JP4850551B2 - Conveyor shaft - Google Patents

Description

  The present invention relates to a transport shaft used for transporting a printed circuit board or the like in an etching apparatus, and in particular, has excellent resistance to etching conditions such as resistance to chemicals, etching temperature and spray pressure, and is lightweight. The present invention relates to a transport shaft.

  Etching equipment is widely used for microfabrication of electronic parts such as printed circuit boards, liquid crystals, shadow masks, etc., but since the metal is continuously melted and processed, the characteristics required for the processing part of the equipment are as follows: Acid resistance, alkali resistance and organic chemical resistance are required, and resistance to etching solution temperature and spray pressure is also required.

  In particular, since the conveying shaft for continuously conveying the product in the etching tank also serves as the drive shaft, in addition to the above characteristics, a product reliability that maintains a long-term smooth rotational force is also required. Furthermore, as the products become lighter and larger, in addition to reducing the weight of the transport shaft, shape stability that suppresses deflection and the like is also required.

  Conventional transport shafts typically use structural materials that are chemically resistant by coating a highly rigid metal with an epoxy resin. However, for the purpose of weight reduction, epoxy is used with carbon fiber as the base material. A pultruded product molded from a resin has also been used.

However, the activation of the carbon fiber market is in the direction of further expansion. In particular, carbon fibers for pultruded products are difficult to obtain due to their special chemical resistance, and the price is also rising. Under such circumstances, glass fibers excellent in chemical resistance have been developed and are expected to be applied to sewers, septic tanks and reinforcing steel substitute FRP rods (for example, see Patent Document 1).
JP 2002-60252 A

  The transport shaft used in the etching equipment is a part that requires chemical resistance such as alkali resistance and acid resistance, but there was no fiber to replace carbon fiber, so unsaturated polyester and vinyl ester systems that do not use this The resin pultruded product could not satisfy the chemical resistance.

  For this reason, such a conveyance shaft has problems such as resin cracking, deformation, scratches on the conveyance product due to uneven rotation during conveyance, and the product being caught during conveyance and not being able to smoothly convey. It has occurred.

  Therefore, the present invention has an object to provide a transport shaft suitable for an etching apparatus having a reduced weight, in addition to being excellent in chemical resistance and being able to transport smoothly.

  As a result of diligent investigation to solve the above problems, the present inventors have found a transport shaft that is excellent in chemical resistance, light weight, molding shrinkage, and can be manufactured at low cost. The invention has been completed.

  The glass yarn used for the substrate of this conveying shaft is replaced with E-glass with poor chemical resistance and glass yarn containing high zirconia, and vinyl ester or unsaturated polyester resin is used as the resin, and polyethylene is used as the low shrinkage agent. Therefore, a transport shaft that satisfies chemical resistance, light weight and dimensional stability, can satisfy long-term reliability as a transport shaft, and can be manufactured as a low-cost pultruded product. I found it.

That is, the conveyance shaft of the present invention is a conveyance shaft obtained by impregnating a glass yarn converged from a plurality of glass fibers with a thermosetting resin composition and pultrusion molding. ₂ 54-65 _mass%, ZrO 2 14 to 25 _wt% and is characterized by containing as an essential component Na 2 O 10 to 17 wt%.

  According to the conveying shaft of the present invention, since it can be manufactured as a pultruded product having excellent chemical resistance, light weight, and molding shrinkage, the long-term reliability of the product can be improved, and it is special and expensive. Therefore, it is possible to provide a highly reliable product at a low cost.

  Hereinafter, the present invention will be described in detail.

  The conveying shaft of the present invention uses a specific glass fiber as a base material, impregnates the glass fiber obtained by converging the glass fiber with a thermosetting resin composition, and molds this by pultrusion molding. It is what.

  Here, the thermosetting resin composition used in the present invention can use a thermosetting resin such as a vinyl ester resin or an unsaturated polyester resin as a base resin, and is preferably a vinyl ester resin.

