JP4957896B2 - Method for manufacturing nozzle forming member, method for manufacturing liquid jet head, and method for manufacturing liquid jet head unit - Google Patents

Description

  The present invention relates to a method for manufacturing a nozzle forming member in which a nozzle opening for ejecting liquid is formed, a method for manufacturing a liquid ejecting head including the nozzle forming member, a liquid ejecting head, and a liquid ejecting surface of the liquid ejecting head. The present invention relates to a method for manufacturing a liquid jet head unit including a holding member.

  For example, an ink jet recording head unit (hereinafter also referred to as a head unit) having an ink jet recording head that ejects ink as a liquid includes an ink jet recording head having a liquid ejecting surface in which a nozzle opening for ejecting ink is opened. And a holding member such as a fixing plate that is bonded to a liquid ejecting surface of an ink jet recording head via an adhesive (for example, see Patent Document 1).

  In such a head unit, if a liquid repellent film is provided on the liquid ejecting surface, the adhesive strength between the liquid ejecting surface and the holding member is lowered. A non-liquid repellent region from which the film has been removed is formed.

Japanese Patent Laying-Open No. 2005-096419 (pages 7 to 12, FIGS. 1 to 3)

  However, it is difficult to form a liquid-repellent region by selectively forming a liquid-repellent film in order to form a non-liquid-repellent region that is used for bonding to other members on the liquid ejecting surface of the liquid ejecting head. It is. Further, after forming the liquid repellent film on the liquid ejecting surface, to form the non-liquid repellent region while leaving the liquid repellent region, for example, a protective member is adhered to the liquid repellent region of the liquid ejecting surface and covered with the protective member. By removing the liquid repellent film that is not broken, a non-liquid repellent region can be formed. At this time, the protective member is adhered to the nozzle opening and the peripheral portion thereof, so that when the protective member is peeled off, the adhesive residue adhered to the nozzle opening and the peripheral portion adheres to the nozzle opening and the peripheral portion. There is a problem that the liquid ejection characteristics when liquid is ejected from the opening deteriorate.

  Such a problem is not limited to the liquid ejecting head and the method of manufacturing the liquid ejecting head unit having the liquid ejecting head, and similarly exists in nozzle forming members used in other apparatuses.

  SUMMARY An advantage of some aspects of the invention is that it provides a method for manufacturing a nozzle forming member, a method for manufacturing a liquid ejecting head, and a method for manufacturing a liquid ejecting head unit with improved liquid ejecting characteristics.

An aspect of the present invention that solves the above problem is a method of manufacturing a nozzle forming member having a liquid ejecting surface in which a nozzle opening for ejecting a liquid is opened, the step of forming a liquid repellent film on the liquid ejecting surface, In the liquid repellent area where the liquid repellent film is formed, in the liquid repellent area where the liquid repellent film is left, in the area opposite to the nozzle opening and the peripheral edge thereof so as not to adhere to the nozzle opening and the peripheral edge thereof. A step of defining a space between the protective member and the nozzle opening and the peripheral portion thereof by adhering a tape-shaped protective member having a recess, and the region of the liquid ejection surface other than the protective member A method for manufacturing a nozzle forming member, comprising: a step of removing a liquid repellent film to form a non-liquid repellent region; and a step of forming the liquid repellent region by peeling the protective member. .
In such an aspect, the liquid repellent area and the non-liquid repellent area can be easily and reliably formed on the nozzle forming member, and the protective member used to form the liquid repellent area and the non-liquid repellent area on the nozzle forming member. When peeling off, it is possible to reliably prevent the adhesive from adhering to the nozzle opening and its peripheral edge as a residue. As a result, it is possible to prevent deterioration of the liquid ejection characteristics when the liquid is ejected from the nozzle openings. Further, when the protective member used for forming the liquid repellent region and the non-liquid repellent region on the nozzle forming member is peeled off, a space is defined by the concave portion, so that the adhesive remains in the nozzle opening and its peripheral portion. Can be reliably prevented.

  In the step of adhering the protective member to the liquid ejection surface, it is preferable that the protective member is adhered on the boundary side of the liquid repellent region with the non-liquid repellent region. According to this, the adhesive region of the protective member can be made relatively narrow, and it is possible to prevent the adhesive residue from being generated in the liquid repellent region. Thereby, it is possible to prevent the liquid from adhering to the adhesive residue remaining on the liquid ejection surface of the nozzle forming member.

According to another aspect of the present invention, there is provided a method for manufacturing a nozzle forming member having a liquid ejecting surface in which a nozzle opening for ejecting liquid is opened, the step of forming a liquid repellent film on the liquid ejecting surface; The nozzle opening between the nozzle opening and the peripheral portion thereof is not adhered to the nozzle opening and the peripheral portion thereof in a liquid repellent region where the liquid repellent film is left on the liquid ejection surface on which the liquid film is formed. And a step of adhering a protective member through a spacer member that does not adhere to the peripheral portion thereof, a step of removing the liquid repellent film in a region other than the protective member of the liquid ejection surface to form a non-liquid repellent region, And a step of forming the liquid-repellent region by peeling off the protective member.
In such an aspect, the liquid repellent area and the non-liquid repellent area can be easily and reliably formed on the nozzle forming member, and the protective member used to form the liquid repellent area and the non-liquid repellent area on the nozzle forming member. When peeling off, the spacer member can reliably prevent the adhesive from adhering to the nozzle opening and its peripheral edge as a residue.

  In the step of forming the liquid repellent film, it is preferable to form a base film on the liquid ejection surface and a molecular liquid repellent film made of a metal alkoxide on the base film. According to this, it is possible to form a liquid repellent film having excellent adhesion, liquid repellency and abrasion resistance on the liquid ejecting surface, and the liquid ejecting characteristics are thin despite being thinner than the conventional liquid repellent film. improves.

