JP4908975B2 - Displacement sensor and photoelectric sensor - Google Patents

Displacement sensor and photoelectric sensor Download PDF

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JP4908975B2
JP4908975B2 JP2006236528A JP2006236528A JP4908975B2 JP 4908975 B2 JP4908975 B2 JP 4908975B2 JP 2006236528 A JP2006236528 A JP 2006236528A JP 2006236528 A JP2006236528 A JP 2006236528A JP 4908975 B2 JP4908975 B2 JP 4908975B2
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JP2008058195A (en
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匡史 河田
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Panasonic Industrial Devices SUNX Co Ltd
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Panasonic Electric Works SUNX Co Ltd
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Description

本発明は、被検出物を非接触で検出する変位センサ及び光電センサに関する。   The present invention relates to a displacement sensor and a photoelectric sensor that detect an object to be detected without contact.

光電センサには、被検出物に向けて投光を行うための投光素子と、被検出物で反射された反射光を受光するイメージセンサと、そのイメージセンサの受光量を周期的に検出しそのイメージセンサ上で得た受光分布における被検出物からの反射光に対応したピーク位置の検出に基づいて被検出物の位置(距離)等を検出する制御回路とを備えた変位センサがある。   In the photoelectric sensor, a light projecting element for projecting light toward the object to be detected, an image sensor for receiving reflected light reflected by the object to be detected, and a light receiving amount of the image sensor are periodically detected. There is a displacement sensor provided with a control circuit for detecting the position (distance) of the detected object based on the detection of the peak position corresponding to the reflected light from the detected object in the received light distribution obtained on the image sensor.

ところで、被検出物の反射面の反射率などによりイメージセンサに入射する反射光の強度が異なるため、例えば特許文献1に示される変位センサには、イメージセンサでの受光量がある一定のレベルとなるように投光時間を制御するデューティーサイクル制御回路が設けられている。デューティーサイクル制御回路は、検出期間におけるイメージセンサの受光量に基づいて、被検出物からの反射光に対応したピーク位置が的確に検出できるように、次の検出期間における投光素子の投光時間を設定する。
特開平10−267648号公報
By the way, since the intensity of the reflected light incident on the image sensor differs depending on the reflectance of the reflecting surface of the object to be detected, for example, the displacement sensor shown in Patent Document 1 has a certain level of light reception by the image sensor. A duty cycle control circuit for controlling the light projection time is provided. The duty cycle control circuit projects the light projection time of the light projecting element in the next detection period so that the peak position corresponding to the reflected light from the detected object can be accurately detected based on the amount of light received by the image sensor in the detection period. Set.
JP-A-10-267648

ところで、検出期間における受光素子の受光量は投光素子の投光時間と投光素子の投光強度(単位時間あたりの投光量、照度)とによって決定される。そのため、投光時間を設定して受光量を調整するものには照射光を直接受光するモニタ用受光素子が設けられ、そのモニタ用受光素子によって投光素子の投光強度が検出されるようになっている。しかしながら、検出期間における投光素子の投光時間が短くなると、投光素子の投光強度がモニタ用受光素子で検出可能な閾値(モニタ用受光素子により検出可能な投光強度)に到達する前に投光が停止されるため、投光素子の投光強度を検出することができなくなってしまう。即ち、受光素子の受光量を適切に制御するためには、投光素子の投光強度がモニタ用受光素子により検出可能な閾値以上となるまでに必要とされる時間、投光素子を投光させる必要がある。よって、検出期間における投光時間の下限値が投光素子の立ち上がり時間やモニタ用受光素子の閾値により制限され、検出処理の高速化の妨げとなる。   By the way, the amount of light received by the light receiving element in the detection period is determined by the light projecting time of the light projecting element and the light projecting intensity (light projecting amount per unit time, illuminance). Therefore, a light receiving element for adjusting the amount of light received by setting the light projecting time is provided with a monitor light receiving element that directly receives irradiation light, and the light receiving intensity of the light projecting element is detected by the monitor light receiving element. It has become. However, if the light projecting time of the light projecting element in the detection period is shortened, before the light projecting intensity of the light projecting element reaches the threshold that can be detected by the light receiving element for monitoring (light projecting intensity detectable by the light receiving element for monitoring). Therefore, the light projection intensity of the light projecting element cannot be detected. That is, in order to appropriately control the amount of light received by the light receiving element, the light projecting element is projected for the time required until the light projecting intensity of the light projecting element becomes equal to or greater than the threshold that can be detected by the monitor light receiving element. It is necessary to let Therefore, the lower limit value of the light projection time in the detection period is limited by the rise time of the light projecting element and the threshold value of the light receiving element for monitoring, which hinders speeding up of the detection process.

本発明は、こうした実情に鑑みてなされたものであって、その目的は、投光手段の投光時間を制御して検出期間における受光手段の受光量を一定のレベルにする変位センサ及び光電センサにおいて、検出期間における投光時間を極力短く設定することが可能な変位センサ及び光電センサを提供することにある。   The present invention has been made in view of such circumstances, and an object of the present invention is to provide a displacement sensor and a photoelectric sensor that control the light projecting time of the light projecting means to make the amount of light received by the light receiving means in the detection period constant. The present invention provides a displacement sensor and a photoelectric sensor capable of setting the light projection time in the detection period as short as possible.

