JP4899375B2 - Cutting tool, processing apparatus, and cutting method - Google Patents

Description

  The present invention relates to a cutting tool provided with a processing tip such as diamond at the tip, a processing apparatus incorporating the cutting tool, a molding die and an optical element manufactured using the cutting tool, and the like.

  There is a technique for cutting a hard material such as cemented carbide or glass by vibrating the tip of a tool such as diamond, which is called vibration cutting. This is because the tool cutting edge makes a fine cut at a high speed by vibration, and the cutting edge generates a chip by the vibration, resulting in high efficiency with less stress on the tool and work material. (See, for example, Patent Documents 1, 2, and 3).

In such a vibration cutting process, if the vibration frequency is increased, the machining efficiency is increased, and further, the feed rate of the tool is increased almost in proportion to the frequency. Therefore, a high-speed vibration of 20 kHz or more is usually used.
JP 2000-52101 A JP 2000-218401 A Japanese Patent Laid-Open No. 9-309001

  However, in the cutting process as described above, the shape of the cutting tip that is the tool edge and the shape of the shank that supports the cutting tip is a triangular flat member with the tip at the apex, and various shapes such as a deep concave shape can be obtained. In the case of processing the lens molding die having, there is a problem that the workpiece and the processing chip interfere with each other at a position different from the processing point.

  Here, it is conceivable to avoid interference by setting the opening angle of the tip for processing or the tip of the shank as acute as possible. However, when the tip is simply made an acute angle, the shank becomes elongated. As a result, the distance from the fixed position of the shank to the cutting edge of the machining tip becomes long, and the position control of the tool cutting edge becomes difficult. In particular, in the case of vibration cutting, it is difficult to control the vibration of the tool cutting edge due to an increase in the weight of the tool and an increase in the distance to the cutting edge of the machining tip.

  Accordingly, the present invention provides a cutting tool, a processing apparatus, a cutting method, and a molding die and an optical element that are manufactured by using the cutting tool, a processing apparatus, and a cutting method that can easily process various concave surfaces and increase processing accuracy. The purpose is to provide.

In order to solve the above problems, a cutting tool according to the present invention has (a) a machining tip, (b) a support portion that supports the machining tip, and a fixing portion that is fixed to the tip of the holder, And a shank provided with a recess on the side surface of the tapered portion extending from the support portion to the fixed portion. The processing chip is a member having a cutting edge for processing, and the shank refers to a base metal part. The holder is a member that supports the shank during actual processing, and the tip of the holder is the root portion of the shank, that is, the portion to which the fixing portion is attached.
In the cutting tool of the present invention, the processing tip is formed of either diamond or high-purity cBN, is disposed on the tip side of the recess, has a shape along the shank on the root side, and the tapered portion is It is a plate-like body having a flat upper and lower surface and a tapered side surface, and the fixing portion includes an opening for fixing, and the axial length of the supporting portion is x, and is supported from the center of the opening in the axial direction of the fixing portion. When the length to the end on the part side is y and the opening diameter of the opening of the fixed part is D,
D / 2 <y <x
Satisfy the condition of

In the above cutting tool, since the concave portion is provided on the side surface of the tapered portion extending from the support portion to the fixing portion in the shank, the size of the fixing portion of the shank can be reduced even if the opening angle of the processing tip or the support portion is reduced. It can be maintained above a certain level, and the attachment of the shank to the tip of the holder can be ensured. In addition, when the opening angle of the machining tip and the support portion is reduced, the machining tip can be easily applied to the surface to be processed regardless of the depth of the surface shape of the workpiece, and the machining tip can be applied to the surface to be processed. The degree of freedom regarding the angle and the moving direction can be increased. Further, in the cutting tool, the length of the shank, that is, the distance from the fixed portion to the tip of the support portion can be shortened, and the vibration state including the amplitude of the machining tip that is the tool blade tip can be easily controlled. As a result, the processing accuracy can be increased.
In the cutting tool, the tapered portion is a plate-like body having a flat upper and lower surface and a tapered side surface, and the fixing portion includes a fixing opening, so that the concave portion is formed on the tapered side surface of the plate-like body constituting the shank. The constriction is formed, and the inclination of the posture along the plate-like surface of the shank, that is, the tolerance of the inclination angle with respect to the workpiece increases.
In the cutting tool, since the condition D / 2 <y <x is satisfied, the effective distance L = x + y from the center of the opening of the fixed portion to the tip of the support portion is ensured to be equal to or greater than a certain distance, and the tip is directed toward the tip of the support portion. The length x can be increased, and the supporting portion and the processing chip can be elongated. As a result, the strength of the support part and the fixed part can be sufficiently maintained, and abnormal vibrations can be prevented from occurring in the support part.
In the cutting tool, the machining tip is formed of either diamond or high-purity cBN. Since diamond can realize extremely high shape accuracy and minute surface roughness, it is very suitable for creation of optical surfaces. Particularly in vibration cutting, the cutting stress is remarkably reduced for both the workpiece and the cutting edge, so that a deep cutting depth can be obtained and the life of the cutting edge of diamond or the like can be extended. It is possible to efficiently create and process an optical surface with less labor. High-purity cBN has an extremely small linear expansion coefficient, enables high-precision cutting, has an effect of suppressing temperature rise by good thermal conductivity, and an effect of preventing adverse effects such as breakage by impact resistance. Be expected. In addition, high purity cBN means what contains 0.5 weight% or less binder etc. other than cBN. Diamond is generally said to cause tool wear because carbon is oxidized by processing heat and the homogeneity of this portion is broken and becomes brittle. In this respect, high-purity cBN is resistant to heat, and depending on the work material, a processed surface with higher accuracy than diamond may be obtained .

  In another aspect of the present invention, the tapered portion includes a support portion and a portion of the fixed portion on the support portion side from the center of the opening. That is, the tapered portion is a range from the opening center to the tip of the fixed portion.

In still another aspect of the present invention, when the opening angle of the side surface of the support portion is θ1, and the opening angle of the side surface of the fixing portion is θ2,
θ1 <θ2 <90 ° (1)
Satisfy the condition of In this case, the opening angle θ2 of the fixing portion side surface is larger than the opening angle θ1 of the supporting portion side surface, and the fixing portion side surface can be enlarged while thinning the supporting portion and the processing chip. On the other hand, it is possible to prevent the opening angle θ2 on the side surface of the fixed portion from becoming extremely large and the fixed portion from interfering with the workpiece to prevent processing.

In yet another aspect of the invention,
θ1 <θ2-10 ° (2)
Satisfy the condition of In this case, the support portion and the processing chip can be made sufficiently thin, and the range of the processing shape can be expanded.

In yet another aspect of the invention,
θ1 <θ2-20 ° (3)
Satisfy the condition of In this case, the support portion and the processing chip can be further narrowed, and the range of the processing shape can be further expanded.