  In the step of forming the non-liquid-repellent region, it is preferable to remove only the molecular film provided on the base film on the liquid ejection surface. According to this, it is not necessary to remove the base film or selectively form the base film only in a predetermined region, so that the manufacturing process can be simplified and the manufacturing cost can be reduced.

Further, according to another aspect of the present invention, there is provided a nozzle forming member in which a nozzle opening for ejecting liquid is formed, a pressure generating chamber communicating with the nozzle opening, and a pressure generating means for causing a pressure change in the pressure generating chamber. A method of manufacturing a liquid ejecting head comprising: forming the nozzle forming member by the method of manufacturing a nozzle forming member according to the above aspect.
In such an aspect, the liquid repellent area and the non-liquid repellent area can be easily and reliably formed on the nozzle forming member, and the protective member used to form the liquid repellent area and the non-liquid repellent area on the nozzle forming member. When peeling off, it is possible to reliably prevent the adhesive from adhering to the nozzle opening and its peripheral edge as a residue. Accordingly, it is possible to manufacture a liquid ejecting head that prevents the liquid ejecting characteristics from being deteriorated when the liquid is ejected from the nozzle opening.

  Here, the method further includes a step of bonding a flow path forming substrate having the pressure generating chamber to the side opposite to the liquid ejection surface of the nozzle forming member, and in the step of forming the liquid repellent film, the nozzle formation In the step of forming the non-liquid-repellent region, the non-liquid-repellent region is preferably formed on a predetermined region of the liquid ejecting surface and a surface opposite to the liquid ejecting surface. According to this, the non-liquid-repellent region is also formed in the adhesion region between the nozzle forming member and the flow path forming substrate, so that the adhesive strength between the flow path forming substrate and the nozzle forming member can be improved.

  Further, in the step of forming the liquid repellent film, a step of forming a base film only on the liquid ejecting surface, and a metal alkoxide on the liquid ejecting surface of the nozzle forming member and a surface opposite to the liquid ejecting surface. Forming a liquid repellent film of a molecular film, and in the step of forming the non-liquid repellent area, the nozzle layer is provided on the base film in a predetermined area of the liquid ejection surface of the nozzle forming member. It is preferable to remove the molecular film and the molecular film provided on the surface of the nozzle forming member opposite to the liquid ejection surface. According to this, it is not necessary to form a base film in the adhesion region between the nozzle forming member and the flow path forming substrate, and the manufacturing process can be simplified. Further, it is not necessary to remove the base film or to selectively form the base film only in a predetermined region, so that the manufacturing process can be simplified and the manufacturing cost can be reduced.

  Further, after the step of forming the non-liquid-repellent region, a primer treatment step of applying a primer liquid to the non-liquid-repellent region is provided, and in the step of bonding the flow path forming substrate and the nozzle forming member, adhesion It is preferable to adhere via an agent. According to this, by performing the primer treatment before the flow path forming substrate and the nozzle forming member are bonded, the adhesive strength between them can be further improved.

Further, according to another aspect of the invention, a liquid ejecting head including a nozzle forming member in which a nozzle opening for ejecting liquid is formed, and a holding member bonded to the non-liquid-repellent region of the nozzle forming member of the liquid ejecting head. A liquid ejecting head unit comprising a member, wherein the holding member is bonded to the non-liquid-repellent region of the liquid ejecting surface of the liquid ejecting head formed by the method of manufacturing a liquid ejecting head according to the above aspect. A method of manufacturing a liquid jet head unit is provided.
In such an aspect, the liquid repellent area and the non-liquid repellent area can be easily and reliably formed on the nozzle forming member, and the protective member used to form the liquid repellent area and the non-liquid repellent area on the nozzle forming member. When peeling off, it is possible to reliably prevent the adhesive from adhering to the nozzle opening and its peripheral edge as a residue. Accordingly, it is possible to manufacture a liquid ejecting head unit that prevents deterioration of the liquid ejecting characteristics when ejecting liquid from the nozzle opening, and to improve the adhesive strength between the holding member and the nozzle forming member by the non-liquid repellent region. Can do.

  Here, after the step of forming the non-liquid-repellent region, it is preferable to further include a primer treatment step of applying a primer liquid to the non-liquid-repellent region. According to this, by performing the primer treatment before the bonding between the holding member and the nozzle forming member, the adhesive strength between them can be further improved.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view showing an ink jet recording head unit which is an example of a liquid jet head according to Embodiment 1 of the present invention, and FIG. 2 is an assembled perspective view of the ink jet recording head unit.

  As shown in the drawing, a cartridge case 210 constituting an ink jet recording head unit 1 (hereinafter also referred to as a head unit) which is an example of a liquid ejecting head unit of the present invention is mounted with an ink cartridge which is an ink supply means (not shown). The cartridge mounting portion 211 is provided. For example, in this embodiment, the ink cartridge is configured as a separate body filled with black and three color inks, and the ink cartridges of the respective colors are mounted in the cartridge case 210. Although not shown, the bottom surface of the cartridge case 210 is provided with a plurality of ink communication paths having one end opened to each cartridge mounting portion 211 and the other end opened to the head case side described later. In addition, an ink supply needle 213 that is inserted into the ink supply port of the ink cartridge is formed in the ink communication path in the ink communication path of the cartridge mounting portion 211 to remove bubbles and foreign matters in the ink. It is fixed via a filter (not shown).

  A plurality of ink jet recording heads 2 are fixed to the bottom surface side of such a cartridge case 210.

  A plurality of ink jet recording heads 2 are provided for each ink color of an ink cartridge (not shown). In this embodiment, one inkjet recording head unit 1 is provided with four inkjet recording heads 2.