上記課題を解決するため、請求項1に記載の発明は、被検出物に向けて投光を行うための投光手段と、複数の画素からなり、前記被検出物で反射された反射光を受光して前記複数の画素の各受光量から受光分布を得るイメージセンサと、前記イメージセンサでの前記受光分布に基づいて前記被検出物の変位を検出する検出手段と、前記検出手段での前記被検出物の検出を可能とする検出期間とその検出を不能とする非検出期間とのいずれかに切り替える検出期間設定手段と、前記投光手段からの照射光を直接受光可能に配置されたモニタ用受光手段と、前記モニタ用受光手段での受光に基づいて前記投光手段の投光強度を所定強度に設定する投光強度設定手段と、前記イメージセンサが受光した検出受光量に応じて前記投光手段の投光時間を制御する投光時間制御手段とを備えた変位センサにおいて、前記投光時間制御手段は、前記検出手段における前記非検出期間中に前記投光手段を投光させ、前記投光強度設定手段は、前記投光手段による前記非検出期間と前記検出期間とにおける投光によって、前記モニタ用受光手段で受光された受光量に基づき、前記投光手段の投光強度を所定強度に設定するIn order to solve the above-mentioned problem, the invention described in claim 1 includes a light projecting means for projecting light toward the object to be detected and a plurality of pixels, and reflected light reflected by the object to be detected. An image sensor that receives light to obtain a light reception distribution from each light reception amount of the plurality of pixels, a detection unit that detects a displacement of the detection object based on the light reception distribution in the image sensor, and the detection unit A detection period setting unit that switches between a detection period that enables detection of an object to be detected and a non-detection period that disables the detection, and a monitor that is arranged so as to be able to directly receive irradiation light from the light projecting unit Light receiving means, light projection intensity setting means for setting the light projection intensity of the light projecting means to a predetermined intensity based on the light received by the monitor light receiving means, and the detected light received by the image sensor The light projection time of the light projection means In the displacement sensor comprising Gosuru a light projection time control means, said light projection time control means, even during the non-detection period in the detecting means is projecting said light projecting means, the projection light intensity setting means The light projection intensity of the light projecting means is set to a predetermined intensity based on the amount of light received by the light receiving means for monitoring by light projection in the non-detection period and the detection period by the light projecting means .

同構成によれば、投光時間制御手段は非検出期間中に投光手段を投光させるため、検出期間における投光手段の投光時間に関わらず、モニタ用受光手段での受光量を確保することができる。よって、投光手段の立ち上がり時間やモニタ用受光手段の閾値に制限されることなく検出期間における投光手段の投光時間を極力短く設定することが可能となり、検出処理の高速化に貢献することができる。   According to this configuration, since the light projecting time control means projects the light projecting means during the non-detection period, the amount of light received by the monitor light receiving means is ensured regardless of the light projecting time of the light projecting means during the detection period. can do. Therefore, it is possible to set the light projection time of the light projection means in the detection period as short as possible without being limited by the rise time of the light projection means or the threshold value of the monitor light reception means, which contributes to speeding up the detection process. Can do.

請求項2に記載の発明は、請求項1に記載の変位センサにおいて、前記投光時間制御手段は、前記非検出期間における前記投光手段の投光時間が前記検出期間における前記投光手段の投光時間に連続するように前記投光手段を投光させる。   According to a second aspect of the present invention, in the displacement sensor according to the first aspect, the light projecting time control unit includes a light projecting time of the light projecting unit in the non-detection period. The light projecting means is projected so as to be continuous with the light projecting time.

同構成によれば、投光時間制御手段は、非検出期間における投光手段の投光時間が検出期間における投光手段の投光時間に連続するように投光手段を投光させるため、点灯及び消灯を繰り返すことによる投光手段の無駄な消耗を低減することができる。また、非検出期間における投光手段の投光時間を検出期間における投光手段の投光時間に連続させない場合と比較して、検出期間における投光手段の投光時間の分、非検出期間における投光手段の投光時間を短くすることが可能となる。従って、このことによっても、投光手段の無駄な消耗を低減することができる。   According to the same configuration, the light projecting time control unit lights the projecting unit so that the projecting time of the projecting unit in the non-detection period is continuous with the projecting time of the projecting unit in the detection period. In addition, it is possible to reduce unnecessary consumption of the light projecting means due to repeated turning off and lighting. Further, compared with the case where the light projection time of the light projecting means in the non-detection period is not made to be continuous with the light projection time of the light projecting means in the detection period, the light projection time of the light projecting means in the detection period is equal to that in the non-detection period. It is possible to shorten the light projecting time of the light projecting means. Therefore, this also makes it possible to reduce wasteful consumption of the light projecting means.

請求項3に記載の発明は、請求項2に記載の変位センサにおいて、前記投光時間制御手段は、前記非検出期間における前記投光手段の投光時間が前記検出期間における前記投光手段の投光時間の前となるよう前記投光手段を投光させる。   According to a third aspect of the present invention, in the displacement sensor according to the second aspect of the invention, the light projection time control means is configured such that the light projection time of the light projection means in the non-detection period is the light projection time in the detection period. The light projecting means is caused to project before the light projecting time.

同構成によれば、投光時間制御手段は、非検出期間における投光手段の投光時間が検出期間における投光手段の投光時間の前となるよう投光手段を投光させるため、比較的不安定な投光初期の投光手段の投光がイメージセンサに受光され難くなる。よって、検出期間中にイメージセンサが単位時間あたりに受光する検出受光量を安定させることが可能となり、検出期間における投光手段の投光時間の変化を検出期間におけるイメージセンサの検出受光量の変化に好適に反映させることができる。   According to the same configuration, the light projecting time control unit projects the light projecting unit so that the light projecting time of the light projecting unit in the non-detection period is before the light projecting time of the light projecting unit in the detection period. The projection of the light projecting means at the initial stage of unstable light projection is difficult to be received by the image sensor. Therefore, it is possible to stabilize the detected light reception amount received by the image sensor per unit time during the detection period, and the change in the light projection time of the light projecting means during the detection period is the change in the detected light reception amount of the image sensor during the detection period. Can be suitably reflected.

請求項4に記載の発明は、請求項1〜3の何れか1項に記載の変位センサにおいて、前記モニタ用受光手段は、フォトダイオードで構成される。
同構成によれば、モニタ用受光手段は安価なフォトダイオードで構成されるため、製造コストの増加を抑えることができる。
According to a fourth aspect of the present invention, in the displacement sensor according to any one of the first to third aspects, the light receiving means for monitoring is constituted by a photodiode.
According to this configuration, the monitor light-receiving means is composed of an inexpensive photodiode, so that an increase in manufacturing cost can be suppressed.

