JP4854357B2 - Transfer apparatus and transfer method - Google Patents

Description

  The present invention relates to a transfer apparatus and transfer method for transferring a fine transfer pattern formed on a transfer mold to a substrate, and more particularly to a device for moving and positioning the substrate with respect to the mold during transfer.

  In recent years, a mold (template, stamper) is formed by forming an ultrafine transfer pattern on a quartz substrate or the like by an electron beam drawing method, and the resist film formed on the surface of the transfer substrate as a molded product (substrate) Research and development has been conducted on nanoimprint technology for pressing a mold with a predetermined pressure to transfer a transfer pattern formed on the mold (see Non-Patent Document 1).

  Further, as a device for executing the nanoimprint, for example, a transfer device described in Patent Document 1 is known. In this transfer device, an X stage and a Y stage are provided at the lower horizontal portion of an L-shaped frame, and a substrate table as a support portion for a molded product is mounted thereon, and an upper and lower direction is placed above the vertical portion of the frame. A mold support (mold holder) is provided via a moving mechanism. The mold holder holds a mold on which a fine transfer pattern for transfer is formed.

Then, the substrate table is appropriately positioned in the X-axis direction and the Y-axis direction using the X stage and the Y stage, and the mold transfer body is lowered and the substrate is pressed with the mold, thereby transferring the fine transfer pattern to the substrate. It is like that.
JP 2004-34300 A Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology

  By the way, in the conventional transfer apparatus described in Patent Document 1, when the mold holder is lowered and the substrate is pressed by the mold, the position of the substrate table may be slightly shifted due to a slight accuracy error of the transfer apparatus. is there. For example, the surface of the mold that presses the substrate is ideally perpendicular to the direction of movement of the mold holder, but is actually slightly inclined. When the substrate is pressed in such a slightly tilted state, a small component force in the X-axis direction or the Y-axis direction is generated, and the position of the substrate table may be slightly shifted by this component force.

  Therefore, in the conventional transfer apparatus described in Patent Document 1, the displacement is prevented by using the holding force of the magnet, but the configuration is complicated by using the magnet. In a conventional transfer apparatus that does not use a magnet, the position of the substrate table is held using a servo motor that drives the substrate table. Therefore, there is a problem that a large amount of current flows through the servomotor during transfer, and the servomotor, the X stage, and the Y stage tend to generate heat.

  The present invention has been made in view of the above problems, and a fine transfer formed on the mold by bringing the mold holder holding the mold close to the substrate table holding and positioning the substrate. It is an object of the present invention to provide a transfer apparatus and a transfer method for transferring a pattern onto the substrate, which can suppress heat generation due to positioning of the substrate table during the transfer.

  According to the first aspect of the present invention, there is provided a mold holding body capable of holding a transfer mold facing a substrate table, and relatively movable in a direction approaching and separating from the substrate table, and a substrate. The substrate table that can be held opposite to the mold holder and that is movable relative to the mold holder in a direction intersecting the approaching / separating direction of the mold holder, and the mold holder Mold holding body driving means for relatively moving a body in the approaching / separating direction, substrate table driving means for relatively moving the substrate table in the intersecting direction, and the substrate table driving means When the mold holder is brought close to the substrate table moved and positioned at a predetermined position and the substrate is pressed by the mold, the substrate table intersects from the predetermined position by the pressing force. To be displaced in direction, a transfer device and a control means for controlling the substrate table drive means in order to reduce the holding force by the substrate table drive means.

  According to a second aspect of the present invention, there is provided a mold holding body capable of holding a transfer mold facing a substrate table, and relatively movable in a direction approaching or moving away from the substrate table, and a substrate. The substrate table that can be held opposite to the mold holder and that is movable relative to the mold holder in a direction intersecting the approaching / separating direction of the mold holder, and the mold holder A mold holding body driving means for relatively moving the body in the approaching / separating direction, a servo motor for relatively moving the substrate table in the intersecting direction, and a relative movement by the servo motor The substrate table position detecting means for detecting the position of the moving substrate table and the servo motor can relatively move the substrate table to a predetermined position and move to the predetermined position. The substrate table position detecting means detects the position of the substrate table that changes when the mold holder is relatively approached to the placed substrate table and the substrate is pressed with the mold, and this detection is performed. And a control unit that controls the servo motor to relatively move and position the substrate table so that the value becomes a target value.

