JP4899089B2 - Atmosphere analyzer and atmosphere analysis method - Google Patents

Description

  The present invention relates to an atmosphere analysis apparatus suitable for analyzing, for example, an atmosphere in a container used for storage and transportation of a semiconductor wafer in real time, and identifying contaminants in the atmosphere, and an atmosphere analysis method using the apparatus. .

  At present, in the semiconductor related field, for example, a container called a mini-environment (SMIF, FOUP) is used for storing and transporting a semiconductor wafer, but the container is a small and almost sealed container. When gas contaminants generated inside are adsorbed on a wafer and used for manufacturing a semiconductor device, problems such as a decrease in manufacturing yield or a decrease in product reliability occur.

  Therefore, it is important to manage the cleanliness of the atmosphere in the mini-environment, but since the mini-environment is a container that can be almost sealed, measuring the atmosphere inside Have difficulty.

  2. Description of the Related Art Conventionally, a so-called QCM (quartz crystal microbalance) mainly including a quartz resonator is known as a highly sensitive and small atmosphere sensor (see, for example, Patent Document 1).

  Therefore, it is thought that it would be effective to use this QCM for atmosphere analysis in the mini-environment. However, in the case of adopting the configuration as described above, the sensor installed in the mini-environment and the control circuit installed outside are used. They must be connected with cables.

  Therefore, the mini-environment must be processed such as making a hole through which the cable passes, and it is difficult to apply the mini-environment to a mini-environment used in a factory production line.

Moreover, since QCM is highly sensitive, it can function well in order to perform atmospheric analysis in real time, but it cannot identify the type of contaminant, that is, qualitative analysis.
JP 2002-333394 A

  In the present invention, for example, a sensor installed in a container such as a mini-environment and an external control circuit can be connected to the container without any processing, and contaminants in the container can be identified. Make it possible to obtain materials easily.

  In the atmosphere analysis device and the atmosphere analysis method according to the present invention, a sensor device including a QCM as a sensor, and a container which is led out from the sensor device and installed in the container through the existing gap Atmosphere analyzer including a flexible flat cable having a length necessary for taking out, a cable connecting the flexible flat cable taken out of the container and the control circuit, and the atmosphere analyzer It is fundamental to analyze the atmosphere in the container using the.

  By adopting the above means, it is possible to detect the change in the concentration of contaminants in the container such as mini-environment with high sensitivity and in real time, and QCM which is a sensor installed in the container. Since it is not necessary to process the container to connect to an external control circuit, it can be easily set in many containers to perform atmosphere analysis. In addition, since the contaminants in the container can be identified by qualitative analysis, it is possible to quickly take countermeasures against the contaminants, and to acquire materials for qualitative analysis of the contaminants. Since the plate with a thin metal film has a structure that can be easily attached to and detached from the sensor, its installation is easy.

  FIGS. 1A and 1B are explanatory views of the main part showing the configuration of the sensor and the vicinity, wherein FIG. 1A shows the upper surface of the main part and FIG.

  In the figure, 1 is an oscillation circuit board, 2 is a sensor (QCM) mainly composed of a crystal unit, 3 is a spacer for protecting the sensor, 4 is a flexible flat cable, 5 is a connector, and 6 is a coaxial cable. ing.

  As is apparent from the above description, in the atmosphere analyzer according to the present invention, the flexible flat cable 4 and the coaxial cable 6 having a required length are used as signal lines for connecting the sensor 2 and the control circuit via the oscillation circuit board 1. Is used. Here, the required length of the flexible flat cable 4 means that when the sensor device including the sensor 2 and the oscillation circuit board 1 is installed in a container such as a mini-environment and a signal is taken out of the container, the signal line passes through the container. It means the length necessary to do.

  FIG. 2 is an explanatory diagram of the main part showing a state where the sensor device is installed in a container that is a mini-environment, and the parts indicated by the same symbols as those used in FIG. 1 represent the same or equivalent parts. And

  In the figure, 11 is a sensor device including an oscillation circuit board 1 and a sensor 2, 12 is a container body, and 13 is a container bottom.

  As is apparent from the figure, a flexible flat cable 4 is interposed between the coaxial cable 6 connected to the control circuit and the sensor device 11, and the flexible flat cable 4 is connected between the container body 12 and the container bottom 13. It plays the role of easily passing and connecting the inside and outside.

