JP4946232B2 - Drawing apparatus and liquid material drawing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of reducing the clogging of a nozzle and the flight bending of a liquid body and confirming the discharge precision of the liquid body, a method of drawing the liquid body and a method of manufacturing a wiring board. <P>SOLUTION: The drawing apparatus 100 is provided with a main carriage 101 on which a discharge head for discharging the liquid body as droplets from a plurality of nozzles is mounted, an X-axis linear guide 102 capable of moving the main carriage 101 in the x-axial direction, a tape carrying mechanism 110 for arranging a base material 1 to face the discharge head and for carrying the base material 1 in the direction intersecting the X-axis linear guide 102 at a right angle and a control part 130 for controlling each part. The tape like base material 1 is provided with a plurality of drawing areas and at least one area in the plurality of the drawing areas of the base material 1 faces the discharge head by the control part 130 to carry out a preliminary discharge for discharging the liquid body from the discharge head to the drawing area. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention relates to a drawing apparatus for discharging and drawing a liquid containing a functional material, a method for drawing a liquid, and a method for manufacturing a wiring board.

  As a liquid material drawing method for discharging and drawing a liquid material containing a functional material, a partition wall is formed by applying a droplet using a droplet discharge method to at least a part of a boundary between a pattern formation region and another region. Is provided. A pattern forming method is known in which a wiring layer is formed by discharging a dispersion (liquid material) containing conductive fine particles to a pattern forming region partitioned by partition walls (Patent Document 1).

  Further, as a drawing apparatus, a liquid droplet ejection apparatus that ejects liquid droplets onto a tape-shaped substrate in the pattern forming method is disclosed. The liquid droplet ejection apparatus includes an inkjet head group (ejection head), a mounting table on which a tape-shaped substrate is mounted, and a moving mechanism that relatively moves the inkjet head group and the mounting table facing each other. . Further, two flushing areas are arranged on both sides of the mounting table with the tape-shaped substrate interposed therebetween. The inkjet head group can face one of the two flushing areas by the moving mechanism, and the dispersion liquid (liquid material) is discarded from the inkjet head group.

JP 2005-268893 A

  In the liquid droplet ejection apparatus, the ejection head includes a plurality of nozzles that eject a liquid material. When the liquid material in the plurality of nozzles is dried, clogging occurs and so-called discharge omission is likely to occur. The reason why the liquid material is thrown away toward the flushing area is to form a wiring layer by stably discharging the liquid material containing conductive fine particles.

  However, in reality, not only the discharge failure but also the liquid material or foreign matter adhering to the nozzle surface causes the flight curvature of the discharged liquid material, which shifts the landing position on the discharge target (tape-shaped substrate). There are challenges. Simply throwing away in the flushing area will not allow you to check the accuracy of the landing, nozzle clogging, flight bending, etc.

Further, in the above-described droplet discharge device, in order to throw away in the flushing area, it is necessary to move the inkjet head group in a direction perpendicular to the transport direction of the tape-shaped substrate.
Therefore, the inkjet head group moves in a complicated manner with respect to the mounting table so as to reciprocate between the ejection drawing position and the flushing (discarding) position.

  Furthermore, an apparatus configuration for recovering the liquid material discharged to the flushing area is required, which causes a problem that the apparatus becomes complicated.

  The present invention has been made in consideration of the above-described problems, and is a drawing apparatus, a liquid material drawing method, and a wiring that can reduce nozzle clogging and liquid flight bending and can confirm the discharge accuracy of the liquid material. An object is to provide a method for manufacturing a substrate.

  The drawing apparatus of the present invention is a drawing apparatus that discharges and draws a liquid material containing a functional material on a tape-shaped substrate having a plurality of drawing regions, and discharges the liquid material as droplets from a plurality of nozzles. And a tape transport mechanism that disposes the substrate facing the discharge head and transports the substrate in at least one direction, and drives and controls the tape transport mechanism so that at least one of the plurality of drawing regions faces the discharge head. And a control unit that drives and controls the ejection head so as to perform preliminary ejection toward the drawing region.

  According to this configuration, the control unit drives and controls the tape transport mechanism so that at least one of the plurality of drawing areas faces the ejection head, and controls the ejection head to drive the liquid material from the ejection head to the drawing area. Pre-discharge toward Therefore, nozzle clogging and flight bending can be reduced by preliminary discharge, and the apparatus configuration can be simplified as compared with the case where a droplet receiving portion for receiving the liquid material preliminarily discharged at the time of discharge drawing is provided. Then, the preliminarily discharged liquid material can be discharged together with the base material. Furthermore, by observing the liquid material discharged to the drawing area, not only clogging of the nozzle can be confirmed, but also discharge accuracy such as variations in landing positions due to flight bending can be confirmed. That is, it is possible to provide a drawing apparatus that can reduce nozzle clogging and flight bending of the liquid material and can check the discharge accuracy of the liquid material.

  At least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least at the start end in the transport direction of the tape-shaped substrate, and the control unit is configured so that the dummy discharge area faces the discharge head. It is preferable to drive and control the tape transport mechanism to perform preliminary discharge toward the dummy discharge area.

  According to this configuration, the control unit causes the preliminary ejection toward the dummy ejection area. Therefore, it is possible to avoid wasteful use of a productable drawing area due to preliminary ejection. In addition, a dummy discharge area is provided at least at the start end of the tape-shaped substrate, and it is possible to perform preliminary discharge before discharging and drawing a liquid material in the drawing area. Can start. It should be noted that an alternative tape or the like different from the original base material can be used for the base material portion having the dummy discharge area.

  Further, at least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least halfway in the transport direction of the tape-shaped substrate, and the control unit has the dummy discharge area facing the discharge head. Thus, the tape transport mechanism may be driven and controlled to perform preliminary ejection toward the dummy ejection area. According to this, even if it is a elongate base material, preliminary discharge can be performed corresponding to the dummy discharge area | region provided in the middle. In addition, when a drawing pattern to be ejected and drawn in a drawing region is changed in the middle of a tape-like base material, the nozzle used before the change and the nozzle used after the change may not necessarily match. In such a case, the nozzles that do not match may cause problems such as clogging. Preliminary discharge is performed in the dummy discharge area provided in the middle of the base material in response to the change of the drawing pattern, and stable. The changed drawing pattern can be discharged and drawn in the discharged state.

  In addition, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at least at the start end and in the middle in the transport direction of the tape-shaped substrate, and the control unit discharges the dummy discharge area. The tape transport mechanism may be driven and controlled so as to face the head, and preliminary ejection may be performed toward the dummy ejection area. According to this, a control part makes preliminary discharge perform to the dummy discharge area | region provided in at least the start end and the middle of the tape-shaped base material. Therefore, preliminary discharge can be performed before and during the start of discharge drawing on the base material, and discharge drawing can be performed in a more stable discharge state.