  According to a third aspect of the present invention, in the transfer device according to the second aspect of the present invention, the transfer device includes a pressing force detecting unit that detects a pressing force when pressing the substrate with the mold, and the control unit includes the pressing force. It is a transfer device which is a means for controlling the servo motor in accordance with the detection result of the detection means and positioning the relative movement of the substrate table.

  According to a fourth aspect of the present invention, there is provided a step of holding a transfer mold facing a substrate table by a mold holder, a step of holding a substrate opposite the mold holder and holding the substrate by the substrate table, and the mold Positioning the substrate table at a predetermined position with respect to the mold holder using a servo motor to transfer the transfer pattern of the mold to a predetermined position of the substrate; and And a step of pressing the substrate with the mold to transfer it to a predetermined position, and the holding method of the substrate table by the servo motor is reduced when the pressing is performed.

  According to the present invention, a transfer apparatus for transferring a fine transfer pattern formed on the mold to the substrate by bringing the mold holder holding the mold close to a substrate table that holds and positions the substrate, and In the transfer method, there is an effect that heat generation due to positioning of the substrate table can be suppressed during the transfer.

  FIG. 1 is a front view showing a schematic configuration of a transfer device 1 according to an embodiment of the present invention, and FIG. 2 is a side view showing a schematic configuration of the transfer device 1, and is a view taken in the direction of arrow II in FIG. .

  The transfer device 1 includes a mold holder 7 and a substrate table 15. The mold holder 7 can hold a transfer mold (hereinafter sometimes simply referred to as “mold”) M so as to face the substrate table 15. The transfer mold M is formed in a flat plate shape, and a fine transfer pattern is formed on one surface in the thickness direction. The mold M is detachably held on the mold holding body 7 so that the surface on which the fine transfer pattern is formed faces the plane of the upper surface of the substrate table 15 in parallel. It has become. The mold holder 7 is relatively moved in a direction approaching / separating from the substrate table 15 (for example, a direction perpendicular to the plane of the upper surface of the substrate table 15 or the surface of the mold M on which a fine transfer pattern is formed). It is free to move.

  The substrate table 15 can detachably hold a substrate (substrate that is a material to be molded) W facing the mold holder 7. The substrate table 15 has a direction intersecting with the approaching / separating direction of the mold holder 7 (for example, an orthogonal direction; a plane of the upper surface of the substrate table 15 or a surface of the mold M on which a fine transfer pattern is formed. It is movable relative to the mold holder 7 in the unfolding direction).

  The transfer apparatus 1 includes a mold holder driving means 21 that relatively moves the mold holder 7 in the approaching / separating direction and a substrate table 15 relative to the mold holder 7 in the intersecting direction. Servo motors 13 and 19 are provided.

  Further, the transfer device 1 includes a substrate table position detecting means (not shown) for detecting the position of the substrate table 15 that is relatively moved by the servo motors 13 and 19, and a control means (control device) 23 (see FIG. 3). ) And a pressing force detecting means (for example, load cell 25) for detecting a pressing force when pressing the substrate W with the mold M.

  The control device 23 feeds back the detection result of the substrate table position detection means, and moves and positions the substrate table 15 relatively to a predetermined position by the servo motors 13 and 19.

  Further, the control device 23 changes the position of the substrate table 15 that changes when the mold holder 7 is relatively approached to the substrate table 15 moved and positioned to the predetermined position and the substrate W is pressed with the mold M, The detection is performed by the substrate table position detecting means, and the servo motors 13 and 19 are controlled so that the detected value becomes a target value to relatively move and position the substrate table 15.

  Further, the control device 23 controls the servo motors 13 and 19 in accordance with the detection result of the load cell 25, and performs relative movement positioning of the substrate table 15.

  The transfer device 1 will be described in more detail.

  Hereinafter, for convenience of explanation, one horizontal direction is defined as an X-axis direction, another horizontal direction that is perpendicular to the X-axis direction is defined as a Y-axis direction, and the X-axis direction and the Y-axis direction. A direction perpendicular to (vertical direction; vertical direction) is taken as the Z-axis direction. The servo motor in this specification includes a linear motor in this category in addition to a motor whose output shaft rotates, such as an AC servo motor or a DC servo motor.

  The transfer device 1 includes a base member 3. The mold holder 7 is supported above the base member 3 by, for example, a linear guide bearing (not shown), and is movable in the Z-axis direction with respect to the base member 3. The mold holder 7 can be moved in the Z-axis direction by an AC servomotor (or DC servomotor) 5 and a ball screw 6. Instead of using a DC servo motor or AC servo motor and a ball screw, the mold holder 7 may be moved using a linear motor. In addition, the mold M for transfer is arranged and fixed on the lower surface of the mold holder 7.

