JP4852030B2 - Active fluid filled vibration isolator - Google Patents

Description

  The present invention relates to a fluid filled type vibration damping device that obtains a vibration damping effect based on the pressure action of a pressure receiving chamber in which an incompressible fluid is sealed. In particular, the pressure of the pressure receiving chamber is controlled to prevent vibration. The present invention relates to an active fluid-filled vibration isolator capable of effectively obtaining a vibration effect.

  Conventionally, as a type of a vibration isolator such as a vibration isolator coupling body and a vibration isolator support member interposed between members constituting a vibration transmission system, the first mounting member and the second mounting member are formed as a main rubber elastic body. Are connected to each other to form a pressure receiving chamber in which a part of the wall is composed of a main rubber elastic body, and an incompressible fluid is sealed in the pressure receiving chamber, and elastic deformation of the main rubber elastic body due to vibration input There is known a fluid-filled vibration isolator that obtains a vibration isolating effect by utilizing a fluid spring action of a pressure receiving chamber based on the above, a fluid flow action by a pressure change, and the like. However, since the vibration isolator uses a passive vibration isolating function, when the characteristics such as the frequency of vibration to be vibrated change or a higher level anti-vibration effect is required. There has been a problem that the intended anti-vibration effect is not sufficiently exhibited.

  In order to cope with such a problem, Patent Document 1 (Japanese Patent Application Laid-Open No. 2000-283214) discloses that a part of the wall portion of the pressure receiving chamber is configured by a vibration plate (movable member) and a vibration plate is provided. An active fluid-filled vibration isolator has been proposed in which an actuator is disposed on the opposite side of the sandwiched pressure receiving chamber, the actuator output shaft is connected to the vibration plate, and the vibration plate is driven to vibrate. ing. According to this vibration isolator, the pressure in the pressure receiving chamber is controlled by displacing the vibration plate at a period corresponding to the frequency of vibration to be vibration-isolated, so that a vibration isolating effect can be obtained.

  By the way, as an actuator for exciting the above-described vibration plate, for example, by the action of a magnetic field generated by energizing a coil on the stator side, for high-precision control of phase, driving force, and frequency. Adoption of a solenoid structure that reciprocates the mover is being studied. However, an actuator having a solenoid structure, which is a type of electromagnetic actuator, is required to have a very small clearance between the mover and the stator and high accuracy. On the other hand, the vibration plate is generally rubber-supported by a second mounting member or the like, and the drive shaft of the vibration plate is eccentric or inclined with respect to the output shaft of the actuator due to rubber contraction or the like. easy. For this reason, when the movable element is fixed to the vibration plate by an axis, there is a problem that the movable element tends to be eccentric or inclined with respect to the stator, and it is difficult to obtain a stable output.

  Therefore, the applicant of the present invention previously described in Patent Document 2 (Japanese Patent Application Laid-Open No. 2005-188484), in the state where the actuator is assembled to the mount body provided with the vibration plate, the vibration plate and the output shaft of the actuator are driven in the driving direction. We proposed an active fluid-filled vibration isolator in which the mount body and the actuator are separated from each other by bringing them into contact with each other in the axial direction and combining them in an unfixed manner.

  However, since the output shaft of the vibration plate and the actuator are separate structures, the vibration plate and the output shaft are perpendicular to each other due to manufacturing errors and assembly errors of each part of the mount body and the actuator. There was a risk of misalignment (eccentricity). If there is such misalignment in the direction perpendicular to the axis, the excitation drive force exerted on the excitation plate from the output shaft and the axial drive reaction force from the excitation plate to the output shaft generate moment, and the excitation plate In addition, the output shaft may be displaced with respect to the driving direction. Such a tilt displacement leads to a decrease in the transmission efficiency of the axial driving force, making it difficult to achieve the desired vibration isolation effect, and also causes problems such as galling due to the tilt of the mover relative to the stator. There was also a risk that it would occur and cause damage.

JP 2000-283214 A JP 2005-185854 A

  Here, the present invention has been made in the background as described above, and the problem to be solved is that in the mount body, the actuator is separated from the mount body provided with the vibration plate. Provided is an active fluid-filled vibration isolator having a novel structure that can suppress the inclination of the output shaft of a vibration plate or an actuator and can efficiently transmit the driving force of the actuator to the vibration plate. There is.

  Hereinafter, the aspect of this invention made | formed in order to solve such a subject is described. In addition, the component employ | adopted in each aspect as described below is employable by arbitrary combinations as much as possible. Further, aspects or technical features of the present invention are not limited to those described below, but are described in the entire specification and drawings, or an invention that can be understood by those skilled in the art from those descriptions. It should be understood that it is recognized based on thought.

  That is, a feature of the present invention is that the first mounting member and the second mounting member are connected by the main rubber elastic body to form a pressure receiving chamber in which a part of the wall portion is configured by the main rubber elastic body. While the incompressible fluid is sealed in the pressure receiving chamber, another part of the wall portion of the pressure receiving chamber is configured by a vibration plate, and the pressure in the pressure reception chamber is actively activated by exciting the vibration plate. In the active fluid-filled vibration isolator, the mount body comprising the first mounting member, the second mounting member, the main rubber elastic body, the pressure receiving chamber, and the vibration plate is mounted. A drive shaft that protrudes outward from the central portion is formed on the vibration plate of the main body, and a first shaft that is located on both sides of the vibration plate in the axial direction of the drive shaft and spreads in a direction perpendicular to the axis. A vibration plate support plate spring and a second vibration plate support plate spring are provided, and the vibration plate is the first and second vibration plates. The mount body is an electromagnetic actuator that elastically supports the second mounting member with a holding plate spring, while generating an axial driving force with respect to the output shaft on the mover side by energizing the coil on the stator side. The first mover support leaf spring and the second mover support leaf spring, which are configured as separate structures and are located on both sides of the mover in the axial direction of the output shaft of the actuator and extend in the direction perpendicular to the axis, respectively. The mover is elastically supported by the first and second mover support plate springs against the housing of the electromagnetic actuator, and the second mounting member in the mount body and the housing of the electromagnetic actuator are fixed to each other. The drive shaft of the vibration plate of the mount body and the output shaft of the electromagnetic actuator are pressed against each other in the axial direction and held in contact with each other, and axial driving force is transmitted from the output shaft to the drive shaft. It is allowed in the active fluid filled vibration damping apparatus that allowed to vibration drives the oscillating plate by.

  In such an active fluid-filled vibration isolator having a structure according to the present invention, the vibration plate is mounted by the first and second vibration plate supporting plate springs via the drive shafts on both sides in the axial direction. The mover is positioned and supported in a direction perpendicular to the axis with respect to the electromagnetic actuator housing by the first and second mover support leaf springs via the output shaft on both sides in the axial direction. Is supported by positioning. That is, in the present invention, by adopting the leaf spring, the displacement of the vibration plate and the mover in the axial direction is sufficiently allowed, while effective positioning is realized in the direction perpendicular to the axis.

  The mount body and the electromagnetic actuator are separated from each other. When the drive shaft of the vibration plate of the mount body and the output shaft of the electromagnetic actuator are assembled, the drive shaft and the output shaft are pressed against each other in the axial direction. The drive shaft and the output shaft are displaced from each other in the direction perpendicular to the axis due to, for example, manufacturing errors or assembly errors between the mount body and the actuator. ), The generation of moment around the fixed portion due to the fixed assembly of the drive shaft and the output shaft is avoided.

  Moreover, since the drive shaft and the output shaft are each elastically supported by a pair of support plate springs, for example, the drive shaft and the output shaft are pressed against each other in the axial direction by tuning the spring characteristics of each support plate spring. By increasing the force, it is possible to exert pre-compression in a direction in which the drive shaft and the output shaft come into contact with each other.

  Therefore, according to the active fluid-filled vibration isolator of this structure, the driving force of the actuator is efficiently transmitted to the vibration plate, and the desired vibration isolation effect can be stably obtained. In addition, since the tilt displacement of the vibration plate and the output shaft with respect to the drive shaft direction can be suppressed, the problem of damage due to galling or the like can be solved.

  In the active fluid-filled vibration isolator according to the present invention, one of the surfaces of the drive shaft and the output shaft that are in contact with each other in the axial direction has a flat shape extending in a direction perpendicular to the axis, and the drive shaft and the output shaft are A structure in which the other of the surfaces in contact with each other in the axial direction has a hemispherical shape may be employed. According to such a structure, the area of the contact portion between the drive shaft and the output shaft is reduced by the hemispherical contact surface while maintaining a stable contact state by the flat contact surface, A large stress is stably generated at the contact portion. As a result, the force with which the drive shaft and the output shaft are pressed against each other in the axial direction is further increased, and the transmission efficiency of the drive force to the vibration plate can be further improved. Further, since the drive shaft and the output shaft are brought into contact with each other in a state where the drive shaft and the point contact are close to each other, for example, even if the drive shaft and the movable member are decentered, the movable member is driven in the substantially central axis direction. A substantially point contact state in which force is exerted is realized.

  In the active fluid-filled vibration isolator according to the present invention, a structure provided with a contact state adjusting mechanism that adjusts the axial pressing amount between the drive shaft and the output shaft may be employed. Thus, the desired driving force can be obtained by tuning the pressing amount in the axial direction according to the required contact state between the drive shaft and the output shaft.

  In the active fluid-filled vibration isolator according to the present invention, the partition member is supported by the second mounting member, and a part of the wall portion is formed on the side opposite to the pressure receiving chamber with the partition member interposed therebetween. Forming an equilibration chamber, and forming a through hole in the central portion of the partition member and arranging a vibration plate in the through hole, and an orifice communicating the pressure receiving chamber and the equilibration chamber in the outer peripheral portion of the partition member While the passage is formed, a structure in which the drive shaft of the vibration plate extends to the equilibrium chamber side and penetrates through the flexible film and protrudes to the outside may be adopted. According to such a structure, the amount of fluid flowing through the orifice passage is ensured by the pressure difference between the pressure receiving chamber and the equilibrium chamber, and the orifice which is a vibration-proofing effect based on the fluid action such as the resonance action of the fluid. An effect is obtained. In particular, the orifice effect can be effectively exhibited by tuning the resonance frequency of the fluid flowing through the orifice passage to a frequency range of vibration in question.

