JP4929800B2 - Actuator - Google Patents

Description

  The present invention relates to an actuator that moves various products, for example, in manufacturing or inspection, and more particularly to prevention of dust generation of an actuator used in manufacturing or inspection of precision parts such as semiconductors.

  Such an actuator includes a linear motion guide device disposed in an elongated rectangular housing (housing), a moving body that reciprocates while being guided by the linear motion guide device, a reciprocating motion of the mobile body, and a predetermined amount. And a driving device for driving a positioning mechanism (for example, a ball screw mechanism or the like) for stopping at this position. The linear motion guide device is provided with a guide rail that extends along the longitudinal direction of the housing and a slider that can reciprocate along the guide rail.

  For example, in FIGS. 5A to 5C and FIG. 6, two linear motion guide devices (two guide rails 4) are arranged, and one moving body 2 is attached to the two linear motion guide devices. As an example, a configuration of an actuator B to which a ball screw mechanism is applied as a positioning mechanism of the moving body 2 is shown. FIG. 6 shows a configuration example of the entire actuator B. In FIG. 6, the configurations of the linear motion guide device and the positioning mechanism (ball screw mechanism) are omitted. In such an actuator B, the ball screw mechanism includes a screw shaft (not shown) extending in parallel along the extending direction of the guide rail 4 between two guide rails 4 and a ball nut as a feed screw. (Not shown), and the screw shaft is rotated by a driving device (for example, a motor) 6. In addition, the outer peripheral surface of the screw shaft and the inner peripheral surface of the ball nut are provided with spiral ball grooves (not shown) that face each other, and are formed by the ball grooves of both the screw shaft and the ball nut. In a spiral rolling space (not shown), a plurality of balls (not shown) are arranged so as to roll freely. The ball nut is fixed to the moving body 2 via a bracket (not shown), and the moving body 2 is fixed to the slider 8 of the linear motion guide device.

  According to such a ball screw mechanism, when the screw shaft is rotated by the motor 6, the rotational motion at this time is transmitted to the plurality of balls, and the plurality of balls circulate along the spiral rolling space. The ball nut can be reciprocated along the screw shaft. As a result, the movable body 2 fixed to the ball nut can be reciprocated along the guide rail 4 (screw shaft) via the slider 8, and the motor 6 is stopped to move the movable body 2 to a predetermined position. Can be stopped.

In addition, the housing 10 is provided with a slit (opening) 12 that forms a moving path of the moving body 2 at an upper portion thereof (upper portion in FIG. 5A). In the configurations shown in FIGS. 5A to 5C and FIG. 6, the housing 10 includes, for example, an upper cover 10 s, a bottom cover 10 t, a pair of side surface covers 10 u, and a pair of end covers 10 v. The upper cover 10s, the side surface cover 10u, and the end cover 10v constitute a slit 12.
In this case, the upper cover 10s of the housing 10 has a width (distance in the direction of the arrow w in FIG. 6) that is a predetermined width (a distance indicated by w in FIG. 6) of the entire housing 10 (rectangular housing). The side surface cover 10u is configured so that one end side thereof (the upper cover 10s side (upper side in FIG. 5A)) is set along the upper cover 10s toward the upper cover 10s side. It is bent at an angle. Further, the end cover 10v is provided continuously at both ends in the longitudinal direction (left and right direction in FIG. 5A) of the upper cover 10s and the side cover 10u.

  In such a configuration, both end portions in the width direction (arrow w direction in FIG. 6) of the upper cover 10s, both end portions in the width direction (arrow w direction in FIG. 6) of the side surface cover 10u, and the length of the end cover 10v. A slit 12 is formed as an opening having a predetermined size surrounded by both ends in the direction (left and right direction in FIG. 5A) (FIG. 6). The bottom cover 10t has both end portions in the longitudinal direction (left-right direction in FIG. 5A) continuous with the end cover 10v, and both end portions in the width direction (arrow w direction in FIG. 6) are side portions. It is provided continuously with the cover 10u.

The moving body 2 has a predetermined length (a distance in the left-right direction in FIG. 5A) and a predetermined width (the upper and lower parts in FIG. ), And a convex portion 2a protruding at a predetermined height (the vertical distance in FIG. 5A) is substantially above the slider 8 of each guide rail 4 (upward in FIG. 5A). ) Position.
In this case, the movable body 2 has a meat at the bottom of the housing 10 (the bottom cover 10t (the lower portion of FIG. 5A)) so that the convex portion 2a protrudes from the slit 12 to the outside of the housing 10. The height is set together with the guide rail 4 and the slider 8 of the linear guide device according to the thickness (FIG. 5A). As a result, the movable body 2 protrudes from the slit 12 to the outside of the housing 10 (upper part of FIG. 5A) and contacts the housing 10 (upper cover 10s and side surface cover 10u). It can reciprocate along the guide rail 4 without. The movable body 2 is formed so that the upper surface of the convex portion 2a is a flat surface. For example, a semiconductor wafer is mounted on a work (not shown) attached to the flat surface (work attachment surface). Such as inspection can be performed by mounting the above.

  By the way, as described above, if the slit 12 is provided only on the upper surface of the housing 10 (the upper surface in FIG. 5A), the inside of the actuator B is always open to the outside by the slit 12. As a result, dust enters the inside of the actuator B from the outside, and dust is scattered from the inside of the actuator B to the outside.

  As a countermeasure for preventing such intrusion and scattering of dust, for example, Patent Document 1 shows an example of a configuration of an actuator provided with a movable seal belt that closes an opening by a slit. For example, in the configuration shown in FIGS. 5A to 5C and FIG. 6, the actuator B has a total of two at the top and bottom at both ends in the moving direction of the moving body 2 (left and right direction in FIG. 5A). Four pulleys 14 are rotatably provided via bearings (not shown). A slit 12 having a predetermined width and a predetermined length is provided between the pulley 14 and the movable body 2 so as to span the slit 12. The opening by is closed. In this case, one end of the seal belt 16 is fixed to one end side (the right side in FIG. 5A) of the moving body 2, and the other end is passed through the pulley 14 on one end side (the right side in FIG. 5A). B is folded at one end side (right side in FIG. 5A), reaches the other end side (left side in FIG. 5A) of the actuator B, and further pulley on the other end side (left side in FIG. 5A) 14, it is folded again and fixed to the other end side (left side of FIG. 5A) of the moving body 2.

