JP4926626B2 - POSITION DETECTION SYSTEM, OPTICAL SYSTEM USING POSITION DETECTION SYSTEM, AND IMAGING DEVICE - Google Patents

Description

  The present invention relates to a position detection system having a position detection device using a magnet and a magnetic sensor, an optical system using the position detection system, and an imaging device.

  In recent years, various sensors have been used everywhere.

  For example, as described in Patent Document 1 and Patent Document 2, when a camera shake occurs in a digital video camera or a digital still camera, a camera shake correction device that detects and corrects a lens position or an optical system that performs automatic focus adjustment The lens position detection device requires a sensor having a function for instantaneously detecting the position with high accuracy, and at the same time, since there is a strong demand for downsizing of the entire device in recent years, downsizing of the position detection device itself is required. ing. Furthermore, there are various demands such as a sensor having a long life and a characteristic that is not easily affected by dust and oil (grease).

  In order to meet the above requirements, for example, a position detection device using a Hall sensor (magnetic sensor pair) as a sensor as described in Patent Document 3 is known.

  In addition to downsizing the position detection device, digital video cameras and digital still cameras are also required to have high performance such as maintaining a clear image during zooming and high-speed response of autofocus. In order to satisfy the above-described requirements, as described in Patent Documents 2 and 3, a method of detecting the positions of a plurality of lenses with a Hall sensor, such as a variable power lens and a focus lens, is becoming mainstream.

  FIG. 1 shows an example of a system having two lens position detection devices using such a Hall sensor. In FIG. 1, the position of the first variable magnification lens 106 to which the magnet 103 is attached is detected by the Hall sensors 101 a and 101 b inside the video camera 100, and the second variable magnification lens 107 to which the magnet 104 is attached is detected. The position is detected by the hall sensors 102a and 102b. Then, a signal including information on the position of the variable magnification lens 106 is transmitted from the Hall sensors 101a and 101b to the amplifier 113, and a signal including information on the position of the variable magnification lens 107 is transmitted from the Hall sensors 102a and 102b to the amplifier 114. It is done. Further, a signal is transmitted from the amplifier 113 and the amplifier 114 to the A / D converter 115, and a signal is transmitted from the A / D converter 115 to the processing circuit 111. Then, a signal is sent from the processing circuit 111 to the drive circuit 112, and the drive circuit 112 controls the motors 109 and 110, so that the positions of the variable magnification lenses 106 and 107 are between the fixed lens 105 and the fixed lens 108. Be controlled.

JP 2002-229090 A JP-A-6-014231 JP-A-2005-331399 JP 2004-348173 A Japanese Patent Application No. 2005-364090

  However, the position detection device that counts the stepping motor driving step pulses as described in Patent Document 2 has a problem in that it cannot detect the position with high accuracy due to the stepping motor stepping out. Furthermore, in digital video cameras and the like, it is also regarded as a problem that the driving sound of the stepping motor is recorded as audio noise.

  Further, even in the case of a magnetic position detecting device, in the configuration as shown in FIG. 1 of Patent Document 3, the position detecting devices of a plurality of lenses are arranged close to each other as the optical lens module is downsized. Therefore, there is a problem that the accuracy of the other position detection device deteriorates due to the influence of the magnetic field from the magnet of one position detection device.

  The present invention has been made in view of such problems, and the object of the present invention is to prevent mutual interference with magnetic field position detection accuracy even if a plurality of magnetic position detection devices are arranged close to each other. An object of the present invention is to provide a position detection system, an optical system using the position detection system, and an image pickup apparatus that can be suppressed and are highly accurate and small.

In order to solve the above-described problem, a first aspect of the present invention includes a magnet in which each of the N pole and the S pole is magnetized, and a magnetic flux detection means for detecting a change in magnetic flux due to relative movement of the magnet. a plurality of position detecting device, the at least one set of the position detector proximate one of said plurality of position detecting device, at least one set that have a magnetization direction vector orthogonal direction components to each other of the magnet, and to the proximity The position detection device is characterized in that the magnetic flux detection means of at least one of the position detection devices can detect the orthogonal component of the magnetization direction vector of the magnet of the other position detection device. System.

According to a second aspect of the present invention, in the first aspect, a relative movement direction of a magnet included in at least one position detection device among the at least one pair of position detection devices in proximity is the position detection device. It is characterized by being on a magnet symmetry plane that includes the center of gravity of the magnet of the other position detection device along the magnet surface facing the magnetic flux detection means included in.

According to a third aspect of the present invention, in the first or second aspect, in at least one position detection device of the at least one pair of adjacent position detection devices, the magnetic flux detection means is the other position detection device. It is contained in the symmetry plane of the magnet which has.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the symmetry planes of the magnets included in the at least one pair of position detecting devices adjacent to each other are on the same plane. And

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, in the at least one pair of adjacent position detection devices included in the position detection system, the magnetic flux detection means are opposed to each other. It is included in the symmetry plane of the arranged magnet.

According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the position detection device constituting the position detection system is one set.

According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the angles formed by the magnetizing direction vectors of the magnets included in the at least one pair of position detecting devices adjacent to each other are orthogonal to each other. Features.

In addition, according to an eighth aspect of the present invention, in any one of the first to seventh aspects, the magnetic flux detection means included in any of the at least one pair of position detection devices adjacent to each other faces the magnetic flux detection means. It is possible to detect the magnetic flux density parallel to the magnetization direction vector of the magnets arranged in the manner described above.

According to a ninth aspect of the present invention, in any one of the first to eighth aspects, the magnetic flux detection means is a Hall sensor having a set of two magnetic sensors.

According to a tenth aspect of the present invention, in any one of the first to ninth aspects, the position detection system includes a magnetic body.

According to an eleventh aspect of the present invention, in any one of the first to tenth aspects, the magnetic flux detection means is mounted on the same substrate.

A twelfth aspect of the present invention is an optical system using the position detection system according to any one of the first to eleventh aspects.

A thirteenth aspect of the present invention is an image pickup apparatus using the optical system according to the twelfth aspect.

The above means will be described in detail below.
A magnet is a substance that stores energy in the form of magnetostatic energy. It is a magnetic material that retains residual magnetization once magnetized, and ferrite, alnico, rare earth, etc. are used. These magnets only need to have geometrically symmetrical planes in which N poles and S poles are respectively single poled. Although the example of the shape of a specific magnet is shown in FIG. 2, the magnet 201 should just have the geometric symmetry plane 203a, 203b, 203c as shown in FIG. 2, and is not restrict | limited to this. .

  Since the magnetization direction vector is a vector that only indicates the magnetization (magnetization) direction at the center of gravity of the magnet, the size is not particularly defined, but the size is set to 1 in the present invention. An example of the magnetization vector 202 is shown in FIG.

  The relative movement of the magnet refers to the relative movement of the center of gravity of the magnet with respect to the magnetic flux detection means. Since the movement is relative, the magnet may move or the magnetic flux detection means may move.

  The magnetic flux detection means is a Hall sensor, a magnetoresistive effect element, a magneto-impedance element, various other magnetic sensors, and combinations thereof. Peripheral circuits such as processing circuits such as drive, amplification, A / D converter, etc. May be included.

  As a Hall sensor, a Hall sensor made of a compound semiconductor such as GaAs, InAs, or InSb that does not use a magnetic chip for performing magnetic amplification, or a Hall sensor made of an IV group semiconductor such as Si or Ge is used. Can do. Of course, a combination of a plurality of the above materials may be used. A member for performing magnetic amplification such as a magnetic chip has a magnetic hysteresis and may cause a decrease in detection accuracy of the relative position of the magnet. However, in applications where detection accuracy is not so required, a magnetic chip is used. There is no problem with using the hall sensor.

  The magnetic sensor can be configured by integrally enclosing a plurality of sensors in one package.

  The position detection device is a device including a magnet that is a magnetic flux generation source and magnetic flux detection means.

  The position detection system refers to one comprising a plurality of position detection devices or one or more position detection devices and one or more magnets.

  The at least one set of adjacent position detection devices according to claim 1 is a set of position detection devices in which a plurality of position detection devices are adjacent to each other so as to be influenced by the other magnetic field. . Further, one side of the two position detection devices forming one set is called one side and the other side is called the other side. For example, as shown in FIG. 14, the position detection system including three position detection devices is a set of two position detection devices close to the position detection devices A and B, and two position detection devices close to the position detection devices B and C. There are two sets of position detection devices in total.

  The fact that the magnetization direction vector of the magnet according to claim 1 is not on the same plane means that the magnetization of the other magnet is placed on a plane including the magnetization direction vector of one magnet in a set of position detection devices. Says that the magnetic direction vector is not included. Details are shown in FIG. FIG. 3 shows a magnetization direction vector 302 at the center of gravity 303 of one rectangular magnet. Although there are a plurality of surfaces including the magnetization direction vector 302, FIG. 3 shows two surfaces 304a and 304b as representatives. FIG. 3 shows vectors 305a and 305b orthogonal to this surface for each surface. As an example, the magnetization direction vector that is not on the same plane as the magnetization direction vector of FIG. 3 may have an orthogonal component with respect to the plane including the magnetization direction vector.

  As a specific example, FIGS. 4 to 14 show the arrangement of magnets and the magnetization direction vector of the magnets. 4 to 8 and FIGS. 13 to 14 show examples in which the magnetization direction vector of the magnet is not in the same plane, and FIGS. 9 to 12 show examples in which the magnetization direction vector of the magnet is in the same plane. In addition, various combinations of magnetization direction vectors are conceivable. However, this is not limited to the examples shown in the drawings as long as the above conditions are satisfied.