  In the active fluid-filled vibration isolator according to the present invention, the partition member forms a second orifice passage tuned in a higher frequency range than the orifice passage, and the second orifice passage has a pressure receiving chamber side. A structure in which the opening is opened in the through hole and the movable plate is disposed so as to be displaceable so as to cover the through hole may be employed. Thereby, at the time of vibration input in the tuning frequency range of the orifice passage, the opening on the pressure receiving chamber side of the second orifice passage is covered with the movable plate, and pressure leakage through the second orifice passage in the pressure receiving chamber is suppressed. A sufficient amount of fluid is allowed to flow through the orifice passage. As a result, the orifice effect by the orifice passage can be stably obtained. Further, when vibration is input in the tuning frequency range of the second orifice passage, even if the orifice passage tuned to a lower frequency range than the second orifice passage is substantially closed, it is based on the displacement of the movable plate. The fluid flow amount through the second orifice passage is sufficiently secured, and the orifice effect by the second orifice passage can be effectively exhibited. That is, according to this structure, a vibration isolation effect can be effectively obtained against a plurality of vibrations based on the orifice effects of the orifice passage and the second orifice passage.

  As the movable plate according to this aspect, various structures that adjust the pressure fluctuation by being displaced based on the relative pressure difference between the fluid chambers on both sides of the movable plate are employed. For example, as shown in Japanese Patent Application Laid-Open No. 01-93638, Japanese Patent Application Laid-Open No. 2005-273684, Japanese Patent Application Laid-Open No. 2006-97823, etc., the movable plate is accommodated in a non-adhesive manner in a predetermined accommodation area Then, it is possible to make a minute displacement in the plate thickness direction in the containing region, and the pressure of one fluid chamber (for example, the pressure receiving chamber) is exerted on one surface of the movable plate by the through hole formed in the containing region. By applying the pressure of the fluid chamber (for example, the equilibrium chamber) to the other surface of the movable plate, the relative pressure difference between the two fluid chambers can be absorbed based on the minute displacement of the movable plate in the accommodation area and movable. A structure in which pressure absorption exceeding the plate displacement allowance is prevented may be employed. Alternatively, for example, as shown in Japanese Patent Application Laid-Open No. 2000-213586, Japanese Patent Application Laid-Open No. 07-71506, Japanese Patent Application Laid-Open No. 11-101294, etc., at least the outer peripheral portion of the movable plate is constituted by a partition rubber elastic plate. And, by fixing the outer peripheral edge of the partition rubber elastic plate to the partition member or the second mounting member, the two fluid chambers are configured to be fluid-tightly partitioned. Absorbs the relative pressure difference between one fluid chamber and the other fluid chamber based on the elastic displacement or elastic deformation of the partition rubber elastic plate based on the pressure difference between one fluid chamber and the other fluid chamber exerted on the surface. In addition, a structure in which large pressure absorption is prevented by elastic deformation of the partition rubber elastic plate can be employed. Further, for example, as disclosed in Japanese Patent Application Laid-Open No. 2006-17134, a plurality of elastic protrusions are provided on both surfaces of the movable plate, and the elastic protrusions are sandwiched between walls of the accommodation region of the movable plate. Holding the pressure partly restrains the movable plate, and allows one fluid chamber and the other fluid chamber to communicate with each other between the portion of the movable plate where the elastic protrusion is not formed and the wall portion of the accommodating region. A structure provided with a fluid flow path may be employed.

  In the active fluid-filled vibration isolator according to the present invention, the first vibration plate support plate spring, the second vibration plate support plate spring, the first mover support plate spring, and the second mover A structure in which at least one of the supporting leaf springs is a laminated structure in which a plurality of leaf springs are stacked may be employed. That is, as one method for increasing the excitation frequency of the vibration plate or the mover, for example, it is conceivable to increase the thickness of the support plate spring to harden the support plate spring. When the thickness is increased, a large stress is easily generated and the strain increases. In a support plate spring in which metal fatigue increases due to repeated elastic deformation during driving of the vibration plate or the mover, it is important to reduce the strain in order to ensure durability. Therefore, by adopting a laminated structure in which a plurality of leaf springs are overlapped as in this embodiment, the support leaf spring can be hardened while suppressing stress transmission and generating a large strain. Therefore, the durability performance of the support leaf spring can be ensured, and further improvement in the degree of freedom in tuning the excitation frequency can be achieved.

  Further, in the active fluid filled type vibration damping device according to the present invention, a plurality of leaf springs having a laminated structure are each provided with a plurality of hollow holes and a plurality of spiral springs extending in the circumferential direction. A structure in which the curved arm portions are formed and the plurality of leaf springs are overlapped with each other in a state where the respective hollow holes are in communication with each other may be employed. According to such a structure, in addition to the design change of the shape and size of the support plate spring, the spring characteristics of the support plate spring can be improved by changing the design, shape, size, number, etc. of the thinned portions. Since tuning is performed, the degree of freedom in tuning the spring characteristics is improved. Further, in the first and second vibration plate support plate springs, in the vibration plate support plate spring disposed at the end portion on the pressure receiving chamber side of the drive shaft, the region between the support plate spring and the vibration plate is thinned. Through the portion, a part of the wall is communicated with a fluid sealing region made of the main rubber elastic body. Therefore, in addition to the fluid sealing region on the main rubber elastic body side, the region between the support plate spring and the vibration plate is configured as the pressure receiving chamber, so that the volume of the pressure receiving chamber is effectively ensured. In addition, when the vibration plate supporting plate spring is elastically deformed in the pressure receiving chamber, the fluid resistance of the plate spring is reduced by forming a lightening portion, and the plate spring is deformed and hence the vibration plate. The energy loss of the excitation drive can be suppressed.

  Hereinafter, in order to clarify the present invention more specifically, embodiments of the present invention will be described in detail with reference to the drawings. First, FIG. 1 shows an automobile engine mount 10 as an embodiment according to the fluid filled type vibration damping device of the present invention. The automobile engine mount 10 includes a mount main body 18 including a first mounting bracket 12 as a first mounting member, a second mounting bracket 14 as a second mounting member, a main rubber elastic body 16, and the like. The mount body 18 and the electromagnetic actuator 20 are configured separately from each other. The first mounting bracket 12 is attached to the power unit side of an automobile (not shown), and the second mounting bracket 14 is attached to the body side of the automobile (not shown), whereby the power unit is attached to the vehicle body via the engine mount 10. It is designed to be elastically supported.

  1 shows the state of the engine mount 10 alone before being mounted on the automobile, but in the mounted state on the automobile, the shared support load of the power unit is in the mount axis direction (in FIG. ) Is displaced in a direction in which the first mounting bracket 12 and the second mounting bracket 14 approach each other in the mount axis direction, and the main rubber elastic body 16 is elastically deformed. In addition, under such a mounted state, main vibrations to be vibrated are input substantially in the mount axis direction. In the following description, unless otherwise specified, the vertical direction refers to the vertical direction in FIG.

  More specifically, the first mounting member 12 has an inverted bottomed cylindrical shape or a columnar shape. Further, the central portion of the first mounting bracket 12 is provided with a screw hole 22 opened to the upper end surface, and a member on the power unit side (not shown) is screwed and fixed to the screw hole 22 via a fixing bolt. The first mounting bracket 12 is fixedly attached to the power unit.

  The second mounting bracket 14 has a large-diameter substantially stepped cylindrical shape, and a small-diameter portion 26 extends upward from the inner peripheral edge of the annular plate-shaped step portion 24. A large-diameter portion 28 extends downward from the outer peripheral edge portion of the step portion 24. The axial dimension of the small diameter portion 26 is made larger than the axial dimension of the large diameter portion 28.

  The first mounting bracket 12 and the second mounting bracket 14 are disposed on the same central axis, and the first mounting bracket 12 is an opening on the small diameter portion 22 side of the second mounting bracket 14. It is opposed to the portion at a predetermined distance in the axial direction. A main rubber elastic body 16 is interposed between the first mounting bracket 12 and the second mounting bracket 14.

  The main rubber elastic body 16 is a thick rubber elastic body having a generally truncated truncated cone shape as a whole, and has a large-diameter recess having an inverted mortar shape or a hemispherical shape that opens downward at the center of the lower end thereof. 30 is formed. The rubber elastic body 16 is vulcanized and bonded to the upper end portion of the main rubber elastic body 16 so as to embed a portion from the axially intermediate portion to the lower end portion of the first mounting bracket 12. The inner peripheral surface from the upper end portion of the small-diameter portion 26 of the second mounting member 14 to the intermediate portion in the axial direction is overlapped and vulcanized and bonded to the outer peripheral surface. Thus, the main rubber elastic body 16 is formed as an integrally vulcanized molded product integrally including the first mounting bracket 12 and the second mounting bracket 14, and one of the second mounting brackets 14 (FIG. 1, the upper opening is fluid-tightly closed by the main rubber elastic body 16. A thin seal rubber layer 32 integrally formed with the main rubber elastic body 16 is attached to the entire inner peripheral surface from the axially intermediate portion to the lower end portion of the small diameter portion 26 of the second mounting bracket 14. Is formed. The outer peripheral edge portion of the opening end face of the large-diameter recess 30 in the main rubber elastic body 16 is positioned on the inner side in the direction perpendicular to the inner peripheral surface of the seal rubber layer 32, so that the main rubber elastic body 16 and the seal rubber are At the boundary portion of the layer 32, an annular stepped portion 34 that extends in an annular shape in the direction perpendicular to the axis is formed.