In this case, the housing 10 is provided with a through hole (seal belt accommodation hole) 18 for accommodating the seal belt 16 at the bottom thereof (the bottom cover 10t (the lower portion of FIG. 5A)). . In the configuration shown in FIG. 5A, as an example, the seal belt accommodating hole 18 has a length from the pulley 14 on one end side (the lower right side in FIG. 3A) to the other end side (FIG. 5A). The lower left side) is configured as a square hole having a predetermined length substantially the same as the distance to the pulley 14 and having a predetermined size in which the inner peripheral portion does not contact the seal belt 16.
5A to 5C and FIG. 6, the actuator B is provided with two slits 12 according to the number (two) of the convex portions 2 a of the moving body 2. In addition, two pulleys 14, two seal belts 16, and two seal belt accommodating holes 18 are also provided.

  Thus, the seal belt 16 forms a movable loop, and moves in the same movement direction as the moving body 2 while closing the opening by the slit 12 while being guided by the pulley 14 as the moving body 2 moves. As a result, the intrusion of dust from the outside to the inside of the actuator B and the scattering of dust from the inside to the outside can be prevented. In the configuration shown in FIGS. 5A to 5C and FIG. 6, the upper cover 10s and the side surface cover 10u that form the slits 12 are arranged on the opposing portions (in FIG. 5B, the upper cover 10s). A pair of seal grooves 20s, 20u are formed along the moving direction of the moving body 2 (the left-right direction in FIGS. 5B and 5C). The seal belt 16 is positioned so that both side edges (the upper edge and the lower edge in FIG. 5B) are accommodated in the seal grooves 20s and 20u. In the direction of movement (the direction in which the seal grooves 20s and 20u are formed (the left-right direction in FIGS. 5B and 5C)), and the sealing performance is improved.

  5 (a) to 5 (c) and FIG. 6, the actuator B is connected to a suction mechanism (not shown), the inside air of the actuator B is sucked and decompressed, and the inside of the actuator B is negative. A suction port 32 for maintaining the pressure is provided in the housing 10. In this way, even when the inside of the actuator B is kept at a negative pressure by the suction mechanism, dust is prevented from being scattered from the inside of the actuator B to the outside. In this case, as an example, the housing 10 has one end side (motor 6 side (left side in FIG. 5A)) in the longitudinal direction (left and right direction in FIG. 5A), and the other end side ( A suction port 32 of a connecting member (for example, a connecting tube or a connecting tube) connected to a suction mechanism (not shown) at two locations on the side of the side opposite to the motor 6 (the right side in FIG. 5A). And a suction mechanism (not shown) sucks the inside air of the actuator B from the two suction ports 32.

  As an example, the housing 10 has one end side (the motor 6 side (left side of FIG. 5A)) of the end cover 10v (the left end portion of FIG. 5A) and one side (FIG. 5). 5 (b) (on the lower side) of the side surface cover 10u (the right end of FIG. 5 (b)) has an inner diameter of a predetermined size inside the housing 10 (FIG. 5 (a)). A through hole 10a penetrating from the left side and the upper side of FIG. 5 (b) to the outside (the right side of FIG. 5 (a) and the lower side of FIG. 5 (b)) is formed. An annular member (through hole side connecting member) 70 for connection with a suction mechanism (not shown) is provided. Further, an annular member (suction mechanism side connection member) 72 for connection to the through hole 10a is provided at the distal end portion of the connecting member (suction tube 30) connected to a suction mechanism (not shown).

In such a configuration, for example, a predetermined spiral groove (female screw portion (not shown)) is formed in the outer peripheral portion of the through-hole side connecting member 70, and the spiral shape is formed in the inner peripheral portion of the suction mechanism side connecting member 72. A predetermined spiral groove (male thread part (not shown)) to be screwed with the groove (female thread part) is formed, and both the spiral grooves (female thread part and male thread part) are screwed together, thereby housing 10 (end part) The through hole 10a of the cover 10v and the side surface cover 10u) and the suction tube 30 of the suction mechanism (not shown) can be connected and coupled. Thereby, the suction port 32 opened in the housing 10 is configured.
FIG. 6 shows an example of the configuration of the entire actuator B. In FIG. 6, the suction tube 30 and the suction port 32 are not shown.

Further, the housing 10 is provided with covers (seal belt covers) C3 that cover the seal belt 16 at both ends in the moving direction of the seal belt 16 (left and right direction in FIG. 5A). In this case, the seal belt cover C3 is provided above the pulley 14 on the one end side (upper right side in FIG. 5A) of the housing 10 (upper side in FIG. 5A) and on the other end side (FIG. 5A). Is located above the pulley 14 (upper side in FIG. 5A). Further, the seal belt cover C3 has a width of the pulley 14 (a vertical distance in FIG. 5B) and a diameter (length) (a horizontal distance in FIG. 5B, FIGS. 5A and 5C). ) Is a flat plate having a rectangular shape slightly larger than the vertical distance). Further, the inner surface of the seal belt cover C3 (the lower surface in FIGS. 5A and 5C) is the outer surface of the seal belt 16 (the surface on which the seal belt 16 is exposed to the outside of the actuator B (FIG. 5). (the upper surfaces of (a) and (c))) are fixed to the end cover 10v of the housing 10 so as to face the seal belt 16 with a predetermined gap s2 between them.
In the configurations shown in FIGS. 5A to 5C and FIG. 6, the actuator B has a total of one at each end of the moving direction of each seal belt 16 (left and right direction in FIG. 5A). Four seal belt covers C3 are provided.

  According to such a configuration, when the inside air of the actuator B is sucked from the suction port 32 by the suction mechanism (not shown), the outside air sucked from the outside to the inside of the actuator B (air (atmosphere) where the actuator B is installed) Flows in a path from the suction port 32 through the suction tube 30 to a suction mechanism (not shown), and is discharged to the outside of the actuator B. As a result, it is possible to prevent dust from escaping from the inside of the actuator B to the outside, and it is possible to enhance the effect of preventing the generation of dust from the inside of the actuator B.

However, especially when the moving body 2 needs to be moved at a high speed, dust may be slightly scattered from the inside of the actuator B to the outside, and a very high cleanliness (cleanness) is required. Can be used sufficiently under certain special conditions (e.g., in clean rooms where it is necessary to keep the dust-free state as much as possible to manufacture and inspect precision devices such as semiconductors). There is a risk of disappearing.
Japanese Utility Model Publication No. 7-7837

  The present invention has been made to solve such problems, and an object thereof is to provide an actuator excellent in the effect of preventing dust generation from the inside.

