JP4848975B2 - Resonance frequency adjusting device and resonance frequency adjusting method - Google Patents

Description

  The present invention relates to a resonance frequency adjusting device and a resonance frequency adjusting method.

For example, an optical scanner for performing drawing by optical scanning with a printer or the like is known that uses an actuator composed of a torsional vibrator. Generally, such a torsional vibrator is composed of a mirror substrate and a torsion beam that supports the mirror substrate.
In such a torsional vibrator, the rotation angle of the mirror substrate is increased by being driven at a frequency equal to the resonance frequency determined by the moment of inertia around the rotation center axis of the mirror substrate and the spring constant of the torsion beam. Can do.

In general, such a torsional vibrator integrally forms a mirror substrate and a torsion beam by etching a silicon substrate. For this reason, depending on the etching accuracy, the moment of inertia around the rotation center axis of the mirror substrate and / or the spring constant of the torsion beam deviates from the target value, and the actual resonance frequency of the torsional vibrator becomes the target resonance frequency. May be off.
Therefore, as a method of correcting such a deviation of the resonance frequency, a mass piece such as resin is attached to the plate surface of the mirror substrate, and the torsional vibration is increased by increasing the moment of inertia around the rotation center axis of the mirror substrate. A method of matching the resonance frequency of the child with the target resonance frequency is disclosed (for example, see Patent Document 1).

  However, in Patent Document 1, one kind of resin is attached to the plate surface of the mirror substrate so that the moment of inertia around the rotation center axis of the mirror substrate is increased. Therefore, for example, if the specific gravity of this resin is large, it is difficult to finely adjust the moment of inertia around the rotation center axis of the mirror substrate. Conversely, if the specific gravity of this resin is small, about the rotation center axis of the mirror substrate is difficult. A large amount of resin is required to increase the moment of inertia. In other words, the method of Patent Document 1 cannot efficiently adjust the moment of inertia around the rotation center axis of the mirror substrate.

JP 2004-191953 A

  An object of the present invention is to provide a resonance frequency adjusting device and a resonance frequency adjusting method capable of adjusting the resonance frequency very efficiently.

Such an object is achieved by the present invention described below.
The resonance frequency adjusting device of the present invention includes a movable plate and a pair of coupling portions connected to the movable plate, and is configured to rotate the movable plate while twisting and deforming the pair of coupling portions. Measuring means for measuring the resonance frequency of the vibration system ,
On the plate surface of the movable plate, a droplet applying unit capable of applying each droplet of a plurality of liquids having different liquid types including a resin material;
Based on the measurement results of the measuring means, the application position of the droplets on the plate surface of the movable plate, the combination of the liquid type and the number of liquid droplets applied to the application position, and at least two types of the liquid types Control means for controlling the droplet applying means so as to execute the application of the droplet under the conditions obtained using
Each of the plurality of liquids has different specific gravity when cured or solidified,
The measuring means, the resonance frequency f ₁ of the oscillating system, in a defined position of the movable plate by the droplet applying means, a defined the droplet by weight imparted defined of said liquid to solidify And measuring the resonance frequency f _{2 of the} vibration system having the mass piece formed by
The control means obtains an inertia moment Is of the mass piece around the rotation center axis of the movable plate, and based on the inertia moment Is, the resonance frequency f ₁ and the resonance frequency f ₂ , An inertia moment I about the rotation center axis and a torsion spring constant K of the pair of connecting portions are obtained, and further, the resonance frequency is calculated based on the inertia moment Is, the inertia moment I, and the torsion spring constant K. The amount of inertia moment increase ΔI necessary to match f ₂ with the target resonance frequency f ₀ of the vibration system is obtained, the combination is obtained based on the obtained amount of increase ΔI, and the obtained combination is obtained. Activating the droplet applying means based on
After applying the droplets of at least two or more kinds of the liquid onto the plate surface of the movable plate by the droplet applying means, the liquid droplets are cured or solidified, and the inertia around the rotation center axis of the movable plate The resonance frequency of the vibration system is adjusted by increasing the moment.
Accordingly, it is possible to provide a resonance frequency adjusting device that can adjust the resonance frequency of the vibration system extremely efficiently and accurately.

In the resonance frequency adjusting device according to the aspect of the invention, the control unit is configured to preferentially set a portion distal to the rotation center axis of the movable plate on the plate surface of the movable plate as the droplet application position. It is preferable that
As a result, an appropriate number of liquids necessary for adjusting the resonance frequency of the vibration system can be reduced, and the resonance frequency of the vibration system can be adjusted extremely efficiently.

In the resonance frequency adjusting apparatus of the present invention, the control unit preferentially sets a position near the line segment passing through the center of gravity of the movable plate and orthogonal to the rotation center axis as the droplet application position. It is preferable that it is comprised.
Thereby, the center of gravity of the movable plate can be kept substantially at the center on the rotation center axis in a plan view of the movable plate. As a result, it is possible to provide the vibration system having extremely excellent rotation characteristics.

In the resonance frequency adjusting apparatus of the present invention, it is preferable that the control means is configured to preferentially apply a liquid having a high specific gravity among the plurality of liquids.
In this way, by determining the upper limit value of the number of droplets at each application site, it is possible to prevent droplets from dripping or bleeding, and to adjust the resonance frequency of the vibration system very accurately.
In the resonance frequency adjusting apparatus of the present invention, it is preferable that an upper limit value is set for the number of droplets that can be applied to the droplet application position.
Thereby, the number of droplets required for adjusting the resonance frequency of the vibration system can be reduced, and the resonance frequency of the vibration system can be adjusted extremely efficiently.

In the resonance frequency adjusting device of the present invention, a light reflecting portion having light reflectivity is provided on one surface of the movable plate,
It is preferable that the control unit is configured to determine an application site for applying the droplet on a surface opposite to a surface of the movable plate on which the light reflecting unit is provided.
Thereby, since the application position of the droplet can be determined from the entire plate surface on the side where the light reflecting portion of the movable plate is not provided, the resonance frequency of the vibration system in a wide range, And it can adjust correctly. Further, the movable plate can be reduced in size.

In the resonance frequency adjusting device of the present invention, a light reflecting portion having light reflectivity is provided on one surface of the movable plate,
It is preferable that the control unit is configured to determine an application site of the droplet on a surface of the movable plate on which the light reflecting unit is provided.
Usually, the surface of the movable plate on which the light reflecting portion is provided is exposed to the outside in order to perform optical scanning. Therefore, it is possible to apply the droplets onto the plate surface of the movable plate very easily by configuring the droplets to be applied to the surface of the movable plate on which the light reflecting portion is provided.