  In addition, a partition member 36 is assembled in the opening portion on the lower side in the axial direction of the second mounting bracket 14. The partition member 36 has a substantially circular block shape as a whole, and is formed using a hard member such as a metal material or a synthetic resin material. The partition member 36 includes a partition member body 38, a first partition plate 40, and a second partition plate 42.

  As shown in FIG. 2, the partition member main body 38 has a substantially circular block shape, and a large-diameter annular outer flange portion 44 is integrally formed at the upper end portion of the partition member main body 38. Has been. Moreover, the outer peripheral surface from the axial direction intermediate part of a partition member main body 38 to a lower end part has a taper shape in which a radial dimension becomes small gradually toward the downward direction.

  A circular central hole 46 as a through hole is formed in the central portion of the partition member main body 38 so as to extend in the axial direction, and penetrates the upper and lower end faces of the partition member main body 38. An annular stepped portion 48 is formed on the peripheral wall portion of the substantially central portion in the axial direction of the central hole 46, and the diameter of the upper portion of the central hole 46 across the stepped portion 48 is the diameter of the lower portion. It is larger than the dimensions. An inner flange-like portion 50 is integrally formed in the lower opening portion of the central hole 46. A plurality of screw holes 52 are provided around the upper opening of the central hole 46 in the partition member main body 38 and at the stepped portion 48 at a predetermined distance in the circumferential direction. Further, a communication window 54 is provided in the thickness direction (up and down in FIG. 1) in the outer peripheral portion of the partition member main body 38 or the inner peripheral portion of the outer flange-shaped portion 40. Furthermore, a communication passage 56 extending in a radial tunnel shape is formed at one place on the circumference of the peripheral wall portion of the partition member main body 38, and the peripheral wall surface of the large diameter portion of the central hole 46 of the partition member main body 38 is formed. An opening is formed on the outer peripheral surface of the partition member main body 38.

  Moreover, the 1st partition plate 40 is exhibiting the thick substantially disc shape, and the circular recessed central recess 58 opened below is provided in the center part. A small-diameter insertion hole 60 is provided in the central portion of the upper bottom portion of the central recess 58, and a through-hole 62 including a plurality of small holes is provided around the insertion hole 60 in the upper bottom portion. Has been. Further, an annular bowl-shaped portion 64 is integrally formed on the upper peripheral edge of the first partition plate 40.

  Further, the second partition plate 42 is thinner than the first partition plate 40 and has a large-diameter substantially disk shape, and a small-diameter insertion hole 66 is provided through the center portion. In addition, a through hole 68 made up of a plurality of small holes is provided around the insertion hole 66. The outer diameter dimension of the second partition plate 42 is larger than the outer diameter dimension of the flange-shaped portion 64 of the first partition plate 40, and the outer diameter size of the outer flange-shaped portion 44 of the partition member body 38 is It is almost the same.

  The first partition plate 40, the second partition plate 42, and the partition member main body 38 are overlapped with each other in the axial direction so that the second partition plate 42 is sandwiched between the first partition plate 40 and the partition member main body 38. The axes are positioned on the same straight line. The support bolt 70 passes through the first and second partition plates 40 and 42 in the axial direction, and is screwed and fixed to a screw hole 52 opened in the upper end surface of the partition member main body 38. Since the axially intermediate portion or the head portion is positioned in the through hole of the first and second partition plates 40 and 42, the first and second partition plates 40 and 42 and the partition member main body 38 are perpendicular to the axis. The positioning state in the direction is maintained, and the partition member 36 is configured.

  Further, the flange portion 64 of the first partition plate 40 and the outer peripheral portion of the second partition plate 42 are opposed to each other with a predetermined distance in the axial direction. The outer peripheral surface of the peripheral wall portion 40 and the upper end surface of the second partition plate 42 cooperate to have a predetermined length in the circumferential direction in a cross section in which the outer peripheral portion of the partition member 36 is opened in a concave shape radially outward. For example, a circumferential groove 72 extending slightly less than one round is formed.

  Further, the opening portion of the central recess 58 of the first partition plate 40 is covered with the central portion of the second partition plate 42, so that the first partition plate 40 and the second partition plate 42 are axially arranged. A circular region 74 extending in a substantially constant circular cross section is formed.

  Such a partition member 36 is inserted in the axial direction from the lower opening of the second mounting bracket 14, and the flange portion 64 of the first partition plate 40 is overlaid on the annular step portion 34 of the main rubber elastic body 16. In addition, the outer peripheral portion of the second partition plate 42 is superimposed on the stepped portion 24 via the seal rubber layer 32 of the second mounting bracket 14. Thereby, the insertion end of the partition member 36 in the axial direction with respect to the second mounting bracket 14 is defined.

  Below the partition member 36, a diaphragm 76 as a flexible film is disposed. The diaphragm 76 is formed of a thin circular rubber film having sufficient slackness. A fixing metal 78 is vulcanized and bonded to the outer peripheral edge of the diaphragm 76. The fixing bracket 78 has a form in which an inner flange-like portion extending radially inward is integrally provided at the lower end portion of the large-diameter ring shape. The outer peripheral edge portion of the diaphragm 76 is vulcanized and bonded to the inner peripheral edge portion of the fixing bracket 78, and a thin seal rubber layer 80 integrally formed with the diaphragm 76 is formed on the inner peripheral surface of the fixing bracket 78 over substantially the entire surface. It is vulcanized and bonded.

  A fixing bracket 78 of the diaphragm 76 is inserted in the axial direction from an opening on the lower side (large diameter portion 28 side) of the second mounting bracket 14, and an upper end portion of the fixing bracket 78 is inserted into the second through the seal rubber layer 80. And the inner peripheral edge of the lower side of the fixing bracket 78 is overlapped with the outer peripheral portion of the outer flange-shaped portion 44 of the partition member main body 38 via the seal rubber layer 80. They are superimposed in the axial direction.

  Further, a first bracket fitting 82 and a second bracket fitting 84 are assembled to the second mounting bracket 14. The first bracket fitting 82 has an annular plate shape. The second bracket fitting 84 has a cylindrical shape, and a stepped portion 86 extending continuously in the circumferential direction is formed on the inner peripheral edge on the upper side in the axial direction. In addition, an inner flange-shaped portion 88 projects from the inner wall portion of the second bracket fitting 84 in the axially intermediate portion. When the first bracket fitting 82 and the second bracket fitting 84 are overlapped in the axial direction, the lower end surface on the inner peripheral side of the first bracket fitting 82 is the upper end surface of the step portion 24 of the second mounting bracket 12. While being overlaid, a stepped portion (stepped surface) 86 of the second bracket fitting 82 is overlaid on the lower end surface of the fixing fitting 78 of the diaphragm 76.

  As will be described later, when the first bracket fitting 82 and the second bracket fitting 84 are bolted in the axial direction, the stepped portion 24 of the second mounting bracket 14 and the fixing bracket 78 are disposed in the axial direction. The radially inner periphery of the flange portion 64 of the first partition plate 40 and the annular stepped portion 34 of the main rubber elastic body 16, the outer peripheral portion of the second partition plate 42, and the step portion 24 of the second mounting bracket 14. The portion or middle portion, the upper end portion of the fixing bracket 78 and the outer peripheral portion of the stepped portion 24 are fluid-tightly overlapped with each other via the seal rubber layers 32 and 80, respectively. Accordingly, the partition member 36 and the diaphragm 76 are fixedly assembled to the second mounting bracket 14 based on the fixing of the first and second bracket fittings 82 and 84 to the second mounting bracket 14. The lower opening of the second mounting member 14 is fluid-tightly closed by the partition member 32 and the diaphragm 74. Further, the first and second bracket fittings 82 and 84 are fixed to a vehicle body side member (not shown), so that the second attachment fitting 14 is fixedly attached to the vehicle body. .

  In this way, the partition member 36 and the diaphragm 76 are assembled into the integrally vulcanized molded product of the main rubber elastic body 16 provided with the first and second mounting brackets 12 and 14, thereby sandwiching the partition member 36. In the region where the large-diameter recess 30 of the main rubber elastic body 16 is closed by the partition member 36 on one side in the axial direction (upper in FIG. 1), a part of the wall portion is configured by the main rubber elastic body 16. Thus, a pressure receiving chamber 90 is formed in which pressure fluctuation is caused when vibration is input. Further, on the other side in the axial direction with respect to the partition member 36 (downward in FIG. 1), an equilibrium chamber 92 is formed in which a part of the wall portion is made of a diaphragm 76 and volume change is easily allowed. Yes. The pressure receiving chamber 90 and the equilibrium chamber 92 are filled with an incompressible fluid. For example, water, alkylene glycol, polyalkylene glycol, silicone oil, or the like is employed as the incompressible fluid to be enclosed. In order to effectively obtain a vibration isolation effect based on a fluid action such as a resonance action of the fluid. It is desirable to employ a low viscosity fluid of 0.1 Pa · s or less. Further, the incompressible fluid is sealed in the pressure receiving chamber 90 or the equilibrium chamber 92, for example, the partition member 36 for the integrally vulcanized molded product of the main rubber elastic body 16 including the first and second mounting brackets 12 and 14. And the diaphragm 76 are preferably realized by performing the assembly in an incompressible fluid.

