JP4855356B2 - Sealed structure - Google Patents

Sealed structure Download PDF

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JP4855356B2
JP4855356B2 JP2007190969A JP2007190969A JP4855356B2 JP 4855356 B2 JP4855356 B2 JP 4855356B2 JP 2007190969 A JP2007190969 A JP 2007190969A JP 2007190969 A JP2007190969 A JP 2007190969A JP 4855356 B2 JP4855356 B2 JP 4855356B2
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metal
flat surface
seal
surface portion
metal flat
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JP2009024838A (en
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聡 藤堂
隆広 假屋
毅 池田
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Mitsubishi Cable Industries Ltd
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Mitsubishi Cable Industries Ltd
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Priority to TW97127690A priority patent/TW200918792A/en
Priority to PCT/JP2008/001949 priority patent/WO2009013894A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
    • F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Glass Compositions (AREA)

Description

本発明は密封構造体に関する。   The present invention relates to a sealing structure.

半導体製造装置や液晶製造装置に於て、石英やセラミックと、ステンレス鋼等の金属材とが組み合わせて用いられる箇所があり、このような箇所の密封構造には、従来からゴムシールが多く使用されている。
その理由は、石英やセラミックは割れ易い（脆い）ため、弾性変形しやすいゴム材質が好適なものとして選定されていた。 In semiconductor manufacturing equipment and liquid crystal manufacturing equipment, there are places where quartz, ceramics, and metal materials such as stainless steel are used in combination, and rubber seals have often been used for the sealing structure of such places. Yes.
The reason is that quartz or ceramic is easily broken (brittle), and therefore, a rubber material that is easily elastically deformed has been selected as a suitable material.

しかしながら、近年の半導体や液晶の製造装置に於ては、高精度化・高機能化されつつあり、従来のゴムシールでは、ガス透過性、耐熱性、耐プラズマ性、耐ラジカル性及び寿命の面で、対応不可能になってきている。
そこで、これらの特性に優れた材質として金属を用いたメタル（金属）シールが提案されている（例えば、特許文献１参照）。
特開２００２−３１７８８９号公報 However, in recent semiconductor and liquid crystal manufacturing apparatuses, high precision and high functionality are being achieved, and conventional rubber seals are in terms of gas permeability, heat resistance, plasma resistance, radical resistance and life. It is becoming impossible to respond.
Therefore, a metal seal using metal as a material excellent in these characteristics has been proposed (for example, see Patent Document 1).
JP 2002-317889 A

ところで、上述のメタル（金属）シールを用いた密封構造体では、メタルシールはゴムシールと比べて相手面とのなじみ性が小さく、低線膨張係数の石英フランジと、それよりも線膨張係数が大きい（高い）金属製フランジの間に、メタルシールを介装して密封する場合、ヒートサイクル等の熱変形や、ボルト等の締付外力と歪及びその変動によって、石英フランジが割れるという問題がある。さらに、上記特許文献１のものでは、比較的小径の管継手の部位に適用されているが、図５に例示するような大型の石英（又はセラミック）の板状脆性部材40では、熱変形（熱歪）、部品寸法誤差による歪、ボルト締付力等による外力歪等も過大となって、割れる危険性は一層高まる。 By the way, in the sealing structure using the above-mentioned metal (metal) seal, the metal seal is less compatible with the mating surface than the rubber seal, and has a low linear expansion coefficient quartz flange and a larger linear expansion coefficient than that. When sealing with a metal seal between (high) metal flanges, there is a problem that the quartz flange breaks due to thermal deformation such as heat cycle, tightening external force and strain such as bolts, and fluctuations. . Furthermore, in the thing of the said patent document 1, although it applies to the site | part of a comparatively small diameter pipe joint, in the large-sized quartz (or ceramic) plate-shaped brittle member 40 which is illustrated in FIG. Thermal distortion), distortion due to component dimensional errors, external force distortion due to bolt tightening force, etc. are excessive, and the risk of cracking is further increased.

そこで、本発明は、半導体や液晶の製造装置に於て用いられる石英（又はセラミック）と金属という線膨張係数が相違する２部材間の密封性（シール性）に優れ、特に、ヒートサイクルを繰り返しても高いシール性能を維持できて、かつ、石英（又はセラミック）から成る相手部材が割れることがない寿命の長い密封構造体を提供することを目的とする。   Therefore, the present invention is excellent in sealing (sealability) between two members having different linear expansion coefficients, such as quartz (or ceramic) and metal, which are used in semiconductor and liquid crystal manufacturing apparatuses, and in particular, repeats a heat cycle. It is an object of the present invention to provide a sealed structure that can maintain high sealing performance and has a long life without causing a counterpart member made of quartz (or ceramic) to break.

