JP4936512B2 - Photocleavable cyclic compound - Google Patents

Photocleavable cyclic compound Download PDF

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JP4936512B2
JP4936512B2 JP2006048690A JP2006048690A JP4936512B2 JP 4936512 B2 JP4936512 B2 JP 4936512B2 JP 2006048690 A JP2006048690 A JP 2006048690A JP 2006048690 A JP2006048690 A JP 2006048690A JP 4936512 B2 JP4936512 B2 JP 4936512B2
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cyclic compound
photocleavable
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cyclic
amine
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JP2007223968A (en
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寛志 陶山
正充 白井
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Osaka Prefecture University
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Description

本発明は、光解裂部位を環状構造内に含有する光解裂性化合物に関するものである。さらに詳しくは、解裂部位が、光で解裂して分子内にアミノ基を生成することを特徴とする環状化合物に関し、例えば光反応用アミン発生剤として好適に用いることができる。   The present invention relates to a photocleavable compound containing a photocleavage site in a cyclic structure. More specifically, it relates to a cyclic compound characterized in that the cleavage site is cleaved with light to generate an amino group in the molecule, and can be suitably used as, for example, an amine generator for photoreaction.

光アミン発生剤は光照射によってアミンを生成する化合物であり、生成したアミンは高分子の合成や架橋、分解に使用することができるため、UV硬化材料やフォトレジストへの応用が期待されている。   Photoamine generators are compounds that generate amines by light irradiation, and the generated amines can be used for polymer synthesis, crosslinking, and decomposition, and are expected to be applied to UV curable materials and photoresists. .

しかし光酸発生剤に比べ光アミン発生剤は種類が少なく、現状では分子設計の自由度があまりない。アミンの種類や発生効率だけでなく、溶解性や耐熱性など実用上に向けた観点も含め、現在研究が進められているところである。   However, there are few types of photoamine generators compared to photoacid generators, and at present there is not much freedom in molecular design. Research is currently underway, including not only amine types and generation efficiency, but also practical aspects such as solubility and heat resistance.

光アミン発生剤の一つに、O−アシルオキシムがある。これまでの研究で、O−アシルオキシム中のアシルオキシイミノ部位は光照射でO−N結合が解裂し、脱炭酸を経て炭素ラジカルとイミノラジカルが生成し、これらのラジカルがカップリングすることでイミンが生成し、このイミンが速やかに加水分解し、第一級アミンとケトンになることが知られている。ここで、O−N結合は比較的容易に解裂するためO−アシルオキシムは光反応性が高く、熱分解温度も高い耐熱性にすぐれた光アミン発生剤である。   One photoamine generator is O-acyloxime. In previous studies, the acyloxyimino moiety in the O-acyloxime was cleaved by light irradiation and the carbon-ion and imino radicals were generated through decarboxylation, and these radicals were coupled. It is known that imine is formed and this imine hydrolyzes rapidly to primary amine and ketone. Here, since the O-N bond is cleaved relatively easily, O-acyl oxime is a photoamine generator with high photoreactivity and high thermal decomposition temperature and excellent heat resistance.

また、O−カルバモイルオキシムも光アミン発生剤として知られている。O−アシルオキシムと同様に、O−カルバモイルオキシム中のカルバモイルオキシイミノ部位のO−N結合が光照射で解裂し、脱炭酸を経てアミノラジカルとイミノラジカルが生成し、これらのラジカルがカップリングすることでヒドラゾンが生成し、このヒドラゾンが加水分解によりヒドラジンとケトンになることが知られている。また、アミノラジカルが反応系中の水素原子を引き抜くことで第一級アミンを生成することも知られている。O−カルバモイルオキシムも光反応性の高いすぐれた光アミン発生剤である。   O-carbamoyl oxime is also known as a photoamine generator. Similar to O-acyloxime, the ON bond at the carbamoyloxyimino moiety in O-carbamoyloxime is cleaved by light irradiation, and decarboxylation produces amino radicals and imino radicals. These radicals are coupled. Thus, it is known that hydrazone is produced, and this hydrazone is hydrolyzed to become hydrazine and a ketone. It is also known that amino radicals generate primary amines by extracting hydrogen atoms in the reaction system. O-carbamoyl oxime is also an excellent photoamine generator with high photoreactivity.

