JP4894511B2 - Filament lamp and light irradiation type heating device - Google Patents

Description

  The present invention relates to a filament lamp and a light irradiation type heating device, and more particularly to an industrial heating device, for example, a filament lamp and a light irradiation type heating device used for heat treatment of a semiconductor.

In various processes such as film formation, oxidation, impurity diffusion, nitridation, film stabilization, silicidation, crystallization, and ion implantation activation in semiconductor manufacturing processes, heat treatment is used. For example, rapid heat treatment (hereinafter also referred to as “RTP: Rapid Thermal Processing”) that rapidly raises or lowers the temperature of an object to be processed such as a semiconductor wafer can improve yield and quality. Are preferably used.
As a heat treatment apparatus used in RTP, for example, the object to be treated is heated without being contacted by light irradiation from a light source such as an incandescent lamp in which a filament is disposed inside an arc tube made of a light transmissive material. A light irradiation type heat treatment apparatus that can do this is widely used.

According to such a light irradiation type heat treatment apparatus, for example, the temperature of the object to be processed can be raised to a temperature of 1000 ° C. or more in a few seconds to a dozen seconds and the light irradiation is stopped. Thus, the object to be processed can be rapidly cooled (cooled down).
For example, when RTP of a semiconductor wafer is performed using such a light irradiation type heat treatment apparatus, when the semiconductor wafer is heated to 1050 ° or more and the temperature distribution of the semiconductor wafer becomes non-uniform, The phenomenon called “slip” on the wafer, that is, defects in crystal transition may occur, resulting in a defective product. Therefore, heating, holding at a high temperature, and cooling are performed so that the temperature distribution on the entire surface of the semiconductor wafer is uniform. Is needed. That is, in RTP, high-precision temperature uniformity of the workpiece is required.

  As a conventional light irradiation type heating apparatus used for such heat treatment, there is known an apparatus using a plurality of double-end type halogen lamps which are composed of long straight tube bulbs and are fed from both ends thereof. As such an apparatus, for example, Japanese Patent Laid-Open No. 10-241844 is known. According to the publication, it is described that a large area can be irradiated with light by arranging a plurality of long straight tubular double-end type halogen lamps in parallel. In addition, it is described that a reflection mirror is attached to each halogen lamp over an angle of at least 180 degrees in a lamp cross section perpendicular to the lamp tube axis direction.

  However, in the apparatus described in the above publication, since the reflecting mirror is arranged for each filament lamp, the distance between the filament lamps becomes large, and the uniformity of light on the irradiated surface is insufficient. There was a problem of becoming. In addition, since the filament lamps cannot be brought close to each other because of the reflecting mirrors arranged for each filament lamp, the input energy per unit area on the heated object side cannot be sufficiently obtained, and there is a limit to improving the heating rate. There was a problem that the market demands could not be fully met.

  On the other hand, according to the light irradiation type heating device disclosed in JP-A-6-283503, it has a heating lamp mechanism in which a plurality of filament lamps are arranged on a planar reflecting mirror, and the heating mechanism itself is made parallel. The silicon wafer is uniformly heated by moving or rotating. According to the publication, since the filament lamps are arranged on the plane reflecting mirror, the radiated light from each filament lamp interferes, the light distribution on the irradiation surface is made uniform, and the filament lamp is arranged. By translating or rotating the heating lamp mechanism, it is possible to further increase the uniformity of light applied to the wafer that is the object to be heated.

  FIG. 8 is a diagram showing a schematic configuration of a conventional light irradiation type heating apparatus. The light irradiation type heating apparatus shown in the figure is a light irradiation type heating apparatus 301 for heating a semiconductor substrate, and is cut by a plane orthogonal to the tube axis direction of the filament lamp 302 disposed in the light irradiation type heating apparatus 301. It is sectional drawing. A plurality of straight tube type filament lamps 302 are arranged in parallel in the light irradiation type heating device 301, and a flat reflecting mirror 303 is provided for reflecting the light emitted from the filament lamps 302 toward the semiconductor wafer 312 which is an object to be heated. In addition, a heating mechanism unit 304 including a plane reflecting mirror 303 and a filament lamp 302 is connected to a drive mechanism 306 via a connecting rod 305, and the heating mechanism 304 can be rotated. The semiconductor wafer 312 that emits light emitted from the filament lamp 302 is placed on a substrate support mechanism 307 made of quartz glass, and the semiconductor wafer 312 and the substrate support mechanism 307 are disposed in a heat treatment container 308. Yes. The heat treatment vessel 308 is provided with an atmospheric gas introduction hole 309, an exhaust mechanism 310, and a temperature measuring mechanism 311. Before heat-treating the semiconductor wafer 312 introduced into the heat treatment container 308, air in the heat treatment container 308 is exhausted by the exhaust mechanism 310, and atmospheric gas is introduced from the atmospheric gas introduction hole 309 as necessary. In addition, the semiconductor wafer 312 is heated by the filament lamp 302 disposed in the heating mechanism unit 304. In order to measure the temperature at the time of heating, a temperature measuring mechanism 311 is provided in the heat treatment container 308 to measure the temperature of the semiconductor wafer 312.

  The problem of such a light irradiation type heating device according to the prior art is that the arrangement interval of a plurality of filament lamps arranged in parallel is increased in order to heat the entire semiconductor wafer evenly in a state where the heating rate is increased. The illuminance on the light irradiation surface of the semiconductor wafer was averaged with high accuracy by shortening.

JP-A-10-241844 JP-A-6-283503 JP 2006-279008 A

In order to enable more accurate temperature control over the entire surface of the semiconductor wafer, the applicant of the present application previously described, as disclosed in Japanese Patent Application Laid-Open No. 2006-279008, a plurality of filaments are arranged inside the arc tube. The filament lamps are arranged side by side in the direction and can supply and control electricity independently to each filament, and a plurality of filament lamps are arranged as appropriate to accurately distribute the temperature distribution of the semiconductor wafer. A light irradiation type heating apparatus that can be made uniform and can control only the irradiance with respect to a narrow specific region has been proposed.
A light irradiation type heating apparatus using such a filament lamp has a high degree of soaking and excellent temperature controllability in semiconductor heat treatment. That is, when a semiconductor wafer is heated using this filament lamp, the temperature can be controlled with high irradiation accuracy by increasing the number of filaments in the filament lamp.

  However, in order to ensure a high rate of temperature increase when the semiconductor wafer is heated, it is necessary to arrange the filament lamps closer to each other. On the other hand, a plurality of external lead wires are led out from the end of the filament lamp, and lead wires are connected to each of them, and power is individually supplied to each lead wire. That is, a plurality of lead wires are provided from the end of one filament lamp, and the lead wires are arranged side by side as many as the number of filament lamps, and a considerable number of lead wires are provided in the entire heating device. If these lead wires are individually fixed using, for example, a terminal block, not only the work is complicated, but also a very large space is required for the terminal block, and the apparatus becomes large. There is. In addition, when using a multi-pole socket as used in a conventional vacuum tube, the outer diameter of the socket is larger than the outer diameter of the arc tube of the lamp, so that the interference of the socket occurs between adjacent filament lamps. The arrangement interval (pitch) of the filament lamps cannot be made narrower than the diameter, and a large installation space is required for the socket.