In order to achieve such an object, the actuator of the present invention includes a moving body that reciprocates along a positioning mechanism disposed in the housing and stops at a predetermined position. A movable seal belt drawn from the inside is provided to close the slit of the housing forming the moving path, and the inside is connected to a suction mechanism for sucking the inside air and kept at a negative pressure. In such a configuration, the seal belt has a fine gap between a pair of seal grooves formed in the housing along the moving direction of the moving body on the upper surface of both side edges of the portion closing the slit, and the both side edges. The lower surface of the belt is positioned in contact with the seal groove, and at both ends of the slit, the seal belt is pulled out from the inside and the direction of movement is changed from the vertical direction to the horizontal direction, and the vicinity of the change portion In the moving part where the seal belt moves in the moving direction of the moving body from the conversion part , a cover is provided to cover each part that closes the slit, and the cover prevents dust from being spilled out by pulling out the seal belt. to prevent, spaced the small gap between the sealing belt, the said sealing belt at said conversion unit and the mobile unit slit It is whole facing portion for closing the.
In this case, the cover may be provided integrally with the housing.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the actuator excellent in the effect which prevents the dust generation from an inside by providing the seal belt which improved the venturi function between seal belts.

  Hereinafter, an actuator according to an embodiment of the present invention will be described with reference to the accompanying drawings. In this case, the same or similar components as those of the above-described conventional actuator B (FIGS. 5A to 5C and FIG. 6) are denoted by the same reference numerals in the drawings, and the description thereof is omitted. .

  FIGS. 1A and 1B show an actuator A according to the first embodiment of the present invention. The actuator A includes a linear motion guide device in which a slider 8 moves along a guide rail 4 disposed in the housing 10, a moving body 2 that reciprocates while being guided by the linear motion guide device, and the movement. A positioning mechanism for reciprocating the body 2 and stopping it at a predetermined position, and a driving device for driving the positioning mechanism are provided (see FIGS. 5A to 5C and FIG. 6). In this case, as an example, the housing 10 of the actuator A is formed in an elongated rectangular shape having a predetermined space in which a linear motion guide device, a positioning mechanism, and a drive device can be disposed (see FIG. reference).

  In this embodiment, two guide rails 4 extend along the longitudinal direction of the housing 10 as a linear guide device, and the guide rails 4 can reciprocate along the guide rails 4. A total of four sliders 8 are provided. In this case, as an example, the actuator A is fixed to the two sliders 8 of each guide rail 4 and is provided with one moving body 2 in a state of straddling the two guide rails 4 via the slider 8. (See FIG. 5 (a) and FIG. 6).

  In addition, the number of the guide rails 4 provided as the linear motion guide device is not particularly limited. For example, only one guide rail 4 or three or more guide rails may be provided. Further, the number of sliders 8 provided on each guide rail 4 is not particularly limited, and may be one, for example, or may be three or more. Further, when a plurality of guide rails 4 are provided, the number of sliders 8 provided on each guide rail 4 may not be the same for all the guide rails 4. In addition, the number of the moving bodies 2 fixed to the slider 8 is not specifically limited, For example, one may be sufficient for each slider 8, and two or more may be sufficient as it. When a plurality of sliders 8 are provided, the number of moving bodies 2 fixed to each slider 8 may not be the same for all sliders 8.

  Furthermore, the linear motion guide device only needs to be a mechanism capable of reciprocating the slider 8 along the guide rail 4, and its type is not particularly limited. For example, as a linear motion guide device, a linear motion bearing provided with a plurality of rolling elements (balls and rollers) capable of rolling in a raceway groove, a cam follower and a roller follower, a hydrostatic bearing such as a slide bearing and an air bearing, etc. Can be selected and applied.

  In the present embodiment, as an example, a ball screw mechanism (not shown) is applied to the positioning mechanism, and a driving device for driving (rotating) a screw shaft (not shown) of the ball screw mechanism. The motor 6 is applied. Thereby, the moving body 2 is reciprocated and positioned along the guide rail 4 (screw shaft). The positioning mechanism is not particularly limited as long as the moving body 2 can be reciprocated and stopped at a predetermined position. For example, a linear motor mechanism or a belt mechanism may be used in addition to the ball screw mechanism. It can also be applied.

  In the actuator A, a slit (opening) 12 that forms a moving path of the moving body 2 is formed in an upper portion of the housing 10 (upper portion in FIG. 1B). In the present embodiment, as an example, two slits 12 are formed so as to form movement paths of the two convex portions 2a of the moving body 2 (see FIG. 6). Note that the number of slits 12 formed in the housing 10 is not particularly limited because it is arbitrarily set according to the number of moving bodies 2 (convex portions 2a), the number of moving paths thereof, and the like.

  In this case, the actuator A is provided with a movable seal belt 16 for closing the slit 12. In this embodiment, as an example, a total of two seal belts 16 are provided for each of the slits 12 in order to close the openings by the two slits 12 (see FIG. 6). In addition, since the number of the seal belts 16 provided in the actuator A is arbitrarily set according to the number of openings by the slits 12, it is not particularly limited here. Further, each seal belt 16 may be constituted by a single belt material having a predetermined material, length and width, or may be constituted by connecting a plurality of belt materials.

  The actuator A is provided with a suction port 32 in the housing 10 for sucking the inside air. In the present embodiment, as an example, the actuator A includes two portions, one end of the housing 10 in the longitudinal direction (on the motor 6 side) and the other side (on the side opposite to the motor 6). The suction ports 32 are provided one by one (two in total) (see FIG. 5A).

In this case, the suction port 32 is connected to a predetermined suction mechanism (not shown) via a connecting member (suction tube 30). By sucking the internal air of the actuator A by the suction mechanism, the actuator While the pressure inside A can be reduced, it can be maintained at a negative pressure. The suction mechanism (not shown) is not particularly limited as long as it is a mechanism capable of continuously or intermittently sucking the inside air from the inside of the actuator A, and examples of the suction mechanism include various suction devices and suction devices. A pump or the like can be applied.
Further, the suction port 32 may be always open, or may be switched between an open state and a closed state by a timer or the like at a predetermined interval or a predetermined time. In addition, as the through-hole side connection member 70 and the suction mechanism side connection member 72, for example, various joints (partition wall unions) may be applied.