  The magnetized direction vectors of the magnets according to claim 2 have mutually orthogonal components. However, when the magnetized direction vectors of the magnets in the present invention are not on the same plane, they do not intersect at right angles. The case where the extension lines of the respective magnetization direction vectors intersect when they are projected on an arbitrary same plane is said to have an orthogonal direction component.

  The magnetic flux detection means included in at least one position detection device of the pair of position detection devices constituting the position detection system according to claim 3 is orthogonal to the magnetization direction vector of the magnet included in the other position detection device. The ability to detect the component means that the direction of detecting the magnetism of the magnetic flux detection means of one position detection device is in the direction of detecting the orthogonal component of the magnetization direction vector of the magnet of the other position detection device. Say something.

  5. The position detection system according to claim 4, wherein a relative movement direction of a magnet of at least one position detection device of at least one pair of adjacent position detection devices is opposed to magnetic flux detection means included in the position detection device. In the present invention, the movement of the magnet is represented by the movement of the center of gravity, which means that the movement of the magnet is represented by the movement of the center of gravity. The moving direction is parallel to the magnet surface facing the magnetic flux detection means and at the same time included in the symmetry plane of the magnet including the center of gravity of the magnet of the other position detection device. This is an enlarged surface.

  The symmetry planes of the magnets included in at least one pair of adjacent position detection devices according to claim 6 are on the same plane, which means that each magnet provided in each position detection device according to claim 5 has the same plane. When the symmetry plane is extended to infinity, it means that they overlap each other.

  The magnetic material is used to shield external magnetic noise or amplify magnetism, and is generally used in motors and the like. As materials, iron, permalloy alloy, soft magnetic amorphous alloy and the like are well known. In the position detection system of the present invention, each position detection device is covered with a magnetic shield, a magnetic shield is arranged between the position detection devices, or the magnet of one position detection device faces the other position detection device. By attaching a magnetic shield to the surface to be touched, it is possible to prevent the mutual position detecting devices from interfering with each other. Also, by providing a magnetic material, it is possible to amplify the magnetic flux density in the magnetic detection means. The method of using the magnetic material and the magnetic material mentioned here is merely an example, and the present invention is not limited to this.

  The optical system is an imaging device such as a mobile phone camera, a digital video camera, or a digital still camera, a projection device such as a projector, or a component such as a lens group, an actuator, or a CCD that is used in an optical pickup used for ODD or the like. It consists of What has been described above is merely an example, and the present invention is not limited thereto.

  An imaging device is a device capable of recording or storing video, such as a mobile phone camera, a digital video camera, or a digital still camera. What has been described above is merely an example, and the present invention is not limited thereto.

  The present invention is a position detection system composed of a plurality of position detection devices. However, if the other does not require accuracy, or if the other magnet is sufficiently small and has little substantial influence, the conditions of the present invention are applied to all position detection devices. There is no need to impose.

  According to the present invention, even when a plurality of magnetic position detection devices are arranged close to each other, mutual interference with magnetic field position detection accuracy can be suppressed, and a position detection system that is highly accurate and small in size, It is possible to provide an optical system and an imaging apparatus using the detection system.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
<Configuration>
A schematic configuration of the position detection system will be described with reference to FIG. A magnet M1 (2604) is a magnet attached to the position detection device 1 (2601). A magnet M2 (2609) is a magnet attached to the position detection device 2 (2602).

  The position detection device 1 (2601) includes a first hall sensor S1-1 and a second hall sensor S1-2. The position detection device 2 (2602) has a first hall sensor S2-1 and a second hall sensor S2-2.

  The magnet M1 (2604) and the magnet M2 (2609) are rectangular parallelepiped and single-pole magnetized. In the following specific example, the magnets are all neodymium sintered magnets, and the residual magnetic flux density is 1200 mT (value of a general neodymium sintered magnet). Of course, this is only an example, and it goes without saying that the present invention is not limited to this example.

  In FIG. 25, the position detection device 1 (2601) and the position detection device 2 (2602) have the same configuration. The configuration of each position detection device will be described below. The magnetization direction vector 2605 of the magnet M1 (2604) and the movement direction (2606) of the magnet M1 are indicated by arrows. In the position detection device 1 (2601), the first hall sensor S1-1 and the second hall sensor S1-2 are mounted on the substrate 2610 at a predetermined interval, and the rectangular parallelepiped magnet M1 (2604) is mounted on the hall sensor S1. −1 and S1-2. Similarly, the magnetization direction vector 2607 of the magnet M2 (2609) and the movement direction (2608) of the magnet M1 are indicated by arrows. In the position detection device 2 (2602), the first hall sensor S2-1 and the second hall sensor S2-2 are mounted on the substrate 2611 at a predetermined interval, and the rectangular parallelepiped magnet M2 (2609) is mounted on the hall sensor S2. -1, S2-2. The sensitivity of the hall sensor is 2.4 mV / mT (general hall sensor sensitivity), and signals detected by the hall sensor S1-1 and the hall sensor S1-2 are transmitted to the amplifier 2613, and the hall sensor S2-1. The signal detected by the Hall sensor S2-2 is transmitted to the amplifier 2612. Further, a signal is transmitted from the amplifier 2613 and the amplifier 2612 to the A / D converter 2614. Then, a signal is transmitted from the A / D converter 2614 to the processing circuit 2615, and the signal is processed. Then, the processing circuit 2615 transmits a signal to the drive circuit 2616, and the drive circuit 2616 controls the position of the drive component having the magnet M1 (2604) and the drive component having the magnet M2 (2609).

  Here, the hall sensors S1-1 and S1-2 are on a straight line 2603a, and the hall sensors S2-1 and S2-2 are on a straight line 2603b.

  The position detection system was evaluated with the resolution of the individual position detection devices. The resolution is a value obtained by dividing the difference between the actual moving distance and the moving distance detected by the position detection device as an error, and dividing the maximum value of the error by the movable range of the magnet. The unit is [μm / mm].

  Next, a procedure for obtaining the position of the magnet from the output of the Hall sensor will be described with reference to FIG. Here, a procedure for obtaining the position of the magnet M1 (2604) from the outputs of the hall sensors S1-1 and S1-2 of the position detection device 1 (2601) will be described. The position of the magnet M2 (2609) can be obtained from the output of the hall sensors S2-1 and S2-2 of the position detection device 2 (2602) in the same procedure as described below. 26, the moving range 2701 of the magnet M1 (2604), the left end 2702 to which the magnet M1 (2604) moves, the right end 2704 to which the magnet M1 (2604) moves, and the magnet M1 (2604) to the Hall sensors S1-1 and S1. The center position 2703 of the magnet M1 (2604) when centered with respect to -2 is shown. The outputs of the hall sensors S1-1 and S1-2 when the magnet M1 (2604) moves from end to end in the moving range 2701 vary depending on the sensor position. When the hall sensors S1-1 and S1-2 are arranged at an optimum position with respect to the magnet M1 (2604), signals from these two hall sensors are output by the processing circuit 2615 (output signal A-output signal B) / When the calculation of (output signal A + output signal B) is performed, a signal close to linear with respect to the movement of the magnet can be obtained. At this time, depending on the arrangement of the magnet and the Hall sensor, a signal close to linear with respect to the movement of the magnet can be obtained even in the calculation of (output signal A−output signal B). Therefore, depending on the arrangement relationship, (output signal A-output signal B) may be used when calculating the position of the magnet.

  In FIG. 26, when the left end of the magnet is positioned at the left end 2702 of the movable range, the Hall sensors S1-1 and S1-2 each output a value indicated by Δ in the middle graph. The output is calculated by a processing circuit, and a linearized signal Δ shown in the lower stage is output. Next, the same processing is performed when the right end of the magnet is positioned at the right end of the movable range. The output signals A and B and the linearized signal when the magnet is positioned at the right end 2704 are indicated by □ in the middle and lower graphs, respectively. A linear form is defined by linearly interpolating the two points of the linearization signal Δ and the linearization signal □. When the magnet actually moves, the position of the magnet is calculated by applying this linear form.

  As described above, since the Hall sensor signal is proportional to the magnetic flux density, a magnetic simulation by a computer for static magnetic field analysis is performed, and the magnetic flux density is made to correspond to the Hall sensor signal in FIG. 26 to calculate the detection resolution of the position detection device. Went.

  Computer simulations of static magnetic field analysis can use either differential equation methods (finite element method, difference method, etc.) or integral equation methods (boundary element method, magnetic moment method, etc.) as long as the magnetic field H [A / m] can be obtained. You may use.

  Note that a position detection system according to an embodiment of the present invention described below can be used in an optical system. And the said optical system can also be used for an imaging device.

<Position detection system>
A position detection system according to an embodiment of the present invention described below is composed of two position detection devices. One position detection device is referred to as a position detection device 1, and the other position detection device is referred to as a position detection device 2. Tables 1 and 2 show specific implementation conditions and comparison conditions such as the magnetizing direction of the magnet, the magnetic sensitive surface direction of the Hall sensor, the moving direction of the magnet, the magnet shape, and the sensor position, which are features of the present invention. Moreover, a magnet arrangement | positioning figure is shown in FIGS. 4-14, and a block diagram is shown in FIGS.

  In the configuration diagram, the magnet M <b> 1 is a magnet attached to the position detection device 1. The magnet M <b> 2 is a magnet attached to the position detection device 2. The length Ml1 is the length of the magnet M1 attached to the position detection device 1. The length Ml2 is the length of the magnet M2 attached to the position detection device 2. The width Mw1 is the width of the magnet M1 attached to the position detection device 1. The width Mw2 is the width of the magnet M2 attached to the position detection device 2. The thickness Mh1 is the thickness of the magnet M1 attached to the position detection device 1. The thickness Mh2 is the thickness of the magnet M2 attached to the position detection device 2. In the above, the x-axis direction is defined as the length, the y-axis direction is defined as the width, and the z-axis direction is defined as the thickness.