  In view of the above problems, an object of the present invention is to arrange a filament lamp more closely by efficiently wiring a plurality of lead wires connected to an external lead led out from the end of the filament lamp. An object of the present invention is to provide a light irradiation type heating device that enables the above.

The present invention employs the following means in order to solve the above problems.
The first means includes a plurality of filaments sequentially arranged along the tube axis direction of the arc tube, and a plurality of filament bodies each having a lead connected to each of the plurality of filaments and individually supplying power. A plurality of conductive members electrically connected to each of the leads; a sealing portion provided with the plurality of conductive members disposed at an end of the arc tube; and the plurality of conductive members. In a filament lamp comprising an external lead electrically connected to each of the plurality of external leads, the power supply connector electrically connected to each of the plurality of external leads and the power supply connector at predetermined intervals in the longitudinal direction of the plug housing A filament lamp characterized by comprising a plug comprising a plug housing that is held so as to be sequentially arranged in parallel.
The second means includes a plurality of filament bodies sequentially arranged along the tube axis direction of the arc tube, and a plurality of filament bodies each having a lead connected to each of the plurality of filaments and individually supplying power. A plurality of conductive members electrically connected to each of the leads; a sealing portion provided with the plurality of conductive members disposed at an end of the arc tube; and the plurality of conductive members. A light irradiation type heating apparatus, comprising: a lamp unit in which a plurality of filament lamps each having an external lead electrically connected to each other are arranged in parallel; and a power supply unit that individually supplies power to the plurality of filament bodies. In the filament lamp, a plurality of first power supply connectors electrically connected to each of the plurality of external leads and the plurality of first power supply connectors are sequentially arranged in parallel at predetermined intervals. The power supply unit includes a plurality of second power supply connectors respectively connected to the plurality of first power supply connectors for holding the plugs, and the plurality of first power supply connectors. A receptacle housing comprising a receptacle housing for holding the two power supply connectors so as to be sequentially arranged in parallel at a predetermined interval so as to correspond to the arrangement interval of the plurality of first power supply connectors, When the receptacle is connected to form an integrated connector, the first power supply connector and the second power supply connector to be connected are sequentially arranged in parallel on the same vertical plane including the tube axis of the arc tube. The light irradiation type heating device is characterized in that an integral connector is disposed.
A third means is the light irradiation type according to the second means, wherein each of the integrated connectors is arranged in parallel corresponding to a plurality of filament lamps arranged in parallel in the lamp unit. It is a heating device.
According to a fourth means, in the second means or the third means, the plug and the receptacle are each provided with an erroneous connection preventing mechanism so that the predetermined plug is connected only to the predetermined receptacle. A light irradiation type heating device.

According to the first aspect of the present invention, the distance between the filament lamps can be made close, and heating of the semiconductor wafer or the like can be performed with high accuracy and a high heating rate. In addition, since the lead wires drawn out from the filament lamps are sequentially connected to the power supply connector held in the connector housing, the operation at the time of connection is not complicated, and the filament lamps can be exchanged smoothly.
According to the second aspect of the present invention, the distances between the filament lamps arranged in parallel can be close to each other, and heating of the semiconductor wafer or the like can be performed with high accuracy and a high heating rate. In addition, since the lead wires drawn out from the filament lamps are sequentially connected to the power supply connector held in the connector housing, the operation at the time of connection is not complicated, and the filament lamps can be exchanged smoothly.
According to the third aspect of the present invention, the gap can be provided between the connector housings arranged in parallel, and the cooling air can flow through the gap, so that the connector housing can be easily cooled. As a result, contact failure occurs due to the contact portion of the power supply connector becoming hot and being oxidized, so that problems such as overheating of the connector and inability to properly supply power supplied to the filament lamp can be solved.
According to the fourth aspect of the present invention, the predetermined plug can be reliably and mechanically attached to the predetermined receptacle in a short time, and erroneous connection can be reliably prevented.

Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
FIG.1 and FIG.2 is a figure for demonstrating the light irradiation type heating apparatus carrying the filament lamp 1 which concerns on this invention.
FIG. 1 is a cross-sectional view showing the configuration of the light irradiation type heating apparatus of the present invention, and FIG. 2 is a cross-sectional view of the light irradiation type heating apparatus shown in FIG. For ease of understanding, some of the components shown in FIG. 1 are omitted in FIG.
As shown in FIGS. 1 and 2, the light irradiation type heating apparatus 100 includes a chamber 6. The interior of the chamber 6 is divided into a lamp unit accommodation space S1 and a heat treatment space S2 by a quartz window portion 2 that is a light transmissive window member. By irradiating the work 4 (for example, a semiconductor wafer) disposed in the heat treatment space S2 with the light emitted from the lamp unit 3 housed in the lamp unit housing space S1 through the quartz window portion 2, the work 4 The heat treatment is performed.

  As shown in FIG. 2, the lamp unit 3 housed in the lamp unit housing space S1 has, for example, a configuration in which 11 filament lamps 1 are arranged in parallel at a predetermined interval. In each filament lamp 1 of the lamp unit 3, a plurality of filaments are sequentially arranged on the tube axis of the arc tube. For example, FIG. 1 schematically shows seven filaments. By individually controlling the power supplied to each of these filaments, the light intensity distribution on the workpiece 4 can be set arbitrarily and with high accuracy.

A reflecting mirror 5 is disposed above the lamp unit 3. The reflecting mirror 5 reflects the light irradiated upward from the lamp unit 3 to the workpiece 4 side. That is, in the light irradiation type heating apparatus 100, the light emitted from the lamp unit 3 is directly or directly reflected by the reflecting mirror 5 and is irradiated onto the work 4.
The light irradiation type heating apparatus 100 is set so that the distance between the lamp unit 3 and the workpiece 4 is as short as possible in order to increase the temperature rising rate of the workpiece during heating.

  Cooling air from the cooling air unit 8 is introduced into the lamp unit housing space S1 from the outlets 82a, 82b, 82c of the cooling air supply nozzles 81a, 81b, 81c provided in the chamber 6.

The cooling air supply nozzle 81 a is provided so that the cooling air from the outlet 82 a is blown to the filament lamp 1. That is, the cooling air introduced into the lamp unit accommodation space S1 via the cooling air supply nozzle 81a is blown to each filament lamp 1 in the lamp unit 3 to cool the arc tube 11 constituting each filament lamp 1. Here, the sealing portions 12a and 12b of each filament lamp 1 have lower heat resistance than other portions. Therefore, the outlet 82a of the cooling air supply nozzle 81a is arranged to face the sealing portions 12a and 12b of each filament lamp 1, and is configured to preferentially cool the sealing portions 12a and 12b of each filament lamp 1. It is desirable to do. The cooling air blown to each filament lamp 1 and heated to a high temperature by heat exchange is discharged from a cooling air discharge port 83 a provided in the chamber 6 and connected to the gas exhaust unit 810. The flow of the cooling air is considered so that the cooling air heated to a high temperature by heat exchange does not heat each filament lamp 1.
In addition, the cooling air is set so that the reflecting mirror 5 is also cooled at the same time. When the reflecting mirror 5 is cooled by a water cooling mechanism (not shown), it is not always necessary to set the wind flow so that the reflecting mirror 5 is also cooled.