Further, a cover (seal belt cover) C1 that covers a part of the seal belt 16 is provided on both ends of the slit of the housing 10 (FIGS. 1A and 1B show the slit 12 as an example. The seal belt cover C1 provided on the right end side of FIG. In this case, the seal belt cover C1 faces the seal belt with a predetermined gap s1 between the seal belt 16 and the seal belt 16. That is, the seal belt cover C1 has the inner surface (the lower surface in FIG. 1B) C1a at the both ends of the slit 12 of the housing 10 and the outer surface of the seal belt 16 (the seal belt 16 is outside the actuator A). The seal belt 16 is positioned so as to cover a predetermined range with a predetermined gap s1 between the exposed surface (upper surface in FIG. 1B) 16a.
Note that the size (width (the vertical distance in FIG. 1A) and height (the vertical distance in FIG. 1B)) of the gap s1 is, for example, the size of the housing 10 and the slit 12. Since it is arbitrarily set according to the width and length of the seal belt 16, it is not particularly limited here.

  In this embodiment, as an example, a total of four seal belt covers C1 are provided, one at each end of the two slits 12 (both ends in the moving direction of the moving body 2). 1A and 1B show only the configuration of the seal belt cover C1 provided on one end side of one slit 12, the other end side of the one slit 12 and the other slit. A seal belt cover C1 having the same configuration is also provided on each of both end sides of the twelve. For this reason, in the following, the configuration will be described taking the seal belt cover C1 (the seal belt cover C1 provided on one end side of the one slit 12) shown in FIGS. 1A and 1B as an example.

  The seal belt cover C1 has a flat plate shape, and its width (the vertical distance in FIG. 1A) is slightly larger than the width of the pulley 14 (the same distance in the same direction). The length (the distance in the left-right direction in FIGS. 1A and 1B) is a rectangular shape that is larger (longer) by a predetermined distance than the diameter (length) of the pulley 14 (the distance in the same direction in FIG. 1). Configured. In the configuration shown in FIGS. 1A and 1B, the seal belt cover C1 is configured as one flat plate having the size described above as an example. For example, the configuration similar to the conventional configuration described above is used. A cover structure of a predetermined size may be connected to the seal belt cover C3, and the entire size may be configured to have the same size (width and length) as the seal belt cover C1.

Here, in the configuration shown in FIGS. 1A and 1B, for example, when the seal belt 16 is pulled out from the inside of the actuator A as the moving body 2 moves, the seal belt 16 is The moving direction is one end side of the slit 12 (right end side in FIGS. 1A and 1B), from the vertical direction (vertical direction in FIG. 1B) to the horizontal direction (moving direction of the moving body 2 (FIG. 1). (b) in the left-right direction)) by the pulley 14 (see FIG. 1B). In this case, the seal belt cover C1 is a portion (change) in which the seal belt 16 changes its direction of movement from the vertical direction (up and down direction in FIG. 1B) to the horizontal direction (left and right direction in FIG. 1B). Covers the entire part 16r).
Further, the seal belt cover C1 includes a part where the seal belt 16 moves by a predetermined distance in the moving direction of the moving body 2 from the conversion part 16r in addition to the conversion part 16r (for example, a predetermined distance to the left side of FIG. 1B). The entire moving part (moving part 16g) is also covered.

In another way, when the seal belt 16 is pulled in from the outside of the actuator A as the moving body 2 moves, the seal belt 16 moves in the direction of one end of the slit 12 (see FIG. 1 (a) and (b) on the right end) from the horizontal direction (moving direction of the moving body 2 (left and right direction in FIG. 1B)) to the vertical direction (up and down direction in FIG. 1B) 14 (see FIG. 1B). In this case, the seal belt cover C1 has a portion (change) in which the seal belt 16 changes its direction of movement from the horizontal direction (left-right direction in FIG. 1B) to the vertical direction (up-down direction in FIG. 1B). Covers the entire part 16r).
Further, the seal belt cover C1 has a portion where the seal belt 16 moves by a predetermined distance along the moving direction of the moving body 2 to the conversion portion 16r in addition to the conversion portion 16r (for example, to the right side of FIG. 1B). The entire portion that moves by a predetermined distance (moving portion 16g) is also covered.

  The size (width (distance in the vertical direction in FIG. 1B) and length (distance in the horizontal direction in FIG. 1B)) of the conversion part 16r and the moving part 16g are, for example, the housing 10 and the slit. Since it is arbitrarily set according to the size of 12 and the width and length of the seal belt 16, it is not particularly limited here. In the configuration shown in FIGS. 1A and 1B, the seal belt cover C1 covers the seal belt 16 within the range of the conversion portion 16r and the moving portion 16g, and both ends of the slit 12 (moving body). 2 is closed in a predetermined range (a range corresponding to the size of the moving portion 16g).

Further, the seal belt cover C1 is configured so that the outer surface of the upper cover 10s, the side surface cover 10u, and the end cover 10v of the housing 10 (see FIG. 1A) so as to cover the seal belt 16 in the range of the conversion portion 16r and the moving portion 16g. ) Is fixed at a predetermined position on the surface). The method for fixing the seal belt cover C1 is not particularly limited. For example, the seal belt cover C1 and the covers 10s, 10u, and 10v of the housing 10 are provided with a predetermined engaging portion that has an uneven shape that engages with each other. It may be provided and fixed by fitting the engaging portion. In addition to such fitting and fixing, the seal belt cover C1 may be joined by, for example, an adhesive or fastened by a fastening member (such as a bolt). Further, for example, the upper cover 10s, the side surface cover 10u, and the end cover 10v of the housing 10 may be fitted with a predetermined attachment hole having an outline substantially along the outline of the seal belt cover C1.
The seal belt cover C1 has, for example, a flat plate shape whose cross-sectional shape is a rectangle or a predetermined convex portion that fits into the slit 12 of the housing 10 (the lower surface in FIG. 1B). What is necessary is just to comprise in the flat plate shape etc. in which the cross-sectional shape provided in this predetermined position comprises T shape.

  According to the above configuration, when the inside air of the actuator A is sucked from the suction port 32 by the suction mechanism (not shown), suction pressure is applied between the seal belt cover C1 and the seal belt 16 (gap s1). Outside air (air (atmosphere) where the actuator A is installed) is sucked into the actuator A from the gap s1. At this time, since the gap s1 serves as a throttle, the atmosphere (intake air) sucked into the actuator A has a higher flow velocity when passing through the gap s1. That is, a so-called Venturi effect acts on the intake air, and the atmosphere of the actuator A can be strongly sucked from the outside to the inside of the actuator A.