上記目的を達成するため、本発明は、低線膨張係数の脆性部材の被密封用外縁部を、上記低線膨張係数よりも大きい線膨張係数の第１金属平坦面部・第２金属平坦面部にて、挾着保持すると共に、密封空間を区画形成する上記第１金属平坦面部と上記外縁部の一面の間に介設したメインシールと、相対的歪及び相対的形状寸法誤差を緩和するための緩衝材として上記第２金属平坦面部と上記外縁部の他面の間に介設した副シールとによって、上記脆性部材を上記第１金属平坦面部・第２金属平坦面部から弾発的遊離状態で挾着保持するように構成し、上記メインシール及び副シールは、金属を主材とした圧縮弾性変形可能なメタルシール単体である。
また、石英又はセラミックから成る脆性部材の被密封用外縁部を、第１金属平坦面部・第２金属平坦面部にて、挾着保持すると共に、密封空間を区画形成する上記第１金属平坦面部と上記外縁部の一面の間に介設したメインシールと、相対的歪及び相対的形状寸法誤差を緩和するための緩衝材として上記第２金属平坦面部と上記外縁部の他面の間に介設した副シールとによって、上記脆性部材を上記第１金属平坦面部・第２金属平坦面部から弾発的遊離状態で挾着保持するように構成し、上記メインシール及び副シールは、金属を主材とした圧縮弾性変形可能なメタルシール単体である。
In order to achieve the above object, according to the present invention, the sealing outer edge portion of the brittle member having a low linear expansion coefficient is used as the first metal flat surface portion and the second metal flat surface portion having a linear expansion coefficient larger than the low linear expansion coefficient. And a main seal interposed between the first metal flat surface portion and the one surface of the outer edge portion for partitioning and forming the sealed space, and for reducing relative distortion and relative shape error. The brittle member is elastically released from the first metal flat surface portion and the second metal flat surface portion by a secondary seal interposed between the second metal flat surface portion and the other surface of the outer edge portion as a cushioning material. The main seal and the sub-seal are single metal seals that can be compressed and elastically deformed with a metal as a main material .
In addition, the outer edge portion to be sealed of the brittle member made of quartz or ceramic is fixedly held by the first metal flat surface portion and the second metal flat surface portion, and the first metal flat surface portion that defines and forms a sealed space; A main seal interposed between one surface of the outer edge, and a buffer between the second metal flat surface and the other surface of the outer edge as a cushioning material for reducing relative strain and relative shape error. The brittle member is held in a resiliently released state from the first metal flat surface portion and the second metal flat surface portion by the sub seal, and the main seal and the sub seal are made of metal as a main material. This is a single metal seal that can be compressed and elastically deformed.

本発明によれば、次のような著大な効果を奏する。
石英やセラミックの脆性部材は、線膨張係数の相違する第１金属平坦面部・第２金属平坦面部の間に、弾発的遊離状態として挾着保持され、第１・第２金属平坦面部の熱変形（熱歪）、ボルト締付による外力変形、加工精度上の形状寸法誤差による影響等が、脆性部材に加わらず、ヒートサイクルを繰返しても、優れたシール性能を、長期間にわたって発揮する。しかも、脆性部材の割れを防止できる。これによって、半導体や液晶の製造装置の高性能化及び高機能化に貢献できる。さらに言えば、比較的簡素な構成にて、これまで困難とされていた脆性部材に対する金属シール（メタルシール）の使用が可能となった。 According to the present invention, the following remarkable effects can be obtained.
The brittle member of quartz or ceramic is held in a resiliently released state between the first metal flat surface portion and the second metal flat surface portion having different linear expansion coefficients, and the heat of the first and second metal flat surface portions is retained. Deformation (thermal strain), external force deformation due to bolt tightening, and influence of shape dimension error on processing accuracy are not applied to brittle members, and excellent sealing performance is exhibited over a long period of time even if the heat cycle is repeated. In addition, the brittle member can be prevented from cracking. This can contribute to higher performance and higher functionality of semiconductor and liquid crystal manufacturing apparatuses. Furthermore, it has become possible to use a metal seal (brittle seal) for a brittle member, which has been considered difficult until now, with a relatively simple configuration.

以下、図示の実施の形態に基づき本発明を詳説する。
図１と図４の実施の一形態に於て、１は石英（又はセラミック）から成る低線膨張係数の脆性部材である。この脆性部材１の被密封用外縁部（フランジ部）１Ａは、上記低線膨張係数よりも大きい線膨張係数の第１金属平坦面部11と第２金属平坦面部12にて、（間接的に）挾着保持されている。 Hereinafter, the present invention will be described in detail based on the illustrated embodiment.
1 and 4, reference numeral 1 denotes a brittle member having a low linear expansion coefficient made of quartz (or ceramic). The outer edge portion (flange portion) 1A to be sealed of the brittle member 1 is (indirectly) formed by a first metal flat surface portion 11 and a second metal flat surface portion 12 having a linear expansion coefficient larger than the low linear expansion coefficient. Retained.