The cooling air supply nozzle 81b has a receptacle R1 in which the cooling air from the outlet 82b is electrically connected to the power supply unit 28 and plugs P1, P2 electrically connected to the plurality of filaments in each filament lamp 1. It is provided so as to be blown against the portion where R2 is connected.
As a result, it is possible to suppress an increase in temperature when the plugs P1 and P2 and the receptacles R1 and R2 (hereinafter, collectively referred to as connectors) are energized.

By the way, when the workpiece 4 is heated, heat storage in the quartz window portion 2 is generated by radiant heat from the workpiece 4 to be heated. And the workpiece | work 4 may receive an undesired heating effect by the heat ray radiated | emitted secondaryly from the quartz window part 2 which stored heat.
In this case, the temperature in the workpiece 4 is caused by redundancy of temperature controllability of the workpiece (for example, overshoot in which the temperature of the workpiece is higher than the set temperature) and temperature variation of the quartz window 2 itself that stores heat. Problems such as reduced uniformity occur. In addition, it is difficult to improve the temperature lowering speed of the work 4.
Therefore, in order to suppress these problems, the air outlet 82c of the cooling air supply nozzle 81c is provided in the vicinity of the quartz window portion 2, and the quartz window portion 2 is cooled by the cooling air from the cooling air unit 8. Is desirable.

  On the other hand, the heat treatment space S2 is provided with a treatment table on which the workpiece 4 is fixed. For example, when the workpiece 4 is a semiconductor wafer (silicon wafer), the processing table is made of a refractory metal material such as molybdenum, tungsten, or tantalum, a ceramic material such as silicon carbide (SiC), or quartz, silicon (Si). It is preferable that the guard ring 10 has a structure in which a stepped portion for supporting the workpiece 4 (semiconductor wafer) is formed on the inner periphery of the circular opening. .

  The workpiece 4 (semiconductor wafer) is disposed so as to be fitted into the circular opening of the annular guard ring 10 and is supported by the stepped portion. The guard ring 10 itself becomes a high temperature due to light irradiation and supplementarily radiates and heats the outer peripheral edge of the workpiece 4 (semiconductor wafer) facing each other to compensate for thermal radiation from the outer peripheral edge of the semiconductor wafer. Thereby, the temperature fall of the peripheral part of the workpiece | work 4 (semiconductor wafer) resulting from the thermal radiation etc. from the outer periphery of the workpiece | work 4 (semiconductor wafer) is suppressed.

  On the back side of the light irradiation surface of the workpiece 4 (semiconductor wafer) installed on the guard ring 10, a temperature measurement unit 91 is provided in contact with or close to the workpiece 4 (semiconductor wafer). The temperature measuring unit 91 is for monitoring the temperature distribution of the workpiece 4 (semiconductor wafer), and the number and arrangement are set according to the dimensions of the workpiece 4 (semiconductor wafer). For example, a thermocouple or an optical fiber type non-contact thermometer is used for the temperature measuring unit 91. The temperature information monitored by the temperature measuring unit 91 is sent to the thermometer 9. The thermometer 9 calculates the temperature at the measurement point of each temperature measurement unit 91 based on the temperature information sent from each temperature measurement unit 91.

Depending on the type of heat treatment, a process gas unit 800 for introducing process gas and purge gas may be connected to the heat treatment space S2. For example, when a thermal oxidation process is performed, a process gas unit 800 that introduces oxygen gas into the heat treatment space S2 or purge gas (for example, nitrogen gas) when purging the heat treatment space S2 is connected to the heat treatment space S2. . These gases are introduced into the heat treatment space S <b> 2 from the outlet 85 of the process gas supply nozzle 84 connected to the process gas unit 800 provided in the chamber 6.
The process gas and purge gas described above are exhausted from a gas exhaust port 83 b connected to a gas exhaust unit 810 provided in the chamber 6.

  In the light irradiation type heating device of the present invention, in each filament lamp 1 constituting the lamp unit 3, the filament inside the arc tube 11 is divided into a plurality of pieces, and each filament can be fed independently. Therefore, it becomes possible to group the filaments into predetermined zones and individually adjust the power supplied to the filaments. That is, since the light intensity distribution can be set with high accuracy in the two-dimensional direction on the workpiece 4, it is not necessary to rotate the workpiece 4 (semiconductor wafer) during light irradiation.

FIG. 3 is a perspective view showing an example of the filament lamp 1 shown in FIGS. 1 and 2.
As shown in the figure, the filament lamp 1 includes an arc tube 11 made of a light transmissive material such as quartz glass, and a halogen gas is sealed inside the arc tube 11. Sealing portions 12a and 12b at both ends of the arc tube 11 are pinch-sealed with, for example, metal foils 13a, 13b, 13c and 13d, 13e, and 13f, and the inside is kept airtight.

  Inside the arc tube 11, filament bodies 14, 15, 16 are installed. The filament body 14 is configured by connecting a lead 14a, a filament 14b, and a lead 14c in this order from the left side of the figure. The filament body 15 is configured by connecting a lead 15a, a filament 15b, and a lead 15c in this order from the left side of the drawing. Furthermore, the filament body 16 is configured by connecting a lead 16a, a filament 16b, and a lead 16c in order from the left side of the figure.

  The filaments 14b, 15b, and 16b are formed in a coil shape and emit light when electric power is supplied. On the other hand, the leads 14a and 14c are power supply lines for supplying power to the filament 14b. Similarly, the leads 15a and 15c are power supply lines for supplying power to the filament 15b, and the leads 16a and 16c are power supply lines for supplying power to the filament 16b.

  In the filament body 14, the hook-shaped portion of the lead 14a is positioned by the support member 19a, and the movement of the lamp shaft in the circumferential direction is restricted. Further, the flange portion of the lead 14c is positioned by the support member 19b, and the movement of the lamp shaft in the circumferential direction is restricted. On the other hand, the filament 14b is connected by welding or the like to the approximate center position of the flanges of the leads 14a and 14c. The connecting operation is performed before the filament body 14 is inserted into the arc tube 11. Therefore, the filament 14b and the leads 14a and 14c can be connected relatively easily and with high accuracy. That is, when the leads 14a and 14c are positioned by the support members 19a and 19b, the filament 14b can be arranged at a desired position with high accuracy. As a result, the filament 14b is positioned at a desired position by the support members 19a and 19b and does not move in the circumferential direction of the lamp shaft.

  Similarly, in the filament body 15, the hook portion of the lead 15a is positioned by the support member 19b, and the movement of the lamp shaft in the circumferential direction is restricted. Further, the flange portion of the lead 15c is positioned by the support member 19c, and the movement of the lamp shaft in the circumferential direction is restricted. On the other hand, the filament 15b is connected by welding or the like to the approximate center position of the flanges of the leads 15a and 15c. The connecting operation is performed before the filament body 15 is inserted into the arc tube 11. Therefore, the filament 15b and the leads 15a and 15c can be connected relatively easily and with high accuracy. That is, when the leads 15a and 15c are positioned by the support members 19b and 19c, the filament 15b can be arranged at a desired position with high accuracy. As a result, the filament 15b is positioned at a desired position by the support members 19b and 19c and does not move in the circumferential direction of the lamp shaft.