  A plate-like substrate table support member 9 is provided below the base member 3. The substrate table support member 9 is supported by, for example, a linear guide bearing 11 and is movable in the Y-axis direction with respect to the base member 3. The substrate table support member 9 can be moved in the Y-axis direction by a linear motor 13 (Y-axis linear motor; an AC servomotor or the like may be used) 13. The stator of the Y-axis linear motor 13 is provided integrally with the base member 3, and the mover of the Y-axis linear motor is provided integrally with the substrate table support member 9.

  A plate-like substrate table 15 is provided above the substrate table support member 9 and below the mold holder 7. The substrate table 15 is supported by, for example, a linear guide bearing 17 and is movable in the X-axis direction with respect to the substrate table support member 9. The substrate table 15 can be moved in the X-axis direction by an X-axis linear motor (AC servo motor or the like may be used) 19. The stator of the X-axis linear motor 19 is integrally provided on the substrate table support member 9, and the mover of the X-axis linear motor 19 is integrally provided on the substrate table 15.

  Between the base member 3 and the substrate table support member 9, a Y-axis linear scale for detecting the position of the substrate table support member 9 in the Y-axis direction with respect to the base member 3 (in the example of the substrate table position detection means). A linear scale (not shown) is provided. That is, the Y-axis linear scale is a relative scale between the member where the stator of the Y-axis linear motor 13 is installed and the member where the mover of the Y-axis linear motor 13 is installed. It can be said that it is a device that detects a correct position. Similarly, an X-axis linear scale (substrate table) for detecting the position of the substrate table 15 in the X-axis direction with respect to the substrate table support member 9 is provided between the substrate table support member 9 and the substrate table 15. A linear scale (not shown) as an example of the position detecting means is provided. A Z-axis linear scale for detecting the position of the mold holder 7 in the Z-axis direction with respect to the base member 3 may be provided between the base member 3 and the mold holder 7.

  Above the base member 3, as described above, the load cell 25 which is an example of the pressing force detecting means for detecting the pressing force when pressing the substrate W with the mold M is provided.

  Next, the control means (control device) 23 and the like will be described.

  FIG. 3 is a block diagram illustrating a schematic configuration of the control device 23, and FIG. 4 is a block diagram illustrating a schematic configuration of the servo driver 27.

  As shown in FIG. 3, the controller 23 of the transfer apparatus 1 includes a controller unit 29, and an HMI (Human Machine Interface) 31 is connected to the controller unit 29. A program for this purpose can be input via a touch switch or the like, and the progress of the transfer can be indicated to the operator via an LCD (Liquid Crystal Display).

  The pressing force detected by the load cell 25 is input to the controller unit 29. Also, under the control of the controller unit 29, the servo motors 5, 13, 19 are driven by the servo drivers 27 (27A, 27B, 27C). The movement speed and position of the substrate table 15 and the like by the servo motors 5, 13, and 19 are fed back using a linear scale.

  As shown in FIG. 4, the servo driver 27 detects the servo amplifier 33, the part 35 for limiting the torque of the servo motor by detecting and feeding back the current flowing through the servo motor, and the speed of the servo motor (for example, the substrate). The position of the substrate table 15 is detected and fed back, and the position 37 of the servo motor speed control and the movement distance of the servo motor (for example, the position of the substrate table 15) are detected and fed back. And a position control unit 39 to be controlled.

  Then, the control device 23 feeds back the detection results of the X-axis linear scale and the Y-axis linear scale, thereby appropriately driving the linear motors 13 and 19, and transferring the fine transfer pattern of the mold M to the substrate W. The substrate table 15 is positioned at a predetermined position for transferring to the substrate.

  Further, the control device 23 moves the position of the substrate table 15 (X) when the mold holder 7 is brought close to the substrate table 15 moved and positioned at a predetermined position for transfer and the substrate W is pressed by the mold M (X A position slightly shifted in the axial direction and the Y-axis direction) is detected by the linear scales, and the linear motors 13 and 19 are controlled to move and position the substrate table 15 so that the detected values become target values. It has become.

  Further, as described above, when the load cell 25 detects a pressing force of a predetermined value (for example, a pressing force larger than “0”), the control device 23 sets the position of the substrate table 15 slightly changed as described above. The substrate table 15 is moved and positioned by controlling each of the linear motors 13 and 19 so that the detected value becomes a target value.