  In the present embodiment, the seal belt cover C1 covers a predetermined range (the conversion portion 16r and the moving portion 16g) of the seal belt 16 with a gap s1 between them, so that the seal belt cover C1 and the seal belt 16 The gap (gap s1) has a length (distance in the left-right direction in FIG. 1 (b)) in addition to the length (distance in the same direction in FIG. (Distance in the same direction in the figure). For this reason, the length of the gap s1 can be secured sufficiently, and when the atmosphere (intake air) sucked into the actuator A passes through the gap s1, the venturi effect acting on the intake air can be increased. it can.

  Here, for example, in the conventional configuration shown in FIGS. 5A to 5C, the seal belt 16 has both side edges (see FIG. 1) in the range of the moving portion 16g (see FIGS. 1A and 1B). The upper and lower surfaces (outer surface 16a and the opposite surface) of 5 (b) have a small gap of about s1 or less between the seal grooves 20s and 20u. Or there is no gap. On the other hand, in the range of the conversion portion 16r (see FIGS. 1A and 1B), there is a minute gap (gap s2) between the upper surface (outer surface 16a) of the seal belt 16 and the seal belt cover C3. I only have. For this reason, in such a conventional configuration, particularly when the moving body 2 moves at a high speed, dust is slightly scattered from the gap s2 at the boundary portion between the slit 12 and the seal belt cover C3, and the strict clean As a result of the test, it was found that it was not enough to meet the demand of the degree.

  Therefore, in the actuator A according to the present embodiment, in addition to the range of the conversion portion 16r (extending further from the range of the conversion portion 16r), both side edges of the seal belt 16 (the upper edge and the lower edge in FIG. The upper and lower surfaces (outer surface 16a and opposite surface (inner surface) 16b) of the side edge) have a minute gap of about s1 or less between the seal grooves 20s and 20u, or there is no gap. Even in the range of the moving portion 16g in the state, the upper surface (outer surface 16a) of the seal belt 16 has a minute gap (gap s1) between the seal belt cover C1. In FIG. 1B, as an example, the upper surface (outer surface 16a) of the seal belt 16 has a minute gap (gap s1) between the seal groove 20u (20s), and the lower surface of the seal belt 16 Although the configuration in which the (inner surface 16b) is in contact with the seal groove 20u (20s) (there is no gap between the seal groove 20u (20s)), the seal belt 16 and the seal grooves 20s, 20u are shown. However, the positional relationship is not limited to this.

  Thereby, for example, even when the moving body 2 moves at a high speed, it is possible to effectively prevent dust from directly escaping from the boundary portion between the slit 12 and the seal belt cover C1. became. That is, the dust in the actuator A passes through the seal belt 16 and passes through the switching portion 16r, and further passes through the minute gap (gap s1) along the moving portion 16g, so that the boundary between the slit 12 and the seal belt cover C1. Effectively and reliably preventing dust from directly escaping from the boundary part, together with the suction of inside air by a suction mechanism (not shown). Became possible.

  As a result, it is possible to reliably prevent dust from escaping from the inside of the actuator A, and it is possible to significantly improve the effect of preventing the generation of dust from the inside of the actuator A. Thereby, for example, in order to manufacture and inspect precision devices such as semiconductors, the actuator A can be used even in a clean room that needs to be kept in a dustless state.

  Note that the shape, size, number, and the like of the seal belt cover are not particularly limited because they are arbitrarily set according to, for example, the size of the housing 10 and the number of the seal belt 16 and the slit 12. For example, in addition to the seal belt C1 according to this embodiment described above, the second embodiment shown in FIGS. 2A and 2B, the third embodiment shown in FIGS. 3A and 3B, and FIG. The seal belt cover can be configured in various shapes, sizes, and numbers as in the fourth embodiment.

  For example, in the second embodiment of the present invention shown in FIGS. 2 (a) and 2 (b), the cover (seal belt cover) C2 covering the seal belt 16 is, for example, both ends of the slit 12 (the movement of the moving body 2). There are two in total, one at each end of the direction. 2A and 2B show only the configuration of the seal belt cover C2 provided on one end side of the slit 12, the seal belt cover C2 having the same configuration is also provided on the other end side of the slit 12. One is provided. Therefore, in the following, the configuration will be described using the seal belt cover C2 (the seal belt cover C2 provided on one end side of the slit 12) shown in FIGS. 2 (a) and 2 (b) as an example.

  The width of the seal belt cover C2 (the distance in the vertical direction in FIG. 2A) is substantially the same as the width of the end cover 10v of the housing 10, and the length (the horizontal direction in FIG. 2A). Is formed in a flat plate shape that is slightly larger than the length from the switching portion 16r to the moving portion 16g of the seal belt 16. Further, the seal belt cover C2 has a predetermined range of the inner surface (the lower surface in FIG. 2B) C2a (a range corresponding to the size of the conversion portion 16r and the moving portion 16g) of the two seal belts 16. It is positioned so as to face the seal belt 16 in a state where a predetermined gap s1 is left between the outer surface (the upper surface in FIG. 2B) 16a. The size (width (the vertical distance in FIG. 2A) and height (the vertical distance in FIG. 2B)) of the gap s1 is, for example, the size of the housing 10 and the slit 12. Since it is arbitrarily set according to the width and length of the seal belt 16, it is not particularly limited here.

With such a configuration, the seal belt cover C2 has a predetermined range of the two seal belts 16 (range of the conversion portion 16r and the moving portion 16g) on one end side of the slit 12 of the housing 10 with a gap s1 therebetween. In addition to covering, the entire end portion on one end side of the upper part of the housing 10 including the predetermined range is covered (FIGS. 2A and 2B). Further, the seal belt cover C2 closes the opening at one end side of the slit 12 within a predetermined range (a range corresponding to the size of the moving portion 16g).
Further, the seal belt cover C2 covers the seal belt 16 in the range of the conversion portion 16r and the moving portion 16g, and is continuous with the end cover 10v at a predetermined angle (substantially a right angle in FIG. 2B). The upper cover 10s of the housing 10 and the side surface cover 10u are fixed at predetermined positions on the outer surface (the surface shown in FIG. 2A). The method for fixing the seal belt cover C2 is not particularly limited. For example, the seal belt cover C2 may be bonded by an adhesive or may be fastened by a fastening member (such as a bolt). Further, for example, the upper cover 10s, the side surface cover 10u, and the end cover 10v of the housing 10 may be fitted with a predetermined attachment hole having an outline substantially along the outline of the seal belt cover C2.