  In addition, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at at least a start end and an end end in the transport direction of the tape-shaped base material, and the control unit includes the dummy discharge areas. Drive control of the tape transport mechanism so as to face the discharge head, perform preliminary discharge toward the dummy discharge area provided at the start end, and do not perform preliminary discharge in the dummy discharge area provided at the end end Also good. When the tape-like substrate drawn and drawn is wound, the dummy discharge region provided at the end end becomes the start end side when the next substrate is delivered. According to this, since the control unit does not perform preliminary discharge in the dummy discharge area provided at the end of the base material, it is possible to avoid preliminary discharge overlapping the dummy discharge area previously preliminary discharged. Therefore, it is possible to provide a drawing apparatus that is effective for checking the discharge state and the discharge accuracy when the liquid material is repeatedly discharged and drawn on the same base material.

  In the drawing apparatuses of these inventions, the control unit discharges droplets from all the nozzles of the discharge head a predetermined number of times in the preliminary discharge. According to this, clogging of all the nozzles and flight bending can be reduced, and the discharge accuracy can be confirmed.

  In the preliminary discharge, the control unit may discharge droplets from a plurality of nozzles of the discharge head based on actual drawing data. In actual discharge drawing, a plurality of nozzles are selectively used. Crosstalk may occur between adjacent nozzles, which may affect ejection accuracy. According to this, the control unit performs preliminary ejection based on the actual drawing data. Therefore, it is possible to confirm not only the flight bend but also the ejection failure caused by the crosstalk.

  In addition, an imaging mechanism capable of imaging at least one of the plurality of drawing regions is provided on the downstream side in the transport direction of the base material, and the control unit is based on the ejection information of the preliminary ejection and the landed image information of the imaged liquid. It is preferable to determine whether or not the discharge state is normal. According to this, since the imaging mechanism is provided on the downstream side in the conveyance direction of the base material, the discharge state of the liquid material preliminarily discharged in parallel with the discharge drawing on the base material without stopping the drawing apparatus is displayed. As a result, it is possible to perform discharge drawing more efficiently.

  The liquid material drawing method of the present invention is a liquid material drawing method in which a liquid material containing a functional material is discharged and drawn onto a tape-shaped substrate having a plurality of drawing regions, and at least one of the plurality of drawing regions. A discharge process in which a liquid material is discharged and drawn as a droplet from a plurality of nozzles of the discharge head, and a liquid material is dropped from the discharge head into at least one of a plurality of drawing regions before the discharge process. And a preliminary discharge step of discharging as a feature.

  According to this method, in the preliminary ejection step, the liquid material is ejected as droplets from the ejection head to at least one of the plurality of drawing regions. By performing the preliminary discharge step before the discharge step, it is possible to provide a liquid material drawing method capable of discharging and drawing the liquid material in a stable discharge state by eliminating nozzle clogging and the like. Further, in the preliminary ejection process, the liquid material is ejected as droplets to at least one of the plurality of drawing regions, so that the substrate and the ejection head are opposed to each other as compared with the case where the liquid material is received by the dedicated droplet receiving portion. Preliminary discharge can be performed in the state of being made. Therefore, it is possible to efficiently perform the preliminary discharge step by omitting the operation of moving the discharge head to the dedicated droplet receiving portion.

  At least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least at a start end in the transport direction of the tape-shaped substrate. In the preliminary discharge step, the dummy discharge area and the discharge head are It is preferable that the liquid material is discharged as droplets from the discharge head toward the dummy discharge region.

  According to this method, the liquid material is discharged toward the dummy discharge region in the preliminary discharge step. Therefore, it is possible to avoid wasteful use of a productable drawing area due to preliminary ejection. Further, since the dummy discharge region is provided at least at the start end of the tape-shaped base material and the preliminary discharge step is performed before the discharge step, discharge drawing can be started in a stable discharge state in the discharge step. .

  Further, at least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least in the transport direction of the tape-shaped base material. In the preliminary discharge step, the dummy discharge area, the discharge head, The liquid material may be discharged as droplets from the discharge head toward the dummy discharge region. According to this, even if it is a long base material, a preliminary | backup discharge process can be performed corresponding to the dummy discharge area | region provided in the middle, and the stable discharge state can be maintained. In addition, when changing the drawing pattern to be drawn and drawn in the drawing area in the middle of the tape-shaped base material, the preliminary discharge is performed in the dummy discharge area provided in the middle of the base material in response to the change in the drawing pattern. The changed drawing pattern can be discharged and drawn in the discharged state.

  In addition, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at least at the start end and in the middle in the transport direction of the tape-shaped base material. And the discharge head may be opposed to each other, and the liquid material may be discharged as droplets from the discharge head toward the dummy discharge region. According to this, the frequency of performing the preliminary discharge process on the tape-shaped substrate can be increased, and the discharge process can be performed in a more stable discharge state.

  Further, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at at least a start end and an end end in the transport direction of the tape-shaped substrate. The liquid material may be ejected as droplets from the ejection head toward the dummy ejection area provided at, and no ejection may be performed in the dummy ejection area provided at the end. When the tape-like substrate drawn and drawn is wound, the dummy discharge region provided at the end end becomes the start end side when the next substrate is delivered. According to this, in the preliminary ejection step, preliminary ejection is not performed on the dummy ejection area provided at the end of the base material, so that preliminary ejection can be avoided over the previously ejected dummy ejection area. . Therefore, it is possible to provide a method of drawing a liquid material that is effective for checking the discharge state and discharge accuracy when the liquid material is repeatedly discharged and drawn on the same base material.

  In the liquid material drawing methods of these inventions, the liquid material is ejected from all nozzles of the ejection head in the preliminary ejection step. According to this, it is possible to reduce clogging and flight bending of all nozzles and to check discharge accuracy.

  Further, in the preliminary ejection step, droplets may be ejected from a plurality of nozzles of the ejection head based on actual drawing data. In actual discharge drawing in the discharge process, a plurality of nozzles are selectively used. Crosstalk may occur between adjacent nozzles, which may affect ejection accuracy. According to this, in the preliminary ejection step, the liquid material is ejected based on the actual drawing data. Therefore, it is possible to confirm not only the flight bend but also the ejection failure caused by the crosstalk.

  A method for manufacturing a wiring board according to the present invention is a method for manufacturing a wiring board comprising a tape-like base material having a plurality of drawing regions and a coating made of a functional material, wherein at least one of the plurality of drawing regions is provided. A discharge process in which a liquid material containing a functional material is discharged and drawn as a droplet from a plurality of nozzles of the discharge head so as to face the discharge head, and the liquid material from the discharge head to at least one of a plurality of drawing regions before the discharge process And a solidification step of solidifying the liquid material drawn and drawn in the discharge step to form a film.