  This will be described in more detail with reference to FIG. 5 (a diagram showing the behavior of the substrate table 15 when transferring to the substrate W).

  In this description, the behavior in the X-axis direction of the substrate table 15 will be described as an example for easy understanding, but the behavior in the Y-axis direction can be similarly understood.

  First, in the state shown in FIG. 5A, it is assumed that the substrate table 15 is positioned at a predetermined position for transferring the fine transfer pattern of the mold M to the substrate W. In this state, it is assumed that the predetermined position of the substrate table 15 is held by the linear motor 19.

  From the state shown in FIG. 5A, when the mold holder 7 is lowered (approached to the substrate table 15) and the mold M comes into surface contact with the substrate W, the substrate table 15 (substrate W (substrate W ) Is subjected to a pressing force F.

  The pressing force F is a small value F1 in a state immediately after the start of pressing (the state shown in FIG. 5B), but gradually increases with the passage of time thereafter (for example, increases substantially in proportion to the elapsed time). To go). Then, as shown in FIG. 5C, the maximum value Ff is eventually reached. The maximum value Ff is maintained for a predetermined time after reaching the maximum value Ff, and while the maximum value Ff is maintained, a layer to be molded (consisting of an ultraviolet curable resin or a thermosetting resin) provided on the substrate W. Curing of the molding layer).

  After the maximum value Ff is maintained for a predetermined time, when the mold holder 7 is raised and the mold M is separated from the substrate W, the pressing force F becomes “0”.

  By the way, as described above, the substrate table 15 starts to move in the X-axis direction when a pressing force in the Z-axis direction is applied to the substrate table 15 at the time of transfer due to a slight loss of accuracy of the transfer device 1. That is, at the time of transfer, the position of the substrate table 15 is shifted by a very small distance ΔX together with the mold holder 7 by the pressing force F. The deviation amount ΔX increases, for example, almost in proportion to the value of the pressing force F.

  That is, as shown in FIG. 5B, when the value of the pressing force F is small (in the case of F1), the deviation amount (displacement amount) ΔX is as small as ΔX1, but as shown in FIG. 5C. In addition, when the value of the pressing force F is large (for example, at the maximum value Ff), the deviation amount ΔX becomes the maximum value ΔXf, which is larger than ΔX1.

  The control device 23 reads the deviation amount ΔX with the X-axis linear scale, and uses the deviation amount ΔX as an initial value (a predetermined position for transferring the fine transfer pattern of the mold M to the substrate W; for transfer). The position immediately before the start of pressing is added to X0. Then, the substrate table 15 is moved and positioned by the linear motor 19 with the position of “X0 + ΔX” as a new positioning target value. More specifically, for example, the target value is corrected many times at short time intervals from when the pressing to the substrate W by the mold M is started until the pressing force reaches the maximum value Ff. 15 positioning is performed.

  Similarly, when the pressing force F is the maximum value Ff, the target value is corrected.

  Further, when the mold M leaves the substrate W after the maximum value Ff is maintained for a predetermined time, the pressing force F applied to the substrate table 15 decreases from the maximum value Ff to “0”. With this decrease, the substrate table 15 that has been displaced by ΔXf tries to return to a position (position X0) where the displacement ΔXf becomes “0”, for example, due to the restoring force of the substrate table 15, etc. Similarly, when the pressing force F decreases from the maximum value Ff to “0”, the substrate table 15 is moved and positioned by correcting the target value in the same manner.

  That is, during the transfer, the target value is corrected and the substrate table 15 is moved and positioned.

  By the way, the correction of the target value described above is started when the load cell 25 detects that the pressing force of the substrate M by the mold M has exceeded “0” even a little, and when the pressing force F becomes “0”. However, this is not necessarily the case, and the detection value of the load cell 25 is a predetermined value (a predetermined value larger than “0”; for example, 10% of the maximum pressing force). When it exceeds, the correction of the target value described above is started, and the detection value of the load cell 25 is a predetermined value (a predetermined value larger than “0”; it may be the same as or different from the value at the start) When the value is smaller than (good), the above-described correction of the target value may be terminated.

  The predetermined value of the load cell 25 is set in a control unit memory (not shown), and is protected by a password, for example, so that a normal operator cannot change it. It has become.

  Next, the operation of the transfer device 1 will be described.