In the configuration shown in FIGS. 2A and 2B, as an example, the seal belt cover C2 has a movable body 2 side (for example, the both ends in the width direction (vertical direction in FIG. 2A)). The corner portion in FIG. 2 (a) is cut out into a rectangular shape having a predetermined size. In this case, the corner portion has substantially the same length (distance in the same direction in FIG. 2) as the length of the moving portion 16g (distance in the left and right direction in FIG. 2A) and a predetermined width (in FIG. 2). It is cut out into a rectangular shape forming a distance in the vertical direction of (a). However, the seal belt cover C2 may be configured such that the corner portion does not cut out in this way, and the entire shape forms a rectangle having a predetermined size, for example.
Further, the seal belt cover C2 has, for example, a flat plate shape whose cross-sectional shape is a rectangle, or two predetermined convex portions that fit into the slits 12 of the housing 10 on the bottom surface (the lower side of FIG. 2B). It may be configured in a flat plate shape provided at a predetermined position on the surface.

  According to the configuration as described above, like the seal belt cover C1 according to the first embodiment described above, the seal belt cover C2 allows the predetermined range (the converting portion 16r and the moving portion 16g) of the seal belt 16 to pass through the gap s1. Therefore, the length between the seal belt cover C2 and the seal belt 16 (gap s1) (the distance in the left-right direction in FIG. 2B) is the length of the conversion portion 16r ( In addition to the distance in the same direction in the figure, the length of the moving portion 16g (distance in the same direction in the figure) is secured. For this reason, the length of the gap s1 can be secured sufficiently, and when the inside air of the actuator A is sucked from the suction port 32 by a suction mechanism (not shown), the atmosphere (intake) sucked into the inside of the actuator A is a gap. When passing through s1, the venturi effect acting on the intake air can be increased.

  As a result, it is possible to reliably prevent dust from escaping from the inside of the actuator A, and it is possible to significantly improve the effect of preventing the generation of dust from the inside of the actuator A. Thereby, for example, in order to manufacture and inspect precision devices such as semiconductors, the actuator A can be used even in a clean room that needs to be kept in a dustless state.

  In the third embodiment of the present invention shown in FIGS. 3 (a) and 3 (b) and the fourth embodiment of the present invention shown in FIG. 4, the housing 10 is provided with a seal belt 16 within a predetermined range (converting portion 16r). In this case, a seal belt cover C3 having the same configuration as the above-described conventional one is provided. In this case, the housing 10 has a total of four seal belt covers C3, one at each end in the moving direction of the two seal belts 16 (left and right directions in FIGS. 3A, 3B and 4). Each seal belt cover C3 has an inner surface (a lower surface in FIG. 3B) C3a between an outer surface of the seal belt 16 (an upper surface in FIG. 3B) 16a. It is positioned so as to face the seal belt 16 with a predetermined gap s1. 3A, 3B, and 4 show only the configuration of the seal belt cover C3 provided on one end side in the moving direction of one seal belt 16. FIG.

The seal belt cover C3 is fixed at a predetermined position on the outer surface (the surface shown in FIG. 3A) of the end cover 10v of the housing 10 so as to cover the seal belt 16 within the range of the conversion portion 16r. Has been. The method for fixing the seal belt cover C3 is not particularly limited. For example, the seal belt cover C3 may be joined by an adhesive or fastened by a fastening member (such as a bolt). Further, for example, the end cover 10v of the housing 10 may be fitted with a predetermined mounting hole having an inner outline substantially along the outline of the seal belt cover C3.
Further, the seal belt cover C3 has, for example, a flat plate shape whose cross-sectional shape is a rectangle or a predetermined convex portion that fits into a mounting hole of the end cover 10v of the housing 10 (see FIG. 3B). What is necessary is just to comprise in the flat plate shape etc. in which the cross-sectional shape provided in the predetermined position of the lower surface) comprises T shape.

In the third embodiment, in addition to the seal belt cover C3 that covers the seal belt 16 in the range of the conversion portion 16r, the upper portion of the housing 10 is used to cover the seal belt 16 in a predetermined range (range of the moving portion 16g). Predetermined protrusions (upper cover protrusion sd and side surface cover protrusion ud) are provided on the cover 10s and the side surface cover 10u.
In this case, the upper cover protrusion sd of the upper cover 10s and the side cover protrusion ud of the side cover 10u are configured as a seal belt cover integrated with the housing 10 (upper cover 10s and side cover 10u). A predetermined gap s1 is formed between the inner surface (the lower surface in FIG. 3B) uda (sda) and the outer surface (the upper surface in FIG. 3B) 16a of the seal belt 16. It is positioned so as to face the seal belt 16 in a vacant state. The size (width (the vertical distance in FIG. 3A) and height (the vertical distance in FIG. 3B)) of the gap s1 is, for example, the size of the housing 10 and the slit 12. Since it is arbitrarily set according to the width and length of the seal belt 16, it is not particularly limited here.

  In the present embodiment, the upper cover 10 s of the housing 10 has substantially the same length (distance in the same direction in the figure) as the length of the moving portion 16 g (distance in the left and right directions in FIGS. 3A and 3B). The protrusions (upper cover protrusions sd) respectively projecting by a predetermined distance (the vertical distance in FIG. 3A) in the direction of the pair of side surface covers 10u are the longitudinal directions (FIGS. 3A and 3A). A total of four are provided at both ends in the left-right direction of b), one for each of the pair of side surface covers 10u. 3 (a) and 3 (b) show one end of the upper cover 10s in the longitudinal direction (left and right directions of FIGS. 3 (a) and 3 (b)) (the right end of FIGS. 3 (a) and 3 (b)). ), Only the configuration of the upper cover protruding portion sd protruding in the direction of the side surface cover 10u (downward in FIGS. 3A and 3B) is shown.

  Further, the pair of side surface covers 10u of the housing 10 has substantially the same length (distance in the same direction in the figure) as the length of the moving part 16g (distance in the left and right direction in FIGS. 3A and 3B). The protrusions (side cover protrusions ud) protruding by a predetermined distance (the vertical distance in FIG. 3A) in the direction of the upper cover 10s are the longitudinal directions (FIGS. 3A and 3B). 4 in total, one at each end in the left and right direction). 3 (a) and 3 (b), the longitudinal direction of one side surface cover 10u (below in FIGS. 3 (a) and 3 (b)) (the left-right direction in FIGS. 3 (a) and 3 (b)). Only the configuration of the side surface cover protrusion ud protruding in the direction of the upper cover 10s is shown at one end (the right end in FIGS. 3A and 3B).

