JP4877502B2 - Nitrogen-containing Cr coating and mechanical member having this coating - Google Patents
Nitrogen-containing Cr coating and mechanical member having this coating Download PDFInfo
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本発明は、窒素含有Cr被膜およびこの被膜を有する機械部材に関するものである。 The present invention relates to a nitrogen-containing Cr coating and a mechanical member having this coating.
金型をはじめとする多くの機械部材は過酷な条件下で使用されるが、これらの機械部材に求められる特性としては、耐摩耗性に優れること、耐食性に優れること、耐焼き付き性に優れることなどが挙げられる。 Many machine parts including molds are used under severe conditions, but the characteristics required for these machine parts are excellent wear resistance, excellent corrosion resistance, and excellent seizure resistance. Etc.
このような特性を付与するために、通常はこのような機械部材の母材であるSKD(工具鋼)などに様々な表面処理を施している。その一つに硬質クロムメッキがある。硬質クロムメッキは表面の硬度が平均Hv1000〜1100と高いものの、処理廃水に含まれる六価クロムが水質汚染の原因になっている。また、メッキ被膜と母材との密着性に問題があった。 In order to impart such characteristics, various surface treatments are usually applied to SKD (tool steel) which is a base material of such a machine member. One of them is hard chrome plating. Hard chromium plating has a surface hardness as high as an average Hv 1000 to 1100, but hexavalent chromium contained in the treated wastewater causes water pollution. Moreover, there was a problem in the adhesion between the plating film and the base material.
また、PVD処理方法によって機械部材の母材表面にCr単層被膜を形成した場合、母材と被膜との密着性は優れているものの、膜の硬度がHv500〜600と低いなどの問題点があった。 In addition, when a Cr single layer coating is formed on the surface of the base material of the mechanical member by the PVD processing method, the adhesion between the base material and the coating is excellent, but the film hardness is as low as Hv 500 to 600. there were.
また、自動2輪車や自動4輪車等のエンジンおよび変速機に使用される摩擦摩耗部品などの機械部材には、高速回転体との摺動接触や打撃を繰り返し受けるために高靱性、高い表面硬度及び低摩擦係数等の特性が要求される。 In addition, mechanical members such as friction and wear parts used in engines and transmissions of motorcycles and automobiles are highly tough and have high toughness because they are repeatedly subjected to sliding contact and impact with a high-speed rotating body. Properties such as surface hardness and low friction coefficient are required.
これらの部品には、一般に低炭素鋼或いは中炭素鋼等が用いられ、上記特性を付与するために、浸炭、焼き入れ、窒化などの表面処理が施されているが、更に、硬質クロムメッキやニッケル−リンメッキ、ショットピーニング、各種金属の溶射などが行われ、耐摩耗性、耐焼き付き性、潤滑性の改善を図っている。 For these parts, low carbon steel or medium carbon steel is generally used, and surface treatments such as carburizing, quenching, and nitriding are performed to impart the above characteristics. Nickel-phosphorus plating, shot peening, thermal spraying of various metals, etc. are performed to improve wear resistance, seizure resistance, and lubricity.
然しながら、昨今の軽量化やエンジン出力の増大化により、より過酷な環境下で使用されるようになり、上記のような表面処理では要求特性を満足し得なくなりつつある。また、以上の特性を満足するためにPVD法のうちイオンプレーティング法によるTiN膜やCrN膜が使用されつつあるが、この方法では処理温度が400℃以上と高いために母材の硬度が低下し、満足な特性が得られないという問題があった。 However, due to the recent reduction in weight and increase in engine output, it has been used in harsher environments, and the above-mentioned surface treatment cannot satisfy the required characteristics. In order to satisfy the above characteristics, TiN film or CrN film by ion plating method is being used among PVD methods. However, since the processing temperature is as high as 400 ° C. or higher, the hardness of the base material is lowered. However, there is a problem that satisfactory characteristics cannot be obtained.
上記のように従来の機械部材への表面処理方法やそれによって得られた表面被膜では、耐摩耗性や耐食性、耐焼き付き性、潤滑性などに問題があったため、部材自体の寿命が劣るという問題があった。 As described above, the conventional surface treatment method for mechanical members and the surface coating obtained thereby have problems in wear resistance, corrosion resistance, seizure resistance, lubricity, etc., and thus the life of the member itself is inferior. was there.
本発明はこのようなこれまでの被膜の問題点を解決すべくなされたものである。 The present invention has been made to solve the above-described problems of the coating film.