これらの反応機構は下記の非特許文献1に詳しく記されている。
J.Lalevee,X.Allonas,J.P.Fouassier,H.Tachi,A.Izumitani,M.Shirai and M.Tsunooka,J.Photochem.Photobiol.A:Chem.,Vol.151,27(2002).
These reaction mechanisms are described in detail in Non-Patent Document 1 below.
J. et al. Lalevee, X .; Allonas, J. et al. P. Fouassier, H .; Tachi, A .; Izumitani, M .; Shirai and M.M. Tsunooka, J. et al. Photochem. Photobiol. A: Chem. , Vol. 151, 27 (2002).

しかし、O−アシルオキシムやO−カルバモイルオキシムからアミンと共に生成するケトンは、ネガ型フォトレジストのプロセスにおいては、現像液に溶出し膜減りの要因となってしまう。また、UV硬化材料に適用する場合は硬化物からケトンが徐々にしみだす可能性がある。また、ケトンの揮発性が高い場合、臭気を伴ったり、フォトリソグラフィーの光学系を汚染させる可能性がある。このような問題点のため、ケトンが副生成物として生成すると、使用される分野が限定される場合がある。   However, ketones produced together with amines from O-acyl oximes and O-carbamoyl oximes are eluted into the developer in the process of negative photoresists and cause film loss. In addition, when applied to a UV curable material, there is a possibility that the ketone gradually oozes from the cured product. In addition, when the volatility of the ketone is high, there is a possibility that it is accompanied by an odor or contaminates the optical system of photolithography. Due to such problems, the field of use may be limited when ketones are produced as by-products.

したがって本発明は上記問題に鑑みなされたものであり、その目的は副生成物として遊離するケトンが生成しない光アミン発生剤を提供することにある。   Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a photoamine generator that does not generate a ketone that is liberated as a by-product.

上記目的を達成するために、通常の光アミン発生剤においては光解裂反応で生成するアミンとケトンを、本発明者らはあらかじめ共有結合でつないでおき、かかる光解裂部位が環状構造内に含まれるよう分子設計するものである。   In order to achieve the above object, in a normal photoamine generator, an amine and a ketone generated by a photocleavage reaction are previously connected by a covalent bond, and the photocleavage site is in a cyclic structure. Is designed to be included in

本発明における光解裂性環状化合物においては、光照射で励起され結合の解裂をおこなう光解裂部位を含有する。その光解裂部位としては、アシルオキシイミノ部位、またはカルバモイルオキシイミノ部位である。このように光解裂部位が環状構造に含まれることで、光解裂反応で生成するケトンがアミンと共有結合で結ばれており、生成するケトンの溶出や揮発を抑制できることを見出し、本発明に至った。   The photocleavable cyclic compound in the present invention contains a photocleavage site that is excited by light irradiation to cleave the bond. The photocleavable site is an acyloxyimino site or a carbamoyloxyimino site. Thus, it has been found that the photocleavage site is contained in the cyclic structure, so that the ketone produced by the photocleavage reaction is covalently bonded to the amine, and elution and volatilization of the produced ketone can be suppressed, and the present invention. It came to.

すなわち本発明は、光解裂部位を環状構造内に含有する化合物であり、光解裂部位が、光で解裂して分子内にアミノ基を生成することを特徴とする、アシルオキシイミノ部位を含有する式1で表される環状化合物:

Figure 0004936512
あるいはカルバモイルオキシイミノ部位を含有する式2:
Figure 0004936512
で表される環状化合物(但し、式中、Xは―(CH2n―基、脂環式基、アリーレン基、―(CH2n―基と脂環式基の結合したもの、―(CH2n―基とアリーレン基の結合したものから選択され、nは2〜7の整数、R1は芳香族基または置換アルキル基である)に関し、また式1あるいは式2で表される環状化合物を主成分とする、光反応用アミン発生剤を提供する。 That is, the present invention is a compound containing a photocleavage site in a cyclic structure, wherein the photocleavage site is cleaved by light to produce an amino group in the molecule, Cyclic compound represented by Formula 1 contained:
Figure 0004936512
Alternatively, Formula 2 containing a carbamoyloxyimino moiety:
Figure 0004936512
Wherein X is a — (CH 2 ) n — group, an alicyclic group, an arylene group, a combination of a — (CH 2 ) n — group and an alicyclic group, (CH 2 ) n — selected from a combination of a group and an arylene group, where n is an integer of 2 to 7, and R 1 is an aromatic group or a substituted alkyl group), and is represented by Formula 1 or Formula 2. An amine generator for photoreaction comprising a cyclic compound as a main component is provided.

本発明の、光解裂部位を環状構造内に含有する化合物を主成分として含有する、光反応用アミン発生剤を使用したUV硬化剤やフォトレジストによれば、生成するケトンはアミンと分子内で結びつけられているため、臭気の発生やレジストの膜減りなどの不具合を起こさない。   According to the UV curing agent or photoresist using an amine generator for photoreaction containing a compound containing a photocleavage site in a cyclic structure as a main component of the present invention, the generated ketone is an amine and an intramolecular molecule. Because it is tied together, it does not cause problems such as odor generation and resist film loss.

更に、本発明における環状化合物を主成分とする光反応用アミン発生剤を用いると、アミン生成の途中過程であるラジカル再カップリングによるイミンの生成効率を、従来公知の非環状化合物より高くすることも可能になる。   Furthermore, when an amine generator for photoreactions comprising a cyclic compound as a main component in the present invention is used, the efficiency of imine generation by radical recoupling, which is an intermediate process of amine generation, is made higher than that of conventionally known acyclic compounds. Is also possible.

本発明の、光解裂部位を環状構造内に含有する環状化合物は、環員数が7〜12の環状O−アシルオキシムおよび環員数に制限のないO−カルバモイルオキシムが特に好適に用いられ、これらはUV硬化剤やフォトレジスト用光反応用アミン発生剤の主成分として調整される。光反応用アミン発生剤の調整法は、従来公知の方法が用いられる。   As the cyclic compound containing a photocleavable site in the cyclic structure of the present invention, a cyclic O-acyl oxime having 7 to 12 ring members and an O-carbamoyl oxime having no ring member limitation are particularly preferably used. Is adjusted as a main component of a UV curing agent or an amine generator for photoreaction for photoresist. Conventionally known methods are used for adjusting the photoreactive amine generator.

本発明において環状化合物とは、共有結合で原子が環状に結ばれたものである。本発明では環部分がその一部に光解裂部位を含むものであり、光解裂部位以外の構成成分としては脂肪族基、脂環式基、アリーレン基などがある。アリーレン基には芳香環、複素環が含まれる。   In the present invention, the cyclic compound is a compound in which atoms are linked in a ring by a covalent bond. In the present invention, the ring portion includes a photocleavage site in a part thereof, and examples of components other than the photocleavage site include an aliphatic group, an alicyclic group, and an arylene group. The arylene group includes an aromatic ring and a heterocyclic ring.

光解裂部位と発色団を結合させることで、感光域を調整することもできる。発色団としては、芳香環、置換芳香環、ケトンなどがある。これらは、環状構造の中に組み込んでも良いし、組み込まなくても良い。   The photosensitive region can also be adjusted by combining the photocleavage site and the chromophore. Examples of chromophores include aromatic rings, substituted aromatic rings, and ketones. These may or may not be incorporated into the annular structure.

また、分子内に発色団を結合させる替わりに、増感剤を系中に加えることもできる。O−アシルオキシムやO−カルバモイルオキシムの増感剤としては、特に三重項増感剤が有効であり、特にベンゾフェノン、チオキサントン、ミヒラーケトン、ケトビスクマリン及びその誘導体が有効である。   Further, a sensitizer can be added to the system instead of binding the chromophore in the molecule. As a sensitizer for O-acyl oxime and O-carbamoyl oxime, triplet sensitizers are particularly effective, and benzophenone, thioxanthone, Michler ketone, ketobiscoumarin and derivatives thereof are particularly effective.