  Further, as the partition member 36 is assembled to the second mounting bracket 14, the opening portion of the circumferential groove 72 of the partition member 36 is second through the seal rubber layer 32 attached to the second mounting bracket 14. The peripheral groove 72 is fluid-tightly closed by being fluid-tightly superimposed on the inner peripheral surface of the mounting bracket 14. One end portion in the circumferential direction of the circumferential groove 72 is connected to the pressure receiving chamber 90 through a communication window 94 formed in the upper end portion of the first partition plate 40, and the other end portion in the circumferential direction of the circumferential groove 72 is connected to the pressure receiving chamber 90. A communication window 96 formed in the intermediate portion in the radial direction of the second partition plate 42 is connected to the equilibrium chamber 92 through the communication window 54 of the partition member main body 38. Thereby, the inner peripheral surface of the second mounting member 14, the wall surface of the peripheral groove 72, and the communication windows 54, 94, 96 cooperate to extend the outer peripheral portion of the partition member 36 in the circumferential direction by a predetermined length. A first orifice passage 98 as an orifice passage is formed, and the pressure receiving chamber 90 and the equilibrium chamber 92 are communicated with each other through the first orifice passage 98, and the first chamber 90 and 92 are connected to each other. Fluid flow through the orifice passage 98 is allowed.

  Further, a vibration plate 100 is disposed on the small diameter side of the central hole 46 of the partition member main body 38. The vibration plate 100 has a thin, substantially disk shape, and is formed using a hard synthetic resin material, a metal material, or the like. A boss-like protrusion 102 having a small-diameter cylindrical shape protrudes upward from the central portion of the vibration plate 100, and an inner hole of the boss-like protrusion 102 opens to the lower end surface of the vibration plate 100. By doing so, an insertion hole 104 is formed on the central axis of the vibration plate 100. Further, a substantially cylindrical rim-shaped protrusion 106 that protrudes downward in the axial direction is integrally formed on the outer peripheral edge of the vibration plate 100.

  A drive rod 108 is vulcanized and bonded to the center portion of the diaphragm 76. The drive rod 108 is a hard rod-shaped member extending in the axial direction, and a screw hole 110 that opens to the upper end surface is provided on the upper side in the axial direction, and in a direction perpendicular to the axis on the lower side in the axial direction. A small-diameter bolt portion 114 is provided through the expanding step portion 112. Further, a flange 116 that extends radially outward is integrally formed at the axially intermediate portion of the drive rod 108, and the central portion of the diaphragm 74 is vulcanized and bonded to the outer peripheral portion of the flange 116. . Thereby, the drive rod 108 main body is vulcanized and bonded to the diaphragm 76 in such a form that it penetrates the central portion of the diaphragm 76.

  The upper end surface of the drive rod 108 and the lower end surface of the central portion of the vibration plate 100 are overlapped with each other in the axial direction, and the fixing bolt 118 is inserted into the insertion hole 104 from above the vibration plate 100 to screw the drive rod 108. The hole 110 is fixed by screwing.

  As a result, the vibration plate 100 and the drive rod 108 are connected in the axial direction, and the rim-shaped protrusion 106 of the vibration plate 100 is disposed along the peripheral wall portion of the central hole 46 of the partition member body 38. The vibration plate 100 and the central hole 46 are arranged substantially coaxially. The vibration plate 100 is opposed to the second partition plate 42 covering the upper opening of the central hole 46 of the partition member body 38 with a predetermined distance in the axial direction. Here, a minute gap is formed between the outer peripheral portion of the vibration plate 100 provided with the rim-shaped protrusion 106 and the peripheral wall portion of the central hole 46, and the shaft of the vibration plate 100 is formed by the existence of such a gap. Directional displacement is preferably allowed. Whether or not the fluid flow or the like through the gap is generated is not particularly limited, but in the present embodiment, the gap is so small that the fluid flow or the like through the gap is not substantially generated. It is supposed to be. As a result, the lower opening of the central hole 46 of the partition member main body 38 is substantially closed by the vibration plate 100.

  Here, a boss-like protrusion 102 protruding from the central portion of the vibration plate 100 is supported by the partition member main body 38 via a first vibration plate support plate spring 120. As shown in FIGS. 3 and 4, the first vibration plate support plate spring 120 has a thin annular plate shape formed of spring steel, stainless steel, or the like, and has a central portion. A circular center hole 122 is provided. Further, a plurality of slits 124 are formed in the radial intermediate portion of the first vibration plate supporting plate spring 120 so as to penetrate the plate thickness direction. The shape, size, arrangement, number, etc. of the slits 124 are set according to the required spring characteristics, etc. In this embodiment, the three slits 124 have the same size and shape. Each of them is meandering in the circumferential direction and extending in a little less than one round. Thereby, a plurality of curved arm portions extending in a spiral shape in the circumferential direction are formed between the radial directions of the plurality of slits 124 in the first vibration plate supporting plate spring 120. A plurality of insertion holes 126 are provided at predetermined intervals in the outer peripheral portion of the first vibration plate support plate spring 120. In particular, in the present embodiment, the plurality of slits 124 and the plurality of insertion holes 126 have the same shape and are formed at equal intervals in the circumferential direction. Positioning in the circumferential direction is unnecessary.

  The fixing bolt 118 is inserted into the center hole 122 of the first vibration plate supporting plate spring 120, and the head portion of the fixing bolt 118 and the vibration are placed around the center hole 122 of the first vibration plate supporting plate spring 120. Clamping is performed between the axial directions of the boss-like protrusions 102 of the plate 100 based on the screwing fixing force of the fixing bolt 118. Further, the outer peripheral portion of the first vibration plate supporting plate spring 120 is placed on the stepped portion 48 of the central hole 46 of the partition member main body 38, and the insertion hole 126 of the first vibration plate supporting plate spring 120 is provided. The outer peripheral portion of the first vibration plate support plate spring 120 is fixed to the partition member main body 38 with bolts, screws or the like so as to be aligned with the screw holes 52 of the step portion 48. Accordingly, the first vibration plate support plate spring 120 is disposed so as to spread in the direction perpendicular to the axis inside the partition member main body 38, and the vibration plate 100 is driven by the first vibration plate support plate spring 120. A boss-like protrusion 102 on one axial side (upper in FIG. 1) is elastically connected and supported to the partition member main body 38 in the axial direction.

  Further, the drive rod 108 connected to the vibration plate 100 is supported by the second bracket metal member 84 via the second vibration plate support plate spring 128. As shown in FIG. 5, the second vibration plate supporting plate spring 128 is a thin-walled approximately formed of spring steel, stainless steel, or the like, like the first vibration plate supporting plate spring 120. It has a disk shape, a circular center hole 130 is provided in the central portion, and three slits 132 as a lightening portion are provided in the radially intermediate portion, and further in the outer peripheral portion. A plurality of insertion holes 134 are provided at predetermined intervals. In the present embodiment, the second vibration plate supporting plate spring 128 is sufficiently larger than the first vibration plate leaf spring 120.

  The male screw portion 114 of the drive rod 108 is inserted into the center hole 130 of the second vibration plate support plate spring 128, and the drive rod 108 extends around the center hole 130 of the second vibration plate support plate spring 128. Are overlapped with the step portion 112. In addition, a support nut 136 is screwed to the male screw portion 114 projecting downward from the second vibration plate support plate spring 128, so that the center of the second vibration plate support plate spring 128 is provided. The portion is sandwiched between the support nut 136 and the axial direction of the stepped portion 112 of the drive rod 108, and is clamped based on the screwing fixing force of the support nut 136. In addition, the upper end surface of the outer peripheral portion of the second vibration plate supporting plate spring 128 is superimposed on the lower end surface of the inner flange-shaped portion 88 of the second bracket fitting 84 and the second vibration plate supporting plate spring 128. The insertion hole 134 is aligned with the screw hole 138 formed in the inner flange-shaped portion 88, and the fixing bolt 140 is inserted into the insertion hole 134 and screwed into the screw hole 138. The outer peripheral portion of the vibration plate supporting plate spring 128 is fixed to the second bracket fitting 84. Accordingly, the second vibration plate support plate spring 128 is disposed so as to spread in the direction perpendicular to the axis on the outer side in the axial direction opposite to the first vibration plate support plate spring 120 with the vibration plate 100 interposed therebetween. Thus, the second vibration plate support plate spring 128 causes the drive rod 108 on the other side in the axial direction (lower side in FIG. 1) to sandwich the vibration plate 100 so that the second bracket fitting 84 extends. It is elastically coupled and supported in the axial direction with respect to the second mounting bracket 14 via the bracket fitting 84.

  That is, as the boss-like protrusion 102 and the drive rod 108 of the vibration plate 100 are displaced in the axial direction, the first and second vibration plate support plate springs 120 and 128 are also elastically deformed in the axial direction. The vibration plate 100 can displace the central hole 46 of the partition member main body 38 in the axial direction. Further, the vibration plate 100 and the partition member main body 38 are coaxially positioned by positioning the vibration plate 100 in the direction perpendicular to the axis by the first and second vibration plate support plate springs 120 and 128. State is maintained. As is clear from this, the drive shaft that drives the vibration plate 100 in the axial direction includes the boss-like protrusion 102 and the drive rod 108.

  The vibration plate 100 and the drive rod 108 are connected to the partition member 36 and the second mounting bracket 14 via a pair of leaf springs (first and second vibration plate support leaf springs 120 and 128). By being elastically supported, one mass-spring system in which the vibration plate 100 and the drive rod 108 are mass components and the first and second vibration plate support plate springs 120 and 128 are spring components is configured. ing. In particular, in order to avoid adverse effects such as stiffening of the mass-spring system due to anti-resonance in a higher frequency range than the vibration frequency to be isolated, the natural frequency of this one mass-spring system is The vibration frequency to be vibrated, that is, the vibration frequency of the vibration plate 100 is set to a sufficiently high frequency range.

  Further, the region between the vibration plate 100 and the second partition plate 42 in the partition member 36 has through holes 62 and 68 penetrating the first and second partition plates 40 and 42 and the first partition plate 40 and the first partition plate 40. The pressure receiving chamber 90 is communicated with each other through a circular region 74 between the two partition plates 42, and the same incompressible fluid as that of the pressure receiving chamber 90 is sealed in this region. That is, the pressure variation of the pressure receiving chamber 90 is directly applied to the region between the vibration plate 100 and the second partition plate 42 through the through holes 62 and 68 and the circular region 74. Act as part. As is clear from the above description, another part of the wall portion different from the main rubber elastic body 16 in the pressure receiving chamber 90 is constituted by the vibration plate 100.