  In yet another aspect of the present invention, the shank is formed of either cemented carbide or cemented carbide. In this case, the linear expansion coefficient of the shank becomes extremely small, dimensional changes due to heat generation can be suppressed, and high-precision cutting can be performed. Further, since the superhard material is generally harder to break than a ceramic material or the like, it has a high reliability as a structural material of a shank for supporting a processing chip.

  In still another aspect of the present invention, the shank is formed of any one of silicon carbide, invar material, stainless invar material, alumina, silicon nitride, sialon, steel, and zirconia.

  In addition, the processing apparatus according to the present invention includes (a) the above-described cutting tool, (b) a vibration source for vibrating the cutting tool, (c) holding the cutting tool at the tip, and from the vibration source. A vibrating body that transmits vibration to the cutting tool. In this case, the above-described cutting tool enables highly accurate vibration cutting. In other words, various shapes can be easily processed by increasing the degree of freedom of the processing tip with respect to the processing surface and the moving direction, and the processing accuracy can be increased by precise control of the vibration state.

  Another processing apparatus according to the present invention includes (a) the cutting tool described above, and (b) a driving device that drives the cutting tool. In this case, highly accurate cutting can be performed by the above-described cutting tool. That is, various shapes can be easily processed by increasing the degree of freedom with respect to the angle and movement direction of the processing tip with respect to the processing surface.

  In a specific aspect or aspect of the present invention, in the processing apparatus, the driving device performs an operation that enables any one of turning processing, ruling processing, fly-cut processing, and milling processing. In this case, since any one of the above processes is performed while changing the relative position of the cutting tool with respect to the workpiece by the driving device, various shapes can be accurately and rapidly formed.

  Moreover, the molding die which concerns on this invention has an optical surface processed and created using the said cutting tool. In this case, a mold having various optical surfaces including a concave surface can be processed with high accuracy. The optical surface is any one of a spherical surface, an aspherical surface (including a cylinder surface and an anamorphic surface), and a fine structure (including a diffraction structure and a step structure). In this case, a mold having a concave optical surface can be processed with high accuracy.

  The molding die according to the present invention is molded by the molding die. In this case, a high-precision optical element can be obtained with a high-precision mold.

Moreover, the cutting method according to the present invention is a cutting method using a cutting tool including a shank for fixing a processing tip to the tip, and the processing tip is formed of either diamond or high-purity cBN. In addition, it is arranged on the tip side of the concave portion provided on the side surface of the tapered portion that extends from the support portion of the shank that supports the processing chip to the fixed portion that is fixed to the tip of the holder, and along the shank on the root side. The tapered portion is a plate-like body having a flat upper and lower surface and a tapered side surface, the fixing portion has an opening for fixing, and the cutting tool has an axial length of the supporting portion. x, the length from the center of the opening in the axial direction of the fixed portion to the end on the support portion side is y, and the opening diameter of the opening of the fixed portion is D,
D / 2 <y <x
Satisfy the condition of

[First Embodiment]
Hereinafter, the cutting tool concerning a 1st embodiment of the present invention is explained using a drawing. FIG. 1A is a plan view of the cutting tool, and FIG. 1B is a side view of the cutting tool.

  The cutting tool 10 is for processing an optical surface of a molding die for molding an optical element such as a lens. The cutting tool 10 has a triangular shape with a sharp tip and is fixed to the tip of the shank 20 with a plate-like shank 20 as a whole. The processed chip 30 is provided. Among these, the shank 20 is made of cemented carbide or a cemented carbide alloy and is difficult to bend while being lightweight. The shank 20 is not limited to carbide or the like, and can be formed of any one of silicon carbide, invar material, stainless invar material, alumina, silicon nitride, sialon, steel, zirconia, and the like. The processing tip 30 is a diamond tip and is fixed to the tip of the shank 20 by brazing using an active metal method or the like. The processing chip 30 can also be formed of high-purity cBN or the like.

また、シャンク２０をサイアロン製とすることができる。サイアロンは窒化珪素と同じような特性を有することから、シャンク材として適している。また、シャンク２０を鋼製とすることができる。鋼材は価格が安く加工がしやすい。また、鋼材はチップのロウ付けも行いやすい。ただし、鋼材については、熱膨縮特性と剛性があまりよくない。また、シャンク２０がジルコニア製の場合、破壊じん性値が高いので、カケや割れが生じにくい。しかし、線膨張係数が高く環境温度変化に弱い。ジルコニアは、鋼に比べて大きな違いはないが、使用環境・条件を厳密に管理することが望ましい。 When the shank 20 is made of silicon carbide, the material has a high thermal conductivity and a low coefficient of linear expansion, so that the influence of changes in the cutting edge position due to processing heat and environmental temperature changes is reduced. However, since the fracture toughness value is low, the use of other materials may be preferable in applications where demands for cracks and cracks are severe. Further, when the shank 20 is an invar material or a stainless invar material, these materials have a small linear expansion coefficient, and thus are not easily affected by environmental temperature changes. Moreover, since it is a metal, the crack and crack which are easy to generate | occur | produce with silicon carbide do not occur easily. However, since the Young's modulus is half to ３ of the steel material, the shank may be bent due to the cutting resistance generated at the cutting edge. Therefore, in applications where the cutting edge position is precise and movement is not permitted, the use of other materials may occur. In addition, since this material has a transformation point at 300 to 600 ° C., there is a concern that the material characteristics may change during brazing, and therefore management of the use temperature is important. Further, when the shank 20 is made of an alumina material, the alumina material is a material that can be easily processed in ceramics, and the material cost is also low. Alumina has a high Young's modulus of 382 Gpa and a high coefficient of linear expansion, so it may break due to the difference in coefficient of linear expansion when brazing the chip, so it is necessary to strictly control the brazing conditions and process. There is. Further, when the shank 20 is made of silicon nitride, it can be seen from the following table that the material characteristics are most suitable as a shank material among ceramics. In particular, silicon nitride has a low linear expansion coefficient at room temperature of 2.7 × 10 ⁻⁶ and low fracture toughness, so it is difficult to break and braze easily.

Further, the shank 20 can be made of sialon. Sialon is suitable as a shank material because it has the same characteristics as silicon nitride. Further, the shank 20 can be made of steel. Steel is cheap and easy to process. Steel is also easy to braze chips. However, the steel material has poor thermal expansion / contraction characteristics and rigidity. In addition, when the shank 20 is made of zirconia, the fracture toughness value is high, so that cracks and cracks are less likely to occur. However, it has a high coefficient of linear expansion and is vulnerable to environmental temperature changes. Zirconia is not much different from steel, but it is desirable to strictly manage the usage environment and conditions.