  Examples of the thermosetting resin composition include (A) a vinyl ester resin, (B) a crosslinking agent, (C) a low shrinkage agent, (D) an inorganic filler, and (E) a release agent. And (F) an organic peroxide as an essential component.

  The (A) vinyl ester resin used in the present invention can be used without particular limitation as long as it is generally used as a molding material. For example, D-953 (Dainippon Ink Industries, Ltd., product) Name). Such (A) vinyl ester resin is obtained by reacting (a) an acidic component and (b) an epoxy resin component.

  Here, examples of the acid component (a) include unsaturated monobasic acids such as acrylic acid, methacrylic acid, crotonic acid, and sorbic acid, and phthalic acid, phthalic anhydride, isophthalic acid, terephthalic acid, A mixture of two or more dibasic acids such as tetrahydrophthalic acid, tetrahydrophthalic anhydride, hexahydrophthalic acid, hexahydrophthalic anhydride, and adipic acid can also be used.

  In addition, as the (b) epoxy resin component, as long as it has two or more epoxy groups in one molecule, it can be widely used without being limited by molecular structure, molecular weight, etc. Specifically, Examples thereof include an epoxy resin having a bisphenol type, novolak type or biphenyl type aromatic group, an epoxy resin in which a polycarboxylic acid is glycidyl etherified, and an epoxy resin having an alicyclic group in which an epoxy group is condensed to a cyclohexane derivative. These epoxy resins can be used individually or in mixture of 2 or more types. Furthermore, as an epoxy resin component, in addition to these, a liquid monoepoxy resin can be used as a combined component as required.

  It is preferable that the compounding quantity of this (A) vinyl ester resin is the range of 70-85 mass% in a thermosetting resin composition.

  As the (B) cross-linking agent used in the present invention, any one having a double bond polymerizable with the (A) vinyl ester resin can be used. For example, styrene monomer, divinylbenzene, diallyl phthalate monomer, methacrylic acid Examples include methyl and triallyl isocyanurate. It is preferable that the compounding quantity of this (B) crosslinking agent is the range of 1-2 mass% in a thermosetting resin composition.

  As the (C) low shrinkage material used in the present invention, polyethylene resin, saturated polyester resin, rubber, polyethylene, etc., which are thermoplastic resins, can be used. From the viewpoint of chemical resistance, light weight, and low shrinkage, polyethylene is used. A resin is preferred. Among these, a polyethylene resin powder having a glass transition point of 70 to 120 ° C. is particularly preferable for improving chemical resistance and molding shrinkage. It is preferable that the compounding quantity of this (C) low shrinkage | contraction material is the range of 0.5-1.5 mass% in a thermosetting resin composition.

  Examples of the (D) inorganic filler used in the present invention include those usually used such as barium sulfate, calcium carbonate, aluminum hydroxide, silica, and glass balloon, and are not particularly limited. It is preferable that the compounding quantity of this (D) inorganic filler is the range of 10-20 mass% in a thermosetting resin composition.

  The (E) mold release agent used in the present invention may be any mold release agent that is usually used as a molding material. Examples thereof include commercially available silicone oils, and among these, epoxy-modified silicone oils are preferred. The compounding quantity of this (E) mold release agent is 0.01-2 mass% in a thermosetting resin composition.

  The organic peroxide (F) used in the present invention is not particularly limited as long as it is a compound that is usually used as a curing agent for vinyl ester resins, and examples thereof include benzoyl peroxide and di-t-butyl peroxide. And isobutyryl peroxide. It is preferable that the compounding quantity of this (G) organic peroxide is the range of 0.1-2 mass% in a thermosetting resin composition.

The glass yarn used in the present invention is a fibrous substrate obtained by converging glass fibers, the glass fibers _are SiO 2 54 to 65 _wt%, ZrO 2 14 to 25 wt%, _Na 2 O It contains 10 to 17% by mass as essential components, and other components include Li ₂ O 0 to 5% by mass, K ₂ O 0 to 8% by mass, RO (where R is Mg, Ca, Sr, Ba) And 0 to 10% by mass, TiO ₂ 0 to 7% by mass, and Al ₂ O ₃ 0 to 2% by mass. Thus, if it is a glass fiber containing high zirconia containing a specific amount of a specific component, it may be manufactured under normal manufacturing conditions.