The resonance frequency adjusting method of the present invention includes a movable plate and a pair of coupling portions connected to the movable plate, and is configured to rotate the movable plate while twisting and deforming the pair of coupling portions. A resonance frequency adjusting method for adjusting the resonance frequency of the vibration system by applying a liquid droplet containing a resin material on the plate surface of the movable plate,
A first step of measuring a resonance frequency f ₁ of the vibration system;
Based on the measurement result of the first step, a combination of the droplet application position on the plate surface of the movable plate, the liquid type of the droplet applied to the application position, and the number of droplets is obtained, and the liquid In the seed, a second step of selecting at least two or more of a plurality of liquids with different liquid types including the resin material;
A third step of curing or solidifying the droplet after applying the droplet on the plate surface of the movable plate based on the combination obtained in the second step ;
Each of the plurality of liquids has different specific gravity when cured or solidified,
The second step forms a mass piece by applying a predetermined weight of the liquid droplet of the liquid to a predetermined position of the movable plate by the liquid droplet applying unit, and solidifying. the inertia moment is of the rotational axis about the movable plate of the mass piece, a step of determining a resonant frequency f ₂ of the vibration system having the above movable plate said mass piece is formed,
The moment of inertia Is, on the basis of the resonance frequency f ₁ and the resonance frequency f _2, the step of determining the moment of inertia I about the central axis of rotation of the movable plate, and a torsion spring constant K of the pair of connecting portions When,
The moment of inertia Is, on the basis of the moment of inertia I and the torsional spring constant K, the resonance frequency f _2, the increment ΔI of inertia required to match the resonance frequency f ₀ of the vibration system of the object The desired process;
And a step of determining a combination of the droplet application position on the movable plate, the liquid type of the droplet applied to the application position, and the number of droplets based on the obtained increase amount ΔI. And
Thereby, the resonance frequency of the vibration system can be adjusted extremely efficiently and accurately.

In the resonance frequency adjusting method of the present invention, in the second step, a position distal to the rotation center axis of the movable plate on the plate surface of the movable plate is preferentially set as the droplet application position. Is preferred.
As a result, an appropriate number of liquids necessary for adjusting the resonance frequency of the vibration system can be reduced, and the resonance frequency of the vibration system can be adjusted extremely efficiently.

In the resonance frequency adjusting method of the present invention, in the second step, a position close to a line segment passing through the center of gravity of the movable plate and orthogonal to the rotation center axis is preferentially set as the droplet application position. It is preferable to do.
Thereby, the center of gravity of the movable plate can be kept substantially at the center on the rotation center axis in a plan view of the movable plate. As a result, it is possible to provide the vibration system having extremely excellent rotation characteristics.

In the resonance frequency adjusting method of the present invention, it is preferable that in the second step, the liquid having a heavy specific gravity is preferentially applied among the plurality of liquids.
Thereby, the number of droplets required for adjusting the resonance frequency of the vibration system can be reduced, and the resonance frequency of the vibration system can be adjusted extremely efficiently.
In the resonance frequency adjusting method of the present invention, it is preferable that an upper limit value is set for the number of droplets that can be applied to the droplet application position.
In this way, by determining the upper limit value of the number of droplets at each application site, it is possible to prevent droplets from dripping or bleeding, and to adjust the resonance frequency of the vibration system very accurately.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of a resonance frequency adjusting device and a resonance frequency adjusting method of the invention will be described with reference to the accompanying drawings.
<First Embodiment>
First, a first embodiment of the resonance frequency adjusting device of the present invention will be described.
FIG. 1 is a perspective view showing a first embodiment of the resonance frequency adjusting device of the present invention, FIG. 2 is a partial cross-sectional perspective view showing an actuator in which the resonance frequency is adjusted by the resonance frequency adjusting device shown in FIG. 3 is a diagram showing an example of an AC voltage applied to the actuator shown in FIG. 2, FIG. 4 is a block diagram showing a measuring device included in the resonance frequency adjusting device shown in FIG. 1, and FIG. 5 is a resonance frequency shown in FIG. FIG. 6 is a top view of the movable plate provided in the actuator, FIG. 7 is a flowchart showing the operation of the resonance frequency adjusting device shown in FIG. 1, and FIG. It is a flowchart which shows the subroutine of S2 shown.
In the following, for convenience of explanation, the axes orthogonal to each other as shown in FIG. 1 are referred to as “X-axis”, “Y-axis”, and “Z-axis”, respectively, and the direction parallel to the X-axis is referred to as “X-axis direction”. The direction parallel to the Y axis is referred to as “Y axis direction”, and the direction parallel to the Z axis is referred to as “Z axis direction”.

  As shown in FIG. 1, the resonance frequency adjusting device 1 measures a resonance frequency of a stage 5 that fixes (holds) the actuator 6, a moving device 7 that moves the stage 5, and a vibration system 60 that the actuator 6 includes. A measuring device (measuring means) 2, a droplet applying device (droplet applying device) 4 capable of applying a plurality of liquid droplets onto the plate surface of the movable plate 611 provided in the actuator 6, and a measuring device 2 And a control unit (control means) 3 for controlling the operation of the droplet applying device 4 based on the measurement result.

First, the actuator 6 whose resonance frequency is adjusted by the resonance frequency adjusting device 1 will be briefly described. In the following, for convenience of explanation, the front side of the paper in FIG. 2 is referred to as “up” and the back side of the paper is referred to as “down”.
As shown in FIG. 2, the actuator 6 includes a base 61 having a vibration system 60, a support substrate 62 that supports the base 61 via a bonding layer 63, and a counter substrate 64 that is bonded to the lower surface of the support substrate 62. And a pair of fixed electrodes 651 and 652 provided on the upper surface of the counter substrate 64.

The base 61 includes a movable plate 611, a support portion 612 for supporting the movable plate 611, and a pair of connecting portions 613 and 614 that connect the movable plate 611 and the support portion 612.
On the upper surface of the movable plate 611, a light reflecting portion 611a having light reflectivity is provided. Thereby, the actuator 6 can be used for MEMS application sensors such as an acceleration sensor and an angular velocity sensor, and optical devices such as an optical scanner, an optical switch, and an optical attenuator.
Such a movable plate 611 is supported by the support portion 612 via a pair of connecting portions 613 and 614.

Each of the pair of connecting portions 613 and 614 has a longitudinal shape and can be elastically deformed. Each of the connecting portions 613 and 614 connects the movable plate 611 and the support portion 612 so that the movable plate 611 can be rotated with respect to the support portion 612. Connecting portions 613, 614 of such a pair are provided coaxially with each other, the shaft as a rotation center axis X _1, is configured such that the movable plate 611 is pivoted relative to the support portion 612 ing.
The support portion 612 that supports the movable plate 611 via the pair of connection portions 613 and 614 has a frame shape and is provided so as to surround the outer periphery of the movable plate 611 in a plan view of the movable plate 611. ing.

The base 61 as described above is made of, for example, silicon as a main material, and a movable plate 611, a support portion 612, and a pair of connecting portions 613 and 614 are integrally formed.
The base 61 as described above is bonded to the support substrate 62 via the bonding layer 63.
Such a support substrate 62 is made of, for example, glass or silicon as a main material. The support substrate 62 has a frame shape and has substantially the same shape as the support portion 612 in plan view of the movable plate 611.

The bonding layer 63 formed between the support substrate 62 and the base body 61 is made of, for example, glass, silicon, or SiO ₂ as a main material.
A counter substrate 64 is bonded to the lower surface of the support substrate 62. The counter substrate 64 has a plate shape, and a pair of fixed electrodes 651 and 652 for rotating the movable plate 611 is provided on the upper surface thereof.
The pair of fixed electrodes 651 and 652 are provided on the upper surface of the counter substrate 64 so as to correspond to the movable plate 611 in plan view of the movable plate 611. The fixed electrode 651 and 652 of the pair in the plan view of the movable plate 611, so as to be spaced apart from each other through the rotation center axis _{X 1,} and symmetrical with respect to the rotation center axis _{X 1} It is provided as follows.

