JP4931205B2 - Silane gas detection material - Google Patents
Silane gas detection material Download PDFInfo
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- JP4931205B2 JP4931205B2 JP2006327981A JP2006327981A JP4931205B2 JP 4931205 B2 JP4931205 B2 JP 4931205B2 JP 2006327981 A JP2006327981 A JP 2006327981A JP 2006327981 A JP2006327981 A JP 2006327981A JP 4931205 B2 JP4931205 B2 JP 4931205B2
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- silane
- perchlorate
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- 238000001514 detection method Methods 0.000 title claims description 30
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims description 28
- 229910000077 silane Inorganic materials 0.000 title claims description 27
- 239000000463 material Substances 0.000 title claims description 17
- RBWNDBNSJFCLBZ-UHFFFAOYSA-N 7-methyl-5,6,7,8-tetrahydro-3h-[1]benzothiolo[2,3-d]pyrimidine-4-thione Chemical compound N1=CNC(=S)C2=C1SC1=C2CCC(C)C1 RBWNDBNSJFCLBZ-UHFFFAOYSA-N 0.000 claims description 26
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 19
- 229910052709 silver Inorganic materials 0.000 claims description 19
- 239000004332 silver Substances 0.000 claims description 19
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 claims description 18
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 18
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 claims description 10
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 9
- 229910001923 silver oxide Inorganic materials 0.000 claims description 9
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 claims description 8
- 229940071536 silver acetate Drugs 0.000 claims description 8
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 claims description 8
- 229910000367 silver sulfate Inorganic materials 0.000 claims description 8
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 claims description 8
- 229940096017 silver fluoride Drugs 0.000 claims description 7
- REYHXKZHIMGNSE-UHFFFAOYSA-M silver monofluoride Chemical compound [F-].[Ag+] REYHXKZHIMGNSE-UHFFFAOYSA-M 0.000 claims description 7
- CZKMPDNXOGQMFW-UHFFFAOYSA-N chloro(triethyl)germane Chemical compound CC[Ge](Cl)(CC)CC CZKMPDNXOGQMFW-UHFFFAOYSA-N 0.000 claims description 6
- 150000003378 silver Chemical class 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 239000003463 adsorbent Substances 0.000 claims description 3
- FFPKDYGMQUWLOG-UHFFFAOYSA-M silver;2-methylbenzenesulfonate Chemical compound [Ag+].CC1=CC=CC=C1S([O-])(=O)=O FFPKDYGMQUWLOG-UHFFFAOYSA-M 0.000 claims 1
- 239000007789 gas Substances 0.000 description 30
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 17
- 238000005070 sampling Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 8
- JOXIMZWYDAKGHI-UHFFFAOYSA-M toluene-4-sulfonate Chemical compound CC1=CC=C(S([O-])(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-M 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 150000004678 hydrides Chemical class 0.000 description 4
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- -1 silver halide Chemical class 0.000 description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Chemical compound [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000011833 salt mixture Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- SDLBJIZEEMKQKY-UHFFFAOYSA-M silver chlorate Chemical compound [Ag+].[O-]Cl(=O)=O SDLBJIZEEMKQKY-UHFFFAOYSA-M 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
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- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Description
本発明は、水素化物ガスの一種であるシランガスをセルロ−ステ−プ等のシート状担体に呈色剤と反応させて生じる反応痕から光学的に検出するのに最適なガス検出材に関する。 The present invention relates to a gas detection material that is optimal for optically detecting from reaction traces produced by reacting a silane gas, which is a kind of hydride gas, with a colorant on a sheet-like carrier such as a cellulose step.
極めて強い毒性を有している水素化物ガスのうち、シラン（SiH4）のガスを検出する検出材としては、特許文献１に見られるようにガス吸着剤を含有させた通気性シート状担体に、呈色剤としての過塩素酸銀と、耐光性向上剤としてのパラトルエンスルホン酸と、エチレングリコールとを含浸させたシランガス検出材が実用化されている。
この検知材によればサンプリング時間を延長して検出材に作用するガスの量を多くすれば、対象ガスの濃度が低い場合であっても積分効果により反応痕を生じさせることができ、この反応痕を光学濃度測定装置により測定すれば、漏洩を確実に検出できる。
According to this detection material, if the amount of gas acting on the detection material is increased by extending the sampling time, even if the concentration of the target gas is low, reaction traces can be generated due to the integration effect. If the trace is measured by an optical density measuring device, the leakage can be reliably detected.