  The hall sensor S <b> 1-1 is a first hall sensor attached to the position detection device 1. S1-2 indicates a second Hall sensor attached to the position detection device 1. The hall sensor S2-1 is a first hall sensor attached to the position detection device 2. The hall sensor S2-2 is a second hall sensor attached to the position detection device 2.

  Sd1 is the distance between the center of the magnetic sensitive surface of the first Hall sensor S1-1 of the position detecting device 1 and the center of the magnetic sensitive surface of the second Hall sensor S1-2. Sd2 is the distance between the center of the magnetic sensitive surface of the first Hall sensor S2-1 of the position detection device 2 and the center of the magnetic sensitive surface of the second Hall sensor S2-2.

  The distance Md is the X-axis between the opposing surfaces of the magnet M1 and the magnet M2 when the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other. The direction distance is shown. However, the magnet M2 attached to the position detection device 2 is inclined in the XY plane with respect to the X axis with the center of gravity as a fulcrum as shown in the following implementation conditions 5, implementation conditions 6, implementation conditions 7, and comparison conditions 4. In the case where the distance is Md, the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move relative to each other when the magnet M2 is not inclined on the XY plane. The distance in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 when closest is shown.

  The distance MS1 is from the surface facing the two Hall sensors S1-1 and S1-2 of the magnet M1 attached to the position detection device 1 to the center of the magnetosensitive surface of the two Hall sensors S1-1 and S1-2. Shows the distance.

  The distance MS2 is from the surface facing the two Hall sensors S2-1 and S2-2 of the magnet M2 attached to the position detection device 2 to the center of the magnetosensitive surface of the two Hall sensors S2-1 and S2-2. Shows the distance.

  The rotation angle Mth2 indicates the rotation angle in the XY plane with respect to the X axis of the straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 in the vertical direction.

  The distance Mc indicates the distance in the Y-axis direction between the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2.

  In all the implementation conditions and the comparison conditions, the condition that the magnet M2 attached to the position detection device 2 is moved closest to the position detection device 1, that is, the magnetic flux generated from the magnet M2 attached to the position detection device 2 The resolution of the position detection device 1 is calculated under the condition that the density has the most influence on the resolution of the position detection device 1. Further, in all implementation conditions and comparison conditions, the magnet M1 attached to the position detection device 1 is moved so as to be closest to the position detection device 2, that is, generated from the magnet M1 attached to the position detection device 1. The resolution of the position detection device 2 is calculated under the condition that the magnetic flux density to be influenced most affects the resolution of the position detection device 2.

  In all implementation conditions and comparison conditions, the moving direction of the magnet M1 of the position detecting device 1 and the moving direction of the magnet M2 of the position detecting device 2 were set to the X-axis direction.

  The size of the magnets in the position detection devices 1 and 2, the number of Hall sensors, and the arrangement relationship are listed for reference, but actual use is not limited thereto.

<Condition 1>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  In the following, a design example of optimum values of parameters of each component in FIG. 15 will be described.

  A schematic diagram of the configuration of the implementation condition 1 is shown in FIGS.

  First, the optimum values of the parameters of each component relating to the position detection device 1 under the implementation condition 1 will be described.

  The length Ml1 of the magnet M1 of the position detection device 1 is 2.00 mm, the width Mw1 of the magnet M1 of the position detection device 1 is 1.00 mm, and the thickness Mh1 of the magnet M1 of the position detection device 1 is 1.00 mm.

  Further, the distance Sd1 between the center of the magnetic sensitive surface of the first hall sensor S1-1 of the position detecting device 1 and the center of the magnetic sensitive surface of the second hall sensor S1-2 is 0.8 mm. The distance MS1 = 1.8 mm from the surface of the attached magnet M1 facing the two Hall sensors S1-1 and S1-2 to the magnetosensitive surface of the two Hall sensors S1-1 and S1-2.

  The magnetization direction vector of the magnet M1 is the Z-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S1-1 and S1-2 is the Z-axis direction. The two hall sensors S1-1 and S1-2 are arranged on the XZ plane (symmetric surface of the magnet M1) that bisects the line segment of the width Mw1 of the magnet M1. The moving direction of the magnet M1 is the X-axis direction.

  In the case of the above design, it is more preferable to mount all the Hall sensors S1-1 and S1-2 in one package than to mount the Hall sensors S1-1 and S1-2 separately on the mounting board. The arrangement errors of −1 and S1-2 are reduced, which can contribute to the high accuracy of the position detection device. Further, for example, it is possible to provide all the hall sensors S1-1 and S1-2 on the Si substrate. Therefore, it is desirable to enclose the hall sensor S1-1 and the hall sensor S1-2 in one package. It goes without saying that this applies to all position detection systems to which the present invention is applied.

  27 to 29 show changes in the magnetic flux density with respect to the moving distance of the rectangular parallelepiped magnet M1. FIG. 27 shows the magnetic flux density change 11 at the position of the first Hall sensor S1-1 with respect to the moving distance of the magnet M1, and FIG. 28 shows the magnetic flux density at the position of the second Hall sensor S1-2 with respect to the moving distance of the magnet M1. FIG. 29 shows the difference of the magnetic flux density difference obtained by subtracting the magnetic flux density at the position of the first Hall sensor S1-1 from the magnetic flux density at the position of the second Hall sensor S1-2 with respect to the moving distance of the magnet. A change 13 is represented.

  Thereby, the difference magnetic flux density obtained by subtracting the magnetic flux density at the position of the first Hall sensor S1-1 from the magnetic flux density at the position of the second Hall sensor S1-2 with respect to the movement of the magnet M1 is a curve that is close to linear. It can be seen that changes.

  Since the output voltage of the hall sensor is proportional to the magnitude of the magnetic flux density, the difference value between the output voltage Va of the first hall sensor S1-1 and the output voltage Vb of the second hall sensor S1-2 is the magnet M1. The output characteristic is close to linear with respect to the movement distance.

  FIG. 30 shows a difference value (Va−Vb) between the output voltage Va of the Hall sensor S1-1 and the output voltage Vb of the Hall sensor S1-2 with respect to the movement of the rectangular magnet M1 in the configuration example with the above parameters. The result obtained by magnetic simulation of the value divided by the sum of output voltages (Va + Vb) is shown. FIG. 30B is an enlarged view of the region 22 in FIG. 30A, and shows an ideal straight line 21 (line format) and the result of magnetic simulation.

  As the premise of the magnetic simulation, the sensitivity of the two Hall sensors S1-1 and S1-2 is 2.4 mV / mT (sensitivity of a general Hall sensor), and the residual magnetic flux density Br of the rectangular parallelepiped magnet is 1200 mT (general neodymium). (Sintered magnet value).

  From the magnetic simulation results shown in FIGS. 27 to 30, in the position detection device 1, the difference value between the output voltage Va of the hall sensor S1-1 and the output voltage Vb of the hall sensor S1-2 with respect to the movement of the rectangular parallelepiped magnet M1 is obtained. It can be seen that the value divided by the sum of the output voltages has high linearity and matches well with the ideal straight line (linear form).

  Here, the ideal straight line 21 described in FIG. 30A represents the difference value (Va−Vb) between the output voltages of the two Hall sensors S1-1 and S1-2 when the moving distance of the rectangular magnet M1 is +1 mm. The value divided by the sum of the output voltages (Va + Vb) and the difference value (Va−Vb) of the output voltages of the two hall sensors S1-1 and S1-2 when the moving distance of the rectangular parallelepiped magnet is −1 mm is A straight line connecting the value divided by the sum (Va + Vb) was defined.

  30B, the difference value (Va−Vb) between the output voltage Va of the first hall sensor S1-1 and the output voltage Vb of the second hall sensor S1-2 is calculated as the sum of the output voltages (Va + Vb). It can be seen that the value divided by) is slightly deviated from the ideal straight line 21.

  Generally, since position detection is performed using a value on this ideal straight line, a difference value between the output voltage Va of the first hall sensor S1-1 and the output voltage Vb of the second hall sensor S1-2. If the deviation of the value obtained by dividing (Va−Vb) by the sum of output voltages (Va + Vb) from the ideal straight line 21 is large, the position detection error becomes large.

  FIG. 31 shows a value obtained by dividing the difference between the output voltages of the two Hall sensors S1-1 and S1-2 when the moving distance of the cuboid magnet M1 is +1 mm, and two pieces when the moving distance of the cuboid magnet M1 is −1 mm. A straight line connecting the values obtained by dividing the difference value of the output voltages of the Hall sensors S1-1 and S1-2 by the sum as an ideal straight line 21 is converted from the deviation between the ideal straight line 21 and the magnetic simulation result shown in FIG. It is the figure which showed the error in the detected position.

  From the results shown in FIG. 31, if the position detection device 1 is a single unit, the position detection error is 4.4 μm at the maximum, and the resolution is 4.4 [μm] / 2 [mm] = 2 with respect to the total stroke of 2 mm. 2 [μm / mm] (0.22%), it can be seen that highly accurate position detection is achieved.

  Naturally, the straight line obtained by the least square method from the magnetic simulation result shown in FIG. If the straight line obtained by the least square method is the ideal straight line 21, the position detection error is further reduced and the resolution is increased. It goes without saying that this applies to all position detection systems to which the present invention is applied.

  Next, the optimum values of the parameters of the respective components related to the position detection device 2 under the implementation condition 1 will be described.

