JP4916127B2 - Substrate processing system - Google Patents

Description

  The present invention relates to a substrate processing system that collects data representing operating states of a plurality of substrate processing apparatuses.

  Conventionally, a substrate processing system in which a plurality of substrate processing apparatuses are connected to a centralized management apparatus via a communication line is used. The connection between the central management apparatus and the substrate processing apparatus is a one-to-many connection, and a communication load is easily applied to the communication circuit. Therefore, some useless data is prevented from flowing through the communication line. Therefore, the data amount between the central management apparatus and each substrate processing body apparatus is adjusted by setting parameters in both the central management apparatus and each substrate processing apparatus. Parameters set for each substrate processing apparatus are manually set by a user based on a parameter table designated in accordance with functions realized by the centralized management system.

  However, setting parameters manually in each substrate processing apparatus may cause a setting error. In order to prevent this setting mistake, reconfirmation and operation confirmation after parameter setting are carried out, but depending on the type of parameter to be set, there are some that cannot be judged immediately, so the function stops after a long time has passed. Sometimes it was found out. Further, when the number of set parameters increases, reconfirmation and operation confirmation after parameter setting may take a long time (for example, 0.5 (h) for one substrate processing apparatus, 32 substrate processing apparatuses) When the operation is confirmed, it takes 0.5 × 32 = 16 (h)).

  An object of the present invention is to provide a substrate processing system capable of solving the above-described conventional problems and confirming parameters set in a substrate processing apparatus in a short time.

  A feature of the present invention is that in a substrate processing system in which a plurality of substrate processing apparatuses and a centralized management apparatus are connected via a communication line, and the centralized management apparatus collects data representing an operating state of the substrate processing apparatus. The substrate processing apparatus has apparatus parameter setting means for setting apparatus parameters related to an execution function of the centralized management apparatus, and the centralized management apparatus stores system parameters for enabling the functions of the centralized management apparatus. And a determination means for determining whether or not the apparatus parameters sucked from each substrate processing apparatus and the system parameters stored in the memory are consistent with each other.

  Preferably, the parameter confirmation method is a substrate processing system in which a plurality of substrate processing apparatuses and a centralized management apparatus are connected via a communication line, and the centralized management apparatus collects data representing an operating state of the substrate processing apparatus. A step of setting apparatus parameters related to an execution function of the centralized management apparatus in an apparatus parameter setting means of the substrate processing apparatus; a memory for storing system parameters for enabling the function of the centralized management apparatus; and each of the substrates And determining whether or not the apparatus parameters sucked from the processing apparatus match the system parameters stored in the memory.

  According to the present invention, the parameters set in the substrate processing apparatus can be confirmed in a short time by determining the matching between the parameters set in each substrate processing and the parameters set in the centralized management apparatus.

Next, embodiments of the present invention will be described with reference to the drawings.
First, the outline | summary of the substrate processing system 10 in this form is demonstrated.
FIG. 1 is a diagram illustrating a configuration of a substrate processing system 10 to which a parameter checking method according to the present invention is applied.
As shown in FIG. 1, the substrate processing system 10 includes a centralized management device 12 and a plurality of substrate processing devices 14. The plurality of substrate processing apparatuses 14 and the centralized management apparatus 12 are connected via a communication line 16 such as a LAN, for example, and the centralized management apparatus 12 collects (stores) data representing the operating state of each substrate processing apparatus 14. It has become.
The substrate processing apparatus 14 is a device that performs a predetermined process on a plurality of substrates. A user can access the memory 34 (described later with reference to FIG. 2) of the substrate processing apparatus 14 by the user of the central management device 12. A parameter (apparatus parameter) related to a specific function (execution function) is set (stored).
In addition, a parameter (system parameter) for enabling each function of the central management apparatus 12 is stored (set) in a memory 22 (described later with reference to FIG. 2) as a memory of the central management apparatus 12.