  On the other hand, when high-purity cBN is used for the processing tip 30, the high-purity cBN has the second highest hardness after diamond and has better heat resistance than diamond, so it has low thermal conductivity that tends to generate heat at the processing point. When cutting a high-rate material (for example, glass), the blade edge life is long. Also, when processing an iron-based material, diffusion wear is unlikely to occur, which is excellent for such processing. However, for materials other than those listed above that can be processed with diamond, processing with diamond is superior in processing specularity and wear resistance, so select a chip material according to the work material. It is best to process.

The shank 20 includes a support portion 21 that supports the processing chip 30 and a fixing portion 23 that is fixed to the tip of a holder (not shown). The support portion 21 is a triangular shape having an acute apex angle as in the processing chip 30 and has a flat appearance as a whole. The fixing portion 23 has a hexagonal flat outline and a circular opening 23a in the center. . In the shank 20, a taper portion 25 is formed from the center of the support portion 21 to the fixing portion 23. And the recessed part 25c is provided in the both sides | surfaces 25a and 25b of this taper part 25, respectively. Here, a portion of the side surfaces 25a and 25b on the support portion 21 side has a constant opening angle θ1, and a portion of the side surfaces 25a and 25b on the fixing portion 23 side has a constant opening angle θ2. Have. Further, between the double opening angles θ1 and θ2, the following relationship θ1 <θ2 <90 ° (1)
The opening angle θ2 on the fixed portion 23 side is larger than the opening angle θ1 on the support portion 21 side, but is less than 90 °. Thus, by making the opening angle θ2 on the fixed portion 23 side larger than the opening angle θ1 on the support portion 21 side, bent portions are formed in the vicinity of the center of the both side surfaces 25a and 25b, and the periphery of these bent portions Becomes the recess 25c. Here, the opening angle θ <b> 1 on the support portion 21 side is smaller than the opening angle θ <b> 2 on the fixing portion 23 side, and the processing tip 30 can be formed into a sharp and elongated shape. When the machining tip 30 is elongated, it becomes easy to insert the tool blade edge into the recess of the mold base material, which is a workpiece, and the degree of freedom in processing the recess of the mold base material is increased. On the other hand, the opening angle θ2 on the fixing portion 23 side is larger than the opening angle θ1 on the supporting portion 21 side, so that the fixing portion 23 can be made sufficiently large. As a result, the support portion 21 can be stably supported without lengthening, and the size of the opening 23a through which a tightening screw should be passed when securing to the tip of a holder (not shown) is secured to a certain level or more. can do. Further, the opening angle θ2 on the fixed portion 23 side is less than 90 °, which makes this an acute angle, and the possibility that the fixed portion 23 interferes with a mold base material that is a workpiece is reduced.

As for the dimensions of the shank 20, it is assumed that the rigidity can be secured and abnormal vibration does not occur within a range suitable for the depth of the recess to be formed in the mold base material. Specifically, there is a fixed interval between the length x of the support portion 21 in the axis AX direction and the length y from the center of the opening 23a to the end portion on the support portion 21 side in the axis AX direction of the fixed portion 23. When the opening diameter of the part is D, the following relationship D / 2 <y <x (4)
The length y of the fixing portion 23 on the support portion 21 side is smaller than the length x of the support portion 21, and the relative size of the support portion 21 is large. Accordingly, the effective length L = x + y from the center of the opening 23a of the fixing portion 23 to the tip of the support portion 21 is kept below a certain level, and the length x toward the tip of the support portion 21 is relatively increased. Can do. Thereby, while making the support part 21 and the chip | tip 30 for a process elongate, while being able to maintain the intensity | strength of the support part 21 and the fixing | fixed part 23 sufficiently high, it can prevent that the abnormal vibration generate | occur | produces in the support part 21. That is, by setting y <x, a deep concave shape can be finished to a highly accurate surface. On the other hand, since D / 2 <y, the shank 20 can be fixed with sufficient strength, and the stability and reliability of processing can be improved. The upper limit of x is empirically preferable to be 6 mm or less.

  2-4 is a figure explaining the modification of the shape of the shank 20 mainly among the cutting tools 10 illustrated in FIG. The shank 120 shown in FIG. 2A has a dome shape in which the fixing portion 123 is a combination of a semicircular shape and a rectangular shape, and the average opening angle in the portion on the fixing portion 123 side of the side surfaces 25a and 25b is fixed to the fixing portion 123. Is an opening angle θ2. Moreover, the shank 220 shown in FIG. 2B has a hexagonal shape in which the fixing portion 223 is a combination of a trapezoid and a rectangle. Here, the opening angle θ <b> 2 at the portion of the side surfaces 25 a and 25 b on the fixed portion 223 side is the same as that shown in FIG. The shank 320 shown in FIG. 3A has a shape in which the fixing portion 323 is a combination of a semicircular shape and a trapezoid, and the average opening angle in the portion on the fixing portion 323 side of the side surfaces 25a and 25b The opening angle is θ2. The shank 420 shown in FIG. 3 (b) has a shape in which the fixed portion 423 is a combination of a trapezoid whose base is widened and a normal trapezoid. The opening angle θ2 of the fixing portion 423 is set. The shank 520 shown in FIG. 4 (a) has a shape in which the fixed portion 523 is a combination of two trapezoidal portions having an arc and a straight hypotenuse, and the fixed portion 523 side of the one side surface 25a is connected to the other side. An average opening angle between the side surface 25b and the fixing portion 523 side is defined as an opening angle θ2 of the fixing portion 523. In the shank 620 shown in FIG. 4B, the fixing portion 523 has a substantially circular shape, and the average opening angle in the portion on the fixing portion 623 side of the side surfaces 25a and 25b is the opening angle θ2 of the fixing portion 623.

  FIG. 5 is an enlarged cross-sectional view of the tip portion 30 a of the processing tip 30. The rake face S1 provided on the upper surface of the processing chip 30 is a flat surface, and the first flank S2 of the end face has a minute first flank angle α1 with respect to a plane perpendicular to the rake face S1, and The second flank S3 adjacent to the first flank S2 forms a relatively large second flank angle α2 with respect to the plane perpendicular to the rake face S1. In addition, the front-end | tip part 30a of the chip | tip 30 for a process is not restricted to the semicircle which is illustrated to Fig.1 (a), but can be made into various shapes according to a use. For example, it can be set as the processing chip | tip 130 which has the half-moon bite-shaped front-end | tip part P1, as illustrated in the top view of FIG. 6A, or as illustrated in the top view of FIG. It can be set as the processing chip | tip 230 which has the front-end | tip part P2 of a sword tip byte shape.

  FIG. 7 is a cross-sectional view illustrating the structure of the cutting unit 40. The cutting unit 40 includes a cutting tool 10 and a holder 91. Here, the cutting tool 10 is the one described with reference to FIG. 1 and the like, and is held so as to be embedded in the tip end portion 91a of the holder 91, and is detachably fixed by fastening using a screw 92. As for the cutting tool 10, the front-end | tip part 30a is a cutting edge of a diamond tip.