そして、図１は簡略要部断面図、図４は要部断面図であって、本発明に於て、低線膨張係数とは、 0.5×10-６〜 9.2×10-６と定義する。なお、石英の線膨張係数は 0.5×10-６である。
図１又は図４の上方から平面的に見た場合、脆性部材１は円形、あるいは、矩形や正方形や六角形や楕円等、その形状はいろいろある。また、半導体製造装置や液晶製造装置に用いられる、負圧（又は正圧）の密封空間２を備える。 FIG. 1 is a simplified cross-sectional view of the main part, and FIG. 4 is a cross-sectional view of the main part. In the present invention, the low linear expansion coefficient is defined as 0.5 × 10 −6 to 9.2 × 10 −6 . Note that the coefficient of linear expansion of quartz is 0.5 × 10 −6 .
When viewed in plan from above in FIG. 1 or FIG. 4, the brittle member 1 has various shapes such as a circle, a rectangle, a square, a hexagon, an ellipse, and the like. Moreover, the negative pressure (or positive pressure) sealed space 2 used for a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus is provided.

さらに、具体的には、ケーシング本体６と、押え部材７と、締結用ボルト８と、を備え、図１では簡略化して倒立Ｌ字型横断面にて示す押え部材７と、第１金属平坦面部11の間に凹周溝３が形成され、全体が平板状脆性部材１が差込状態で第１・第２金属平坦面部11, 12間に挾着保持される。図４では、２枚のスペーサ４，５を介して平板円環状押え部材７がボルト８にてケーシング本体６に固着されている。   More specifically, the presser member 7 includes a casing body 6, a presser member 7, and a fastening bolt 8. The presser member 7 is simplified and shown in an inverted L-shaped cross section in FIG. A concave circumferential groove 3 is formed between the surface portions 11, and the whole plate-shaped brittle member 1 is clamped and held between the first and second metal flat surface portions 11 and 12 in the inserted state. In FIG. 4, the flat plate holding member 7 is fixed to the casing body 6 with bolts 8 via two spacers 4 and 5.

10はメインシールであり、ケーシング本体６の第１金属平坦面部11と、平板状脆性部材１の外縁部１Ａの一面（下面）13との間に、介設される。このメインシール10は密封空間２を区画形成するシールである。
このメインシール10は、図３（Ａ），（Ｂ）又は（Ｃ）に例示するような金属を主材とした圧縮弾性変形可能なメタルシールである。
20は、押え部材７の第２金属平坦面部12と、脆性部材１の外縁部１Ａの他面（上面）14との間に、介設される副シール（補助シール）であり、大気９側に配設されている。
この副シール（補助シール）20は、図３（Ａ），（Ｂ）又は（Ｃ）に例示するような金属を主材とした圧縮弾性変形可能なメタルシールである。
そして、図１と図４で明らかなように、脆性部材１は、第１・第２金属平坦面部11, 12から、（メインシール10と副シール20の弾発的支持力によって）弾発的遊離状態で、挾着保持されている。 A main seal 10 is interposed between the first metal flat surface portion 11 of the casing body 6 and one surface (lower surface) 13 of the outer edge portion 1A of the flat brittle member 1. The main seal 10 is a seal that defines the sealed space 2.
The main seal 10 is a metal seal that can be elastically deformed in a compressive manner using a metal as a main material as illustrated in FIG. 3 (A), (B), or (C).
Reference numeral 20 denotes a sub seal (auxiliary seal) interposed between the second metal flat surface portion 12 of the pressing member 7 and the other surface (upper surface) 14 of the outer edge portion 1A of the brittle member 1, and the atmosphere 9 side. It is arranged.
This sub seal (auxiliary seal) 20 is a metal seal capable of compressing and elastically deforming with a metal as a main material as exemplified in FIG. 3 (A), (B) or (C).
1 and FIG. 4, the brittle member 1 is elastic (from the elastic supporting force of the main seal 10 and the sub seal 20) from the first and second metal flat surface portions 11 and 12. In the free state, it is held tightly.

次に、図２は本発明の他の実施の形態を示す。脆性部材１は容器型（椀型）や浅皿型であり、被密封用外縁部（フランジ部）１Ａは、外鍔状に突出形成される。
図２では、上方の（平板状の）金属部材15と、脆性部材１の外縁部（フランジ部）１Ａの上面との間に、（前述の）メインシール10が介設され、このメインシール10は密封空間２を区画形成している。
また、図２では横断面Ｌ字型の金属製保持部材16と、上方の金属部材15によって凹周溝３が形成され、この凹周溝３内に、外縁部１Ａが差込まれて保持される。 Next, FIG. 2 shows another embodiment of the present invention. The brittle member 1 is a container type (saddle type) or a shallow dish type, and the outer edge portion (flange portion) 1A to be sealed is formed so as to project into an outer cage shape.
In FIG. 2, the main seal 10 (described above) is interposed between the upper (flat plate-shaped) metal member 15 and the upper surface of the outer edge portion (flange portion) 1 </ b> A of the brittle member 1. Defines a sealed space 2.
In FIG. 2, a concave circumferential groove 3 is formed by a metal holding member 16 having an L-shaped cross section and an upper metallic member 15, and the outer edge portion 1 </ b> A is inserted and held in the concave circumferential groove 3. The

