JP4918709B2 - Compact discharge light source device - Google Patents

Description

  The present invention relates to a compact high-power gas discharge light source device, and more specifically, it can efficiently extract light from a high-intensity light source by arc discharge such as a mercury lamp or a xenon lamp, and has a small structure including a heat sink for high current. The lamp holder can be compact and detachable, and a mirror module in which a plurality of filters for removing the heat component of the extracted light are stacked can be assembled. The present invention relates to a high compact discharge light source device.

  Conventionally, the discharge light source device has a problem that it is difficult to make the device compact, while high luminance can be obtained. The problems are shown below.

  First, the gas discharge lamp itself required a large volume. That is, as described in Patent Documents 1 and 2, the discharge lamp is manufactured in a glass sphere of a two-pole lead wire, and the discharge light in the glass is a reflecting mirror disposed around the outside of the glass sphere, The discharge light is emitted in one direction by a reflector.

  Accordingly, the light is reflected by the reflecting mirror in the space outside the lamp discharge space, which is disadvantageous for downsizing.

  In order to solve this problem, a discharge lamp having a configuration in which discharge light in a discharge space inside the lamp discharge space is directly reflected by a reflecting mirror film has been disclosed. (See Non-Patent Document 1)

  In the conventional light source device, the discharge lamp as described above is used as a light source, and in order to remove the thermal component infrared wavelength region of the light source, it is necessary to install a multilayer heat component transmission filter or the like in accordance with the optical axis of the discharge lamp. there were.

  In addition, the light source device has to be provided on the optical path with a mechanism for adjusting the output light to a predetermined light amount and a function for splitting the output light into a predetermined wavelength range.

  The light source device incorporating these functions in the heat component removal filter section and the light source lamp is large and expensive. Furthermore, the adjustment work for setting the optical path of the light source device and incorporating each part is not easy, and there is a problem that it takes a long adjustment time.

Japanese Patent Laying-Open No. 2005-302682 (second page, FIG. 1) Japanese Unexamined Patent Publication No. 2007-65507 (second page, FIG. 3, FIG. 4) CERMAX XENON ARC LAMPS (registered trademark of PerkinElmer) (www.perkinelmer.com/opto)

  In view of the above-described problems, the compact discharge light source device of the present invention is provided with a receiving mechanism for each of the following components on the assembly substrate base, each detachable, and can be easily integrated and assembled. A light source device that is easy to operate is provided.

(1) Lamp cartridge components A high-power discharge lamp with a small structure in which a vapor-deposited film serving as a reflecting mirror is formed in the gas discharge space is adopted, and a jig is placed in a compact lamp holder with the optical axis of the small lamp in place. A lamp cartridge unit comprising a lamp holder that can be horizontally adjusted and fixed, and a power connector that connects an electrode and a power supply terminal via a heat dissipation plate provided in the lamp holder.

(2) Mirror module constituent element A filter section in which a plurality of mirror surfaces of a multilayer thermal component transmission filter that transmits the infrared wavelength region of input light and reflects a wavelength region shorter than the wavelength region are combined and transmitted. A mirror module unit comprising an optical trap that absorbs the heat component wavelength and a concave mirror for preventing the light flux of reflected light from diverging.

(3) Constituent elements of the light quantity adjustment function A structure in which the light quantity is continuously changed without changing the luminous flux so that the transmittance through which light is transmitted linearly changes along the outer circumference of the transparent disk. The mechanism is to deposit chromium with varying thickness and rotate the disk with a motor, etc., with the light output exit window from the mirror module section facing the outer peripheral edge of the disk and rotating the disk. For example, a light amount adjusting mechanism having a structure in which the outer peripheral surface moves and the light output changes linearly without changing the luminous flux.

(4) Components of the spectroscopic function Necessary wavelength range of the light in the cold wavelength region that has been heat-removed by inputting the light output of the mirror module unit or the light output of the light amount adjusting mechanism unit Of light using an optical interference film filter, and for this purpose, spectral arrangement with a structure in which a predetermined filter film plate can be selected by arranging the discs at regular intervals on the outer periphery of the disc and rotating the disc. Mechanism part.