請求項5に記載の発明は、被検出物に向けて投光を行うための投光手段と、前記被検出物で反射された反射光を受光する検出用受光手段と、前記検出用受光手段での検出受光量に基づいて前記被検出物を検出する検出手段と、前記検出手段での前記被検出物の検出を可能とする検出期間とその検出を不能とする非検出期間とのいずれかに切り替える検出期間設定手段と、前記投光手段からの照射光を直接受光可能に配置されたモニタ用受光手段と、前記モニタ用受光手段での受光に基づいて前記投光手段の投光強度を所定強度に設定する投光強度設定手段と、前記検出用受光手段が受光した検出受光量に応じて前記投光手段の投光時間を制御する投光時間制御手段とを備えた光電センサにおいて、前記投光時間制御手段は、前記検出手段における前記非検出期間中に前記投光手段を投光させ、前記投光強度設定手段は、前記投光手段による前記非検出期間と前記検出期間とにおける投光によって、前記モニタ用受光手段で受光された受光量に基づき、前記投光手段の投光強度を所定強度に設定するAccording to a fifth aspect of the present invention, there is provided a light projecting means for projecting light toward the object to be detected, a light receiving means for detection for receiving reflected light reflected by the object to be detected, and a light receiving means for detection. Detecting means for detecting the detected object based on the detected amount of received light, a detection period for enabling the detecting means to detect the detected object, and a non-detecting period for disabling the detection Detection period setting means for switching to, light receiving means for monitoring arranged so as to be able to directly receive the irradiation light from the light projecting means, and the light projection intensity of the light projecting means based on the light received by the light receiving means for monitoring In a photoelectric sensor comprising: a light projection intensity setting means for setting to a predetermined intensity; and a light projection time control means for controlling a light projection time of the light projection means in accordance with a detected light reception amount received by the light receiving means for detection. the light projection time control means is, said detection means That the even during the non-detection period is projected the light projecting means, the projection light intensity setting means, by projecting light in the said detection period and the non-detection period by the light projecting means, in the monitoring light-receiving means Based on the amount of received light, the light projection intensity of the light projecting means is set to a predetermined intensity .

同構成によれば、投光時間制御手段は非検出期間中に投光手段を投光させるため、検出期間における投光手段の投光時間に関わらず、モニタ用受光手段での受光量を確保することができる。よって、投光手段の立ち上がり時間やモニタ用受光手段の閾値に制限されることなく検出期間における投光手段の投光時間を極力短く設定することが可能となり、検出処理の高速化に貢献することができる。   According to this configuration, since the light projecting time control means projects the light projecting means during the non-detection period, the amount of light received by the monitor light receiving means is ensured regardless of the light projecting time of the light projecting means during the detection period. can do. Therefore, it is possible to set the light projection time of the light projection means in the detection period as short as possible without being limited by the rise time of the light projection means or the threshold value of the monitor light reception means, which contributes to speeding up the detection process. Can do.

本発明によれば、投光手段の投光時間を制御して検出期間における受光手段の受光量を一定のレベルにする変位センサ及び光電センサにおいて、検出期間における投光時間を極力短く設定することが可能な変位センサ及び光電センサを提供することができる。   According to the present invention, in the displacement sensor and the photoelectric sensor that control the light projecting time of the light projecting unit to make the amount of light received by the light receiving device in the detection period constant, the light projecting time in the detection period is set as short as possible. It is possible to provide a displacement sensor and a photoelectric sensor.

以下、本発明を具体化した一実施形態を図面に従って説明する。
図1は、本実施の形態の変位センサ(光電センサ)1を示す。変位センサ1は、赤色半導体レーザダイオード等からなる投光素子2を備えた投光素子駆動回路(投光手段)3と、CCDイメージセンサやCMOSイメージセンサ等からなる受光素子4を備えた受光素子駆動回路(検出用受光手段)5と、フォトダイオード等からなるモニタ用受光素子6を備えた検出回路(モニタ用受光手段)7とを備えている。また、変位センサ1は、各種制御信号を出力しそれらの回路3,5,7を制御する検出手段、検出期間設定手段、投光強度設定手段及び投光時間制御手段としての制御回路8を備えている。
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
FIG. 1 shows a displacement sensor (photoelectric sensor) 1 of the present embodiment. The displacement sensor 1 includes a light projecting element driving circuit (light projecting means) 3 having a light projecting element 2 made of a red semiconductor laser diode or the like, and a light receiving element having a light receiving element 4 made of a CCD image sensor, a CMOS image sensor or the like. A drive circuit (detection light receiving means) 5 and a detection circuit (monitor light reception means) 7 including a monitor light receiving element 6 made of a photodiode or the like are provided. The displacement sensor 1 also includes a control circuit 8 that outputs various control signals and controls the circuits 3, 5, and 7 as detection means, detection period setting means, light projection intensity setting means, and light projection time control means. ing.

図2に示すように、投光素子駆動回路3は、制御回路8からのHレベルの駆動パルスS01〜S03に基づいて投光素子2に駆動電流を供給し、投光素子2に所定時間(検出用投光時間t01〜t03)、被検出物Wへ光を照射(投光)させる。受光素子4は、前記投光素子2から被検出物Wへ向けて照射され該被検出物Wで反射された光を受光する。受光素子駆動回路5は、制御回路8から前記駆動パルスS01〜S03と同時に出力された受光制御信号に基づいて、所定時間(検出期間)、受光素子4の各画素で受光された光の受光量に応じた電荷を蓄積させ、その間(検出期間)に受光素子4に受光された(入射した)光の検出受光量が検出されるようにする。そして、受光素子駆動回路5は、受光素子4の全画素に蓄積された電気信号を出力するのに必要な時間(非検出期間)、受光素子4の各画素における電気信号の蓄積を禁止し、その間(非検出期間)に受光素子4に受光された(入射した)光の受光量が検出されないようにする。そして、受光素子駆動回路5は、受光素子4の各画素に蓄積された電気信号を増幅させて制御回路8に出力する。   As shown in FIG. 2, the light projecting element drive circuit 3 supplies a drive current to the light projecting element 2 based on the H level drive pulses S01 to S03 from the control circuit 8, and supplies the light projecting element 2 with a predetermined time ( The light projecting time for detection t01 to t03), the object W is irradiated (projected) with light. The light receiving element 4 receives the light irradiated from the light projecting element 2 toward the detection target W and reflected by the detection target W. The light receiving element driving circuit 5 receives the light received by each pixel of the light receiving element 4 for a predetermined time (detection period) based on the light receiving control signal output from the control circuit 8 simultaneously with the driving pulses S01 to S03. The charge corresponding to is accumulated, and the detected amount of received light (incident) received by the light receiving element 4 during that period (detection period) is detected. Then, the light receiving element driving circuit 5 prohibits the accumulation of electric signals in each pixel of the light receiving element 4 for a time (non-detection period) required to output the electric signals accumulated in all the pixels of the light receiving element 4, During this period (non-detection period), the amount of light received (incident) by the light receiving element 4 is not detected. The light receiving element driving circuit 5 amplifies the electrical signal accumulated in each pixel of the light receiving element 4 and outputs the amplified signal to the control circuit 8.