第１金属平坦面部11は金属部材15の下面が相当し、メインシール10は、この第１金属平坦面部11と外縁部１Ａの上面との間に介設（介装）され、密封空間２を区画形成する。
第２金属平坦面部12は、横断面Ｌ字型の金属製保持部材16の内方突出片部16ａの上面が相当し、副シール20は、この第２金属平坦面部12と、外縁部１Ａの下面との間に介設（介装）され、大気側に対応する。なお、一点鎖線にてボルト８を示し、このボルト８の締結によって、金属部材15と保持部材16は連結一体化される。 The first metal flat surface portion 11 corresponds to the lower surface of the metal member 15, and the main seal 10 is interposed (intervened) between the first metal flat surface portion 11 and the upper surface of the outer edge portion 1A. Compartment formation.
The second metal flat surface portion 12 corresponds to the upper surface of the inwardly protruding piece portion 16a of the metal holding member 16 having an L-shaped cross section, and the secondary seal 20 includes the second metal flat surface portion 12 and the outer edge portion 1A. It is interposed (interposed) between the lower surface and corresponds to the atmosphere side. The bolt 8 is indicated by a one-dot chain line, and the metal member 15 and the holding member 16 are connected and integrated by fastening the bolt 8.

図２で明らかなように、脆性部材１は、第１・第２金属平坦面部11, 12から弾発的遊離状態で、挾着保持されている。
図２に示したメインシール10と副シール20も、金属を主材とした圧縮弾性変形可能なメタルシールであり、例えば、図３（Ａ）（Ｂ）（Ｃ）に例示する。 As is apparent from FIG. 2, the brittle member 1 is held tightly in a resiliently released state from the first and second metal flat surface portions 11 and 12.
The main seal 10 and the sub-seal 20 shown in FIG. 2 are also metal seals that can be compressed and elastically deformed using a metal as a main material, and are exemplified in FIGS. 3A, 3B, and 3C, for example.

図３（Ａ）では横断面Ｕ字状であって開口側の外側の小突条17, 17が、（図１，図２に示した）第１・第２金属平坦面部11, 12に接触して、矢印Ｆ，Ｆのように圧縮力を受け、この小突条17, 17が密封作用をなす。図３（Ｂ）では、弯曲Ｓ字（Ｚ字）型であり、（図１，図２に示した）第１・第２金属平坦面部11, 12から矢印Ｆ，Ｆのような力を受けると、矢印Ｍのように撚り変形し、その反対方向の弾発付勢力を生じて、弯曲凸部18, 18が弾発的に相手面に圧接して、密封作用をなす。
また、図３（Ｃ）では、横断面矩形状の基本部から半円山型突部19, 19が突出した形状である。第１・第２金属平坦面部11, 12から矢印Ｆ，Ｆのような力を受けると矢印Ｍのように撚り変形し、その反対方向の弾発付勢力を生じて、上記突部19, 19が弾発的に相手面に圧接して、密封作用をなす。 In FIG. 3 (A), the small protrusions 17 and 17 on the outer side of the U-shaped cross section are in contact with the first and second metal flat surface portions 11 and 12 (shown in FIGS. 1 and 2). Then, the small ridges 17 and 17 receive a compressive force as indicated by arrows F and F, and the small protrusions 17 and 17 perform a sealing action. In FIG. 3 (B), it is a curved S-shaped (Z-shaped) type, and receives forces such as arrows F and F from the first and second metal flat surface portions 11 and 12 (shown in FIGS. 1 and 2). Then, it is twisted and deformed as shown by an arrow M, and an elastic urging force in the opposite direction is generated, and the bent convex portions 18 and 18 are elastically pressed against the mating surface to form a sealing action.
Moreover, in FIG.3 (C), it is the shape where the semicircle mountain-shaped protrusions 19 and 19 protruded from the basic part of the cross section rectangular shape. When the force as indicated by the arrows F and F is received from the first and second metal flat surface portions 11 and 12, it is twisted and deformed as indicated by the arrow M, and an elastic urging force in the opposite direction is generated. Is elastically pressed against the mating surface and seals.