  One end of the holder 91 is provided with an air supply pipe 94 connected to the opening on the end surface. The air supply pipe 94 is connected to a gas supply device (not shown), and pressurized dry air set to a desired flow rate and temperature is supplied.

  In the above cutting unit 40, the through hole 95 is formed in the axial center of the holder 91, and the pressurized dry air from the air supply pipe 94 circulates. The front end portion of the through hole 95 is also used as a holding hole for inserting and fixing the cutting tool 10, and the pressurized dry air introduced into the through hole 95 can be supplied to the periphery of the cutting tool 10. Yes. Further, the tip of the through hole 95 leaves a gap even when the cutting tool 10 is fixed, and pressurized dry air is jetted at a high speed from the opening 95a formed adjacent to the cutting tool 10 for cutting. Not only can the processing point at the tip of the tool 10 be efficiently cooled, but also the processing point and chips adhering to the periphery of the processing point can be reliably removed by the airflow.

  FIG. 8 is a block diagram conceptually illustrating the structure of a cutting apparatus 100 that is a precision processing machine incorporating the cutting unit 40 of FIG.

  As illustrated, the cutting apparatus 100 includes a cutting unit 40 for cutting a workpiece W that is a workpiece, an NC drive mechanism 50 that supports the cutting unit 40 with respect to the workpiece W, and an NC drive mechanism 50. A drive control device 61 that controls the operation, a gas supply device 65 that supplies a cooling gas to the cutting unit 40, and a main control device 70 that comprehensively controls the operation of the entire device are provided.

  The NC drive mechanism 50 is a drive device having a structure in which a first stage 52 and a second stage 53 are placed on a pedestal 51 which is a surface plate. Here, the first stage 52 supports the rotation driving unit 55, and the rotation driving unit 55 indirectly supports the workpiece W via the chuck 37. The first stage 52 can move the workpiece W, for example, to a desired position along the Z-axis direction at a desired speed. Further, the rotation drive unit 55 can rotate the workpiece W around the main axis parallel to the Z axis, that is, the rotation axis RA at a desired speed. On the other hand, the second stage 53 supports a unit mounting portion 56, and this unit mounting portion 56 supports the cutting unit 40. The second stage 53 can support the unit mounting portion 56 and the cutting unit 40 and move them at a desired speed to a desired position along, for example, the X-axis direction or the Y-axis direction. In the NC drive mechanism 50 described above, the first stage 52 and the rotational drive unit 55 constitute a workpiece drive unit that drives the workpiece W, and the second stage 53 is a tool drive that drives the cutting unit 40. Parts.

  The drive control device 61 enables high-precision numerical control, and drives the motor and the position sensor built in the NC drive mechanism 50 under the control of the main control device 70, so that the first and the first The two stages 52 and 53, the rotation driving unit 55, or the unit mounting unit 56 are appropriately operated to a target state. For example, the first and second stages 52 and 53 are used to work along a predetermined trajectory in which the machining point at the tip of the cutting tool 10 provided at the end of the cutting unit 40 is set at a low speed in a plane parallel to the XZ plane. The workpiece W can be rotated around the rotation axis RA at a high speed by the rotation driving unit 55 while moving (feeding) relative to W. As a result, the NC drive mechanism 50 can be utilized as a lathe for turning with high accuracy under the control of the drive control device 61.

  The gas supply device 65 is for cooling the cutting unit 40, and by passing the pressurized dry air from the gaseous fluid source 65a and the gaseous fluid source 65a that supplies the pressurized dry air. A temperature adjusting unit 65b as a temperature adjusting unit for adjusting the temperature and a flow rate adjusting unit 65c as a flow rate adjusting unit for adjusting the flow rate of the pressurized dry air that has passed through the temperature adjusting unit 65b are provided. Here, the gaseous fluid source 65a dries air by, for example, sending the air to a dryer using a thermal process, a desiccator, or the like, and pressurizes the dry air to a desired pressure with a compressor. Although not shown, the temperature adjusting unit 65b includes, for example, a flow path in which the refrigerant is circulated around and a temperature sensor provided in the middle of the flow path. By adjusting the temperature and supply amount of the refrigerant, The pressurized dry air passed through the flow path can be adjusted to a desired temperature. Furthermore, the flow rate adjusting unit 65c has, for example, a valve and a flow controller (not shown), and can adjust the flow rate when supplying pressurized dry air whose temperature is adjusted to the cutting unit 40. .

  FIG. 9 is a view for explaining a molding die (optical element molding die) produced by using the cutting apparatus 100, and FIG. 9 (a) is a side view of the fixed die, that is, the first die 2A. FIG. 9B is a side sectional view of the movable mold, that is, the second mold 2B. Optical surfaces 3a and 3b of both molds 2A and 2B are finished by a cutting device 100 shown in FIG. In other words, the base material (material is, for example, cemented carbide) of both molds 2A and 2B is fixed to the chuck 57 as a work W, and the drive control device 61 is appropriately operated to rotate the tip of the holder 91 of the cutting unit 40. Is arbitrarily moved in two dimensions. Thereby, the optical surfaces 3a and 3b of the molds 2A and 2B are not limited to spherical surfaces and aspheric surfaces, but can be step surfaces, phase structure surfaces, diffraction structure surfaces, and the like.

  FIG. 10 is a cross-sectional view of a lens L press-molded using the mold 2A of FIG. 9A and the mold 2B of FIG. 9B. Although not shown, when the optical surfaces 3a and 3b of the molds 2A and 2B have a step surface, a phase structure surface, a diffractive structure surface, etc., the molding optical surface of the lens L is also a step surface, a phase structure surface, and a diffractive structure. It has a surface. Furthermore, the material of the lens L is not limited to plastic, but may be glass or the like. The lens L can also be directly produced by the cutting device 100 described above.

[First embodiment]
Hereinafter, specific examples performed by the present inventor will be described. In the present embodiment, the cutting apparatus 100 of FIG. 8 has a positional resolution of the X and Z axes as the feed direction of 1 nm, and the rigidity between the rotation axis RA as the main axis and the orthogonal axes along the X and Z axes is It is very high. As a workpiece W that is a workpiece, tungsten carbide (hereinafter referred to as WC) made of Nippon Tungsten was used. The WC has a very high hardness of HV = 2500. The machining surface shape formed by the cutting unit 40 is an axisymmetric concave surface, the SR (approximate radius of curvature) is 1.2 mm, and the maximum prospective angle (the angle at which the inclination angle of the machining surface with respect to the axis is maximum) is 62 °. The extremely small and deep surface was processed.