Next, the hardware configuration of the central management apparatus 12 and the substrate processing apparatus 14 will be described.
FIG. 2 is a diagram showing the hardware configuration of the centralized management apparatus 12 and the substrate processing apparatus 14 to which the parameter checking method according to the present invention is applied, centering on the control apparatuses 18 and 36.
As shown in FIG. 2, the centralized management device 12 includes a control device 18 including a CPU 20 and a memory 22, a communication device 26, a recording device 28 such as an HDD / CD device, an LCD display device or a CRT display device, a keyboard, A user interface device (UI device) 30 including a touch panel and the like is included. The substrate processing apparatus 14 includes a control device 36 including a CPU 32 and a memory 34 as parameter setting means.
The central management apparatus 12 is, for example, a computer in which a parameter determination program 5 (described later with reference to FIG. 3) is installed, and production history data, operating state data, and failure information of the substrate processing apparatus 14 via the communication apparatus 26 and the like. In addition, the apparatus parameters transmitted by the substrate processing apparatus 14 are acquired at the time of activation.

FIG. 3 is a diagram showing a functional configuration of the parameter determination program 5 which is executed by the control device 18 (FIG. 2) and implements the parameter confirmation method according to the present invention.
Hereinafter, functions of the initialization unit 40, the memory unit 42, the communication unit 44, the comparison determination unit 46, the parameter database (parameter DB) 48, and the display unit 50 will be described.

  The initialization unit 40 outputs (develops) the system parameters stored in the parameter DB 48 to the memory unit 42 when starting the substrate processing system 10.

  The memory unit 42 stores (stores) system parameters from the initialization unit 40, device parameters set in the substrate processing apparatus 14 from the communication unit 44, and determination results from the comparison determination unit 46. Yes.

  The communication unit 44 sucks and acquires apparatus parameters from the substrate processing apparatus 14, and outputs (expands) the apparatus parameters to the memory unit 42. In addition, the communication unit 44 notifies the comparison determination unit 46 of the completion of acquisition of the apparatus parameters from the substrate processing apparatus 14.

  The parameter DB 48 includes a parameter combination table (for example, a first parameter combination table (described later using FIG. 4) and a second parameter combination table (described later using FIG. 5)) based on consistency logic (described later). Have. Further, the parameter DB 48 has a file in which system parameters of the central management apparatus 12 are stored.

  The comparison / determination unit 46 as the determination unit is developed (stored) in the memory unit 42 and the apparatus parameters sucked from the substrate processing apparatus 14 based on the combination table (consistency logic) stored in the parameter DB 48. It is determined whether or not the system parameter is consistent, and the determination result is output (stored) to the memory unit 42.

  In response to a result display request from the UI device 30 (for example, a keyboard), the display unit 50 displays the determination result stored in the memory unit 42 on the CRT display device of the UI device 30 in a predetermined format. Yes.

  4 and 5 are diagrams illustrating parameter combination tables stored in the parameter DB 48. FIG. 4 illustrates a first parameter combination table in which system parameters, device parameters, and determinations are associated with each other. 5 illustrates a second parameter combination table in which system parameters, a plurality of device parameters (device parameter A and device parameter B), and determinations are associated with each other.

As shown in FIGS. 4 and 5, the system parameter and the apparatus parameter here are parameters that enable a specific function in the substrate processing apparatus 14, and a circle in the figure indicates that the target function is enabled. Means. That is, it means that a parameter for realizing (operating) a specific function of the substrate processing apparatus 14 is specified in the system parameter and the apparatus parameter.
For example, in FIG. As shown in FIG. 1, a parameter for enabling a specific function is not specified (set) by a system parameter (turned OFF), and a parameter for realizing a specific function (specific function) is specified by a device parameter ( If it has not been set (turned off), the determination is “good”. That is, no problem occurs because the system parameter and the device parameter do not enable the functions of each other.
Further, for example, as shown in FIG. As shown in Fig. 2, a parameter that enables a specific function is not specified (set) in the system parameter (turned OFF), and a parameter that enables a specific function is specified (set) in the device parameter. If it is (ON), the specification for enabling the specific function does not match between the centralized management apparatus 12 and the substrate processing apparatus 14 (there is a discrepancy), so the determination is “No”.