  Similarly, in the filament body 16, the hook portion of the lead 16a is positioned by the support member 19c, and the movement of the lamp shaft in the circumferential direction is restricted. Further, the hook-shaped portion of the lead 16c is positioned by the support member 19d, and the movement of the lamp shaft in the circumferential direction is restricted. On the other hand, the filament 16b is connected to the approximate center position of the hook-shaped portions of the leads 16a and 16c by welding or the like. The connecting operation is performed before the filament body 16 is inserted into the arc tube 11. Therefore, the filament 16b and the leads 16a and 16c can be connected relatively easily and with high accuracy. That is, when the leads 16a and 16c are positioned by the support members 19c and 19d, the filament 16b can be arranged at a desired position with high accuracy. As a result, the filament 16b is positioned at a desired position by the support members 19c and 19d and does not move in the circumferential direction of the lamp shaft.

  As described above, by using the support members 19a, 19b, 19c, and 19d, the filaments 14b, 15b, and 16b can be positioned in a desired position, for example, on substantially the same axis in the arc tube 11, and the lamp shaft It is possible not to move in the circumferential direction.

  In the support members 19a, 19b, 19c, and 19d, a part of the notch that does not contribute to the positioning of the lead-like portion of the lead functions as a passage for other leads. That is, of the notch portions that are the positioning portions of the support member 19a, two notch portions function as positioning of the leads 14a, and the remaining notch portions function as passing portions of the leads 15a and 16a. Of the cutout portions that are the positioning portions of the support member 19b, two cutout portions function as positioning of the lead 14c, and the other two cutout portions function as positioning of the lead 15a, and the remaining cutout portions. The notched portion functions as a passage portion for the lead 16a. Of the cutout portions that are positioning portions of the support member 19c, two cutout portions function as positioning of the lead 15c, and the other two cutout portions function as positioning of the lead 16a, and the remaining cutout portions. The notched portion functions as a passage portion for the lead 14c. Further, two of the cutout portions that are the positioning portions of the support member 19d function as positioning of the leads 16c, and the remaining cutout portions function as passing portions of the leads 14c and 15c. .

  The lead of each filament body is surrounded by an insulating tube made of quartz or the like (not shown) outside the portion facing the filament of the other filament body. That is, since the filament 14b of the filament body 14 faces the lead 15a of the filament body 15 and the lead 16a of the filament body 16, the leads 15a and 16a are surrounded by an insulating tube (not shown) on the outer side facing the filament 14b. Is done. The reason why the insulating tube is provided in this way is to reliably prevent the anchor 17 attached to the filament 14b and the leads 15a and 16a from coming into contact with each other and being electrically short-circuited. Further, since the filament 15b of the filament body 15 faces the lead 14c of the filament body 14 and the lead 16a of the filament body 16, the leads 14c and 16a are surrounded by an insulating tube (not shown) on the outer side facing the filament 15b. Is done. With such a configuration, it is possible to reliably prevent the anchor 17 attached to the filament 15b and the leads 14c and 16a from coming into contact with each other and being electrically short-circuited. Further, since the filament 16b of the filament body 16 faces the lead 14c of the filament body 14 and the lead 15c of the filament body 15, the leads 14c and 15c are surrounded by an insulating tube (not shown) on the outer side facing the filament 16b. Is done. By configuring in this way, it is possible to reliably prevent the anchor 17 attached to the filament 16b and the leads 14c and 15c from coming into contact with each other and being electrically short-circuited.

  In addition, the filament lamp 1 is connected to one end of a conductive member composed of an internal lead and an external lead made of a tungsten rod or the like having both ends of each filament body disposed in a sealing portion and a metal foil such as molybdenum. Is done. That is, with respect to the filament body 14, the ends of the lead 14a and the lead 14c opposite to the hook-shaped portions are connected to the internal lead 18d of the sealing portion 12a and the internal lead 18g of the sealing portion 12b, respectively. Similarly, with respect to the filament body 15, the ends of the lead 15a and the lead 15c on the side opposite to the hook-shaped portion are connected to the internal lead 18f of the sealing portion 12a and the internal lead 18i of the sealing portion 12b, respectively. Similarly, with respect to the filament body 16, the ends of the lead 16a and the lead 16c on the side opposite to the hook-shaped portion are connected to the internal lead 18e of the sealing portion 12a and the internal lead 18h of the sealing portion 12b, respectively.

  3 shows an example in which the filament lamp 1 uses three filament bodies 14, 15, 16; however, the present invention is not limited to this, and it is also possible to use four or more filament bodies. . In this case, the irradiance on the object to be processed can be finely controlled by the number of filament bodies.

  Next, in the light irradiation type heating apparatus of the present invention, the connectors (plugs P1, P2 and receptacles R1, R2 in FIG. 1) provided for supplying power to the filament lamp 1 will be described in detail.

FIG. 4 is a diagram for explaining the configuration of the plugs P1 and P2 provided at the end of the filament lamp 1, and FIG. 4 is a cross-sectional view showing the configuration of the plugs P1 and P2.
As shown in the figure, a plurality of external leads 20 (right side of the figure) that are electrically connected to each filament body inside the filament lamp 1 protrude from one end of the filament lamp 1. Lead wires 21 are individually connected to the plurality of external leads 20.
On the other hand, the plug P1 includes a pin-shaped power supply connector 22a and a plug housing 23 that holds the power supply connector 22a. The power supply connector 22a is individually connected corresponding to the plurality of lead wires 21 described above. That is, the number of power supply connectors 22a is the same as the number of the plurality of lead wires 21. The plug housing 23 is made of an electrically insulating resin, and has a rectangular parallelepiped shape, for example.

  The plug housing 23 is provided with a plurality of through-hole-shaped power supply connector holding portions 23a provided at substantially equal intervals in the longitudinal direction. Each of the plurality of power supply connectors 22a is inserted into each of the through-hole-shaped power supply connector holding portions 23a. The power supply connectors 22a are respectively held by the power supply connector holding portions 23a so that the protruding portions 221 of the power supply connectors 22a protrude from the plug housing 23. In other words, the plurality of power supply connectors 22 a and the protruding portions 221 are held by the plug housing 23 so as to be sequentially arranged in parallel in the longitudinal direction of the plug housing 23 with a predetermined interval. The separation distance between the power supply connectors 22a is appropriately determined based on the voltage applied to each filament body, the current flowing through each filament body, the material of the plug housing 23, and the like.

  On the other hand, a handle portion 22y is provided on the side surface of the plug housing 23 (the surface where the power supply connector holding portion 23a is not provided). The operator holds the handle 22y of the plug P1 and connects the plug P1 to a receptacle R1 described later.