  The glass fiber used here is preferably subjected to sizing treatment with a silane coupling material on the surface to maintain chemical resistance, and the sizing agent for performing this sizing treatment has low reactivity with an alkali component. Examples thereof include agents having good wettability with respect to the matrix resin. Specifically, a silane coupling agent such as methacryl silane or ureido silane or a mixture thereof is preferable.

  As a fiber base material, the above glass fiber is essential, but in addition, glass fiber such as E-glass fiber, T-glass fiber, D-glass fiber, carbon fiber, chemical-resistant organic fiber, etc. are used in combination. May be used.

  The content of the fiber base material is preferably 50 to 80% in terms of the average volume content (volume fraction) of the fiber base material in the molded product. If it is less than 50%, the rigidity of the molded product becomes poor, and if it exceeds 80%, a portion where the fiber reinforcing material is not impregnated with the resin composition is formed, and the physical properties of the pultruded product are deteriorated. Mixing of the thermosetting resin composition for pultrusion and the fiber base material is preferably performed by impregnating the fiber yarn with the thermosetting resin composition so that the resin composition adheres to the fiber base material. Since it is necessary for the fiber base material to be able to withstand the drawing force at the time of pultrusion, it is preferable to use the fiber base material with the roving of the fiber base material oriented in the drawing direction.

  And the pultrusion method used here impregnates the thermosetting resin composition varnish with a glass yarn obtained by converging a plurality of glass fibers described above, for example, 100 to 500 glass fibers, and this glass fiber. By passing the reinforced resin composition through a heating mold, the thermosetting resin composition is cured, the outer shape is adjusted according to the shape of the mold, and the molded article is formed. This pultrusion molding can be performed by appropriately selecting the heating temperature and the drawing speed according to the resin composition to be used.

  Here, the mold temperature to which the glass fiber reinforced resin composition is attached is preferably about 100 to 200 ° C. If the temperature is lower than 100 ° C, the glass fiber reinforced resin composition is easily pulled out in an uncured state. If the temperature exceeds 200 ° C, the curing reaction occurs rapidly, so that defects such as cracks and warpage occur in the molded product. The possibility of making it high.

  The drawing speed is preferably 10 to 120 cm / min. When the drawing speed is less than 10 cm / min, the curing in the mold is completed at an early stage, and the resistance at the time of drawing becomes large and stable continuous molding becomes impossible. On the other hand, the drawing speed is 120 cm / min. When it exceeds the minute, the glass fiber reinforced resin composition is easily pulled out in an uncured state. Therefore, the drawing time (time for passing through the mold) is preferably in the range of 0.5 to 3.0 minutes.

  That is, in pultrusion molding, the glass fiber reinforced resin composition is continuously drawn into a heated mold, and the resin is subjected to a predetermined temperature and cured while passing through the mold, and at the same time from the mold outlet. It will be pulled out in the time. The apparatus used in this pultrusion method is not particularly limited as long as it is a commonly used pultrusion apparatus.

  The mold is heated and controlled by a heater or the like, and the temperature of the mold inlet and the other part of the mold may be controlled separately. For example, the mold inlet temperature is a fiber reinforced resin squeezed at the inlet From the viewpoint of suppressing the gelation of the composition, the temperature of the other part of the mold is suppressed to be lower than the reaction temperature of the curing agent to be used, and from the viewpoint of curing the glass fiber reinforced resin composition, It is preferable to set the temperature or higher. Thus, by dividing the heating zone into two steps or more, the glass fiber reinforced resin composition can be efficiently cured by subsequent heating while suppressing gelation in the vicinity of the inlet, with good operability. Can be molded.

  The molded product thus obtained can be made into a molded product having a small volume shrinkage and excellent appearance and physical properties by mixing a low shrinkage agent.