  Here, the ink jet recording head 2 which is an example of the liquid jet head of the present embodiment will be described in detail. FIG. 3 is an exploded perspective view of the ink jet recording head, and FIG. 4 is a cross-sectional view of the ink jet recording head. As shown in FIGS. 3 and 4, the ink jet recording head 2 includes a head main body 220 and a head case 230 provided on the side opposite to the liquid ejecting surface A of the head main body 220.

  In this embodiment, the flow path forming substrate 10 constituting the head main body 220 is made of a silicon single crystal substrate, and an elastic film 50 made of silicon dioxide previously formed by thermal oxidation is formed on one surface thereof. This flow path forming substrate 10 is formed with two rows in which pressure generation chambers 12 partitioned by a plurality of partition walls are arranged in parallel in the width direction by anisotropic etching from the other side. Further, on the outer side in the longitudinal direction of the pressure generating chambers 12 in each row, there is communication with a reservoir unit 31 provided on a reservoir forming substrate 30 described later, and a communication composing a reservoir 100 serving as a common ink chamber for each pressure generating chamber 12. A portion 13 is formed. The communication portion 13 is in communication with one end portion in the longitudinal direction of each pressure generating chamber 12 via the ink supply path 14. That is, in the present embodiment, the pressure generation chamber 12, the communication portion 13, and the ink supply path 14 are provided as the liquid flow paths formed on the flow path forming substrate 10.

  Further, a nozzle plate 20 that is a nozzle forming member in which the nozzle openings 21 are formed is fixed to the opening surface side of the flow path forming substrate 10 via an adhesive, a heat welding film, or the like. In the present embodiment, the nozzle plate 20 and the flow path forming substrate 10 are bonded via an adhesive 400. The nozzle opening 21 of the nozzle plate 20 is formed at a position communicating with the pressure generation chamber 12 on the side opposite to the ink supply path 14. In this embodiment, since two rows in which the pressure generation chambers 12 are arranged in parallel are provided on the flow path forming substrate 10, two rows of nozzle rows 21A in which the nozzle openings 21 are arranged in parallel are provided in one head body 220. Yes. In this embodiment, the surface on which the nozzle openings 21 of the nozzle plate 20 are opened is the liquid ejection surface A.

  Examples of such a nozzle plate 20 include a metal substrate such as a silicon substrate and stainless steel (SUS).

  A laminated film 22 having a liquid repellent film is provided on the liquid ejecting surface A where the nozzle openings 21 of the nozzle plate 20 are opened. The laminated film 22 of the present embodiment is composed of a base film 23 made of a plasma polymerization film formed over the entire surface of the liquid ejection surface A, and a metal alkoxide having liquid repellency provided in the center on the base film 23. And a liquid repellent film 24 made of a molecular film.

  The base film 23 can be formed, for example, by polymerizing silicone with argon plasma gas. The base film 23 has a role of improving the adhesion between the liquid repellent film 24 which is a molecular film described later and the nozzle plate 20. The liquid repellent film 24 is made of a metal alkoxide molecular film having liquid repellency. For example, a silane coupling agent such as alkoxysilane is mixed with a solvent such as thinner to form a metal alkoxide solution. By immersing the nozzle plate 20 in the solution, the liquid repellent film 24 in which the metal alkoxide is polymerized can be formed. The liquid repellent film 24 made of this molecular film can be formed thinner than a conventional liquid repellent film, for example, a liquid repellent film formed by eutectoid plating, and the liquid ejecting surface A is wiped by wiping when cleaning the head surface. However, the liquid repellency is not deteriorated, and there is an advantage that the liquid repellency can be improved. Of course, “rubbing resistance” and “liquid repellency” are inferior, but a conventional liquid repellent film can also be used. The liquid repellent film 24 of the laminated film 22 formed in this way is formed only on the central portion of the liquid ejection surface A by a manufacturing method described in detail later. That is, a central portion including a region where the nozzle opening 21 of the liquid ejection surface A of the nozzle plate 20 is opened is a liquid repellent region 25 provided with a liquid repellent film 24. Further, the liquid ejecting surface A of the nozzle plate 20 is formed with a non-liquid repellent region 26 where the liquid repellent film 24 is not provided along the outer periphery of the four sides of the liquid ejecting surface A. In this embodiment, only the base film 23 is provided as the non-liquid repellent region 26 without providing the liquid repellent film 24.

  A fixing plate 250, which is a holding member that holds the ink jet recording head 2, is joined to the non-liquid repellent area 26 of the liquid ejection surface A of the nozzle plate 20. Specifically, as shown in FIGS. 1 and 4, the fixing plate 250 is a flat plate, defines an exposed opening 251 that exposes the nozzle opening 21, an exposed opening 251, and the liquid of the head main body 220. And a joining portion 252 joined to both end portions of the nozzle row 21A on the ejection surface A.

  In the present embodiment, the joining portion 252 extends between the fixing frame portion 253 provided along the outer periphery of the liquid ejection surface A across the plurality of ink jet recording heads 2 and the adjacent ink jet recording head 2. And a fixing beam portion 254 that divides the exposed opening 251, and a joint portion 252 including the fixing frame portion 253 and the fixing beam portion 254 is formed on the liquid ejecting surface A of the plurality of ink jet recording heads 2. They are joined at the same time.

  In the present embodiment, the ink jet recording head 2 is bonded to the fixed plate 250 via an adhesive 401. That is, the adhesive 401 is provided between the non-liquid-repellent region 26 on the liquid ejection surface A and the fixing plate 250.