Similarly, a plug P2 is provided at the other end of the filament lamp 1. As shown in FIG. 4, a plurality of external leads 18 (left side in the figure) that are electrically connected to each filament body inside the filament lamp 1 protrude from the other end of the filament lamp 1. Lead wires 24 are individually connected to the plurality of external leads 18.
On the other hand, the plug P2 includes a pin-shaped power supply connector 22b and a plug housing 25 that holds the power supply connector 22b. The power supply connectors 22b are individually connected corresponding to the plurality of lead wires 24 described above. That is, the number of power supply connectors 22b is the same as the number of the plurality of lead wires 24. As with the plug housing 23, the plug housing 25 is made of an electrically insulating resin and has a rectangular parallelepiped shape, for example.

  The plug housing 25 is provided with a plurality of through-hole-shaped power supply connector holding portions 25a provided at substantially equal intervals in the longitudinal direction. The plurality of power supply connectors 22b are respectively inserted into the through-hole-shaped power supply connector holding portions 25a. The power supply connectors 22b are respectively held by the power supply connector holding portions 25a so that the protruding portions 222 of the power supply connectors 22b protrude from the plug housing 25. In other words, the plurality of power supply connectors 22b and the protrusions 222 are held by the plug housing 25 so as to be spaced apart at a predetermined interval and sequentially arranged in parallel in the longitudinal direction of the plug housing 25. The distance between the power supply connectors 22b is appropriately determined based on the voltage applied to each filament body, the current flowing through each filament body, and the material of the plug housing 25.

  On the other hand, a handle 22x is provided on the side surface of the plug housing 25 (the surface where the power supply connector holding portion 25a is not provided). The operator holds the handle 22x of the plug P2 and connects the plug P2 to a receptacle R2 described later.

  In FIG. 3, for easy understanding, the external leads 18j, 18l, and 18k led out from the sealing portion 12b of the filament lamp 1 correspond to the three filament bodies 14, 15, and 16, respectively. Three cases are shown. On the other hand, FIG. 4 corresponds to the filament lamp 1 having seven filaments schematically illustrated in FIG. That is, in FIG. 4, all seven external leads 20 projecting from the sealing portion 12b of the filament lamp 1 and external leads 18 projecting from the sealing portion 12a are not shown. 7 cases corresponding to 7 filaments are shown.

FIG. 5 is a diagram for explaining the configuration of the receptacles R1, R2 to which the plugs P1, P2 are connected, respectively, and FIG. 5 is a cross-sectional view showing the configuration of the receptacles R1, R2.
As shown in the figure, the receptacle R1 to which the plug P1 is connected is composed of a pin-shaped power supply connector 22c having a recess 223 at the end, and a receptacle housing 26 that holds the power supply connector 22c. The power supply connector 22c is configured to be individually connectable in correspondence with the plurality of power supply connectors 22a included in the plug P1 shown in FIG. Therefore, the number of power supply connectors 22c is the same as the number of power supply connectors 22a. Moreover, the shape of the recessed part 223 is a shape which can insert the protrusion part 221 of the electric power feeding connector 22a shown in FIG.

The receptacle housing 26 is made of an electrically insulating resin, and has a rectangular parallelepiped shape, for example. As shown in FIG. 5, the receptacle housing 26 is provided with a plurality of through-hole-shaped power supply connector holding portions 26 a provided at substantially equal intervals in the longitudinal direction. Each of the plurality of power supply connectors 22c is inserted into each of the through-hole-shaped power supply connector holding portions 26a. The power connector 22c is held by the power connector holding part 26a so that the end of the recess 223 of each power connector 22c is exposed from the receptacle housing 26. In other words, the plurality of power supply connectors 22 c including the recesses 223 are held by the receptacle housing 26 so as to be sequentially arranged in parallel in the longitudinal direction of the receptacle housing 26 with a predetermined interval therebetween.
The separation distance between the power supply connectors 22c is appropriately determined based on the voltage applied to each filament body, the current flowing through each filament body, the material of the receptacle housing 26, and the like. Naturally, the separation distance between the power supply connectors 22c is equal to the separation distance between the power supply connectors 22a held by the plug housing 23 shown in FIG.

  Each of the plurality of power supply connectors 22c is connected to one end side of the lead wire 211. On the other hand, the other end side of the lead wire 211 is connected to the power supply port 29. In the power supply port 29, the plurality of lead wires 211 are individually electrically connected to one end portion of the power supply line 212. Further, the other end side of the lead wire 212 is connected to the power supply unit 28. That is, the plurality of power supply connectors 22 c included in the receptacle R 1 are electrically connected to the power supply unit 28 via the lead wire 211, the power supply port 29, and the power supply line 212.

  Similarly, the receptacle R2 to which the plug P2 is connected is composed of a pin-shaped power supply connector 22d having a recess 224 at the end, and a receptacle housing 27 that holds the power supply connector 22d. The power feeding connector 22d is configured to be individually connectable corresponding to the plurality of power feeding connectors 22b included in the plug P2 illustrated in FIG. Therefore, the number of power supply connectors 22d is the same as the number of power supply connectors 22b. Moreover, the shape of the recessed part 224 is a shape which can insert the protrusion part 222 of the electric power feeding connector 22b shown in FIG.

The receptacle housing 27 is made of an electrically insulating resin and has a rectangular parallelepiped shape, for example. As shown in FIG. 5, the receptacle housing 27 is provided with a plurality of through-hole-shaped power supply connector holding portions 27 a provided at substantially equal intervals in the longitudinal direction. Each of the plurality of power supply connectors 22d is inserted into each of the through-hole-shaped power supply connector holding portions 27a. The power connector 22d is held by the power connector holding part 27a so that the end of the recess 224 of each power connector 22d is exposed from the receptacle housing 27. In other words, the plurality of power supply connectors 22 d having the recesses 224 are held by the receptacle housing 27 so as to be sequentially arranged in parallel in the longitudinal direction of the receptacle housing 27 at a predetermined interval.
The separation distance between the power supply connectors 22d is appropriately determined based on the voltage applied to each filament body, the current flowing through each filament body, the material of the receptacle housing 27, and the like. Naturally, the separation distance between the power supply connectors 22d is equal to the separation distance between the power supply connectors 22a held by the plug housing 25 shown in FIG.

  Each of the plurality of power supply connectors 22d is connected to one end side of the lead wire 241. On the other hand, the other end side of the lead wire 241 is connected to the power supply port 30. In the power supply port 30, the plurality of lead wires 241 are individually electrically connected to one end of the power supply line 242. Further, the other end side of the lead wire 242 is connected to the power supply unit 28. That is, the plurality of power supply connectors 22d provided in the receptacle R2 are electrically connected to the power supply unit 28 via the lead wire 241, the power supply port 30, and the power supply line 242.

  When the plug P1 and the receptacle R1 are connected, the protrusions 221 of the plurality of power supply connectors 22a held by the plug P1 are individually inserted into the recesses 223 of the plurality of power supply connectors 22c held by the receptacle R1. Further, when the plug P2 and the receptacle R2 are connected, the protrusions 222 of the plurality of power supply connectors 22b held by the plug P2 are individually inserted into the recesses 224 of the plurality of power supply connectors 22d held by the receptacle R2. That is, when the plug P1 shown in FIG. 4 and the receptacle R1 shown in FIG. 5 are connected, the plurality of external leads 20 protruding from one end of the filament lamp 1 shown in FIG. 21 is connected to the plug P1, and is electrically connected to the power supply unit 28 via the receptacle R1, the lead wire 211, the power supply port 29, and the power supply line 212 shown in FIG. Similarly, when the plug P2 and the receptacle R2 are connected, the plurality of external leads 18 protruding from the other end of the filament lamp 1 correspond to the corresponding lead wire 24, plug P2, receptacle R2, and lead. The power supply unit 28 is electrically connected via the line 241, the power supply port 30, and the power supply line 242.