  According to this method, in the preliminary discharge step, the liquid material is discharged as droplets from the discharge head to at least one of the plurality of drawing regions before the discharge step. Thereby, the clogging of the nozzle and the like can be eliminated, and the discharge process can be performed in a stable discharge state. In the solidification step, the liquid material that has been discharged and drawn in the discharge step is solidified to form a film, so that a film with less defects due to the discharge state can be formed. That is, a wiring board can be manufactured with a high yield. Further, in the preliminary ejection process, the liquid material is ejected as droplets to at least one of the plurality of drawing regions, so that the substrate and the ejection head are opposed to each other as compared with the case where the liquid material is received by the dedicated droplet receiving portion. Preliminary discharge can be performed in the state of being made. Therefore, it is possible to efficiently perform the preliminary discharge step by omitting the operation of moving the discharge head to the dedicated droplet receiving portion. That is, it is possible to efficiently manufacture a wiring board having a stable quality with less defects of the coating film due to the discharge state.

  In addition, at least one of the plurality of drawing regions is a dummy discharge region, and the dummy discharge region is provided at least at a start end in the transport direction of the tape-shaped substrate. In the preliminary discharge step, the dummy discharge region and the discharge head It is preferable that the liquid material is ejected as droplets from the ejection head toward the dummy ejection area.

  According to this method, in the preliminary ejection step, the liquid material is ejected as droplets from the ejection head toward the dummy ejection area. Therefore, it is possible to avoid wasteful use of a productable drawing area due to preliminary ejection. In addition, since the dummy discharge area is provided at least at the start end of the tape-shaped substrate and the preliminary discharge process is performed before the discharge process, it is possible to start discharge drawing in a stable discharge state in the discharge process. A method for manufacturing a wiring board can be provided.

  Further, at least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least in the transport direction of the tape-shaped base material. In the preliminary discharge step, the dummy discharge area, the discharge head, The liquid material may be discharged as droplets from the discharge head toward the dummy discharge region. According to this, even if it is a long base material, a preliminary | backup discharge process can be performed corresponding to the dummy discharge area | region provided in the middle, and the stable discharge state can be maintained. In addition, when changing the drawing pattern to be drawn and drawn in the drawing area in the middle of the tape-shaped base material, the preliminary discharge is performed in the dummy discharge area provided in the middle of the base material in response to the change in the drawing pattern. It is possible to provide a method of manufacturing a wiring board capable of discharging and drawing the changed drawing pattern in the discharged state.

  In addition, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at least at the start end and in the middle in the transport direction of the tape-shaped base material. And the discharge head may be opposed to each other, and the liquid material may be discharged as droplets from the discharge head toward the dummy discharge region. According to this, the frequency of performing the preliminary discharge process on the tape-shaped substrate can be increased, and the discharge process can be performed in a more stable discharge state. That is, it is possible to manufacture a wiring board having a stable quality with fewer defects of the coating film due to the discharge state.

  Further, at least two of the plurality of drawing areas are dummy discharge areas, and the dummy discharge areas are provided at at least a start end and an end end in the transport direction of the tape-shaped substrate. The liquid material may be ejected as droplets from the ejection head toward the dummy ejection area provided at, and no ejection may be performed in the dummy ejection area provided at the end. When the tape-like substrate drawn and drawn is wound, the dummy discharge region provided at the end end becomes the start end side when the next substrate is delivered. According to this, in the preliminary ejection step, preliminary ejection is not performed on the dummy ejection area provided at the end of the base material, so that preliminary ejection can be avoided over the previously ejected dummy ejection area. . Therefore, it is possible to provide a method for manufacturing a wiring board that is effective for checking the discharge state and the discharge accuracy when the liquid material is repeatedly discharged and drawn on the same base material.

  In the preliminary ejection step, it is preferable that the liquid material is ejected from all nozzles of the ejection head. According to this, it is possible to reduce clogging and flight bending of all nozzles and to check discharge accuracy.

  Further, in the preliminary ejection step, droplets may be ejected from a plurality of nozzles of the ejection head based on actual drawing data. In actual discharge drawing in the discharge process, a plurality of nozzles are selectively used. Crosstalk may occur between adjacent nozzles, which may affect ejection accuracy. According to this, in the preliminary ejection step, the liquid material is ejected based on the actual drawing data. Therefore, it is possible to provide a method for manufacturing a wiring board capable of confirming not only flight bending but also ejection failure due to crosstalk.

  In the discharging step, a wiring pattern is drawn using a first liquid material containing a conductive material. According to this, it is possible to manufacture a wiring board having a wiring pattern with few defects due to the discharge state.

  Further, in the discharge step, a wiring pattern is drawn using the first liquid material containing the conductive material, and after the solidification step, the wiring pattern solidified using the second liquid material containing the insulating material. An insulating pattern is drawn on the substrate. According to this, it is possible to manufacture a wiring board having a wiring layer in which a wiring pattern and an insulating pattern with few defects due to the discharge state are laminated.

  In the present embodiment, a drawing apparatus, a liquid drawing method, and a wiring board manufacturing method for manufacturing a wiring board by applying a liquid material containing a functional material to the surface of a tape-like base material will be described.

<Wiring board>
First, the wiring board will be described with reference to FIGS. FIG. 1 is a schematic perspective view showing a wiring board, and FIGS. 2A and 2B are schematic plan views showing other wiring boards.

  As shown in FIG. 1, the wiring board 10 is comprised by the flexible tape-shaped base material 1 which consists of a polyimide resin etc. which have insulation, for example. On one surface thereof, a plurality of drawing areas A starting from a drawing area A1 provided in the transport direction (Y-axis direction) and parallel to the plurality of drawing areas A are arranged at both ends in the width direction (X-axis direction). A plurality of pilot holes 2 are provided as guide holes provided. A plurality of (two) dummy ejection regions B (B1, B2) having the same size and the same shape as the drawing region A are provided at the tip of the drawing region A1 located at the start end.

  In each drawing area A, two alignment holes 3 and 4 are punched at corners in the transport direction as alignment marks. One alignment hole 4 is provided in each of the two dummy ejection regions B1 and B2. By recognizing the number of alignment marks in this way, the drawing area A and the dummy discharge area B can be identified. The alignment mark is not limited to the alignment holes 3 and 4 and may be, for example, an emboss having a certain shape formed at a predetermined position or a thin film capable of recognizing an image.

  In each drawing area A, although not shown, a wiring pattern made of a conductive material and an insulating pattern made of an insulating material covering at least a part of the wiring pattern are formed. These wiring patterns and insulating patterns are formed by a droplet discharge method (inkjet method) in which a liquid containing a functional material is applied as droplets from the discharge head.

  A wiring board 10 in which wiring patterns and insulating patterns are formed in a plurality of drawing areas A is used as one flexible circuit board in which the area including the drawing area A is divided by press working or laser cutting. As a utilization form, for example, there is a mounting board on which a relay board, an electronic component, or the like that connects electrical circuits is mounted.