  The workpiece W has a concave surface processed in advance by a general-purpose processing machine at a position where a processed surface shape is to be formed, and a finishing process is performed to finish the processed shape and surface roughness with high accuracy by the cutting device 100 of FIG. It was. In the cutting tool 10 fixed to the cutting unit 40, the machining tip 30 is formed of single crystal diamond, and the shank 20 is made of silicon nitride using an active metal method to reduce the weight, and the machining tip 30 is formed. Of single crystal diamond. The rake face S1 of the machining tip 30 has a semicircular contour, the arc radius thereof is 0.8 mm, and the first clearance angle α1 of the first clearance surface S2 is 10 °. Here, the opening angle θ1 of the support portion 21 is 30 °, and the opening angle θ2 of the fixing portion 23 is 63 °. In the cutting tool 10, the effective length L from the set screw position to the tool edge is 8.56 mm (x = 5.5 mm, y = 3.06 mm), and the diameter of the opening 23 a of the fixing portion 23 is short. (Screw diameter) D was 3 mm. In the turning process by the cutting apparatus 100 of FIG. 8, the cutting amount by the cutting tool 10 was set to 0.3 μm, the feed speed of the cutting tool 10 was set to 0.5 mm / min, and the spindle rotation speed was set to 340 rpm.

  When the surface of the workpiece W after processing, that is, the shape of the processed surface was observed with a high-magnification differential interference microscope (100 ×), a very good processed surface was obtained (see the photograph in FIG. 11A). Some vertical stripes are not found, only the diagonally extending interference fringes are observed). When this was measured with a surface roughness measuring device HD3300 manufactured by WYKO, a mirror surface with an average surface roughness Ra = 1.49 nm was obtained (see the graph of FIG. 12).

  Similar processing using a conventional cutting tool, that is, a conventional bite shape (simple triangle) having no recesses on the side surfaces 25a and 25b of the shank 20, and a portion corresponding to the support portion 21 is long. When the process is performed, as shown in FIG. 11 (b), the surface of the workpiece W is non-uniform and traces of fine vertical stripes such as the cutting tool distorted are formed. This is because the effective length, which is the distance from the set screw position to the cutting edge, is long (more than 15 mm), and the surface of the high-hardness workpiece W comes into contact with the tool cutting edge to generate a repulsive force and the tool shank 20 has insufficient rigidity. Therefore, it seems that the tool is rebounded at a level of several nanometers.

  In this experiment, various tool shapes were continuously created and processed under the same conditions as described above, and the results shown in FIG. 13 were obtained. As shown in the data in the figure, a better optical mirror surface is obtained as the difference between θ2 and θ1 increases. Considering this result, improvement was observed when the difference between θ2 and θ1 was 15 ° or more, and when it was 20 ° or more, it was clearly possible to perform highly accurate machining. In the cutting tool 10 of the present embodiment, it is estimated that the length L from the screwing position to the blade tip position is shortened, the deflection of the tool due to processing resistance is suppressed, and the blade tip position is stabilized.

[Second Embodiment]
Hereinafter, a cutting apparatus according to the second embodiment will be described. The cutting apparatus according to the second embodiment is a partial modification of the cutting apparatus according to the first embodiment. The parts that are not particularly described are common to the apparatus according to the first embodiment. The same reference numerals are assigned and duplicate descriptions are omitted.

  FIG. 14 is a cross-sectional view illustrating the structure of a vibration cutting unit 140 that is a processing apparatus according to the second embodiment. The vibration cutting unit 140 includes the same cutting tool 10 as that of the first embodiment shown in FIG. 1, the vibrating body 82, the axial vibrator 83, the bending vibrator 84, the counter balance 85, and the housing 86. Is provided.

  Here, the cutting tool 10 is fixed to the distal end portion 91a of the holder 91, which is the distal end side of the vibrating body 82, and is displaced at high speed while drawing an elliptical orbit EO as illustrated.

The vibrating body 82 is made of, for example, a material having a linear expansion coefficient of 6 × 10 ⁻⁶ or less. Specifically, silicon nitride, sialon, carbide, invar material, stainless invar material, or the like is preferably used. The vibrating body 82 has a thin outer diameter at the tool portion 91 on the distal end side, and a thick outer diameter on the root side. A first fixing flange 87 is formed at an appropriate position on the side surface of the vibrating body 82, and the vibrating body 82 is fixed to the housing 86 via the first fixing flange 87 with, for example, screws 93. The vibrating body 82 is oscillated by the axial vibrator 83 and enters a resonance state in which a standing wave that is locally displaced in the Z direction is formed. The vibrating body 82 is vibrated by the flexural vibrator 84 and enters a resonance state in which a standing wave is locally displaced in the Y-axis direction (or X-axis direction). Here, the position of the first fixing flange 87 is a common node for the vibrating body 82 in the axial vibration and the bending vibration, and by fixing the vibrating body 82 via the first fixing flange 87, It is possible to prevent the axial vibration and the bending vibration from being hindered.

  The shape of the first fixing flange 87 is not limited to a donut plate shape that seals between the vibrating body 82 and the housing 86, but a single seal that partially seals between the vibrating body 82 and the housing 86. It can consist of one or more supports.

  The axial vibrator 83 is a vibration source that is formed of a piezo element (PZT), a giant magnetostrictive element, or the like and is connected to the base side end face of the vibrating body 82, and a vibrator (not shown) via a connector or the like not shown. Connected to the drive. The axial vibrator 83 operates based on a drive signal from the vibrator driving device 63 and gives a longitudinal wave to the vibrating body 82 by stretching and contracting at a high frequency. The axial vibrator 83 is displaceable in the Z direction but is not displaced in the XY direction.

  The bending vibrator 84 is a vibration source that is formed of a piezoelectric element, a giant magnetostrictive element, or the like and is connected to the base side surface of the vibrating body 82, and is connected to a vibrator driving device (not shown) via a connector or the like that is not shown. Has been. The bending vibrator 84 operates based on a drive signal from the vibrator driving device and vibrates at a high frequency to give a transverse wave, that is, vibration in the Y direction in the illustrated example.

  The counter balance 85 is connected to the opposite side of the vibrating body 82 with the axial vibrator 83 interposed therebetween. A second fixing flange 88 is formed at an appropriate position on the side surface of the counter balance 85, and the counter balance 85 is fixed to the housing 86 via the second fixing flange 88. The shape of the second fixing flange 88 is the same as that of the first fixing flange 87. Note that the counter balance 85 is in a resonance state in which a standing wave that is vibrated by the axial vibrator 83 and locally displaced in the Z direction is formed. Here, the position of the second fixing flange 88 is a node of axial vibration for the counter balance 85, and the axial vibration of the vibrating body 82 is prevented by fixing the second fixing flange 88 via the second fixing flange 88. Can be prevented. The counter balance 85 is also formed of the same material as that of the vibrating body 82.

