JP4853590B2 - Metal thin film manufacturing method and metal thin film - Google Patents

Metal thin film manufacturing method and metal thin film Download PDF

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Publication number
JP4853590B2
JP4853590B2 JP2010512865A JP2010512865A JP4853590B2 JP 4853590 B2 JP4853590 B2 JP 4853590B2 JP 2010512865 A JP2010512865 A JP 2010512865A JP 2010512865 A JP2010512865 A JP 2010512865A JP 4853590 B2 JP4853590 B2 JP 4853590B2
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JP
Japan
Prior art keywords
metal
fine particles
thin film
metal thin
superheated steam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010512865A
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Japanese (ja)
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JPWO2010095672A1 (en
Inventor
剛志 八塚
佳孝 鮎澤
博俊 木津本
浩二 小木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009035053 priority Critical
Priority to JP2009035053 priority
Priority to JP2009177703 priority
Priority to JP2009177704 priority
Priority to JP2009177704 priority
Priority to JP2009177703 priority
Priority to JP2009207808 priority
Priority to JP2009207808 priority
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to JP2010512865A priority patent/JP4853590B2/en
Priority to PCT/JP2010/052405 priority patent/WO2010095672A1/en
Application granted granted Critical
Publication of JP4853590B2 publication Critical patent/JP4853590B2/en
Publication of JPWO2010095672A1 publication Critical patent/JPWO2010095672A1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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