Such an actuator 6 is driven as follows.
First, the base 61 is grounded. Then, for example, a voltage as shown in FIG. 3A is applied to the fixed electrode 651 and a voltage as shown in FIG. 3B is applied to the fixed electrode 652. That is, the state where the voltage is applied only to the fixed electrode 651 and the state where the voltage is alternately applied only to the fixed electrode 652 are alternately repeated. Thereby, a state where an electrostatic attractive force (Coulomb force) is generated between the movable plate 611 and the fixed electrode 651, and a state where an electrostatic attractive force is generated between the movable plate 611 and the fixed electrode 652; Can be repeated alternately. As a result, it is possible to rotate the respective connecting portions 613, 614 of the pair of movable plate 611 by torsional deformation around the rotation center axis X _1. From this, it can be said that the vibration system 60 is constituted by the movable plate 611 and the pair of connecting portions 613 and 614.
Here, by making the frequency of the voltage applied to each of the pair of fixed electrodes 651 and 652 coincide with the resonance frequency of the vibration system 60, the movable plate 611 can be largely rotated.

The actuator 6 has been described above. Hereinafter, the resonance frequency adjusting device 1 for adjusting the resonance frequency of the vibration system 60 provided in the actuator 6 will be described in detail. As described above, the resonance frequency adjusting device 1 includes the stage 5 that fixes the actuator 6, the moving device 7 that moves the stage 5, the measuring device 2 that measures the resonance frequency of the vibration system 60, and the plate of the movable plate 611. A droplet applying device 4 that can apply a plurality of liquid droplets on the surface, and a control unit 3 that controls the operation of the droplet applying device 4 based on the measurement result of the measuring device 2 are provided. .
Such a resonance frequency adjusting device 1 operates the droplet applying device 4 to apply a droplet on the plate surface of the movable plate 611, and then solidifies or cures (hereinafter simply referred to as “solidification”). Te increases the moment of inertia around the rotation center axis X ₁ of the movable plate 611, and is configured to adjust the resonant frequency of the vibration system 60.

The moving device 7 is a device for moving the stage 5 in the X-axis direction in FIG. As shown in FIG. 1, the moving device 7 is connected to the control unit 3, and its operation is controlled by the control unit 3.
In the middle of the moving direction of the moving device 7, there are provided a measuring device 2 for measuring the resonance frequency of the vibration system 60 and a droplet applying device 4 for applying a droplet to the movable plate 611. . That is, the resonance frequency adjusting device 1 operates the moving device 7 with the actuator 6 fixed on the stage 5, measures the resonance frequency of the vibration system 60 with the measuring device 2, and moves the movable plate 611 with the droplet applying device 4. A plurality of liquid droplets are applied on the plate surface. Thereby, the resonance frequency of the vibration system 60 can be changed and adjusted very efficiently.
A stage 5 is provided on the moving device 7. As shown in FIG. 1, the stage 5 includes a base 51 fixed to the moving device 7 and a turntable 52 that can rotate with respect to the base 51.

  The turntable 52 is provided so as to face the upper surface of the base 51. The turntable 52 can rotate around the Z axis with respect to the base 51. Such a rotating disk 52 is connected to the control means 3, and its operation (rotational motion) is controlled by the control means 3. Moreover, the upper surface of the turntable 52 forms a surface parallel to the XY plane, and the actuator 6 is fixed on this surface. When the actuator 6 is fixed, the actuator 6 is set in a state where it can be driven to rotate.

  The measuring device 2 measures the resonance frequency of the vibration system 60 of the actuator 6 fixed on the stage 5. As shown in FIG. 4, such a measuring apparatus 2 includes a laser Doppler velocity (hereinafter simply referred to as “LDV”) 21 that measures the amplitude (that is, the rotation angle (deflection angle)) of the movable plate 611 of the actuator 6. And an FFT analyzer 22 for changing (setting) the frequency of the AC voltage applied to the fixed electrodes 651 and 652 of the actuator 6.

  As a method for measuring the resonance frequency of the vibration system 60, first, the frequency of the AC voltage applied to the fixed electrodes 651 and 652 is set to a predetermined value (for example, 1 Hz) by the FFT analyzer 22, and the AC voltage is set to the fixed electrode 651. , 652 to drive the actuator 6. Then, the LDV 21 irradiates the movable plate 611 (light reflecting portion 611a) with laser light, receives the reflected light, and measures the rotation angle of the movable plate 611. In this case, the amplitude of the movable plate 611 is actually measured by the LDV 21.

Next, the frequency of the AC voltage applied to the fixed electrodes 651 and 652 is changed to a predetermined high value by the FFT analyzer 22, the actuator 6 is driven at that frequency, and the rotation angle of the movable plate 611 is changed by the LDV 21. taking measurement.
Then, the rotation angle of the movable plate 611 is repeatedly measured until the frequency of the AC voltage applied to the fixed electrodes 651 and 652 reaches a predetermined value (for example, 32 KHz). From this measurement result, the resonance frequency of the vibration system 60 is obtained.

  Data of the resonance frequency of the vibration system 60 obtained by the measuring device 2 is sent to the control unit 3. The control unit 3 then applies the droplet application position on the plate surface of the movable plate 611, the liquid type applied to the application position, and the number of droplets so that the resonance frequency of the vibration system 60 matches the target resonance frequency. Find a combination of And the control part 3 controls the action | operation of the droplet application apparatus 4 so that application of a droplet may be performed on the calculated | required conditions (combination).

  The droplet applying device 4 is connected to the control unit 3, and its operation is controlled by the control unit 3. As shown in FIG. 5, such a droplet applying device 4 is supplied with liquid from a plurality of tanks 411, 412, and 413 that hold different liquids and tanks 411 to 413 through tubes 421 to 423, A droplet discharge unit 43 that discharges the liquid droplets and a position control device 44 that controls the position of the droplet discharge unit 43 are provided.

  Such a droplet discharge device 4 is configured to discharge droplets onto the upper surface of the movable plate of the actuator 6 (the surface on which the light reflecting portion 611a is provided). The upper surface of the movable plate 611 is exposed to the outside. Therefore, by configuring so as to apply droplets to the upper surface of the movable plate 611, the droplet applying device 4 can apply droplets onto the plate surface of the movable plate 611 very easily.

  Each of the plurality of types of liquids held in the tanks 411 to 413 includes different resin materials. Such a plurality of types of liquids have different specific gravities when solidified on the movable plate 611. Thus, since each liquid contains the resin material, the adhesiveness between the movable plate 611 and each liquid droplet can be made excellent. The resin material contained in each liquid is not particularly limited as long as it can be fixed on the plate surface of the movable plate 611, and various thermosetting resins and various thermoplastic resins can be suitably used. Each liquid has a viscosity that can be discharged from a nozzle.

  The droplet discharge unit 43 includes a nozzle (not shown) provided to discharge each liquid droplet in the Z-axis direction. The amount of droplets ejected from the nozzle is not particularly limited as long as the amount of inertia of the movable plate 611 can be finely adjusted. For example, although depending on the specific gravity of each liquid, the amount of droplets discharged from the nozzle is preferably about 0.1 pl to 50 pl, and more preferably 1 pl to 10 pl. Thereby, the moment of inertia of the movable plate 611 can be changed and adjusted very accurately. In the present embodiment, the discharge amount of the liquid droplets discharged from the nozzle is kept constant.