  The length Ml2 of the magnet M2 of the position detection device 2 = 2.30 mm, the width Mw2 of the magnet M2 of the position detection device 2 = 2.1 mm, and the thickness Mh2 of the magnet M2 of the position detection device 2 = 0.90 mm.

  Further, the distance Sd2 between the center of the magnetic sensitive surface of the first Hall sensor S2-1 of the position detecting device 2 and the center of the magnetic sensitive surface of the second Hall sensor S2-2 is 0.8 mm, and the position detecting device 2 The distance from the surface of the attached magnet M2 facing the two Hall sensors S2-1 and S2-2 to the magnetic sensitive surface of the two Hall sensors S2-1 and S2-2 is 1.0 mm.

  The magnetization direction vector of the magnet M2 is the Y-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S2-1 and S2-2 is the Y-axis direction. The two hall sensors S2-1 and S2-2 are arranged on an XZ plane that divides the width Mw2 of the magnet M2 into two equal parts. The moving direction of the magnet M2 is the X-axis direction.

  When calculation similar to that of the position detection device 1 was performed with the above configuration, if the position detection device 2 is a single unit, the position detection error is 5.8 μm at the maximum, and the resolution is 5.8 with respect to a total stroke of 2 mm. It can be seen that [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) achieves highly accurate position detection.

  Next, the resolution of the position detection device 1 and the position detection device 2 in the case where the position detection device 1 and the position detection device 2 of the implementation condition 1 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 1 will be described.

  The magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Y-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Z-axis direction) in which the magnetic sensing surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Y-axis direction) of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 is perpendicular to the magnetization vector of the magnet M1 attached to the position detection device 1. The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detection device 1 and the position detection device 2 are arranged so that the XZ plane magnets (symmetrical surfaces of the magnet M2) to be included include the Hall sensors of the position detection devices on the same plane and close to each other.

  The magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are placed on the same straight line (a straight line parallel to the X axis). The position detecting device 1 and the position detecting device 2 are arranged in the above.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnets attached to the position detection device 1 and the position detection device 2 moves along the X axis parallel to the straight line connecting the Hall sensors.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged. When calculating the resolution of the position detection device 1 by calculation, the magnet M2 attached to the position detection device 2 is moved to a position of −1 mm, that is, the magnet M2 has the greatest influence on the resolution of the position detection device 1. Asked for the state.

  Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  When the position detection device 2 is arranged in the vicinity of the position detection device 1 under the above conditions, the same calculation as when only the position detection device 1 is performed. As a result, the position detection error of the position detection device 1 is the maximum. However, it was 4.4 μm, and the resolution was 4.4 [μm] ÷ 2 [mm] = 2.2 [μm / mm] (0.22%) with respect to the total stroke of 2 mm. This shows the same value as the resolution achieved by the position detection device 1 alone. Further, when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, as a result of performing the same calculation as that of the position detection device 1 alone, the position detection error of the position detection device 2 is The maximum was 5.8 μm, and the resolution was 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) with respect to the total stroke of 2 mm. This shows the same value as the resolution achieved by the position detection device 2 alone.

  From these results, the position detection system of the present invention can suppress mutual interference to the position detection accuracy of the magnetic field even if the position detection device is arranged closer than the comparison condition, and the position is highly accurate and compact. It can be seen that a detection system can be realized.

<Comparison condition 1>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  A design example of the optimum value of the parameter of each component in FIG. 20 will be described.

  A schematic configuration of the comparison condition 1 is shown in FIGS.

  The position detection device 1 under comparison condition 1 is the same as the position detection device 1 under execution condition 1.

  Hereinafter, the optimum values of the parameters of the respective components related to the position detection device 2 under the comparison condition 1 will be described.

  The length Ml2 of the magnet M2 of the position detection device 2 is 2.1 mm, the width Mw2 of the magnet M2 of the position detection device 2 is 1.1 mm, and the thickness Mh2 of the magnet M2 of the position detection device 2 is 1.0 mm.

  Further, the distance Sd2 between the center of the magnetic sensitive surface of the first hall sensor S2-1 of the position detecting device 2 and the center of the magnetic sensitive surface of the second hall sensor S2-2 is 1.6 mm, and the position detecting device 2 The distance MS from the surface of the attached magnet M2 facing the two Hall sensors S2-1 and S2-2 to the magnetic sensitive surface of the two Hall sensors S2-1 and S2-2 is set to 1.0 mm.

  The magnetization direction vector of the magnet M2 is the X-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S2-1 and S2-2 is the X-axis direction. The two hall sensors S2-1 and S2-2 are arranged on an XZ plane that divides the width Mw2 of the magnet M2 into two equal parts. The moving direction of the magnet M2 is the X-axis direction.

  When calculation similar to that of the position detection device 1 of the implementation condition 1 was performed with the above configuration, if the position detection device 2 of the comparison condition 1 is a single unit, the position detection error is 1.49 μm at the maximum, and the resolution is all 1.49 [μm] ÷ 2 [mm] = 0.75 [μm / mm] (0.075%) relative to a stroke of 2 mm achieves highly accurate position detection.

  Next, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the comparison condition 1 are close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the comparison condition 1 will be described.

  The position detection device 1 so that the magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Y-axis direction) of the magnet M2 attached to the position detection device 2 are orthogonal to each other. And the position detection device 2 were arranged. In comparative condition 1, the magnetization direction vector (Z-axis direction) of the magnet M1 and the magnetization direction vector (Y-axis direction) of the magnet M2 are on the same plane.

  The magnetic sensing surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 can detect the magnetic flux density orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2, and the position detection device The position detection device 1 and the magnetic sensing surface of the two Hall sensors S2-1 and S2-2 attached to 2 can detect the magnetic flux density orthogonal to the magnetization vector of the magnet M1 attached to the position detection device 1. A position detection device 2 was arranged.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detection device 1 and the position detection device 2 are arranged so that the XZ plane magnets (symmetrical surfaces of the magnet M2) to be included include the Hall sensors of the position detection devices on the same plane and close to each other.

  The magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are on the same straight line (a straight line parallel to the X axis). The position detecting device 1 and the position detecting device 2 are arranged in the above.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnets attached to the position detection device 1 and the position detection device 2 moves along the X axis parallel to the straight line connecting the Hall sensors.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating the resolution of the position detection device 1 by calculation, the magnet M2 attached to the position detection device 2 is moved to a position of −1 mm, that is, the magnet M2 has the greatest influence on the resolution of the position detection device 1. Asked for the state. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  When the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the same calculation as when only the position detection device 1 is performed. As a result, the position detection error of the position detection device 1 is maximum. The resolution was 90.22 [μm] ÷ 2 [mm] = 45.11 [μm / mm] (4.5%) with respect to the total stroke of 2 mm. This means that the position detection accuracy is reduced by one digit or more as compared with the resolution of 2.2 [μm / mm] (0.22%) achieved by the position detection device 1 alone. Further, when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, as a result of performing the same calculation as that of the position detection device 1 alone, the position detection error of the position detection device 2 is The maximum was 105.1 μm, and the resolution was 105.1 [μm] ÷ 2 [mm] = 52.5 [μm / mm] (5.25%) with respect to the total stroke of 2 mm. This means that the position detection accuracy is reduced by one digit or more as compared with the resolution of 0.75 [μm / mm] (0.075%) achieved by the position detection device 2 alone.

  From these results, a configuration in which the magnetization direction vector (Z-axis direction) of the magnet M1 and the magnetization direction vector (Y-axis direction) of the magnet M2 shown in Comparative Condition 1 are on the same plane (claims of the present invention). In the configuration that does not satisfy the condition described in item 1, it can be seen that the accuracy of the position detection device 1 and the position detection device 2 is significantly deteriorated as compared with the position detection system of the present invention.

<Condition 2>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  A design example of the optimum value of the parameter of each component in FIG. 16 will be described.

  A schematic configuration of the implementation condition 2 is shown in FIGS.

  The position detection device 1 under the execution condition 2 has the same configuration as the position detection device 1 under the execution condition 1.

  Further, the position detection device 2 in the implementation condition 2 has the same configuration as the position detection device 2 in the implementation condition 1, and the difference from the implementation condition 1 is that the relative positional relationship in the Z direction between the position detection devices is different. is there.

  The resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the implementation condition 1 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 2 will be described.

  The magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Y-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Z-axis direction) in which the magnetic sensing surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Y-axis direction) of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 is perpendicular to the magnetization vector of the magnet M1 attached to the position detection device 1. The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detection device 1 and the position detection device 2 are arranged so that the XZ plane magnets (symmetrical surfaces of the magnet M2) to be included include the Hall sensors of the position detection devices on the same plane and close to each other.

  Further, a straight line (X-axis direction) connecting the two hall sensors S <b> 1-1 and the hall sensor S <b> 1-2 attached to the position detection device 1, and the two hall sensors S <b> 2-1 attached to the position detection device 2. The position detection device 1 and the position detection device 2 are arranged so that the straight line (X-axis direction) connecting S2-2 and S2-2 is parallel.

  Here, the center of the magnetic sensing surfaces of the Hall sensors S1-1 and S1-2 attached to the position detection device 1 is the midpoint of the line segment of the height Mh2 of the magnet M2 attached to the position detection device 2. The position detection device 1 and the position detection device 2 are arranged so that the same coordinate in the Z-axis direction.