ところで、この検知材を使用して環境中のガス漏洩を監視する場合には、ランニングコストを抑えるために目的ガスが検出されるまでは同一の検知材を繰り返し使用して検知動作が継続される。
しかしながら、担体に含有されているエチレングリコールが気流により揮散して検出感度が低下するため、被検ガスとの反応痕が生じないにもかかわらず検知材を更新することが必要となる。
また、極微量のガスを検出するためにサンプリング時間を延長して積算効果を求めようとすると、検出感度に寄与しているエチレングリコールの揮散量が増加して測定誤差が生じるという不都合がある。
本発明は、このような事情に鑑みてなされたものであって、その目的とするところはサンプリング時間の延長を可能にすることができるシランガス検知材を提供することである。
By the way, when using this detection material to monitor gas leakage in the environment, the detection operation is continued using the same detection material repeatedly until the target gas is detected in order to reduce running costs. .
However, since the ethylene glycol contained in the carrier is volatilized by the air flow and the detection sensitivity is lowered, it is necessary to update the detection material even though there is no reaction trace with the test gas.
Further, if an attempt is made to obtain the integration effect by extending the sampling time in order to detect a very small amount of gas, there is a disadvantage that the amount of ethylene glycol volatilized contributing to the detection sensitivity increases and a measurement error occurs.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a silane gas detection material capable of extending the sampling time.
このような課題を達成するために本発明においては、ガス吸着剤を含有させた通気性シート状担体に、呈色剤として過塩素酸銀と、硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、酸化銀のグループから選択された１もしくは複数の銀塩との混合物と、ブタンジオールとを含浸させた。 In order to achieve such a problem, in the present invention, a gas permeable agent-containing air-permeable sheet-like carrier is coated with silver perchlorate as a colorant and silver nitrate, silver acetate, silver lactate, silver sulfate, fluorine A mixture of one or more silver salts selected from the group consisting of silver halide, silver borofluoride, silver trifluoromethanesulfonate, silver paratoluenesulfonate, and silver oxide was impregnated with butanediol.
本発明によれば、テ−プ上に担持されている銀塩は、これを溶解しているブタンジオールに取り込まれたシランガスと反応してガスの濃度に応じた量だけ還元されてコロイド銀を析出し反応痕を生じる。反応痕の濃度が水素化物の濃度に比例するので、これの光学的濃度を測定することにより水素化物ガスの濃度を知ることができる。そしてブタンジオールは、分子量が 90.12とエチレングリコールの約１．５倍で沸点、融点がエチレングリコールよりも高いため、サンプリングによる気流での揮散が小さく、３０分程度の長時間に亘ってサンプリングを継続しても初期の感度を維持することができ、ガス検知材の更新の期間を延長することができる。
さらに、過塩素酸銀と、過塩素酸銀以外の他の銀塩との混合物を呈色剤として使用しているため、過塩素酸銀の過塩素酸イオンの強酸により変色を防止しつつ過塩素酸銀とそれ以外の銀塩との銀イオンにより感度の向上を図ることができる。
According to the present invention, the silver salt supported on the tape reacts with the silane gas taken into the butanediol in which it is dissolved, and is reduced by an amount corresponding to the concentration of the gas, so that the colloidal silver is reduced. Precipitates and produces reaction traces. Since the concentration of reaction traces is proportional to the concentration of hydride, the concentration of hydride gas can be known by measuring the optical concentration thereof. Butanediol has a molecular weight of 90.12, approximately 1.5 times that of ethylene glycol, and has a boiling point and melting point higher than ethylene glycol. Therefore, volatilization by sampling airflow is small, and sampling continues for a long time of about 30 minutes. Even in this case, the initial sensitivity can be maintained, and the renewal period of the gas detection material can be extended.