ところで、密封空間２内は、負圧の場合と、正圧の場合と、負圧・正圧の両方が生ずる場合が、考えられる。図１では、メインシール10をその開口側を大気（外部）側に向けて装着しているが、密封空間２が負圧の場合に好適である。また、副シール20は、メインシール10と同じ断面形状でも、異なる断面形状でも、自由である。つまり、例えば、図３（Ａ）と（Ａ）とを組み合わせる以外に、図３（Ａ）と（Ｂ）とを組み合わす等も自由である。但し、図３（Ａ）の小突条17, 図３（Ｂ）の弯曲凸部18, 又は、図３（Ｃ）の半円山型凸部19の外形形状及び外形寸法を、メインシール10と副シール20において、同一乃至略同一とするのが望ましい。（なお、略同一とは、図３に示すように各シール10, 20の幅寸法Ｗ以内の寸法差であることを言うと定義する。）言い換えると、両シール10, 20の平面的に見てシール線が一致するのが望ましい。また、副シール20は補助用であるので密封性能は余り必要がなく、特別な表面被覆や仕上げは省略できる。つまりメインシール10は、防触用、あるいは、なじみを与えるため等の表面被覆層として、銀，金，ニッケル，銅，インジウム等の各種メッキ層を形成したり、ＰＴＦＥ等の樹脂被覆層をコーティング形成しても良い。これに対し、副シール20は、密封空間２内の流体に直接的に触れないので、これ等を省略するのが、コスト面等から好ましい。   By the way, in the sealed space 2, it is conceivable that a negative pressure, a positive pressure, and both a negative pressure and a positive pressure are generated. In FIG. 1, the main seal 10 is mounted with the opening side facing the atmosphere (external) side, but this is suitable when the sealed space 2 is under negative pressure. Further, the secondary seal 20 is free to have the same cross-sectional shape as the main seal 10 or a different cross-sectional shape. That is, for example, in addition to combining FIGS. 3A and 3A, it is also free to combine FIGS. 3A and 3B. However, the external shape and external dimensions of the small protrusion 17 in FIG. 3 (A), the curved convex portion 18 in FIG. 3 (B), or the semicircular convex portion 19 in FIG. The sub-seal 20 is preferably the same or substantially the same. (Substantially the same is defined as a difference in dimension within the width W of the seals 10 and 20 as shown in FIG. 3.) In other words, the two seals 10 and 20 are viewed in plan. It is desirable that the seal lines match. Further, since the auxiliary seal 20 is for auxiliary use, the sealing performance is not so necessary, and special surface coating and finishing can be omitted. In other words, the main seal 10 is formed with various plating layers such as silver, gold, nickel, copper, and indium as a surface coating layer for anti-corrosion or imparting familiarity, or is coated with a resin coating layer such as PTFE. It may be formed. On the other hand, since the sub seal 20 does not directly contact the fluid in the sealed space 2, it is preferable from the viewpoint of cost and the like to omit them.

また、メインシール10，副シール20のベース金属材料としては、ステンレス鋼やニッケル合金や鉄合金（A286等）が、好適である。
なお、図３に例示した以外に、金属Ｏリングや金属Ｃリングや金属板製波形リング等を用いるも好ましい場合もある。 Further, as the base metal material of the main seal 10 and the sub seal 20, stainless steel, nickel alloy or iron alloy (A286 or the like) is suitable.
In addition to the examples shown in FIG. 3, it may be preferable to use a metal O-ring, a metal C-ring, a metal plate corrugated ring, or the like.

次に、図４と図６に示した本発明実施例と、図５と図６に示した従来例のシール性能の比較試験を行った。即ち、本発明実施例（図４）と従来例（図５）の相違点は、副シール20を有するか否かである。シール10, 20は図３（Ａ）で述べたと同じ形状のものであって、シール母材はSUS630とし、これに銀めっきを30〜50μｍ施した。かつ、脆性部材１は平板状の石英材を用いて、スペーサ５の厚みを変えて、従来例（図５）では押え部材７が直接的に脆性部材40を押圧して固定している。   Next, a comparative test of the sealing performance of the embodiment of the present invention shown in FIGS. 4 and 6 and the conventional example shown in FIGS. 5 and 6 was performed. That is, the difference between the embodiment of the present invention (FIG. 4) and the conventional example (FIG. 5) is whether or not the auxiliary seal 20 is provided. The seals 10 and 20 have the same shape as described in FIG. 3A, and the seal base material is SUS630, which is plated with silver at 30 to 50 μm. The brittle member 1 is made of a flat quartz material, and the thickness of the spacer 5 is changed. In the conventional example (FIG. 5), the presser member 7 directly presses and fixes the brittle member 40.

図５の従来例のシール性能と、図４の本発明の実施例（実施品）のシール性能を、比較して試験したところ、従来は１×10-９〜１×10-10 Pa・m3/sec程度のＨｅのリーク量であったが、本発明実施品では、Ｈｅのリーク量は、１×10-11 Pa・m3/secレベルに大きく改善できた。なお、密封空間は真空（負圧）に保つと共に 100℃のヒートサイクル試験中に計測した値である。 When the sealing performance of the conventional example of FIG. 5 and the sealing performance of the embodiment (exemplary product) of the present invention of FIG. 4 were compared and tested, the conventional sealing performance was 1 × 10 −9 to 1 × 10 −10 Pa · m. Although the He leak amount was about 3 / sec, the He leak amount was greatly improved to the level of 1 × 10 −11 Pa · m 3 / sec in the product of the present invention. The sealed space is a value measured during a heat cycle test at 100 ° C while maintaining a vacuum (negative pressure).