  The method for discharging liquid droplets from the nozzle is not particularly limited. For example, a configuration may be adopted in which liquid droplets are ejected from the nozzles by driving (vibrating) driving elements such as piezoelectric elements and electrostatic actuators. Alternatively, an electrothermal conversion element may be used as the drive element, and the liquid droplets may be ejected from the nozzles using the thermal expansion of the material by the electrothermal conversion element.

Further, the number of the nozzles is not particularly limited. For example, nozzles that discharge liquid droplets of different liquid types may be divided, or liquid droplets of different liquid types may be discharged from the same nozzle. Further, the number of nozzles that eject the same type of droplets may be one, or may be two or more. When a plurality of nozzles that discharge the same type of droplet are provided, the control unit 3 is configured to set (select) a nozzle that performs a discharge operation and a nozzle that does not perform a discharge operation from the plurality of nozzles. May be.
The position control device 44 moves the droplet discharge unit 43 along the Y-axis direction and the Z-axis direction according to a signal from the control unit 3. Further, the position control device 44 rotates the droplet discharge unit 43 around the Z axis in response to a signal from the control unit 3.

  On the other hand, the stage 5 to which the actuator 6 is fixed can be moved in the X-axis direction by the moving device 7 as described above, and the rotating disk 52 can be rotated around the Z-axis. Therefore, by using such a droplet applying device 4 and the stage 5, the relative positional relationship between the nozzle and the movable plate 611 can be freely changed, and the droplets can be very accurately placed on the movable plate 611. It can be given to the grant position.

The liquid droplets applied on the movable plate 611 are solidified by solidification means (not shown). Such a solidifying means is not particularly limited as long as the liquid droplets applied to the movable plate 611 can be solidified. For example, the droplets may be solidified by placing the movable plate 611 under reduced pressure and / or high temperature. Further, when the resin material contained in each liquid is an ultraviolet curable resin material, the liquid droplets applied to the movable plate 611 may be irradiated with ultraviolet rays.
The configuration of the resonance frequency adjusting device 1 has been described above.

Next, a method for adjusting the resonance frequency of the vibration system 60 (that is, the operation of the resonance frequency adjusting device 1) will be described with reference to FIGS. Hereinafter, for convenience of explanation, the position of the stage 5 when the actuator 6 is fixed to the stage 5 is referred to as a “first position”, and the position of the stage 5 when the resonance frequency of the vibration system 60 is measured by the measuring device 2. Is the “second position”, and the position of the stage 5 when the droplet applying device 4 applies the droplet onto the movable plate 611 is the “third position”. Further, the target resonance frequency of the vibration system 60 is “f ₀ ”.

  As shown in FIG. 7, such a resonance frequency adjusting method measures the resonance frequency of the vibration system 60 (S1) and, based on the measurement result of S1, each liquid on the plate surface of the movable plate 611. A step (S2) of obtaining a combination of a droplet application position, a liquid type applied to the application position, and the number of liquid droplets, and a droplet on the plate surface of the movable plate 611 based on the combination determined in S2. After the application, a step (S3) of curing or solidifying it is included.

First, the moving device 7 is operated to move the stage 5 to the first position. Then, the actuator 6 is fixed on the turntable 52 of the stage 5 and the actuator 6 is brought into a state in which the actuator 6 can be rotated. The actuator 6 is prefabricated to be slightly higher (design) with respect to the resonance frequency f ₀ the resonance frequency is the purpose of the vibration system 60.
Then, the moving device 7 is operated to move the stage 5 to the second position. Then, the measurement device 2 measures the resonance frequency of the vibration system 60 (hereinafter, this resonance frequency is referred to as “f ₁ ”). Since the measurement method is as described above, the description thereof is omitted. Data of the resonance frequency f ₁ of the vibration system 60 measured by the measuring device 2 is sent to the control unit 3 and stored.

  Next, the moving device 7 is operated to move the stage 5 to the third position. Then, the droplet discharge device 4 applies a droplet having a predetermined weight to a predetermined position on the plate surface of the movable plate 611, and solidifies the droplet (S201). The liquid type of the droplet is not particularly limited, and any one of a plurality of types (three types) of liquids held in the tanks 411 to 413 may be used, or a liquid different from these may be used. It may be used. Hereinafter, for convenience of explanation, the droplet solidified in this step may be referred to as a “mass piece”.

Thus, the predetermined position on the plate surface of the movable plate 611, by forming the weight of the mass piece predetermined moment of inertia around the rotation center axis X ₁ of the mass piece (hereinafter, This moment of inertia can be calculated as “I _S ”. Specifically, when the distance between the mass piece and the rotational axis X ₁ and R (m), the weight of the mass piece was M (kg), the moment of inertia I _S of the formula (1 below ).
I _S = M × R ² (kg · m ² ) (1)

Next, the moving device 7 is operated to move the stage 5 again to the second position. Then, the measurement device 2 measures the resonance frequency (hereinafter, this resonance frequency is referred to as “f ₂ ”) of the vibration system 60 in which the mass pieces are formed on the movable plate 611 (S202). Data of measured resonance frequency f ₂ is stored is transmitted to the control unit 3.
At this time, the control unit 3 stores data of the resonance frequency f ₀ , the resonance frequency f _1, and the resonance frequency f ₂ . Then, the control unit 3 uses the resonance frequency f ₁ and the resonance frequency f ₂ from the data of the three resonance frequencies f ₀ , f ₁ , and f ₂ to use the moment of inertia of the movable plate 611 constituting the vibration system 60 ( Hereinafter, this moment of inertia is referred to as “I”) and a torsion spring constant of the pair of connecting portions 613 and 614 (hereinafter, this spring constant is referred to as “K”) is obtained (S203). Specifically, by substituting the value of the resonance frequency f ₁ in Formula (2) below, similarly respectively substitutes the value of the value of the resonance frequency f ₂ and the moment of inertia I _S, in Equation (3) below To do. As a result, the moment of inertia I and the spring constant K can be obtained.
f ₁ = 1 / 2π√ (k / I) (2)
f ₂ = 1 / 2π√ {k / (I + I _S )} (3)

After obtaining the inertia moment I and the spring constant K in this way, an increase amount ΔI of the inertia moment I of the movable plate 611 necessary for making the resonance frequency f ₂ coincide with the resonance frequency f ₀ is calculated (S204). ). More specifically, the equation (4) below, to calculate the value of the resonance frequency f _0, the value of the spring constant K, the ΔI by substituting the value of the moment of inertia I _S.
f ₀ = 1 / 2π√ {k / (I + I _S + ΔI)} (4)

Next, based on the calculated ΔI, the control means 3 applies the droplet application position on the plate surface of the movable plate 611, the type of liquid applied to the application position, and the number of droplets (that is, the weight of the droplet). ). Hereinafter, how to obtain the combination of the application position, the type of liquid applied to the application position, and the number of droplets will be described. However, the sum of increments ΔI _A , ΔI _B , and ΔI _C of inertia moments, which will be described later, is greater than or equal to ΔI (that is, ΔI ≦ ΔI _A + ΔI _B + ΔI _C is satisfied).