  In the present embodiment, the upper cover protruding portion sd and the side surface cover protruding portion ud are at substantially intermediate positions of the width of the moving portion 16g (the distance in the vertical direction in FIG. 3A) (see FIG. In a), the protruding distance (the vertical distance in FIG. 3A) is set so as to be in contact with each other along the lower end portion of the upper cover protruding portion sd and the upper end portion of the side surface cover protruding portion ud. It is configured to be set to a predetermined distance. According to such a configuration, the housing 10 includes the upper cover protruding portion sd of the upper cover 10s and the side surface cover protruding portions ud of the side surface cover 10u so that both ends of each slit 12 (both ends of the moving body 2 in the moving direction). Side), the seal belt 16 can be covered with a predetermined range (range of the moving portion 16g).

  In the configuration shown in FIGS. 3A and 3B, the contact portion between the upper cover protrusion sd and the side surface cover protrusion ud is, for example, the moving direction of the seal belt 16 (FIG. 3A ) and (b) in a straight line parallel to the horizontal direction). For example, a predetermined angle with respect to the moving direction of the seal belt 16 (left and right direction in FIGS. It may be configured to have a slanted line shape that is inclined at or may be configured to have a curved line shape or the like. Further, the upper cover protrusion sd and the side surface cover protrusion ud need only be able to cover the seal belt 16 in a predetermined range (range of the moving portion 16g). Since it is arbitrarily set according to the size of the housing 10 and the number of the seal belts 16 and the slits 12, there is no particular limitation here.

  In the present embodiment, the upper cover protruding portion sd of the upper cover 10s and the side surface cover protruding portion ud of the side surface cover 10u cover the seal belt 16 within the range of the moving portion 16g, and both end sides of the slit 12 The openings on both ends of the moving body 2 in the moving direction are closed with a predetermined range (a range corresponding to the size of the moving portion 16g). That is, in the present embodiment, the slit 12 of the housing 10 is configured as an opening having a predetermined size surrounded by the upper cover 10s, the side surface cover 10u, the upper cover protrusion sd, and the side surface cover protrusion ud. A predetermined range (a range corresponding to the size of the moving portion 16g) at both ends thereof is closed by the upper cover protruding portion sd and the side surface cover protruding portion ud.

  In addition, in the fourth embodiment of the present invention shown in FIG. 4, in addition to the seal belt cover C3 that covers the seal belt 16 in a predetermined range (range of the conversion portion 16r), the seal belt 16 is set in a predetermined range (of the moving portion 16g). A predetermined protrusion (upper cover protrusion sd) is provided on the upper cover 10 s of the housing 10. In this case, the upper cover protrusion sd of the upper cover 10s is configured as a seal belt cover integrated with the housing 10 (upper cover 10s), and the inner surface (the lower surface in FIG. 3B) sda. However, the seal belt 16 is positioned so as to face the seal belt 16 with a predetermined gap s1 formed between the seal belt 16 and the outer surface 16a (the upper surface in FIG. 3B). The size of the gap s1 (width (distance in the vertical direction in FIG. 4) and height (distance corresponding to the vertical direction in FIG. 3B)) is, for example, the size of the housing 10 and the slit 12 and the seal. Since it is arbitrarily set according to the width and length of the belt 16, it is not particularly limited here.

  That is, in the present embodiment, the housing 10 is configured by providing only the upper cover protrusion sd on the upper cover 10s and omitting the side cover protrusion ud (see FIG. 3A) of the side cover 10u described above. Has been. In this case, the upper cover 10s of the housing 10 has a direction (a distance in the same direction in FIG. 4) as the length of the moving portion 16g (a distance in the same direction in FIG. 4) and a direction of the pair of side surface covers 10u. Projections (upper cover projections sd) each projecting a predetermined distance (the distance in the vertical direction in FIG. 4) are provided at both ends in the longitudinal direction (left and right direction in FIG. 4) toward the pair of side surface covers 10u. A total of four are provided, one for each. 4 shows an upper portion protruding in the direction of one side (downward in FIG. 4) of the side surface cover 10u at one end (right end in FIG. 4) of the upper cover 10s in the longitudinal direction (left-right direction in FIG. 4). Only the structure of the cover protrusion sd is shown.

  In the present embodiment, the upper cover projecting portion sd has a predetermined projecting distance (the vertical distance in FIG. 4) so as to abut along the end portion (upper end portion in FIG. 4) of the side surface cover 10u. It is configured by setting the distance. According to such a configuration, the housing 10 has the upper cover protruding portion sd of the upper cover 10 s within the predetermined range (moving) on the both ends of each slit 12 (both ends in the moving direction of the moving body 2). Part 16g).

  In the present embodiment, the upper cover protruding portion sd of the upper cover 10s covers the seal belt 16 within the range of the moving portion 16g, and both ends of the slit 12 (both ends in the moving direction of the moving body 2). Are closed within a predetermined range (a range corresponding to the size of the moving portion 16g). In other words, in the present embodiment, the slit 12 of the housing 10 is configured as an opening having a predetermined size surrounded by the upper cover 10s, the side surface cover 10u, and the upper cover protruding portion sd, and predetermined slits at both ends thereof. A range (a range corresponding to the size of the moving portion 16g) is closed by the upper cover protruding portion sd.

In the present embodiment, the housing 10 is configured by providing only the upper cover protrusion sd on the upper cover 10s and omitting the side cover protrusion ud (see FIG. 3A) of the side cover 10u. The upper cover protrusion sd of the upper cover 10s may be omitted, and only the side surface cover protrusion ud may be provided on the side surface cover 10u.
In this case, the side surface cover 10u of the housing 10 has a predetermined length in the direction of the upper cover 10s with substantially the same length (distance in the same direction in FIG. 4) as the length of the moving part 16g (distance in the left and right direction in FIG. 4). There are a total of four protrusions (side cover protrusions ud) protruding by a distance (distance in the vertical direction in FIG. 4), one at each end in the longitudinal direction (horizontal direction in FIG. 4). That's fine. Further, the side cover protrusion ud is set to have a predetermined protrusion distance (vertical distance in FIG. 4) so as to come into contact with the end of the upper cover 10s (the lower end in FIG. 4). What is necessary is just to comprise. According to such a configuration, the side surface cover 10 u of the housing 10 has the side surface cover protruding portions ud placed on the seal belt 16 within a predetermined range at both ends of each slit 12 (both ends in the moving direction of the moving body 2). (The range of the moving part 16g).