また、投光素子2の近傍には、該投光素子2からの照射光を直接受光可能にモニタ用受光素子6が配置されている。モニタ用受光素子6は、その投光素子2の投光強度(単位時間あたりの投光量、照度)に応じたアナログ受光信号S11を検出回路7に出力する。検出回路7は、アナログ受光信号S11、即ち投光素子2の投光強度が所定の閾値TH以上となっている間、Hレベルのモニタ用受光信号S21を出力する。なお、検出回路7は、Hレベルのモニタ用受光信号S21とともに投光素子2の投光強度に対応した信号も出力している。   In addition, a monitor light receiving element 6 is disposed in the vicinity of the light projecting element 2 so as to be able to directly receive the irradiation light from the light projecting element 2. The monitor light receiving element 6 outputs an analog light reception signal S11 corresponding to the light projection intensity (light projection amount per unit time, illuminance) of the light projecting element 2 to the detection circuit 7. The detection circuit 7 outputs an H level monitoring light reception signal S21 while the analog light reception signal S11, that is, the light projection intensity of the light projecting element 2 is equal to or higher than a predetermined threshold value TH. The detection circuit 7 also outputs a signal corresponding to the light projection intensity of the light projecting element 2 together with the monitor light reception signal S21 of H level.

制御回路8は、受光素子4が受光した検出受光量を受光素子駆動回路5から出力された電気信号に基づいて検出し、受光素子4上の受光分布を取得する。受光素子4各画素における受光量が該受光素子4の各画素で蓄積可能なレンジ内にあるとき、受光分布には、被検出物Wからの反射光に対応する位置に受光ピークが生じる。そして、制御回路8は、その受光ピークの位置に基づいて被検出物Wの位置を検出(測定)する。制御回路8は、所定の周期(測定周期T1〜T3)で前記駆動パルスS01〜S03及び受光制御信号を出力し、被検出物Wの位置の検出を繰り返す。   The control circuit 8 detects the detected amount of received light received by the light receiving element 4 based on the electrical signal output from the light receiving element driving circuit 5 and acquires the light reception distribution on the light receiving element 4. When the amount of light received by each pixel of the light receiving element 4 is within a range that can be accumulated by each pixel of the light receiving element 4, a light reception peak occurs in the light reception distribution at a position corresponding to the reflected light from the detection object W. Then, the control circuit 8 detects (measures) the position of the detected object W based on the position of the received light peak. The control circuit 8 outputs the drive pulses S01 to S03 and the light reception control signal at a predetermined cycle (measurement cycles T1 to T3), and repeats the detection of the position of the detection target W.

また、制御回路8は、検出受光量が飽和しない所定レベルとなるような投光素子2の投光量、即ち検出期間における投光素子2の投光強度と投光時間(検出用投光時間t01〜t03)とを設定する。   In addition, the control circuit 8 projects the light intensity of the light projecting element 2 so that the detected light reception amount becomes a predetermined level that is not saturated, that is, the light projecting intensity and the light projecting time of the light projecting element 2 in the detection period (detection light projecting time t01). To t03).

詳述すると、制御回路8は、検出回路7から出力されたHレベルのモニタ用受光信号S21に基づいて、現在の測定周期T1の検出期間における投光素子2の投光強度が所定強度で一定となるように投光素子2に供給する駆動電流の値(大きさ)を設定する。また、制御回路8は、現在の測定周期T1の検出期間における受光素子4の受光量(検出受光量)を取得する。この時、現在の測定周期T1の検出期間における受光素子4の受光量(検出受光量)が最適な値よりも大きい場合、制御回路8は、現在の測定周期T1の検出期間における検出用投光時間t01よりも短い検出用投光時間t02を設定する。そして、その設定された駆動電流の値(所定の投光強度)で検出用投光時間t02、投光素子2を投光させるための駆動パルスS02を次の測定周期T2の開始時に出力する。因みに、現在の測定周期T1の検出期間における受光素子4の受光量(検出受光量)が最適な値よりも小さい場合、制御回路8は、現在の測定周期T1の検出期間における検出用投光時間t01よりも長い検出用投光時間t02を設定する。そして、その設定された駆動電流の値(所定の投光強度)で検出用投光時間t02、投光素子2を投光させるための駆動パルスS02を次の測定周期T2の開始時に出力する(図示略)。即ち、制御回路8は、受光素子4の検出受光量が飽和しない所定レベルとなるよう、検出期間における投光素子2の投光時間(検出用投光時間t01〜t03)を変更する。   More specifically, based on the H level monitoring light reception signal S21 output from the detection circuit 7, the control circuit 8 makes the light projection intensity of the light projecting element 2 constant at a predetermined intensity in the detection period of the current measurement cycle T1. The value (magnitude) of the drive current supplied to the light projecting element 2 is set so that In addition, the control circuit 8 acquires the amount of light received by the light receiving element 4 (detected amount of received light) in the detection period of the current measurement cycle T1. At this time, if the amount of light received by the light receiving element 4 (detected amount of received light) in the detection period of the current measurement cycle T1 is larger than the optimum value, the control circuit 8 projects the light for detection in the detection period of the current measurement cycle T1. A detection light projection time t02 shorter than the time t01 is set. Then, at the start of the next measurement cycle T2, the detection light projection time t02 and the drive pulse S02 for projecting the light projecting element 2 are output at the set drive current value (predetermined light projection intensity). Incidentally, when the received light amount (detected received light amount) of the light receiving element 4 in the detection period of the current measurement cycle T1 is smaller than the optimum value, the control circuit 8 detects the light projection time for detection in the detection period of the current measurement cycle T1. A light projection time t02 for detection longer than t01 is set. Then, at the start of the next measurement cycle T2, the detection light projection time t02 and the drive pulse S02 for projecting the light projecting element 2 are output at the set drive current value (predetermined light projection intensity) ( (Not shown). That is, the control circuit 8 changes the light projecting time (detection light projecting times t01 to t03) of the light projecting element 2 in the detection period so that the detected light reception amount of the light receiving element 4 becomes a predetermined level that is not saturated.