  The wiring board having such a plurality of drawing areas A and dummy ejection areas B is not limited to the wiring board 10. For example, as shown in FIG. 2 (a), another wiring board 20 is similarly formed of a tape-like base material 21, and a plurality of pilot holes 22 are provided on both ends in the width direction (X-axis direction). Yes. In addition, it has drawing regions C1 and C2 having irregular shapes (in this case, L-shaped) arranged symmetrically with respect to a point 27 located at the center in the width direction. Two alignment holes 23 and 24 are perforated at corners of the drawing area C1 in the transport direction (Y-axis direction). Similarly, two alignment holes 25 and 26 are formed in the drawing area C2. On the wiring board 20, a plurality of sets of drawing areas C are arranged in the transport direction with such drawing areas C 1 and C 2 as one set.

  In addition, as shown in FIG. 2B, the other wiring board 30 includes a base material 31 that is wider than the wiring board 10, and a plurality of pilot holes 32 are provided at both ends in the width direction (X-axis direction). Is provided. Moreover, it has the drawing area | region D arrange | positioned at a predetermined space | interval in the conveyance direction (Y-axis direction) at 2 rows. Two alignment holes 33 and 34 are perforated at corners in the conveyance direction (Y-axis direction) of each drawing region D.

  The size of the dummy discharge region B of the wiring board 10 in the present embodiment has a width in the Y-axis direction of a region in which at least one discharge head 50 (see FIG. 6) to be described later can discharge a liquid material by main scanning. It only has to be. The wiring board 20 may have the same different shape as the drawing regions C1 and C2. The wiring board 30 may have a size including a plurality (two) of drawing regions D arranged in the X-axis direction.

<Drawing device>
Next, the drawing apparatus of this embodiment is demonstrated based on FIGS. FIG. 3 is a schematic view showing the wiring board manufacturing apparatus, and FIG. 4 is a schematic perspective view showing the structure of the drawing apparatus.

  As shown in FIG. 3, the wiring board manufacturing apparatus 200 includes a reeling reel 160 on which the tape-shaped base material 1 is wound, a reeling reel 170 for scraping the base material 1, and two reels 160 and 170. A drawing apparatus 100, an imaging mechanism 140, and a drying / baking apparatus 150 are provided between them. The substrate 1 is processed by a so-called reel-to-reel method.

  In the drawing apparatus 100, a liquid material containing a functional material is applied to each drawing area A of the supplied base material 1. The imaging mechanism 140 includes an imaging device 141 including a camera such as a CCD, and a support base 142 that supports the base material 1, and can check the ejection state by imaging the applied liquid material. The drying / baking apparatus 150 includes, for example, a heating device such as an IR irradiation device, and heats and dries the applied liquid material to solidify it.

  As shown in FIG. 4, the drawing apparatus 100 includes a base 109 supported by a support leg 109a, a pair of bridge legs 103a and 103b standing from the side of the base 109, and a pair of bridge legs 103a and 103b. A pair of X-axis linear guides 102, 102 straddling the table 109 and a tape transport mechanism 110 disposed on the base 109 so as to be orthogonal to the X-axis linear guide 102 are provided. A pair of X-axis linear guides 102, 102 has a main carriage 101 for suspending a sub-carriage 101 a on which a plurality of ejection heads 50 (see FIGS. 5 and 6) are mounted, and a carriage 104 on which a pair of camera units 105 are mounted. The carriage 106 on which the UV irradiation unit 107 is mounted is provided so as to be movable in the X-axis direction. The tape transport mechanism 110 is capable of transporting the tape-shaped substrate 1 in the Y-axis direction while facing the discharge head 50 with a predetermined interval.

  The X-axis linear guide 102 includes guide rails that guide the main carriage 101, the carriage 104, and the carriage 106 in the X-axis direction. The guide rail includes an X-axis linear motor 102a (see FIG. 8) that moves the main carriage 101, an X-axis linear motor 104a (see FIG. 8) that moves the carriage 104, and an X-axis linear motor 106a that moves the carriage 106. (Refer to FIG. 8), and can be moved independently.

  In addition to the above configuration, a weight measuring unit 108 and a maintenance unit 120 are disposed on the base 109 with the tape transport mechanism 110 interposed therebetween. The weight measuring unit 108 measures the discharge amount (weight) of the liquid material discharged from the discharge head 50. Thereby, it is possible to confirm whether or not a predetermined amount of liquid is being discharged. The maintenance unit 120 includes a capping unit 121 capable of adhering to the discharge head 50 and sucking it, and a wiping unit 122 capable of removing a liquid or foreign matter adhering to the discharge head 50 (mainly the nozzle surface). Yes. A maintenance motor 123 (see FIG. 8) that moves the units 121 and 122 in the Y-axis direction at the maintenance position in the Y-axis direction facing the discharge head 50 is provided. Thereby, the clogged nozzle 52 (see FIG. 5) is recovered and the nozzle surface is cleaned.

  A control unit 130 that controls each unit of the drawing apparatus 100 is provided under the base 109. The drawing apparatus 100 is provided with a liquid supply mechanism (not shown) including a pump 125 (see FIG. 8) for supplying a liquid containing a functional material.

  FIG. 5 is a schematic exploded perspective view showing the structure of the ejection head. As shown in FIG. 5, the ejection head 50 includes a nozzle plate 51 having a plurality of nozzles 52 from which droplets 60 are ejected, and a cavity plate 53 having a partition wall 54 that divides a cavity 55 through which the plurality of nozzles 52 communicate with each other. And a vibration plate 58 having vibrators 59 corresponding to the plurality of cavities 55 are sequentially stacked and joined.

  The cavity plate 53 has a partition wall 54 that defines a cavity 55 that communicates with the nozzle 52, and also has flow paths 56 and 57 for filling the cavity 55 with a liquid material. The flow path 57 is sandwiched between the nozzle plate 51 and the vibration plate 58, and the completed space serves as a reservoir for storing the liquid material.

  The liquid material is supplied from the liquid material supply mechanism through a pipe, stored in a reservoir through a supply hole 58 a provided in the vibration plate 58, and then filled into each cavity 55 through a flow path 56.

  The vibrator 59 is, for example, a piezoelectric element (piezo element), and deforms the bonded diaphragm 58 by applying a driving voltage pulse from the outside. As a result, the volume of the cavity 55 partitioned by the partition wall 54 increases, and the liquid material is sucked into the cavity 55 from the reservoir. When the application of the driving voltage pulse is completed, the diaphragm 58 returns to the original state and pressurizes the filled liquid material. Thus, the liquid material can be discharged from the nozzle 52 as the droplet 60.

  The ejection head 50 is not limited to the one having a piezoelectric element (piezo element). An electromechanical conversion element that displaces the vibration plate 58 by electrostatic adsorption or an electrothermal conversion element that heats the liquid material and discharges it from the nozzle 52 as droplets 60 may be used.

  6A and 6B are plan views showing the arrangement of the ejection head with respect to the sub-carriage. As shown in FIG. 6A, a plurality (12) of ejection heads 50 are mounted on the sub-carriage 101a. The six ejection heads 50 are divided into a head group 50A and a head group 50B.