  The above components (1), (2), (3), and (4) are each detachably integrated so that the optical paths are easily matched, and it is possible to provide a low-cost apparatus that does not take time to assemble. Objective.

In order to solve the above problems, a compact discharge light source device according to the present invention is a reflector comprising an insulating member having a rotating curved reflecting mirror film that reflects light in a discharge gas space formed on the inner peripheral side and a cylindrical shape on the outer peripheral side. And an annular cathode terminal and an anode terminal which are located at both ends of the reflector on the outer circumference of the cylinder and are connected to the cathode and anode in the space and surround the reflector, respectively, for transmitting the reflected light to the outside of the space. 2 sets of structures in which a plurality of radial wings are connected to the cathode terminal and the anode terminal in order to dissipate heat in a high current arc discharge space, and a dielectric window connected in a hermetically sealed manner on the reflector circumference A compact, high-power discharge lamp consisting of
An insulating lamp holder capable of adjusting and fixing the discharge lamp and the heat sink at a predetermined position with the optical axis direction of the reflecting mirror film being horizontal, and a multi-contact band structure connected to the lower side of the two sets of heat sinks A detachable power connector terminal, and a lamp cartridge portion comprising:
With the mirror surface of the multilayer thermal component transmission filter that transmits the infrared wavelength region of the discharge lamp light source and reflects the wavelength region shorter than the infrared wavelength, the input light from the lamp light source is reflected from one filter, A pair of two pairs in which the incident light angles to each stage filter are arranged in parallel so that the state of one step entering the other filter can be repeated alternately (n is an integer of 1 or more). A mirror module unit comprising at least a filter unit, and two optical trap units that are located outside the pair of filter units and have a concavo-convex unit that absorbs and absorbs heat component light,
It comprises a lamp cartridge part receiving mechanism which is detachably assembled at a predetermined position and has a connector terminal receiving port, and an assembly board base part provided with a mirror module part receiving mechanism.

  Further, the mirror module unit further prevents the light beam from diverging from the first-stage input optical path and the final-stage output optical path to the counter-filter unit, and reduces the light amount loss during propagation. It is characterized in that the mirror surface of the final stage multilayer heat component transmission filter is a concave mirror (comprising a concave mirror portion for focusing light provided on each optical path input filter surface).

  In addition, the light output from which the heat component is removed from the mirror module part is input, and the light transmittance is linearly changed without changing the luminous flux. A rotating disk deposited by changing the thickness of the mirror module is provided, and a light amount adjusting mechanism unit is provided on the output side of the mirror module unit so that the relationship between the circumferential angle and the light transmittance is linear at a predetermined angle. And

  Moreover, in order to input the light output from which the thermal component from the mirror module part is removed and perform predetermined spectroscopy on the light, various optical interference film filter plates are arranged at equal intervals on the periphery of the disk, A spectral selection mechanism that can rotate in the circumferential direction and select a predetermined filter membrane plate is provided on the output side of the mirror module.

  The discharge lamp may be a mercury lamp, a mercury xenon lamp, a metal hydride lamp, or a xenon lamp.

  The present invention relates to a lamp cartridge unit including a lamp holder with an adjusted optical axis and its heat radiating plate, a heat removal mirror module unit, a rotating disk type filter unit for adjusting the amount of light, and a rotary spectroscope for selecting a spectral wavelength. This is a light source device that is assembled and integrated along the discharge light input optical path, and can be easily reduced in size and cost.

  In particular, in the optical path of the mirror module section, a concave mirror is provided on the mirror surface of the multilayer thermal component transmission filter (a condensing concave mirror lens is provided), and a light source device with reduced light loss is provided as a structure for preventing the divergence of light flux. In addition, since the light source device includes the mirror module unit, the heat component of the output light can be sufficiently reduced, so that it is possible to irradiate the sample surface that does not like heat.

  Since the lamp cartridge part is detachable from the receiving (attaching) mechanism of the apparatus substrate base part, the lamp cartridge part can be easily replaced according to the lamp life and does not require time. Further, the optical axis is not displaced after the lamp is replaced, and the output performance is not deteriorated. Furthermore, accidents such as lamp breakage, poor contact, and short circuits are eliminated or reduced.