以上のように、図４と図５で大きなシール性能に差が出た理由について考察すると、以下の通りである。
（ｉ）押え部材７には元来の歪や形状寸法誤差が存在し、その場合、従来例（図５）では、その歪や形状寸法誤差が直接的に接触しているところの板状脆性部材40に影響し、この板状脆性部材40に歪（変形）を発生させ、メインシール10全周に不均等な当接を生じ、シール性能を悪化させていた。これに対し、本発明実施品（図４）では、押え部材７の元来持っている歪や形状寸法誤差が副シール（補助シール）20によって緩和（緩衝）され、メインシール10に対して全周に均等に脆性部材１が当接し、全体のシール性能が優秀な結果を示したと考えられる。 As described above, the reason why the large sealing performance is different between FIGS. 4 and 5 is as follows.
(I) The holding member 7 has an original strain and shape dimension error. In this case, in the conventional example (FIG. 5), the plate-like brittleness where the strain and shape dimension error are in direct contact. This affects the member 40, causes distortion (deformation) in the plate-like brittle member 40, causes uneven contact on the entire circumference of the main seal 10, and deteriorates the sealing performance. On the other hand, in the product of the present invention (FIG. 4), the inherent strain and shape error of the presser member 7 are alleviated (buffered) by the secondary seal (auxiliary seal) 20, and all the It is considered that the brittle member 1 abuts evenly around the circumference and the overall sealing performance is excellent.

（ii）脆性部材１，40は、石英又はセラミックであり、その線膨張係数が第１・第２金属平坦面部11, 12に比べて、低い（小さい）ため、低温と高温の温度変化（熱変化）に伴って、相対的に脆性部材40と第１・第２金属平坦面部11, 12の間に、歪や（相対）変動を発生し、しかも、ボルト８の対応位置とそこから離れた位置でも相対的に変形量が相違して歪や変動を発生し、従来例（図５）では、その歪や変動（形状寸法の変化）が、押え部材７と脆性部材40の間で相互に影響しあい、メインシール10と脆性部材40の一面40Ａとの間で生じ、シール性能を悪化させていた。これに対し、本発明実施品（図４）では、脆性部材１と第２金属平坦面部12との間に生ずる相対的歪や相対的形状寸法誤差が、巧妙に副シール（補助シール）20によって、緩和（緩衝）される。これによって、メインシール10が全周にわたって両相手面に対して均等に当接（接触）して、全体のシール性能が優秀な結果を示したものと考えられる。副シール（補助シール）20は、いわば緩衝材の役目を果していると言うこともできる。 (Ii) The brittle members 1 and 40 are made of quartz or ceramic, and their linear expansion coefficient is lower (smaller) than that of the first and second metal flat surface portions 11 and 12, so that the temperature change between the low and high temperatures (heat Change), a strain or a (relative) variation occurs between the brittle member 40 and the first and second metal flat surface portions 11 and 12, and the corresponding position of the bolt 8 is separated from the corresponding position. In the conventional example (FIG. 5), the deformation and variation (change in shape dimension) are caused between the presser member 7 and the brittle member 40. Influencing each other, it occurred between the main seal 10 and one surface 40A of the brittle member 40, deteriorating the sealing performance. On the other hand, in the product according to the present invention (FIG. 4), the relative strain and relative shape error generated between the brittle member 1 and the second metal flat surface portion 12 are subtly caused by the sub seal (auxiliary seal) 20. , Relaxed (buffered). Accordingly, it is considered that the main seal 10 abuts (contacts) evenly with both opposing surfaces over the entire circumference, and the overall sealing performance is excellent. It can be said that the secondary seal (auxiliary seal) 20 plays the role of a cushioning material.