  In the present embodiment, the nozzle plate 20 and the flow path forming substrate 10 are bonded via the adhesive 400. For this reason, the adhesion region of the nozzle plate 20 with the flow path forming substrate 10 is also a non-liquid repellent region 27. In the present embodiment, the entire surface of the nozzle plate 20 opposite to the liquid ejection surface A is the non-liquid repellent region 27.

  In this way, the non-liquid-repellent regions 26 and 27 of the nozzle plate 20 that is the nozzle forming member, and the flow path forming substrate 10 and the fixing plate 250 are bonded through the adhesives 400 and 401, respectively. It can improve and can prevent destruction, such as peeling. In this embodiment, as will be described in detail later, the primer liquid is applied to the non-liquid-repellent areas 26 and 27 of the nozzle plate 20 and the bonding areas of the flow path forming substrate 10 and the fixing plate 250 bonded thereto. Adhesion was performed after the primer treatment. Thereby, the adhesive strength between the nozzle plate 20 and the flow path forming substrate 10 and the fixing plate 250 is improved, and the occurrence of breakage such as peeling is reliably prevented.

  On the other hand, as shown in FIG. 4, on the side opposite to the opening surface of the flow path forming substrate 10, on the elastic film, a lower electrode film made of metal and a piezoelectric body made of lead zirconate titanate (PZT) or the like. A piezoelectric element 300 is formed by sequentially laminating layers and an upper electrode film made of metal. On the flow path forming substrate 10 on which such a piezoelectric element 300 is formed, a reservoir forming substrate 30 having a reservoir portion 31 that constitutes at least a part of the reservoir 100 is joined. In this embodiment, the reservoir portion 31 is formed across the reservoir forming substrate 30 in the thickness direction and across the width direction of the pressure generating chamber 12, and as described above, the communication portion of the flow path forming substrate 10 is formed. The reservoir 100 is connected to the pressure generation chamber 12 and serves as a common ink chamber for the pressure generation chambers 12.

  A piezoelectric element holding portion 32 having a space that does not hinder the movement of the piezoelectric element 300 is provided in a region facing the piezoelectric element 300 of the reservoir forming substrate 30.

  Furthermore, a drive IC 110 for driving each piezoelectric element 300 is provided on the reservoir forming substrate 30. Each terminal of the drive IC 110 is connected to a lead wiring drawn from the individual electrode of each piezoelectric element 300 via a bonding wire or the like (not shown). Each terminal of the drive IC 110 is connected to the outside via an external wiring 111 such as a flexible printed circuit (FPC), and receives various signals such as a print signal from the outside via the external wiring 111. .

  A compliance substrate 40 is bonded on the reservoir forming substrate 30. An ink inlet 44 for supplying ink to the reservoir 100 is formed in a region facing the reservoir 100 of the compliance substrate 40 by penetrating in the thickness direction. In addition, the region of the compliance substrate 40 other than the ink introduction port 44 in the region facing the reservoir 100 is a flexible portion 43 formed thin in the thickness direction, and the reservoir 100 is sealed by the flexible portion 43. Has been. Compliance is given to the reservoir 100 by the flexible portion 43.

  A head case 230 is fixed on the surface of each head body 220 opposite to the liquid ejection surface A, that is, on the compliance substrate 40.

  The head case 230 is provided with an ink supply communication passage 231 that communicates with the ink introduction port 44 and also communicates with the ink communication passage of the cartridge case 210 and supplies ink from the cartridge case 210 to the ink introduction port 44. In the head case 230, a recess 232 is formed in a region facing the flexible portion 43 of the compliance substrate 40, so that the flexible portion 43 is appropriately deformed. The head case 230 is provided with a drive IC holding part 233 penetrating in the thickness direction in a region facing the drive IC 110 provided on the reservoir forming substrate 30, and the external wiring 111 is connected to the drive IC holding part. The drive IC 110 is connected through the H.233.

  The ink jet recording head 2 according to this embodiment takes in ink from the ink cartridge from the ink introduction port 44 via the ink communication path and the ink supply communication path 231, and the inside from the reservoir 100 to the nozzle opening 21. After filling with ink, according to a recording signal from the drive IC 110, a voltage is applied to each piezoelectric element 300 corresponding to the pressure generating chamber 12 to bend and deform the elastic film 50 and the piezoelectric element 300, whereby each pressure generating chamber. The pressure inside the nozzle 12 increases and ink droplets are ejected from the nozzle openings 21.

  The head main body 220 described above forms a large number of chips on one silicon wafer at the same time, and bonds and integrates the nozzle plate 20 and the compliance substrate 40. Thereafter, the single chip size as shown in FIG. The head main body 220 is obtained by dividing each flow path forming substrate 10.

  Four such ink jet recording heads 2 are fixed to the bottom surface of the cartridge case 210. In the present embodiment, the four ink jet recording heads 2 are arranged at a predetermined interval in the arrangement direction of the nozzle rows 21A. That is, one nozzle type recording head 2 of this embodiment is provided with eight nozzle rows 21A. In this way, the nozzle rows 21A including the nozzle openings 21 arranged side by side using a plurality of ink jet recording heads 2 are arranged in multiple rows, thereby forming a plurality of nozzle rows 21A in one ink jet recording head 2. Compared to the above, the yield can be prevented from decreasing. Further, by using a plurality of ink jet recording heads 2 in order to increase the number of nozzle rows 21A, the number of head main bodies 220 (ink jet recording heads 2) that can be formed from one silicon wafer is increased. It is possible to reduce the use cost of the silicon wafer and reduce the manufacturing cost.

  Further, as described above, the four ink jet recording heads 2 are holding members that are bonded to the non-liquid-repellent regions 26 of the liquid ejection surfaces A of the plurality of ink jet recording heads 2 via the adhesive 401. It is positioned and held by a fixed plate 250.