  Further, for example, as shown in FIG. As shown in FIG. 1, when it is permitted to operate (realize) the specific function A by the device parameter A alone, the determination is made even when the device parameter A only specifies that the specific function A is valid. “Go”.

  Furthermore, for example, in FIG. As shown in FIG. 6, when the specific function A of the apparatus parameter A and the specific function B of the apparatus parameter B are operated (implemented) in the system parameters, inconsistency occurs in the operation of the substrate processing apparatus 14, that is, these (system parameters, When the device parameter A and the device parameter B) specify parameters that enable the specific function (function A and function B), the determination is “No”.

  As described above, the relationship between the system parameters of the central management apparatus 12 and the apparatus parameters of the substrate processing apparatus 14 can be determined relatively simply as shown in the first combination table, and the second combination table. As shown in FIG. 4, there is a method for determining matching by setting a plurality of relatively complicated apparatus parameters.

  In addition, a parameter combination table (first parameter combination table and second parameter combination table) in which the above-described system parameters, device parameters, and determination are combined is registered in advance in the parameter DB 48 as consistency logic. As described above, by registering the parameter combination table in the parameter DB 48, the search time for matching the parameters in the comparison determination unit 46 described above is shortened. That is, the comparison determination unit 46 only needs to search for patterns in which the determination of the parameter combination table registered in the parameter DB is “No” from among the combinations of system parameters and apparatus parameters. As described above, the comparison determination unit 46 can easily determine that the parameter setting value is inconsistent by detecting the corresponding pattern (the determination in the combination table is “No”).

  FIG. 6 is a diagram illustrating a display screen (apparatus connection status list screen) showing the status (communication status) of each substrate processing apparatus 14 displayed on the UI device 30 (CRT display device or the like) of the centralized management device 12. . This apparatus connection status list screen displays the status (status) of each substrate processing apparatus 14 connected to the centralized management apparatus 12, and when there is a match between the system parameters and the apparatus parameters, for example, it is displayed in green. If there is a discrepancy between the system parameter and the device parameter, for example, it is displayed in yellow (shaded area in FIG. 6).

  As a result, the user can determine at a glance (collectively) an inconsistency between the system parameter and the apparatus parameter. Therefore, the parameters set in the plurality of substrate processing apparatuses 14 connected to the central management apparatus 12 can be confirmed in a short time.

Further, when the user selects a yellow portion (hatched portion in FIG. 6) displayed on the device connection status list screen, the device details are displayed on the CRT display device of the UI device 30 of the central management device 12 as shown in FIG. The status screen is displayed. This device detailed status screen displays detailed information on inconsistencies between system parameters and device parameters. As a result, even if a parameter setting error occurs, it is possible to easily identify the inconsistent portion of the parameter, and it is possible to shorten the time for parameter resetting (correction).
In addition, it is possible to determine whether or not the specific function can be normally operated (realized) by checking whether or not a mismatch between the system parameter and the device parameter has occurred periodically.

  FIG. 8 is a flowchart for explaining the operation of the parameter determination process (S10) in the substrate processing system 10.

In step 12 (S12), the user activates the substrate processing system 10.
In step 14 (S14), the initialization unit 40 outputs (develops) the system parameters stored in the file of the parameter DB 48 to the memory unit 42.

  In step 16 (S16), the communication unit 44 sucks and acquires the apparatus parameters from the substrate processing apparatus 14, and outputs (expands) the apparatus parameters to the memory unit 42.

  In step 18 (S18), the communication unit 44 determines whether or not all the apparatus parameters sucked from the substrate processing apparatus 14 have been acquired. If the communication unit 44 determines that all the apparatus parameters sucked from the substrate processing apparatus 10 have not been acquired, the communication unit 44 performs the process of S16 again and determines that all the parameters transmitted from the substrate processing apparatus 10 have been acquired. If so, the process proceeds to S20.