以上述べたように、本願発明に係る密封構造体は、低線膨張係数の脆性部材１の被密封用外縁部１Ａを、上記低線膨張係数よりも大きい線膨張係数の第１金属平坦面部11・第２金属平坦面部12にて、挾着保持すると共に、密封空間２を区画形成する上記第１金属平坦面部11と上記外縁部１Ａの一面13の間に介設したメインシール10と、上記第２金属平坦面部12と上記外縁部１Ａの他面14の間に介設した副シール20とによって、上記脆性部材１を上記第１金属平坦面部11・第２金属平坦面部12から弾発的遊離状態で挾着保持するように構成したので、副シール20が緩衝材の役目を果して、形状寸法誤差による歪や、ヒートサイクル等による熱変形や熱歪が、脆性部材１へは、直接的に伝わらず、脆性部材１の割れを生じないと共に、高いシール性能を長時間にわたって維持できる。これに伴って、半導体や液晶等の製造装置に用いられている石英やセラミック等の脆性部材１の密封（シール）に、金属（メタル）シールの適用を実現できた。   As described above, in the sealing structure according to the present invention, the sealed outer edge portion 1A of the brittle member 1 having a low linear expansion coefficient is used for the first metal flat surface portion 11 having a linear expansion coefficient larger than the low linear expansion coefficient. A main seal 10 interposed between the first metal flat surface portion 11 and the one surface 13 of the outer edge portion 1A, which is held tightly on the second metal flat surface portion 12 and defines the sealed space 2; The brittle member 1 is elastically moved from the first metal flat surface portion 11 and the second metal flat surface portion 12 by the sub seal 20 interposed between the second metal flat surface portion 12 and the other surface 14 of the outer edge portion 1A. Since the secondary seal 20 serves as a cushioning material because it is held in a loose state, distortion due to shape dimensional error, thermal deformation or thermal strain due to a heat cycle, etc. is directly applied to the brittle member 1. In spite of this, the brittle member 1 does not crack and has high sealing performance. Can be maintained over time. Along with this, application of a metal (metal) seal to the sealing (sealing) of the brittle member 1 such as quartz or ceramic used in manufacturing apparatuses such as semiconductors and liquid crystals has been realized.

また、石英又はセラミックから成る脆性部材１の被密封用外縁部１Ａを、第１金属平坦面部11・第２金属平坦面部12にて、挾着保持すると共に、密封空間２を区画形成する上記第１金属平坦面部11と上記外縁部１Ａの一面13の間に介設したメインシール10と、上記第２金属平坦面部12と上記外縁部１Ａの他面14の間に介設した副シール20とによって、上記脆性部材１を上記第１金属平坦面部11・第２金属平坦面部12から弾発的遊離状態で挾着保持するように構成したので、副シール20が緩衝材の役目を果して、形状寸法誤差による歪や、ヒートサイクル等による熱変形や熱歪が、脆性部材１へは、直接的に伝わらず、脆性部材１の割れを生じないと共に、高いシール性能を長時間にわたって維持できる。これに伴って、半導体や液晶等の製造装置に用いられている石英やセラミック等の脆性部材１の密封（シール）に、金属（メタル）シールの適用を実現できた。   In addition, the outer edge portion 1A to be sealed of the brittle member 1 made of quartz or ceramic is fixedly held by the first metal flat surface portion 11 and the second metal flat surface portion 12 and the sealed space 2 is partitioned. A main seal 10 interposed between one metal flat surface portion 11 and one surface 13 of the outer edge portion 1A, and a secondary seal 20 interposed between the second metal flat surface portion 12 and the other surface 14 of the outer edge portion 1A; Thus, the brittle member 1 is configured to be held in a resiliently released state from the first metal flat surface portion 11 and the second metal flat surface portion 12, so that the secondary seal 20 serves as a cushioning material, Strain due to dimensional error, thermal deformation or thermal strain due to a heat cycle or the like is not directly transmitted to the brittle member 1, and the brittle member 1 is not cracked, and high sealing performance can be maintained for a long time. Along with this, application of a metal (metal) seal to the sealing (sealing) of the brittle member 1 such as quartz or ceramic used in manufacturing apparatuses such as semiconductors and liquid crystals has been realized.

また、上記メインシール10は表面被覆層を有するメタルシールから成り、上記副シール20は表面被覆層の省略されたメタルシールから成るので、全体のコストダウンを図り、かつ、外部（大気）側の副シール20を過剰品質とせずに済む。
また、上記メインシール10と上記副シール20の外形形状及び外形寸法を同一に設定したので、脆性部材１の両面の外形が同一の位置にて弾発的に保持されて、脆性部材１に曲げモーメントが作用せず、脆性部材１の耐久性、及び、メインシール10の耐久性に好影響を与える。 Further, since the main seal 10 is composed of a metal seal having a surface coating layer, and the sub seal 20 is composed of a metal seal in which the surface coating layer is omitted, the overall cost can be reduced and the outside (atmosphere) side can be reduced. The secondary seal 20 does not have to be excessive quality.
Further, since the outer shape and the outer dimensions of the main seal 10 and the sub seal 20 are set to be the same, the outer shapes of both surfaces of the brittle member 1 are elastically held at the same position and bent to the brittle member 1. The moment does not act, and the durability of the brittle member 1 and the durability of the main seal 10 are positively affected.

本発明の実施の一形態を示す簡略構成説明断面図である。It is a simplified configuration explanation sectional view showing one embodiment of the present invention. 他の実施の形態を示す簡略構成説明断面図である。It is simplified structure explanatory sectional drawing which shows other embodiment. メインシール（副シール）の各種の実施例を示す断面図である。It is sectional drawing which shows the various Example of a main seal (sub seal). 本発明の実施の一形態に対応する断面図であって、シール性能試験を行った装置の要部を示す断面図である。It is sectional drawing corresponding to one Embodiment of this invention, Comprising: It is sectional drawing which shows the principal part of the apparatus which performed the sealing performance test. 従来例（従来品）の一例を示す要部の断面図である。It is sectional drawing of the principal part which shows an example of a prior art example (conventional product). シール性能試験に用いたシールの説明図である。It is explanatory drawing of the seal | sticker used for the seal performance test.