  Since the mirror module part is also detachable from the receiving (attaching) mechanism of the apparatus substrate base part, it does not take time to replace. Also, efficient heat removal can be performed according to the wavelength used depending on the type of discharge gas light source. Furthermore, by providing an optical trap, the heat component can be efficiently diffused and removed.

  Hereinafter, embodiments of the compact discharge light source device of the present invention will be described in detail with reference to the drawings.

  1A and 1B show the structure of a compact discharge light source device, where FIG. 1A is a plan view, FIG. 1B is a front view, and FIG. 1C is a side view. 2A and 2B are diagrams showing an assembled substrate base part in which a lamp cartridge part and a mirror module part that are detachable from the compact discharge light source device shown in FIG. 1 are removed, wherein FIG. 2A is a plan view, FIG. 2B is a front view, c) is a side view. FIG. 3 is a front view showing only each mechanism part of the compact discharge light source device. FIG. 7 is a development view of the assembly board base portion shown in FIG.

  The compact discharge light source device of the present invention includes a lamp cartridge unit 20, a mirror module unit 30, a light amount adjustment mechanism unit 40, and a spectral selection mechanism unit 50 that are detachably mounted on an assembly substrate base unit 60 shown in FIG. And a light source output end 90. Hereinafter, each structure of the compact discharge light source device of this invention is demonstrated.

  As for the lamp cartridge unit 20, the front view of FIG. 1A and FIG. 3 are a front view, FIG. 1B is a front view, and FIG. 1C is a side view of the lamp cartridge unit viewed from the rear. . FIG. 5 shows a development view of the lamp cartridge portion.

  Further, the discharge lamp 10 mounted on the lamp cartridge unit 20 will be described in detail with reference to a cross-sectional view showing the structure of the discharge lamp in FIG. It should be noted that the structure of the discharge lamp 10 shown in FIG.

  First, the structure of the small-sized discharge lamp 10 mounted on the lamp cartridge unit 20 will be described.

  1 is a gas discharge space filled with xenon gas, 2 is an anode, 3 is a cathode, 11 is made of an insulating or non-conductive plastic, ceramic or crystallized glass, the outer peripheral side is cylindrical, the inner peripheral side is rotating It is a reflector having a curved surface or a rotating surface. A reflecting mirror film 11 a is deposited along the inner peripheral side of the reflector 11.

  A metal annular anode terminal 12 and a cathode terminal 13 serving as electrode terminals are wound around the outer periphery of the reflector 11, and conductive metal parts for supporting and fixing the anode 2 inside the anode terminal 12. An anode support conductive portion 17 is provided, and a cathode support conductive portion 18 of a conductive metal part that supports and fixes the cathode 3 is provided inside the cathode terminal 13.

  The cathode supporting conductive portion 18 is a conductive portion that extends radially from the supporting portion of the central cathode 3 at intervals of 120 degrees and is configured to transmit the discharge light of the electrode. The anode supporting conductive portion 17 includes a gas filled exhaust pipe 19.

  Reference numeral 14 denotes a dielectric window that transmits light generated in the discharge space to the outside of the lamp. The dielectric window 14 is made of a material that can withstand high output light such as sapphire, crystallized glass, or ceramic.

  The reflector 11 is hermetically sealed with gas such as xenon, mercury, mercury xenon, etc. by the dielectric window 14 and the anode supporting conductive portion 17 before and after the reflector 11. The discharge lamp 10 can emit light with high brightness by arc discharge in these sealed gases.

  The structure of the lamp cartridge unit 20 will be described with reference to FIGS. On the outer periphery of the annular anode terminal 12 and the cathode terminal 13 of the discharge lamp 10, heat sinks 15 and 16 are further provided, respectively. The heat radiating plates 15 and 16 are in the form of a plurality of radial wings (see the developed view of FIG. 5), and dissipate the heat of the discharge lamp 10 that generates heat when a large current flows.

  The lamp cartridge unit 20 is housed in the cylindrical cavity of the lamp holder 21 at the center thereof with the optical axis direction of the discharge lamp 10 being horizontal. That is, the optical axis direction of the light beam, which is the reflection direction of the light emitted from the focal point of the reflecting mirror film 11a of the discharge lamp 10, is stored horizontally.