  The casing 86 is a member having a cylindrical inner space, and is a part that supports and fixes the vibrating body 82 and the counter balance 85 via the first and second fixing flanges 87 and 88. The first fixing flange 87 is attached to one end of the housing 86 so as to close the opening, and an air supply pipe 94 connected to the opening on the end surface is provided on the other end. The air supply pipe 94 is connected to a gas supply device (not shown), and pressurized dry air set to a desired flow rate and temperature is supplied.

  In the vibration cutting unit 140 described above, the vibrating body 82, the axial vibrator 83, and the counter balance 85 are joined and fixed to each other by brazing so that the axial vibrator 83 can be efficiently vibrated. It has become. In addition, a through hole 95 is formed in the shaft center of the vibrating body 82, the axial vibrator 83, and the counter balance 85 so as to pass through these joint surfaces. Of pressurized dry air flows. The front end portion of the through hole 95 is also used as a holding hole for inserting and fixing the cutting tool 10, and the pressurized dry air introduced into the through hole 95 can be supplied to the periphery of the cutting tool 10. Yes.

  FIG. 15 is a block diagram for conceptually explaining the structure of the vibration cutting apparatus 200 for turning processing incorporating the vibration cutting unit 140 of FIG.

  As illustrated, the vibration cutting device 200 includes a vibration cutting unit 140 for cutting a workpiece W that is a workpiece, an NC drive mechanism 150 that supports the vibration cutting unit 140 with respect to the workpiece W, and an NC drive. A drive control device 61 that controls the operation of the mechanism 150, a vibrator drive device 63 that applies desired vibration to the vibration cutting unit 140, a gas supply device 65 that supplies a cooling gas to the vibration cutting unit 140, and the entire device And a main control device 70 that comprehensively controls the operation. Since the drive control device 61 and the gas supply device 65 are the same as those described in FIG. 8 in the first embodiment, description thereof will be omitted.

  As described with reference to FIG. 14, the vibration cutting unit 140 is a processing device for vibration cutting in which the cutting tool 10 is embedded on the tip side in the −Z axis direction, and the workpiece W is efficiently cut by the high-frequency vibration of the cutting tool 10. To do.

  The NC drive mechanism 150 is a drive device having a structure in which a first stage 52 and a second stage 53 are placed on a pedestal 51 that is a surface plate. Here, the first stage 52 supports the rotation driving unit 55, and the rotation driving unit 55 indirectly supports the workpiece W via the chuck 37. The first stage 52 and the rotation driving unit 55 are the same as those in the first embodiment shown in FIG. On the other hand, the second stage 53 supports a rotationally movable part 156, and the rotationally movable part 156 supports the vibration cutting unit 140. The second stage 53 can support the rotary movable unit 156 and the vibration cutting unit 140 and move them at a desired speed to a desired position along the X-axis direction, for example. Further, the rotary movable unit 156 can rotate the vibration cutting unit 140 at a desired speed by a desired angular amount around the vertical turning axis PX parallel to the Y axis. In particular, the vibration cutting unit 140 is placed at its tip by arranging the tip of the vibration cutting unit 140 on the vertical pivot axis PX by appropriately adjusting the fixed position and angle of the vibration cutting unit 140 with respect to the rotary movable unit 156. Can be rotated by a desired angle.

  The vibrator driving device 63 is for supplying electric power to a vibration source built in the vibration cutting unit 140, and the main control device controls the cutting tool 10 at the tip of the vibration cutting unit 140 by a built-in oscillation circuit or PLL circuit. Under the control of 70, it can be vibrated at a desired frequency and amplitude. As described with reference to FIG. 14, the tip of the holder 91 of the vibration cutting unit 140 has a bending vibration perpendicular to the Z-axis direction (that is, a direction along the tool axis AX extending in the cutting depth direction) or an axis along the axis. Directional vibration is possible, and the two-dimensional vibration and the three-dimensional vibration enable fine and efficient machining with the tip of the holder 91, that is, the tip of the cutting tool 10 facing the workpiece W surface.

[Second Embodiment]
The second embodiment will be described below. In the present embodiment, the vibration cutting apparatus 200 of FIG. 15 has a position resolution of the X and Z axes as the feed direction of 1 nm, a rotation axis RA as the main axis, a perpendicular axis along the X and Z axes, and a vertical swivel. The rigidity with the axis PX is very high. The workpiece W, which is a workpiece, was made of a Co-containing superhard material. The machined surface shape formed by the vibration cutting unit 40 is an axisymmetric concave surface used in an optical lens, has an approximate radius of curvature of 1.9 mm, a central radius of curvature of 1.5 mm, and a maximum expected angle (of the machined surface). An extremely small and deep surface having an inclination angle of 65 ° was processed.

  The workpiece W has a finishing process in which a concave surface is processed in advance by a general-purpose processing machine at a position where a processed surface shape is to be formed, and the processed shape and surface roughness are finished with high accuracy by the vibration cutting apparatus 200 of FIG. went. In the cutting tool 10 fixed to the vibration cutting unit 140, the machining tip 30 is formed of single crystal diamond, and the shank 20 is made of silicon nitride using an active metal method to reduce the weight. Bonded with 30 single crystal diamonds. The rake face S1 of the machining tip 30 has a semicircular contour, the arc radius thereof is 0.8 mm, and the first clearance angle α1 of the first clearance surface S2 is 10 °. Here, the opening angle θ1 of the support portion 21 is 30 °, and the opening angle θ2 of the fixing portion 23 is 63 °. In the cutting tool 10, the effective length L from the set screw position to the tool edge is 8.56 mm (x = 5.50 mm, y = 3.06 mm), and the diameter of the opening 23a of the fixing portion 23 ( The screw diameter D was 3 mm.

  In the vibration cutting performed in this embodiment, in order to transmit the high-frequency amplitude to the cutting edge, it is more stable to reduce the cutting edge 30 and the shank 20 and shorten the effective length L from the set screw position to the tool cutting edge. There are experimental results that are easy to control. From the above, it can be seen that the cutting tool 10 is suitable for vibration cutting. In the turning process by the vibration cutting apparatus 200 of FIG. 15, the vibrating body 82 is driven at a frequency of 39 kHz, the amplitude in the cutting direction (ie, the Z-axis direction) is 3 μm, and the amplitude is perpendicular to the cutting direction (ie, the Y-axis direction). Was 2 μm. Moreover, the cutting amount by the cutting tool 10 was 1 μm, the feed speed of the cutting tool 10 was 0.5 mm / min, and the spindle rotation speed was 340 rpm.

  When the workpiece W surface after machining, that is, the machining surface shape, is measured with the Matsushita Electric Industrial Co., Ltd. three-dimensional measuring device UA3P, the PV value corresponding to the machining shape accuracy is 100 nm or less, and the surface roughness measuring device HD3300 manufactured by WYKO When the surface roughness was measured, a good optical mirror surface of Ra 3.4 nm was obtained (see the graph of FIG. 16). Even if it is used as a lens mold for optical surface molding of an imaging system, the mold with such processing accuracy is of a level that causes no problem at all.