  Further, as shown in FIGS. 1 and 2, the ink jet recording head unit 1 has a box shape that covers the plurality of ink jet recording heads 2 on the opposite side of the fixing plate 250 from the ink jet recording head 2. A cover head 240 is provided. The cover head 240 has a fixing portion 242 provided with an opening 241 corresponding to the exposed opening 251 of the fixing plate 250, and a side surface side of the ink droplet ejection surface of the head main body 220, and extends around the outer periphery of the fixing plate 250. And a side wall portion 245 provided so as to be bent.

  In this embodiment, the fixing portion 242 is provided corresponding to the frame portion 243 provided corresponding to the fixing frame portion 253 of the fixing plate 250, and the opening portion 241 provided corresponding to the fixing beam portion 254 of the fixing plate 250. It is comprised with the beam part 244 which divides | segments. Further, the fixing part 242 including the frame part 243 and the beam part 244 is joined to the joining part 252 of the fixing plate 250.

  As shown in FIG. 2, the fixing portion 242 of the cover head 240 is provided with a support portion 246 provided with a fixing hole 247 for positioning and fixing the cover head 240 to the cartridge case 210. The support portion 246 is bent and provided so as to protrude from the side wall portion 245 in the same direction as the surface direction of the droplet discharge surface. In this embodiment, the cover head 240 is fixed to the cartridge case 210. That is, the cartridge case 210 is provided with a protrusion 215 that protrudes toward the liquid ejecting surface A and is inserted into the fixing hole 247 of the cover head 240. The protrusion 215 is provided in the fixing hole 247 of the cover head 240. The cover head 240 is fixed to the cartridge case 210 by inserting and heating and crimping the tip of the protrusion 215.

  As described above, since the liquid ejecting surface A of the ink jet recording head 2 and the cover head 240 are joined to each other through the fixing plate 250 without any gap, it is possible to prevent the recording medium from entering the gap and cover the head. 240 deformation and paper jam can be prevented. Further, since the side wall portion 245 of the cover head 240 covers the outer peripheral edge portions of the plurality of ink jet recording heads 2, it is possible to reliably prevent the ink from flowing into the side surfaces of the ink jet recording heads 2.

  In the above-described example, the cover head 240 is bonded to the surface of the fixing plate 250 opposite to the head body 220. However, the present invention is not limited to this. For example, the cover head 240 is bonded to the fixing plate 250. Instead, it may be provided at a predetermined interval or may be provided so as to abut.

  Here, a manufacturing method of the ink jet recording head unit 1 of the present embodiment, particularly a manufacturing method of the nozzle plate 20 which is a nozzle forming member will be described. 5 and 6 are cross-sectional views illustrating the method for manufacturing the nozzle plate according to the first embodiment of the present invention.

  First, as shown in FIG. 5A, a base film 23 made of a plasma polymerized film is formed on the liquid ejection surface A of the nozzle plate 20 which is a nozzle forming member provided with the nozzle openings 21. The base film 23 can be formed, for example, by polymerizing silicone with argon plasma gas.

  Next, as shown in FIG. 5B, a liquid repellent film 24 made of a metal alkoxide molecular film is formed over the entire surface of the nozzle plate 20. That is, the liquid repellent film 24 is formed over the base film 23 of the nozzle plate 20 and the region where the base film 23 is not formed. As a result, a laminated film 22 composed of the base film 23 and the liquid repellent film 24 is formed on the liquid ejection surface A of the nozzle plate 20. The method for forming the liquid repellent film 24 is not particularly limited. For example, a metal alkoxide solution is formed by mixing a silane coupling agent such as alkoxysilane with a solvent such as thinner, and the nozzle plate 20 is added to the metal alkoxide solution. Can be formed by dipping.

  Next, as shown in FIG. 5C, a protective film 500 (protective member) is bonded to the liquid ejection surface A of the nozzle plate 20. In the present embodiment, the tape-shaped protective film 500 provided with the adhesive 501 on one surface is attached to the region to be the liquid repellent region 25 on the liquid ejection surface A via the adhesive 501.

  Further, the protective film 500 is not bonded to the nozzle opening 21 and the peripheral area thereof. In the present embodiment, a recess 502 is provided in a region opposite to the nozzle opening 21 and the peripheral region of the protective film 500, and the recess 502 allows a space between the protective film 500 and the nozzle opening 21 and the peripheral portion thereof. It was made to be defined. In the present embodiment, the protective film 500 is provided with one recess 502 for each nozzle row 21 </ b> A of the nozzle plate 20. Therefore, the protective film 500 is provided with two concave portions 502.

  The protective film 500 is not particularly limited as long as it has resistance to plasma treatment and primer liquid described later and has good peelability. As such a tape-shaped protective film 500, for example, in terms of workability and releasability, an ultraviolet irradiation release film (for example, E-6142S made by Lintec) or a heat release film (for example, River α made by Lintec) ) And the like.

  Next, as shown in FIG. 5D, the excess liquid repellent film 24 on the liquid ejection surface A of the nozzle plate 20 is removed, and a liquid repellent area 25 and a non-liquid repellent area 26 are formed. Specifically, the surface opposite to the liquid ejection surface A of the nozzle plate 20 is placed on the table 510, and the liquid ejection surface A side of the nozzle plate 20 is subjected to plasma processing. As a result, only the liquid repellent film 24 in the region not covered by the protective film 500 on the liquid ejection surface A of the nozzle plate 20 is removed, and the non-liquid repellent region 26 is formed. That is, the non-liquid-repellent region 26 on the liquid ejection surface A of the nozzle plate 20 is composed of only the base film 23.