符号の説明Explanation of symbols

１ 脆性部材
１Ａ 外縁部
２ 密封空間
10 メインシール
11 第１金属平坦面部
12 第２金属平坦面部
13 一面
14 他面
20 副シール 1 brittle member 1A outer edge 2 sealed space
10 Main seal
11 1st metal flat surface
12 2nd metal flat surface
13 One side
14 Other side
20 Secondary seal

Claims (2)

低線膨張係数の脆性部材（１）の被密封用外縁部（１Ａ）を、上記低線膨張係数よりも大きい線膨張係数の第１金属平坦面部（11）・第２金属平坦面部（12）にて、挾着保持すると共に、密封空間（２）を区画形成する上記第１金属平坦面部（11）と上記外縁部（１Ａ）の一面（13）の間に介設したメインシール（10）と、相対的歪及び相対的形状寸法誤差を緩和するための緩衝材として上記第２金属平坦面部（12）と上記外縁部（１Ａ）の他面（14）の間に介設した副シール（20）とによって、上記脆性部材（１）を上記第１金属平坦面部（11）・第２金属平坦面部（12）から弾発的遊離状態で挾着保持するように構成し、
上記メインシール（10）及び副シール（20）は、金属を主材とした圧縮弾性変形可能なメタルシール単体であることを特徴とする密封構造体。 The outer edge portion (1A) to be sealed of the brittle member (1) having a low linear expansion coefficient is composed of a first metal flat surface portion (11) and a second metal flat surface portion (12) having a linear expansion coefficient larger than the low linear expansion coefficient. The main seal (10) interposed between the first metal flat surface portion (11) and the one surface (13) of the outer edge portion (1A) that holds and holds the sealing space (2). And a secondary seal (between the second metal flat surface portion (12) and the other surface (14) of the outer edge portion (1A) as a cushioning material for alleviating relative strain and relative dimensional error. 20) and configured to hold the brittle member (1) in a resiliently released state from the first metal flat surface portion (11) and the second metal flat surface portion (12).
The sealing structure according to claim 1, wherein the main seal (10) and the sub-seal (20) are metal seals that are made of metal as a main material and are capable of compressive and elastic deformation . 石英又はセラミックから成る脆性部材（１）の被密封用外縁部（１Ａ）を、第１金属平坦面部（11）・第２金属平坦面部（12）にて、挾着保持すると共に、密封空間（２）を区画形成する上記第１金属平坦面部（11）と上記外縁部（１Ａ）の一面（13）の間に介設したメインシール（10）と、相対的歪及び相対的形状寸法誤差を緩和するための緩衝材として上記第２金属平坦面部（12）と上記外縁部（１Ａ）の他面（14）の間に介設した副シール（20）とによって、上記脆性部材（１）を上記第１金属平坦面部（11）・第２金属平坦面部（12）から弾発的遊離状態で挾着保持するように構成し、
上記メインシール（10）及び副シール（20）は、金属を主材とした圧縮弾性変形可能なメタルシール単体であることを特徴とする密封構造体。 The outer edge portion (1A) to be sealed of the brittle member (1) made of quartz or ceramic is adhered and held by the first metal flat surface portion (11) and the second metal flat surface portion (12), and the sealed space ( 2) The main seal (10) interposed between the first flat metal surface portion (11) and the one surface (13) of the outer edge portion (1A), and the relative distortion and relative shape error. The brittle member (1) is provided by a secondary seal (20) interposed between the second metal flat surface portion (12) and the other surface (14) of the outer edge portion (1A) as a cushioning material for relaxation. The first metal flat surface portion (11) and the second metal flat surface portion (12) are configured to be held in a resiliently released state,
The sealing structure according to claim 1, wherein the main seal (10) and the sub-seal (20) are metal seals that are made of metal as a main material and are capable of compressive and elastic deformation .
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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629549B2 (en) * 1985-07-23 1994-04-20 ヤマハ発動機株式会社 Exhaust pipe connecting device for engine
JPS6250374A (en) * 1985-08-30 1987-03-05 Mitsui Toatsu Chem Inc Heat-resistant adhesive
JPS6250374U (en) * 1985-09-18 1987-03-28
JPH01133589U (en) * 1988-03-08 1989-09-12
JPH05248542A (en) * 1991-12-30 1993-09-24 Japan Atom Energy Res Inst Vacuum seal structure using metal gasket, vacuum sealing method, metal gasket for vacuum seal and vacuum flange for metal gasket
JP4037647B2 (en) * 2001-12-25 2008-01-23 三菱電線工業株式会社 Jacket seal
JP2006153062A (en) * 2004-11-25 2006-06-15 Mitsubishi Cable Ind Ltd Metallic seal material

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