  In addition, when the cutting depth by the cutting tool 10 was 3 μm, the cutting tool 10 was pitched, and a processing tool mark having a strong processing surface shape was observed with a microscope.

  From the above results, according to the cutting tool 10 of the example, the length L from the screwing position to the blade tip position is shortened, and weight reduction of the machining tip 30 and the shank 20 is achieved. It is considered that the high-precision machining conditions required for vibration cutting are satisfied. That is, the lens mold having the optical surface molded is processed with high accuracy in a short time. In addition, it tried shaping | molding of a glass mold lens using the lens metal mold | die processed by the present Example this time. As a result, a high-precision glass mold lens according to the high-precision shape of the mold was obtained.

[Third Embodiment]
Hereinafter, a cutting apparatus according to the third embodiment will be described. The cutting apparatus according to the third embodiment is a partial modification of the cutting apparatus according to the first embodiment, and parts not specifically described are the same as those of the apparatus according to the first embodiment. The same reference numerals are assigned and duplicate descriptions are omitted.

  FIG. 17 is a block diagram conceptually illustrating the structure of the cutting device 300 for ruling according to the third embodiment.

  As illustrated, the cutting device 300 includes a cutting unit 40 for cutting a workpiece W that is a workpiece, and an NC drive mechanism 250 that supports the cutting unit 40 with respect to the workpiece W. In addition, illustration is abbreviate | omitted about the drive control apparatus 61 demonstrated in 1st Embodiment shown in FIG. 8, the gas supply apparatus 65, the main control apparatus 70, etc. FIG.

  The NC drive mechanism 250 is a drive device having a structure in which a first stage 252 and a second stage 253 are placed on a pedestal 51 which is a surface plate. Here, the first stage 252 supports a Y stage 257, and the Y stage 257 supports the cutting unit 40 vertically via an arm block, that is, a unit mounting portion 256. The first stage 52 and the Y stage 257 can move the unit mounting portion 256, that is, the tip of the cutting unit 40 to a desired position along the X-axis direction or the Y-axis direction, for example, at a desired speed. On the other hand, the second stage 253 supports the workpiece W via a chuck (not shown). The second stage 253 can move the workpiece W to a desired position along the Z-axis direction, for example, at a desired speed.

[Third embodiment]
The third embodiment will be described below. In the present embodiment, the vibration cutting apparatus 300 in FIG. 17 has a position resolution of 1 nm in the X, Y, and Z axes, which are feed directions. The workpiece W, which is a workpiece, used a STAVAX fee. The processed surface shape formed by the vibration cutting unit 40 is an anamorphic surface having individual curvatures in the X and Y axis directions, and the size is 10 mm × 15 mm.

  For the workpiece W, a corresponding surface was processed in advance by a general-purpose processing machine at a position where a processed surface shape should be formed, and a finishing process was performed by the cutting apparatus 300 of FIG. In the cutting tool 10 fixed to the cutting unit 40, the processing tip 30 is made of high-purity cBN, and the shank 20 is brazed using a cemented carbide to reduce the weight. Of high purity cBN. The rake face S1 of the machining tip 30 has a semicircular contour, the arc radius thereof is 0.5 mm, and the first clearance angle α1 of the first clearance surface S2 is 5 °. Here, the opening angle θ1 of the support portion 21 is 40 °, and the opening angle θ2 of the fixing portion 23 is 60 °. Further, in the cutting tool 10, the effective length L from the set screw position to the tool edge is 8.26 mm (x = 5.2 mm, y = 3.06 mm), and the diameter of the opening 23 a of the fixing portion 23 ( The screw diameter D was 4 mm.

  In the ruling process by the cutting apparatus 300 of FIG. 17, the cutting amount by the cutting tool 10 was 1 μm, the X-axis direction feed speed of the cutting tool 10 was 150 mm / min, and the Z-axis direction feed pitch was 5 μm.

  When the surface of the workpiece W after processing was observed with a high-magnification microscope, it was very good and the processing surface roughness Ra was 10 nm or less (see the photograph in FIG. 18. Horizontal stripes that are traces of processing were not found).

  When the same processing is performed using a conventional cutting tool, that is, a conventional cutting tool having no recesses on the side surfaces 25a and 25b of the shank 20, and a portion corresponding to the support portion 21 is long. The cutting tool 10 was pitched and could not be processed properly.

  FIG. 19 is an enlarged plan view partially showing the rake face S1 at the tip of the processing chip 30 after processing. As is clear from the figure, although tool wear occurred at the tip of the machining tip 30, no pitting occurred, and the wear amount was 32 μm, which was about 1/3 of the conventional one. On the other hand, in the case of a conventional cutting tool, pitching and a large amount of tool wear occur due to insufficient rigidity of the shank 20 and the like, and the arc of the rake face S1 is polished to form a flat straight portion of 100 to 180 μm.

  To summarize the above results, in the cutting tool 10 of the present embodiment, the difference between θ2 and θ1 is large, and the length L from the screwing position to the blade tip position is shortened, and the deflection of the tool due to machining resistance is suppressed. It can be estimated that the blade tip position is stable.

[Fourth Embodiment]
Hereinafter, the cutting device concerning a 4th embodiment is explained. The cutting device according to the fourth embodiment is a partial modification of the cutting device according to the third embodiment. The parts that are not particularly described are common to the device according to the third embodiment. The same reference numerals are assigned and duplicate descriptions are omitted.

  FIG. 20 is a block diagram conceptually illustrating the structure of a cutting device 400 for fly cut processing according to the fourth embodiment.

  As illustrated, the cutting device 400 includes a cutting unit 40 for cutting a workpiece W that is a workpiece, and an NC drive mechanism 350 that supports the cutting unit 40 with respect to the workpiece W.

  The NC drive mechanism 350 is a drive device having a structure in which a first stage 252 and a second stage 253 are placed on a pedestal 51 that is a surface plate. Here, the first stage 252 supports the Y stage 257, and the Y stage 257 rotates the cutting unit 40 around the rotation axis RA1 parallel to the Z axis via the rotation drive unit 355. The first stage 52 and the Y stage 257 can move the rotation driving unit 355 to a desired position along, for example, the X axis direction or the Y axis direction at a desired speed. On the other hand, the second stage 253 supports the workpiece W via a chuck (not shown). The second stage 253 can move the workpiece W to a desired position along the Z-axis direction, for example, at a desired speed.

  Also in the cutting tool 10 of the present embodiment, the difference between θ2 and θ1 is large in the shank 20 (see FIG. 1), and the length L from the screwing position to the blade tip position is shortened, and the deflection of the tool due to machining resistance is suppressed. And the tip position of the blade edge is stabilized.