  Accordingly, when the plug P1 and the receptacle R1, and the plug P2 and the receptacle R2 are connected, the filament bodies inside the filament lamp 1 are electrically connected to the power supply unit 28 independently. That is, by connecting the plug P1 and the receptacle R1, and the plug P2 and the receptacle R2, respectively, it is possible to individually supply power to each filament provided in the filament lamp 1 from the power supply unit 28.

Next, the arrangement of the connectors (plugs P1, P2, receptacles R1, R2) in the light irradiation type heating device will be described.
As shown in FIG. 1, in the light irradiation type heating apparatus of the present invention, a holding means 7 is provided inside the chamber 6. The holding means 7 has a channel shape and is attached to the inner surface of the chamber 6 facing the upper side of the lamp unit 3. Here, both side surface portions of the holding means 7 are arranged so as to be positioned on the end side of the plurality of filament lamps 1 constituting the lamp unit 3. Receptacles R1 and R2 are attached to both side portions of the holding means 7, respectively. A reflecting mirror 5 is attached to the bottom surface of the holding means 7.

As described above, the holding means 7 is provided above the lamp unit 3. Therefore, as shown in FIG. 2, the receptacle R <b> 2 attached to the side surface of the holding means 7 is disposed above each filament lamp 1. Therefore, the plurality of plugs P2 are connected to the receptacle R2 so as to be positioned above the ends of the filament lamps 1 connected thereto.
On the other hand, as described above, the lamp unit 3 has a configuration in which a plurality of filament lamps 1 are arranged in parallel at predetermined intervals. Accordingly, the plugs P2 are connected to the filament lamps 1 arranged in parallel so as to be arranged in parallel to the receptacle R2 similarly to the lamp arrangement.

Here, when each plug P2 is connected to the receptacle R2, a plurality of power supply connectors 22d ((d) are arranged so that the longitudinal direction of each plug P2 is substantially perpendicular to the tube axis direction of the arc tube of the filament lamp 1. 2) is provided.
With this configuration, when the connector is connected, the plugs P2 can be arranged in parallel in a posture in which the longitudinal direction is substantially perpendicular to the tube axis direction of the arc tube of the filament lamp 1. .

Similarly, in the receptacle R1, when the plugs P1 are connected, the plurality of power supply connectors 22c (in which the longitudinal direction of the plugs P1 is substantially perpendicular to the tube axis direction of the arc tube of the filament lamp 1) 6) is provided.
With this configuration, when the connectors are connected, the plugs P1 are arranged in parallel so that the longitudinal direction thereof is substantially perpendicular to the tube axis direction of the arc tube of the filament lamp 1, as described above. It becomes possible.

FIG. 6 is a perspective view showing the configuration of plugs P1, P2 connected to the filament lamp 1 and receptacles R1, R2 connected to the plugs P1, P2.
As shown in the figure, the lead wire 21 that electrically connects the plurality of external leads 20 protruding from one end of the filament lamp 1 and the power supply connector 22a held by the plug housing 23 of the plug P1 is substantially perpendicular. Bending portions 21a and 21b are provided. Similarly, the lead wire 24 that electrically connects the plurality of external leads 18 protruding from the other end of the filament lamp 1 and the power supply connector 22b held by the plug housing 25 of the plug P2 24a and 24b are provided.
Thus, by providing the bent portions 21a, 21b, 24a, and 24b, the filament lamp 1 and the plug P1 are arranged so that the longitudinal direction of the plugs P1 and P2 and the tube axis direction of the arc tube of the filament lamp 1 are substantially orthogonal to each other. , P2 can be arranged.
That is, as described above, when each plug P1 is connected to the receptacle R1, and when each plug P2 is connected to the receptacle R2, the longitudinal direction of each plug P1 and each plug P2 is the tube axis of the arc tube of the filament lamp 1. The plugs P1 and the plugs P2 are arranged in parallel to the receptacles R1 and R2 in a posture that is substantially perpendicular to the direction.

  As described above, in the light irradiation type heating device of the present invention, the power supply connectors 22a and 22b are individually electrically connected to the external leads 18 and 20 of the plurality of filament bodies arranged in the filament lamp 1, respectively. Is done.

In the plug P1, the plurality of power supply connectors 22a are held by the plug housing 23 so as to be sequentially arranged in parallel in the longitudinal direction of the rectangular parallelepiped plug housing 23, for example.
In the plug P2, the plurality of power supply connectors 22b are held by the plug housing 25 so as to be sequentially arranged in parallel in the longitudinal direction of the rectangular parallelepiped plug housing 25, for example, at a predetermined interval.
On the other hand, in the receptacle R1, the plurality of power supply connectors 22c individually connected to the plurality of power supply connectors 22a are sequentially arranged in parallel in the longitudinal direction of the rectangular parallelepiped receptacle housing 26, for example, with a predetermined spacing. In this way, it is held by the receptacle housing 26.
In the receptacle R2, the plurality of power supply connectors 22d individually connected to the plurality of power supply connectors 22b are sequentially arranged in parallel in the longitudinal direction of the rectangular parallelepiped receptacle housing 27, for example, with a predetermined spacing. In this way, it is held by the receptacle housing 27.

The arrangement of the plug P1 and the receptacle R1 configured as described above is set as follows. That is, when both are connected, the arrangement of both is set so that each plug P1 is arranged in parallel in a posture in which the longitudinal direction is substantially vertical to the tube axis direction of the arc tube of the filament lamp 1. .
Similarly, the arrangement of the plug P2 and the receptacle R2 configured as described above is set as follows. That is, when both are connected, the arrangement of the plugs P2 is set so that the longitudinal direction of the plugs P2 is arranged in parallel so that the longitudinal direction is substantially perpendicular to the tube axis direction of the arc tube of the filament lamp 1. .
That is, the power supply connectors 22a and 22b arranged in parallel and held by the plugs P1 and P2 are set so as to be positioned on the same vertical plane including the tube axis of the arc tube as shown in FIG. Of course, when the plugs P1, P2 and the receptacles R1, R2 are connected, the power supply connectors 22c, 22d arranged in parallel held by the receptacles R1, R2 are on a vertical plane including the tube axis of the arc tube shown in FIG. Set to be located.

  By configuring as described above, in the lamp unit 3 shown in FIGS. 1 and 2, a connector (plug) that is electrically connected to each filament lamp 1 corresponding to the plurality of filament lamps 1 arranged in parallel. P1, P2, receptacles R1, R2) can be arranged in parallel.