  The movement of the magnets attached to the position detection device 1 and the position detection device 2 moves along the X axis parallel to the straight line connecting the Hall sensors.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating the resolution of the position detection device 1 by calculation, the magnet M2 attached to the position detection device 2 is moved to a position of −1 mm, that is, the magnet M2 has the greatest influence on the resolution of the position detection device 1. Asked for the state. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give. The movement direction of the magnets M1 and M2 in the position detection device 1 and the position detection device 2 is the X-axis direction.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 4.4 μm, and the resolution was 4.4 [μm] ÷ 2 [mm] = 2.2 [μm / mm] (0.22%) with respect to the total stroke of 2 mm. This shows the same value as the resolution achieved by the position detection device 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The position detection error was 5.8 μm at the maximum, and the resolution was 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) with respect to the total stroke of 2 mm. This shows the same value as the resolution achieved by the position detection device 2 alone.

  From these results, even if the relative arrangement relationship in the Z direction between the position detection device 1 and the position detection device 2 is different from the implementation condition 1, even if the position detection device is arranged close by using the present invention, It can be seen that mutual interference with the magnetic field position detection accuracy can be suppressed, and a highly accurate and compact position detection system can be realized.

<Condition 3>
In the implementation condition 3, in the position detection system, the two position detection devices in the implementation condition 1 are replaced symmetrically. In the present implementation condition, it is obvious that the implementation condition 3 is equivalent to the implementation condition 1 when the two position detection devices are replaced symmetrically.

<Condition 4>
A case will be described in which either the position detection device 1 or the position detection device 2 detects a position of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range. A design example of the optimum value of the parameter of each component in FIG. 18 will be described. Under such conditions, it is not used as two adjacent position detecting devices but as a combination of one position detecting means and adjacent magnets. Specifically, the position detection device may be used in the vicinity of a component having a magnet, such as a speaker or a receiver, and the present implementation condition assumes such a case. Here, the position detection device 2 is also shown, and the effect of claim 4 is expressed.

  A schematic configuration of the implementation condition 4 is shown in FIGS.

  The position detection device 1 under the implementation condition 4 has the same configuration as the position detection device 2 under the implementation condition 1.

  Further, the position detection device 2 under the implementation condition 4 has the same configuration as the position detection device 1 under the implementation condition 1 when viewed alone.

  In the following, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the implementation condition 4 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 4 will be described.

  The magnetization direction vector (Y-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Y-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Z-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are orthogonal to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  When the magnet M1 and the magnet M2 attached to the position detection device 1 and the position detection device 2 are at positions of 0 mm, that is, the magnet M1 and the magnet M2 attached to the position detection device 1 and the position detection device 2 are the respective origins. XZ plane (symmetrical plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 when it is positioned at the position, and the length of the magnet M2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 were arranged so that XZ plane magnets (symmetrical surfaces of the magnet M2) that divide Ml2 into two halves are on the same plane.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detecting device 1 and the position detecting device 2 are arranged so that the YZ plane magnet (symmetrical surface of the magnet M2) includes the respective hall sensors. The magnetic flux detection means of the position detection device 1 is included in the symmetry plane of the magnet M2 attached to the position detection device 2, but the magnetic flux detection means of the position detection device 2 is in the symmetry plane of the magnet M1 attached to the position detection device 1. There is no such plane of symmetry. Therefore, it cannot be the same plane.

  A straight line (X-axis direction) connecting the two hall sensors S1-1 and the hall sensor S1-2 attached to the position detection device 1, and the two hall sensors S2-1 and S2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 are arranged so that the straight line connecting -2 is perpendicular (Y-axis direction).

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the Y axis.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, the position detection device 1 and the position detection device 2 were arranged so that the distance Md in the X-axis direction between the opposed surfaces of the magnet M1 and the magnet M2 was 0.1 mm.

  When obtaining the resolution of the position detection device 1 by calculation, the resolution was obtained in a state where the magnet M2 attached to the position detection device 2 was disposed at a position of 0 mm. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give. The movement direction of the magnet M1 of the position detection device 1 was the X-axis direction, and the movement direction of the magnet M2 of the position detection device 2 was the Y-axis direction.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 5.8 μm, and the resolution was 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) for a total stroke of 2 mm. This shows the same value as the resolution achieved by the position detection device 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 548.3 μm, and the resolution was 548.3 [μm] ÷ 2 [mm] = 274.2 [μm / mm] (27.4%) with respect to the total stroke of 2 mm. This means that the position detection accuracy is reduced by two digits or more as compared with the resolution of 2.2 [μm / mm] (0.22%) achieved by the position detection device 2 alone.

  From this result, the moving direction (Y-axis direction) of the magnet M2 attached to the position detection device 2 is not included in the symmetry plane including the magnetization direction vector of the magnet M1 attached to the position detection device 1 (claim). It can be seen that the accuracy of the position detection device 2 is deteriorated because the condition described in item 4 is not satisfied.

  In the implementation condition 4, the magnet M2 of the position detection device 2 is fixed at the origin, so that the position detection device 1 satisfies the condition described in claim 4, and therefore the accuracy is the same as that of a single unit. As described in the comparison condition 6, if the position M2 moves, the accuracy of the position detection device 1 also decreases. In such a case, it is used as a position detection system comprising one position detection device and one magnet.

<Condition 5>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  An example of designing optimum values of parameters of each component in FIG. 19 will be described.

  A schematic configuration of the implementation condition 5 is shown in FIGS.

  The position detection device 1 under the implementation condition 5 has the same configuration as the position detection device 2 under the implementation condition 1.

  Hereinafter, the optimum values of the parameters of the respective components related to the position detection device 2 under the implementation condition 5 will be described.

  The length Ml2 of the magnet M2 of the position detection device 2 is 3.9 mm, the width Mw2 of the magnet M2 of the position detection device 2 is 0.6 mm, and the thickness Mh2 of the magnet M2 of the position detection device 2 is 2.7 mm.

  Further, the distance Sd2 between the center of the magnetic sensitive surface of the first Hall sensor S2-1 of the position detecting device 2 and the center of the magnetic sensitive surface of the second Hall sensor S2-2 is 0.8 mm, and the position detecting device 2 The distance MS from the surface of the attached magnet M2 facing the two Hall sensors S2-1 and S2-2 to the magnetically sensitive surface of the two Hall sensors S2-1 and S2-2 is set to 0.5 mm.

  The rotation angle Mth2 on the XY plane with respect to the X axis of a straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is set to 4 °.

  The magnetization direction vector of the magnet M2 is the Z-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S2-1 and S2-2 is the Z-axis direction. Further, the two hall sensors S2-1 and S2-2 are arranged on the YZ plane including the center of gravity of the magnet M2. The moving direction of the magnet M2 is the X-axis direction.

When the same calculation as that of the position detection device 1 of the implementation condition 1 was performed with the above configuration, if the position detection device 2 of the implementation condition 5 is a single unit, the position detection error is 0.18 μm at the maximum, and the resolution is all Highly accurate position detection is achieved with 0.18 [μm] ÷ 2 [mm] = 0.09 [μm / mm] (0.009%) for a stroke of 2 mm.
Next, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 in the implementation condition 5 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 5 will be described.

  The magnetization direction vector (Y-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Y-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Z-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are orthogonal to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  The position detection device 1 and the position detection device 2 are set such that the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2 have the same value in the Y-axis direction. Arranged. The XZ plane (symmetric surface of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 includes the center of gravity of the magnet M2. On the other hand, the XZ plane magnet (symmetric plane of the magnet M2) that bisects the width Mw2 of the magnet M2 attached to the position detection device 2 does not include the center of gravity of the magnet M1.

  A straight line (X-axis direction) connecting the two hall sensors S1-1 and the hall sensor S1-2 attached to the position detection device 1, and the two hall sensors S2-1 and S2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 are arranged so that the straight line connecting -2 is perpendicular (Y-axis direction). The Hall sensor of each position detection device is not included in the symmetry plane of the magnets of the adjacent position detection devices.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves perpendicularly to the straight line connecting the Hall sensors and along the surface facing the straight line and the X axis.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating | requiring the resolution of the position detection apparatus 1 by calculation, it calculated | required in the state which has arrange | positioned the magnet M2 attached to the position detection apparatus 2 in the position of -1 mm. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 7.1 μm, and the resolution was 7.1 [μm] ÷ 2 [mm] = 3.5 [μm / mm] (0.35%) with respect to the total stroke of 2 mm. This is not much different from the resolution 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) achieved by the position detection apparatus 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 5.56 μm, and the resolution was 2.78 [μm / mm] (0.278%) for a total stroke of 2 mm. This means that the position detection accuracy is reduced by one digit or more as compared with the resolution of 0.09 [μm / mm] (0.009%) achieved by the position detection device 2 alone.

  From this result, the condition that the magnetic flux detection means of each position detection device is included in the symmetry plane of the magnet of the adjacent position detection device (the condition described in claim 5) is not satisfied. It can be seen that both the detection devices 2 have deteriorated position detection accuracy. However, the rotation angle Mth2 in the XY plane with respect to the X axis of the straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is as small as 4 °, and the above-described conditions (claims) However, the accuracy is only deteriorated to the extent that there is no practical problem (both the position detection device 1 and the position detection device 2 can detect the position with a full stroke of 2 mm with a resolution of 10 μm / mm).

<Execution condition 6>
In a wide temperature range, the position detection device 1 detects a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less, and the position detection device 2 detects a range of 8 mm (± 4 mm) with a resolution of 25 μm / mm or less. Show the case.

  An example of designing optimum values of parameters of each component in FIG. 19 will be described.

  A schematic configuration of the implementation condition 6 is shown in FIGS.

  The position detection device 1 under the execution condition 6 has the same configuration as the position detection device 2 under the execution condition 1.

  Hereinafter, the optimum values of the parameters of the respective components related to the position detection device 2 of the implementation condition 6 will be described.