O−アシルオキシムの場合、環員数は、安定な化合物としては5員環以上のものが可能であるが、環員数が6以下ではラジカルカップリングが進行しにくく、光反応によって結合の解裂が起こってもアミンを生成しにくく光アミン発生剤としては好ましくない。一方、環員数があまり大きすぎても、生成したラジカル同士が近づく確率が減少するため、ラジカルカップリングが進行しにくく、好ましくない。また、環員数が12より大きな化合物は原料の入手や合成が困難であり、これらの点からも好ましくない。 O−カルバモイルオキシムの場合は、水素引き抜きにより第一級アミンを生成するので、環員数に上記のような制限は無い。本発明の光反応用アミン発生剤は、上記の式1または式2の化合物自体で構成してもよく、また適当な不活性担体または賦形剤とともに製剤化されてもよい。   In the case of O-acyl oxime, the number of ring members can be 5 or more as a stable compound, but radical coupling is difficult to proceed when the number of ring members is 6 or less, and the bond is cleaved by photoreaction. Even if it occurs, it is difficult to produce an amine, which is not preferable as a photoamine generator. On the other hand, if the number of ring members is too large, the probability that the generated radicals are close to each other decreases, so that radical coupling is difficult to proceed. In addition, a compound having a ring member larger than 12 is difficult to obtain and synthesize raw materials, and is not preferable from these points. In the case of O-carbamoyl oxime, primary amines are produced by hydrogen abstraction, so the number of ring members is not limited as described above. The amine generator for photoreaction of the present invention may be composed of the compound of the above formula 1 or 2 itself, or may be formulated with a suitable inert carrier or excipient.

以下に、実施例を挙げて本発明を詳細に説明する。本発明は、この実施例によって何ら制限されるものではない。   Hereinafter, the present invention will be described in detail with reference to examples. The present invention is not limited in any way by this embodiment.

実施例1
[環状O−アシルオキシムの合成]
(実験例1)
5−ベンゾイルペンタン酸(東京化成)7.5g (36.3mol)、ヒドロキシルアンモニウムクロライド(和光純薬)3.75g、メタノール30mlをフラスコに入れ、ここにKOH5.6gを含む水溶液15mlを加えた。一旦加熱したあと室温に冷却し、氷浴下1.2N塩酸水溶液で中和した。析出した白色固体をトルエンで再結晶し、5.40g(24.4mmol)の6−ヒドロキシイミノ−6−フェニルヘプタン酸を無色結晶として得た。

収率:67%
融点:116〜116.5℃
IR(KBr):1704cm-1(C=O)、2800−3500cm-1(OH)
Example 1
[Synthesis of cyclic O-acyl oxime]
(Experimental example 1)
7.5 g (36.3 mol) of 5-benzoylpentanoic acid (Tokyo Kasei), 3.75 g of hydroxylammonium chloride (Wako Pure Chemical Industries) and 30 ml of methanol were placed in a flask, and 15 ml of an aqueous solution containing 5.6 g of KOH was added thereto. The mixture was heated once, cooled to room temperature, and neutralized with 1.2N aqueous hydrochloric acid in an ice bath. The precipitated white solid was recrystallized from toluene to obtain 5.40 g (24.4 mmol) of 6-hydroxyimino-6-phenylheptanoic acid as colorless crystals.

Yield: 67%
Melting point: 116-116.5 ° C
IR (KBr): 1704 cm −1 (C═O), 2800-3500 cm −1 (OH)

(実験例2)
フラスコ中に3.06g(13.6mmol)の6−ヒドロキシイミノ−6−フェニルヘキサン酸とピリジン45ml、ジエチルエーテル60mlを入れ、−20〜−30℃に保ちながら塩化チオニル1.20ml(16.4mmol)を含むジエチルエーテル120mlを滴下した。室温で一晩撹拌した後、溶媒をエバポレーターで留去した。析出物に50mlのクロロホルムを加え、このクロロホルム溶液を1.2N HCl水溶液、飽和NaHCO3水溶液、飽和食塩水で洗浄し、硫酸ナトリウムで乾燥した。乾燥後、クロロホルムを留去し、得られた淡黄色固体をカラムクロマトグラフィーで分離すると、式3:

Figure 0004936512
1.16g(5.71mmol)の8H−1,2−オキサゾシン-8-オン−4,5,6,7−テトラヒドロ−3−フェニルが得られた。再結晶はシクロヘキサンから行った。
収率:41 %
融点:135.5−136.5 ℃
熱分解温度(TGA):214 ℃
UV(CHCN): λmax248nm(ε1.4×104L・mol-1・cm-1)
IR(KBr):1755 cm-1(C=O)、1125cm-1(C−O−C)
元素分析:計算値 C1213NO2; C: 70.92,H:6.45,N:6.89. 実測値 C:71.19,H:6.53,N:6.82. (Experimental example 2)
Into the flask was placed 3.06 g (13.6 mmol) of 6-hydroxyimino-6-phenylhexanoic acid, 45 ml of pyridine, and 60 ml of diethyl ether, and 1.20 ml (16.4 mmol) of thionyl chloride while maintaining at -20 to -30 ° C. ) Containing 120 ml of diethyl ether was added dropwise. After stirring at room temperature overnight, the solvent was distilled off with an evaporator. 50 ml of chloroform was added to the precipitate, and this chloroform solution was washed with 1.2N HCl aqueous solution, saturated NaHCO 3 aqueous solution and saturated brine, and dried over sodium sulfate. After drying, chloroform was distilled off, and the resulting pale yellow solid was separated by column chromatography.
Figure 0004936512
1.16 g (5.71 mmol) of 8H-1,2-oxazosin-8-one-4,5,6,7-tetrahydro-3-phenyl was obtained. Recrystallization was performed from cyclohexane.
Yield: 41%
Melting point: 135.5-136.5 ° C
Thermal decomposition temperature (TGA): 214 ° C
UV (CH 3 CN): λ max 248 nm (ε1.4 × 104 L · mol −1 · cm −1 )
IR (KBr): 1755 cm −1 (C═O), 1125 cm −1 (C—O—C)
Elemental analysis: calculated value C 12 H 13 NO 2 ; C: 70.92, H: 6.45, N: 6.89. Actual value C: 71.19, H: 6.53, N: 6.82.

[環状O−アシルオキシムの光反応性の評価]
(実験例3)
ポリメタクリロニトリルと8H−1,2−オキサゾシン−8−オン−4,5,6,7−テトラヒドロ−3−フェニルをシクロヘキサノンに溶解しシリコン基板または石英板上にスピンコートした。この基板をホットプレート上80℃で5分間プレベークし、膜厚約2.0μmの薄膜を得た。できた薄膜を低圧水銀灯を用いて光照射し、スペクトル変化を測定した。赤外スペクトルのC=O伸縮バンドから光分解率を算出し、既に知られている光解裂性環状化合物である、式4:

Figure 0004936512
O−フェニルアセチルアセトフェノンオキシム(PaApO)、O−フェニルアセチル−2−アセトナフトンオキシム(PaAnO)と比較した(図1)。 [Evaluation of Photoreactivity of Cyclic O-Acyloxime]
(Experimental example 3)
Polymethacrylonitrile and 8H-1,2-oxazocin-8-one-4,5,6,7-tetrahydro-3-phenyl were dissolved in cyclohexanone and spin-coated on a silicon substrate or quartz plate. This substrate was pre-baked on a hot plate at 80 ° C. for 5 minutes to obtain a thin film having a thickness of about 2.0 μm. The resulting thin film was irradiated with light using a low-pressure mercury lamp, and the change in spectrum was measured. The photodecomposition rate is calculated from the C = O stretch band of the infrared spectrum, and is a known photocleavable cyclic compound, formula 4:
Figure 0004936512
O-phenylacetylacetophenone oxime (PaApO) and O-phenylacetyl-2-acetonaphthone oxime (PaAnO) were compared (FIG. 1).