また、本実施の形態において、投光素子駆動回路3は、制御回路8からのモニタ用駆動パルスS31に基づいて投光素子2に駆動電流を供給し、非検出期間中に投光素子2を投光させる。その際、図2に示すように、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)が検出期間における投光素子2の検出用投光時間t02に連続するようにモニタ用駆動パルスS31を出力する。また、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)が検出期間における投光素子2の検出用投光時間t02の前となるよう、投光素子2を次の測定周期T2の検出期間の開始時刻よりも前、即ち現在の測定周期T1の非検出期間中にモニタ用駆動パルスS31を出力する。なお、モニタ用投光時間t21は、投光素子2の投光が開始されてからモニタ用受光素子6のモニタ受光量が前記検出回路7における所定の閾値TH以上となるまでに要する立ち上がり時間t11よりも長く設定されている。これは、従来の変位センサで起きていた問題を解決するためである。   In the present embodiment, the light projecting element drive circuit 3 supplies a drive current to the light projecting element 2 based on the monitor drive pulse S31 from the control circuit 8, and the light projecting element 2 is supplied during the non-detection period. Light up. At that time, as shown in FIG. 2, the control circuit 8 detects the light projection time t02 of the light projecting element 2 in the detection period when the light projection time of the light projecting element 2 in the non-detection period (monitoring light projection time t21). The monitor drive pulse S31 is output so as to be continuous with the signal. Further, the control circuit 8 projects the light so that the light projecting time of the light projecting element 2 in the non-detection period (monitoring light projecting time t21) is before the light projecting time t02 for detecting the light projecting element 2 in the detection period. The monitor drive pulse S31 is output from the element 2 before the start time of the detection period of the next measurement cycle T2, that is, during the non-detection period of the current measurement cycle T1. The monitor light projecting time t21 is a rise time t11 required from when the light projecting element 2 starts to project until the monitor light receiving amount of the monitor light receiving element 6 becomes equal to or greater than the predetermined threshold value TH in the detection circuit 7. Is set longer than. This is to solve the problem that has occurred in the conventional displacement sensor.

即ち、従来の変位センサでは、図4に示すように、先の測定周期T1の検出期間における受光素子4の検出受光量に応じて次の測定周期T2の検出期間における投光素子2の検出用投光時間t02が立ち上がり時間t11よりも短く設定されると、モニタ用受光素子6から出力されるアナログ受光信号S41の立ち上がりが鈍いため、Hレベルのモニタ用受光信号S51が出力されない。そのため、現在の測定周期T1の検出期間における投光素子2の投光強度(照度)に基づいて次の測定周期T2の検出期間における投光素子2に供給される駆動電流の値を所定の投光強度になるように設定することが不可能となり、受光素子4の受光量を適切に制御することができなくなってしまう。   That is, in the conventional displacement sensor, as shown in FIG. 4, for detecting the light projecting element 2 in the detection period of the next measurement period T2 in accordance with the detected amount of light received by the light receiving element 4 in the detection period of the previous measurement period T1. When the light projection time t02 is set shorter than the rise time t11, the analog light reception signal S41 output from the monitor light receiving element 6 rises slowly, and thus the H level monitor light reception signal S51 is not output. Therefore, based on the light projection intensity (illuminance) of the light projecting element 2 in the detection period of the current measurement period T1, the value of the drive current supplied to the light projecting element 2 in the detection period of the next measurement period T2 is set to a predetermined light project. It becomes impossible to set the light intensity so that the amount of light received by the light receiving element 4 cannot be appropriately controlled.

これに対し、本実施の形態の変位センサ1によれば、上述したように、投光素子駆動回路3は制御回路8からのモニタ用駆動パルスS31に基づいて非検出期間中に投光素子2を投光させる。そのため、先の測定周期T1の検出期間における受光素子4の受光量(検出受光量)に基づいて設定された次の測定周期T2の検出期間における投光素子2の検出用投光時間t02が立ち上がり時間t11よりも短く設定されても、モニタ用受光素子6での受光量が確保される。よって、次の測定周期T2中にHレベルのモニタ用受光信号S21が出力され、制御回路8は、その測定周期T2の検出期間における投光素子2の投光強度と受光素子4の受光量(検出受光量)とを取得し、さらに次の測定周期T3の検出期間における投光素子2に供給する駆動電流の値と駆動電流の供給時間(投光時間(検出用投光時間t03)とを設定する。そして、さらに次の測定周期T3の開始時刻において、制御回路8は、新たに設定された駆動電流の値で検出用投光時間t03、投光素子2を投光させるための駆動パルスS03を出力する。即ち、受光素子4の検出受光量に応じた最適な投光素子2の投光強度と検出用投光時間t03とが設定される。なお、非検出期間中に投光された光は受光素子4に受光されないため、検出期間における受光素子4の受光量に影響が及ぶことはない。   On the other hand, according to the displacement sensor 1 of the present embodiment, as described above, the light projecting element drive circuit 3 is based on the monitor drive pulse S31 from the control circuit 8 during the non-detection period. Light up. For this reason, the detection light projection time t02 of the light projecting element 2 in the detection period of the next measurement period T2 set based on the light reception amount (detected light reception amount) of the light receiving element 4 in the detection period of the previous measurement period T1 rises. Even if it is set shorter than the time t11, the amount of light received by the monitor light receiving element 6 is secured. Therefore, the monitoring light reception signal S21 of H level is output during the next measurement cycle T2, and the control circuit 8 outputs the light projection intensity of the light projecting element 2 and the amount of light received by the light receiving element 4 (in the detection period of the measurement cycle T2). Detection light amount), and further, the value of the drive current supplied to the light projecting element 2 and the drive current supply time (light projection time (detection light projection time t03)) in the detection period of the next measurement cycle T3. Further, at the start time of the next measurement cycle T3, the control circuit 8 uses the newly set drive current value for the detection light projecting time t03 and the drive pulse for projecting the light projecting element 2. In other words, S03 is output, that is, the optimal light projection intensity of the light projecting element 2 and the light projecting time t03 for detection are set according to the detected amount of light received by the light receiving element 4. The light is projected during the non-detection period. Detected light is not received by the light receiving element 4 It will not span affect the amount of light received by the light receiving element 4 between.