  In the third embodiment and the fourth embodiment described above, the housing 10 is provided with an upper cover 10s and a side surface cover 10u, and the upper cover protrusion sd and the side surface portion are provided on the upper cover 10s and the side surface cover 10u. Although the cover protrusion ud is provided, for example, the upper cover 10s and the side surface cover 10u of the housing 10 may be integrally formed with the upper cover protrusion sd and the side surface cover protrusion ud. In this case, the slit 12 of the housing 10 forms an opening of a predetermined size in the cover of the housing 10 integrally configured, and both ends thereof are closed within a predetermined range (a range corresponding to the size of the moving portion 16g). What is necessary is just to comprise so that it may be in the state of peeling.

  According to the configuration as described above, the seal belt cover C3, the upper cover protruding portion sd, and the side surface cover protruding portion ud have a predetermined range (the conversion portion 16r and the moving portion 16g) of the seal belt 16 with a gap s1. The gap between the seal belt cover C3, the upper cover protruding portion sd and the side surface cover protruding portion ud and the seal belt 16 (gap s1) is the length (FIGS. 3A and 3B). In addition to the length of the conversion portion 16r (distance in the same direction in FIG. 4), the length of the moving portion 16g (distance in the same direction in FIG. 4) is secured. For this reason, the length of the gap s1 can be secured sufficiently, and when the inside air of the actuator A is sucked from the suction port 32 by a suction mechanism (not shown), the atmosphere (intake) sucked into the inside of the actuator A is a gap. When passing through s1, the venturi effect acting on the intake air can be increased.

  As a result, it is possible to reliably prevent dust from escaping from the inside of the actuator A, and it is possible to significantly improve the effect of preventing the generation of dust from the inside of the actuator A. Thereby, for example, in order to manufacture and inspect precision devices such as semiconductors, the actuator A can be used even in a clean room that needs to be kept in a dustless state.

  In the first to fourth embodiments described above, each actuator A is provided with the same seal belt cover C1, seal belt cover C2, upper cover protrusion sd, and side surface cover protrusion ud. The actuator A may be configured by arbitrarily combining these. For example, the actuator A may be configured by providing the seal belt cover C1 on one end side (one end side in the moving direction of the moving body 2) of the slit 12 of the housing 10 and providing the seal belt cover C2 on the other end side. Further, for example, the actuator A is provided with an upper cover protruding portion sd and a side surface cover protruding portion ud on one end side (one end side in the moving direction of the moving body 2) of the slit 12 of the housing 10, and the upper cover protruding on the other end side. You may comprise only the part sd.

  Further, in the first to fourth embodiments described above, the inside air of the actuator A is sucked and reduced from the suction port 32 by a suction mechanism (not shown), and the actuator A is maintained in a negative pressure state. The dust is prevented from spilling from the inside to the outside of the actuator A. For example, even when the dust is prevented from entering the inside from the outside of the actuator A, the above-described embodiments are applicable. As a result, it is possible to exert an excellent dust entry preventing effect.

In this case, for example, by applying a suction pressure of air to the inside of the actuator A by a predetermined suction mechanism (not shown) or the like, the inside air of the actuator A may be pressurized and the inside thereof may be maintained in a positive pressure state. . That is, when air is sucked into the actuator A by a suction mechanism (not shown), a suction pressure is applied between the seal belt cover C1 and the seal belt 16 (gap s1), and the actuator A passes through the gap s1. Inside air is sucked out. At this time, since the gap s1 serves as a throttle, the inside air (exhaust) of the actuator A sucked out of the actuator A has a higher flow velocity when passing through the gap s1. That is, a so-called Venturi effect acts on the exhaust, and the inside air of the actuator A can be strongly sucked from the inside of the actuator A to the outside.
As a result, it is possible to reliably prevent dust from entering the inside of the actuator A from the outside.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the actuator which concerns on 1st Embodiment of this invention, Comprising: (a) is a principal part top view for demonstrating the structure of a seal belt cover, (b) is an expansion of the seal belt cover vicinity. Sectional drawing. It is a figure which shows the structure of the actuator which concerns on 2nd Embodiment of this invention, Comprising: (a) is a principal part top view for demonstrating the structure of a seal belt cover, (b) is an expansion of the seal belt cover vicinity. Sectional drawing. It is a figure which shows the structure of the actuator which concerns on 3rd Embodiment of this invention, Comprising: (a) is a principal part top view for demonstrating the structure of a seal belt cover, (b) is an expansion of the seal belt cover vicinity. Sectional drawing. It is a figure which shows the structure of the actuator which concerns on 4th Embodiment of this invention, Comprising: The principal part top view for demonstrating the structure of a seal belt cover. It is a figure which shows the structural example of the conventional actuator, Comprising: (a) is a longitudinal cross-sectional view which shows the whole, (b) is a principal part top view for demonstrating the structure of a seal belt cover, (c), The expanded sectional view of the seal belt cover vicinity. The perspective view which shows the example of whole structure of the conventional actuator.

Explanation of symbols

2 Moving body 4 Guide rail 6 Driving device 8 Slider 10 Housing 10s Top cover 10t Bottom cover 10u Side cover 10v End cover 12 Slit 14 Pulley 16 Seal belt 16a Seal belt outer surface 16b Seal belt inner surface 16g Moving part 16r Conversion part 20s , 20u Seal groove 30 Suction tube 32 Suction port A, B, Actuator C1, C2, C3 Seal belt cover s1 Clearance between seal belt and seal belt cover sd Upper cover protrusion sda Upper cover protrusion inner surface ud Side cover protrusion uda Inner side cover protrusion

Claims (2)

A movable seal that includes a moving body that reciprocates along a positioning mechanism disposed in the housing and stops at a predetermined position, and is pulled out from the inside to close the slit of the housing that forms the movement path of the moving body. An actuator which is provided with a belt and is connected to a suction mechanism for sucking in the inside air and is kept at a negative pressure inside;
The seal belt has a minute gap between the upper surface of both side edges of the portion closing the slit and a pair of seal grooves formed in the housing along the moving direction of the moving body, and the lower surface of the both side edges is the seal groove. Positioned in contact with the
At both ends of the slit, a seal belt is pulled out from the inside , and a change part that changes the direction of movement from the vertical direction to the horizontal direction, and in the vicinity of the change part, the seal belt is moved from the change part to the moving direction of the moving body. Covers are provided to cover the respective portions that block the slits in the moving parts that move, and the covers are arranged between the seal belt and the minute gaps to prevent dust from being spilled out. The actuator is characterized in that the seal belt is opposed to the entire portion of the switching portion and the moving portion that closes the slit. The actuator according to claim 1, wherein the cover is provided integrally with the housing.

Images