図1では、環状化合物8H−1,2−オキサゾシン−8−オン−4,5,6,7−テトラヒドロ−3−フェニルの光反応性は非環状のPaApOより高かった。また、ナフチル基を有するPaAnOより低かった。   In FIG. 1, the photoreactivity of the cyclic compound 8H-1,2-oxazocin-8-one-4,5,6,7-tetrahydro-3-phenyl was higher than that of the acyclic PaApO. Moreover, it was lower than PaAnO which has a naphthyl group.

なお、前記ポリメタクリロニトリル中における光照射の際、8H−1,2−オキサゾシン−8−オン−4,5,6,7−テトラヒドロ−3−フェニルを含む膜を光照射しても膜からの臭気は特に無かったが、PaApOを含む膜を光照射するとアセトフェノン特有の臭気が感じられた。   In the case of light irradiation in the polymethacrylonitrile, the film containing 8H-1,2-oxazosin-8-one-4,5,6,7-tetrahydro-3-phenyl can be irradiated with light. However, when the film containing PaApO was irradiated with light, a odor peculiar to acetophenone was felt.

[架橋反応促進の評価]
(実験例4)
ポリグリシジルメタクリレート(数平均分子量17,000)とグリシジル基に対して5モル%の光アミン発生剤をシクロヘキサノンに溶解させ、シリコン基板上にスピンコートした。この基板を80℃で5分間プレベークすると膜厚は0.3μmの薄膜が得られた。この薄膜を低圧水銀灯で光照射し、その後120℃で5分間ホットプレートで加熱した。加熱後の膜をテトラヒドロフラン(THF)に室温で10分間浸漬し溶解性変化を調べた。THF浸漬前後の膜厚比を不溶化率とした(図2)。
[Evaluation of cross-linking reaction acceleration]
(Experimental example 4)
Polyglycidyl methacrylate (number average molecular weight 17,000) and 5 mol% photoamine generator based on glycidyl group were dissolved in cyclohexanone and spin-coated on a silicon substrate. When this substrate was pre-baked at 80 ° C. for 5 minutes, a thin film having a thickness of 0.3 μm was obtained. This thin film was irradiated with light with a low-pressure mercury lamp, and then heated on a hot plate at 120 ° C. for 5 minutes. The heated membrane was immersed in tetrahydrofuran (THF) at room temperature for 10 minutes to examine the change in solubility. The film thickness ratio before and after immersion in THF was defined as the insolubilization rate (FIG. 2).

図2から、8H−1,2−オキサゾシン−8−オン−4,5,6,7−テトラヒドロ−3−フェニルを含む膜の方がPaAnOを含む膜より、はるかに少量の光照射で膜が不溶化することがわかった。   FIG. 2 shows that the film containing 8H-1,2-oxazocin-8-one-4,5,6,7-tetrahydro-3-phenyl can be formed with much less light irradiation than the film containing PaAnO. It turned out to be insolubilized.

本発明の環状光アミン発生剤と非環状の光アミン発生剤の光反応性の比較を表した図である。It is a figure showing the comparison of the photoreactivity of the cyclic photoamine generator of this invention, and an acyclic photoamine generator. ポリグリシジルメタクリラートの光・熱不溶化における本発明の環状光アミン発生剤と非環状の光アミン発生剤の添加効果を表した図である。It is a figure showing the addition effect of the cyclic photoamine generator of this invention and the acyclic photoamine generator in the light and heat insolubilization of polyglycidyl methacrylate.

Claims (2)

式1:
Figure 0004936512
但し、式中、Xは―(CH2n―基であり、nは〜7の整数、R1は芳香族基または置換アルキル基である)
で示される光解裂性環状化合物。
Formula 1:
Figure 0004936512
(Wherein, X is - (CH 2) n - is a radical, n is 3-7 integer, R 1 is an aromatic group or a substituted alkyl group)
The photocleavable cyclic compound shown by these.
請求項1に記載の環状化合物を主成分として含有することからなる、光反応用アミン発生剤。   An amine generator for photoreaction comprising the cyclic compound according to claim 1 as a main component.
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