  As shown in FIG. 6B, the ejection head 50 according to the present embodiment is an ink jet head of a printing apparatus that draws and draws ink as a liquid material on paper or the like. The nozzle plate 51 has two nozzle rows 52a and 52b. In each nozzle row 52a, 52b, 180 nozzles 52 are arranged at intervals of approximately 140 μm. The nozzle row 52a and the nozzle row 52b are disposed with a deviation of about 70 μm. Therefore, when viewed from a direction orthogonal to the nozzle rows 52a and 52b, 360 nozzles 52 are arranged at an equal interval of approximately 70 μm. The nozzle diameter is approximately 20 μm.

  The head group 50A in FIG. 6A is arranged such that the nozzle rows 52a and 52b of the six ejection heads 50 are parallel to the Y-axis direction. Further, as viewed from the X-axis direction, a part of each of the nozzle rows 52a and 52b is arranged so as to overlap each other and continue in the Y-axis direction. The same applies to the head group 50B. Therefore, if the liquid material is ejected as droplets 60 from the nozzles 52 of the respective ejection heads 50 in synchronization with the main scanning for moving the sub-carriage 101a in the X-axis direction, the liquid material is landed at equal intervals (approximately 70 μm) in the Y-axis direction. be able to. Such an arrangement of the plurality of ejection heads 50 has a drawing width that effectively uses the lengths of the nozzle rows 52a and 52b with respect to the conveyance direction (Y-axis direction) of the substrate 1. In each head group 50A and head group 50B, six ejection heads 50 are arranged at the same position in the Y-axis direction when viewed from the X-axis direction, but the present invention is not limited to this. For example, if the head group 50B is shifted from the head group 50A by a quarter (approximately 35 μm) of the nozzle pitch P in the Y-axis direction, the liquid material can be landed in a higher density state in the Y-axis direction.

  In this case, a liquid material containing a conductive material is discharged from the head group 50A, and a liquid material containing an insulating material is discharged from the head group 50B.

  7A and 7B are schematic views showing the tape transport mechanism. As shown in FIG. 7A, the tape transport mechanism 110 includes an adsorption plate 111 that can adsorb and fix the tape-like substrate 1 at predetermined intervals with respect to the head groups 50A and 50B, and an adsorption plate 111. And a table 112 placed thereon. In addition, a pair of sprockets 114 and 115 are provided in front of and behind the table 112 in the Y-axis direction. Clamp mechanisms 116 and 117 capable of guiding the tape-like base material 1 in the Y-axis direction and pressing both ends provided with the pilot holes 2 so that the base material 1 does not float from the sprockets 114 and 115. And.

  Each moving mechanism (not shown) that moves the table 112 in the X-axis, Y-axis, and Z-axis directions and a rotating mechanism (not shown) that rotates the shaft 113 that supports the table 112 are provided. The rotation mechanism may be a so-called θ table. Thus, the base material 1 fixed to the suction plate 111 is positioned so that the drawing area A faces the head groups 50A and 50B at a predetermined position. More specifically, the two camera units 105 mounted on the carriage 104 image the alignment holes 3 and 4 of the base material 1 fixed to the suction plate 111, and from the reference position with respect to each of the head groups 50A and 50B. The control unit 130 calculates the deviation amount. Based on the calculation result, the control unit 130 drives the moving mechanism and the rotating mechanism of the table 112 to move the base material 1 and positions the drawing area A relative to the head groups 50A and 50B. When positioning the dummy discharge region B, it is not necessary to position it with high accuracy, and it is possible to cope with it by recognizing the alignment hole 4 on one side.

  As shown in FIG. 7B, when viewed from the Y-axis direction, the pair of sprockets 115 positioned on the downstream side of the table 112 are arranged so that the teeth of the sprockets 115 are fitted in the pilot holes 2 of the base material 1. It is pivotally supported by 118a. The shaft 118a is connected to a sprocket motor 118 that rotates the shaft 118a. The pair of sprockets 114 located on the upstream side are rotatably supported.

  The movement of the tape transport mechanism 110 will be briefly described. When the sprocket motor 118 is driven to rotate the shaft 118a, the pair of sprockets 115 mesh with the pilot hole 2, and the substrate 1 can be transported in both directions upstream and downstream in the Y-axis direction. The sprocket 114 includes a brake mechanism (not shown) and is configured to convey the base material 1 while applying an appropriate tension to the base material 1 with the sprocket 115.

  When adsorbing the substrate 1 to the adsorption plate 111, the upper surface of the adsorption plate 111 and the substrate 1 are brought into close contact with each other by slightly raising the table 112. Note that the upper surface of the suction plate 111 has a size capable of sucking and fixing the substrate 1 corresponding to the drawing range of the head groups 50A and 50B.

  FIG. 8 is a block diagram showing an electrical and mechanical configuration of the drawing apparatus. As shown in FIG. 8, the control unit 130 includes a command unit 130a and a drive unit 130b. The command unit 130a includes a CPU 132, a ROM 133 as a storage unit, a RAM 134, and an input / output interface 131. A signal based on various data for driving the drawing apparatus 100 input via the input / output interface 131 by the CPU 132 is written in the ROM 133 and developed and processed in the RAM 134, and the driver 130 b is processed via the input / output interface 131. A control signal is output to

  The drive unit 130b includes a head driver 135, a motor driver 136, a pump driver 137, and a maintenance driver 138. The motor driver 136 drives the X-axis linear motors 102a, 104a, and 106a according to the control signal of the command unit 130a, and moves the main carriage 101, the carriage 104, and the carriage 106 to desired positions, respectively. Further, the sprocket motor 118 is driven to rotate the sprocket 115 to convey the substrate 1 in a desired direction. Further, the maintenance motor 123 is driven to move the units 121 and 122 of the maintenance unit 120 to the maintenance position. The head driver 135 drives the vibrator 59 corresponding to each nozzle 52 based on the bitmap data for ejecting the liquid material from the plurality of nozzles 52, and synchronizes with the control of the motor driver 136, so The liquid material is discharged as a droplet 60 at the position. The pump driver 137 controls the pump 125 so that the liquid is appropriately supplied to the ejection head 50. The maintenance driver 138 controls the capping unit 121, the wiping unit 122, and the weight measurement unit 108 of the maintenance unit 120.

  The command unit 130 a is configured to give independent drive signals to each transducer 59 corresponding to the plurality of nozzles 52 via the head driver 135. For this reason, the ejection amount of the droplet 60 ejected from each nozzle 52 can be controlled and varied for each nozzle 52 in accordance with the signal from the head driver 135.