  By using the tape-shaped protective film 500 as described above, only the liquid repellent area 25 of the liquid ejection surface A of the nozzle plate 20 can be selectively covered, and the non-liquid repellent area 26 can be selectively formed easily. . In other words, it is conceivable to use a metal mask or the like as the protective member, but the protective member made of a metal mask may cover the four sides on the liquid ejection surface A side of the nozzle plate 20, and this is not possible in a later process. The liquid repellent region 26 cannot be easily formed.

  Further, by leaving the base film 23 of the nozzle plate 20 in the non-liquid-repellent region 26, the manufacturing process can be simplified as compared with selectively removing the base film 23 in the non-liquid-repellent region 26. Further, the manufacturing process can be simplified as compared with the case where the base film 23 is selectively formed in the liquid repellent region 25.

  Next, as shown in FIG. 6A, a non-liquid-repellent region 27 is formed on the surface of the nozzle plate 20 opposite to the liquid ejection surface A. Specifically, the surface of the nozzle plate 20 on the protective film 500 side is placed on the table 510, and the surface opposite to the liquid ejection surface A is plasma-treated to remove the liquid repellent film 24. Thereby, the non-liquid-repellent region 27 was formed on the surface of the nozzle plate 20 opposite to the liquid ejection surface A.

  Next, as shown in FIG. 6B, the primer liquid 520 is applied to the non-liquid repellent areas 26 and 27 of the nozzle plate 20 (primer processing step). Specifically, the primer liquid 520 is applied to the non-liquid-repellent region 26 on the liquid ejection surface A side of the nozzle plate 20 and the non-liquid-repellent region 27 on the surface opposite to the liquid ejection surface A. The method of applying the primer liquid 520 to the non-liquid-repellent areas 26 and 27 is not particularly limited. For example, the primer liquid 520 may be sprayed or discharged to the non-liquid-repellent areas 26 and 27. The primer plate 520 may be applied by immersing the nozzle plate 20 in a tank filled with 520. The primer solution 520 is not particularly limited as long as it can improve the adhesion between the nozzle plate 20 and the adhesives 400 and 401. For example, SH6020 [main component: manufactured by Toray Downcorning Co., Ltd.] γ- (2-aminoethyl) aminopropyltrimethoxylane] and the like can be used.

  That is, in this embodiment, the protective film 500 that protects the laminated film 22 when removing the liquid-repellent film 24 of the laminated film 22 is used when the primer liquid 520 is applied only to the non-liquid-repellent regions 26 and 27. 22 is protected. Therefore, it is not necessary to protect the laminated film 22 (liquid repellent region 25) again with a protective member or the like when performing the primer treatment, and the manufacturing process can be simplified and the cost can be reduced. Of course, apart from the protective film 500 (protective member) that removes the liquid-repellent film 24 in the non-liquid-repellent region 26 of the laminated film 22, a protective member that protects the laminated film 22 during the primer treatment is formed. Also good.

  Next, as shown in FIG. 6C, the protective film 500 is peeled off from the nozzle plate 20. Here, since the protective film 500 is provided so as not to directly adhere to the nozzle opening 21 and the peripheral portion of the nozzle plate 20, the adhesive 501 when the protective film 500 is peeled off adheres to the nozzle opening 21. Generation of a residue due to the adhesive 501 can be prevented. That is, when the protective film 500 is adhered to the nozzle opening 21 and the peripheral portion thereof, the adhesive 501 that adhered the protective film 500 is removed when the protective film 500 is peeled from the liquid repellent region 25. Ink ejection characteristics (liquid ejection characteristics) when ink is ejected from the nozzle openings 21 due to the residue of the adhesive 501 are deteriorated. In the present invention, since the protective film 500 is not adhered to the nozzle opening 21 and its peripheral portion, the adhesive 501 when the protective film 500 is peeled adheres to the nozzle opening 21 and a residue due to the adhesive 501 is generated. As a result, it is possible to reliably prevent the deterioration of the ink discharge characteristics (liquid ejection characteristics) due to the residue.

  After forming the nozzle plate 20 as the nozzle forming member in this way, as described above, the non-liquid-repellent region 27 of the nozzle plate 20 is bonded to the flow path forming substrate 10 via the adhesive 400 and the head main body 220. After that, the head case 230 is adhered to the surface of the head body 220 opposite to the nozzle plate 20 to form the ink jet recording head 2. Then, the fixing plate 250 is bonded to the non-liquid-repellent region 26 provided on the liquid ejecting surface A of the nozzle plate 20 of the ink jet recording head 2 through the adhesive 401 so that the ink jet recording as shown in FIG. Head unit 1 is obtained.

  In the present embodiment, the adhesion region of the flow path forming substrate 10 and the fixing plate 250 to be bonded to the nozzle plate 20 is also subjected to the primer treatment with the same primer liquid 520 as described above, and then the nozzle plate 20 is attached thereto. Glued. In this way, by performing the primer treatment not only on the non-liquid-repellent regions 26 and 27 of the nozzle plate 20 but also on the bonding region of the flow path forming substrate 10 and the fixing plate 250, the adhesive 400 and 401 and each member It is possible to prevent variation in the adhesive strength at the interface and to surely prevent peeling of a region having a lower adhesive strength than others.