Further, as shown in FIGS. 4 and 5, the connectors (plugs P1, P2, receptacles R1, R2) are, for example, a rectangular parallelepiped shape, and a plurality of power supply connectors 22a, 22b corresponding to the filament lamps 1, respectively. , 22c, 22d are arranged in parallel in the longitudinal direction of the connector, and as shown in FIG. 2, the longitudinal direction of each connector is substantially the tube axis direction of the arc tube of the filament lamp. Since the connectors are arranged in parallel so as to be in a vertical posture, the interval between the connectors can be reduced.
In other words, when connecting the power feeding connectors 22a and 22b arranged in parallel held by the plugs P1 and P2 and the power feeding connectors 22c and 22d held by the receptacles R1 and R2, the connected power feeding connectors are shown in FIG. As described above, since the connectors are configured and arranged so as to be arranged in parallel on the same vertical plane including the tube axis of the arc tube, the interval between the connectors can be reduced.

Therefore, according to the present invention, in the lamp unit 3, it is possible to narrow the interval between the plurality of filament lamps 1 arranged in parallel, so that a high temperature rising rate is ensured when the workpiece 4 (semiconductor wafer) is heated. It becomes possible to do.
In addition, according to the present invention, since the connector is used to connect the filament lamp 1 and the power supply unit 28, a large number of lead wires from the plurality of filament lamps 1 constituting the lamp unit 3 are used using the terminal block. Compared with the case of fixing individually, electrical connection work is simple, and since a large terminal block corresponding to a large number of lead wires is not used, downsizing of the apparatus can be realized.
Further, according to the present invention, since the connector is configured as described above, the arrangement interval of the filament lamp can be reduced as compared with the case where a multipolar socket having an outer diameter larger than the outer diameter of the arc tube of the lamp is used as the connector. Can be narrowed. Further, unlike the case of the multi-pole socket, a large installation space is not required for the connector, and the apparatus can be downsized.
Furthermore, according to the present invention, it is possible to flow the cooling air from the outlet 82b of the cooling air supply nozzle 81b through the gap between the connectors arranged in parallel, so that each connector can be effectively cooled. It becomes. Therefore, it is possible to suppress an increase in temperature when energizing each connector (plugs P1, P2, receptacles R1, R2).

  In the above-described example, the case where the connector is configured to be connectable to the plurality of plugs P1 with respect to one receptacle R1, is not limited to this. It is also possible to provide a receptacle R1 individually corresponding to each plug P1. Similarly, in the above-described example, the case where the connector is configured to be connectable to the plurality of plugs P2 with respect to one receptacle R2, is not limited to this. Corresponding to each plug P2, it is also possible to provide a receptacle R2 individually.

  4 and 5, the intervals between the plurality of power supply connectors 22a, 22b, 22c, and 22d are arranged at equal intervals at a predetermined interval, but are not limited thereto. For example, in the plug P1, the intervals between the plurality of power supply connectors 22a in the plug housing 23 do not have to be equal, but the voltage applied to each filament body, the current flowing through each filament body, the material of the plug housing 23, and the like. Based on this, it may be set at non-uniform intervals. In this case, the intervals between the plurality of power supply connectors 22c in the receptacle R1 to which the plug P1 is connected are set corresponding to the intervals between the power supply connectors 22a.

  Further, when the power supply connectors 22a and 22b and the power supply connectors 22c and 22d are connected, the connected power supply connectors are arranged in parallel on the same vertical plane including the tube axis of the arc tube as shown in FIG. Although the connectors (plugs P1, P2, receptacles R1, R2) are configured and arranged as described above, the above-described connected power supply connectors 22a are not necessarily arranged in parallel on the same vertical plane. If the distance between the connectors (plugs P1 and P2, receptacles R1 and R2) arranged in parallel can be reduced to some extent, the connected power feeding connectors may be arranged in the vicinity of the same vertical plane. Good.

  By the way, in the light irradiation type heating apparatus of the present invention, each plug P1, P2 provided corresponding to each filament lamp 1 is fitted and held without error in a predetermined receptacle R1, R2, and is properly connected electrically. It is necessary to do so. Therefore, in order to reliably prevent erroneous connection of the connectors (plugs P1, P2, receptacles R1, R2), an erroneous connection prevention mechanism may be provided in the connector.

FIG. 7 is a diagram showing a configuration example of a connector (plug P1, receptacle R1) provided with a connector misconnection prevention mechanism.
In the figure, plugs P1 (1), P1 (2), P1 (3), P1 (4) and P1 (5) connected to one end sides of five filament lamps 1 are connected to each other. The receptacle R1 is shown. In the receptacle R1, steps Rc (1), Rc (2), Rc (3), Rc (4), and Rc (5) are formed at portions where the plugs P1 are connected. Each of the steps Rc (1), Rc (2), Rc (3), Rc (4), Rc (5) is connected to the plugs P1 (1), P1 (2), P1 (3), P1 ( 4) P1 (5) is inserted, and the connection between the plug P1 and the receptacle R1 is performed. Note that the widths r of the steps Rc (1), Rc (2), Rc (3), Rc (4), and Rc (5) are set so that the plugs P1 (1) are plugged into the steps Rc. ), P1 (2), P1 (3), P1 (4), and P1 (5) are slightly larger than the width p.
Each step Rc is provided with a plurality of power supply connectors 22c to which a plurality of power supply connectors 22a of each plug P1 are connected. The holding structure of the plurality of power supply connectors 22a in each plug P1 and the holding structure of the plurality of power supply connectors 22c in the receptacle R1 are the same as those shown in FIGS.

Recesses Pa (1), Pa (2), Pa (3), Pa at different positions on the side surfaces of the plugs P1 (1), P1 (2), P1 (3), P1 (4), P1 (5). (4), Pa (5) is provided. Here, the mutually different positions mean positions where the distances d from the end face Ps of the plug P1 are different from each other on the side face.
On the other hand, convex portions Ra (1), Ra (2), Ra (3) are formed on the side surfaces of the respective steps Rc (1), Rc (2), Rc (3), Rc (4), Rc (5) of the receptacle R1. , Ra (4), Ra (5) are provided. The side surface of each step Rc provided with the convex portion Ra is a surface corresponding to the side surface of each plug P1 provided with the concave portion Pa when the plug P1 and the receptacle R1 are connected. Moreover, the shape of convex part Ra and the recessed part Pa is made into the shape which both can fit.

Here, when the plug P1 and the receptacle R1 are connected to each other, the positions of the convex portions Ra on the side surfaces of the steps Rc are the plugs P1 (1), P1 (2), P1 (3), P1 (4), P1 (5 ) Side surfaces of the concave portions Pa (1), Pa (2), Pa (3), Pa (4), and Pa (5) provided at different positions.
That is, in the step Rc (1) of the receptacle R1 to which the plug P1 (1) is connected, the position of the convex portion Ra (1) provided on the side surface of the step Rc (1) is provided on the side surface of the plug P1 (1). It should be in a position where it can be fitted with the recessed portion Pa (1).
Further, in the step Rc (2), the position of the convex portion Ra (2) provided on the side surface of the step Rc (2) can be fitted to the concave portion Pa (2) provided on the side surface of the plug P1 (2). Position.
Similarly, the positions of the protrusion Ra (3), the protrusion Ra (4), and the protrusion Ra (5) provided on the side surfaces of the step Rc (3), the step Rc (4), and the step Rc (5) are as follows. The plug P1 (3), the plug P1 (4), and the concave portion Pa (3), the concave portion Pa (4), and the concave portion Pa (5) provided on the side surface of the plug P1 (5) can be fitted.