本発明の被膜は、被処理部材の表面に形成された窒素を含有するCr被膜であって、窒素の雰囲気中でクロムをスパッタリングプロセス温度300℃未満でスパッタリングすることによって形成されCr被膜中に100原子当たり 50〜99のクロム 原子及び50〜1 の窒素原子を含むCrX NY 結晶が点在し、該 CrX NY 結晶の組成が100原子当り52のクロム原子と、48の窒素原子を含むことを特徴とする。 The film of the present invention is a Cr film containing nitrogen formed on the surface of a member to be processed, and is formed by sputtering chromium at a sputtering process temperature of less than 300 ° C. in an atmosphere of nitrogen. Cr x N y crystals containing 50 to 99 chromium atoms and 50 to 1 nitrogen atoms per atom are scattered, and the composition of the Cr x N y crystal is 52 chromium atoms per 48 atoms and 48 nitrogen atoms . It is characterized by including.
前記窒素含有Cr被膜の硬度Hvが1700〜2000であることを特徴とする。 Hardness Hv of the nitrogen-containing Cr coating is characterized 1700-2000 der Rukoto.
前記窒素含有Cr被膜が、5〜100μmの厚さを有することを特徴とする。
The nitrogen-containing Cr coating has a thickness of 5 to 100 μm .
また、本発明の機械部材は、窒素含有Cr被膜をその表面に形成したことを特徴とする。 The mechanical member of the present invention is characterized in that a nitrogen-containing Cr coating is formed on the surface thereof.
前記機械部材が、金型、粉末成形パンチ、ピアスパンチ、Cuコイイングパンチ、自動2輪車または自動4輪車に使用される摩擦摩耗部品であることを特徴とする。 The mechanical member is a frictional wear part used in a mold, a powder molding punch, a piercing punch, a Cu coiling punch, a motorcycle or a motorcycle .
上記のように本発明の機械部材によれば、機械部材の寿命を大きく延ばすことができるのみならず、その離型性も向上し、資源の有効的活用と公害問題の軽減にも大きく貢献できる等大きな利益がある。 As described above, according to the mechanical member of the present invention, not only can the life of the mechanical member be greatly extended, but also its releasability is improved, which can greatly contribute to effective utilization of resources and reduction of pollution problems. And so on.
以下図面によって本発明の被膜およびその製造方法、さらに被膜を有する機械部材の一例として金型について説明する。 DESCRIPTION OF EMBODIMENTS Hereinafter, a coating film according to the present invention, a manufacturing method thereof, and a mold as an example of a mechanical member having the coating film will be described with reference to the drawings.
図1は本発明の被膜を金型上に形成するためのスパッタリング装置の概略図を示し、1は円筒状または角形状の真空処理室、2はこの真空処理室1内を真空とするための真空ポンプ、3は上記真空処理室1内の中心部に配置した回転テーブル、4はこの回転テーブル3上に治具5を介して載置した被処理部材である金型、6はこの被処理金型4を取り囲むように配置した蒸発源としてのクロムターゲット、7はこのクロムターゲット6に夫々接続した直流のスパッタ電源、8は上記回転テーブル3に接続した直流のイオンボンバード及びバイアス電源、9は上記真空処理室1内にアルゴン及び窒素ガスを導入するためのガス導入パイプである。
FIG. 1 is a schematic view of a sputtering apparatus for forming a coating film of the present invention on a mold. Reference numeral 1 denotes a cylindrical or square vacuum processing chamber, and 2 denotes a vacuum for the inside of the vacuum processing chamber 1. A vacuum pump, 3 is a rotary table disposed at the center of the
本発明においては、スパッタリングプロセスの前に真空脱ガスを実施せしめる。 In the present invention, vacuum degassing is performed before the sputtering process.
また、本発明においては真空処理室1内に窒素ガスとアルゴンガスをガス導入パイプ9を介して導入した後、被処理部材、例えば金型の表面にクロムをスパッタリングし、金型の表面に窒素を含有するCr膜として100原子当たり50〜99のクロム原子及び50〜1の窒素原子を含むCrX NY 結晶が点在した膜を生成せしめる。上記スパッタリングに際しては、上記被膜の厚さを均一ならしめるため、且つ被処理部材の温度をその焼戻し温度以下に維持するため、ターゲットと被処理材料間の間隔を例えば70mmに保つのが好ましい。
In the present invention, nitrogen gas and argon gas are introduced into the vacuum processing chamber 1 through the
本発明においては、上記スパッタリングプロセス前に必要に応じてイオンボンバード処理を行い、かつプロセス温度を300℃未満とし、所定の被膜の厚みに応じて処理時間を定め、被膜の組織調整はプロセス中の圧力やバイアス電圧の変更によって行うようにする。なおプロセス温度が300℃以上になると、母材自体の軟化が生じるので、本処理についてはなるべく低い温度が好ましいが、室温以下で行うことは密着性の確保が困難なので実用上得策でない。 In the present invention, ion bombarding is performed as necessary before the sputtering process, the process temperature is set to less than 300 ° C., the processing time is determined according to the thickness of a predetermined film, and the texture of the film is adjusted during the process. This is done by changing the pressure and bias voltage. When the process temperature is 300 ° C. or higher, the base material itself is softened. Therefore, a low temperature is preferable for this treatment. However, it is not practically practical to perform the treatment at room temperature or lower because it is difficult to ensure adhesion.