  A basic operation of the drawing apparatus 100 will be described. The control unit 130 drives the X-axis linear motor 102a via the motor driver 136, and performs a relative movement so-called main scanning for reciprocating the main carriage 101 in the X-axis direction with respect to the drawing region A of the positioned base material 1. . A control signal based on desired drawing data is transmitted to the ejection head 50 via the head driver 135 in synchronization with the main scanning. Drawing is performed by discharging a liquid material containing a functional material from the plurality of nozzles 52 selected by the control signal toward the drawing region A. Further, the sprocket motor 118 is driven via the motor driver 136, and the base material 1 is conveyed so that the dummy discharge area B faces the head groups 50A and 50B. Then, the ejection head 50 is driven via the head driver 135 to perform preliminary ejection for ejecting the droplet 60 from the ejection head 50 toward the dummy ejection area B. Preliminary discharge bitmap data for discharging droplets 60 from all the nozzles 52 and preliminary discharge bitmap data for selecting a plurality of nozzles 52 based on actual drawing data are input in advance to the ROM 133. The operator selects these bitmap data as necessary to perform preliminary ejection. A detailed method of preliminary ejection will be described later.

  The camera unit 105 is electrically connected to the input / output interface 131 of the command unit 130a, obtains captured image information, drives the tape transport mechanism 110, and positions the base material 1. Further, the imaging mechanism 140 is electrically connected, and it is determined whether or not the ejection state is normal based on the ejection information of the preliminary ejection and the landed image information of the captured liquid material. Thereby, if not normal, the command unit 130a controls each unit to repeat the preliminary ejection. Alternatively, each part is controlled so that the main carriage 101 is moved to the maintenance unit 120 and maintenance of the ejection head 50 is performed.

  Such a drawing apparatus 100 effectively uses the drawing widths of the plurality of ejection heads 50 without changing the arrangement of the plurality of ejection heads 50 with respect to the substrates 1, 21 and 31 having different widths. It is possible to discharge and draw a liquid material. In addition, it is possible to discharge the liquid material to the dummy discharge region B before discharging and drawing the liquid material to the drawing region A, thereby reducing clogging of the nozzles 52 and flight bending. Since preliminary ejection is performed toward the dummy ejection area B, the productable drawing area A is not wasted by preliminary ejection. Furthermore, it is possible to discharge after confirming the discharge state of the liquid material preliminarily discharged by conveying the base material 1 with the imaging mechanism 140.

<Liquid Drawing Method and Wiring Substrate Manufacturing Method>
Next, a method of manufacturing a wiring board to which the liquid material drawing method of the present embodiment is applied will be described with reference to FIGS. FIG. 9 is a flowchart showing a method for manufacturing a wiring board.

  As shown in FIG. 9, the method of manufacturing the wiring substrate 10 is a discharge process for discharging and drawing a first liquid material containing a conductive material as a functional material as droplets from a plurality of nozzles 52 of the discharge head 50. A first drawing step (step S1), a first inspection step (step S2) in which the landing state of the discharged first liquid is imaged and inspected by the imaging mechanism 140, and the discharged first liquid A drying / firing step (step S3) is provided as a solidification step of drying and baking the body using a drying / firing device 150 to form a wiring pattern made of a conductive material. For example, when the wiring board 10 is used as a relay board, the wiring pattern to be formed includes a plurality of terminal portions for connection and wiring portions that connect the terminal portions.

  In addition, a second drawing step (step S4) as a discharge step of discharging and drawing the second liquid containing an insulating material as a functional material as droplets from the plurality of nozzles 52 of the discharge head 50 to the drawing region A; Irradiating the discharged second liquid material with UV (ultraviolet rays) and curing it to form an insulating pattern made of an insulating material, a UV irradiation step (step S5) as a solidifying step, and a solidified insulating pattern A second inspection step (step S6) in which the imaging mechanism 140 observes and inspects. For example, when the wiring substrate 10 is used as a relay substrate, the insulating pattern is formed so as to cover the above-described wiring portion and ensure insulation between the wiring portion and the wiring portion.

  In step S1, as the conductive material contained in the first liquid, for example, metal fine particles containing at least one of gold, silver, copper, aluminum, palladium, and nickel, as well as oxidation of these As well as fine particles of conductive polymers and superconductors. These conductive fine particles can be used by coating the surface with an organic substance or the like in order to improve dispersibility. The particle diameter of the conductive fine particles is preferably 1 nm or more and 1.0 μm or less. If it is larger than 1.0 μm, the nozzle 52 of the ejection head 50 may be clogged. On the other hand, if the thickness is smaller than 1 nm, the volume ratio of the coating agent to the conductive fine particles becomes large, and the ratio of organic substances in the obtained film becomes excessive.

  The dispersion medium is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferable and more preferable dispersion media in terms of fine particle dispersibility, dispersion stability, and ease of application to the droplet discharge method. Examples thereof include water and hydrocarbon compounds.

  The surface tension of the conductive fine particle dispersion is preferably in the range of 0.02 N / m to 0.07 N / m. When discharging the first liquid material by the droplet discharge method, if the surface tension is less than 0.02 N / m, the wettability of the first liquid material to the nozzle surface increases, and thus flight bending tends to occur. If it exceeds 0.07 N / m, the shape of the meniscus at the tip of the nozzle 52 is not stable, and it becomes difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, a small amount of a surface tension regulator such as a fluorine-based, silicone-based, or nonionic-based material may be added to the dispersion in a range that does not significantly reduce the contact angle with the substrate 1. The nonionic surface tension modifier improves the wettability of the first liquid to the substrate 1, improves the leveling property of the film, and helps prevent the occurrence of fine irregularities in the film. The surface tension modifier may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the dispersion is preferably 1 mPa · s to 50 mPa · s. When the first liquid is discharged as droplets using the droplet discharge method, if the viscosity is less than 1 mPa · s, the periphery of the nozzle 52 is easily contaminated by the outflow of the first liquid, and the viscosity is low. When it is higher than 50 mPa · s, the clogging frequency in the nozzle hole is increased, and it is difficult to smoothly discharge droplets.

  As an insulating material that is cured (solidified) by UV irradiation, for example, a photosensitive polymer material such as an epoxy resin or a urethane resin having an insulating property can be used. Examples of the solvent include hydrocarbon solvents that can dissolve the above materials. The physical properties of the second liquid material are adjusted in accordance with the droplet discharge method as in the case of the first liquid material.

  In the step of discharging and drawing the first liquid material in step S1 and the step of discharging and drawing the second liquid material in step S4, in order to obtain a stable discharge state, the dummy discharge region B and the discharge are discharged immediately before the discharge drawing. A preliminary discharge step is performed in which the liquid is discharged in advance with the head 50 facing the head.

  FIGS. 10A to 10C are schematic diagrams illustrating a liquid material drawing method. As shown in FIG. 10A, in the preliminary ejection process, the liquid droplet 60 is ejected at least once from the two nozzle rows 52a and 52b without moving the ejection head 50, and the tape-shaped substrate 1 is started. It is landed on the dummy discharge area B located on the end side. By transporting the base material 1 by the tape transport mechanism 110 and capturing an image by the imaging mechanism 140, it is possible to check the ejection omission due to clogging of the nozzle 52 and the landing position accuracy as the ejection accuracy.