  Thus, by providing the convex portion Ra and the concave portion Pa as the erroneous connection preventing mechanism, the predetermined plug P1 can be inserted into the predetermined step Rc in the receptacle R1 without error. For example, the correct connection partner of the plurality of power supply connectors 22c provided at the step Rc (1) is each power supply connector 22a held by the plug P1 (1). Here, if the plug P1 (1) is to be inserted into the step Rc (1), the convex portion Ra (1) of the step Rc (1) and the concave portion Pa (1) of the plug P1 (1) can be fitted. Therefore, the step Rc (1) and the plug P1 (1) can be connected. That is, it is possible to correctly connect the plurality of power supply connectors 22c provided at the step Rc (1) and the power supply connectors 22a held by the plug P1 (1).

  On the other hand, for example, when the plug P1 (2) is to be inserted into the plurality of power supply connectors 22c provided at the step Rc (1), the plug is inserted into the convex portion Ra (1) of the step Rc (1). Since the concave portion Pa (2) of P1 (2) is not provided at a position where fitting is possible, the step Rc (1) and the plug P1 (2) cannot be connected. Therefore, it is possible to reliably prevent the plurality of power supply connectors 22c provided at the step Rc (1) from being erroneously connected to the power supply connectors 22a held by the plug P1 (2).

As described above, by providing the convex portion Ra and the concave portion Pa as the erroneous connection preventing mechanism, it is possible to correctly connect the plurality of power supply connectors 22a and the plurality of power supply connectors 22c.
Similarly, the erroneous connection preventing mechanism as described above can be provided for the plug P2 and the receptacle R2.

  Note that the configuration of the erroneous connection prevention mechanism is not limited to the above example. For example, a pin may be provided instead of the convex portion Ra. As a matter of course, the pin corresponds to the position of the recess Pa and is configured to be fitted to the recess Pa. Further, when using a pin, the step Rc need not be provided in the receptacle R1.

It is sectional drawing which shows the structure of the light irradiation type heating apparatus which concerns on this invention. FIG. 1 is a cross-sectional view showing a configuration of a light irradiation type heating apparatus according to the present invention as seen from AA in FIG. It is a perspective view which shows an example of the filament lamp 1 shown in FIG.1 and FIG.2. 2 is a cross-sectional view showing the configuration of plugs P1 and P2 provided at the end of the filament lamp 1. FIG. It is sectional drawing which shows the structure of receptacle R1, R2 to which plug P1, P2 is connected, respectively. FIG. 3 is a perspective view showing the configuration of plugs P1, P2 connected to the filament lamp 1 and receptacles R1, R2 connected to the plugs P1, P2. It is a perspective view which shows the structure of the connector (plug P1, receptacle R1) which provided the misconnection prevention mechanism. It is sectional drawing which shows the structure of the light irradiation type heating apparatus which concerns on a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Filament lamp 2 Quartz window part 3 Lamp unit 4 Workpiece | work (for example, semiconductor wafer)
5 Reflecting mirror 6 Chamber 7 Holding means 8 Cooling air units 81a, 81b, 81c Cooling air supply nozzles 82a, 82b, 82c Air outlet 83a Cooling air outlet 83b Gas exhaust port 84 Process gas supply nozzle 85 Air outlet 800 Process gas unit 810 Gas exhaust unit 9 Thermometer
91 Temperature measurement part 10 Guard ring 11 Arc tube 12a, 12b Sealing part 13a, 13b, 13c, 13d, 13e, 13f Metal foil 14, 15, 16 Filament body 14a, 15a, 16a, 14c, 15c, 16c Lead 14b, 15b, 16b Filament 17 Anchor 18, 20 External lead
18a, 18b, 18c, 18j, 18k, 18l External leads 18d, 18e, 18f, 18g, 18h, 18i Internal leads
19a, 19b, 19c, 19d Support members 21, 24 Lead wires 21a, 21b, 24a, 24b Bending portions 211, 241 Lead wires 212, 242 Feed wires 22a, 22b, 22c, 22d Feed connectors 221, 222 Protruding portions 223, 224 Recess
22x, 22y Handle part 23, 25 Plug housing 23a, 25a Feed connector holding part
26, 27 Receptacle housing 26a, 27a Power supply connector holding part 28 Power supply part 29, 30 Power supply port 100 Light irradiation type heating device S1 Lamp unit accommodation space S2 Heat treatment space P1, P2 Plug R1, R2 Receptacle P1 (1), P1 (2), P1 (3), P1 (4), P1 (5) Plugs Rc (1), Rc (2), Rc (3), Rc (4), Rc (5) Steps Pa (1), Pa (2), Pa (3), Pa (4), Pa (5) Concave portion Ra (1), Ra (2), Ra (3), Ra (4), Ra (5) Convex portion Ps End face

Claims (4)

A plurality of filaments sequentially arranged along the tube axis direction of the arc tube, and a plurality of filament bodies having leads connected to each of the plurality of filaments and individually supplying power;
A plurality of conductive members electrically connected to each of the leads;
A sealing portion in which the plurality of conductive members are arranged and provided at an end of the arc tube;
An external lead electrically connected to each of the plurality of conductive members;
In a filament lamp comprising:
A plug comprising: a power supply connector electrically connected to each of the plurality of external leads; and a plug housing for holding the power supply connector so that the power supply connectors are sequentially arranged in parallel in the longitudinal direction of the plug housing at a predetermined interval. A filament lamp characterized by A plurality of filaments sequentially arranged along the tube axis direction of the arc tube, and a plurality of filament bodies having leads connected to each of the plurality of filaments and individually supplying power;
A plurality of conductive members electrically connected to each of the leads;
A sealing portion in which the plurality of conductive members are arranged and provided at an end of the arc tube;
An external lead electrically connected to each of the plurality of conductive members;
A lamp unit having a plurality of filament lamps arranged in parallel;
In the light irradiation type heating device having a power supply unit for supplying power to the plurality of filament bodies individually,
The filament lamp includes a plurality of first power supply connectors electrically connected to each of the plurality of external leads and a plug that holds the plurality of first power supply connectors so that they are sequentially arranged in parallel at a predetermined interval. A plug comprising a housing,
The power supply unit includes a plurality of second power supply connectors respectively connected to the plurality of first power supply connectors, and the plurality of second power supply connectors corresponding to an arrangement interval of the plurality of first power supply connectors. And a receptacle housing comprising a receptacle housing that is held so as to be sequentially arranged in parallel at a predetermined interval.
When the plug and the receptacle are connected to form an integrated connector, the first power supply connector and the second power supply connector to be connected are sequentially arranged in parallel on the same vertical plane including the tube axis of the arc tube. The light irradiation type heating device, wherein the integrated connector is arranged as described above.   3. The light irradiation type heating device according to claim 2, wherein each of the integrated connectors is arranged in parallel corresponding to a plurality of filament lamps arranged in parallel in the lamp unit.   4. The light according to claim 2, wherein the plug and the receptacle are each provided with an erroneous connection prevention mechanism so that the predetermined plug is connected only to the predetermined receptacle. Irradiation heating device.

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