  Before storing, the heat sinks 15 and 16 wound around the annular anode terminal 12 and cathode terminal 13 outside the discharge lamp 10 are leveled by a jig and fixed by an adjusting screw 22 therebetween, and then the lamp cartridge portion. It is inserted into the cylindrical cavity of the 20 lamp holders 21 and stored. (See Figure 5)

  The lamp holder 21 is preferably made of an insulating ceramic or crystallized glass having a high thermal conductivity. Alternatively, the lamp holder 21 may be made of a plastic that is resistant to heat, and the cost may be reduced as a combination in direct contact with the heat sinks 15 and 16.

  In any case, the power connectors 25 and 26 are connected to the heat sinks 15 and 16 toward the lower side of the lamp holder 21, respectively. (See Figure 5)

  The lamp cartridge part 20 has its handle 20a, and is inserted into a lamp cartridge part receiving mechanism in the insertion space on the right side of the assembly board base part 60 shown in FIGS. Can do.

  The lamp cartridge unit receiving mechanism includes lamp cartridge mounting side plates 61 and 62 and a circular hole plate 65. The lamp cartridge unit 20 is inserted along the lamp cartridge mounting side plates 61 and 62 and stopped at a predetermined position by the upper lid 20b. The level is adjusted. Therefore, the lamp cartridge portion can be easily replaced. In addition, 29 shown in FIG. 3 is a circular hole plate rear cover.

  Reference numeral 60a denotes a power socket for receiving the power connectors 25 and 26. The power socket 60a is a flexible socket in which the axial direction is not fixed, and the power connectors 25 and 26 are multi-band type, can handle a large current, and have a small contact failure. With this configuration, the lamp cartridge unit 20 can be detachably mounted on the basis of high reliability.

  Next, the mirror module unit 30 will be described. 4A and 4B show the mirror module section, where FIG. 4A is a plan view and FIG. 4B is a front view. FIG. 6 is a development view of the mirror module section. 1 and 3 show a state where the compact discharge light source device is mounted.

  The mirror module unit 30 is a mechanism that receives light emitted from the discharge lamp 10 and removes the heat component wavelength of the light so that only light having a cold wavelength necessary for the examination of the sample is used.

  The mirror module unit 30 uses multilayer thermal component transmission filters 31 and 32 that transmit the infrared wavelength region of the light emitted from the discharge lamp 10 and reflect a wavelength region shorter than the wavelength region.

  The first step of the steps in which the mirror surfaces of the multilayer heat component transmission filters 31 and 32 are made to face each other and the light reflected from one filter is incident on the other filter can be alternately repeated n (n is an integer of 1 or more). As described above, the two pairs of filter sections 33 are arranged in parallel so that the incident angles to the multilayer film heat component transmission filters 31 and 32 of each stage are all the same angle, and are located outside the pair of filter sections 33. It is composed of two light trap portions 34 each having a concavo-convex portion that absorbs heat component light transmitted to the outside. (See FIGS. 3, 4 and 6)

  The mirror module section 30 can be inserted into or taken out from a predetermined position with a single touch by a mirror module section receiving mechanism (see FIGS. 2 and 7) which is an insertion space on the left side of the assembly board base section 60 with the handle 30a. it can. As a result, replacement and repair of the anti-filter part 33 can be easily performed.

  The mirror module part receiving mechanism includes mirror module mounting side plates 63 and 64. The mirror module section 30 is guided and inserted along the mirror module mounting side plates 63 and 64, and is fixed at a predetermined position by the upper lid 30b.

  The pair filter section 33 is assembled with a predetermined inclination by the left and right pair filter side surface mounting plates 36, 36, the circular plate front cover 39 on the input optical path side, and the like. (See Figure 6)

  In addition, the incident light to the multilayer heat component transmission filters 31 and 32 has an incident angle smaller than 45 degrees to reduce polarization separation and ripple, and to reduce light loss due to spectral characteristics.