[Fifth Embodiment]
Hereinafter, the cutting device concerning a 5th embodiment is explained. The cutting device according to the fifth embodiment is obtained by partially changing the cutting device according to the third embodiment. Parts that are not particularly described are the same as those of the device according to the third embodiment. The same reference numerals are assigned and duplicate descriptions are omitted.

  FIG. 21 is a block diagram conceptually illustrating the structure of a milling machining apparatus 500 according to the fifth embodiment.

  As illustrated, the cutting device 500 includes a cutting unit 40 for cutting a workpiece W that is a workpiece, and an NC drive mechanism 450 that supports the cutting unit 40 with respect to the workpiece W.

  The NC drive mechanism 450 is a drive device having a structure in which a first stage 252 and a second stage 253 are placed on a pedestal 51 that is a surface plate. Here, the first stage 252 supports the Y stage 257, and the Y stage 257 rotates the cutting unit 40 around the rotation axis RA2 parallel to the Y axis via the rotation drive unit 455. The first stage 52 and the Y stage 257 can move the rotation driving unit 455 to a desired position along, for example, the X axis direction or the Y axis direction at a desired speed. On the other hand, the second stage 253 supports the workpiece W via a chuck (not shown). The second stage 253 can move the workpiece W to a desired position along the Z-axis direction, for example, at a desired speed.

  Also in the cutting tool 10 of the present embodiment, the difference between θ2 and θ1 is large in the shank 20 (see FIG. 1), and the length L from the screwing position to the blade tip position is shortened, and the deflection of the tool due to machining resistance is suppressed. And the tip position of the blade edge is stabilized.

(A) is a top view of the cutting tool of 1st Embodiment, (b) is a side view of the cutting tool of embodiment. (A), (b) is a figure mainly explaining the modification of a shank among the cutting tools illustrated in FIG. (A), (b) is a figure mainly explaining the modification of a shank among the cutting tools illustrated in FIG. (A), (b) is a figure mainly explaining the modification of a shank among the cutting tools illustrated in FIG. It is an expanded sectional view of the front-end | tip part of the chip | tip for a process. (A), (b) is a top view which respectively shows the modification of the chip | tip for a process. It is sectional drawing explaining the structure of the cutting unit which attached the cutting tool of FIG. It is a block diagram explaining the cutting device of a 1st embodiment. (A), (b) is side sectional drawing of the shaping die formed with the cutting device of FIG. FIG. 10 is a side sectional view of a lens formed by the molding die of FIG. 9. (A) is a figure explaining the state which observed the processing surface shape of the metal mold | die processed using the processing apparatus of an Example microscopically, (b) is the state which observed the processing surface shape of the comparative example under the microscope. It is a figure explaining. It is a graph which shows the result of having measured the processed surface shape of Fig.11 (a) with the surface roughness measuring device. The example which cut using the cutting tool of various shapes is shown. It is sectional drawing explaining the structure of the cutting unit which concerns on 2nd Embodiment. It is a block diagram explaining the cutting device of a 2nd embodiment. It is a graph which shows the result of having measured the processing surface shape of the metal mold | die processed using the processing apparatus of an Example with the surface roughness measuring device. It is a block diagram explaining the cutting device of a 3rd embodiment. It is a figure explaining the state which observed the processing surface shape of the metal mold | die processed using the processing apparatus of an Example under a microscope. It is an enlarged plan view which shows partially the rake face of the tip of the processing chip after processing. It is a block diagram explaining the cutting device of a 4th embodiment. It is a block diagram explaining the cutting device of a 5th embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Cutting tool, 20 ... Shank, 21 ... Supporting part, 23 ... Fixing part, 30 ... Chip for processing, 40 ... Cutting unit, 50 ... Drive mechanism, 52 ... First stage, 53 ... Second stage, 61 ... Drive Control device, 65 ... Gas supply device, 70 ... Main control device, W ... Workpiece

Claims (11)

Processing chips,
A shank having a support portion that supports the processing chip and a fixing portion that is fixed to a tip of a holder, and a recess provided on a side surface of a tapered portion that extends from the support portion to the fixing portion,
The processing chip is formed by either the diamond and high-purity cBN, than said recess is disposed on the distal end side, have a shape along the shank at the base side,
The tapered portion is a plate-like body having a flat upper and lower surface and a tapered side surface, and the fixing portion includes an opening for fixing,
The length in the axial direction of the support portion is x, the length from the center of the opening to the end on the support portion side in the axial direction of the fixing portion is y, and the opening diameter of the opening in the fixing portion is D. If
D / 2 <y <x
Cutting tool that meets the requirements of The cutting tool according to claim 1 , wherein the tapered portion includes the support portion and a portion on the support portion side from the center of the opening in the fixed portion. When the opening angle of the side surface of the support portion is θ1, and the opening angle of the side surface of the fixing portion is θ2,
θ1 <θ2 <90 °
The cutting tool according to claim 1 , which satisfies the following condition. θ1 <θ2-10 °
The cutting tool of Claim 3 which satisfy | fills these conditions. θ1 <θ2-20 °
The cutting tool of Claim 3 which satisfy | fills these conditions. The cutting tool according to any one of claims 1 to 5 , wherein the shank is formed of any one of cemented carbide and cemented carbide. The cutting tool according to any one of claims 1 to 5 , wherein the shank is formed of any one of silicon carbide, invar material, stainless invar material, alumina, silicon nitride, sialon, steel, and zirconia. The cutting tool according to any one of claims 1 to 7 ,
A vibration source for vibrating the cutting tool;
A processing apparatus comprising: a vibration body that holds the cutting tool at a tip portion and transmits vibration from the vibration source to the cutting tool. The cutting tool according to any one of claims 1 to 7 ,
A processing apparatus comprising: a driving device that drives the cutting tool. The processing device according to claim 9 , wherein the driving device performs an operation that enables any one of turning processing, ruling processing, fly-cut processing, and milling processing. A cutting method using a cutting tool including a shank for fixing a processing tip to a tip,
The processing tip is formed of one of diamond and high-purity cBN, and has a tapered side surface extending from a support portion of the shank supporting the processing tip to a fixing portion fixed to the tip of the holder. It is arranged on the tip side from the concave portion provided in, and has a shape along the shank on the root side,
Avoid the interference with the workpiece by the recess provided in the shank ,
The tapered portion is a plate-like body having a flat upper and lower surface and a tapered side surface, and the fixing portion includes an opening for fixing,
The cutting tool is configured such that the axial length of the support portion is x, the length from the center of the opening to the end portion on the support portion side in the axial direction of the fixing portion is y, and the opening of the fixing portion is open. When the opening diameter is D,
D / 2 <y <x
A cutting method characterized by satisfying the following condition .

Images