  The length Ml2 of the magnet M2 of the position detection device 2 is 9.7 mm, the width Mw2 of the magnet M2 of the position detection device 2 is 1.4 mm, and the thickness Mh2 of the magnet M2 of the position detection device 2 is 1.0 mm.

  Further, the distance Sd2 between the center of the magnetic sensitive surface of the first Hall sensor S2-1 of the position detecting device 2 and the center of the magnetic sensitive surface of the second Hall sensor S2-2 is 0.8 mm, and the position detecting device 2 The distance MS2 = 0.5 mm from the surface of the attached magnet M2 facing the two Hall sensors S2-1 and S2-2 to the magnetosensitive surface of the two Hall sensors S2-1 and S2-2.

  The rotation angle Mth2 on the XY plane with respect to the X axis of a straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is set to 4 °.

  The magnetization direction vector of the magnet M2 is the Z-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S2-1 and S2-2 is the Z-axis direction. Further, the two hall sensors S2-1 and S2-2 are arranged on the YZ plane including the center of gravity of the magnet M2. The moving direction of the magnet M2 is the X-axis direction.

When the same calculation as that of the position detection device 1 of the implementation condition 1 was performed with the above configuration, if the position detection device 2 of the implementation condition 6 is a single unit, the position detection error is 20.1 μm at the maximum, and the resolution is all It can be seen that highly accurate position detection is achieved with 20.1 [μm] ÷ 8 [mm] = 2.51 [μm / mm] (0.251%) for a stroke of 8 mm.
Next, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 in the implementation condition 6 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 6 will be described.

  The magnetization direction vector (Y-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Y-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Z-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are orthogonal to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  The XZ plane (symmetric surface of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 includes the center of gravity of the magnet M2. On the other hand, the XZ plane magnet (symmetric plane of the magnet M2) that bisects the width Mw2 of the magnet M2 attached to the position detection device 2 does not include the center of gravity of the magnet M1.

  The position detection device 1 and the position detection device 2 are set such that the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2 have the same value in the Y-axis direction. Arranged.

  A straight line (X-axis direction) connecting the two hall sensors S1-1 and the hall sensor S1-2 attached to the position detection device 1, and the two hall sensors S2-1 and S2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 are arranged so that the straight line connecting -2 is perpendicular (Y-axis direction).

  The Hall sensor of each position detection device is not included in the symmetry plane of the magnets of the adjacent position detection devices.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves perpendicularly to the straight line connecting the Hall sensors and along the surface facing the straight line and the X axis.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. When the magnet M2 attached to the position detection device 2 moves to the position of −4 mm, the distance Md in the X-axis direction between the facing surfaces of the magnet M1 and the magnet M2 is Md = 0.5 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating | requiring the resolution of the position detection apparatus 1 by calculation, it calculated | required in the state which has arrange | positioned the magnet M2 attached to the position detection apparatus 2 in the position of -4 mm. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 7.82 μm, and the resolution was 7.82 [μm] ÷ 2 [mm] = 3.91 [μm / mm] (0.391%) with respect to the total stroke of 2 mm. This is not much different from the resolution 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) achieved by the position detection apparatus 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 20.1 μm, and the resolution was 20.1 [μm] ÷ 8 [mm] = 2.51 [μm / mm] (0.251%) with respect to the total stroke of 8 mm. This shows the same value as the resolution achieved by the position position detection device 2 alone.

  From this result, the condition that the magnetic flux detection means of each position detection device is included in the symmetry plane of the magnet of the position detection device that is close to the position detection device (the condition described in claim 5) is not satisfied. When the magnet length Ml2 is large like the magnet M2 attached to the device 2, the Hall sensors S2-1 and S2-2 attached to the position detection device 2 are replaced with the magnet M1 attached to the position detection device 1. It turns out that it is hardly influenced by leaving. Similarly to the implementation condition 5, the rotation angle Mth2 on the XY plane with respect to the X axis of the straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is as small as 4 °, Since it is close to the above conditions (the conditions described in claim 6), there is no practical problem (the position detection device 1 has a total stroke of 2 mm with a resolution of 10 μm / mm or less, and the position detection device 2 has a total stroke of 8 mm with a resolution of 25 μm / mm. (The position can be detected below) but the accuracy has deteriorated.

<Condition 7>
In a wide temperature range, the position detection device 1 detects a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less, and the position detection device 2 detects a range of 8 mm (± 4 mm) with a resolution of 25 μm / mm or less. Show the case.

  An example of designing optimum values of parameters of each component in FIG. 19 will be described.

  A schematic configuration of the implementation condition 7 is shown in FIGS.

  The position detection device 1 under the execution condition 7 has the same configuration as the position detection device 2 under the execution condition 1.

  Hereinafter, the optimum values of the parameters of the respective components related to the position detection device 2 under the implementation condition 7 will be described.

  The length Ml2 of the magnet M2 of the position detection device 2 is 9.4 mm, the width Mw2 of the magnet M2 of the position detection device 2 is 1.4 mm, and the thickness Mh2 of the magnet M2 of the position detection device 2 is 1.4 mm.

  Further, the distance Sd2 between the center of the magnetic sensitive surface of the first Hall sensor S2-1 of the position detecting device 2 and the center of the magnetic sensitive surface of the second Hall sensor S2-2 is 0.8 mm, and the position detecting device 2 The distance MS2 = 0.5 mm from the surface of the attached magnet M2 facing the two Hall sensors S2-1 and S2-2 to the magnetosensitive surface of the two Hall sensors S2-1 and S2-2.

  A rotation angle Mth2 on the XY plane with respect to the X axis of a straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is set to 8 °.

  The magnetization direction vector of the magnet M2 is the Z-axis direction, and the direction of the magnetic flux density that can be detected by the two Hall sensors S2-1 and S2-2 is the Z-axis direction. Further, the two hall sensors S2-1 and S2-2 are arranged on the YZ plane including the center of gravity of the magnet M2.

  The moving direction of the magnet M2 is the X-axis direction.

When the same calculation as that of the position detection device 1 of the implementation condition 1 was performed with the above configuration, if the position detection device 2 of the implementation condition 7 is a single unit, the position detection error is 14.0 μm at the maximum, and the resolution is all It can be seen that highly accurate position detection is achieved with 14.0 [μm] ÷ 8 [mm] = 1.75 [μm / mm] (0.175%) for a stroke of 8 mm.
Next, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 in the implementation condition 7 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 7 will be described.

  The magnetization direction vector (Y-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Y-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Z-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are orthogonal to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  The position detection device 1 and the position detection device 2 are set such that the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2 have the same value in the Y-axis direction. Arranged. The XZ plane (symmetric surface of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 includes the center of gravity of the magnet M2. On the other hand, the XZ plane magnet (symmetric plane of the magnet M2) that bisects the width Mw2 of the magnet M2 attached to the position detection device 2 does not include the center of gravity of the magnet M1.

  A straight line (X-axis direction) connecting the two hall sensors S1-1 and the hall sensor S1-2 attached to the position detection device 1, and the two hall sensors S2-1 and S2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 are arranged so that the straight line connecting -2 is perpendicular (Y-axis direction).

  The Hall sensor of each position detection device is included in the symmetry plane of each magnet, but is not included in the symmetry plane of the magnet of the adjacent position detection device.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves along the X axis and the plane perpendicular to the straight line connecting the Hall sensors and facing them.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. When the magnet M2 attached to the position detection device 2 moves to the position of −4 mm, the distance Md in the X-axis direction between the facing surfaces of the magnet M1 and the magnet M2 is Md = 0.5 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating | requiring the resolution of the position detection apparatus 1 by calculation, it calculated | required in the state which has arrange | positioned the magnet M2 attached to the position detection apparatus 2 in the position of -4 mm. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 8.72 μm, and the resolution was 8.72 [μm] ÷ 2 [mm] = 4.36 [μm / mm] (0.436%) for a total stroke of 2 mm. This is not much different from the resolution 5.8 [μm] ÷ 2 [mm] = 2.9 [μm / mm] (0.29%) achieved by the position detection apparatus 1 alone.

  Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 14.2 μm, and the resolution was 14.2 [μm] ÷ 8 [mm] = 1.77 [μm / mm] (0.177%) with respect to the total stroke of 8 mm. This shows almost the same value as the resolution achieved by the position detection device 2 alone.

  From this result, the condition that the magnetic flux detection means of each position detection device is included in the symmetry plane of the magnet of the position detection device that is close to the position detection device (the condition described in claim 5) is not satisfied. When the magnet length Ml2 is large like the magnet M2 attached to the device 2, the Hall sensors S2-1 and S2-2 attached to the position detection device 2 are replaced with the magnet M1 attached to the position detection device 1. It turns out that it is hardly influenced by leaving. However, the rotation angle Mth2 in the XY plane with respect to the X axis of the straight line that bisects the line segment of the width Mw2 of the magnet M2 attached to the position detection device 2 is 8 °, and the rotation angle Mth2 is determined from the execution condition 6. Since it is large, the resolution of the position detection device 1 is lower than that of the implementation condition 6 because it is away from the above condition (the condition described in claim 6), but there is no practical problem.

<Comparison condition 2>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  A parameter design example of each component in FIG. 21 will be described.

  A schematic configuration of the comparison condition 2 is shown in FIGS.

  Both the position detection device 1 and the position detection device 2 under the comparison condition 2 have the same configuration as the position detection device 2 under the implementation condition 1.

  Hereinafter, the resolutions of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the comparison condition 2 are arranged close to each other were obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the comparison condition 2 will be described.