In addition, since a mixture of silver perchlorate and other silver salts other than silver perchlorate is used as a colorant, it is possible to prevent discoloration while preventing strong discoloration by the strong perchlorate ion of silver perchlorate. Sensitivity can be improved by silver ions of silver chlorate and other silver salts.
そこで、以下に本発明の詳細を実施例に基づいて説明する。試薬を担持する担体は、この実施例では植物繊維を梳いて通気性を有するシ−ト体が用いられ、この好ましくはケイ酸（H2SiO3）、酸化マグネシウム（MgO）、酸化アルミニウム（Al2O3）等のガス吸着材を含有させて構成されている。 Therefore, details of the present invention will be described below based on examples. In this embodiment, the carrier for supporting the reagent is a sheet having air permeability through plant fibers. This is preferably silicic acid (H2SiO3), magnesium oxide (MgO), aluminum oxide (Al2O3), etc. It is configured to contain a gas adsorbent.
この担体に、１平方米当り過塩素酸銀及び硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、酸化銀のグループから選択された１もしくは複数の銀塩との混合物を０．６乃至４．５グラム、ブタンジオールを３．８乃至１５．５グラム程度含浸担持させる。 This carrier is selected from the group of silver perchlorate and silver nitrate, silver acetate, silver lactate, silver sulfate, silver fluoride, silver borofluoride, silver trifluoromethanesulfonate, silver paratoluenesulfonate, silver oxide per square meter About 0.6 to 4.5 grams of the mixture of one or a plurality of silver salts and 3.8 to 15.5 grams of butanediol are impregnated and supported.
これら試薬を担体に担持させる手法としては、メタノ−ルなどの有機溶媒に、過塩素酸銀を濃度０．７５乃至６．０ｗ／ｖパ−セント、ブタンジオールを５乃至２０ｖパ−セント溶解させてなる調製液に、上述した担体を所定時間浸漬して含浸させる。 As a method for supporting these reagents on a carrier, silver perchlorate is dissolved in an organic solvent such as methanol at a concentration of 0.75 to 6.0 w / v percent and butanediol is dissolved at 5 to 20 v percent. In the prepared liquid, the above-mentioned carrier is immersed for a predetermined time to be impregnated.
ついでテ−プを調製液から担体を引上げ、有機溶媒を室温で蒸発させることにより過塩素酸銀、パラトルエンスルホン酸、及びブタンジオールだけを担体に残留させる。
このような操作を調製液に含まれている試薬の濃度に応じて１回若しくは複数回繰り返すことにより、所定濃度で各試薬をテ−プ上に担持させることができる。すなわち、過塩素酸銀、及び硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、酸化銀のグループから選択された１もしくは複数の銀塩との混合物がブタンジオールに溶解された状態で担体に存在している。
The tape is then pulled from the preparation and the organic solvent is evaporated at room temperature, leaving only silver perchlorate, paratoluenesulfonic acid, and butanediol on the support.
By repeating such an operation once or a plurality of times according to the concentration of the reagent contained in the preparation solution, each reagent can be supported on the tape at a predetermined concentration. That is, silver perchlorate and one or more selected from the group consisting of silver nitrate, silver acetate, silver lactate, silver sulfate, silver fluoride, silver borofluoride, silver trifluoromethanesulfonate, silver paratoluenesulfonate, and silver oxide The silver salt mixture is present in the support in a state dissolved in butanediol.