  In step 20 (S20), the communication unit 44 notifies the comparison determination unit 46 of the completion of acquisition of the device parameters.

  In step 22 (S22), the comparison / determination unit 46 is expanded (stored) into the apparatus parameters and the memory unit 42 sucked from the substrate processing apparatus 14 based on the determination table (consistency logic) stored in the parameter DB 48. It is determined whether or not the system parameters are consistent with each other, and the determination result is output (stored) to the memory unit 42.

  In step 24 (S24), the display unit 50 determines whether there is a result display request by the user via the keyboard of the UI device 30 or the like. When it is determined that there is no result display request by the user, the display unit 50 performs step S24 again. When it is determined that there is a result display request by the user, the display unit 50 proceeds to processing of S26.

  In step 26 (S26), the display unit 50 displays the determination result stored in the memory unit 42 on a CRT display device or the like of the UI device 30 in a predetermined format (for example, shown in FIGS. 6 and 7).

  Next, examples will be described.

[Recipe editing function]
The recipe editing function, which is one of the specific functions described above, will be described. The recipe editing function means that when the recipe data held by the substrate processing apparatus 14 is edited (updated), the substrate processing apparatus 14 transmits an update notification to the centralized management apparatus 12 and receives the transmitted update notification. This is a function in which the management apparatus 12 automatically sucks up the target recipe data of the substrate processing apparatus 14 and stores it in the central management apparatus 12 as history data.

  FIG. 9 is a ladder diagram showing parameter settings for the centralized management apparatus 12 and the substrate processing apparatus 14 in the recipe editing function.

  The substrate processing apparatus 14 has a parameter (change history report parameter) for enabling change history reporting (change notification) in the apparatus parameters. If the change history report parameter is not valid, even if the recipe is changed (edited) in the substrate processing apparatus 14, no change notification is made to the central management apparatus 12.

  The central management device 12 has a recipe editing history presence / absence parameter in the system parameters. When the recipe editing history presence / absence parameter is valid, when a change notification is received from the substrate processing apparatus 14, the target recipe data is sucked from the substrate processing apparatus 14 and stored as history data in the recording device 28 or the like (FIG. 2). It is supposed to be.

The recipe editing function does not function unless both the system parameters of the central management apparatus 12 and the apparatus parameters of the substrate processing apparatus are enabled. Therefore, as shown in FIG. 9, when the recipe editing function presence / absence parameter of the centralized management apparatus 12 is invalid, the centralized management apparatus 12 cannot accept the change notification of the substrate processing apparatus 14, so that the target recipe data is used as history data. It cannot be saved. Even if the recipe editing function presence / absence parameter is enabled, if the change history report parameter of the substrate processing apparatus 14 is disabled, the centralized management apparatus 12 cannot accept the change notification.
That is, only when the change history report parameter is valid and the recipe edit history function presence / absence parameter is valid, a change notification from the substrate processing apparatus 14 is received by the central management apparatus 12, and the central management apparatus 12, the target recipe data of the substrate processing apparatus 14 is sucked up, and the target recipe data is stored as history data in the recording device 28 or the like (FIG. 2) of the centralized management apparatus 12.

  Consistency in the recipe editing function (consistency between system parameters and apparatus parameters) is determined by the comparison determination unit 46 (FIG. 3) using the first parameter combination table (FIG. 4) as consistency logic. At this time, the comparison / determination unit 46 confirms whether the state (valid or invalid) of the device parameter is the state (valid or invalid) required for the system parameter of the centralized management device 12, and the device parameter matches the system parameter. If not, a warning is issued (displayed on the device connection status list screen).

  Next, the processing procedure for the recipe editing history function will be described.