  The magnetization direction vector (Y-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Y-axis direction) of the magnet M2 attached to the position detection device 2 are on the same plane and are parallel. The position detection device 1 and the position detection device 2 were arranged so that

  A magnetic flux density (Y-axis direction) in which the magnetic sensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are parallel to the magnetization vector of the magnet M2 attached to the position detection device 2 is obtained. Magnetic flux density (Y-axis) that can be detected and the magnetic sensitive surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are parallel to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the direction can be detected.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detection device 1 and the position detection device 2 are arranged so that the XZ plane magnets (symmetrical surfaces of the magnet M2) to be included include the Hall sensors of the position detection devices on the same plane and close to each other.

  The magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are on the same straight line (a straight line parallel to the X axis). The position detecting device 1 and the position detecting device 2 are arranged in the above.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnets attached to the position detection device 1 and the position detection device 2 moves along the X axis parallel to the straight line connecting the Hall sensors.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating the resolution of the position detection device 1 by calculation, the magnet M2 attached to the position detection device 2 is moved to a position of −1 mm, that is, the magnet M2 has the greatest influence on the resolution of the position detection device 1. Asked for the state. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 62.3 μm, and the resolution was 62.3 [μm] ÷ 2 [mm] = 31.17 [μm / mm] (3.12%) with respect to the total stroke of 2 mm. This means that the accuracy has dropped by one digit or more compared to the resolution of 2.91 [μm / mm] (0.291%) achieved by the position detection device 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 Needless to say, the resolution is the same as the result of the position detection apparatus 1.

  From this result, in the position detection system of the comparison condition 2, the magnetization direction vectors of the magnets of the respective position detection devices are on the same plane (does not satisfy the condition described in claim 1), and has no orthogonal component. Therefore, the magnetic flux detection means of one position detection device can detect the orthogonal component of the magnetization direction vector of the magnet attached to the other position detection device. Therefore, it can be seen that both the position detection device 1 and the position detection device 2 are significantly deteriorated in accuracy (the condition described in claim 3 is not satisfied).

<Comparison condition 3>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range.

  A design example of parameters of each component in FIG. 22 will be described.

  A schematic configuration of the comparison condition 3 is shown in FIGS.

  Both the position detection device 1 and the position detection device 2 under the comparison condition 3 have the same configuration as the position detection device 1 under the implementation condition 1. This is the same configuration as the conventional position detection system described in Patent Document 3.

  Below, the resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the comparison condition 3 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the comparison condition 3 will be described.

  The magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are on the same plane and are parallel. The position detection device 1 and the position detection device 2 were arranged so that

  The magnetic flux density (Z-axis direction) in which the magnetosensitive surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are parallel to the magnetization vector of the magnet M2 attached to the position detection device 2 is obtained. Magnetic flux density (Z-axis) that can be detected and the magnetic sensing surfaces of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 are parallel to the magnetization vector of the magnet M1 attached to the position detection device 1 The position detection device 1 and the position detection device 2 are arranged so that the direction can be detected.

  An XZ plane (symmetric plane of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 and a width Mw2 of the magnet M2 attached to the position detection device 2 are divided into two halves. The position detection device 1 and the position detection device 2 are arranged so that the XZ plane magnets (symmetrical surfaces of the magnet M2) to be included include the Hall sensors of the position detection devices on the same plane and close to each other.

  The magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are on the same straight line (a straight line parallel to the X axis). The position detecting device 1 and the position detecting device 2 are arranged in the above.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnets attached to the position detection device 1 and the position detection device 2 moves along the X axis parallel to the straight line connecting the Hall sensors.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. Then, when the magnet M2 attached to the position detection device 2 moves to the position of -1 mm, the distance Md in the X-axis direction between the opposing surfaces of the magnet M1 and the magnet M2 is 0.1 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating the resolution of the position detection device 1 by calculation, the magnet M2 attached to the position detection device 2 is moved to a position of −1 mm, that is, the magnet M2 has the greatest influence on the resolution of the position detection device 1. Asked for the state. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 41.8 μm, and the resolution was 41.8 [μm] ÷ 2 [mm] = 20.9 [μm / mm] (2.9%) for a total stroke of 2 mm. This means that the accuracy is reduced by about one digit compared with the resolution of 2.91 [μm / mm] (0.291%) achieved by the position detection device 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 Needless to say, the resolution is the same as the result of the position detection apparatus 1.

  From this result, in the position detection system of the comparison condition 3, the magnetization direction vectors of the magnets of the respective position detection devices are on the same plane (does not satisfy the condition described in claim 1), and has no orthogonal component. Therefore, the magnetic flux detection means of one position detection device can detect the orthogonal component of the magnetization direction vector of the magnet attached to the other position detection device. Therefore, it can be seen that both the position detection device 1 and the position detection device 2 are significantly deteriorated in accuracy (the condition described in claim 3 is not satisfied).

<Comparison condition 4>
In a wide temperature range, the position detection device 1 detects a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less, and the position detection device 2 detects a range of 8 mm (± 4 mm) with a resolution of 25 μm / mm or less. Show the case. A parameter design example of each component in FIG. 23 will be described.

  A schematic configuration of the comparison condition 4 is shown in FIGS.

  The position detection device 1 under the comparison condition 4 has the same configuration as the position detection device 1 under the implementation condition 1.

  The position detection device 2 under the comparison condition 4 has the same configuration as the position detection device 2 under the implementation condition 6.

  The resolution of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 of the comparison condition 4 are arranged close to each other was obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the comparison condition 4 will be described.

  The magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Z-axis direction) of the magnet M2 attached to the position detection device 2 are on the same plane and are parallel. The position detection device 1 and the position detection device 2 were arranged so that

  The magnetic sensing surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 detect the magnetic flux density (Z-axis direction) parallel to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Z-axis direction) of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 is parallel to the magnetization vector of the magnet M1 attached to the position detection device 1. The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  The position detection device 1 and the position detection device 2 are set such that the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2 have the same value in the Y-axis direction. Arranged.

  The XZ plane (symmetric surface of the magnet M1) that bisects the width Mw1 of the magnet M1 attached to the position detection device 1 includes the center of gravity of the magnet M2. On the other hand, the XZ plane magnet (symmetric plane of the magnet M2) that bisects the width Mw2 of the magnet M2 attached to the position detection device 2 does not include the center of gravity of the magnet M1.

  A straight line (X-axis direction) connecting the two hall sensors S1-1 and the hall sensor S1-2 attached to the position detection device 1, and the two hall sensors S2-1 and S2 attached to the position detection device 2 The position detection device 1 and the position detection device 2 are arranged so that the straight line (−Y direction) connecting −2 is orthogonal.

  The Hall sensor of each position detection device is included in the symmetry plane of each magnet, but is not included in the symmetry plane of the magnet of the adjacent position detection device.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves perpendicularly to the straight line connecting the Hall sensors and along the surface facing the straight line and the X axis.

  When the magnet M1 attached to the position detection device 1 and the magnet M2 attached to the position detection device 2 move and come closest to each other, that is, the magnet M1 attached to the position detection device 1 moves to a position of +1 mm. When the magnet M2 attached to the position detection device 2 moves to the position of −4 mm, the distance Md in the X-axis direction between the facing surfaces of the magnet M1 and the magnet M2 is Md = 0.5 mm. The position detection device 1 and the position detection device 2 are arranged.

  When calculating | requiring the resolution of the position detection apparatus 1 by calculation, it calculated | required in the state which has arrange | positioned the magnet M2 attached to the position detection apparatus 2 in the position of -4 mm. Further, when the resolution of the position detection device 2 is obtained by calculation, the magnet M1 attached to the position detection device 1 is moved to the position of +1 mm, that is, the magnet M1 has the most influence on the resolution of the position detection device 2. I asked for it to give.

  The movement direction of the magnet M1 of the position detection device 1 was the X-axis direction, and the movement direction of the magnet M2 of the position detection device 2 was the X-axis direction.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 150.1 μm, and the resolution was 150.1 [μm] ÷ 2 [mm] = 75.05 [μm / mm] (7.505%) for a total stroke of 2 mm. This is less than an order of magnitude accuracy compared to the resolution of 2.2 [μm / mm] (0.22%) achieved by the position detection device 1 alone. Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 20.1 μm, and the resolution was 20.1 [μm] ÷ 8 [mm] = 2.51 [μm / mm] (0.251%) with respect to the total stroke of 8 mm. This shows the same value as the resolution achieved by the position detection device 2 alone.

  From this result, in the position detection system of comparison condition 4, the magnetization direction vectors of the magnets of the respective position detection devices are on the same plane (does not satisfy the conditions described in claim 1), and have orthogonal direction components. Therefore, the magnetic flux detection means of one position detection device can detect the orthogonal component of the magnetization direction vector of the magnet attached to the other position detection device. (The condition described in claim 3 is not satisfied).

  Since the magnetic flux detection means of each position detection device does not satisfy the condition (the condition described in claim 5) that the position detection device is included in the symmetrical plane of the magnet, the accuracy of the position detection device 1 is significantly deteriorated. I understand that

<Condition 8>
A case will be described in which the position detection device 1 and the position detection device 2 detect a position in a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range. A parameter design example of each component in FIG. 24 will be described.

  A schematic configuration of the working condition 8 is shown in FIGS.

  The position detection device 1 under the execution condition 8 has the same configuration as the position detection device 1 under the execution condition 1.

  The position detection device 2 under the implementation condition 8 has the same configuration as the position detection device 2 under the implementation condition 1.

  The difference between the execution condition 8 and the execution condition 1 is that the distance Mc in the Y-axis direction between the center of gravity of the magnet M1 attached to the position detection device 1 and the center of gravity of the magnet M2 attached to the position detection device 2 is 0.1 mm. The position detecting device 1 and the position detecting device 2 are arranged in the above.