  The multilayer heat component transmission filters 31 and 32 usually use flat reflectors. However, as the optical path becomes longer, the light flux gradually diverges and the light quantity loss increases, so the multilayer film heat component transmission filter at a predetermined position is used for light focusing. A concave reflecting mirror is used. In this embodiment, a multilayer heat component transmission filter (concave reflector) 32 is arranged in the first stage of light input and the last stage of light output to reduce the light amount loss due to propagation.

  Reference numeral 34 denotes an optical trap unit, which is installed one by one on the front and rear sides of the counter filter unit 33, and absorbs light in the infrared wavelength region transmitted through the multilayer thermal component transmission filters 31 and 32.

  The light trap part 34 has a concavo-convex shape, and the input light in the infrared wavelength region is reflected and absorbed many times from the concave part. (See Figure 6)

  The optical shutter 60b is a mechanism for turning on / off the light output from the mirror module unit 30 and controlling the light output when analyzing the sample. (See Figure 3)

  FIG. 8 is a view showing a rotating disk for the light quantity adjusting mechanism. The light quantity adjusting mechanism 40 (see FIGS. 1, 2, and 7) includes a rotating disk 40a that rotates by being controlled by a disk rotating gear 45 connected to a motor, and linearly changes the light quantity on the optical path. It is. The rotating disk 40a is formed by forming a chromium deposition layer 41a having a gradually increased thickness on the transparent disk peripheral part 41 and changing the light transmittance according to the rotation angle.

  In the embodiment of the rotating disk 40a of FIG. 8, the first 90 degrees has no light deposition layer and the light transmittance is 100%, and between 90 degrees and 320 degrees, the transmittance decreases linearly as shown in the graph. The vapor deposition layer is formed so as to decrease to%.

  The spectral selection mechanism section 50 (see FIGS. 1, 2, 3, and 7) includes a plurality of optical interferences arranged at equal intervals along the outer periphery of the spectral filter mounting disk 51 rotated by the disk rotation gear 55. It consists of a membrane filter plate 51a. The optical interference film filter plate 51a shown in FIG. 7 is an embodiment of a disc, but is not limited to a disc.

  The spectral selection mechanism unit 50 can select and output light in a desired wavelength region. The light in the target wavelength region or a combination thereof can be easily extracted by replacing the optical interference film filter plate 51a or the spectral filter mounting disc 51.

  In FIG. 7, reference numeral 90 denotes a light source output end provided with a condensing lens 90a, and 90b denotes a power supply unit. 60c is a spacer, 60e is a side angle, and 60d is a lower angle.

  The lamp cartridge unit 20, the mirror module unit 30, the light amount adjustment mechanism unit 40, the spectral selection mechanism unit 50, and the light source output end unit 90 are detachably mounted on the assembly substrate base unit 60 (see FIGS. 2 and 7). be able to.

  With the above configuration, it is possible to efficiently dissipate heat from the discharge lamp, and it is possible to obtain a light source device with a high light amount. Also, efficient removal of the infrared region, adjustment to an arbitrary light amount, arbitrary wavelength region Can be used as a light source for various measuring devices.

  In addition, it is easy to replace parts such as lamps, and it is possible to realize a highly reliable structure that does not cause accidents such as optical axis misalignment or power supply contact failure during replacement.