図１は、上述のように構成された担体をテープ状に裁断してシランガス検出テ−プとして構成したものを用いてシランの濃度を測定するための装置の一例を示すものであって、図中符号１は、テ−プ２の搬送経路に対向させて配置されたガス吸引部で、テ−プ２に対向する面には直径１センチメ−トル程度の通孔３が穿設されており、パイプ４を介して吸引ポンプ５からの陰圧が作用するように構成されている。
FIG. 1 shows an example of an apparatus for measuring the concentration of silane by using a carrier configured as described above and cut into a tape shape and configured as a silane gas detection tape. An
図中符号６は、ガス吸引部１の通孔３に対向するテ−プ２の他面側に配置された測定ヘッド部で、吸引部１の通孔３と対向する位置に通孔７が形成された遮光容器として構成されており、内部に発光素子８と受光素子９を、テ−プ２上に形成された反応痕を検出できるような関係でもって配置収容し、さらに一端に被検ガスの導入口１０を設けて構成されている。
シランガス検出用テ−プをリ−ル１１、１２にテ−プをセットし、吸引部１に吸引ポンプ５からの吸引圧を作用させると、導入口１０から測定ヘッド部６にシランを含む空気が吸込まれる。この空気は、通孔７から検出用テ−プ２の細孔、つまり繊維の隙間を通過して通孔３に排出される。被検ガスが検出用テ−プ２を通過する過程でテ−プ２上の過塩素酸銀、及び硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、酸化銀のグループから選択された１もしくは複数の銀塩との混合物がシランに反応し、シランの濃度に比例した量のコロイド銀がテ−プ表面に析出する。
When a tape for silane gas detection is set on the
このようにして所定のサンプリング時間、例えば３０秒程度が経過した時点で、吸引を停止して反応痕の光学的濃度の測定工程に移る。発光素子８からの光（この実施例では波長約４００ｎｍにピークを有する発光ダイオードの光）は、テ−プ表面に形成された反応痕の光学的濃度に応じて吸収を受けるので、測定開始前の光学的濃度、つまりテ−プのバックグランドとの光学的な濃度差を求めることによりテ−プ２を通過したシランの濃度、もしくは積算量を知ることができる。
In this way, when a predetermined sampling time, for example, about 30 seconds elapses, the suction is stopped and the process moves to the step of measuring the optical density of the reaction trace. The light from the light-emitting element 8 (light-emitting diode light having a peak at a wavelength of about 400 nm in this embodiment) is absorbed according to the optical density of the reaction mark formed on the tape surface. The concentration of silane that has passed through the
一方、上記測定によってもシランが検出されない場合には再度、サンプリングを開始して上述と同様の工程を繰り返す。 On the other hand, if no silane is detected by the above measurement, sampling is started again and the same steps as described above are repeated.
このようにして目的ガスが検出されることなく検出用テープの同一箇所での積算のサンプリング時間が所定時間を越えた時点で紙送り機構１３を駆動してリ−ル１１に収容されている検出用テ−プの未使用部分を測定領域に移動させる。
In this way, when the integrated sampling time at the same location of the detection tape exceeds a predetermined time without detecting the target gas, the
図２は、上述の測定装置を用いて濃度５ｐｐｍのシランを、サンプリング時間を変えながら出力値を調査したもので、サンプリング時間に比例して出力値、つまり光学濃度が上昇している。 FIG. 2 is an investigation of the output value of silane having a concentration of 5 ppm using the above-described measuring apparatus while changing the sampling time. The output value, that is, the optical density increases in proportion to the sampling time.
次に、過塩素酸銀に混合する過塩素酸銀以外の銀塩の種類による感度の相違を、濃度５ｐｐｍのシランについて過塩素酸銀だけを使用した場合の感度と比較調査したところ表１のように硝酸銀を混入した場合の１．６倍が最小で、酸化銀を混入した場合には最大５．６倍というようにいずれの場合にも感度の向上が見られた。 Next, the difference in sensitivity depending on the type of silver salt other than silver perchlorate mixed with silver perchlorate was compared with the sensitivity when only silver perchlorate was used for silane having a concentration of 5 ppm. Thus, the improvement in sensitivity was observed in any case such that 1.6 times the minimum when silver nitrate was mixed and the maximum 5.6 times when silver oxide was mixed.