  In other words, on one side of the partition member 36 sandwiching the first and second partition plates 40 and 42 (upper in FIG. 1), a part of the wall portion is configured by the main rubber elastic body 16. One pressure receiving chamber 142 is formed, and on the other side (lower in FIG. 1) between the first and second partition plates 40, 42 of the partition member 36, a part of the wall portion is the vibration plate 100. A second pressure receiving chamber 144 is formed, and the pressure receiving chamber 90 is configured including the first pressure receiving chamber 142 and the second pressure receiving chamber 144. That is, the partition member that partitions the pressure receiving chamber 90 includes the first partition plate 40 and the second partition plate 42. Further, the filter orifice that allows the first pressure receiving chamber 142 and the second pressure receiving chamber 144 to communicate with each other includes through holes 62 and 68 formed in the first and second partition plates 40 and 42 and a circular region 74. ing.

  Further, the region between the support plate spring 120 and the vibration plate 100 through the slit 124 of the first vibration plate support plate spring 120 is the same as the region between the support plate spring 120 and the second partition plate 42. Then, the incompressible fluid is sealed, and is a part of the second pressure receiving chamber 144.

  In particular, in the present embodiment, the resonance frequency of the fluid that is caused to flow through the filter orifice including the above-described through holes 62 and 68 and the circular region 74 is an intermediate speed in which an active vibration isolation effect by the vibration plate 100 is obtained. Or, it is tuned to a high frequency range of about 80 to 100 Hz corresponding to a high-speed booming sound or the like.

  In addition, one end of the communication path 56 formed in the partition member main body 38 is connected to the second pressure receiving chamber 144, and the other end of the communication path 56 is connected to the equilibrium chamber 92. That is, the communication passage 56 forms a second orifice passage 146 that allows the second pressure receiving chamber 144 and the equilibrium chamber 92 to communicate with each other, and the two passages 92 and 144 pass through the second orifice passage 146. Fluid flow is allowed.

  In particular, in the present embodiment, the resonance frequency of the fluid that flows through the first orifice passage 98 is effective for, for example, vibration in a low frequency region around 10 Hz corresponding to an engine shake or the like based on the resonance action of the fluid. It is tuned so as to exhibit a strong anti-vibration effect (high damping effect). On the other hand, the resonance frequency of the fluid that is caused to flow through the second orifice passage 146 is, for example, based on the resonance action of the fluid with respect to vibration in the middle frequency range of about 20 to 40 Hz corresponding to idling vibration, low-speed booming sound, and the like. It is tuned to obtain an effective anti-vibration effect. That is, the tuning frequency of the second orifice passage 146 is set to a high frequency region as compared with the tuning frequency of the first orifice passage 98, and is configured by the aforementioned through holes 62 and 68 and the circular region 74. The tuning frequency of the filter orifice is set in a high frequency range as compared with the first and second orifice passages 98 and 146. Tuning of the first orifice passage 98, the second orifice passage 146, and the filter orifice changes, for example, the rigidity of the wall springs of the pressure receiving chamber 90 and the equilibrium chamber 92, that is, the chambers 90 and 92 are changed by a unit volume. This is done by adjusting the passage length and passage cross-sectional area of each orifice passage while considering the characteristic values based on the respective elastic deformation amounts of the main rubber elastic body 16 and the diaphragm 76 corresponding to the amount of pressure change required for In general, the frequency at which the phase of the pressure fluctuation transmitted through the orifice passage changes to a substantially resonant state can be grasped as the tuning frequency of the orifice passage.

  A movable plate 148 is accommodated in the circular region 74 of the partition member 36. The movable plate 148 is made of a rubber elastic body and has a substantially disk shape that is slightly smaller than the circular region 74. A gap is provided over the entire circumference between the peripheral wall portion of the circular region 74, that is, the peripheral wall portion of the central recess 58 of the first partition plate 40 and the outer peripheral edge portion of the movable plate 148. Further, the thickness dimension of the movable plate 148 is made smaller than the axial dimension of the circular region 74. The pressure of the first pressure receiving chamber 142 is applied to one surface (upper in FIG. 1) of the movable plate 148 through the through-hole 62 of the first partition plate 40, and The pressure of the second pressure receiving chamber 144 is applied to the other surface (the lower side in FIG. 1) through the through hole 68 of the second partition plate 42. As a result, the movable plate 148 covers the center hole 46 of the partition member 36 based on the relative pressure difference between the first pressure receiving chamber 142 and the second pressure receiving chamber 144 in the axial direction. Displaceable.

  Note that guide shaft portions 150 and 150 are projected from the central portion of the movable plate 148 so as to protrude outward on both sides in the axial direction, and when the movable plate 148 is accommodated in the circular region 74. In addition, each guide shaft 150 is inserted through holes 60 and 66 that penetrate through the central portions of the first partition plate 40 constituting the upper wall portion of the circular region 74 and the second partition plate 42 constituting the lower wall portion. The movable plate 148 is positioned in a direction perpendicular to the axis with respect to the circular region 74. Further, since both surfaces of the movable plate 148 have an uneven shape, the hitting sound is reduced based on the fact that the hitting portions of the movable plate 148 against the first partition plate 40 and the second partition plate 42 are reduced. In addition, since the effective area of the movable plate 148 is ensured to be large, the pressure of the first and second pressure receiving chambers 142 and 144 is efficiently exerted on the movable plate 148. In particular, the resonance frequency of the movable plate 148 is tuned to a medium frequency range such as idling vibration and medium-speed booming noise, which is in the same range as the tuning frequency range of the second orifice passage 146. The frequency range is set to a lower frequency range than the high excitation frequency range or the resonance frequency of the filter orifice.

  In the present embodiment, the partition member 36 and the diaphragm 76 provided with the movable plate 148 have a first vulcanized molded product of the main rubber elastic body 16 provided with the first and second mounting brackets 12 and 14. In addition to being assembled using the second bracket fittings 82 and 84, the vibration plate 100 is connected to the partition member 36 and the second bracket fitting via the first and second vibration plate support plate springs 120 and 128. The mount main body 18 is configured with a structure elastically supported by 84.

  On the other hand, in the electromagnetic actuator 20 having a separate structure from the mount main body 18, a yoke member 154 as a stator is spaced apart on the outer peripheral side of a movable member 152 as a mover, and a coil is attached to the yoke member 154. 156 has a structure assembled. The movable member 152 is driven in the axial direction with respect to the stator (yoke member 154) by the action of a magnetic field generated between the movable member 152 and the yoke member 154 by energization of the coil 156. .

  Specifically, the coil 156 has a cylindrical shape extending in the axial direction so as to be wound in the circumferential direction, and the surface of the coil 156 is covered with an electrical insulating layer 158. Further, the yoke member 154 is made of a ferromagnetic material and is disposed so as to surround the periphery of the coil 156 except for the inner peripheral surface side, so that a magnetic path is formed so as to surround the periphery. In the magnetic path, a magnetic gap is formed in the inner peripheral portion of the coil 156, and a movable member 152 is disposed at a position corresponding to the magnetic gap.

  The movable member 152 is made of a ferromagnetic material having a substantially cylindrical shape. Further, an inner flange-like engagement protrusion 160 is provided on the inner peripheral surface of the movable member 152. Further, a cylindrical sliding sleeve 162 is disposed between the movable member 152 and the coil 156, and the movable member 152 is inserted into the sliding sleeve 162 and axially along the sliding sleeve 162. Accordingly, the movable member 152 is movable in the axial direction with respect to the yoke member 154.

  The yoke member 154 is assembled with a third bracket fitting 164 and a fourth bracket fitting 166. The third bracket fitting 164 has an annular plate shape. The fourth bracket fitting 166 has a substantially cylindrical shape, and an outer flange-shaped portion 168 is formed on the outer peripheral edge on the upper side in the axial direction, and a circumferential direction is formed on the inner peripheral edge on the upper side in the axial direction. A notch-shaped stepped portion 170 extending continuously is formed. The peripheral wall of the fourth bracket metal fitting 166 is provided with a hole for projecting and arranging a connector for supplying external power to the coil 156 outward. In addition, inner flange-shaped portions 172 and 174 protrude from the upper end portion of the third bracket fitting 164 and the lower end portion of the fourth bracket fitting 166, respectively. Here, an outer flange-shaped locking fitting 176 is externally attached to an intermediate portion of the yoke member 154 in the axial direction, and the locking fitting is attached when the yoke member 154 is inserted into the fourth bracket fitting 166. 176 is overlapped and locked to the stepped portion 170 of the fourth bracket fitting 166. Further, the third bracket metal 164 is overlapped from above the fourth bracket metal fitting 166 and fixed to each other with the fixing bolt 178, so that the locking metal fitting 176 has the third bracket metal fitting 164 and the fourth bracket metal fitting 166. It is pinched between the axial directions. As a result, the yoke member 154 is fixedly supported by the third and fourth bracket fittings 164 and 166 via the locking fitting 176, and the inner flange-like portion 172 of the third bracket fitting 164 and the fourth bracket are fixed. The metal fitting 166 is positioned and arranged at an intermediate portion between the axially opposed surfaces of the inner flange-shaped portion 174.

  An output rod 180 is inserted into the movable member 152 on its central axis. The output rod 180 is composed of a long rod member, and an axially intermediate portion of the output rod 180 is inserted into the engagement protrusion 160 of the movable member 152 while being inserted into the central hole of the movable member 152. While being disposed, the lower end portion in the axial direction of the output rod 180 is positioned inside the movable member 152, while the upper end portion in the axial direction is projected outward in the axial direction of the movable member 152. At the lower end portion of the output rod 180 positioned inside the movable member 152, a lock bolt structure is formed, and a positioning nut 182 is screwed. Using a hexagon wrench or the like, the output rod 180 provided with a lock bolt is rotated relative to the positioning nut 182 to adjust the screwing amount of the positioning nut 182 with respect to the output rod 180, whereby the movable member 152 in the output rod 180 is adjusted. It is possible to change the setting of the protrusion position.