  In this way, the sensor device 11 can be installed in the container and the flexible flat cable 4 can be led out of the container without any processing on the container itself, and the flexible flat cable 4 is thin. Therefore, it does not affect the sealing property of the container.

  By the way, although the sensor 2 made of QCM has high sensitivity, it is impossible to identify the type of contaminant, that is, to perform qualitative analysis. Therefore, in the atmospheric analyzer according to the present invention, the contaminant in the container is adsorbed on the metal thin film, and the adsorbed contaminant is subjected to XPS (X-ray photoelectron spectroscopy) or SIMS (secondary ion mass spectrometry). It can be identified by physical analysis.

  In order to identify contaminants, a silicon wafer on which a metal thin film is formed is placed in a container in the same manner as the sensor device 11, the contaminant is adsorbed on the metal thin film, and after the exposure is completed, it is taken out of the container. The contaminants are analyzed using XPS or SIMS.

  In the quartz crystal constituting the sensor 2 made of QCM, it is possible to analyze the contaminants on the surface, but since the quartz crystal does not control the cleanliness of the surface at the time of manufacture, the mini-environment It may be contaminated before being exposed to a container such as, and is not suitable for use as a sample for analysis.

  In that respect, it is preferable to form a metal thin film for surface analysis by sputtering or the like because a clean metal thin film surface can be prepared. In addition, as a reference for making a standard, a sample that is not exposed to the atmosphere can be prepared, so that it is more desirable as an analysis means.

  In order to install the silicon wafer with the metal thin film in a container such as a mini-environment together with the sensor device 11, some holding mechanism is required, but the silicon wafer is placed in the vicinity of the sensor device 11, And it is desirable that it is the structure which can be easily attached or detached.

  FIG. 3 is a main part explanatory view showing a holding mechanism suitable for setting a silicon wafer with a metal thin film in the vicinity of the sensor device. In the figure, 1 is an oscillation circuit board, 14 is a holding mechanism, and 14A is a holding mechanism. 14B is a wide U-shaped plate, 14C is a groove formed by laminating a narrow U-shaped plate and a wide U-shaped plate, respectively. Yes.

  According to the holding mechanism of the silicon wafer with the metal thin film shown in FIG. 3, a holding mechanism 14 is provided which can previously attach the silicon wafer to the oscillation circuit substrate 1 in the sensor device 11. Since the removal is only required to slide the wafer in the groove 14C formed in the holding mechanism 14, the operation is easy.

It is principal part explanatory drawing showing the structure of a sensor and the vicinity. It is principal part explanatory drawing showing the state which installed the sensor apparatus in the container which is a mini environment. It is principal part explanatory drawing showing the holding mechanism suitable for setting the silicon wafer with a metal thin film to the sensor apparatus vicinity.

Explanation of symbols

1 Oscillation circuit board 2 Sensor mainly composed of quartz crystal (QCM)
DESCRIPTION OF SYMBOLS 3 Spacer which protects a sensor 4 Flexible flat cable 5 Connector 6 Coaxial cable 11 Sensor apparatus including the oscillation circuit board 1 and the sensor 2 12 Container body 13 Container bottom 14 Wafer holding mechanism 14A Narrow U-shaped plate 14B Wide Shaped plate 14C Groove

Claims (3)

A sensor device including a QCM as a sensor;
A container in which a main body is fitted to a bottom portion where the sensor device is installed, and a gap is generated between an outer side surface of the bottom portion and an inner side surface of the main body;
A flexible flat cable that has been removed to the container out through the gap of the container from the sensor is derived from the device and the sensor device is installed with the vessel,
An atmosphere analyzer comprising a flexible flat cable taken out of the container and a coaxial cable connecting the control circuit. A silicon wafer with a metal thin film was installed in the vicinity of the sensor device, and the silicon wafer was produced by laminating a narrow U-shaped plate on the lower side and a wide U-shaped plate on the upper side. The atmosphere analyzer according to claim 1, wherein the atmosphere analyzer is held by a groove . In the case of analyzing the contaminant in the container using the atmosphere analyzer according to claim 2,
Integrating the qualitative information of the pollutant obtained based on the analysis of the pollutant adsorbed on the metal thin film on the silicon wafer and the change over time of the pollutant concentration determined based on the measured value of the sensor device. To judge
An atmosphere analysis method characterized by

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