なお、上記被膜の厚みは、最大100μmまでとするのが好ましい。 Note that the thickness of the coating is preferably up to 100 μm.
EPMAによって表面の膜の化学組成を調べたところ、Cr72,N28及びCr52,N48などの比を示した。膜の特性については、耐焼き付き性、耐摩耗性、摩擦係数、密着性などについて調査した。 When the chemical composition of the film on the surface was examined by EPMA, the ratio of Cr72, N28 and Cr52, N48, etc. was shown. Regarding the characteristics of the film, the seizure resistance, the wear resistance, the friction coefficient, the adhesion and the like were investigated.
(比較例) (Comparative example)
比較例1,2としてはイオンプレーティングしたTiN膜および電解硬質クロムメッキの膜を用いた。 As Comparative Examples 1 and 2, ion-plated TiN films and electrolytic hard chrome plating films were used.
耐焼き付け性については、図2に示すようなファビリー試験機を用いて行った。即ち、直径約6.4mmのSCM415に浸炭焼き入れ焼き戻し研磨仕上げしたテストピン10に、それぞれ6μmの本発明被膜を付け、SCM415に浸炭焼き入れ焼き戻し表面研磨仕上げしたVブロック11を用い、締め付け加重を600Kgf一定として断続運転を行った。断続運転は2秒ON,10秒OFF、すべり速度0.1m/sec,無潤滑の条件である。評価の方法は、膜が破壊するまでの断続回数を焼き付き性として評価した。
The seizure resistance was measured using a Fabry tester as shown in FIG. That is, each
なお、12はテストピン10を例えば300rpmで回転せしめる駆動機、13は駆動機12にテストピン10を固定するためのシアーピンである。
また、摩耗特性としては、耐アグレッシブ特性を評価した。スガ式摩耗試験器(NUS−ISO−3型)を用いて、#400のダイヤモンド電着研磨布を用いて、往復運動摩耗試験を行った。母材はいずれもSUS440Cを鏡面仕上げしたものである。試験片の総荷重は9.8Nであり往復のストローク長さは60mmである。摩耗特性の評価はサンプルの摩耗量(×10-5g/cm)として評価した。 In addition, as wear characteristics, aggressive resistance characteristics were evaluated. Using a Suga type wear tester (NUS-ISO-3 type), a reciprocating wear test was performed using a # 400 diamond electrodeposited polishing cloth. All base materials are mirror-finished SUS440C. The total load of the test piece is 9.8 N, and the reciprocating stroke length is 60 mm. The abrasion characteristics were evaluated as the amount of abrasion (× 10 −5 g / cm) of the sample.
表1にその結果を示す。 Table 1 shows the results.
なお、表1において、例えば破壊までの回数30<とは30回以上を示し、5>とは5回以下を示す。 In Table 1, for example, 30 <is the number of times until destruction is 30 or more, and 5> is 5 or less.
さらに、本発明被膜を有する部材の一例として、金型にスパッタリング処理を施した。 Furthermore, as an example of the member having the coating film of the present invention, the mold was subjected to sputtering treatment.
本発明におけるイオンボンバード処理は、Ar雰囲気中で2×10-2torrとして、1250V×0.01mAで約40分行った。 The ion bombardment treatment in the present invention was performed at 1250 V × 0.01 mA for about 40 minutes as 2 × 10 −2 torr in an Ar atmosphere.
また、スパッタリング処理は、雰囲気中のガス分圧をAr:1.2×10-3torr,N2:0.2×10-3torr,バイアス電圧:−90〜−100Vとし、処理時間を約100分とした。 In the sputtering treatment, the gas partial pressure in the atmosphere is Ar: 1.2 × 10 −3 torr, N2: 0.2 × 10 −3 torr, bias voltage: −90 to −100 V, and the treatment time is about 100. Minutes.