  Further, the lid member 184 is assembled to the lower opening of the movable member 152 so as to cover the opening, so that the lower end portion of the output rod 180 having the positioning nut 182 is accommodated in the movable member 152. It is arranged with. In addition, a male screw portion 188 having a tip portion reduced in diameter via a stepped portion 186 protrudes downward in the axial direction at the central portion of the lid member 184 located on the central axis of the movable member 152. ing.

  Here, one side (upper side in FIG. 1) of the movable member 152 on which the output rod 180 is protruded is supported by the third bracket fitting 164 via the first mover support plate spring 190. Yes. As shown in FIG. 6, the first armature support plate spring 190 is formed of spring steel, stainless steel, or the like, similar to the first and second vibration plate support plate springs 120 and 128. A thin and substantially circular disk, a circular center hole 192 is provided in the central part, and three slits 194 as a lightening part are provided in the middle part in the radial direction, Further, a plurality of insertion holes 196 are provided at predetermined intervals in the outer peripheral portion. A plurality of insertion holes 196 are also formed around the center hole 192 inside the slit 194.

  The upper side of the output rod 108 is inserted into the center hole 192 of the first mover support plate spring 190, and the outer peripheral portion of the second vibration plate support plate spring 128 is connected to the inner flange of the third bracket fitting 164. The upper flange portion 172 is superimposed on the upper flange portion 172 from above. Then, a plurality of fixing bolts 198 are inserted into the respective insertion holes 196 of the first mover support plate spring 190, and the cylindrical spacer 200 is extrapolated on the radial center side of the first mover support plate spring 190. While being arranged, it is screwed and fixed to the movable member 152, and is screwed and fixed to the inner flange-shaped portion 172 of the third bracket fitting 164 on the outer peripheral side of the first mover support plate spring 190.

  As a result, the first mover support plate spring 190 is disposed so as to spread in the direction perpendicular to the axis on one axial side of the movable member 152 (upper side in FIG. 1). By means of the spring 190, one side in the axial direction of the movable member 152 is connected to the second bracket fitting 164 and the second bracket fitting 82, 84 which is bolted to the third bracket fitting 164 as will be described later. The mounting bracket 14 is elastically connected and supported in the axial direction.

  In addition, the other axial side (downward in FIG. 1) of the movable member 152 on which the lid member 184 is disposed is supported by the fourth bracket fitting 166 via the second movable element support plate spring 202. . The second armature support plate spring 202 has substantially the same structure as the second vibration plate support plate spring 128 as shown in FIG. 5, and a circular center hole 204 is provided in the center portion. At the same time, three slits 206 are formed in the intermediate portion in the radial direction as a lightening portion, and a plurality of insertion holes 208 are provided in the outer peripheral portion at predetermined intervals.

  The male screw portion 188 of the lid member 184 is inserted into the center hole 204 of the second mover support plate spring 202, and the step of the lid member 184 is around the center hole 204 of the second mover support plate spring 202. Overlaid on the portion 186. Similarly to the second vibration plate support plate spring 128, a support nut 210 is screwed onto the male screw portion 188 projecting downward from the second mover support plate spring 202. The central portion of the second armature support plate spring 202 is sandwiched between the support nut 210 and the stepped portion 186 of the lid member 184 in the axial direction, and is clamped based on the screwing fixing force of the support nut 210. ing. In addition, the upper end surface of the outer peripheral portion of the second armature support plate spring 202 is superimposed on the lower end surface of the inner flange-shaped portion 174 of the fourth bracket fitting 166, and a plurality of fixing bolts 212 are connected to the second movable member 212. The outer peripheral portion of the second movable member supporting plate spring 202 is fixed to the fourth bracket fitting 166 by being inserted into each insertion hole 208 of the child supporting plate spring 202 and screwed and fixed to the inner flange-shaped portion 174. Has been.

  As a result, the second armature support leaf spring 202 is disposed so as to spread in the direction perpendicular to the axis on the outer side in the axial direction opposite to the first armature support leaf spring 190 with the movable member 152 interposed therebetween. Due to the second armature support plate spring 202, the other axial side of the movable member 152 (the lower side in FIG. 1) is the third and fourth bracket fittings 164 and 166, and the first and second bracket fittings 82 and 84 are extended. It is elastically connected and supported to the second mounting bracket 14 in the axial direction.

  That is, as the movable member 152 is displaced axially relative to the yoke member 154 by the action of a magnetic field generated between the movable member 152 and the yoke member 154 by energization of the coil 156, the first and second The mover support plate springs 190 and 202 are also elastically deformed in the axial direction, so that the output rod 180 and the lid member 184 fixed to the movable member 152 are also movable in the axial direction with respect to the yoke member 154. As apparent from the above description, the output shaft on the mover side of the electromagnetic actuator 20 includes the output rod 180 and the lid member 184. The housing of the electromagnetic actuator 20 that fixes the first and second mover support plate springs 190 and 202 includes a third bracket fitting 164 and a fourth bracket fitting 166.

  Further, the movable member 152 is movable by positioning one side in the axial direction and the other side in the axial direction via the lid member 184 in the direction perpendicular to the axis by the first and second mover support plate springs 190 and 202. The state where the member 152, the output rod 180 and the yoke member 154 are positioned coaxially is maintained. That is, under the non-energized state of the coil 156 as shown in FIG. 1, the initial position of the movable member 152 with respect to the yoke member 154 is held based on the rigidity of the first and second mover support plate springs 190 and 202. ing. In addition, the return of the movable member 152 displaced from the initial position to the initial position is preferably performed using, for example, the elastic deformation action of the first and second movable element support plate springs 190 and 202.

  In addition, the movable member 152 is elastically supported on the stator side via a pair of leaf springs (first and second mover support leaf springs 190 and 202), so that the movable member 152 is a mass component, One mass-spring system using the first and second mover support plate springs 190 and 202 as a spring component is configured. In particular, in order to avoid adverse effects such as stiffening of the mass-spring system due to anti-resonance in a higher frequency range than the vibration frequency to be isolated, the natural frequency of this one mass-spring system is The vibration frequency to be vibrated, that is, the frequency that is sufficiently higher than the driving frequency of the movable member 152 is set.

  When the electromagnetic actuator 20 and the mount body 18 having such a structure are assembled, the second bracket fitting 84 on the mount body 18 side and the third bracket fitting 164 on the electromagnetic actuator 20 side are overlapped with each other in the axial direction. ing. In addition, the insertion holes provided in the axial direction in the first to fourth bracket fittings 82, 84, 164, 166 in advance are aligned in the direction perpendicular to the axis, in particular, the insertion holes of the second bracket fitting 84. Is a screw hole 214. Fixing bolts 215 and 217 are inserted from both sides in the axial direction of the first bracket fitting 82 and the fourth bracket fitting 166 and are screwed and fixed to the screw holes 214, whereby the first to fourth bracket fittings 82, 84, 164 and 166 are clamped and fixed to each other in the axial direction. As a result, as described above, the main body in which the partition member 36 and the diaphragm 76 are provided with the first and second mounting brackets 12 and 14 based on the bolt fixing in the axial direction of the first bracket fitting 82 and the second bracket fitting 84. The mount body 18 is configured by being fixedly assembled to the integrally vulcanized molded product of the rubber elastic body 16, and the electromagnetic actuator 20 includes the first to fourth bracket fittings 82, 84, 164, 166. Thus, it is assembled to the second mounting bracket 14 of the mount body 18.

  In this state, when the mount body 18 and the electromagnetic actuator 20 are fixed to each other, the support nut 136 provided at the tip of the drive rod 108 extending downward from the vibration plate 100 and the movable member 152 protrude upward. The distal end portion of the output rod 180 is pressed in a direction approaching each other in the axial direction, and is held in contact. Further, the drive rod 108 and the output rod 180 are positioned in the direction perpendicular to the axis by the first and second vibrating plate supporting plate springs 120 and 128 and the first and second movable member supporting plate springs 190 and 202, respectively. Accordingly, they are in contact with each other in the axial direction on the central axis of the automobile engine mount 10.

  The amount of pre-compression that holds the drive rod 108 and the output rod 180 in contact with each other in the axial direction is at least larger than the excitation amplitude (axial direction) that is expected in the vibration plate 100. When the lid is covered and the amount of pre-compression is smaller than the vibration amplitude of the vibration plate 100, the drive rod 108 and the output rod 180 are separated from each other in the drive shaft direction during vibration, and a problem of hitting sound or impact occurs. This is because of concern. In the present embodiment, for example, if the vibration amplitude of the vibration plate 100 is about 1 to 2 mm, by applying pre-compression of 5 mm, 2.5 mm each on the drive rod 108 side and the output rod 180 side. The mount body 18 and the electromagnetic actuator 20 are assembled in a state where the axial precompression displacement is applied.

  In particular, as one of the means for setting the amount of pre-compression described above, a combined spring of the first vibration plate support plate spring 120 and the second vibration plate support plate spring 128 and the first movable member support plate spring The tuning of the composite spring of 190 and the second mover support leaf spring 202 is mentioned. In this embodiment, the combined spring of the first vibration plate support plate spring 120 and the second vibration plate support plate spring 128 and the first mover support plate spring 190 and the second mover support plate spring 202 are combined. Synthetic springs are substantially the same. In order to tune the spring characteristics of the first and second vibrating plate supporting plate springs 120 and 128 and the first and second movable member supporting plate springs 190 and 202, for example, the supporting plate springs 120, 128, and 190 are used. , 202 and the slits 124, 132, 194, 206 formed in the respective support plate springs 120, 128, 190, 202, and the like, by changing the settings of the shape, size, material, number, arrangement, and the like.