As shown in FIG. 6, on the plate surface (upper surface) of the movable plate 611, a plurality of droplet application possible positions P _{1 to} P ₃₀ provided at different positions are defined. Such droplet application possible positions P _{1 to} P ₃₀ are not determined on the light reflecting portion 611a. Further, in the present embodiment, a total of 30 droplet applicationable positions are predetermined.
Such droplets can be imparted position _P 1 _{to P 30} has a plurality of line segments L1~L6 parallel to rotational axis _{X 1,} perpendicular to the rotational axis _{X 1} in plan view of the movable plate 611 It is located on the intersection with a plurality of line segments L7 to L11.

In line L1 to L6, the line segment L1 and the line segment L2, the line L3 and the line segment L4, each of the line segments L5 and the line segment L6, are symmetrical with respect to the rotational axis _{X 1.}
Line L7 is in plan view of the movable plate 611, passes through the center of gravity of the movable plate 611, a line segment which is perpendicular to the rotational axis X _1. The line segment L8 and the line segment L9, and the line segment L10 and the line segment L11 are symmetric with respect to the line segment L7.

An upper limit value (for example, 10 droplets) of the number of droplets that can be applied is determined for each of the droplet application possible positions P _{1 to} P ₃₀ . Such upper limit, the droplets can be imparted position P ₁ to P _30, it is set to be equal to each other. In this way, by determining the upper limit value of the number of droplets at each of the droplet application possible positions P _{1 to} P ₃₀ , it is possible to prevent droplets from dripping or bleeding, and to set the resonance frequency of the vibration system very accurately. Can be adjusted. However, different upper limit values may be set for the droplet application possible positions P _{1 to} P ₃₀ .

The control unit 3 applies (1) a distance (m) from each of the droplet application possible positions P _{1 to} P _{30 to} the rotation center axis X ₁ , and (2) applies each of the droplet application possible positions P _{1 to} P ₃₀ . It has data (information) regarding the upper limit of the number of droplets that can be transferred, and (3) the specific gravity of each liquid droplet when it solidifies on the movable plate 611. Therefore, if the control part 3 gives what number of droplets and what kind of liquid droplets to which liquid drop application possible position among the liquid drop application possible positions P _{1 to} P ₃₀ , the movable plate 611 corresponding thereto. It can be determined whether the amount of increase in the inertia moment is equal to ΔI. In the following, for convenience of explanation, for each of the three types of droplets, the droplet A, the droplet B, the droplet C, and the droplet having the highest specific gravity when solidified on the movable plate 611, in order, To do.

Specifically, first, the control unit 3 sets the upper limit value to each of the droplet application possible positions P _{1 to} P ₅ of the line segment L1 and the liquid droplet application possible positions P _{6 to} P ₁₀ on the line segment L2. equal number of drops of droplets a (i.e., the specific gravity when the Coca heaviest droplets) increase in moment of inertia around the rotation center axis X ₁ of the movable plate 611 in the case of imparting (hereinafter, this increase And “ΔI _A ”) and ΔI are compared (S205).

If [Delta] I is less than [Delta] I _A, the control unit 3 obtains droplet A to be imparted on the droplets grantable position P ₁ to P _10, the droplet B, and number each of the droplet of the droplet C . That is, if droplets A, droplets B, and droplets C are applied to each of the droplet application possible positions P _{1 to} P ₁₀ , the inertia moment of the movable plate 611 that is increased by that is equal to ΔI. Ask for. Then, based on the obtained number of droplets A, B, and C, each of droplet A, droplet B, and droplet C from droplet application possible positions P _{1 to} P _10. The application position and the number of droplets are determined (S206).

On the other hand, if [Delta] I is greater than [Delta] I _A, the control unit 3 is configured to select all of the droplet can be imparted position P ₁ to P ₁₀ as the assigned position of the droplet A, the liquid in all the assigned position selected The number of drops is set as the upper limit (S207).
Then, each of the droplet can be imparted positions on the line segment L3 _P 11 _{to P 15} and the line segment on the L4 droplet grantable position _P 16 _{to P 20,} giving droplets A of the upper limit value is equal to the number of drops increase in moment of inertia around the rotation center axis _{X 1} of the movable plate 611 in the case of (hereinafter, this increment is referred to as "[Delta] I _B") and comparing the _{(ΔI-ΔI a) (S208} ).

When (ΔI−ΔI _A ) is smaller than ΔI _B , the control unit 3 sets the droplet A, droplet B, and droplet C to be applied on the droplet application possible positions P _{11 to} P ₂₀ . Obtain the number of each droplet. That is, if droplets A, droplets B, and droplets C are applied to each of the droplet application possible positions P _{11 to} P ₂₀ , the inertia moment of the movable plate 611 increases by (ΔI−ΔI). _A ) is determined to be equal. The droplets obtained A, droplet B, and based on the respective number of drops of the liquid droplet C, respectively from the droplets grantable position _P 11 _{to P 20} droplet A, the droplet B, the droplet C And the number of droplets at the selected application position is determined (S209). Regarding the method of determining the application positions of the liquid droplets A to C and the number of liquid droplets at the application positions from the liquid droplet application possible positions P _{11 to} P _20, from the liquid drop application possible positions P _{1 to} P ₁₀ , Since it is the same as the means for determining each application position of the droplets A to C and the number of droplets at the application position, description thereof is omitted.

On the other hand, if (ΔI-ΔI _A) is larger than [Delta] I _B, the control unit 3 is configured to select all of the droplet can be imparted position _P 11 _{to P 20} as the assigned position of the droplet A, all the selected Is set to the upper limit (S210).
Here, the droplets A having the number of droplets equal to the upper limit value are applied to the droplet application possible positions P _{21 to} P ₂₅ on the line segment L5 and the droplet application possible positions P _{26 to} P ₃₀ of the line segment L6. In this case, the increase amount of the moment of inertia of the movable plate 611 (hereinafter referred to as “ΔI _C ”) is larger than {ΔI− (ΔI _A + ΔI _B )}.

Therefore, the control unit 3 obtains the number of droplets A, B, and C to be applied on the droplet application possible positions P _{21 to} P ₃₀ . That is, if droplets A, droplets B, and droplets C are applied to each of the droplet application possible positions P _{21 to} P ₃₀ , the inertia moment of the movable plate 611 is increased by {ΔI− ( ΔI _A + ΔI _B )}. Then, based on the obtained number of droplets A, B, and C, each of droplet A, droplet B, and droplet C from the droplet application possible positions P _{21 to} P _30. Is selected, and the number of droplets at the selected application position is determined (S211). Regarding the method of determining the application positions of the liquid droplets A to C and the number of liquid droplets at the application positions from the liquid droplet application possible positions P _{21 to} P ₃₀ , the liquid application positions P _{1 to} P ₁₀ Since it is the same as the means for determining each application position of the droplets A to C and the number of droplets at the application position, description thereof is omitted.