本発明においては以上の条件で母材である工具鋼にスパッタリングターゲット処理を施した金型を作成した。 In this invention, the metal mold | die which performed the sputtering target process to the tool steel which is a base material on the above conditions was created.
なお、上記の条件については、母材の材料、寸法や形状によって変更される。本実施例の場合は上記条件をはずれると、被膜の密着性や膜の特性が劣る。 In addition, about said conditions, it changes with the materials of a base material, a dimension, and a shape. In the case of the present embodiment, if the above conditions are not satisfied, the adhesion of the film and the characteristics of the film are inferior.
この条件によって得られた膜は、硬度がHv=1700〜2000であり、得られた膜の厚さは10μmであった。 The film obtained under these conditions had a hardness of Hv = 1700 to 2000, and the thickness of the obtained film was 10 μm.
表2に従来の金型との使用上の比較例を示す。寿命については実際にパンチをした際に金型の離れが悪くなった際の成型品のショット数で本発明と従来金型の比較を行ったものである。 Table 2 shows a comparative example in use with a conventional mold. Regarding the service life, the present invention is compared with the conventional mold by the number of shots of the molded product when the separation of the mold becomes worse when actually punching.
表2は、種々の材質の金型及びパンチの使用寿命を示す。 Table 2 shows the service life of dies and punches of various materials.
なお、表2において、例えば寿命倍率10<とは従来のものに比べ寿命が10倍延びたことを示す。また、SKD(HQT)は、焼入・焼戻しのSKD材を示す。 In Table 2, for example, a life ratio of 10 <indicates that the life is extended by 10 times compared to the conventional one. SKD (HQT) indicates a quenching / tempering SKD material.
以下本発明の被膜を自動2輪車及び自動4輪車等のエンジン及び変速機に使用される摩擦摩耗部品に適用した本発明の他の実施例を説明する。 Hereinafter, another embodiment of the present invention in which the coating of the present invention is applied to frictional wear parts used in engines and transmissions of motorcycles and automobiles will be described.
比較例3,4,5としてはイオンプレーティングしたTiN膜とCrN膜及び電解硬質クロムメッキの膜を用いた。 As Comparative Examples 3, 4 and 5, ion-plated TiN film, CrN film and electrolytic hard chrome plating film were used.
摩擦係数及び耐焼き付き性については、図2に示すような、ファビリー試験機を用いて行った。即ち、直径6.4mmのSCM415に浸炭焼き入れ、焼き戻し研磨仕上げしたテストピン10に、夫々10μmの本発明被膜を着け、SCM415に浸炭焼き入れ、焼き戻し表面研磨仕上げしたVブロック11を用い、締付け荷重を0から25kg/秒で増加する試験を行った。試験は油中で実施し、このときの摩擦係数と耐焼付き荷重を評価した。表3にその結果を示す。
The coefficient of friction and seizure resistance were measured using a Fabry tester as shown in FIG. That is, the
また、本発明被膜を摩擦摩耗部品である自動2輪車用シフトフォークに適用することを考慮して、摩擦摩耗試験を行ない、本発明品の摩耗量を比較例6〜9のそれと比較した。この時の被膜条件は、母材がSCM415の浸炭焼き入れ焼き戻し品を研磨ラップ仕上し表面粗さをRa0.2に調整し、この上に本発明被膜を5〜10μm厚さで処理した。また、摩擦摩耗試験は実際の自動2輪車ではシフトフォークの相手方の材料(シフター)との摩擦摩耗を調べるのであるが、ここでは、摩擦摩耗試験としてプレイトオンディスク試験を行ない、シフターに相当する部分の表面処理は、機械加工し、浸炭し,ショットブラスト処理したものを用いた。 In consideration of applying the coating of the present invention to a motorcycle shift fork as a frictional wear part, a frictional wear test was conducted, and the wear amount of the product of the present invention was compared with that of Comparative Examples 6-9. The coating conditions at this time were: carburizing, quenching and tempering with a base material of SCM415, polishing lapping, adjusting the surface roughness to Ra 0.2, and processing the coating of the present invention to a thickness of 5 to 10 μm. In addition, the friction and wear test is performed by examining the friction and wear with the material (shifter) of the counterpart of the shift fork in an actual motorcycle. Here, a plate-on-disk test is performed as the friction and wear test, which corresponds to the shifter. The surface treatment of the part was machined, carburized and shot blasted.