  When the system is started, the initialization unit 40 outputs (develops) “recipe editing function presence / absence parameters” from the file stored (stored) in the parameter DB 48 in advance to the memory unit 42. The communication unit 44 acquires the “recipe change history report parameter” from the apparatus parameters transmitted from the substrate processing apparatus 14 and outputs (develops) it to the memory unit 42. In addition, the communication unit 44 notifies the comparison determination unit 46 of the completion of acquisition of the device parameters. The comparison determination unit 46 determines whether or not both the “recipe edit history function presence / absence parameter” and the “recipe change history report parameter” are ON (set) based on the first parameter combination table (FIG. 4). The result is developed (stored) in the memory unit 42. The display unit 50 displays the result stored in the memory unit 42 in response to a result display request from the keyboard or the like of the UI device 30.

[Fault information logging function]
Next, the failure information logging function, which is one of the specific functions described above, will be described. A fault that has occurred in the substrate processing apparatus 14 is transmitted as fault information to the centralized management apparatus 12, and the type (or size) of the fault information is parameterized, and both of these parameters (the centralized management apparatus 12 and the substrate are used). If the management device 14) does not match each other, the centralized management device cannot perform accurate logging (data transmission and reception).

  FIG. 10 is a ladder diagram showing parameter settings of the centralized management apparatus 12 and the substrate processing apparatus 14 in the failure information logging function.

  As shown in FIG. 10, the substrate processing apparatus 14 creates a failure information message when a failure occurs in the substrate processing apparatus 14. The type (format) of the failure information message is, for example, a header portion 10 bytes and a data portion 100 bytes (for example, occurrence date / time data, in-furnace detailed information data, and step detailed data).

  Further, the type of the fault information message to be accepted is determined in the centralized management device 12 (for example, header portion 10 bytes, data portion 70 bytes (for example, occurrence date / time data, step detailed data)). That is, since this is a system in which a plurality of substrate processing apparatuses 14 are connected to one centralized management apparatus, the type (data format) of failure information is predetermined as a system parameter of the centralized management apparatus 12.

  As shown in FIG. 10, the device parameters of the substrate processing apparatus 14 determine the type of the fault information message that the substrate processing apparatus 14 has in the centralized management apparatus 12 when a specific function (function to adjust the type of message) is enabled. Adjust to the type (container) of the fault information message. The centralized management device 12 can accept a failure information message transmitted from the substrate processing apparatus 14 when the failure information message matches a predetermined failure information message type.

  Consistency (consistency of system parameters and apparatus parameters) in the type (format) of the failure information is determined by using the first parameter combination table (FIG. 4) as consistency logic by the comparison / determination unit 46 (FIG. 3). Determined. At this time, the comparison / determination unit 46 determines whether the failure information type (format) determined by designating the device parameter matches the failure information type (format) predetermined for the system parameter. ing.

  Next, the processing procedure for the fault information logging function will be described.

  At the time of system startup, the type (for example, a value of 0 or 1) set for the message of the “failure information logging function” is output to the memory unit 42 from a file stored (stored) in the parameter DB 48 in advance by the initialization unit 40 ( expand. The communication unit 44 acquires the type (for example, a value of 0 or 1) set for the “failure information” message in the apparatus parameters transmitted from the substrate processing apparatus 14, and outputs (decompresses) the type to the memory unit 42. In addition, the communication unit 44 notifies the comparison determination unit 46 of the completion of acquisition of the device parameters. The comparison determination unit 46 determines whether the type set for the “failure information logging function” message and the type set for the “failure information” message are the same value (for example, a value of 0 or 1). A determination is made based on the combination table (FIG. 4), and the result is developed (stored) in the memory unit. The display unit 50 displays the result stored in the memory unit 42 in response to a result display request from the keyboard or the like of the UI device 30. In this case, the example in which the value of 0 (or 1) indicates the message type of the header part 10 bytes and the data part 70 bytes has been described. However, this setting is not limited to 0 and 1, but numerical values after 2 are input as the data type. In addition to numerical values, A, B, C. . . You can also use the alphabet.