また、その際、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用受光時間t21)が検出期間における投光素子2の検出用投光時間t02に連続するようにモニタ用駆動パルスS31を出力する。従って、検出期間及び非検出期間における投光時間(検出用投光時間t02及びモニタ用投光時間t21)を合わせた時間、投光素子2から光が連続して投光される。   At that time, the control circuit 8 monitors so that the light projecting time of the light projecting element 2 in the non-detection period (monitoring light receiving time t21) is continuous with the light projecting time t02 for detecting the light projecting element 2 in the detection period. Drive pulse S31 is output. Therefore, the light is continuously projected from the light projecting element 2 for the total time of the light projection times (the detection light projection time t02 and the monitor light projection time t21) in the detection period and the non-detection period.

さらに、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用受光時間t21)が検出期間における投光素子2の検出用投光時間t02の前となるよう、投光素子2を次の測定周期T2(検出期間)の開始時刻よりも前、即ち現在の測定周期T1の非検出期間中にモニタ用駆動パルスS31を出力する。よって、現在の測定周期T1の非検出期間において投光素子2の投光量が十分安定するレベルまで増加し、次の測定周期T2の検出期間において、比較的不安定な投光初期の投光素子2の投光が受光素子4に受光され難くなる。   Further, the control circuit 8 projects the light projecting element so that the light projecting time (monitoring light receiving time t21) of the light projecting element 2 in the non-detection period is before the light projecting time t02 for detecting the light projecting element 2 in the detection period. 2 is output before the start time of the next measurement period T2 (detection period), that is, during the non-detection period of the current measurement period T1. Therefore, the light projection amount of the light projecting element 2 increases to a level that is sufficiently stable in the non-detection period of the current measurement cycle T1, and the light projection element in the initial stage of light projection that is relatively unstable in the detection period of the next measurement cycle T2. 2 is less likely to be received by the light receiving element 4.

次に、上記実施の形態の作用効果を以下に記載する。
(1)制御回路8は、非検出期間中に投光素子2を投光させるため、検出期間における投光素子2の投光時間(検出用投光時間t01〜t03)に関わらず、モニタ用受光素子6での受光量を確保することができる。よって、投光素子2の立ち上がり時間やモニタ用受光素子6の閾値に制限されることなく検出期間における投光素子2の投光時間(検出用投光時間t01〜t03)を極力短く設定することが可能となり、検出処理の高速化に貢献することができる。また、検出期間における投光素子2の投光時間(検出用投光時間t01〜t03)をより短く設定することができるため、例えば被検出物Wがより近くに配置され受光素子への入光量が大きくなった場合にその入光量の増加に応じて投光素子2の投光量をより小さくすることが可能となり、より近い位置に配置された被検出物Wを検出することができる。
Next, the operational effects of the above embodiment will be described below.
(1) Since the control circuit 8 projects the light projecting element 2 during the non-detection period, the control circuit 8 is used for monitoring regardless of the light projecting time of the light projecting element 2 during the detection period (detection light projecting times t01 to t03). The amount of light received by the light receiving element 6 can be ensured. Therefore, the light projecting time of the light projecting element 2 (detection light projecting time t01 to t03) in the detection period is set as short as possible without being limited by the rise time of the light projecting element 2 or the threshold value of the monitor light receiving element 6. Can contribute to speeding up the detection process. Further, since the light projecting time (detection light projecting time t01 to t03) of the light projecting element 2 in the detection period can be set shorter, for example, the detected object W is arranged closer and the amount of light incident on the light receiving element As the incident light amount increases, the light projection amount of the light projecting element 2 can be reduced as the incident light amount increases, and the detection target W arranged at a closer position can be detected.

(2)制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)が検出期間における投光素子2の投光時間(検出用投光時間t02)に連続するように投光素子2を投光させるため、点灯及び消灯を繰り返すことによる投光素子2の無駄な消耗を低減することができる。また、本実施の形態ではモニタ用投光時間t21が立ち上がり時間t11よりも長く設定されているが、モニタ用投光時間t21を検出用投光時間t01〜t03に連続させているため、モニタ用投光時間t21及び検出用投光時間t01〜t03を合わせた投光時間が立ち上がり時間t11よりも長くなるようにモニタ用投光時間t21が設定されればよい。即ち、モニタ用投光時間t21を検出用投光時間t01〜t03に連続させない場合と比較して、検出期間における投光素子2の投光時間(検出用投光時間t01〜t03)の分、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)を短くすることが可能となる。従って、このことによっても、投光素子2の無駄な消耗を低減することができる。   (2) In the control circuit 8, the light projecting time of the light projecting element 2 in the non-detection period (monitoring light projecting time t21) is continuous with the light projecting time of the light projecting element 2 in the detection period (detecting light projecting time t02). Thus, since the light projecting element 2 is projected, wasteful consumption of the light projecting element 2 due to repeated lighting and extinction can be reduced. In this embodiment, the monitor light projection time t21 is set longer than the rise time t11. However, since the monitor light projection time t21 is continuous with the detection light projection times t01 to t03, The monitor light projection time t21 may be set so that the light projection time obtained by combining the light projection time t21 and the detection light projection times t01 to t03 is longer than the rise time t11. That is, as compared with the case where the monitoring light projecting time t21 is not continued from the detection light projecting time t01 to t03, the light projecting time of the light projecting element 2 (detection light projecting time t01 to t03) in the detection period, It is possible to shorten the light projecting time (monitoring light projecting time t21) of the light projecting element 2 in the non-detection period. Therefore, this also makes it possible to reduce wasteful consumption of the light projecting element 2.