The structure of a compact discharge light source device is shown, (a) is a plan view, (b) is a front view, and (c) is a side view. The assembly board | substrate base part of a compact discharge light source device is shown, (a) is a top view, (b) is a front view, (c) is a side view. It is the front view which showed only each mechanism part of a compact discharge light source device. A mirror module part is shown, (a) is a top view, (b) is a front view. FIG. 4 is a development view of a lamp cartridge unit. It is an expanded view of a mirror module part. FIG. 3 is a development view of the assembly board base portion shown in FIG. 2. It is the figure and transmittance | permeability graph which show the rotation disc for light quantity adjustment mechanisms. It is sectional drawing which shows the structure of a discharge lamp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Gas discharge space 2 Anode 3 Cathode 10 Discharge lamp 11 Reflector 11a Reflective mirror film 12 Anode terminal 13 Cathode terminal 14 Dielectric window 15 Heat sink 16 Heat sink 17 Anode support conductive part 18 Cathode support conductive part 19 Gas filled exhaust pipe 20 Lamp Cartridge portion 20a Handle 20b Upper lid 21 Lamp holder 22 Adjustment screw 25 Power connector 26 Power connector 29 Round plate rear lid 30 Mirror module portion 30a Handle 30b Upper lid 31 Multi-layer heat component transmission filter (planar reflector)
32 Multi-layer heat component transmission filter (concave reflector)
33 Counter part 34 Light trap part 36 Counter side face mounting plate 39 Round hole plate front cover 40 Light quantity adjusting mechanism part 40a Rotating disk 41 Transparent disk peripheral part 41a Chromium vapor deposition layer 45 Disk rotating gear 50 Spectral selection mechanism part 51 Spectroscopic Filter mounting disc 51a Optical interference film filter plate 55 Disc rotating gear 60 Assembly substrate base 60a Power socket 60b Optical shutter 60c Spacer 60e Side angle 60d Lower angle 61 Lamp cartridge mounting side plate 62 Lamp cartridge mounting side plate 63 Mirror module mounting side plate 64 mirror module mounting side plate 65 circular plate 90 light source output end 90a condenser lens 90b power supply unit

Claims (5)

A reflector made of a rotating curved surface that reflects light in the discharge gas space is formed on the inner peripheral side and the outer peripheral side is formed of a cylindrical insulating member, and the reflector is located at both ends on the outer periphery of the cylinder. Annular cathode terminal and anode terminal connected to the cathode and anode in the space and surrounding the reflector, and hermetically sealed and connected on the circumference of the reflector in order to transmit reflected light to the outside of the discharge gas space A compact, high-power discharge comprising a dielectric window and two sets of heat sinks each having a structure in which a plurality of radial wings are connected to the cathode terminal and the anode terminal in order to dissipate heat in a high-current arc discharge space. A lamp,
An insulating lamp holder capable of adjusting and fixing the discharge lamp and the heat sink at a predetermined position with the optical axis direction of the reflecting mirror film being horizontal, and a multi-contact band structure connected to the lower side of the two sets of heat sinks A detachable power connector terminal, and a lamp cartridge portion comprising:
With the mirror surface of the multilayer thermal component transmission filter that transmits the infrared wavelength region of the discharge lamp light source and reflects the wavelength region shorter than the infrared wavelength, the input light from the lamp light source is reflected from one filter, A pair of two pairs in which the incident light angles to each stage filter are arranged in parallel so that the state of one step entering the other filter can be repeated alternately (n is an integer of 1 or more). A mirror module unit comprising at least a filter unit, and two optical trap units that are located outside the pair of filter units and have a concavo-convex unit that absorbs and absorbs heat component light,
A compact discharge light source device comprising: a lamp cartridge portion receiving mechanism that is detachably assembled at a predetermined position and provided with a connector terminal receiving portion; and an assembly substrate base portion provided with a mirror module portion receiving mechanism.   The mirror module unit further prevents the light beams from diverging from the first-stage input optical path and the final-stage output optical path to the filter unit and reduces the loss of light quantity during propagation, so that the first-stage and final-stage optical modules are reduced. 2. The compact discharge light source device according to claim 1, wherein a mirror surface of the multilayer heat component transmission filter is a concave mirror (comprising a concave mirror portion for focusing light provided on each optical path input filter surface).   Since the light output from which the thermal component is removed from the mirror module part is input, and the light transmittance is linearly changed without changing the light flux, the light is output in a linear manner. A rotating disk deposited by changing the angle is provided, and a light amount adjusting mechanism unit is provided on the output side of the mirror module unit so that the relationship between the circumferential angle and the light transmittance is linear at a predetermined angle. The compact discharge light source device according to claim 1.   In order to input the light output from which the heat component is removed from the mirror module unit and perform predetermined spectroscopy on the light, various optical interference film filter plates are arranged at equal intervals on the periphery of the disk, The compact discharge light source device according to claim 1, further comprising: a spectroscopic selection mechanism portion that can rotate in a direction and select a predetermined filter film plate on an output side of the mirror module portion.   2. The compact discharge light source device according to claim 1, wherein the discharge lamp is a mercury lamp, a mercury xenon lamp, a metal hydride lamp or a xenon lamp.

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