  In the present embodiment, the protective film 500 is not adhered to the nozzle openings 21 and the peripheral portions of the nozzle plate 20, but the present invention is not particularly limited thereto. For example, as shown in FIG. 7, the protective film 500A is provided with one relatively large recess 502A that covers the two nozzle rows 21A, and the protective film 500A is only at the boundary between the liquid repellent area 25 and the non-liquid repellent area 26. You may make it adhere | attach. With such a configuration, it is possible to prevent generation of a residue in which the adhesive 501 remains when the protective film 500 </ b> A is peeled off not only in the nozzle openings 21 of the nozzle plate 20 but also in other liquid repellent regions 25. Can do. Incidentally, when a residue of the adhesive 501 is generated in the other liquid repellent area 25 of the nozzle plate 20, the liquid ejection surface is used to clean the nozzle openings 21 of the ink jet recording head unit 1 and to fill the ink inside the head. When A is covered with a cap member, the cap member comes into contact with the residue of the adhesive 501, and ink remains, and the viscosity of the remaining ink increases. Further, the cap member may pinch the residue, and the cap space cannot be sealed, resulting in a suction failure. When wiping with a blade or the like to clean the liquid ejecting surface A, the thickened ink on the liquid ejecting surface A adheres to the nozzle openings 21 and the ink ejection characteristics (liquid ejecting characteristics) deteriorate. On the other hand, as shown in FIG. 7, the protective film 500A is peeled off by narrowing the adhesive area of the protective film 500A and setting the adhesive area as a boundary between the liquid-repellent area 25 and the non-liquid-repellent area 26. In this case, it is possible to prevent generation of a residue in which the adhesive 501 remains, and it is possible to reliably prevent deterioration of ink discharge characteristics (liquid ejection characteristics).

  Further, the protective member is not limited to the configuration of the above-described protective film 500, 500A or the like as long as the protective member is not directly bonded to the nozzle opening 21 and the peripheral portion thereof. For example, as shown in FIG. 8, when the protective film 500 </ b> B is bonded to the liquid ejecting surface A of the nozzle plate 20, a spacer member 503 is placed on the nozzle opening 21 and its peripheral portion, and the spacer member 503 is interposed therebetween. The protective film 500B may be bonded to the liquid ejection surface A via the adhesive 501. That is, since the adhesive 501 that adheres the protective film 500B adheres onto the spacer member 503, the adhesive 501 is not directly adhered to the nozzle opening 21 of the nozzle plate 20 and its peripheral portion. Even if it is such a structure, there can exist an effect similar to the protective films 500 and 500A mentioned above.

(Other embodiments)
As mentioned above, although Embodiment 1 of this invention was demonstrated, the basic composition of this invention is not limited to what was mentioned above. For example, in the first embodiment described above, the base film 23 made of a plasma polymerization film and the liquid repellent film 24 made of a metal alkoxide molecular film provided on the base film 23 are used as the laminated film 22. For example, a metal film containing a fluorine-based polymer directly formed on the nozzle plate 20 may be used as the liquid repellent film. The liquid repellent film made of such a metal film can be formed with a predetermined thickness and high accuracy by eutectoid plating, for example. The liquid repellent film made of a metal film forms a liquid repellent film over the entire surface of the nozzle plate 20, protects an area where the liquid repellent film is to be left with a protective member such as a protective film, and then the excess liquid repellent film. The liquid repellent region and the non-liquid repellent region may be formed by removing such regions by dry etching or wet etching.

  In the above-described first embodiment, the nozzle plate 20, the flow path forming substrate 10, and the fixing plate 250 are joined through the adhesives 400 and 401. However, the present invention is not particularly limited thereto. The plate 20, the flow path forming substrate 10 and the fixing plate 250 may be joined by a joining method without using an adhesive. Examples of a method of joining the nozzle plate 20, the flow path forming substrate 10, and the fixing plate 250 by a joining method without using an adhesive include anodic bonding and heat bonding.

  Furthermore, in the first embodiment described above, the configuration including the nozzle plate 20 provided with the nozzle openings 21 is illustrated as the ink jet recording head 2, but is not particularly limited thereto, for example, as an ink jet recording head, A configuration in which nozzle openings are formed in the flow path forming substrate, that is, a nozzle forming member in which the flow path forming substrate and the nozzle plate are integrally formed may be used.

  Further, in the first embodiment described above, the plurality of ink jet recording heads 2 are bonded to the fixing plate 250 via the adhesive 401. However, the plurality of ink jet recording heads 2 are not provided with the fixing plate 250. The cover head 240 may be adhered. That is, the cover head 240 may be a holding member that holds the liquid ejection surface A of the ink jet recording head 2. Of course, one ink jet recording head 2 may be bonded to a holding member such as the fixed plate 250 and the cover head 240.

  In the first embodiment described above, the holding members such as the fixing plate 250 and the cover head 240 are bonded to the non-liquid-repellent region 26 of the nozzle plate 20. It may be formed so as to cover the liquid repellent region 25. This is to prevent the non-liquid-repellent region 26 of the nozzle plate 20 from being exposed from the exposed opening formed in the holding member due to, for example, an adhesive displacement between the holding member and the nozzle plate 20.

  In the first embodiment described above, the ink jet recording head 2 having the flexural vibration type piezoelectric element 300 is exemplified. However, the present invention is not limited to this. For example, the piezoelectric material and the electrode forming material are alternately laminated to form the shaft. Application to head units having ink jet recording heads of various structures, such as longitudinal vibration type ink jet recording heads that expand and contract in the direction and ink jet recording heads that eject ink droplets by bubbles generated by heat generation from heating elements, etc. Needless to say, you can.

  Although an ink jet recording head that discharges ink has been described as an example of the liquid ejecting head, the present invention is widely intended for a method of manufacturing a liquid ejecting head. Examples of the liquid ejecting head include a recording head used for an image recording apparatus such as a printer, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an organic EL display, and an electrode formation such as an FED (field emission display). Electrode material ejecting heads used in manufacturing, bioorganic matter ejecting heads used in biochip production, and the like.

  Further, the nozzle forming member used in the liquid ejecting head has been described as an example. However, the present invention is directed to a method for manufacturing a nozzle forming member provided with nozzle openings for widely ejecting liquid.