  Specifically, in the present embodiment, the first vibration plate support plate spring 120 is compared with the second vibration plate support plate spring 128 and the first and second mover support plate springs 190 and 202. It is thin and has a sufficiently small diameter. In addition, one first vibration plate support plate spring 120 is employed, while two second vibration plate support plate springs 128 and two first and second mover support plate springs 190 and 202 are provided. Adopted is a laminated structure in which the driving rod 108 and the output rod 180 are overlapped closely in the axial direction. Further, the support plate springs that are overlapped by two sheets are arranged by slits 132, 194, and 206 formed in the support plate springs 128, 190, and 202 that are overlapped, and the positions projected in the axial direction. The slits 132, 194, and 206 of 128, 190, and 202 are overlapped with each other so as to communicate with each other.

  Further, the lower end surface of the support nut 136 as an abutting surface that abuts the output rod 180 in the axial direction in the drive rod 108 has a flat shape extending in the direction perpendicular to the axis, and the output rod 180 and the shaft The tip surface as a contact surface that contacts in the direction is substantially hemispherical. That is, in the present embodiment, the drive rod 108 and the output rod 180 are in contact with each other in a state where the points are hit or close to the points.

  Furthermore, in the present embodiment, a plurality of spacers 216 are interposed between the overlapping surfaces of the second bracket metal member 84 and the third bracket metal member 164 in the axial direction, and the shape and size of these spacers 216 are large. The distance between the drive rod 108 and the output rod 180 in the axial direction, that is, the amount of pressing in the axial direction between the drive rod 108 and the output rod 180 can be adjusted in accordance with the number of overlaps. Further, by operating the lock bolt and the positioning nut 182 at the lower end of the output rod 180 to change the setting of the protruding position of the output rod 180 from the movable member 152, the axial direction of the drive rod 108 and the output rod 180 can be changed. The amount of pressing is adjustable. As is clear from this, the contact state adjusting mechanism for adjusting the amount of axial pressing between the drive rod 108 and the output rod 180 according to the present embodiment is a lock bolt or positioning nut 182 at the lower end of the output rod 180. The plurality of spacers 216 are interposed between the second bracket fitting 84 and the third bracket fitting 164.

  Based on each form in these first and second vibration plate support plate springs 120, 128 and first and second mover support plate springs 190, 202, the adjustment amount of the contact state adjustment mechanism, etc., the drive rod 108 When the output rod 180 is in contact with the output rod 180, the force of the drive rod 108 toward the output rod 180 and the force of the output rod 180 toward the drive rod 108 are substantially the same, and the vibration amplitude of the vibration plate 100 is larger than the vibration amplitude. A large precompression force is exerted between the drive rod 108 and the output rod 180. Thus, with the drive rod 108 and the output rod 180 pressed against each other in the axial direction and held in contact, the movable member 152 is driven and displaced in the axial direction relative to the yoke member 154 by energization of the coil 156. When they are swung, the axial driving force is transmitted from the output rod 180 to the driving rod 108 while maintaining the contact state, and the driving reaction force is exerted from the driving rod 108 to the output rod 180, so that the vibration plate 100. Is driven to vibrate in the axial direction.

  In the engine mount 10 for an automobile having the above-described structure, for example, an engine ignition signal of a power unit is used as a reference signal, and a vibration detection signal of a member to be shaken such as a vehicle body is used as an error signal for adaptive control or the like. By performing feedback control or the like, energization to the coil 156 is controlled to drive the vibration plate 100 to vibrate in the axial direction. As a result, pressure fluctuation is effective between the pressure receiving chamber 90 and the equilibrium chamber 92 when low frequency vibration such as engine shake is input, or when medium frequency vibration such as idling vibration or low-speed booming sound is input. By driving and controlling the vibration plate 100 so that the vibration is generated, the vibration isolation effect based on the resonance action of the fluid through the first orifice passage 98, the resonance action of the fluid through the second orifice passage 146, etc. The anti-vibration effect based on this can be exhibited effectively.

  In the present embodiment, a cushioning rubber layer 218 extending with a substantially constant thickness dimension is adhered and formed on the surface of the inner flange-shaped portion 50 that is opposed to the vibration plate 100. . As a result, the vibration plate 100 strikes the inner flange-shaped portion 50 via the shock-absorbing rubber layer 218, and the occurrence of hitting sound that becomes a problem due to hitting based on the shock-absorbing action of the shock-absorbing rubber layer 218 is suppressed. It is done.

  Further, for example, when a medium speed or high-speed booming sound or the like in a higher frequency range than the tuning frequency range of the first orifice passage 98 or the second orifice passage 146 is input, a driving force corresponding to the vibration is applied. It acts on the vibration plate 100. As a result, the internal pressure of the pressure receiving chamber 90 composed of the first and second pressure receiving chambers 142 and 144 is controlled based on the excitation drive of the excitation plate 100, and is positive or active against the high frequency vibration. The anti-vibration effect can be effectively exhibited.

  In particular, in the present embodiment, the resonance frequency of the fluid that flows through the through holes 62 and 68 of the first and second partition plates 40 and 42 and the circular region 74 will obtain an active vibration isolation effect by the vibration plate 100. In combination with being tuned to a high frequency range such as medium speed to high speed booming noise, the vibration is generated in the first pressure receiving chamber 142 and the second pressure receiving chamber 144 based on the vibration driving of the vibration plate 100. The pressure fluctuation to be squeezed is efficiently transmitted using the resonance action of the fluid squeezed through the through holes 62 and 68 and the circular region 74. Then, the pressure fluctuations of the first pressure receiving chamber 142 and the second pressure receiving chamber 144 are positively or actively controlled, so that the first mounting bracket 12 connected by the main rubber elastic body 16 and the second pressure fitting 12 are connected. The vibration transmission characteristic of the mounting bracket 14 is adjusted, and the intended vibration isolation effect can be advantageously exhibited.

  Therefore, in the automobile engine mount 10 according to the present embodiment, the vibration plate 100 includes first and second vibration plate support plate springs 120 via boss-like protrusions 102 and drive rods 108 on both axial sides. , 128 is positioned and supported in a direction perpendicular to the axis with respect to the partition member 36 and the second bracket fitting 84. In addition, the movable member 152 of the electromagnetic actuator 20 that exerts an axial driving force on the vibration plate 100 has first and second movable element support plate springs 190 via the output rod 180 and the lid member 184 on both sides in the axial direction. 202 is positioned and supported in a direction perpendicular to the axis with respect to the third and fourth bracket fittings 164 and 166. As a result, the displacement of the vibration plate 100 and the movable member 152 in the axial direction is sufficiently allowed, while effective positioning is realized in the direction perpendicular to the axis.

  Further, the mount main body 18 provided with the vibration plate 100 and the electromagnetic actuator 20 provided with the movable member 152 are separated from each other. When the mount main body 18 and the electromagnetic actuator 20 are assembled, the drive rod 108 and the output are output. The rods 180 are pressed against each other in the axial direction and held in contact.

  From this, for example, the drive rod 108 and the output rod 180 are misaligned (eccentric) with each other in the direction perpendicular to the axis due to manufacturing errors, assembly errors, and the like of the respective parts of the mount body 18 and the electromagnetic actuator 20. In some cases, the generation of moments around the fixed portion due to the fixed assembly of the drive rod 108 and the output rod 180 is avoided.

  Moreover, since the drive rod 108 and the output rod 180 are elastically supported by a pair of support plate springs 120, 128, 190, and 202, respectively, they are separated from each other. Tuning the spring characteristics of the support plate springs 120, 128, 190, 202 and adjusting the axial position of the output rod 180 increase the force with which the drive rod 108 and the output rod 180 are pressed against each other in the axial direction. Thus, it is possible to exert a precompression larger than the vibration amplitude of the vibration plate 100 in a direction in which the drive rod 108 and the output rod 180 are in contact with each other.

  As a result, the drive efficiency of the vibration plate 100 is stably obtained, and the intended vibration control is effectively realized. In addition, the possibility that the vibration plate 100 abuts against the peripheral wall portion of the central hole 46 of the partition member 36 is reduced, and the possibility that scratches or the like are generated due to the abutment can be suitably avoided.

  In this embodiment, the combined spring of the first and second vibrating plate support plate springs 120 and 128 and the combined spring of the first and second mover support plate springs 190 and 202 are substantially the same. Therefore, the amount of elastic deformation (displacement) in the axial direction accompanying the contact between the drive rod 108 and the output rod 180 becomes substantially the same, so that pre-compression tuning is facilitated.

  Further, since the vibration plate 100 is supported by the mount main body 18 on both sides of the central axis, the outer peripheral surface of the vibration plate 100 is solved while solving the problem caused by the interference with the central hole 46 of the vibration plate 100. And the gap between the inner peripheral surfaces of the central hole 46 can be made sufficiently small, and the axial length of the opposing portion of the vibration plate 100 and the central hole 46 can be set large. As a result, the piston area at the opposed portion of the vibration plate 100 and the central hole 46 is increased, and the pressure leakage of the pressure receiving chamber 90 from the gap is suppressed, so that the pressure control efficiency and stabilization of the pressure receiving chamber 90 is improved. Can be.

  In addition, according to the automobile engine mount 10 of this structure, when manufacturing the electromagnetic actuator 20, two important operations are also suitably realized.

  The first work is an axial position setting work for the movable member 152 relative to the yoke member 154. The electromagnetic actuator 20 according to the present embodiment has a solenoid structure in which a stator (yoke member 154) having a coil 156 is disposed on the outer peripheral side of the mover (movable member 152). The position in the axial direction with respect to the stator is important, and high-precision positioning is required. Therefore, in the present embodiment, the axial positioning of the output rod 180 with respect to the positioning nut 182 is taken into consideration while taking into account the axial displacement of the output rod 180 accompanying pre-compression when the electromagnetic actuator 20 is assembled to the mount body 18. The structure can be adjusted. Therefore, the tuning range of the axial position of the mover relative to the stator is increased, and the axial positioning of the movable member 152 including the output rod 180 relative to the yoke member 154 is realized with high accuracy.