本発明で用いた摩擦摩耗試験では、シフターに相当するターンテーブルの上に、シフトフォークに相当する被処理品を所定の荷重で押圧した状態でターンテーブルのみを所定時間回転させた後、被処理品の摩耗量を測定し、この摩耗量を試験片の摩擦面の被膜の膜厚の減少量として評価する。 In the frictional wear test used in the present invention, after turning the turntable corresponding to the shift fork with a predetermined load on the turntable corresponding to the shifter and rotating only the turntable for a predetermined time, The amount of wear of the product is measured, and this amount of wear is evaluated as the amount of decrease in the film thickness of the coating on the friction surface of the test piece.
具体的には、被処理品:SCM415の母材を浸炭焼き入れ焼き戻しした後に、研磨ラップ仕上げし、表面粗さをRa=0.2に調整し、この上に本発明の方法によって得られる窒素含有被膜を5μm厚さでつけたものを試験品として用い、相手方のターンテーブルには、被処理品と接触する面の表面を機械加工仕上げの後、浸炭を行ない、ショットブラスト処理によって得られたものを用いた。なお、荷重負荷は80Kgf,すべり速度は13m/sec,時間は20時間とした。 Specifically, the base material of the article to be processed: SCM415 is carburized, quenched, and tempered, and then polished and lapped, and the surface roughness is adjusted to Ra = 0.2, and then obtained by the method of the present invention. A nitrogen-containing coating with a thickness of 5 μm is used as a test product, and the other turntable is obtained by shot blasting after the surface of the surface in contact with the workpiece is machined and carburized. Used. The load was 80 kgf, the sliding speed was 13 m / sec, and the time was 20 hours.
摩擦条件は、最大荷重80kgf、すべり速度最大13m/秒で20時間の耐久試験を実施した。 The friction conditions were a 20-hour endurance test with a maximum load of 80 kgf and a sliding speed of 13 m / sec.
試験後の評価は、摩擦面の摩耗量を膜厚の減少量として評価した。本評価結果を表4に示す。 In the evaluation after the test, the amount of wear on the friction surface was evaluated as the amount of film thickness reduction. The evaluation results are shown in Table 4.
表4中に比較例6として硬質クロムメッキ(膜厚30μm)、比較例7としてイオンプレーティング製(以下IPと略す)TiN(膜厚5μm)、比較例8としてIP製CrN(膜厚6μm)及び比較例9としてMo溶射(膜厚100μm)品を用いた。
In Table 4, hard chrome plating (film thickness 30 μm) as comparative example 6, TiN (film thickness 5 μm) made by ion plating as comparative example 7 (film thickness 5 μm), CrN made by IP (
1 真空処理室
2 真空ポンプ
3 回転テーブル
4 被処理金型
5 治具
6 クロムターゲット
7 スパッタ電源
8 直流のバイアス電源
9 ガス導入パイプ
10 テストピン
11 Vブロック
12 駆動機
13 シアーピン
DESCRIPTION OF SYMBOLS 1
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JP2007063673A JP2007063673A (en) | 2007-03-15 |
JP4877502B2 true JP4877502B2 (en) | 2012-02-15 |
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JP2006281965A Expired - Lifetime JP4877502B2 (en) | 1997-11-06 | 2006-10-16 | Nitrogen-containing Cr coating and mechanical member having this coating |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010163694A (en) * | 1997-11-06 | 2010-07-29 | Dowa Holdings Co Ltd | NITROGEN-CONTAINING Cr FILM, AND MACHINE MEMBER HAVING THE FILM |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62188856A (en) * | 1986-02-13 | 1987-08-18 | Riken Corp | Piston ring |
JPH0765543B2 (en) * | 1986-03-29 | 1995-07-19 | 株式会社リケン | piston ring |
JP2633623B2 (en) * | 1988-05-16 | 1997-07-23 | 株式会社神戸製鋼所 | Wear-resistant and highly lubricated composite members |
JP2500147B2 (en) * | 1993-11-12 | 1996-05-29 | 株式会社リケン | piston ring |
JP3751330B2 (en) * | 1995-02-17 | 2006-03-01 | 日本ピストンリング株式会社 | Piston ring for internal combustion engine |
JP3408366B2 (en) * | 1995-09-28 | 2003-05-19 | 日本ピストンリング株式会社 | Sliding member for compressor |
JP3228116B2 (en) * | 1996-01-29 | 2001-11-12 | 帝国ピストンリング株式会社 | Combination oil ring |
-
2006
- 2006-10-16 JP JP2006281965A patent/JP4877502B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010163694A (en) * | 1997-11-06 | 2010-07-29 | Dowa Holdings Co Ltd | NITROGEN-CONTAINING Cr FILM, AND MACHINE MEMBER HAVING THE FILM |
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