(3)制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)が検出期間における投光素子2の投光時間(検出用投光時間t02)の前となるよう投光素子2を投光させるため、比較的不安定な投光初期の投光素子2の投光が受光素子4に受光され難くなる。よって、検出期間中に受光素子4が単位時間あたりに受光する検出受光量を安定させることが可能となり、投光時間(検出用投光時間t01〜t03)の変化を受光素子4の検出受光量の変化に好適に反映させることができる。なお、本実施の形態では、モニタ用投光時間t21は、立ち上がり時間t11よりも長く設定されているため、次の測定周期T2の検出期間における投光素子2の投光量(照度)がより安定する。   (3) In the control circuit 8, the light projecting time of the light projecting element 2 in the non-detection period (monitoring light projecting time t21) is before the light projecting time of the light projecting element 2 in the detection period (light projecting time t02 for detection). Since the light projecting element 2 is projected so that the light projecting element 2 is relatively unstable, it is difficult for the light receiving element 4 to receive the light from the light projecting element 2 at the initial stage of light projection. Therefore, it is possible to stabilize the amount of detected light received by the light receiving element 4 per unit time during the detection period, and to detect the change in the light projecting time (detection light projecting time t01 to t03). It is possible to favorably reflect the change in. In the present embodiment, since the monitor light projection time t21 is set longer than the rise time t11, the light projection amount (illuminance) of the light projecting element 2 in the detection period of the next measurement cycle T2 is more stable. To do.

(4)モニタ用受光素子6は安価なフォトダイオードで構成されるため、製造コストの増加を抑えることができる。
尚、本発明の実施形態は、以下のように変更してもよい。
(4) Since the monitor light receiving element 6 is composed of an inexpensive photodiode, an increase in manufacturing cost can be suppressed.
In addition, you may change embodiment of this invention as follows.

・上記実施の形態では、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)を次の測定周期T2の検出期間における投光素子2の投光時間(検出用投光時間t02)に連続させるモニタ用駆動パルスS31を出力するとした。しかし、例えば図3に示すように、制御回路8は、非検出期間における投光素子2の投光時間(モニタ用投光時間t21)を次の測定周期T2の検出期間における投光素子2の投光時間(検出用投光時間t02)に連続させないモニタ用駆動パルスS61を出力するとしてもよい。   In the above embodiment, the control circuit 8 uses the light projection time of the light projecting element 2 in the non-detection period (monitor light projection time t21) as the light projection time of the light projecting element 2 in the detection period of the next measurement cycle T2. It is assumed that the monitor drive pulse S31 is output continuously at (detection light projection time t02). However, as shown in FIG. 3, for example, the control circuit 8 uses the light projecting time of the light projecting element 2 in the non-detection period (monitoring light projecting time t21) of the light projecting element 2 in the detection period of the next measurement cycle T2. The monitor drive pulse S61 that is not continued to the projection time (detection projection time t02) may be output.

・上記実施の形態では、被検出物Wの位置を検出する変位センサ1(光電センサ)を示したが、例えば、フォトダイオードからなる受光素子(検出用受光手段)を用いて被検出物Wの有無を検出する光電センサなどに適用してもよい。   In the above embodiment, the displacement sensor 1 (photoelectric sensor) for detecting the position of the detection object W is shown. However, for example, the detection object W is detected by using a light receiving element (detection light receiving means) made of a photodiode. You may apply to the photoelectric sensor etc. which detect the presence or absence.

・上記実施の形態では、制御回路8は投光素子2の投光強度が所定強度で一定となるように駆動電流の値を設定し、受光素子4の検出受光量が飽和しない所定レベルとなるように投光素子2の検出用投光時間t01〜t03を変更している。しかし、制御回路8は受光素子4の検出受光量が飽和しない所定レベルとなるように投光素子2の投光強度と投光素子2の検出用投光時間t01〜t03とを変更する構成としてもよい。また、上記実施の形態では、制御回路8により投光素子2に供給される駆動電流の値が設定されているが、投光強度設定手段としてAPC(Automatic Power Control)回路を設け、制御回路8は駆動電流の供給時間(検出用投光時間t01〜t03)のみを設定する構成としてもよい。   In the above embodiment, the control circuit 8 sets the drive current value so that the light projecting intensity of the light projecting element 2 is constant at a predetermined intensity, and the detected light reception amount of the light receiving element 4 becomes a predetermined level that does not saturate. As described above, the detection light projection times t01 to t03 of the light projecting element 2 are changed. However, the control circuit 8 is configured to change the light projection intensity of the light projecting element 2 and the light projecting times t01 to t03 for detection of the light projecting element 2 so that the detected light reception amount of the light receiving element 4 becomes a predetermined level that is not saturated. Also good. In the above embodiment, the value of the drive current supplied to the light projecting element 2 by the control circuit 8 is set. However, an APC (Automatic Power Control) circuit is provided as the light intensity setting means, and the control circuit 8 May be configured to set only the drive current supply time (detection light projection times t01 to t03).

・上記実施の形態では、モニタ用受光素子6としてフォトダイオードを用いたが、例えばフォトトランジスタ等、その他の素子を用いてもよい。   In the above embodiment, the photodiode is used as the monitor light receiving element 6, but other elements such as a phototransistor may be used.

本実施の形態の変位センサの概略構成を示すブロック図。The block diagram which shows schematic structure of the displacement sensor of this Embodiment. 本実施の形態のモニタ用受光信号の出力タイミングを示すタイミングチャート。4 is a timing chart showing the output timing of the monitor light reception signal according to the present embodiment. 別例のモニタ用受光信号の出力タイミングを示すタイミングチャート。The timing chart which shows the output timing of the light reception signal for a monitor of another example. 従来のモニタ用受光信号の出力タイミングを示すタイミングチャート。The timing chart which shows the output timing of the conventional light reception signal for a monitor.