  Further, as shown in FIG. 10B, if the two nozzle rows 52a and 52b are selected and ejected at least once while the ejection head 50 is moved in the X-axis direction, a substantially straight line is formed in the dummy ejection region B. The droplet 60 can be landed on the top. In this way, it is possible to easily check for each nozzle 52 whether or not the droplet 60 is bent by taking an image with the imaging mechanism 140.

  Furthermore, as shown in FIG. 10C, for example, a plurality of nozzles 52 are selected while moving the ejection head 50 in the X-axis direction so as to form a linear wiring pattern P based on actual drawing data. Then discharge. The liquid droplets 60 are discharged from each nozzle 52 a plurality of times so that the wiring pattern P has a target width (in the X-axis direction). Thereby, it is possible to confirm the change in the discharge amount due to the crosstalk between the nozzles 52 that is difficult to discriminate by one discharge as the change in the width of the wiring pattern P. The discharge control may be performed so that the droplets 60 discharged from the nozzles 52 are in contact with each other along the wiring pattern P, or after the droplets 60 are landed at intervals, the intervals are set. The droplet 60 may be landed so as to be buried.

  When the preliminary discharge process in the liquid material drawing method is performed on the tape-shaped substrate 1, the preliminary discharge step is performed on the dummy discharge region B provided in advance on the substrate 1 as in the present embodiment. However, the present invention is not limited to this, and may be performed on at least one of the plurality of drawing areas A.

  Further, as shown in FIG. 3, in the wiring board manufacturing apparatus 200, the base material 1 is stretched between a winding reel 160 and a winding reel 170. Therefore, an alternative tape (leader tape) is connected to the start end side and the end end side so as not to waste the substrate 1. In the preliminary discharge step, it is preferable to discharge the droplet 60 with such an alternative tape as the dummy discharge region B.

  Moreover, when forming a wiring pattern and an insulating pattern using a droplet discharge method like this embodiment, it is possible to change these patterns in the middle of the tape-shaped substrate 1 easily. However, it is conceivable that the selection of the plurality of nozzles 52 changes with the pattern change. Since there is a possibility that the unused nozzles 52 before the pattern change are clogged, the preliminary discharge process is performed in the middle of the substrate 1. Therefore, it is effective to provide the dummy discharge area B in the middle of the base material 1 in advance corresponding to the pattern change. When the pattern is urgently changed, the preliminary ejection process may be performed using at least one of the plurality of drawing areas A.

  Furthermore, when the wiring pattern and the insulating pattern are laminated and formed on the tape-like base material 1 as in the present embodiment, the wiring pattern is first formed in the scraping reel 170 in the second drawing process of step S4. It can be considered that the substrate 1 that has been scraped off is used again as the reeling-out reel 160. Therefore, the end end of the substrate 1 that has been scraped off becomes the start end next. Therefore, the dummy discharge area B is provided on both sides of the start end and the end end of the substrate 1, and when forming the wiring pattern, preliminary discharge is performed using the dummy discharge area B on the start end side, and the end end No preliminary discharge is performed on the dummy discharge region B on the side. In this way, when the insulating pattern is formed, the scraped substrate 1 can be squeezed out and preliminary ejection can be performed on the unused dummy ejection region B.

  Further, when manufacturing the wiring board 10 in which a plurality of wiring layers each including a wiring pattern and an insulating pattern are manufactured, a plurality of dummy discharge regions B are provided at positions corresponding to the timing of preliminary discharge in the base material 1. In accordance with the formation of the wiring layer, an unused dummy discharge region B may be selected and preliminary discharge may be performed.

  According to the liquid material drawing method and the method for manufacturing the wiring substrate 10 to which the liquid material drawing method is applied, it is possible to check the discharge state and to stably discharge the liquid material. In addition, it is possible to manufacture the wiring substrate 10 having a stable quality with few defects caused by the discharge state with a high yield.

The effect of the said embodiment is as follows.
(1) In the drawing apparatus 100 of the above embodiment, the control unit 130 controls the tape transport mechanism 110 so that the dummy ejection region B provided on the start end side of the tape-shaped substrate 1 and the ejection head 50 face each other. Drive control is performed, and preliminary discharge is performed in which the liquid material is discharged as droplets 60 toward the dummy discharge region B. Therefore, as compared with the case where preliminary discharge is performed on the droplet receiving portion other than the base material 1, it is possible to perform discharge drawing by eliminating clogging of the nozzle 52 and the flying curve immediately before the liquid material is discharged and drawn in the drawing region A. . Further, the liquid accuracy that has landed on the dummy discharge area B can be observed to confirm the discharge accuracy. Furthermore, the preliminarily discharged liquid material can be conveyed and discharged together with the substrate 1. Therefore, it is not necessary to provide a droplet receiving section dedicated to preliminary ejection, and the configuration of the apparatus can be simplified.

  (2) In the wiring board manufacturing apparatus 200 of the above-described embodiment, the imaging mechanism 140 is provided on the downstream side in the conveyance direction of the base material 1 with respect to the drawing apparatus 100, and the control unit 130 captures the ejection information of the preliminary ejection and the liquid It is determined whether or not the ejection state is normal based on the landing image information of the body. Therefore, it is possible to check the discharge state of the liquid material preliminarily discharged in parallel with the discharge drawing on the base material 1 without stopping the drawing apparatus 100, and the discharge drawing can be performed more efficiently.

  (3) In the liquid material drawing method and the wiring substrate 10 manufacturing method of the above embodiment, in the step of discharging and drawing the first liquid material in step S1 and the step of discharging and drawing the second liquid material in step S4, Immediately before the discharge drawing, a dummy discharge region B and the discharge head 50 are made to face each other, and a preliminary discharge step of discharging each liquid material in advance is performed. Accordingly, it is possible to check the discharge state and perform discharge drawing in a stable discharge state. Therefore, it is possible to manufacture the wiring board 10 having stable quality with few defects caused by the discharge state with a high yield.

  (4) In the liquid material drawing method and the wiring board 10 manufacturing method of the above embodiment, in the preliminary discharge process, the control unit 130 discharges the liquid material from all the nozzles 52 of the discharge head 50 and actual drawing. Preliminary ejection is performed by selecting bitmap data based on the data. Therefore, the clogging of each nozzle 52 and the flight curve of the ejected droplet 60 can be confirmed, and the change in the ejection amount due to the crosstalk between the nozzles 52 can be confirmed.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. For example, modifications other than the above embodiment are as follows.

  (Modification 1) The structure of the drawing apparatus 100 of the said embodiment is not limited to this. For example, the number of ejection heads 50 mounted on the sub-carriage 101a may be at least one. The configuration of the tape transport mechanism 110 may be a configuration in which the suction plate 111 and the table 112 are not provided. The UV irradiation unit 107 is not essential, and other solidification devices can be selected depending on the configuration of the second liquid material that forms the insulating pattern.