  The central management apparatus 12 may automatically log data sent from the substrate processing apparatus 14 side with the same type (format). Thereby, it is possible to cope with a data type to be changed in the future. Furthermore, since it becomes possible to match the data type set in the centralized management apparatus 12 regardless of the type of data sent from the substrate processing apparatus 12, it is not necessary to determine the consistency by the comparison / determination unit 46. Also good.

[Special temperature control function]
Next, the special temperature control function which is one of the specific functions described above will be described. The substrate processing system 1 has a special temperature control function as a function having a plurality of parameters with respect to system parameters. The central management apparatus 12 is set with “special temperature control function corresponding parameter” incorporated as an additional element in the normal recipe data in the system parameters, whereas the substrate processing apparatus 14 side has “special temperature control function presence / absence parameter”. And two device parameters of “recipe message size parameter” are required.

  Here, the special temperature control compatible parameter in the system parameters is a function for performing special temperature control. Unlike normal control, it is incorporated as an additional element in the recipe data, and the amount of recipe data increases (as an extension area at the rear). Added). Further, the special temperature function control presence / absence parameter in the apparatus parameter is for setting whether or not to enable the special temperature control function.

  Consistency in this special temperature control function (consistency between system parameters and apparatus parameters) is determined by the comparison determination unit 46 (FIG. 3) using the first parameter combination table (FIG. 4) as consistency logic. . At this time, in a state where all the parameters are valid, the comparison / determination unit 46 determines whether the special temperature control presence / absence parameter of the device parameter, the recipe message size parameter, and the special temperature control function compatible parameter of the system parameter match. To do. That is, the comparison / determination unit 46 determines whether the special temperature control compatible parameter of the central management apparatus 12 is valid, whether the special temperature control function presence / absence parameter of the substrate processing apparatus 12 is valid, the substrate processing apparatus. 12 determines whether or not the recipe message data size transmitted from 12 matches the recipe message data size predetermined by the central management apparatus 12 (whether or not the recipe data amount has increased by a prescribed amount).

  The present invention can be used for a substrate processing system that collects data representing the operating states of a plurality of substrate processing apparatuses and that requires confirmation of parameters set in the substrate processing apparatus in a short time.

It is a figure which shows the structure of the substrate processing system concerning this invention as an example. It is a figure which illustrates the hardware constitutions of the centralized management processing apparatus and substrate processing apparatus concerning this invention centering on a control apparatus. It is a figure which illustrates the function structure of the parameter determination program 5 concerning this invention. It is a figure which illustrates the 1st parameter combination table memorize | stored in parameter DB. It is a figure which illustrates the 2nd parameter combination table memorize | stored in parameter DB. It is a figure which illustrates the apparatus connection state list screen which was displayed on UI apparatus and represented the connection state of the centralized management apparatus and a substrate processing apparatus. It is a figure which illustrates the apparatus detailed status screen displayed on UI apparatus and showing the state of the substrate processing apparatus. 4 is a flowchart for explaining an operation of parameter determination processing (S10) in the substrate processing system 10. It is the ladder figure which showed the parameter setting of the centralized management apparatus 12 and the substrate processing apparatus 14 in the recipe edit function concerning a 1st Example. It is the ladder figure which showed the parameter setting of the centralized management apparatus 12 and the substrate processing apparatus 14 in the type of the fault information concerning a 2nd Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Substrate processing system 12 Centralized management apparatus 14 Substrate processing apparatus 16 Communication line 22, 34 Memory 42 Memory part 46 Comparison determination part 48 Parameter DB

Claims (8)