From here, the above-mentioned S206 (the step of determining the application positions and the number of liquid droplets A, B, and C from the droplet application possible positions P _{1 to} P ₁₀ ) will be described in detail. Since S206, S209, and S211 are similar to each other, S206 will be described as a representative, and description of S209 and S211 will be omitted. In addition, hereinafter, for convenience of description, the separation distance between the droplet application possible positions P _{1 to} P ₁₀ and the rotation center axis X ₁ is X (m), and the discharge amounts of the droplet A, the droplet B, and the droplet C are as follows. , _{M A} , m _B , m _C (pl), and the specific gravity of droplet A, droplet B, and droplet C solidified on the movable plate 611 is ρ _A , ρ _B , ρ _C (g / cm ³ ). However, in the present embodiment, as described above, the relationship of m _A = m _B = m _C is satisfied. Each of n _A , n _B , and n _C , which will be described later, is an integer of 0 or more.

Control unit 3, first, when the droplet A and n _A droplet applying, obtaining or increase of moment of inertia around the rotation center axis X ₁ of the movable plate 611 is equal to [Delta] I. That is, it is determined whether or not the following expression (5) is satisfied.
_{(M A ρ A n A)} X 2 = ΔI ‥‥‥ (5)
When satisfying the relationship of the expression (5), the number of droplets A is n _A, and the number of droplets B and C is 0, respectively.

On the other hand, when the relationship of Expression (5) is not satisfied, the largest value among the values of n _A satisfying Expression (6) shown below (this value is referred to as “n _AMAX ”) is the liquid of the droplet A. The number of drops. Here, as a matter of course, there may be a case where n _AMAX = 0.
_{(M A ρ A n A)} X 2 <ΔI ‥‥‥ (6)
Then, if the control unit 3, a droplet A n _AMAX droplets when the droplets B and n _B droplets applied, the amount of increase in moment of inertia around the rotation center axis X ₁ of the movable plate 611 is equal to ΔI Ask for. That is, it is determined whether or not the following expression (7) is satisfied.
_{(M A ρ A n AMAX)} X 2 + (m B ρ B n B) X 2 = ΔI ‥‥‥ (7)
When satisfying the relationship of Expression (7), the number of droplets A is n _AMAX , the number of droplets B is n _B, and the number of droplets C is 0.

On the other hand, when the relationship of Expression (7) is not satisfied, the largest value among n _B values satisfying Expression (8) shown below (this value is referred to as “n _BMAX ”) is the liquid of the droplet B. The number of drops.
_{(M A ρ A n AMAX)} X 2 + (m B ρ B n B) X 2 <ΔI ‥‥‥ (8)
Then, the control unit 3, _{n AMAX} drop droplet A, _{n BMAX} droplet droplets B, when the droplets C was _{n C} drops applied, the moment of inertia around the rotation center axis _{X 1} of the movable plate 611 Determine whether the increase is equal to ΔI. That is, it is determined whether or not the following formula (9) is satisfied.
_{(M A ρ A n AMAX)} X 2 + (m B ρ B n BMAX) X 2 + (m C ρ C n C) X 2 = ΔI ‥‥‥ (9)
When satisfying the relationship of Expression (9), the number of droplets A is n _AMAX , the number of droplets B is n _BMAX, and the number of droplets C is n _C.

On the other hand, when the relationship of the formula (9) is not satisfied, the largest value among the values of n _C satisfying the following formula (10) (this value is referred to as “n _CMAX ”) is the liquid of the droplet C. The number of drops. That is, the number of droplets A is n _AMAX , the number of droplets B is n _BMAX, and the number of droplets C is n _CMAX .
_{(M A ρ A n AMAX)} X 2 + (m B ρ B n BMAX) X 2 + (m C ρ C n C) X 2 <ΔI ‥‥‥ (10)
In this way, the number of droplets A, B, and C to be applied on the droplet application possible positions P _{1 to} P ₁₀ is calculated.

As described above, the control unit 3 is configured to preferentially apply a liquid having a heavy specific gravity when separated from the three types of liquids. Thereby, the number of droplets necessary for adjusting the resonance frequency of the vibration system 60 can be reduced, and the resonance frequency of the vibration system 60 can be adjusted extremely efficiently.
Then, based on the obtained number of droplets A to C, the controller 3 applies the droplet A application position from the droplet application possible positions P _{1 to} P ₁₀ , and the application position of the droplet B. And the application position of the droplet C are selected. At this time, for example, only one type of droplets A to C may be applied to each of the droplet application possible positions P _{1 to} P ₁₀ , or two types of droplets A to C may be applied. It is good also as providing the above droplet.

Further, the control unit 3 selects the application positions of the liquid droplets A to C from the liquid drop application possible positions P _{1 to} P ₁₀ so as to be as symmetric as possible with respect to the rotation center axis X ₁ . Thus, while keeping the center of gravity of the movable plate 611 on the rotational axis X _1, it is possible to adjust the resonance frequency of the vibration system 60. That is, it is possible to provide the actuator 6 having extremely excellent rotation characteristics.

In addition, the control unit 3 passes through the center of gravity of the movable plate 611 among the droplet application possible positions P _{1 to} P ₅ on the line segment L1 and is perpendicular to the rotation center axis X ₁ (that is, the line segment). L7) is preferentially selected as the grant position. That is, the controller 3 first selects the droplet application possible position P ₁ as the application position, then selects either P ₂ or P ₃ as the application position, and then selects the other of P ₂ or P ₃ . Is selected as the application position, then either P ₄ or P ₅ is selected as the application position, and finally the other of P ₄ or P ₅ is selected as the application position.
Further, as the control unit 3, passes through the center of gravity of the movable plate 611, and a line segment perpendicular to the rotational axis X ₁ (i.e., the line segment L7) becomes possible symmetrical with respect to, each droplet A~C Application position and the number of droplets at the application position.

For example, a case will be described in which the upper limit value of the number of droplets at each of the droplet application possible positions P _{1 to} P ₅ is 10 drops, n _A = 8 drops, n _B , = 6 drops, and n _C = 13 drops. In this case, for example, the control unit 3, first, the selecting droplets grantable position P ₁ as the assigned position of the droplet A, and applying 8 drops of droplet A into droplets grantable position P ₁ . Next, the control unit 3 selects the droplet application possible positions P ₂ and P ₃ as the application position of the liquid droplet B, and attaches four liquid droplets B to each of the liquid droplet application possible positions P ₂ and P ₃ . It will be given one by one. Next, the control unit 3 is configured to select the droplet grantable position P _4, P ₅ as the assigned position of the droplets C, 6 drops of liquid droplets C into droplets grantable position P _4, droplet P ₅ 7 drops of C will be applied. Thus, it is possible to maintain in the plan view of the movable plate 611, the center of gravity of the movable plate 611 at substantially the center on the rotational axis X _1. As a result, it is possible to provide the actuator 6 having extremely excellent rotation characteristics. Since the droplet application possible positions P _{6 to} P ₁₀ are the same as the liquid droplet application possible positions P _{1 to} P ₅ , description thereof is omitted.

Further, for example, when the upper limit value of the number of droplets at each droplet application possible position P _{1 to} P ₅ is 10 droplets, n _A = 1 droplet, n _B = 2 droplets, n _C = 3 droplets , the control unit 3 selects the droplet grantable position P ₁ as the assigned position of the droplet a through C, on droplet grantable position P1, 1 drop of droplet a, the droplet B 2 drops of liquid Three drops C may be applied.
In this way, the control unit 3 obtains a combination of the droplet application position, the liquid type and the number of droplets at the application position.