  (Modification 2) In the drawing apparatus 100 of the above-described embodiment, the preliminarily discharged liquid material may be observed using the camera unit 105. According to this, it is not possible to confirm all the ejection states of the twelve ejection heads 50 constituting the head groups 50A and 50B, but some of them can be confirmed.

  (Modification 3) In the manufacturing method of the wiring board 10, the insulating material contained in the second liquid material is not limited to this. For example, an organic compound such as silicon oxide fine particles or silicon alcoholate can be used as the insulating material. In this case, an insulating pattern made of silicon oxide can be formed by drying / baking using the drying / baking apparatus 150.

  (Modification 4) In the wiring substrate 10 of the above-described embodiment, the arrangement of the dummy discharge regions B is not limited to this. At least two dummy discharge areas B may be provided in the base material 1 at the start ends and in the middle of the plurality of drawing areas A. In this way, even if the tape-shaped substrate 1 is long, preliminary discharge can be performed before and during the start of discharge drawing. That is, it is possible to maintain a stable discharge state by increasing the frequency of preliminary discharge. Further, the preliminary ejection may be performed on at least one of the plurality of drawing areas A without necessarily providing the dummy ejection area B.

  (Modification 5) In the manufacturing method of the wiring board 10 of the above embodiment, the processing order is not limited to this. For example, a first wiring pattern made of copper foil is formed in advance on the base material 1, and steps S4 to S6 are first performed to form an insulating pattern so as to cover at least a part of the first wiring pattern. To do. Thereafter, Step S1 to Step S3 may be performed to form the second wiring pattern so as to be connected to the first wiring pattern. According to this, the second wiring pattern as the jumper wiring superimposed on the first wiring pattern can be formed by the droplet discharge method.

The schematic perspective view which shows a wiring board. (A) And (b) is a schematic plan view which shows another wiring board. The schematic diagram which shows a wiring board manufacturing apparatus. The schematic perspective view which shows the structure of a drawing apparatus. FIG. 2 is a schematic exploded perspective view showing a structure of an ejection head. (A) And (b) is a top view which shows arrangement | positioning of the discharge head with respect to a subcarriage. (A) And (b) is the schematic which shows a tape conveyance mechanism. The block diagram which shows the electrical and mechanical structure of a drawing apparatus. The flowchart which shows the manufacturing method of a wiring board. (A)-(c) is a schematic diagram which shows the drawing method of a liquid.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 21, 31 ... Tape-like base material 10, 20, 30 ... Wiring board, 50 ... Discharge head, 52 ... Nozzle, 60 ... Droplet, 100 ... Drawing apparatus, 110 ... Tape conveyance mechanism, 130 ... Control part 140, imaging mechanism, A, C, D, drawing area, B, dummy ejection area.

Claims (8)

A drawing apparatus for discharging and drawing a liquid material containing a functional material on a tape-like base material having a plurality of drawing regions,
An ejection head for ejecting the liquid as droplets from a plurality of nozzles;
A tape transport mechanism that disposes the base material facing the discharge head and transports the base material in at least one direction;
The tape transport mechanism is driven and controlled so that at least one of the plurality of drawing regions faces the discharging head, and the discharging head is driven and controlled so that the liquid material is preliminarily discharged toward the drawing region. A control unit;
An imaging mechanism capable of imaging at least one of the plurality of drawing regions,
At least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least at a start end in the conveyance direction of the base material,
Wherein the control unit, the dummy discharge region is drives and controls the tape transport mechanism so as to face the ejection head, the preliminary plurality of nozzles of the discharge head toward said dummy ejection region based on the actual drawing data perform discharge, a drawing apparatus discharge information and discharge state based on the landing image information of the imaged liquid material preliminary ejection and performs the determination of whether normal or not.   At least one of the plurality of drawing regions is a dummy discharge region, and the dummy discharge region is provided at least halfway in the transport direction of the tape-shaped substrate, and the control unit is configured such that the dummy discharge region is the discharge head. 2. The drawing apparatus according to claim 1, wherein the tape transport mechanism is driven and controlled so as to oppose the first discharge area, and the preliminary discharge is performed toward the dummy discharge area.   At least two of the plurality of drawing regions are dummy discharge regions, and the dummy discharge regions are provided at least at a start end and in the middle in the transport direction of the tape-shaped base material, and the control unit is configured as the dummy discharge region. The drawing apparatus according to claim 1, wherein the tape transport mechanism is driven and controlled so as to face the ejection head, and the preliminary ejection is performed toward the dummy ejection area.   At least two of the plurality of drawing regions are dummy discharge regions, and the dummy discharge regions are provided at least at a start end and an end end in the transport direction of the tape-shaped substrate, and the control unit is configured to perform the dummy discharge The dummy conveyance area provided at the end end is controlled by driving the tape transport mechanism so that the area faces the ejection head, performing the preliminary ejection toward the dummy ejection area provided at the start end. The drawing apparatus according to claim 1, wherein the preliminary ejection is not performed. A liquid material drawing method for discharging and drawing a liquid material containing a functional material on a tape-shaped substrate having a plurality of drawing regions,
A discharge step of causing at least one of the plurality of drawing regions to face the discharge head and discharging and drawing the liquid material as droplets from the plurality of nozzles of the discharge head;
A preliminary discharge step of discharging the liquid material as droplets from the discharge head to at least one of the plurality of drawing regions before the discharge step;
An imaging step of imaging at least one of the plurality of drawing regions,
At least one of the plurality of drawing areas is a dummy discharge area, and the dummy discharge area is provided at least at a start end in the conveyance direction of the base material,
In the preliminary ejection step, the dummy ejection region and the ejection head are made to face each other, the droplets are ejected from the plurality of nozzles of the ejection head toward the dummy ejection region based on actual drawing data, and preliminary ejection is performed. A method for drawing a liquid material, comprising: determining whether or not a discharge state is normal based on ejection information and landing image information of a captured liquid material. At least one of the plurality of drawing regions is a dummy discharge region, and the dummy discharge region is provided at least in the transport direction of the tape-shaped base material. In the preliminary discharge step, the dummy discharge region and the dummy discharge region The liquid material drawing method according to claim 5 , wherein the liquid material is discharged as droplets from the discharge head toward the dummy discharge region with the discharge head facing the discharge head. At least two of the plurality of drawing regions are dummy discharge regions, and the dummy discharge regions are provided at least at a start end and in the middle in the transport direction of the tape-shaped base material. 6. The method for drawing a liquid material according to claim 5 , wherein the liquid material is discharged as droplets from the discharge head toward the dummy discharge region with the discharge region facing the discharge head. At least two of the plurality of drawing regions are dummy discharge regions, and the dummy discharge regions are provided at least at a start end and an end end in the transport direction of the tape-shaped base material, and in the preliminary discharge step, The liquid material is discharged as droplets from the discharge head toward the dummy discharge area provided at the start end, and no discharge is performed in the dummy discharge area provided at the end end. The method for drawing a liquid according to claim 5 .

Images