  Hereinafter, the present invention will be specifically described by way of examples.

Example 1
As a thermosetting resin component, 22 parts by mass of vinyl ester (manufactured by Dainippon Ink Industries, Ltd., trade name: UE3505), 0.35 parts by mass of styrene monomer (manufactured by Nippon Yupica, trade name: styrene monomer), polyethylene Sumitomo Seika Chemicals Co., Ltd., trade name: Frocene UF-1.5) 0.25 parts by mass, barium sulfate (manufactured by Sakai Chemical Industry Co., Ltd., trade name: precipitated barium sulfate-100) 3.7 parts by mass, organic Peroxide 1 (Nippon Yushi Co., Ltd., trade name: Perbutyl O) 0.06 parts by mass, Organic peroxide 2 (Nippon Yushi Co., Ltd., trade name: Perhexa HC) 0.35 parts by mass, release material (Kosakura) Shokai Co., Ltd., trade name: INT-1850HT [Organic acid, glyceride, synthetic resin condensate]) 0.35 parts by mass is put into a kneader (kneader), kneaded for about 20 minutes, and thermosetting. A molding material was obtained. In addition, the compounding quantity shows each compounding quantity with respect to the component total quantity of a thermosetting molding material.

Next, glass yarn ARG (trade name: AR1500-800 / DB, manufactured by Nippon Electric Glass Co., Ltd.) was impregnated into the resin tank containing the obtained thermosetting molding material as a base material, and the resin was impregnated. The glass yarn is fed into a heating mold (length: 600 to 800 mm) at about 165 ° C., heat-cured, drawn at a speed of 20 to 30 cm / min to obtain a round bar and cut with a cutting device, and the volume of the glass fiber. A molded product having a fraction of 73% was obtained.
The obtained pultruded product was machined to 8 mmφ to produce a conveying shaft.

(Example 2, Comparative Examples 1-2)
According to the same operation as in Example 1, a conveying shaft was produced according to the blending amount shown in Table 2. Here, as the unsaturated polyester, Iupica 3464 (manufactured by Nippon Iupika Co., Ltd., trade name) was used, and as the E-glass, ERS2310-554A / L (manufactured by Central Glass Co., Ltd., trade name) was used.

* 1: Measured according to JIS K 6911.
* 2: Measured according to JIS K 6911.
* 3: Measured according to JIS K 6911.
* 4: Measured according to JIS K 6911.
* 5: The weight change rate before and after the treatment was measured when the test piece was immersed in cupric chloride + 3N hydrochloric acid aqueous solution (80 ° C.) and treated for 1000 hours.
* 6: The weight change rate before and after the treatment when the test piece was immersed in a 3% aqueous sodium hydroxide solution (80 ° C.) and treated for 1000 hours was measured.

Note that * 5 and * 6 were determined based on the following criteria based on the numerical range of the weight change rate.
A: 0 to 0.20%
○: 0.21 to 0.50%
Δ: 0.51 to 1.00%
X: 1.00% or more

Claims (3)

A shaft for conveyance obtained by impregnating a plurality of glass yarns with a thermosetting resin composition and pultrusion molding,
Glass fiber base material constituting the glass _yarns, SiO 2 54 to 65 _wt%, ZrO 2 14 to 25 _wt%, Ri Na contained as Na 2 O 10 to 17 wt% of the essential components,
The thermosetting resin composition comprises (A) a vinyl ester resin, (B) a crosslinking agent, (C) a low shrinkage agent, (D) an inorganic filler, (E) a release agent, and (F ) A transport shaft for an etching apparatus which contains an organic peroxide as an essential component . 2. The transport shaft for an etching apparatus according to claim 1, wherein the glass fiber is sizing treated with a silane coupling agent. Examples (C) low shrinkage material, according to claim 1, wherein the use 0.5 to 1.5 wt% of polyethylene a thermosetting resin composition having a glass transition point of 70 to 120 ° C. Conveyor shaft for etching equipment .