As described above, the control unit 3, out of the plurality of droplet grantable position P ₁ to P _30, preferentially droplets A~ droplets grantable position located distal to the rotational axis X ₁ It is configured so as to select as a position for giving C. As a result, the appropriate number of liquids necessary for adjusting the resonance frequency of the vibration system 60 can be reduced, and the resonance frequency of the vibration system 60 can be adjusted extremely efficiently and economically.
Then, based on the determined combination, the droplet applying device 4 is operated to apply droplets on the plate surface of the movable plate 611, and then solidify by the solidification means (not shown) (S3).
The resonance frequency adjusting device 1 adjusts the resonance frequency of the vibration system 60 as described above.

By using such a resonance frequency adjusting device 1 (that is, a resonance frequency adjusting method), the resonance frequency of the vibration system 60 can be adjusted extremely efficiently and accurately.
In addition, since the upper limit value is set for the number of droplets at the droplet application position selected from the droplet application possible positions P _{1 to} P ₃₀ , it is possible to prevent droplet dripping or bleeding. The resonance frequency of the vibration system 60 can be adjusted very accurately.

In the present embodiment, 30 positions where droplets can be applied are determined, but if the resonance frequency f ₁ of the vibration system 60 can be adjusted to the target resonance frequency f ₀ , the number of positions where droplets can be applied. Is not particularly limited. The number of positions where droplets can be applied includes (1) the upper limit value of the number of droplets at each application position, (2) the specific gravity of each of the droplets A to C, and (3) the expected actuator manufacturing stage. It is preferable to set the number so that the deviation of the resonance frequency of the vibration system 60 can be sufficiently adjusted in consideration of the deviation of the resonance frequency.

  Further, in the present embodiment, description has been given of adjusting the resonance frequency of the vibration system 60 using three types of liquid droplets having different specific gravities, but the resonance of the vibration system 60 using a plurality of liquids having different specific gravities. For example, two liquids having different specific gravity when solidified may be used, or four or more liquids having different specific gravity when solidified may be used. May be.

Further, in the present embodiment, among the control unit 3 of the plurality of droplet grantable position P ₁ to P _30, preferentially liquid droplets grantable position located distal to the rotational axis X ₁ Although what was selected as an application position of droplet A-C was demonstrated, it is not limited to this. For example, the control unit 3 selects an applying position of the droplet A from the droplets grantable position _P 1 _{to P 10} on the line segment L1, L2, the applying position of the droplet B segment L3, L4 on the liquid It may be configured to select from the droplet application possible positions P _{11 to} P ₂₀ and select the application position of the liquid droplet C from the liquid droplet application possible positions P _{21 to} P ₃₀ on the line segments L5 and L6. In the case of such a selection method, the droplet A having the largest specific gravity among the droplets A to C is applied onto the droplet application possible positions P _{1 to} P ₁₀ that are located farthest from the rotation center axis X _1. Will be. Therefore, the moment of inertia of the movable plate 611 can be greatly increased. Further, the applying on the droplet grantable position P ₂₁ to P ₃₀ positioned closest to the proximal most specific gravity smaller droplets C from the pivoting central axis X ₁ of the droplet A through C. Therefore, the moment of inertia of the movable plate 611 can be increased extremely minutely. That is, the resonance frequency of the vibration system 60 can be adjusted over a wide range and extremely accurately.

Second Embodiment
Next, a second embodiment of the resonance frequency adjusting device of the present invention will be described.
FIG. 9 is a perspective view showing a second embodiment of the resonance frequency adjusting device of the present invention, and FIG. 10 is a bottom view of a movable plate provided in an actuator whose resonance frequency is adjusted by the resonance frequency adjusting device shown in FIG. is there. For convenience of explanation, the front side in FIG. 9 is referred to as “upper” and the rear side in FIG. 9 is referred to as “lower”.

Hereinafter, the resonance frequency adjustment device 1A of the second embodiment will be described focusing on the differences from the resonance frequency adjustment device 1 of the first embodiment described above, and description of similar matters will be omitted.
The resonance frequency adjusting device 1A according to the second embodiment of the present invention is configured to apply droplets to the lower surface of the movable plate 611 (the surface opposite to the surface on which the light reflecting portion is provided). Except for this, it is substantially the same as the resonance frequency adjusting apparatus 1 of the first embodiment. The same reference numerals are given to the same components as those in the first embodiment described above.

As shown in FIG. 9, the resonance frequency adjusting apparatus 1A has the same configuration as the resonance frequency adjusting apparatus 1 of the first embodiment except that the configuration of the stage 5A is different.
The stage 5 </ b> A includes a base 51 provided on the moving unit 5, a rotating plate 52 that can rotate about the Z axis with respect to the base 51, and a fixing member 53 </ b> A provided on the rotating plate 52. Yes.
The fixing member 53A is a member for supporting the base body 61 of the actuator 6. Here, when fixing the base body 61, the base body 61 is fixed so that the back surface of the movable plate 611 provided on the base body 61 (the surface opposite to the light reflecting portion 611a) faces upward in FIG. By fixing the base body 61 in this way, droplets can be applied to the back surface of the movable plate 611.
The fixing member 53A is provided with a driving means (not shown) for driving the vibration system 60 provided in the base body 61. Since the base 61 fixed to the fixing member 53A is not provided with driving means such as a fixed electrode for driving the vibration system 60, vibration is generated on the stage 5 by providing the fixing means 53A with driving means. The system 60 can be driven.

As described above, the base body 61 is individualized to the fixed member 53A so that the back surface of the movable plate 611 faces upward. Therefore, the droplet is applied to the back surface of the movable plate 611 by the operation of the droplet applying device 4. The method for applying the droplets on the back surface of the movable plate 611 is the same as that in the first embodiment, and thus the description thereof is omitted.
A light reflecting portion 611 a is not provided on the back surface of the movable plate 611. For this reason, as shown in FIG. 10, a droplet application possible position P is defined on the back surface over the entire area. Therefore, the resonance frequency of the vibration system 60 can be accurately adjusted in a wide range. In addition, the movable plate 611 can be downsized as compared with the case where droplets are applied to the surface of the movable plate 611 where the light reflecting portion 611a is provided.
Also by such 2nd Embodiment, the effect similar to 1st Embodiment can be exhibited.

The resonance frequency adjusting device and the resonance frequency adjusting method of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this. For example, in the resonance frequency adjusting device of the present invention, the configuration of each part can be replaced with any configuration that exhibits the same function, and any configuration can be added.
In the above-described embodiment, the amount (mass) of droplets applied to each droplet applicationable position is controlled by the number of droplets. However, the present invention is not limited to this. For example, the control unit The amount of droplets ejected from the nozzles may be controlled by the above-described method, and a predetermined amount of droplets may be applied by one ejection.

  In the embodiment described above, the intersection point between a plurality of line segments parallel to each other and a plurality of line segments orthogonal to the line segment is determined as the droplet application possible position. The method is not limited to this. For example, a plurality of droplet application possible positions may be randomly determined on the upper surface of the movable plate. In addition, a plurality of recesses or the like may be formed in advance on the movable plate, and the control unit may determine the recesses as positions where droplets can be applied.