  The second operation is setting parallelism of the mover (movable member 152) with respect to the stator (yoke member 154). In particular, in the present embodiment, when the movable member 152 is assembled to the yoke member 154, the axial position of the movable member 152 is set in the first operation described above, and then the movable member 152 is decentered in the direction perpendicular to the axial direction. The movable member 152 is brought into contact with the yoke member 154 in the direction perpendicular to the axis of the yoke member 154 via the first and second mover support plate springs 190 and 202 after being brought into contact with the yoke member 154 in the direction perpendicular to the axis. Positioning and assembly are also possible. Thereby, the movable member 152 is assembled in parallel to the yoke member 154. In addition, when the movable member 152 is displaced, the movable member 152 is displaced in the axial direction while suppressing the tilt blur while being substantially in contact with the entire length in the axial direction at one place on the outer peripheral surface. The state is stabilized and the occurrence of galling or the like is more effectively prevented.

  As mentioned above, although one embodiment of the present invention has been described in detail, the present invention is not limited in any way by the specific description in the embodiment, and various changes, modifications, and modifications based on the knowledge of those skilled in the art. Needless to say, the present invention can be implemented in a mode with improvements and the like, and all such modes are included in the scope of the present invention without departing from the gist of the present invention.

  For example, the vibration plate 100, the first and second vibration plate support plate springs 120 and 128, the first and second mover support plate springs 190 and 202, the first orifice passage 98, and the second orifice passage. The shape, size, structure, number, arrangement, and the like of the 146, the filter orifice, the movable plate 148, and the like are not limited to those illustrated. In particular, the first orifice passage 98, the second orifice passage 146, the filter orifice, the movable plate 148, and the like are arranged as necessary, and are not essential components.

  In particular, in the above-described embodiment, the head of the fixing bolt 118 fixed to the boss-like protrusion 102 of the vibration plate 100 and the guide shaft 150 of the movable plate 148 are opposed to each other with a predetermined distance in the axial direction. . Therefore, for example, the vibration plate 100 can be driven upward, the guide shaft 150 can be pressed with the fixing bolt 118, and the movable plate 148 can be held in contact with the first partition plate 40. is there. As a result, the through-hole 62 of the first partition plate 40 is covered with the movable plate 148 and the displacement of the movable plate 148 is constrained, so that the fluid flow action through the second orifice passage 146 is substantially generated. It is possible to prevent clogging, that is, to make the second orifice passage 146 shut off. Therefore, if the second orifice passage 146 is kept in the cutoff state at the time of vibration input in the tuning frequency region of the first orifice passage 98, the pressure leakage through the second orifice passage 146 of the pressure receiving chamber 90 is further increased. Since it can be reliably suppressed, the vibration isolation effect by the first orifice passage 98 can be obtained more effectively.

  Further, for example, by driving and displacing the vibration plate 100 downward, the rim-shaped protrusion 106 of the vibration plate 100 is kept in contact with the inner flange-shaped portion 50 of the partition member main body 38. Between the second pressure receiving chamber 144 and the equilibrium chamber 92, it is also possible to more reliably prevent the fluid flow action through the gap between the vibration plate 100 and the central hole 46. As a result, when the vibration in the tuning frequency range of the second orifice passage 146 is input, the outer peripheral portion (rim-shaped protrusion 106) of the vibration plate 100 is held in contact with the inner flange-shaped portion 50, whereby the second pressure receiving chamber. Since the pressure leakage through the gap 144 is more reliably suppressed, the vibration isolation effect by the second orifice passage 146 can be obtained more effectively.

  In the embodiment, the combined spring of the first and second vibrating plate support plate springs 120 and 128 and the combined spring of the first and second mover support plate springs 190 and 202 are substantially the same. However, the drive rod 108 and the output rod 180 may be different from each other according to the required contact state.

  In addition to the structure in which the stator (yoke member 154) provided with the coil 156 is arranged on the outer peripheral side of the movable element (movable member 152) as shown in the electromagnetic actuator employed, for example, JP-A-2005-291276. As shown in Japanese Patent Laid-Open No. 2000-227137, etc., one of a plurality of permanent magnets and a yoke member is disposed on the mover side, and the other of the plurality of permanent magnets and the yoke member is disposed on the stator side. By arranging the coils, the magnetic poles generated by energizing the coils can alternately increase or decrease the N poles and S poles of the plurality of permanent magnets to drive the mover back and forth with respect to the stator. It is also possible to adopt a structure.

  In addition, in the above-described embodiments, specific examples of applying the present invention to an automobile engine mount have been described. However, the present invention is not limited to an automobile body mount, a differential mount, or the like, and is also used for vibration isolation of various vibrators other than an automobile. Any of them can be applied to the apparatus.

It is a longitudinal cross-sectional view of the engine mount for motor vehicles as one Embodiment of this invention, Comprising: The figure corresponded in the II cross section of FIG. The top view of the partition member main body which comprises some engine mounts for the vehicles. The top view of the 1st vibration board support leaf | plate spring which comprises some engine mounts for the motor vehicles. It is a longitudinal cross-sectional view which expands and shows the said 1st vibration board support plate spring, Comprising: The figure corresponded in the IV-IV cross section of FIG. The top view of the 2nd vibration board support leaf | plate spring which comprises a part of engine mount for the said motor vehicles. The top view of the 1st needle | mover support leaf | plate spring which comprises a part of engine mount for the motor vehicles.

Explanation of symbols

10: Automotive engine mount, 12: First mounting bracket, 14: Second mounting bracket, 16: Rubber elastic body, 18: Mount body, 20: Electromagnetic actuator, 90: Pressure receiving chamber, 100: Excitation Plate: 102: boss-like protrusion, 108: drive rod, 120: first vibration plate support plate spring, 128: second vibration plate support plate spring, 152: movable member, 154: yoke member, 156: Coil, 164: third bracket fitting, 166: fourth bracket fitting, 180: output rod, 184: lid member, 190: first mover support plate spring, 202: second mover support plate spring

Claims (7)

The first mounting member and the second mounting member are connected by a main rubber elastic body to form a pressure receiving chamber in which a part of the wall is configured by the main rubber elastic body, and an incompressible fluid is formed in the pressure receiving chamber. In addition, another part of the wall portion of the pressure receiving chamber is configured by a vibration plate, and the pressure of the pressure reception chamber is actively controlled by exciting the vibration plate. In an active fluid-filled vibration isolator,
A mount body including the first mounting member, the second mounting member, the main rubber elastic body, the pressure receiving chamber, and the vibration plate is configured, and the vibration plate of the mount body has a central portion. A first excitation plate support plate spring that forms a drive shaft that protrudes outward from the first drive plate and that is positioned on both sides of the excitation plate in the axial direction of the drive shaft and extends in a direction perpendicular to the axis. A second vibration plate support plate spring is provided, and the vibration plate is elastically supported to the second mounting member by the first and second vibration plate support plate springs,
An electromagnetic actuator that generates an axial driving force with respect to the output shaft on the mover side by energizing the coil on the stator side has a separate structure from the mount body, and the axial direction of the output shaft of the actuator The first mover support plate spring and the second mover support plate spring that are located on both sides of the mover and spread in the direction perpendicular to the axis are provided. The child support plate spring is elastically supported to the electromagnetic actuator housing,
The second mounting member of the mount body and the housing of the electromagnetic actuator are fixed to each other, and the drive shaft of the vibration plate of the mount body and the output shaft of the electromagnetic actuator are axially arranged. Are pressed against each other and held in contact with each other, and an axial driving force is transmitted from the output shaft to the drive shaft to drive the vibration plate to vibrate. Shaker.   One of the surfaces in contact with each other in the axial direction of the drive shaft and the output shaft has a flat shape extending in the direction perpendicular to the axis, and the other of the surfaces in contact with each other in the axial direction of the drive shaft and the output shaft is a hemisphere The active fluid-filled vibration isolator according to claim 1, which is shaped.   The active fluid-filled vibration isolator according to claim 1 or 2, further comprising a contact state adjusting mechanism for adjusting an axial pressing amount between the drive shaft and the output shaft.   The partition member is supported by the second mounting member, and an equilibrium chamber in which a part of the wall portion is formed of a flexible film is formed on the opposite side of the pressure receiving chamber across the partition member, and the partition member A through-hole is formed in the central portion of the first and the vibration plate is disposed in the through-hole, and an orifice passage is formed in the outer peripheral portion of the partition member to communicate the pressure receiving chamber and the equilibrium chamber. The active fluid-filled type according to any one of claims 1 to 3, wherein the drive shaft of the vibration plate is extended to the equilibrium chamber side so as to protrude through the flexible membrane. Anti-vibration device.   In the partition member, a second orifice passage tuned to a higher frequency region than the orifice passage is formed, and an opening portion on the pressure receiving chamber side in the second orifice passage is opened in the through hole, The active fluid-filled vibration isolator according to claim 4, wherein the movable plate is disposed so as to be displaceable so as to cover the through hole.   A plurality of plates including at least one of the first vibration plate support plate spring, the second vibration plate support plate spring, the first mover support plate spring, and the second mover support plate spring. The active fluid-filled vibration isolator according to any one of claims 1 to 5, wherein a laminated structure in which springs are stacked is used.   Each of the plurality of leaf springs having a laminated structure is formed with a plurality of curved arm portions extending in a spiral shape in the circumferential direction by providing a plurality of lightening holes. The active fluid-filled type vibration damping device according to claim 6, wherein the leaf springs are superposed on each other in a state in which the respective hollow holes are in communication with each other.

Images