FIG. 3 is an exploded perspective view of the head unit according to the first embodiment. FIG. 3 is an assembled perspective view of the head unit according to the first embodiment. FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. 5 is a cross-sectional view illustrating a method for manufacturing a nozzle plate according to Embodiment 1. FIG. 5 is a cross-sectional view illustrating a method for manufacturing a nozzle plate according to Embodiment 1. FIG. FIG. 6 is a cross-sectional view illustrating another example of the nozzle plate manufacturing method according to the first embodiment. FIG. 6 is a cross-sectional view illustrating another example of the nozzle plate manufacturing method according to the first embodiment.

Explanation of symbols

  A liquid ejecting surface, 1 ink jet recording head unit (liquid ejecting head unit), 2 ink jet recording head (liquid ejecting head), 10 flow path forming substrate, 12 pressure generating chamber, 20 nozzle plate (nozzle forming member), 21 Nozzle opening, 22 laminated film, 23 base film, 24 liquid repellent film, 100 reservoir, 210 cartridge case, 220 head body, 230 head case, 240 cover head, 250 fixing plate (holding member), 300 piezoelectric element, 400, 401 Adhesive, 500, 500A, 500B Protective film, 501 Adhesive, 502, 502A Recess, 503 Spacer member, 510 Table, 520 Primer liquid

Claims (11)

A method for manufacturing a nozzle forming member having a liquid ejection surface in which a nozzle opening for ejecting liquid is opened,
Forming a liquid repellent film on the liquid ejection surface;
A region opposite to the nozzle opening and the peripheral portion thereof so as not to adhere to the nozzle opening and the peripheral portion thereof in a liquid repellent region where the liquid repellent film is left on the liquid ejection surface on which the liquid repellent film is formed. A step of defining a space between the protective member and the nozzle opening and its peripheral edge by adhering a tape-shaped protective member having a recess to
Removing the liquid repellent film in a region other than the protective member on the liquid ejecting surface to form a non-liquid repellent region; and forming the liquid repellent region by peeling the protective member. A method for manufacturing a nozzle forming member. In the step of bonding the protective member to the liquid ejection surface, manufacture of the nozzle forming member according to claim 1, wherein the bonding the protective member on the boundary side of the non-liquid-repellent area of the liquid repellent area Method. A method for manufacturing a nozzle forming member having a liquid ejection surface in which a nozzle opening for ejecting liquid is opened,
Forming a liquid repellent film on the liquid ejection surface;
The liquid ejecting surface of repellent liquid film is formed, the liquid repellent area leaving the liquid-repellent film, so as not to be adhered to the nozzle opening and its periphery, the between the nozzle opening and its periphery Adhering a protective member via a spacer member that does not adhere to the nozzle opening and its peripheral edge; and
Removing the liquid repellent film in a region other than the protective member on the liquid ejecting surface to form a non-liquid repellent region; and forming the liquid repellent region by peeling the protective member. A method for manufacturing a nozzle forming member. In the step of forming the liquid repellent film, and the liquid ejecting surface to the base film, any claim 1-3, characterized in that to form the liquid-repellent film of molecular film made of a metal alkoxide on the lower ground layer A method for producing the nozzle forming member according to claim 1. 5. The method of manufacturing a nozzle forming member according to claim 4 , wherein, in the step of forming the non-liquid-repellent region, only the molecular film provided on the base film on the liquid ejection surface is removed. A method of manufacturing a liquid ejecting head comprising: a nozzle forming member having a nozzle opening for ejecting liquid; a pressure generating chamber communicating with the nozzle opening; and a pressure generating means for causing a pressure change in the pressure generating chamber. There,
A method for manufacturing a liquid jet head, wherein the nozzle forming member is formed by the method for manufacturing a nozzle forming member according to any one of claims 1 to 5 . The method further comprises the step of bonding a flow path forming substrate having the pressure generating chamber to the side opposite to the liquid ejection surface of the nozzle forming member, and the step of forming the liquid repellent film is formed on the nozzle forming member. while, in the step of forming the non-repellent area is, the claims and the non-repellent area a predetermined area and the liquid ejection surface of the liquid ejecting surface and forming on the opposite surface 6 A method of manufacturing the liquid jet head according to claim. In the step of forming the liquid repellent film, a step of forming a base film only on the liquid ejecting surface, and a molecule made of a metal alkoxide on the liquid ejecting surface of the nozzle forming member and a surface opposite to the liquid ejecting surface. Forming the liquid repellent film of the film, and in the step of forming the non-liquid repellent area, the molecular film provided on the base film in a predetermined area of the liquid ejection surface of the nozzle forming member The method of manufacturing a liquid ejecting head according to claim 7 , wherein the molecular film provided on a surface opposite to the liquid ejecting surface of the nozzle forming member is removed. After the step of forming the non-liquid repellent region, a primer treatment step of applying a primer liquid to the non-liquid repellent region is provided, and in the step of bonding the flow path forming substrate and the nozzle forming member, an adhesive is used. claim 7 or 8 method of manufacturing a liquid jet head according to, characterized in that the adhesive through. A liquid ejecting head unit comprising: a liquid ejecting head including a nozzle forming member in which a nozzle opening for ejecting liquid is formed; and a holding member bonded to a non-liquid-repellent region of the nozzle forming member of the liquid ejecting head. A manufacturing method comprising:
The holding member is bonded to the non-liquid-repellent region of the liquid ejecting surface of the liquid ejecting head formed by the method of manufacturing a liquid ejecting head according to claim 6. Manufacturing method of liquid jet head unit. The method of manufacturing a liquid jet head unit according to claim 10 , further comprising a primer processing step of applying a primer liquid to the non-liquid-repellent region after the step of forming the non-liquid-repellent region.

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