In a substrate processing system in which a plurality of substrate processing apparatuses and a centralized management apparatus are connected via a communication line, and the centralized management apparatus collects data representing an operating state of the substrate processing apparatus,
The substrate processing apparatus has apparatus parameter setting means for setting apparatus parameters related to an execution function of the centralized management apparatus,
The central management device, a memory for storing a recipe editing function presence / absence parameter as a system parameter for enabling the function of the central management device,
A parameter combination table combining device parameters, system parameters, and determination results;
Whether or not both the recipe change history report parameter acquired from the apparatus parameter transmitted from each substrate processing apparatus and the recipe editing function presence / absence parameter stored in the memory are set based on the parameter combination table Determination means for determining;
A substrate processing system comprising: display means for outputting a warning when the consistency between the apparatus parameter and the system parameter in the recipe editing function does not match . A plurality of substrate processing apparatuses and a centralized management apparatus are connected via a communication line, and the centralized management apparatus is a substrate processing apparatus in a substrate processing system that collects data representing an operating state of the substrate processing apparatus,
The substrate processing apparatus has apparatus parameter setting means for setting apparatus parameters related to an execution function of the centralized management apparatus,
The central management device, a memory for storing a recipe editing function presence / absence parameter as a system parameter for enabling the function of the central management device,
A parameter combination table combining device parameters, system parameters, and determination results;
Whether or not both the recipe change history report parameter acquired from the apparatus parameter transmitted from each substrate processing apparatus and the recipe editing function presence / absence parameter stored in the memory are set based on the parameter combination table Determination means for determining;
A substrate processing apparatus in a substrate processing system, comprising: a display unit that outputs a warning when the consistency between the apparatus parameter and the system parameter in the recipe editing function does not match . A centralized management apparatus in a substrate processing system in which a plurality of substrate processing apparatuses and a centralized management apparatus are connected via a communication line and collect data representing an operating state of the substrate processing apparatus,
The central management device, a memory for storing a recipe editing function presence / absence parameter as a system parameter for enabling the function of the central management device,
A parameter combination table combining device parameters, system parameters, and determination results;
Whether or not both the recipe change history report parameter acquired from the apparatus parameter transmitted from each substrate processing apparatus and the recipe editing function presence / absence parameter stored in the memory are set based on the parameter combination table Determination means for determining;
A centralized management apparatus in a substrate processing system, comprising: a display unit that outputs a warning when the consistency between the apparatus parameter and the system parameter in the recipe editing function does not match . A centralized management device that collects data representing the operating status of a plurality of substrate processing apparatuses,
In the centralized management apparatus, both a recipe change history report parameter acquired from the apparatus parameters transmitted from each substrate processing apparatus and a recipe editing function presence / absence parameter as a system parameter for enabling the function of the centralized management apparatus are set. A centralized management apparatus for determining whether or not each of the substrate processing apparatuses is compatible, and displaying consistency with each of the substrate processing apparatuses. The centralized management device, the centralized management system of claim 4, wherein the displaying the state of communication with each of the substrate processing apparatus and displays the consistency between the substrate processing apparatus. The parameter combination table has a pattern in which a system parameter, a plurality of device parameters, and a determination result are combined. When all of the system parameter and the plurality of device parameters are valid, the determination result is “NO”. The centralized management apparatus according to claim 3 . Store the recipe edit function presence / absence parameter in the memory as a system parameter to enable the function of the central control device,
Obtaining apparatus parameters related to the execution function of the centralized management apparatus from the substrate processing apparatus,
Based on a parameter combination table combining device parameters, system parameters, and determination results , both the recipe change history report parameter acquired from the device parameter transmitted from the substrate processing apparatus and the recipe editing function presence / absence parameter are set. Whether or not
A display method for a centralized management apparatus, wherein a warning is output when the consistency between the apparatus parameter and the system parameter in the recipe editing function does not match . A parameter determination program for confirming the consistency between a system parameter for enabling a function of a centralized management device and a device parameter related to an execution function of the centralized management device,
Expanding the recipe editing function presence / absence parameter in the memory as the system parameter;
Developing recipe change history report parameters obtained from the device parameters in memory;
Determining whether or not both the acquired recipe editing function presence / absence parameter and the recipe change history report parameter are set based on a parameter combination table combining device parameters, system parameters, and determination results;
Outputting the determination result;
A parameter determination program.

Images