It is a perspective view which shows 1st Embodiment of the resonant frequency adjustment apparatus of this invention. It is a fragmentary sectional perspective view which shows the actuator by which the resonance frequency is adjusted with the resonance frequency adjustment apparatus shown in FIG. It is a figure which shows an example of the alternating voltage applied to the actuator shown in FIG. It is a block diagram explaining the measuring apparatus with which the resonant frequency adjustment apparatus shown in FIG. 1 is provided. It is a perspective view which shows the droplet application apparatus with which the resonant frequency adjustment apparatus shown in FIG. 1 is provided. It is a top view of the movable plate with which an actuator is provided. It is a flowchart which shows the action | operation of the resonant frequency adjustment apparatus shown in FIG. It is a flowchart which shows the subroutine of S2 shown in FIG. It is a perspective view which shows 2nd Embodiment of the resonant frequency adjustment apparatus of this invention. FIG. 10 is a bottom view of a movable plate provided in an actuator whose resonance frequency is adjusted by the resonance frequency adjusting device shown in FIG. 9.

Explanation of symbols

  1, 1A ... Resonance frequency adjusting device 2 ... Measuring device (measuring means) 21 ... Laser Doppler velocity (LDV) 22 ... FFT analyzer 3 ... Control unit (control means) 4 ... Droplet applicator (droplet applicator) 411 to 413 ... tank 421 to 423 ... tube 43 ... droplet ejector 44 ... position controller 5, 5A ... stage 51 ... Base 52 ... Turntable 53A ... Fixing member 6 Actuator 60 ... Vibration system 61 ... Base 611 ... Movable plate 611a ... Reflection part 612 ... Support part 613 , 614 ... Connection part 62 ... Support substrate 63 ... Bonding layer 64 ... Counter substrate 651, 652 ... Fixed electrode 7 ... Moving device

Claims (12)

Measuring a resonance frequency of a vibration system having a movable plate and a pair of connecting portions connected to the movable plate and configured to rotate the movable plate while twisting and deforming the pair of connecting portions. Measuring means;
On the plate surface of the movable plate, a droplet applying unit capable of applying each droplet of a plurality of liquids having different liquid types including a resin material;
Based on the measurement results of the measuring means, the application position of the droplets on the plate surface of the movable plate, the combination of the liquid type and the number of liquid droplets applied to the application position, and at least two types of the liquid types Control means for controlling the droplet applying means so as to execute the application of the droplet under the conditions obtained using
Each of the plurality of liquids has different specific gravity when cured or solidified,
The measuring means, the resonance frequency f ₁ of the oscillating system, in a defined position of the movable plate by the droplet applying means, a defined the droplet by weight imparted defined of said liquid to solidify And measuring the resonance frequency f _{2 of the} vibration system having the mass piece formed by
The control means obtains an inertia moment Is of the mass piece around the rotation center axis of the movable plate, and based on the inertia moment Is, the resonance frequency f ₁ and the resonance frequency f ₂ , An inertia moment I about the rotation center axis and a torsion spring constant K of the pair of connecting portions are obtained, and further, the resonance frequency is calculated based on the inertia moment Is, the inertia moment I, and the torsion spring constant K. The amount of inertia moment increase ΔI necessary to match f ₂ with the target resonance frequency f ₀ of the vibration system is obtained, the combination is obtained based on the obtained amount of increase ΔI, and the obtained combination is obtained. Activating the droplet applying means based on
After applying the droplets of at least two or more kinds of the liquid onto the plate surface of the movable plate by the droplet applying means, the liquid droplets are cured or solidified, and the inertia around the rotation center axis of the movable plate A resonance frequency adjusting device configured to adjust a resonance frequency of the vibration system by increasing a moment.   The said control means is comprised so that the site | part distal from the rotation center axis | shaft of the said movable plate on the board surface of the said movable plate may be preferentially made into the application position of the said droplet. Resonance frequency adjustment device.   The control unit is configured to preferentially set a position near the line segment passing through the center of gravity of the movable plate and orthogonal to the rotation center axis as the droplet application position. The resonance frequency adjusting apparatus as described.   The resonance frequency adjusting apparatus according to any one of claims 1 to 3, wherein the control means is configured to preferentially apply a liquid having a high specific gravity among the plurality of liquids.   The resonance frequency adjusting apparatus according to any one of claims 1 to 4, wherein an upper limit is set for the number of droplets that can be applied to the droplet application position. A light reflecting portion having light reflectivity is provided on one surface of the movable plate,
The said control part is comprised so that the provision site | part which provides the said droplet may be determined on the surface on the opposite side to the surface in which the said light reflection part of the said movable plate is provided. The resonance frequency adjusting device according to any one of the above. A light reflecting portion having light reflectivity is provided on one surface of the movable plate,
6. The resonance according to claim 1, wherein the control unit is configured to determine an application site of the droplet on a surface of the movable plate on which the light reflecting unit is provided. Frequency adjustment device. A resonance frequency of a vibration system having a movable plate and a pair of coupling portions connected to the movable plate and configured to rotate the movable plate while twisting and deforming the pair of coupling portions, A resonance frequency adjustment method for adjusting by applying a liquid droplet containing a resin material on the plate surface of the movable plate,
A first step of measuring a resonance frequency f ₁ of the vibration system;
Based on the measurement result of the first step, a combination of the droplet application position on the plate surface of the movable plate, the liquid type of the droplet applied to the application position, and the number of droplets is obtained, and the liquid In the seed, a second step of selecting at least two or more of a plurality of liquids with different liquid types including the resin material;
A third step of curing or solidifying the droplet after applying the droplet on the plate surface of the movable plate based on the combination obtained in the second step ;
Each of the plurality of liquids has different specific gravity when cured or solidified,
The second step forms a mass piece by applying a predetermined weight of the liquid droplet of the liquid to a predetermined position of the movable plate by the liquid droplet applying unit, and solidifying. the inertia moment is of the rotational axis about the movable plate of the mass piece, a step of determining a resonant frequency f ₂ of the vibration system having the above movable plate said mass piece is formed,
The moment of inertia Is, on the basis of the resonance frequency f ₁ and the resonance frequency f _2, the step of determining the moment of inertia I about the central axis of rotation of the movable plate, and a torsion spring constant K of the pair of connecting portions When,
The moment of inertia Is, on the basis of the moment of inertia I and the torsional spring constant K, the resonance frequency f _2, the increment ΔI of inertia required to match the resonance frequency f ₀ of the vibration system of the object The desired process;
And a step of determining a combination of the droplet application position on the movable plate, the liquid type of the droplet applied to the application position, and the number of droplets based on the obtained increase amount ΔI. Resonance frequency adjustment method.   9. The resonance frequency adjusting method according to claim 8, wherein, in the second step, a position distal to the rotation center axis of the movable plate on the plate surface of the movable plate is preferentially set as the droplet application position. .   The said 2nd process WHEREIN: The position close to the line segment which passes through the gravity center of the said movable plate and is orthogonal to the said rotation center axis is made into the application position of the said droplet preferentially. Resonance frequency adjustment method.   The resonance frequency adjusting method according to any one of claims 8 to 10, wherein in the second step, the liquid having a high specific gravity among the plurality of liquids is preferentially applied.   12. The resonance frequency adjusting method according to claim 8, wherein an upper limit value is set for the number of droplets that can be applied to the droplet application position.

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