitude detection in the electromagnetic actuator of FIG. The top view which shows the example which provided the coil for amplitude detection in the electromagnetic actuator of FIG. The schematic plan view which shows the example of arrangement | positioning of the permanent magnet of 1st Embodiment of this invention . The schematic plan view which shows another example of arrangement | positioning of the permanent magnet of another embodiment of this invention . The schematic plan view which shows another example of arrangement | positioning of the permanent magnet of further another embodiment of this invention . Schematic plan view showing an arrangement example of permanent magnets as a reference example Schematic plan view showing another arrangement example of permanent magnets Plan view of two-dimensional type of electromagnetic actuator to which the present invention is applied FIG. 12 is a plan view showing a drive coil wiring pattern example different from FIG. Further, a plan view showing another example of the drive coil wiring pattern FIG. 12 is a plan view when an amplitude detection coil is provided in the two-dimensional electromagnetic actuator of FIG. The top view which shows the example which provided the coil for amplitude detection in the two-dimensional type electromagnetic actuator of FIG. The top view which shows the example which provided the coil for amplitude detection in the two-dimensional type electromagnetic actuator of FIG. A plan view when a two-dimensional electromagnetic actuator is provided with an outer drive coil and an inner drive coil that are independent of each other. The top view which shows the example of an outer side drive coil wiring pattern different from FIG. A plan view showing another example of the outer drive coil wiring pattern Explanatory drawing of the manufacturing process of conventional electromagnetic actuator for optical scanning

Explanation of symbols

11, 21 Support portions 12A, 12B, 22A, 22B, 24A, 24B Torsion bars 13, 23A, 23B Movable portions 14, 25, 31, 33 Drive coils 15A, 15B, 26A, 26B, 32A, 32B, 34A, 34B Electrodes Terminal (for drive coil)
18A, 18B, 29A, 29B Electrode terminal (for amplitude detection coil)
16, 27A, 27B Permanent magnet (static magnetic field generating means)

Claims (5)

A frame-shaped support portion, a movable portion, and a torsion bar that pivotally supports the movable portion in a swingable manner in a frame of the support portion are integrally formed with a semiconductor substrate, and the movable portion includes a drive coil, An electromagnetic actuator comprising a static magnetic field generating means for applying a static magnetic field to the drive coil portions of the opposite sides parallel to the torsion bar of the movable portion, and having a pair of electrode terminals of the drive coil provided on the support portion. And
After the drive coil is wired from one of the pair of electrode terminals to the movable part via the torsion bar , the drive coil is pulled out to the support part side via the torsion bar, and again via the torsion bar. After wiring on the movable part, the wiring is drawn out to the support part side via the torsion bar and connected to the other of the pair of electrode terminals , and the same layer and a plurality of turns on the movable part. An electromagnetic actuator characterized in that it is configured to be wired and connected to the pair of electrode terminals, and the static magnetic field generating means is arranged inside the support portion . Electromagnetic actuator according to claim 1, in the same layer as said drive coils, characterized by being configured to route the amplitude detecting coil of the movable portion. The movable portion includes an inner movable portion and a frame-shaped outer movable portion provided outside the inner movable portion, and the outer movable portion is pivotally supported on the support portion by an outer torsion bar. 3. The electromagnetic actuator according to claim 1, wherein the inner movable portion is pivotally supported on the outer movable portion by an inner torsion bar orthogonal to the axial direction of the outer torsion bar. Said drive coil, and the inner driving coil unit in which a plurality of turns wirings on the inner movable unit, according to claim 3, characterized in that it has a structure comprising a plurality of turns wiring the outer driving coil portion to the outer movable portion Electromagnetic actuator. Electromagnetic actuator according to the movable portion, any one of claims 1 to 4, characterized in that the formation of the reflecting mirror.

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