〔表１〕
銀塩の種類 相対感度
過塩素酸銀のみ 1.0
過塩素酸銀に硝酸銀を混入 3.9
過塩素酸銀に酢酸銀を混入 1.7
過塩素酸銀に乳酸銀を混入 3.2
過塩素酸銀に硫酸銀を混入 1.6
過塩素酸銀にフッ化銀を混入 3.5
過塩素酸銀にホウフッ化銀を混入 2.7
過塩素酸銀にTFMS銀を混入 4.7
過塩素酸銀にPTS銀を混入 4.9
過塩素酸銀に酸化銀を混入 5.6
[Table 1]
Type of silver salt Relative sensitivity Silver perchlorate only 1.0
Silver nitrate mixed with silver perchlorate 3.9
Silver perchlorate mixed with silver acetate 1.7
Silver lactate mixed with silver perchlorate 3.2
Silver sulfate mixed with silver perchlorate 1.6
Silver fluoride mixed with silver perchlorate 3.5
Silver borofluoride mixed in silver perchlorate 2.7
TFMS silver mixed in silver perchlorate 4.7
PTS silver mixed in silver perchlorate 4.9
Silver oxide mixed with silver perchlorate 5.6
さらにシランを含有しない標準エアだけを吸引させた後、規定濃度のシランを含む標準ガスを一定時間吸引させて測定した場合、図３に示したように標準エアを連続３０分程度吸引させた程度では検知材の光学濃度差は略一定であった。なお、参考のため、標準エアを６０分まで吸引させて同様に検出感度を調査したところ、図中点線で示したように最大で６パーセント低下したが、エチレングリコールを使用した場合よりも感度の低下は少なかった。 Furthermore, after sucking only standard air containing no silane, and measuring by sucking a standard gas containing a prescribed concentration of silane for a certain period of time, the standard air was sucked continuously for about 30 minutes as shown in FIG. Then, the optical density difference of the detection material was substantially constant. For reference, when standard air was sucked up to 60 minutes and the detection sensitivity was investigated in the same manner, the sensitivity decreased by a maximum of 6 percent as shown by the dotted line in the figure, but the sensitivity was lower than when ethylene glycol was used. There was little decline.
なお、担持させるブタンジオールの量と感度との関係をシランガスの濃度を一定にして調べたところ、図４に示したようにテープ上の担持量が４ｇ／平方メートル以上であれば担持量とともに感度が向上するものの、１２ｇ／平方メートル以上になると目詰まりを起こして通気性の減少し、感度が低下する。 When the relationship between the amount of butanediol to be supported and the sensitivity was examined with the silane gas concentration kept constant, as shown in FIG. 4, if the supported amount on the tape was 4 g / square meter or more, the sensitivity was increased with the supported amount. Although improved, if it exceeds 12 g / square meter, clogging occurs, air permeability decreases, and sensitivity decreases.
また、上述の実施例においては過塩素酸銀に対して、硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、及び酸化銀のいずれか１種類だけを混入しているが、硝酸銀、酢酸銀、乳酸銀、硫酸銀、フッ化銀、ホウフッ化銀、トリフルオロメタンスルホン酸銀、パラトルエンスルホン酸銀、及び酸化銀の複数種を混入しても過塩素酸銀を単独で使用する場合よりも感度が向上した。 Further, in the above-described embodiments, silver nitrate, silver acetate, silver lactate, silver sulfate, silver fluoride, silver borofluoride, silver trifluoromethanesulfonate, silver paratoluenesulfonate, and silver oxide with respect to silver perchlorate Any one of the above is mixed, but silver nitrate, silver acetate, silver lactate, silver sulfate, silver fluoride, silver borofluoride, silver trifluoromethanesulfonate, silver paratoluenesulfonate, and silver oxide Even if it mixed, the sensitivity improved compared with the case of using silver perchlorate alone.
１ ガス吸引部 ２ テ−プ ６ 測定ヘッド部 ８ 発光素子 ９ 受光素子 １０ 被検ガスの導入口
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| JP2793077B2 (en) * | 1992-04-21 | 1998-09-03 | 理研計器株式会社 | Tape for hydride gas detection |
| JP2793086B2 (en) * | 1992-07-02 | 1998-09-03 | 理研計器株式会社 | Tape for hydride gas detection |
| JP2883253B2 (en) * | 1992-12-18 | 1999-04-19 | 理研計器株式会社 | Silane gas detection tape |
| JP3259949B2 (en) * | 1997-02-24 | 2002-02-25 | 理研計器株式会社 | Hydride gas detection paper |
| JP2003121366A (en) * | 2001-10-11 | 2003-04-23 | Riken Keiki Co Ltd | Gas-detecting material |
| JP2003149100A (en) * | 2001-11-12 | 2003-05-21 | Riken Keiki Co Ltd | Filter for removing disturbance gas for gas detecting apparatus |
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