  The resolutions of the position detection device 1 and the position detection device 2 when the position detection device 1 and the position detection device 2 in the implementation condition 8 are arranged close to each other were obtained.

  Here, the arrangement relationship between the position detection device 1 and the position detection device 2 under the implementation condition 5 will be described.

  The magnetization direction vector (Z-axis direction) of the magnet M1 attached to the position detection device 1 and the magnetization direction vector (Y-axis direction) of the magnet M2 attached to the position detection device 2 are not on the same plane and are orthogonal. Thus, the position detection device 1 and the position detection device 2 are arranged.

  Detects the magnetic flux density (Z-axis direction) in which the magnetic sensing surfaces of the two Hall sensors S1-1 and S1-2 attached to the position detection device 1 are orthogonal to the magnetization vector of the magnet M2 attached to the position detection device 2. The magnetic flux density (Y-axis direction) of the two Hall sensors S2-1 and S2-2 attached to the position detection device 2 is perpendicular to the magnetization vector of the magnet M1 attached to the position detection device 1. The position detection device 1 and the position detection device 2 are arranged so that the signal can be detected.

  The magnetosensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are on the same straight line (a straight line parallel to the X axis). The position detection device 1 and the position detection device 2 were arranged so as to be placed and parallel at a distance Mc.

  The Hall sensor of each position detection device is included in the magnet symmetry plane, but is not included in the magnet symmetry plane of the adjacent position detection device.

  Position detection so that the centers of the magnetic sensitive surfaces of the Hall sensors S1-1, S1-2, S2-1, and S2-2 attached to the position detection device 1 and the position detection device 2 are the same in the Z-axis direction. The device 1 and the position detection device 2 are arranged.

  The movement of the magnet attached to the position detection device 1 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  The movement of the magnet attached to the position detection device 2 moves along a plane parallel to the straight line connecting the Hall sensors and facing these and the X axis.

  As a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 2 is arranged close to the position detection device 1 under the above conditions, the position detection of the position detection device 1 The maximum error was 12.8 μm, and the resolution was 12.8 [μm] ÷ 2 [mm] = 6.4 [μm / mm] (0.64%) with respect to the total stroke of 2 mm. This is about 2.9 times lower than the resolution 2.2 [μm / mm] (0.22%) achieved by the position detection device 1 alone, but the resolution is 10 μm / m or less. Has high resolution.

  Further, as a result of performing the same calculation as in the case of only the position detection device 1 of the implementation condition 1 when the position detection device 1 is arranged close to the position detection device 2 under the above conditions, the position detection device 2 The maximum position detection error was 6.5 μm, and the resolution was 6.5 [μm] ÷ 2 [mm] = 3.25 [μm / mm] (0.325%) with respect to the total stroke of 2 mm. This is about 1.1 times lower than the resolution 2.9 [μm / mm] (0.29%) achieved by the position position detection device 2 alone, but the resolution is 10 μm / m or less. Has high resolution.

  From this result, in the position detection system according to the implementation condition 8, the relative movement direction of the magnet attached to one position detection device satisfying claims 1 to 3 is the magnet attached to the other position detection device. Is not included in the plane of symmetry including the magnetization direction vector (the condition of claim 4 is not satisfied), and a plurality of magnetic flux detection means are arranged to face each other at each position detection. Since the symmetry plane of each magnet including the magnetic flux detection means of each position detection device is not on the same plane (not satisfying the condition described in claim 6), the amount is small. It can be seen that both the position detection device 1 and the position detection device 2 have position detection accuracy.

<Condition 9>
FIG. 14 shows that the position detection devices 1 to 3 (position detection device A, position detection device B, and position detection device C) detect a range of 2 mm (± 1 mm) with a resolution of 10 μm / mm or less in a wide temperature range. The case where it does is shown.

  In FIG. 14, the magnet 1403a of the position detection apparatus A moves in the movement direction 1401a, and the position of the magnet 1403a is detected by the Hall sensors S1-1 and S1-2 on the substrate 1404a. In FIG. 14, the magnetization direction vector 1402a of the magnet 1403a is illustrated as an example.

  In FIG. 14, the magnet 1403b of the position detection device B moves in the movement direction 1401b, and the position of the magnet 1403b is detected by the Hall sensors S2-1 and S2-2 on the substrate 1404b. In FIG. 14, the magnetization direction vector 1402b of the magnet 1403b is illustrated as an example.

  In FIG. 14, the magnet 1403c of the position detection device C moves in the movement direction 1401c, and the position of the magnet 1403c is detected by the Hall sensors S3-1 and S3-2 on the substrate 1404c. In FIG. 14, the magnetization direction vector 1402c of the magnet 1403c is illustrated as an example.

  The implementation conditions 1 to 8 shown in the present invention are those of a position detection system using two position detection devices. However, by adding a position detection device having conditions equivalent to those of the two position detection devices, 3 It is obvious that a position detection system having two or more position detection devices can be obtained. For example, as shown in FIG. 14, a position detection device 3 (position detection device C) equivalent to the position detection device 1 (position detection device A) under the implementation condition 1 is provided with the position detection device 2 (position detection device B) interposed therebetween. Thus, two real implementation conditions 1 can be satisfied at the same time. It is also possible to add the position detection device 2 and sandwich the position detection device 1. The same thing is possible with other implementation conditions.

  Table 1 shows a list of dimensions, resolution, etc. of the implementation conditions of the present invention, and Table 2 shows a list of dimensions, resolution, etc., of the comparison conditions. Table 3 shows a correspondence list between the implementation conditions and comparison conditions and claims 1, 2, and 6. Table 4 shows a correspondence list between the implementation conditions and comparison conditions and claims 3-5.

It is the figure which showed the example of the system which has two position detection apparatuses. It is a figure which shows the example of the magnet used by this invention. It is a figure which shows the conditions of the magnetization direction vector in this invention. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows a magnetization direction vector and a magnet arrangement | positioning figure. It is a figure which shows the block diagram of the implementation conditions in this invention. It is a figure which shows the block diagram of the implementation conditions in this invention. It is a figure which shows the block diagram of the implementation conditions in this invention. It is a figure which shows the block diagram of the implementation conditions in this invention. It is a figure which shows the block diagram of the implementation conditions in this invention. It is a figure which shows the block diagram of the comparison conditions in this invention. It is a figure which shows the block diagram of the comparison conditions in this invention. It is a figure which shows the block diagram of the comparison conditions in this invention. It is a figure which shows the block diagram of the comparison conditions in this invention. It is a figure which shows the block diagram of the comparison conditions in this invention. It is a figure which shows the typical schematic structure of this invention. It is a figure explaining a linearization process. It is a figure which shows the change of the magnetic flux density with respect to the moving distance of the rectangular parallelepiped magnet M1. It is a figure which shows the change of the magnetic flux density with respect to the moving distance of the rectangular parallelepiped magnet M1. It is a figure which shows the change of the magnetic flux density with respect to the moving distance of the rectangular parallelepiped magnet M1. It is a figure which compares the result of a magnetic simulation, and an ideal straight line. It is the figure which showed the error in the position detection converted from the shift | offset | difference of the ideal straight line 21 and the result of the magnetic simulation shown in FIG.

Explanation of symbols

S1-1 Hall sensor S1-2 Hall sensor S2-1 Hall sensor S2-2 Hall sensor 11 Magnetic flux density change 12 Magnetic flux density change 13 Difference of magnetic flux density change 21 Ideal straight line 22 Region

Claims (13)

A plurality of position detection devices each including a magnet in which each of the N and S poles is unipolarly magnetized and a magnetic flux detection means for detecting a change in magnetic flux due to relative movement of the magnet; to at least one set of position detecting apparatus, it has a magnetization direction vector orthogonal direction components to each other of the magnet, and
Of the at least one set of adjacent position detection devices, the magnetic flux detection means of at least one position detection device can detect the orthogonal component of the magnetization direction vector of the magnet of the other position detection device. A position detection system characterized by In the position detection system, a relative movement direction of a magnet included in at least one position detection device among the at least one pair of position detection devices close to each other is a magnet surface facing a magnetic flux detection unit included in the position detection device. The position detection system according to claim 1 , wherein the position detection system is on the plane of symmetry of the magnet including the center of gravity of the magnet of the other position detection device . In the position detection system, in at least one position detection device of the at least one set of adjacent position detection devices, the magnetic flux detection means is included in a symmetry plane of a magnet included in the other position detection device. Item 3. The position detection system according to any one of Items 1 to 2 . 4. The position detection system according to claim 1, wherein the symmetry planes of the magnets included in the at least one pair of position detection devices adjacent to each other are on the same plane . 5. 5. The at least one set of adjacent position detection devices included in the position detection system, wherein the magnetic flux detection means is included in a symmetry plane of the magnets arranged to face each other. The position detection system described in. 6. The position detection system according to claim 1, wherein there are two position detection devices that constitute the position detection system. The position detection system according to any one of claims 1 to 6, wherein angles formed by magnet magnetization direction vectors of the at least one pair of adjacent position detection devices are orthogonal to each other . The magnetic flux detection means included in any of the at least one set of position detection devices close to each other can detect a magnetic flux density parallel to a magnetization direction vector of a magnet arranged to face the magnetic flux detection means. Item 8. The position detection system according to any one of Items 1 to 7 . The position detection system according to claim 1, wherein the magnetic flux detection means is a Hall sensor having a pair of magnetic sensors . 10. The position detection system according to claim 1, wherein the position detection system includes a magnetic body . The position detection system according to claim 1, wherein the magnetic flux detection unit is mounted on the same substrate . An optical system using the position detection system according to claim 1 . An imaging apparatus using the optical system according to claim 12 .

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