符号の説明Explanation of symbols

1…変位センサ(光電センサ)、2…投光手段を構成する投光素子、3…投光手段を構成する投光素子駆動回路、4…検出用受光手段を構成する受光素子、5…検出用受光手段を構成する受光素子駆動回路、6…モニタ用受光手段を構成するモニタ用受光素子、7…モニタ用受光手段としての検出回路、8…検出手段、検出期間設定手段、投光強度設定手段及び投光時間制御手段としての制御回路、W…被検出物、t01〜t03…検出用投光時間、t21…モニタ用投光時間。   DESCRIPTION OF SYMBOLS 1 ... Displacement sensor (photoelectric sensor), 2 ... Light projection element which comprises light projection means, 3 ... Light projection element drive circuit which comprises light projection means, 4 ... Light reception element which comprises light reception means for detection, 5 ... Detection Light receiving element drive circuit constituting light receiving means for monitoring, 6... Light receiving element for monitoring constituting light receiving means for monitoring, 7... Detection circuit as light receiving means for monitoring, 8. Control circuit as means and light projection time control means, W ... detected object, t01 to t03 ... detection light projection time, t21 ... monitor light projection time.

Claims (5)

被検出物に向けて投光を行うための投光手段と、
複数の画素からなり、前記被検出物で反射された反射光を受光して前記複数の画素の各受光量から受光分布を得るイメージセンサと、
前記イメージセンサでの前記受光分布に基づいて前記被検出物の変位を検出する検出手段と、
前記検出手段での前記被検出物の検出を可能とする検出期間とその検出を不能とする非検出期間とのいずれかに切り替える検出期間設定手段と、
前記投光手段からの照射光を直接受光可能に配置されたモニタ用受光手段と、
前記モニタ用受光手段での受光に基づいて前記投光手段の投光強度を所定強度に設定する投光強度設定手段と、
前記イメージセンサが受光した検出受光量に応じて前記投光手段の投光時間を制御する投光時間制御手段と
を備えた変位センサにおいて、
前記投光時間制御手段は、前記検出手段における前記非検出期間中に前記投光手段を投光させ
前記投光強度設定手段は、前記投光手段による前記非検出期間と前記検出期間とにおける投光によって、前記モニタ用受光手段で受光された受光量に基づき、前記投光手段の投光強度を所定強度に設定することを特徴とする変位センサ。
A light projecting means for projecting light toward the object to be detected;
An image sensor comprising a plurality of pixels, receiving reflected light reflected by the object to be detected, and obtaining a light reception distribution from each light reception amount of the plurality of pixels;
Detecting means for detecting a displacement of the detected object based on the received light distribution in the image sensor;
A detection period setting unit that switches between a detection period that enables detection of the detection object by the detection unit and a non-detection period that disables the detection;
A light receiving means for monitoring disposed so as to be able to directly receive the irradiation light from the light projecting means;
Projection intensity setting means for setting the projection intensity of the projection means to a predetermined intensity based on light received by the monitor light receiving means;
In a displacement sensor comprising: a light projecting time control unit that controls a light projecting time of the light projecting unit according to a detected light reception amount received by the image sensor;
The light projection time control means, said even during the non-detection period is projected the light projecting means in the detecting means,
The light projecting intensity setting means determines the light projecting intensity of the light projecting means based on the amount of light received by the light receiving means for monitoring by light projection in the non-detection period and the detection period by the light projecting means. A displacement sensor characterized by being set to a predetermined strength .
請求項1に記載の変位センサにおいて、
前記投光時間制御手段は、前記非検出期間における前記投光手段の投光時間が前記検出期間における前記投光手段の投光時間に連続するように前記投光手段を投光させることを特徴とする変位センサ。
The displacement sensor according to claim 1,
The light projecting time control means causes the light projecting means to project so that the light projecting time of the light projecting means in the non-detection period is continuous with the light projecting time of the light projecting means in the detection period. Displacement sensor.
請求項2に記載の変位センサにおいて、
前記投光時間制御手段は、前記非検出期間における前記投光手段の投光時間が前記検出期間における前記投光手段の投光時間の前となるよう前記投光手段を投光させることを特徴とする変位センサ。
The displacement sensor according to claim 2, wherein
The light projection time control unit causes the light projection unit to project light so that the light projection time of the light projection unit in the non-detection period is before the light projection time of the light projection unit in the detection period. Displacement sensor.
請求項1〜3の何れか1項に記載の変位センサにおいて、
前記モニタ用受光手段は、フォトダイオードで構成されることを特徴とする変位センサ。
The displacement sensor according to any one of claims 1 to 3,
A displacement sensor according to claim 1, wherein the light receiving means for monitoring comprises a photodiode.
被検出物に向けて投光を行うための投光手段と、
前記被検出物で反射された反射光を受光する検出用受光手段と、
前記検出用受光手段での検出受光量に基づいて前記被検出物を検出する検出手段と、
前記検出手段での前記被検出物の検出を可能とする検出期間とその検出を不能とする非検出期間とのいずれかに切り替える検出期間設定手段と、
前記投光手段からの照射光を直接受光可能に配置されたモニタ用受光手段と、
前記モニタ用受光手段での受光に基づいて前記投光手段の投光強度を所定強度に設定する投光強度設定手段と、
前記検出用受光手段が受光した検出受光量に応じて前記投光手段の投光時間を制御する投光時間制御手段と
を備えた光電センサにおいて、
前記投光時間制御手段は、前記検出手段における前記非検出期間中に前記投光手段を投光させ
前記投光強度設定手段は、前記投光手段による前記非検出期間と前記検出期間とにおける投光によって、前記モニタ用受光手段で受光された受光量に基づき、前記投光手段の投光強度を所定強度に設定することを特徴とする光電センサ。
A light projecting means for projecting light toward the object to be detected;
A light receiving means for detection that receives reflected light reflected by the object to be detected;
Detecting means for detecting the object to be detected based on the amount of received light detected by the light receiving means for detection;
A detection period setting unit that switches between a detection period that enables detection of the detection object by the detection unit and a non-detection period that disables the detection;
A light receiving means for monitoring disposed so as to be able to directly receive the irradiation light from the light projecting means;
Projection intensity setting means for setting the projection intensity of the projection means to a predetermined intensity based on light received by the monitor light receiving means;
In a photoelectric sensor comprising: a light projecting time control unit that controls a light projecting time of the light projecting unit according to a detected light reception amount received by the light receiving unit for detection;
The light projection time control means, said even during the non-detection period is projected the light projecting means in the detecting means,
The light projecting intensity setting means determines the light projecting intensity of the light projecting means based on the amount of light received by the light receiving means for monitoring by light projection in the non-detection period and the detection period by the light projecting means. A photoelectric sensor characterized by being set to a predetermined intensity .
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