  First, as an initial state, the mold holder 7 is positioned above and away from the substrate table 15, the mold M is installed on the mold holder 7, and the substrate W is installed on the substrate table 15. It is assumed that the substrate table 15 is positioned at a predetermined position for (see FIG. 5A).

  In this initial state, the mold holder 7 is lowered to press the substrate W with the mold M, and after this pressing, the mold holder 7 is lifted to separate the mold M from the substrate W to perform transfer to the substrate W. . When the transfer to the substrate W is performed in this way, a change in the position of the substrate table 15 is detected, and the substrate table 15 is moved and positioned using the detected value as a target value (FIGS. 5B and 5C). )reference).

  When the transfer is completed, the transferred substrate W is replaced with the next substrate W, the substrate table 15 is positioned at a predetermined position, and the transfer to the next substrate W is similarly performed.

  According to the transfer apparatus 1, when transferring, the change in the position of the substrate table 15 is detected, and the servo motors 13 and 19 are controlled to move and position the substrate table 15 so that the detected value becomes a target value. That is, since the substrate table 15 is not forcibly held (restrained) during transfer, the current flowing through the linear motors 13 and 19 is small. Therefore, when transferring, heat generation from the linear motors 13 and 19 due to the positioning of the substrate table 15 can be suppressed. Further, since no magnet or the like is used, the configuration of the transfer device 1 is simplified.

  In the transfer apparatus 1, when the mold M is relatively separated from the substrate W after the substrate W is pressed with the mold M, the control device 23 maintains the position of the substrate table 15 before the separation (for example, immediately before). The servo motors 13 and 19 may be controlled by the above.

  Further, instead of the load cell 25, the position of the substrate table 15 may be controlled using a timer or depending on the position of the mold holder 7.

  For example, the correction of the target value is started at a time T1 after a predetermined time has elapsed from the time when the mold holder 7 descends (the movement start time of the mold holder 7 in the direction of the substrate table 15) T0. You may make it complete | finish the correction | amendment of the said target value in the time T2 after predetermined time progress from start time T1.

  In the above description, when the pressing force by the mold M gradually increases with time and reaches a predetermined value, this value is maintained for a predetermined time, and thereafter the pressing force is removed as an example. However, the pressing force does not necessarily change in this way. The value of the pressing force may be increased or decreased with the passage of time. When the pressing force increases or decreases in this way, the positional deviation amount ΔX shown in FIG. 5 also increases or decreases. 5B and 5C, the positional deviation amount ΔX is drawn larger than that of the mold holder 7 and the substrate table 15. This is because the deviation amount ΔX is exaggerated. . The actual deviation amount Δx is on the order of submicrons. Therefore, in FIGS. 5B and 5C, a part of the right side of the mold M is deviated from the substrate W, but in practice, it is not deviated in this way.

  Furthermore, in the transfer apparatus 1, the substrate table 15 is moved and positioned in the X-axis direction and the Y-axis direction, but either one of the positioning mechanisms may be deleted.

  Further, the substrate table 15 may be moved and positioned in the X-axis direction, and the substrate table 15 may be rotated and positioned around an axis extending in the Z-axis direction. Further, the substrate table 15 is rotated and positioned around the first axis extending in the Z-axis direction, and the substrate table 15 is positioned in the second axis extending in the Z-axis direction (from the first axis in the horizontal direction). You may make it rotationally position centering on the axis | shaft which is distant.

  In the transfer device 1, the mold holder 7 and the substrate table 15 may be interchanged. That is, the substrate table 15 is provided above the base member 3 so as to be movable in the Z-axis direction, the mold holder 7 is provided below the base member 3, and the mold holder 7 is moved and positioned in the X-axis direction and the Y-axis direction. You may do it.

  Further, in the transfer apparatus 1, the substrate table 15 provided below the base member 3 is provided so as to be movable in the Z-axis direction, and the mold holder 7 provided above the base member 3 is provided in the X-axis direction Y. It may be possible to move and position freely in the axial direction.

  In the transfer apparatus 1, the mold holder 7 may be provided integrally with the base member 3, and the substrate table 15 may be provided movably in the Z-axis direction and movably positioned in the X-axis direction and Y-axis direction. Conversely, the substrate table 15 may be provided integrally with the base member 3, and the mold holder 7 may be provided so as to be movable in the Z-axis direction and movable and positioned in the X-axis direction and the Y-axis direction.

  Further, in the transfer apparatus 1, the mold holder 7 is provided so as to be movable in the Z-axis direction and is movable and positioned in the X-axis direction and the Y-axis direction, and the substrate table 15 is provided so as to be movable in the Z-axis direction. It may be provided such that it can be moved and positioned in the axial direction Y-axis.

  In short, it is sufficient that the mold holder 7 is movable relative to the substrate table 15, and the substrate table 15 is movable relative to the mold holder 7.

  As described above, when the movement type of the mold holder 7 or the substrate table 15 is changed, the member moves in conjunction with the servomotor mover (for example, the rotation output shaft of the AC servomotor is linked via the ball screw). A linear scale is provided between the substrate table 15) and the member to which the stator of the servo motor is fixed (for example, the substrate table support 9 to which the casing of the AC servo motor is fixed), The position of the substrate table 15 relative to the substrate table support 9 can be detected.

  Further, the transfer device 1 may be used such that the Z-axis direction is a horizontal direction or an oblique direction, instead of using the Z-axis direction to be the vertical direction.

  The transfer device 1 is arranged on the substrate table moved and positioned at a predetermined position by the mold holder 7, the substrate table 15, the mold holder driving means, the substrate table driving means and the substrate table driving means. The holding force by the substrate table driving means is arranged so that the substrate table is displaced from the predetermined position in the intersecting direction by the pressing force when the mold holding body is approached and the substrate is pressed by the mold. Control means for controlling the substrate table driving means in order to reduce (the force for holding the substrate table in the predetermined position) (including the case where the holding force is set to “0”). Is an example of a transfer device having the following.

1 is a front view showing a schematic configuration of a transfer apparatus according to an embodiment of the present invention. It is a side view which shows schematic structure of a transfer apparatus, and is II arrow directional view in FIG. It is a block diagram which shows schematic structure of a control apparatus. It is a block diagram which shows schematic structure of a servo driver. It is a figure which shows the behavior of the board | substrate table at the time of transferring to a board | substrate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transfer device 7 Mold holding body 13, 19 Linear motor 23 Control device 25 Load cell

Claims (4)

A mold holder capable of holding the transfer mold facing the substrate table and relatively movable in a direction approaching or moving away from the substrate table;
The substrate table capable of holding the substrate facing the mold holder and movable relative to the mold holder in a direction intersecting with the approaching / separating direction of the mold holder;
Mold holder driving means for relatively moving the mold holder in the approaching / separating direction;
Substrate table driving means for relatively moving the substrate table in the intersecting direction;
When the substrate holder is moved to a predetermined position by the substrate table driving means and the mold holder is brought close to the substrate table to press the substrate with the mold, the pressing force causes the substrate table to move from the predetermined position. Control means for controlling the substrate table driving means to reduce the holding force by the substrate table driving means so as to be displaced in the intersecting direction;
A transfer device comprising: A mold holder capable of holding the transfer mold facing the substrate table and relatively movable in a direction approaching or moving away from the substrate table;
The substrate table capable of holding the substrate facing the mold holder and movable relative to the mold holder in a direction intersecting with the approaching / separating direction of the mold holder;
Mold holder driving means for relatively moving the mold holder in the approaching / separating direction;
A servomotor for relatively moving the substrate table in the intersecting direction;
Substrate table position detecting means for detecting the position of the substrate table relatively moved by the servo motor;
The servo motor can move and position the substrate table relatively to a predetermined position, and the mold holder is moved closer to the substrate table moved and positioned to the predetermined position to move the substrate table with the mold. The position of the substrate table that changes when the substrate is pressed is detected by the substrate table position detecting means, and the servo motor is controlled to relatively move the substrate table so that the detected value becomes a target value. Control means for positioning;
A transfer device comprising: The transfer device according to claim 2,
A pressing force detecting means for detecting a pressing force when pressing the substrate with the mold;
The transfer device according to claim 1, wherein the control unit is a unit that controls the servo motor in accordance with a detection result of the pressing force detection unit and performs relative movement positioning of the substrate table. Holding the transfer mold against the substrate table with a mold holder;
Holding the substrate on the substrate table so as to face the mold holder;
Positioning the substrate table at a predetermined position with respect to the mold holder using a servo motor to transfer the transfer pattern of the mold to the predetermined position of the substrate;
Pressing the substrate with the mold to transfer the transfer pattern of the mold to a predetermined position on the substrate;
And a holding method of the substrate table by the servo motor is reduced when the pressing is performed.

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